CN113310445B - Calibration method of multi-instrument combined measurement system - Google Patents
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
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- G—PHYSICS
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
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Abstract
The invention relates to a calibration method of a multi-instrument combined measurement system, which adopts a multi-tooth indexing table as a standard to calibrate the rotation error of a coordinate system of the multi-instrument combined measurement system; a linear guide rail with a laser interferometer is used as a standard to calibrate the coordinate system translation error of the multi-instrument combined measurement system; the length scale is used as an etalon to calibrate the spatial distance length error of a public measuring point and a non-public measuring point of the multi-instrument combined measuring system. The invention solves the problem that the existing calibration method of a single measuring instrument cannot be directly applied to the calibration of a multi-instrument combined measuring system, and ensures the unified, accurate and reliable magnitude of the multi-instrument combined measuring system, the research, development, upgrading and field application of the power-assisted multi-instrument combined measuring system.
Description
Technical Field
The invention relates to a calibration method of a multi-instrument combined measurement system, in particular to a calibration method for the accuracy of external parameter and coordinate measurement of the multi-instrument combined measurement system, and belongs to the field of measurement and test.
Background
In the face of the measurement demands of large space, high precision, multiple information, low cost, high efficiency and reliability in the manufacture of large-scale equipment such as aerospace, ships and the like, a multi-instrument combined measurement system consisting of a plurality of or a plurality of measurement instruments becomes an important measurement means and is widely applied. As shown in fig. 1, in the multi-instrument combined measurement system, each measurement instrument performs measurement under a respective instrument coordinate system, and a plurality of measurement instruments calculate external parameters (coordinate system rotation and translation conversion parameters) through a group of measurement common measurement points to unify each instrument coordinate system to a system coordinate system; the public measuring point is measured by two or more measuring instruments, and the coordinates of the public measuring point are obtained by fusion calculation of the measuring data of the instruments; the non-public measuring point is measured by only one measuring instrument, and the coordinates of the non-public measuring point are obtained by converting the measuring data of the instrument into a system coordinate system through the external parameters of the instrument. In summary, the problem that the coordinate system of each measuring instrument is unified, the data of the common measuring points are fused, and the data of the non-common measuring points are converted in the multi-instrument combined measuring system is inevitably related to, in order to ensure that the magnitude of the multi-instrument combined measuring system is unified, accurate and reliable, the external parameters and the measurement of the coordinates cannot be directly applied to the calibration method of a single measuring instrument (such as the calibration standard of a JJF 1242 laser tracking three-dimensional coordinate measuring system, the calibration standard of a JJF 1408 joint arm type coordinate measuring machine, and the like), and the integral calibration problem of the multi-instrument combined measuring system in the prior art is not solved at present.
Disclosure of Invention
The invention provides a calibration method of a multi-instrument combined measurement system, which aims to solve the problem that the existing calibration method of a single measurement instrument cannot be directly applied to the calibration of the multi-instrument combined measurement system.
The invention adopts the following technical scheme:
a calibration method of a multi-instrument combined measurement system adopts a multi-tooth indexing table as a standard to calibrate the coordinate system rotation error of the multi-instrument combined measurement system; a linear guide rail with a laser interferometer is used as a standard to calibrate the coordinate system translation error of the multi-instrument combined measurement system; the length scale is used as an etalon to calibrate the spatial distance length error of a public measuring point and a non-public measuring point of the multi-instrument combined measuring system.
