CN113340567B - System and method for testing angular magnification and consistency of beam-expanding optical system - Google Patents
System and method for testing angular magnification and consistency of beam-expanding optical system Download PDFInfo
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Abstract
The invention relates to a system and a method for testing angular magnification and consistency of a beam-expanding optical system, which comprises the following steps: in an initial state, the optical system is arranged and the image detection device is arranged on an emergent light path of the collimator and keeps coaxial when the base body rotary table and the U-shaped rotary table are both in 0-degree positions, light emitted by the collimator is irradiated on the target, and an image of the target enters the image detection device after passing through the optical system and is displayed on an interface of the image detection device; by adjusting the directions of the rotating shaft of the base body turntable and the rotating shaft of the optical system mounting rack, the incidence angles in different directions and different sizes in the range of the full input field of the optical system to be detected can be obtained; under different incident angles, the angle of the rotating shaft of the U-shaped turntable corresponding to the condition that the centers of the target image displayed on the interface of the image detection device and the display interface are superposed is the emergent angle of the detected optical system under the corresponding incident angle, and the ratio of the incident angle to the emergent angle is the angular magnification of the obtained optical system.
Description
Technical Field
The invention relates to a system and a method for testing the angular magnification and the angular magnification consistency of an optical system, which are suitable for an angular beam expanding optical system and belong to the technical field of photoelectric detection.
Background
The angle beam expanding optical system is usually applied to a sensor for deep space exploration and a rendezvous and docking sensor, and has the functions of expanding the divergence angle of scanning input laser, realizing large-area light beam scanning, and always forming a fixed ratio of the emergent light angle and the incident light angle within the range of a full input field of view. This ratio is called angular magnification or angular magnification.
For such optical systems, angular magnification and consistency of angular magnification are key performance indexes, and accurate measurement data of angular magnification and consistency thereof in different directions and at different incident angles within a full input field of view are required.
At present, most of research aiming at the optical systems stays in the design field, such as the design of the optical system with certain angular magnification, the reduction of the size of the optical system, and the like. For the test method of the angular amplification rate, the research is few, the national military standard is basically used, and the angular amplification rate is still in the axial direction.
In the measurement of the optical system parameters of the national military standard GB/T10987-2009, an angular magnification test method is specified, and the magnification is calculated by measuring the field angle of an image, and the method comprises the following steps: aligning the optical system to be measured to the collimator, installing a reticle on the focal plane of the collimator objective, and aligning the line-to-line spacing y and the objective focal length f on the reticle 0 ' precision in advanceWhen the measurement is carried out, the object space view angle (0.5 y/f) 0 ') it is known to measure the corresponding field angle of view directly at the image side of the system under test, using a telescope with an angular reticle. The angular magnification is calculated from the ratio of the image field angle to the object field angle. However, the method mainly has the following defects:
(1) The method only aims at the direction on the shaft, namely the measured optical system is coaxial with the light source. The accurate measurement of angular amplification ratios in different directions and at different incident angles within the range of the full input field of view cannot be realized;
(2) The method can only obtain one angular magnification value in the axial direction, and cannot realize the analysis of the angular magnification consistency of the optical system;
(3) The object space angle is obtained through secondary calculation, the image space angle is read through visual observation, the error is large, and the method cannot be applied to the condition with high precision requirement.
Disclosure of Invention
The invention solves the technical problems that: the system overcomes the defects of the prior art, provides a high-precision testing system for angular amplification, provides a high-precision testing method for angular amplification suitable for any angle and direction aiming at the system, solves the problem that the current national standard testing method is only suitable for the on-axis direction, and realizes the accurate measurement of the angular amplification in different directions and different incident angles within the full input view field range;
the invention further solves the technical problem of analyzing and evaluating the consistency of the angular amplification ratios of all directions in the full field range of the beam expanding optical system.
