CN113310395A - 微裂纹应变传感元件及其制备方法和应用 - Google Patents
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Abstract
本发明公开了微裂纹应变传感元件及其制备方法和应用。所述微裂纹应变传感元件包括:基底层、金属薄膜、保护层、输出电极、封装层;所述金属薄膜设于基底层上,所述金属薄膜由两种金属材料沉积而成,所述金属薄膜设有图案化裂纹结构;所述保护层设于金属薄膜上;所述输出电极连接于金属薄膜,用于输出电信号;所述封装层设于保护层上。本发明的微裂纹应变传感元件制备方法相较现有裂纹制备技术具有更高精度的裂纹可控性且不会影响裂纹的使用寿命,以及更优化的实际操作难度;微裂纹的应变传感元件的高灵敏度、可穿戴性、小型化等特点可在医学领域中得到广泛的应用。
Description
技术领域
本发明属于微型智能电子技术领域,具体涉及微裂纹应变传感元件及其制备方法和应用。
背景技术
传统的机械量传感器很难满足低功耗,高稳定性,小型化,高精度,高移动性和其他优异性能,而这往往也是一些对传感器性能要求高的领域所需传感器的关键要素,如可穿戴电子产品领域、医学领域等,传统的可穿戴智能设备一般都是非柔性,应用仅局限于某些部位。随着柔性导电技术的发展,柔性可穿戴智能设备的出现成为了可能,柔性传感器是可穿戴智能设备的核心器件。现有的柔性微裂纹传感器的制备方法有着精度不足、影响传感器寿命等问题。
发明内容
为此,本发明所要解决的技术问题在于克服现有技术中传统机械量传感器灵敏度不足、尺寸过大、移动性不足等缺点;以及解决传统裂纹应变传感器制备方法精度不足,影响传感元件使用寿命等问题。
为解决上述技术问题,本发明提供了微裂纹应变传感元件,包括:基底层、金属薄膜、保护层、输出电极、封装层;所述金属薄膜设于基底层上,所述金属薄膜由两种金属材料沉积而成,所述金属薄膜设有图案化裂纹结构;所述保护层设于金属薄膜上;所述输出电极连接于金属薄膜,用于输出电信号;所述封装层设于保护层上。
在本发明的一个实施例中,所述基底层的材料包括:聚酰亚胺(PI)、聚乙烯对苯二甲酸脂(PET)、聚氯乙烯(PVC)、尼龙(PA)、流延聚丙烯薄膜(CPP)材料的薄膜。
在本发明的一个实施例中,所述金属薄膜层为采用金(Au)薄膜和铬(Cr)相沉积而成的薄膜,其中金(Au)替换的金属材料包括:铂(Pt)、银(Ag)、铜(Cu)。
在本发明的一个实施例中,所述保护层的原料采用环氧树脂A液与B液按照重量比3:1的比例混合搅拌而成。
在本发明的一个实施例中,所述封装层的原料采用聚二甲基硅氧烷(PDMS)样液按重量比10:1的比例混合搅拌而成。
本发明还提供了一种制备所述微裂纹应变传感元件的方法,包括如下步骤:
(1)根据所需传感元件形状制作带有相应镂空形状的镀膜模板,将镀膜模板放置于基底层上,在基底层上镀上由两种金属材料沉积而成的金属薄膜层;
(2)根据所需裂纹的密度与位置制作带有相应镂空形状的图案的保护层模板上设计,并喷涂上脱模剂;
(3)将保护层模板固定于金属薄膜层表面,并将保护层的原料刷涂在保护层模板上;
(4)待保护层固化后进行脱模,并布置输出电极,得到样片;
(5)将封装层的原料旋涂于样片表面;
(6)对金属薄膜层进行弯曲和拉伸操作以在金属薄膜层表面得到图案化裂纹结构。
在本发明的一个实施例中,所述镀膜模板的结构包括镂空部分,所述镂空部分两端设有凸出部分。
在本发明的一个实施例中,所述保护层模板的结构包括间隔的长方形状的镂空槽。
在本发明的一个实施例中,所述图案化裂纹结构为在金属薄膜层表面的裂纹阵列,所述裂纹位于在金属薄膜层表面间隔排列的保护层之间。
本发明提供所述的微裂纹应变传感元件或所述方法在医学领域的应用。
本发明的上述技术方案相比现有技术具有以下优点:
本发明所述的微裂纹应变传感元件及其制备方法和应用,所述微裂纹的应变传感元件相较现有的机械量传感器技术具有更高的机械量感应灵敏度、可移动性、可穿戴性以及小型化;基于模板法的微裂纹的可控图案化制备方法相较现有裂纹制备技术具有更高精度的裂纹可控性且不会影响裂纹的使用寿命,以及更优化的实际操作难度;微裂纹的应变传感元件的高灵敏度、可穿戴性、小型化等特点在医学领域中得到了广泛的应用。