Preferably, the calibration of the rotation error of the coordinate system of the multi-instrument combined measurement system comprises the following steps:
the method comprises the steps that firstly, a multi-instrument combined measuring system formed by N measuring instruments is formed, 1 measuring instrument is fixed on a multi-tooth indexing table, the other N-1 measuring instruments are fixed beside the multi-tooth indexing table, and the overall layout of the N measuring instruments is consistent with that of the N measuring instruments in field application;
step two, zeroing scale marks of the multi-tooth indexing table, calibrating external parameters of N measuring instruments in the system, and marking a coordinate system rotation matrix of the measuring instruments on the multi-tooth indexing table as R0;
step three, the rotation angle theta of the multi-tooth indexing table is recorded, and the indication value theta of the multi-tooth indexing table at the moment is recorded r1 ;
Step four, calibrating external parameters of N measuring instruments in the system, repeating for three times, and marking a coordinate system rotation matrix of the measuring instruments on the multi-tooth indexing table as R 11 、R 12 、R 13 ;
Step five, respectively calculating a coordinate system rotation matrix R 11 、R 12 、R 13 And R is R 0 The variation DeltaR between 11 、ΔR 12 、ΔR 13 As shown in formula (1); calculating the corresponding rotation angle theta by combining the Rodrigues formula m11 、θ m12 、θ m13 As shown in formula (2); and calculate the sum theta r1 Is a difference delta theta of (2) 11 、Δθ 12 、Δθ 13 As shown in formula (3); taking the maximum value as the coordinate system rotation error delta theta at the angle 1 As shown in formula (4);
wherein ,r1js Representation matrix DeltaR 1j J=1, 2,3;
θ m1j =arcsin(u 2 +v 2 +w 2 ) (2);
Δθ 1j =|θ m1j -θ r1 | (3);
wherein j=1, 2,3;
Δθ 1 =max{Δθ 11 ,Δθ 12 ,Δθ 13 } (4);
step six, sequentially rotating the multi-tooth indexing table to an indication value theta according to the step theta r2 、θ r3 、…、θ rM Repeating the fourth and fifth steps to measure the rotation error delta theta of the coordinate system 2 、Δθ 3 、…、Δθ M Taking the maximum value as the rotation error delta theta of the coordinate system in the calibration, as shown in a formula (5);
Δθ=max{Δθ 1 ,Δθ 2 ,...,Δθ M } (5)。
preferably, the calibration of the translational error of the coordinate system of the multi-instrument combined measurement system comprises the following steps:
the method comprises the steps that firstly, a multi-instrument combined measuring system formed by N measuring instruments is formed, 1 measuring instrument is fixed on a movable workbench of a linear guide rail, the rest N-1 measuring instruments are fixed beside the linear guide rail, and the overall layout of the N measuring instruments is consistent with that of the N measuring instruments in field application;
resetting the laser interferometer, calibrating the external parameters of N measuring instruments in the system, and recording the coordinate system translation vector of the measuring instrument on the movable workbench as T 0 ;
Step three, the movable workbench moves along the linear guide rail to displace d, and the indication value d of the laser interferometer at the moment is recorded r1 ;
Step four, calibrating external parameters of N measuring instruments in the system, repeating for three times, and recording coordinate system translation vectors of the measuring instruments on the movable workbench as T 11 、T 12 、T 13 ;
Step five, respectively calculating coordinate system translation vectors T 11 、T 12 、T 13 And T is 0 The variation delta T between 11 、ΔT 12 、ΔT 13 As shown in the formula (6), the corresponding translation d is calculated by combining a calculation formula of the vector mode m11 、d m12 、d m13 As shown in formula (7), and calculate the sum d r1 Is a difference Δd of (d) 11 、Δd 12 、Δd 13 Taking the maximum value as the coordinate system translation error Δd at that position as shown in equation (8) 1 As shown in formula (9);
wherein ,tx1j 、t y1j 、t z1j Representing the vector DeltaT 1j J=1, 2,3;
wherein j=1, 2,3;
Δd 1j =|d m1j -d r1 | (8);
wherein j=1, 2,3;
Δd 1 =max{Δd 11 ,Δd 12 ,Δd 13 } (9);
step six, moving the movable workbench to an indication value d along the linear guide rail in sequence according to the step d r2 、d r3 、…、d rM Repeating the fourth and fifth steps to measure the translational error Deltad of the coordinate system 2 、Δd 3 、…、Δd M Taking the maximum value as the translation error delta d of the coordinate system in the calibration, as shown in a formula (10);
Δd=max{Δd 1 ,Δd 2 ,...,Δd M } (10)。
preferably, the calibration of the error of the indication of the spatial length of the common measurement point of the multi-instrument combined measurement system comprises the following steps:
the method comprises the steps that firstly, a multi-instrument combined measuring system consisting of N measuring instruments is placed according to the integral layout consistent with the field application, M length scales are arranged in the measuring range of the multi-instrument combined measuring system, two ends of each length scale are respectively provided with a target seat, targets of different measuring instruments in the multi-instrument combined measuring system can be adapted, measuring points are kept unchanged along with the change of target types, and the directions of the length scales comprise different directions such as horizontal, vertical and inclined;
step two, ensuring two ends of the M length scalesThe measuring points of the length scale can be measured by 2 or more measuring instruments in the multi-instrument combined measuring system, the measuring points at the two ends of the length scale are used as public measuring points, and other public measuring points are matched, so that the external parameters of the multi-instrument combined measuring system are calibrated, and the coordinates of the public measuring points are calculated through data fusion; repeating three times, and respectively recording the coordinates of the common measuring points at the two ends of the ith length scale in the jth time as (x) i1j ,y i1j ,z i1j) and (xi2j ,y i2j ,z i2j ),i=1,2,…,M,j=1,2,3;
Step three, using the coordinates (x i1j ,y i1j ,z i1j )、(x i2j ,y i2j ,z i2j ) Calculate the length l of the 1 st length scale m1j As shown in formula (11), and calculates a reference value l with the length scale r1j Is a difference Deltal of (1) 1j As shown in formula (12); taking Deltal 11 、Δl 12 、Δl 13 The maximum value of (1) is taken as the error Deltal of the space length indication value at the 1 st length scale 1 As shown in formula (13);
wherein j=1, 2,3;
Δl 1j =|l m1j -l r1 | (12);
wherein j=1, 2,3;
Δl 1 =max{Δl 11 ,Δl 12 ,Δl 13 } (13);
step four, repeating the step three, and sequentially calculating the space length indication error Deltal at the position of the remaining M-1 length scales i I=2, 3, …, M; taking the maximum value of the space length indication errors at the M length scales as the space length indication error Deltal of the common measurement point in the calibration, as shown in a formula (14);
Δl=max{Δl 1 ,Δl 2 ,...,Δl M } (14)。
further, the calibration of the error of the spatial length indication of the non-common measurement point of the multi-instrument combined measurement system comprises the following steps:
step one, a multi-instrument combined measurement system consisting of N measuring instruments is placed according to the integral layout consistent with the field application, and external parameters of the multi-instrument combined measurement system are calibrated;
arranging M length scales in a measuring range of the multi-instrument combined measuring system, wherein two ends of each length scale are respectively provided with a target seat, so that targets of different measuring instruments in the multi-instrument combined measuring system can be adapted, measuring points are kept unchanged along with the change of target types, and the directions of the length scales comprise horizontal, vertical and inclined directions;
measuring M length scales by a multi-instrument combined measuring system, wherein the measuring points of each length scale are only measured by one measuring instrument, and the measuring points at two ends of the same length scale are not measured by the same measuring instrument, namely the measuring points on the M length scales are all non-public measuring points; completing data conversion according to external parameters of the multi-instrument combined measurement system to obtain coordinates of non-public measurement points; repeating three times; the coordinates of the common measurement points at both ends of the ith length scale in the jth pass are respectively recorded as (x) i1j ,y i1j ,z i1j) and (xi2j ,y i2j ,z i2j ),i=1,2,…,M,j=1,2,3;
Step four, using the coordinates (x i1j ,y i1j ,z i1j )、(x i2j ,y i2j ,z i2j ) Calculate the length l of the 1 st length scale m1j As shown in formula (11), and calculates a reference value l with the length scale r1j Is a difference Deltal of (1) 1j As shown in formula (12); taking Deltal 11 、Δl 12 、Δl 13 The maximum value of (1) is taken as the error Deltal of the space length indication value at the 1 st length scale 1 As shown in formula (13);
step five, repeating the step four, and sequentially calculating the space length indication error Deltal at the position of the remaining M-1 length scales i I=2, 3, …, M. Taking the error of the space length indication value at the M length scalesThe maximum value is used as the error Deltal of the space length indication of the non-common measurement point of the current calibration as shown in a formula (14).