The technical scheme of the invention is as follows: an angular magnification testing system of a beam expanding optical system comprises an air floatation platform, a collimator containing a target, a substrate rotary table, an optical system mounting frame, an image detection device, a three-dimensional mobile platform and a U-shaped rotary table;
the collimator and the matrix rotary table are arranged on the air floatation platform, the collimator is parallel to the upper surface of the air floatation platform, the rotary shaft of the matrix rotary table is vertical to the upper surface of the air floatation platform, and the matrix rotary table can continuously rotate around the rotary shaft; the optical system mounting rack is arranged on the base body turntable, a rotating shaft of the optical system mounting rack is parallel to the base body turntable, and the optical system to be tested is fixedly arranged on the optical system mounting rack; the optical axis of the optical system to be measured is parallel to the upper surface of the air floatation platform and is on the same plane with the optical axis of the collimator; the U-shaped rotary table is arranged on the base body rotary table, a rotating shaft of the U-shaped rotary table is perpendicular to the base body rotary table and is coplanar with the mounting surface of the optical system to be measured, and the U-shaped rotary table can rotate around the rotating shaft at a certain angle; the three-dimensional moving platform is fixedly arranged on the U-shaped rotary table, the X axis and the Y axis of the three-dimensional moving platform are parallel to the upper surface of the U-shaped rotary table, and the Z axis of the three-dimensional moving platform is vertical to the upper surface of the U-shaped rotary table; the image detection device is fixedly arranged on the three-dimensional mobile platform;
in an initial state, the optical system is arranged and the image detection device is arranged on an emergent light path of the collimator and keeps coaxial when the base body rotary table and the U-shaped rotary table are both in 0-degree positions, light emitted by the collimator is irradiated on the target, and an image of the target enters the image detection device after passing through the optical system and is displayed on an interface of the image detection device;
by adjusting the directions of the rotating shaft of the base body turntable and the rotating shaft of the optical system mounting rack, the incidence angles in different directions and different sizes in the range of the full input field of the optical system to be detected can be obtained; under different incident angles, the angle of the rotating shaft of the U-shaped turntable corresponding to the coincidence of the target image displayed on the interface of the image detection device and the center of the display interface is the emergent angle of the optical system to be detected under the corresponding incident angle, and the ratio of the incident angle to the emergent angle is the angular magnification of the optical system.
The testing system also comprises an optical filter used for filtering the emergent light of the collimator tube, so that the spectrum of the emergent light after filtering falls into the spectrum working range of the tested optical system.
Preferably, the target is a cross hair.
Preferably, the base body rotary table is a numerical control rotary table, and the control precision is superior to 0.0001 degree.
Preferably, the U-shaped rotary table is a numerical control rotary table, and the control precision is 0.0001 degree.
Preferably, the image detection device comprises a microscope objective, a CCD and a data acquisition and processing device;
the microscope objective is used for converging emergent light of the optical system to be detected on a CCD image surface;
the CCD is used for converting the optical signal collected by the image surface into an electric signal and acquiring a complete digital image signal; and the data acquisition and processing device is used for acquiring the digital image signals of the CCD, displaying the digital image signals on a screen and calculating the coordinate deviation of the target image deviating from the center of the display interface.
Preferably, the variance of the maximum difference of the angular magnifications is an evaluation index of the angular magnification consistency.
The other technical scheme of the invention is as follows: the method for testing the angular magnification of the beam expanding optical system based on the testing system comprises the following steps:
s1, adjusting the angles of a base body rotary table and a U-shaped rotary table to be 0 degree, and at the moment, overlapping the collimator containing a target and an optical system optical axis; the incident end of the optical system faces the collimator and the emergent end faces the image detection device, and the test direction of the optical system at the moment is defined as the meridian direction;
s2, filtering emergent light of the collimator by using a proper optical filter, so that the spectrum of the filtered emergent light falls into the spectrum working range of the optical system to be detected;
s3, finding the target in the image detection device, adjusting the target image to be clearest by adjusting the X, Y, Z axis of the three-dimensional moving platform, positioning the target image at the cross center of the display interface of the image detection device, and fixing the three-dimensional moving platform at the moment so that the microscope objective and the CCD of the image detection device are coaxial with the optical axis of the optical system at the moment;
s4, rotating the base body turntable by an incident light angle alpha Into So that the optical axis of the collimator tube rotates by an angle alpha relative to the optical axis of the optical system to be measured Into ；
S5, adjusting the target image in the display interface of the image detection device to the cross center position of the display interface by adjusting the angle of the U-shaped rotary table, and measuring the angle alpha of the U-shaped rotary table at the moment Go out As the emergent light angle;
s6, calculating an angular magnification b value under the incident angle; the calculation formula is as follows:
b＝α go out /α Into
S7, repeating S5-S6 by changing different angles of the base body turntable, and testing the angular amplification rate values of different incident angles in the meridian direction;
s8, rotating the optical system mounting frame by 90 degrees along the optical axis direction of the optical system, changing the testing direction of the optical system into a sagittal direction, repeating S4-S8, and testing the angular amplification ratios of different incident angles in the sagittal direction;
s9, rotating the optical system mounting frame for any angle along the optical axis direction of the optical system, changing the testing direction of the optical system to be a sagittal direction, repeating S4-S8, and testing the angular amplification ratios of different incident angles in any angle direction.