附图说明
为了使本发明的内容更容易被清楚的理解,下面根据本发明的具体实施例并结合附图,对本发明作进一步详细的说明,其中
图1是本申请一实施方式中一种镀膜模板示意图。
图2是本申请一实施方式中一种保护层模板激光切割示意图。
图3是本申请一实施方式中一种微裂纹阵列示意图。
图4是本申请一实施方式中一种微裂纹应变传感元件示意图。
图5是本申请一实施方式中一种人体呼吸信号检测示意图。
图6是本申请一实施方式中一种人体脉搏信号实验示意图。
图7是本申请一实施方式中一种人体脉搏信号检测波形示意图。
具体实施方式
下面结合附图和具体实施例对本发明作进一步说明,以使本领域的技术人员可以更好地理解本发明并能予以实施,但所举实施例不作为对本发明的限定。
实施例1
本实施例提供了一种微裂纹应变传感元件,包括:基底层、金属薄膜、保护层、输出电极、封装层;所述金属薄膜设于基底层上,所述金属薄膜由两种金属材料沉积而成,所述金属薄膜设有图案化裂纹结构;所述保护层设于金属薄膜上;所述输出电极连接于金属薄膜,用于输出电信号;所述封装层设于保护层上。
具体地,所述基底层承载传感元件的底部,需要具有柔性、韧性、耐磨性等机械性能;所述基底层的材料包括:聚酰亚胺(PI)、聚乙烯对苯二甲酸脂(PET)、聚氯乙烯(PVC)、尼龙(PA)、流延聚丙烯薄膜(CPP)材料的薄膜。
具体地,所述金属薄膜层喷涂于基底层上,一般需要沉积两种金属材料以保证与基底层的良好粘合效果,其上会产生图案化裂纹作为传感器的核心要素;所述金属薄膜层为采用金(Au)薄膜和铬(Cr)相沉积而成的薄膜,其中金(Au)替换的金属材料包括:铂(Pt)、银(Ag)、铜(Cu)。
具体地,所述保护层利用激光切割的模板刷涂于金属薄膜上,根据材料中性层控制来达到控制裂纹图案化效果;所述保护层的原料采用环氧树脂A液与B液按照重量比3:1的比例混合搅拌而成。
具体地,所述封装层旋涂于金属薄膜及保护层上,保护裂纹金属层裂纹不受外界环境污染破环;所述封装层的原料采用聚二甲基硅氧烷(PDMS)样液按重量比10:1的比例混合搅拌而成。
实施例2
本实施例提供了一种制备所述微裂纹应变传感元件的方法,包括如下步骤:
步骤1:选取一块3.5cm x 5.3cm x 0.01cm厚度的不锈钢片,利用激光切割的方法切割出形状以制作镀膜模板,如图1所示,利用中间镂空部分在镀膜时形成预想的形状,两边凸出的部分是为了方便形成输出电极线;
步骤2:剪裁一片3.5cm x 5.3cm的PET薄膜,厚度为0.025mm,使用KH-100E型超声波清洗器将试样清洗干净,吹干;
步骤3:取一块3.5cm x 5.3cm x 1cm的载玻片,先在载玻片表面喷涂一层酒精,再将处理好的PET薄膜平整地铺在载玻片表面上。注意要将PET薄膜一端先接触载玻片,再缓慢放下,以防出现气泡,然后将步骤1中制作的镀膜模板放置在PET薄膜上,并用透明胶固定住,防止金属喷涂时飞溅;
步骤4:利用中科院苏州纳米所的SN201102003高真空磁控镀膜设备在PET薄膜上镀金属层,所用的靶材为Cr和Au。具体是先用Cr靶材沉积5nm的粘合层,再沉积50nm的Au层,沉积参数为:真空度5x10-4Pa,功率为200w,溅射速率为1A/s;
步骤5:取一块3.5cm x 5.3cm x 0.01cm厚度的不锈钢片,根据裂纹位置和密度要求设计间隔长方形的镂空形状,如图2所示,镂空的位置即为裂纹产生位置,根据设计的形状利用激光切割的方法在不锈钢片上切割,并喷涂上脱模剂以制备保护层模板;
步骤6:将环氧树脂A液与B液按照两液重量比3:1的比例混合,放到DF-101S型磁力搅拌机上搅拌10min,再将样液倒入80mmx80mm的培养皿中,一起放到真空干燥箱中抽真空2h,以去除气泡;
步骤7:将抽完真空环氧树脂样液放到V-1515型加热台上,60℃加热至样液半固化状态;
步骤8:待环氧树脂样液到达一定粘度时,将保护层模板放到步骤4制备出的PET-Au层上,并利用电磁铁固定,将环氧树脂样液刷涂在保护层模板上,待固化;