The invention has the beneficial effects that: aiming at different test requirements of external parameters, public measurement points and non-public measurement points, the method for calibrating the multi-instrument combined measurement system is provided, the problem that the existing calibration method of a single measurement instrument cannot be directly applied to the calibration of the multi-instrument combined measurement system is solved, the unified, accurate and reliable magnitude of the multi-instrument combined measurement system is ensured, and the research, development, upgrading and field application of the multi-instrument combined measurement system are assisted.
Drawings
FIG. 1 is a schematic diagram of a multi-instrument combination measurement system.
FIG. 2 is a schematic diagram of a coordinate system rotation error calibration of a multi-instrument combined measurement system.
FIG. 3 is a schematic diagram of a coordinate system translational error calibration of a multi-instrument combined measurement system.
FIG. 4 is a schematic illustration of error calibration of the spatial length indication of a common measurement point of a multi-instrument combined measurement system.
FIG. 5 is a schematic diagram of error calibration of spatial length indication of non-common measurement points of a multi-instrument combined measurement system.
Detailed Description
Preferred embodiments of the present invention will be described in detail below with reference to examples and drawings.
Embodiment one:
taking a multi-instrument combined measurement system consisting of 2 measurement instruments as an example, the calibration of the rotation error of the coordinate system of the multi-instrument combined measurement system is shown in fig. 2, and the method comprises the following steps:
step one, fixing a first measuring instrument on a multi-tooth indexing table, fixing a second measuring instrument beside the multi-tooth indexing table, and enabling the overall layout of the 2 measuring instruments to be consistent with that of the 2 measuring instruments in field application.
Zeroing the scale marks of the multi-tooth dividing table, and rotating the coordinate system of the measuring instrument on the multi-tooth dividing table according to the external parameters of 2 measuring instruments in the operation manual calibration system of the multi-instrument combined measuring systemThe array is denoted as R 0 。
Step three, the rotation angle theta of the multi-tooth indexing table is recorded, and the indication value theta of the multi-tooth indexing table at the moment is recorded r1 。
Step four, according to the external parameters of 2 measuring instruments in the operation manual calibration system of the multi-instrument combined measuring system, repeating for three times, and marking the coordinate system rotation matrix of the measuring instrument on the multi-tooth indexing table as R 11 、R 12 、R 13 。
Step five, respectively calculating a coordinate system rotation matrix R 11 、R 12 、R 13 And R is R 0 The variation DeltaR between 11 、ΔR 12 、ΔR 13 As shown in the formula (15), the corresponding rotation angle θ is calculated by combining the rodgers formula m11 、
θ m12 、θ m13 As shown in formula (16), and calculates the sum θ r1 Is a difference delta theta of (2) 11 、Δθ 12 、Δθ 13 As shown in equation (17), the maximum value is taken as the coordinate system rotation error Δθ at that angle 1 As shown in formula (18).
wherein ,r1js Representation matrix DeltaR 1j J=1, 2,3.
θ m1j =arcsin(u 2 +v 2 +w 2 ) (16)
Δθ 1j =|θ m1j -θ r1 | (17)
where j=1, 2,3.
Δθ 1 =max{Δθ 11 ,Δθ 12 ,Δθ 13 } (18)
Step six, sequentially rotating the multi-tooth indexing table to an indication value theta according to the step theta r2 、θ r3 、…、θ rM Repeating the fourth and fifth steps to measure the rotation error delta theta of the coordinate system r2 、Δθ r3 、…、Δθ rM And takes the maximum value as the coordinate system rotation error delta theta of the current calibration as shown in a formula (19).
Δθ=max{Δθ 1 ,Δθ 2 ,...,Δθ M } (19)。
Embodiment two:
taking a multi-instrument combined measurement system consisting of 2 measurement instruments as an example, the calibration of the translation error of the coordinate system of the multi-instrument combined measurement system is shown in fig. 3, and the method comprises the following steps:
step one, fixing a first measuring instrument on a movable workbench of a linear guide rail, fixing a second measuring instrument beside the linear guide rail, and enabling the overall layout of the 2 measuring instruments to be consistent with that of the measuring instruments in field application.