Preferably, the target is selected from cross hairs.
Preferably, step S9 further comprises the steps of:
the angular magnification was plotted graphically for each direction.
Preferably, the above method further comprises the following steps
S10, calculating the difference between the maximum value and the minimum value of the angular amplification degrees obtained in the steps S7 to S9;
s11, repeating the steps S1 to S10 to obtain the difference between the maximum value and the minimum value of the N angular amplification factors, and calculating the mean value and the variance of the difference between the maximum value and the minimum value of the N angular amplification factors, wherein the variance of beta is an evaluation index of angular amplification factor consistency.
Compared with the prior art, the invention has the beneficial effects that:
(1) According to the invention, through the rotating shaft of the base body turntable, the rotating shaft of the U-shaped turntable and the rotating shaft of the optical system mounting rack, and the three-axis rotation method, the accurate measurement of the angular amplification rate of the optical system in the full input field range and under different directions and different incident angles is realized, and the problem that the traditional method can only stay in the axial direction to carry out the angular amplification rate test is solved.
(2) According to the invention, the angular amplification rate can be further evaluated and analyzed according to the angular amplification rates in different directions and different incidence angles. The angle beam expanding performance of the optical system can be comprehensively measured, effective feedback can be provided for design and optical system assembly to a certain degree, the optical system with potential performance hazards is eliminated, and the screening rate and the reliability of the optical system are improved.
(3) The invention adopts a three-axis rotation method, the input angle and the output angle are directly controlled and obtained through the numerical control turntable, secondary calculation or approximate estimation is not needed, the measured angle amplification rate result is more accurate, and the precision is higher.
(4) The invention provides a general solution for the problem that the optical performance of the beam-expanding optical system cannot be comprehensively evaluated by aiming at the angular magnification and the consistency test method of the beam-expanding optical system.
(5) The invention has been applied in the testing process of the laser scanning objective lens for deep space exploration, and the practical effects show that: the method can accurately measure the angular magnification and the consistency of the optical system under the conditions of different directions and different incident angles, can comprehensively analyze the uniformity and the consistency of each direction of the optical system, is feasible, and is easy to realize by engineering technology, thereby having practicability.
Drawings
FIG. 1 is a top view of a system for testing angular magnification and its conformance at zero position according to an embodiment of the present invention;
FIG. 2 is a side view of a system for testing angular magnification and its conformance at zero position according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a system for testing angular magnification and consistency thereof according to an embodiment of the present invention;
FIG. 4 is a cross hair image displayed in the data acquisition and processing system according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of adjusting a cross hair image to a cross center position of a display interface according to an embodiment of the present invention;
FIG. 6 is a graph illustrating the variation of angular magnification uniformity of an exemplary optical system according to an embodiment of the present invention.
Detailed Description
The invention is further illustrated by the following examples.
The invention provides an angular amplification factor and consistency test system suitable for any angle and direction, wherein the angular amplification factor and consistency test system comprises an air flotation platform, a collimator tube containing a target, a matrix turntable, an optical system mounting rack, an image detection device, a three-dimensional moving platform and a U-shaped turntable;
the collimator and the matrix rotary table are arranged on the air floatation platform, the collimator is parallel to the upper surface of the air floatation platform, the rotary shaft of the matrix rotary table is vertical to the upper surface of the air floatation platform, and the matrix rotary table can continuously rotate around the rotary shaft; the optical system mounting rack is arranged on the substrate rotary table, a rotating shaft of the optical system mounting rack is parallel to the substrate rotary table, and the optical system to be tested is fixedly arranged on the optical system mounting rack; the optical axis of the optical system to be measured is parallel to the upper surface of the air floating platform and is on the same plane with the optical axis of the collimator; the U-shaped rotary table is arranged on the base body rotary table, a rotating shaft of the U-shaped rotary table is perpendicular to the base body rotary table and coplanar with the mounting surface of the optical system to be tested, and the U-shaped rotary table can rotate around the rotating shaft at a certain angle; the three-dimensional moving platform is fixedly arranged on the U-shaped turntable, the rotating center of the three-dimensional moving platform is the center of the optical system mounting rack, the mounting position of the three-dimensional moving platform is in the emergent direction of the optical system to be measured, the three-dimensional moving platform can realize the numerical control movement in three directions of X, Y, Z, the X axis and the Y axis of the three-dimensional moving platform are parallel to the upper surface of the U-shaped turntable, and the Z axis of the three-dimensional moving platform is vertical to the upper surface of the U-shaped turntable; the image detection device is fixedly arranged on the three-dimensional moving platform. The optical system installation and the image detection device are arranged on an emergent light path of the collimator, and the optical system installation and the image detection device are coaxial when the base body rotary table and the U-shaped rotary table are both in 0-degree positions.