步骤9:环氧树脂固化后进行脱模,在PET-Au层两端凸起处布上电极线,用导电银浆作为粘合剂;
步骤10:按照样液与水重量比10:1的比例混合PDMS(道康宁公司)样液,放到DF-101S型磁力搅拌机上搅拌10min后再放入真空干燥箱2h;
将PDMS样液加入KW-4B型旋涂仪中,旋涂到步骤9制备出的样片表面,以作封装层,保护样片不被外部环境污染;
步骤11:将步骤10制备出的样片的金属薄膜层部分在所选取固定曲率(ρ)半径的圆棒上进行反复弯曲拉伸的操作,如ρ=2mm,此操作可以利用现有的圆棒拉伸设备完成,或手动完成,也可借助其他拉伸设备进行周期性与重复性的操作,以便能够在金属薄膜表面间隔的两块环氧树脂层之间获得如图3所示的微裂纹阵列,制备好的微裂纹传感器如图4所示。
实施例3
本实施例提供了一种将微裂纹传感元件在人体生理信号检测领域的应用,包括:
将微裂纹应变传感元件紧贴于人体胸腔处,传感器两端电极线连接万用表,并以固定频率记录人体呼吸过程的传感元件电阻阻值;
将所记录的阻值数据通过相对阻值(ΔR/R0)的计算进行处理,便可得到以时间为横坐标的呼吸波形图,根据波形图可以分析记录时间段人体生理状况或睡眠质量;
将微裂纹传感元件贴在人体手腕处,传感器两端电极线连接万用表,并通过软件实时处理相对阻值数据,便可以时间为横坐标实时输出脉搏检测曲线图,从曲线图中可分辨出脉搏波形周期中的主波、潮波和重振波,可以实时反映临床手术时患者的心率,从而判断患者生理状况。
进一步地,所述将柔性可控微裂纹传感元件在人体生理信号检测领域的实际用法中实时输出脉搏检测曲线的方法同样可用于实时检测人体呼吸情况。
实施例4
本实施例提供了一种将微裂纹传感元件应用于医学检测的实例。
如图5所示,将微裂纹传感器样片紧贴于实验对象的胸前,并将样片两端连接Keysight 34465A型万用表以检测电阻随着实验对象呼吸产生的实时变化,如图5所示。
呼吸是人体最重要的生理信号之一,呼吸所能传递的信息很大程度上可以反映一个人的生理健康状态。例如手术过程中人的呼吸情况可以实时反映人体生理状态;检测睡眠时人的呼吸数据可以作为衡量人体睡眠质量的重要依据等。微裂纹传感元件能够灵敏检测人体呼吸信号的原理和拉伸实验类似,当人体进行呼吸时,胸腔会随着吸气膨胀;随着呼气收缩,从而导致紧贴于胸腔处的微裂纹传感元件受到拉伸应变,从而导致电阻发生剧烈变化,基于柔性微裂纹应变传感元件的优秀性能,人体呼吸过程中可以导致很明显的传感器阻值变化,按一定频率记录人体呼吸过程中微裂纹应变传感元件的电阻阻值,并将所记录的阻值数据通过相对阻值(ΔR/R0)的计算进行处理,便可得到以时间为横坐标的呼吸波形图,根据波形图可以分析记录时间段人体生理状况或睡眠质量;
将微裂纹应变传感元件贴在实验对象手腕处,如图6所示;两端连接Keysight34465A型万用表,以检测传感器相对电阻随人体脉搏信号变化产生的波形,如图7所示;从中截取一段完整的脉搏周期,基于柔性微裂纹应变传感元件的优秀的灵敏度,可以从曲线图中很明显的分辨出一个周期脉搏波形的三个阶段:主波、潮波和重振波,如图7所示;
再通过提前编好的软件程序根据输入的柔性微裂纹传感元件电阻数据,实时处理计算得到相对阻值数据,便可以时间为横坐标实时输出脉搏检测曲线图,从而使柔性微裂纹传感器具有优秀的实时脉搏检测能力,可以实时反映临床手术时患者的心率,从而判断患者生理状况。为微裂纹应变传感器在未来智能医疗器械的应用中打下了坚实的基础。
显然,上述实施例仅仅是为清楚地说明所作的举例,并非对实施方式的限定。对于所属领域的普通技术人员来说,在上述说明的基础上还可以做出其它不同形式变化或变动。这里无需也无法对所有的实施方式予以穷举。而由此所引申出的显而易见的变化或变动仍处于本发明创造的保护范围之中。
Claims (10)
1.一种微裂纹应变传感元件,其特征在于,包括:
基底层;
金属薄膜,所述金属薄膜设于基底层上,所述金属薄膜由两种金属材料沉积而成,所述金属薄膜设有图案化裂纹结构;
保护层,所述保护层设于金属薄膜上;