Resetting the laser interferometer, and marking the coordinate system translation vector of the measuring instrument on the mobile workbench as T according to the external parameters of 2 measuring instruments in the operation manual calibration system of the multi-instrument combined measuring system 0 。
Step three, the movable workbench moves along the linear guide rail to displace d, and the indication value d of the laser interferometer at the moment is recorded r1 。
Step four, according to the external parameters of 2 measuring instruments in the operation manual calibration system of the multi-instrument combined measuring system, repeating for three times, and recording the coordinate system translation vector of the measuring instrument on the movable workbench as T 11 、T 12 、T 13 。
Step five, respectively calculating coordinate system translation vectors T 11 、T 12 、T 13 And T is 0 The variation delta T between 11 、ΔT 12 、ΔT 13 As shown in the formula (20), the corresponding translation d is calculated by combining the calculation formula of the vector mode m11 、d m12 、d m13 As shown in formula (21), and calculate the sum d r1 Is a difference Δd of (d) 11 、Δd 12 、Δd 13 As shown in formula (22), the maximum value is taken as the coordinate system level at the positionShift error Δd 1 As shown in formula (23).
wherein ,tx1j 、t y1j 、t z1j Representing the vector DeltaT 1j J=1, 2,3.
Where j=1, 2,3.
Δd 1j =|d m1j -d r1 | (22)
Where j=1, 2,3.
Δd 1 =max{Δd 11 ,Δd 12 ,Δd 13 } (23)
Step six, moving the movable workbench to an indication value d along the linear guide rail in sequence according to the step d r2 、d r3 、…、d rM Repeating the fourth and fifth steps to measure the translational error Deltad of the coordinate system r2 、Δd r3 、…、Δd rM And taking the maximum value as the coordinate system translation error delta d of the current calibration, as shown in a formula (24).
Δd=max{Δd 1 ,Δd 2 ,...,Δd M } (24)
Embodiment III:
taking a multi-instrument combined measurement system consisting of 2 measurement instruments and 3 length scales as an example, the spatial length indication error calibration of a common measurement point of the multi-instrument combined measurement system is shown in fig. 4, and the method comprises the following steps:
the method comprises the steps of firstly, placing a multi-instrument combined measuring system consisting of 2 measuring instruments according to an integral layout consistent with the field application, arranging 3 length scales in the measuring range of the multi-instrument combined measuring system, respectively installing a target seat at two ends of each length scale, adapting to targets of different measuring instruments in the multi-instrument combined measuring system, keeping measuring points unchanged along with the change of the target types, and enabling the directions of the length scales to comprise different directions such as horizontal, vertical and inclined directions.
And secondly, ensuring that the measuring points at the two ends of the 3 length scales can be measured by 2 measuring instruments in the multi-instrument combined measuring system, taking the measuring points at the two ends of the length scales as public measuring points, matching with other public measuring points, calibrating external parameters of the multi-instrument combined measuring system according to an operation manual of the multi-instrument combined measuring system, and calculating coordinates of the public measuring points through data fusion. Three times are repeated. The coordinates of the common measurement points at both ends of the ith length scale in the jth pass are respectively recorded as (x) i1j ,y i1j ,z i1j) and (xi2j ,y i2j ,z i2j ),i=1,2,3,j=1,2,3。
Step three, using the coordinates (x 11j ,y 11j ,z 11j )、(x 12j ,y 12j ,z 12j ) Calculate the length l of the 1 st length scale m1j As shown in formula (25), and calculates a reference value l with the length scale r1j Is a difference Deltal of (1) 1j As shown in formula (26). Taking Deltal 11 、Δl 12 、Δl 13 The maximum value of (1) is taken as the error Deltal of the space length indication value at the 1 st length scale 1 As shown in formula (27).
Where j=1, 2,3.
Δl 1j =|l m1j -l r1 | (26)
Where j=1, 2,3.
Δl 1 =max{Δl 11 ,Δl 12 ,Δl 13 } (27)
Step four, repeating the step three, and sequentially calculating the space length indication error Deltal at the position of the remaining 2 length scales i I=2, 3. Taking the maximum value of the space length indication errors at the 3 length scales as the common measurement of the calibrationThe spatial length of the measurement point shows the error Deltal as shown in formula (28).