The optical system mounting rack is arranged at the center of the base body rotary table and has a rotating function, the rotating direction is vertical to the plane of the base body rotary table and the optical axis direction of the collimator tube, and the optical system mounting rack can rotate 180 degrees.
In an initial state, the optical system is arranged and the image detection device is arranged on an emergent light path of the collimator and keeps coaxial when the base body rotary table and the U-shaped rotary table are both in 0-degree positions, light emitted by the collimator is irradiated on the target, and an image of the target enters the image detection device after passing through the optical system and is displayed on an interface of the image detection device;
by adjusting the directions of the rotating shaft of the base body turntable and the rotating shaft of the optical system mounting rack, the incidence angles in different directions and different sizes in the range of the full input field of the optical system to be detected can be obtained; under different incident angles, the angle of the rotating shaft of the U-shaped turntable corresponding to the coincidence of the target image displayed on the interface of the image detection device and the center of the display interface is the emergent angle of the optical system to be detected under the corresponding incident angle, and the ratio of the incident angle to the emergent angle is the angular magnification of the optical system; the variance of the maximum difference of the angular amplification is the evaluation index of the angular amplification consistency.
Preferably, the system for testing the angular amplification factor and the consistency of the beam expanding optical system further comprises an optical filter for filtering emergent light of the collimator, so that the spectrum of the emergent light after filtering falls into the spectrum working range of the optical system to be tested, and the system is suitable for testing requirements of different transmission spectrums.
Preferably, the target is a cross hair.
Preferably, the base body rotary table is a numerical control rotary table, and the control precision is superior to 0.0001 degree.
Preferably, the U-shaped rotary table is a numerical control rotary table, and the control precision is superior to 0.0001 degree.
Preferably, the control precision of the three-dimensional moving platform is better than 0.001mm.
Preferably, the image detection device comprises a microscope objective, a CCD and a data acquisition and processing device.
And the microscope objective is used for converging emergent light of the optical system to be detected on the CCD image surface. In one embodiment of the present invention, a 50X microscope objective is selected for capturing the cross hair image.
The CCD is used for converting the optical signal collected by the image surface into an electric signal and acquiring a complete digital image signal; and the data acquisition and processing device is used for acquiring the digital image signals of the CCD, displaying the digital image signals on a screen and calculating the coordinate deviation of the target image deviating from the center of the display interface.
Based on the system, the invention provides a method for testing the angular magnification of a beam expanding optical system, which comprises the following steps:
s1, adjusting the angles of a base body turntable and a U-shaped turntable to 0 degree, wherein the central initial positions of a collimator and an optical system mounting rack are located on the same axis, a microscope objective of an image detection device and a CCD (charge coupled device) mounting surface are vertical to the axis, and the optical axes of the collimator containing a target and the optical system are superposed; and fixing the optical system to be detected on an optical system mounting frame, wherein the incident end of the optical system faces the collimator and the emergent end faces a microscope objective of the image detection device. Defining the test direction of the optical system at this time as a meridional direction; the target is cross hair.