输出电极,所述输出电极连接于金属薄膜,用于输出电信号;
封装层,所述封装层设于保护层上。
2.根据权利要求1所述的微裂纹应变传感元件,其特征在于,所述基底层的材料包括:聚酰亚胺、聚乙烯对苯二甲酸脂、聚氯乙烯、尼龙、流延聚丙烯薄膜材料的薄膜。
3.根据权利要求1所述的微裂纹应变传感元件,其特征在于,所述金属薄膜层为采用金薄膜和铬相沉积而成的薄膜,其中金替换的金属材料包括:铂、银、铜。
4.根据权利要求1所述的微裂纹应变传感元件,其特征在于,所述保护层的原料采用环氧树脂A液与B液按照重量比3:1的比例混合搅拌而成。
5.根据权利要求1所述的微裂纹应变传感元件,其特征在于,所述封装层的原料采用聚二甲基硅氧烷样液按重量比10:1的比例混合搅拌而成。
6.一种制备权利要求1-5任一项所述微裂纹应变传感元件的方法,其特征在于,包括如下步骤:
(1)根据所需传感元件形状制作带有相应镂空形状的镀膜模板,将镀膜模板放置于基底层上,在基底层上镀上由两种金属材料沉积而成的金属薄膜层;
(2)根据所需裂纹的密度与位置制作带有相应镂空形状的图案的保护层模板上设计,并喷涂上脱模剂;
(3)将保护层模板固定于金属薄膜层表面,并将保护层的原料刷涂在保护层模板上;
(4)待保护层固化后进行脱模,并布置输出电极,得到样片;
(5)将封装层的原料旋涂于样片表面;
(6)对金属薄膜层进行弯曲和拉伸操作以在金属薄膜层表面得到图案化裂纹结构。
7.根据权利要求6所述的方法,其特征在于,所述镀膜模板的结构包括镂空部分,所述镂空部分两端设有凸出部分。
8.根据权利要求6所述的方法,其特征在于,所述保护层模板的结构包括间隔的长方形状的镂空槽。
9.根据权利要求6所述的方法,其特征在于,所述图案化裂纹结构为在金属薄膜层表面的裂纹阵列,所述裂纹位于在金属薄膜层表面间隔排列的保护层之间。
10.权利要求1-5任一项所述的微裂纹应变传感元件或权利要求6-9任一项所述的方法在医学领域的应用。
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CN114136203A (zh) * | 2021-11-12 | 2022-03-04 | 中国科学院金属研究所 | 一种灵敏度高且循环稳定性好的柔性应变传感器的制备方法 |
WO2023206764A1 (zh) * | 2022-04-26 | 2023-11-02 | 苏州大学 | 一种微悬臂梁传感器及其制备方法 |
WO2023221036A1 (zh) * | 2022-05-19 | 2023-11-23 | 深圳市韶音科技有限公司 | 传感器及其制备方法 |
Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130255396A1 (en) * | 2012-03-30 | 2013-10-03 | Korea Advanced Institute Of Science And Technology | Surface shape measuring device |
JP2014190761A (ja) * | 2013-03-26 | 2014-10-06 | Railway Technical Research Institute | 亀裂監視材及び亀裂監視装置 |
US20160123820A1 (en) * | 2013-12-03 | 2016-05-05 | Global Frontier Center For Multiscale Energy Systems | High-sensitivity sensor comprising conductive thin film containing cracks and method for manufacturing same |
CN105627905A (zh) * | 2016-02-24 | 2016-06-01 | 清华大学 | 一种金属薄膜柔性应变传感器及其制备方法 |