Δl=max{Δl 1 ,Δl 2 ,Δl 3 } (28)。
Embodiment four:
taking a multi-instrument combined measurement system consisting of 2 measurement instruments and 3 length scales as an example, the error calibration of the space length indication value of the non-common measurement point of the multi-instrument combined measurement system is shown in fig. 5, and the method comprises the following steps:
step one, a multi-instrument combined measurement system consisting of 2 measurement instruments is placed according to the integral layout consistent with the field application, and external parameters of the multi-instrument combined measurement system are calibrated according to an operation manual of the multi-instrument combined measurement system.
Step two, arranging 3 length scales in the measuring range of the multi-instrument combined measuring system, wherein two ends of each length scale are respectively provided with a target seat, so that targets of different measuring instruments in the multi-instrument combined measuring system can be adapted, measuring points are kept unchanged along with the change of target types, and the directions of the length scales comprise different directions such as horizontal, vertical and inclined directions.
And thirdly, the multi-instrument combined measuring system measures 3 length scales, so that the measuring points of each length scale are only measured by one measuring instrument, and the measuring points at two ends of the same length scale are not measured by the same measuring instrument, namely, the measuring points on the 3 length scales are all non-public measuring points. And finishing data conversion according to the external parameters of the multi-instrument combined measurement system to obtain the coordinates of the non-common measurement points. Three times are repeated. The coordinates of the common measurement points at both ends of the ith length scale in the jth pass are respectively recorded as (x) i1j ,y i1j ,z i1j) and (xi2j ,y i2j ,z i2j ),i=1,2,3,j=1,2,3。
Step four, using the coordinates (x 11j ,y 11j ,z 11j )、(x 12j ,y 12j ,z 12j ) Calculate the length l of the 1 st length scale m1j As shown in formula (25), and calculates a reference value l with the length scale r1j Is the difference of (2)Value Deltal 1j As shown in formula (26). Taking Deltal 11 、Δl 12 、Δl 13 The maximum value of (1) is taken as the error Deltal of the space length indication value at the 1 st length scale 1 As shown in formula (27).
Step five, repeating the step four, and sequentially calculating the space length indication error Deltal at the position of the remaining 2 length scales i I=2, 3. Taking the maximum value of the space length indication errors at the 3 length scales as the space length indication error Deltal of the non-common measurement point of the calibration, as shown in a formula (28).
The reference numerals in fig. 1-5 are as follows:
1 a first measuring instrument is provided which,
2 a second measuring instrument, which is provided with a measuring device,
3 a third measuring instrument, which is used for measuring the light intensity of the light,
4 a fourth measuring instrument, which is provided with a measuring device,
5 (N-1) th measuring instrument,
a 6 th measuring instrument, which is a measuring instrument,
7 the workpiece to be tested is subjected to the test,
8 the common measurement point of the two-dimensional image,
9 a laser interferometer,
a 10-line guide rail,
a first length scale of 11 is provided which,
a second length scale of 12 is provided which is,
a third length scale of 13 is provided which is,
14 are non-common measurement points and,
a 15-multi-tooth indexing table,
16 move the table.