S2, selecting a proper optical filter, and filtering emergent light of the collimator so that the spectrum of the filtered emergent light falls into the spectrum working range of the optical system to be detected;
s3, finding the target image (cross hair image) in the image detection device at the moment, adjusting the target image to be clearest by adjusting the X, Y, Z axis coordinate position of the three-dimensional moving platform, positioning the target image at the cross center of the display interface of the image detection device, and fixing the three-dimensional moving platform at the moment so that the microscope objective and the CCD of the image detection device are coaxial with the optical axis of the optical system at the moment;
s4, rotating the base body turntable by an incident light angle alpha Go into So that the optical axis of the collimator tube rotates by an angle alpha relative to the optical axis of the optical system to be measured Into (ii) a At the moment, the optical system to be detected, the image detection device, the three-dimensional moving platform and the U-shaped turntable rotate around the center of the optical system mounting rack by an angle alpha Into And the rotation angle alpha of the collimator optical axis relative to the system optical axis Into ；
S5, adjusting the target image in the display interface of the image detection device to the cross center position of the display interface by adjusting the angle of the U-shaped rotary table, and measuring the angle alpha of the U-shaped rotary table at the moment Go out As the emergent light angle;
s6, calculating the angular magnification b value under the incident angle; the calculation formula is as follows:
b＝α go out /α Into
S7, repeating S5-S6 by changing different angles of the base body turntable, and testing the angular amplification rate values of different incident angles in the meridian direction;
s8, rotating the optical system mounting frame by 90 degrees along the optical axis direction of the optical system, changing the testing direction of the optical system into a sagittal direction, repeating S4-S8, and testing the angular amplification ratios of different incident angles in the sagittal direction;
s9, rotating the optical system mounting frame for any angle along the optical axis direction of the optical system, changing the testing direction of the optical system to be a sagittal direction, repeating S4-S8, and testing the angular amplification ratios of different incident angles in any angle direction.
Preferably, step S9 further comprises the steps of:
the angular magnification in each direction is plotted graphically, and the change of the angular magnification in each incidence direction can be seen, so that reference can be provided for system design and assembly.
The invention also provides a method for testing the angular magnification power consistency of the beam expanding optical system, which comprises the following steps on the basis of the magnification power testing step
S10, calculating the difference between the maximum value and the minimum value of the angular amplification ratios obtained in the steps S7 to S9;
s11, repeating the steps S1 to S10 to obtain the difference between the maximum value and the minimum value of the N angular amplification factors, and calculating the mean value and the variance of the difference between the maximum value and the minimum value of the N angular amplification factors, wherein the variance of beta is an evaluation index of angular amplification factor consistency.
Example 1
The invention is further described below with reference to the accompanying drawings.
The invention provides an angular magnification and consistency test system suitable for any angle and direction. It is characterized in that: the angular magnification and consistency test system comprises an air floatation platform, a collimator, a matrix rotary table, an optical system mounting frame, an image detection device, a three-dimensional moving platform and a U-shaped rotary table.
The device connection is shown in fig. 1 and 2.
The collimator and the substrate rotary table are arranged on the air floatation platform; the optical system mounting rack, the image detection device, the three-dimensional mobile platform and the U-shaped rotary table are all mounted on the base body rotary table. The image detection device is arranged on the three-dimensional mobile platform; the three-dimensional moving platform is arranged on the U-shaped rotary table, the rotating center of the three-dimensional moving platform is the center of the optical system mounting frame, and the mounting position of the three-dimensional moving platform is in the emergent direction of the optical system to be measured. The optical system installation and the image detection device are arranged on an emergent light path of the collimator, and the optical system installation and the image detection device are coaxial when the base body rotary table and the U-shaped rotary table are both in 0-degree positions.
The parallel light tube can switch the optical filter, so that the test requirements of different transmission spectrums are met; the collimator contains a target, typically a cross-hair.
The base body rotary table is a numerical control rotary table, and the control precision is 0.0001 degree;
the optical system mounting rack is arranged in the center of the base body turntable and has a rotating function, and the rotating direction is vertical to the plane of the base body turntable and is also vertical to the direction of the optical axis of the collimator;
the three-dimensional moving platform can realize the numerical control movement in X, Y, Z three directions, and the control precision is 0.001mm;
the U-shaped turntable is a numerical control turntable, and the control precision is 0.0001 degree;
the image detection device comprises a 50X microscope objective and a CCD (charge coupled device) and is used for capturing a cross hair image, the rear end of the image detection device is connected with a data acquisition and processing system, and the cross hair image is shown in figure 4.
The angular amplification factor and consistency testing method based on the testing system is characterized in that: the test method comprises the following steps:
(1) The angles of the base body rotary table and the U-shaped rotary table are adjusted to 0 degree, the initial central positions of the collimator and the optical system mounting rack are positioned on the same axis, and the installation surfaces of a microscope objective and a CCD of the image detection device are vertical to the axis;
(2) And fixing the optical system to be detected on an optical system mounting frame, so that the incident end of the optical system faces the collimator and the emergent end faces a microscope objective of the image detection device.