CN105783697A (zh) * | 2016-05-18 | 2016-07-20 | 郑州大学 | 具有裂纹结构的柔性应变传感器及其制备方法 |
CN108444377A (zh) * | 2018-03-18 | 2018-08-24 | 吉林大学 | 基于规则微米裂纹阵列结构柔性应变传感器及其制备方法 |
CN108716885A (zh) * | 2018-06-13 | 2018-10-30 | 苏州大学 | 柔性应变传感器及其制备方法和应用 |
WO2018203658A1 (ko) * | 2017-05-02 | 2018-11-08 | 포항공과대학교 산학협력단 | 변형률 측정센서, 신체에 적용되는 변형률 측정센서를 이용한 데이터 처리 시스템 및 이를 이용한 데이터 처리 방법 |
CN108910818A (zh) * | 2018-06-12 | 2018-11-30 | 大连理工大学 | 一种柔性聚合物表面上金属纳米裂纹的制造方法 |
CN109855526A (zh) * | 2019-02-28 | 2019-06-07 | 吉林大学 | 一种基于干燥介导自组装的电阻式柔性应变传感器及其制备方法 |
CN110081995A (zh) * | 2019-04-08 | 2019-08-02 | 吉林大学 | 基于蝎子缝感受器的仿生柔性温度传感器及其制备方法 |
KR20190091876A (ko) * | 2018-01-29 | 2019-08-07 | 부산대학교 산학협력단 | 자가균열 스트레인 센서의 제조방법 |
CN110823085A (zh) * | 2019-11-19 | 2020-02-21 | 合肥工业大学 | 一种具有规则裂纹结构的柔性应变传感器及其制作方法 |
CN211401071U (zh) * | 2020-01-07 | 2020-09-01 | 零镜(深圳)科技有限责任公司 | 柔性传感器 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100561210C (zh) * | 2006-09-15 | 2009-11-18 | 西安交通大学 | 柔性基板上金属薄膜若干临界应变值测试方法 |
CN109900394A (zh) * | 2019-03-08 | 2019-06-18 | 吉林大学 | 一种仿生阵列传感元件及其制备方法 |
CN110450481B (zh) * | 2019-08-19 | 2020-06-19 | 吉林大学 | 一种仿生裂纹保护结构及其制备方法 |
-
2021
- 2021-05-26 CN CN202110578601.0A patent/CN113310395B/zh active Active
- 2021-08-10 US US17/799,642 patent/US20240027178A1/en active Pending
- 2021-08-10 WO PCT/CN2021/111707 patent/WO2022247018A1/zh active Application Filing
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130255396A1 (en) * | 2012-03-30 | 2013-10-03 | Korea Advanced Institute Of Science And Technology | Surface shape measuring device |
JP2014190761A (ja) * | 2013-03-26 | 2014-10-06 | Railway Technical Research Institute | 亀裂監視材及び亀裂監視装置 |
US20160123820A1 (en) * | 2013-12-03 | 2016-05-05 | Global Frontier Center For Multiscale Energy Systems | High-sensitivity sensor comprising conductive thin film containing cracks and method for manufacturing same |