Claims (1)
1. A method for calibrating a multi-instrument combined measurement system, comprising the steps of:
a multi-tooth indexing table is used as a standard for calibrating a coordinate system rotation error of a multi-instrument combined measurement system;
a linear guide rail with a laser interferometer is used as a standard to calibrate the coordinate system translation error of the multi-instrument combined measurement system;
using a length scale as a standard device to calibrate the space distance length errors of a public measuring point and a non-public measuring point of the multi-instrument combined measuring system;
the coordinate system rotation error calibration of the multi-instrument combined measurement system comprises the following steps:
step 1.1, a multi-instrument combined measuring system consisting of N measuring instruments is characterized in that 1 measuring instrument is fixed on a multi-tooth indexing table, the rest N-1 measuring instruments are fixed beside the multi-tooth indexing table, and the overall layout of the N measuring instruments is consistent with that of the N measuring instruments when the N measuring instruments are applied on site;
step 1.2, zeroing scale marks of the multi-tooth indexing table, calibrating external parameters of N measuring instruments in the system, and marking a coordinate system rotation matrix of the measuring instruments on the multi-tooth indexing table as R 0 ;
Step 1.3, the rotation angle theta of the multi-tooth indexing table is recorded, and the indication value theta of the multi-tooth indexing table at the moment is recorded r1 ;
Step 1.4, calibrating external parameters of N measuring instruments in the system, repeating for three times, and recording a coordinate system rotation matrix of the measuring instruments on the multi-tooth indexing table as R 11 、R 12 、R 13 ;
Step 1.5, calculating a coordinate system rotation matrix R respectively 11 、R 12 、R 13 And R is R 0 The variation DeltaR between 11 、ΔR 12 、ΔR 13 As shown in formula (1); calculating the corresponding rotation angle theta by combining the Rodrigues formula m11 、θ m12 、θ m13 As shown in formula (2); and calculate the sum theta r1 Is a difference delta theta of (2) 11 、Δθ 12 、Δθ 13 As shown in formula (3); taking the maximum value as the coordinate system rotation error delta theta at the angle 1 As shown in formula (4);
wherein ,r1js Representation matrix DeltaR 1j J=1, 2,3;
θ m1j =arcsin(u 2 +v 2 +w 2 ) (2);
Δθ 1j =|θ m1j -θ r1 | (3);
wherein j=1, 2,3;
Δθ 1 =max{Δθ 11 ,Δθ 12 ,Δθ 13 } (4);
step 1.6, sequentially rotating the multi-tooth indexing table to the indication value theta according to the step theta r2 、θ r3 、…、θ rM Repeating the steps 1.4 and 1.5 to measure the rotation error delta theta of the coordinate system 2 、Δθ 3 、…、Δθ M Taking the maximum value as the rotation error delta theta of the coordinate system in the calibration, as shown in a formula (5);
Δθ=max{Δθ 1 ,Δθ 2 ,...,Δθ M } (5);
the coordinate system translation error calibration of the multi-instrument combined measurement system comprises the following steps:
step 2.1, a multi-instrument combined measuring system consisting of N measuring instruments is characterized in that 1 measuring instrument is fixed on a movable workbench of a linear guide rail, the rest N-1 measuring instruments are fixed beside the linear guide rail, and the overall layout of the N measuring instruments is consistent with that of the N measuring instruments when the N measuring instruments are applied on site;
step 2.2, resetting the laser interferometer, calibrating external parameters of N measuring instruments in the system, and recording a coordinate system translation vector of the measuring instrument on the movable workbench as T 0 ;
Step 2.3, moving the workbench along the linear guide rail to move and displace d, and recording the indication value d of the laser interferometer at the moment r1 ;
Step 2.4, calibrating external parameters of N measuring instruments in the system, repeating for three times, and recording a coordinate system translation vector of the measuring instrument on the movable workbench as T 11 、T 12 、T 13 ;
Step 2.5, calculating the coordinate system translation vectors T respectively 11 、T 12 、T 13 And T is 0 The variation delta T between 11 、ΔT 12 、ΔT 13 As shown in the formula (6), the corresponding translation d is calculated by combining a calculation formula of the vector mode m11 、d m12 、d m13 As shown in formula (7), and calculate the sum d r1 Is a difference Δd of (d) 11 、Δd 12 、Δd 13 Taking the maximum value as the coordinate system translation error Δd at that position as shown in equation (8) 1 As shown in formula (9);
wherein ,tx1j 、t y1j 、t z1j Representing the vector DeltaT 1j J=1, 2,3;
wherein j=1, 2,3;
Δd 1j =|d m1j -d r1 | (8);
wherein j=1, 2,3;
Δd 1 =max{Δd 11 ,Δd 12 ,Δd 13 } (9);
step 2.6, moving the movable workbench to the indication value d along the linear guide rail in sequence according to the step d r2 、d r3 、…、d rM Step 2.4 and step 2.5 are repeated to measure the translational error delta d of the coordinate system 2 、Δd 3 、…、Δd M Taking the maximum value as the translation error delta d of the coordinate system in the calibration, as shown in a formula (10);