(3) The collimator is replaced by a corresponding optical filter, and the target is a cross wire;
(4) Finding the cross hair image in a display system of the data acquisition and processing system, adjusting the cross hair image to be clearest by adjusting the X, Y, Z coordinate position of the three-dimensional moving platform, wherein the position is positioned at the cross center of the display interface, fixing the three-dimensional moving platform, and the microscope objective and the CCD of the image detection device are coaxial with the optical axis of the optical system. The schematic diagram of the cross center position of the cross hair image adjusted to the display interface is shown in figure 5;
(5) Setting the angle of the base body turntable, i.e. the angle of the incident light alpha Into At the moment, the optical system to be detected, the image detection device, the three-dimensional moving platform and the U-shaped turntable rotate around the center of the optical system mounting rack by an angle alpha Go into And the rotation angle alpha of the collimator optical axis relative to the system optical axis Into As shown in fig. 3;
(6) The cross hair image in the display interface of the data acquisition and processing system is adjusted to the cross center position of the display interface by adjusting the angle of the U-shaped rotary table, and the angle alpha of the U-shaped rotary table is adjusted at the moment Go out I.e. the emergent light angle, as shown in fig. 3;
(7) By the formula b = α Go out /α Into Calculating the angular magnification b value under the incident angle;
(8) By changing different angles of the base body turntable and repeating the steps (5) to (7), the angular amplification b values of different incident angles in the meridian direction can be tested;
(9) Rotating the optical system mounting rack by 90 degrees, changing the testing direction of the optical system into a sagittal direction, repeating the steps (5) to (8), and testing the angular amplification b values of different incident angles in the sagittal direction; if necessary, the optical system mounting rack can be rotated at any angle, so that the angular magnification test of the optical system under incidence in different directions and different angles is realized;
(10) By the formula β = b max -b min The maximum difference in angular amplification is calculated, while the mean and variance are calculated. The mean value is compared with a design value through indexes, and the variance beta is an evaluation index of the consistency of the angular amplification rate. Wherein b is max The maximum value of the angular magnification of the optical system under the incidence of different directions and different angles, b min The minimum value of the angular magnification of the optical system under the incidence of different directions and different angles;
(11) By plotting the angular magnification in each direction, it can be seen that the variation of the angular magnification in each incident direction can provide a reference for system design and assembly. The graph is shown in fig. 6.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to limit the present invention, and those skilled in the art can make variations and modifications of the present invention without departing from the spirit and scope of the present invention by using the methods and technical contents disclosed above.
Claims (10)
1. A testing method based on an angular magnification testing system of a beam expanding optical system is characterized by comprising an air floating platform, a collimator tube containing a target, a substrate rotary table, an optical system mounting frame, an image detection device, a three-dimensional moving platform and a U-shaped rotary table;
the collimator and the matrix rotary table are arranged on the air floatation platform, the collimator is parallel to the upper surface of the air floatation platform, the rotary shaft of the matrix rotary table is vertical to the upper surface of the air floatation platform, and the matrix rotary table can continuously rotate around the rotary shaft; the optical system mounting rack is arranged on the base body turntable, a rotating shaft of the optical system mounting rack is parallel to the base body turntable, and the optical system to be tested is fixedly arranged on the optical system mounting rack; the optical axis of the optical system to be measured is parallel to the upper surface of the air floatation platform and is on the same plane with the optical axis of the collimator; the U-shaped rotary table is arranged on the base body rotary table, a rotating shaft of the U-shaped rotary table is perpendicular to the base body rotary table and is coplanar with the mounting surface of the optical system to be measured, and the U-shaped rotary table can rotate around the rotating shaft at a certain angle; the three-dimensional moving platform is fixedly arranged on the U-shaped rotary table, the X axis and the Y axis of the three-dimensional moving platform are parallel to the upper surface of the U-shaped rotary table, and the Z axis of the three-dimensional moving platform is vertical to the upper surface of the U-shaped rotary table; the image detection device is fixedly arranged on the three-dimensional mobile platform;
in an initial state, the optical system installation and the image detection device are all arranged on an emergent light path of the collimator and are coaxial when the base body rotary table and the U-shaped rotary table are both at 0-degree positions, light emitted by the collimator is irradiated on the target, and an image of the target enters the image detection device after passing through the optical system and is displayed on an interface of the image detection device;