CN105627905A (zh) * | 2016-02-24 | 2016-06-01 | 清华大学 | 一种金属薄膜柔性应变传感器及其制备方法 |
CN105783697A (zh) * | 2016-05-18 | 2016-07-20 | 郑州大学 | 具有裂纹结构的柔性应变传感器及其制备方法 |
WO2018203658A1 (ko) * | 2017-05-02 | 2018-11-08 | 포항공과대학교 산학협력단 | 변형률 측정센서, 신체에 적용되는 변형률 측정센서를 이용한 데이터 처리 시스템 및 이를 이용한 데이터 처리 방법 |
KR20190091876A (ko) * | 2018-01-29 | 2019-08-07 | 부산대학교 산학협력단 | 자가균열 스트레인 센서의 제조방법 |
CN108444377A (zh) * | 2018-03-18 | 2018-08-24 | 吉林大学 | 基于规则微米裂纹阵列结构柔性应变传感器及其制备方法 |
CN108910818A (zh) * | 2018-06-12 | 2018-11-30 | 大连理工大学 | 一种柔性聚合物表面上金属纳米裂纹的制造方法 |
CN108716885A (zh) * | 2018-06-13 | 2018-10-30 | 苏州大学 | 柔性应变传感器及其制备方法和应用 |
CN109855526A (zh) * | 2019-02-28 | 2019-06-07 | 吉林大学 | 一种基于干燥介导自组装的电阻式柔性应变传感器及其制备方法 |
CN110081995A (zh) * | 2019-04-08 | 2019-08-02 | 吉林大学 | 基于蝎子缝感受器的仿生柔性温度传感器及其制备方法 |
CN110823085A (zh) * | 2019-11-19 | 2020-02-21 | 合肥工业大学 | 一种具有规则裂纹结构的柔性应变传感器及其制作方法 |
CN211401071U (zh) * | 2020-01-07 | 2020-09-01 | 零镜(深圳)科技有限责任公司 | 柔性传感器 |
Non-Patent Citations (2)
Title |
---|
HYUNSUK JUNG 等: "Nano-Cracked Strain Sensor with High Sensitivity and Linearity by Controlling the Crack Arrangement", 《SENSORS》 * |
HYUNSUK JUNG 等: "Nano-Cracked Strain Sensor with High Sensitivity and Linearity by Controlling the Crack Arrangement", 《SENSORS》, vol. 19, no. 12, 25 June 2019 (2019-06-25), pages 2834 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114136203A (zh) * | 2021-11-12 | 2022-03-04 | 中国科学院金属研究所 | 一种灵敏度高且循环稳定性好的柔性应变传感器的制备方法 |
WO2023206764A1 (zh) * | 2022-04-26 | 2023-11-02 | 苏州大学 | 一种微悬臂梁传感器及其制备方法 |
WO2023221036A1 (zh) * | 2022-05-19 | 2023-11-23 | 深圳市韶音科技有限公司 | 传感器及其制备方法 |
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