Δd=max{Δd 1 ,Δd 2 ,...,Δd M } (10);
the error calibration of the spatial length indication value of the common measurement point of the multi-instrument combined measurement system comprises the following steps:
step 3.1, a multi-instrument combined measuring system consisting of N measuring instruments is placed according to the integral layout consistent with the field application, M length scales are arranged in the measuring range of the multi-instrument combined measuring system, two ends of each length scale are respectively provided with a target seat, targets of different measuring instruments in the multi-instrument combined measuring system can be adapted, measuring points are kept unchanged along with the change of target types, and the directions of the length scales comprise horizontal, vertical and inclined directions;
step 3.2, ensuring that the measuring points at the two ends of the M length scales can be measured by 2 or more measuring instruments in the multi-instrument combined measuring system, taking the measuring points at the two ends of the length scales as public measuring points, matching with other public measuring points, calibrating external parameters of the multi-instrument combined measuring system, and calculating coordinates of the public measuring points through data fusion; repeating three times, and respectively recording the coordinates of the common measuring points at the two ends of the ith length scale in the jth time as (x) i1j ,y i1j ,z i1j) and (xi2j ,y i2j ,z i2j ),i=1,2,…,M,j=1,2,3;
Step 3.3 using coordinates (x 11j ,y 11j ,z 11j )、(x 12j ,y 12j ,z 12j ) Calculate the length l of the 1 st length scale m1j As shown in formula (11), and calculates a reference value l with the length scale r1j Is a difference Deltal of (1) 1j As shown in formula (12); taking Deltal 11 、Δl 12 、Δl 13 The maximum value of (1) is taken as the error Deltal of the space length indication value at the 1 st length scale 1 As shown in formula (13);
wherein j=1, 2,3;
Δl 1j =|l m1j -l r1 | (12);
wherein j=1, 2,3;
Δl 1 =max{Δl 11 ,Δl 12 ,Δl 13 } (13);
step 3.4, repeating the step 3.3, and sequentially calculating the space length indication error Deltal at the position of the remaining M-1 length scales i I=2, 3, …, M; taking the maximum value of the space length indication errors at the M length scales as the space length indication error Deltal of the common measurement point in the calibration, as shown in a formula (14);
Δl=max{Δl 1 ,Δl 2 ,...,Δl M } (14);
the error calibration of the spatial length indication value of the non-common measurement point of the multi-instrument combined measurement system comprises the following steps:
step 4.1, a multi-instrument combined measurement system consisting of N measuring instruments is placed according to the integral layout consistent with the field application, and external parameters of the multi-instrument combined measurement system are calibrated;
step 4.2, arranging M length scales in the measuring range of the multi-instrument combined measuring system, wherein two ends of each length scale are respectively provided with a target seat, so that targets of different measuring instruments in the multi-instrument combined measuring system can be adapted, measuring points are kept unchanged along with the change of target types, and the directions of the length scales comprise horizontal, vertical and inclined directions;
step 4.3, the multi-instrument combined measuring system measures M length scales, so that the measuring points of each length scale are only measured by one measuring instrument, and the measuring points at two ends of the same length scale are not measured by the same measuring instrument, namely, the measuring points on the M length scales are all non-public measuring points; completing data conversion according to external parameters of the multi-instrument combined measurement system to obtain coordinates of non-public measurement points; repeating three times; the coordinates of the common measurement points at both ends of the ith length scale in the jth pass are respectively recorded as (x) i1j ,y i1j ,z i1j) and (xi2j ,y i2j ,z i2j ),i=1,2,…,M,j=1,2,3;
Step 4.4 using coordinates (x i1j ,y i1j ,z i1j )、(x i2j ,y i2j ,z i2j ) Calculate the length l of the 1 st length scale m1j As shown in formula (11), and calculates a reference value l with the length scale r1j Is a difference Deltal of (1) 1j As shown in formula (12); taking Deltal 11 、Δl 12 、Δl 13 The maximum value of (1) is taken as the error Deltal of the space length indication value at the 1 st length scale 1 As shown in formula (13);
step 4.5, repeating the step 4.4, and sequentially calculating the space length indication error Deltal at the position of the remaining M-1 length scales i I=2, 3, …, M; taking the maximum value of the space length indication errors at the M length scales as the space length indication error Deltal of the non-common measurement point in the calibration, as shown in a formula (14);
n and M are positive integers.
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