by adjusting the directions of the rotating shaft of the base body turntable and the rotating shaft of the optical system mounting rack, the incidence angles in different directions and different sizes in the range of the full input field of the optical system to be detected can be obtained; under different incident angles, the angle of the rotating shaft of the U-shaped turntable corresponding to the coincidence of the target image displayed on the interface of the image detection device and the center of the display interface is the emergent angle of the optical system to be detected under the corresponding incident angle, and the ratio of the incident angle to the emergent angle is the angular magnification of the optical system;
the test method comprises the following steps:
s1, adjusting the angles of a base body turntable and a U-shaped turntable to 0 degree, and at the moment, overlapping the optical axes of a collimator tube containing a target and an optical system; the incident end of the optical system faces the collimator and the emergent end faces the image detection device, and the test direction of the optical system at the moment is defined as the meridian direction;
s2, filtering emergent light of the collimator by using a proper optical filter, so that the spectrum of the filtered emergent light falls into the spectrum working range of the optical system to be detected;
s3, finding the target in the image detection device, adjusting the target image to be clearest by adjusting the X, Y, Z axis of the three-dimensional moving platform, positioning the target image at the cross center of the display interface of the image detection device, and fixing the three-dimensional moving platform at the moment so that the microscope objective and the CCD of the image detection device are coaxial with the optical axis of the optical system at the moment;
s4, rotating the base body turntable by an incident light angle alpha Into So that the optical axis of the collimator tube rotates by an angle alpha relative to the optical axis of the optical system to be measured Into ；
S5, adjusting the target image in the display interface of the image detection device to the cross center position of the display interface by adjusting the angle of the U-shaped rotary table, and measuring the angle alpha of the U-shaped rotary table at the moment Go out As the emergent light angle;
s6, calculating the angular magnification b value under the incident angle; the calculation formula is as follows:
b＝α go out /α Go into
S7, repeating S5-S6 by changing different angles of the base body turntable, and testing the angular amplification rate values of different incident angles in the meridian direction;
s8, rotating the optical system mounting frame by 90 degrees along the optical axis direction of the optical system, changing the testing direction of the optical system into a sagittal direction, repeating S4-S8, and testing the angular amplification ratios of different incident angles in the sagittal direction;
s9, rotating the optical system mounting frame for any angle along the optical axis direction of the optical system, changing the testing direction of the optical system to be a sagittal direction, repeating S4-S8, and testing the angular amplification ratios of different incident angles in any angle direction.
2. The method as claimed in claim 1, wherein the system further comprises a filter for filtering the emergent light from the collimator so that the spectrum of the filtered emergent light falls within the spectral working range of the optical system under test.
3. The method of claim 1, wherein the target is a cross-hair.
4. The method for testing the angular magnification power testing system based on the beam expanding optical system according to claim 1, wherein the substrate turntable is a numerical control turntable, and the control precision is better than 0.0001 °.
5. The method of claim 1, wherein the U-turn stage is a numerically controlled stage with a control accuracy of 0.0001 °.
6. The testing method based on the angular magnification testing system of the beam expanding optical system as claimed in claim 1, wherein the image detection device comprises a microscope objective, a CCD and a data acquisition and processing device;
the microscope objective is used for converging emergent light of the optical system to be detected on a CCD image surface;
the CCD is used for converting the optical signal collected by the image surface into an electric signal and acquiring a complete digital image signal; and the data acquisition and processing device is used for acquiring the digital image signals of the CCD, displaying the digital image signals on a screen and calculating the coordinate deviation of the target image deviating from the center of the display interface.
7. The method for testing an angular magnification ratio based on a beam expanding optical system according to any one of claims 1 to 6, wherein the variance of the maximum difference of angular magnification ratios is an evaluation index of angular magnification ratio uniformity.
8. The method of claim 1, wherein the target is a cross-hair.
9. The method for testing the angular magnification ratio based on the beam expanding optical system as claimed in claim 1, wherein the step S9 further comprises the steps of:
the angular magnification was plotted graphically for each direction.
10. The testing method based on the angular magnification testing system of the beam expanding optical system as claimed in claim 9, characterized by further comprising the steps of:
s10, calculating the difference between the maximum value and the minimum value of the angular amplification degrees obtained in the steps S7 to S9;
s11, repeating the steps S1 to S10 to obtain the difference between the maximum value and the minimum value of the N angular amplification factors, and calculating the mean value and the variance of the difference between the maximum value and the minimum value of the N angular amplification factors, wherein the variance of beta is an evaluation index of angular amplification factor consistency.
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