CN113267552A - Novel nitrogen oxygen sensor ceramic chip - Google Patents

Novel nitrogen oxygen sensor ceramic chip Download PDF

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CN113267552A
CN113267552A CN202110529535.8A CN202110529535A CN113267552A CN 113267552 A CN113267552 A CN 113267552A CN 202110529535 A CN202110529535 A CN 202110529535A CN 113267552 A CN113267552 A CN 113267552A
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diffusion channel
diffusion
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pump cavity
ceramic layer
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CN113267552B (en
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易均金
高华
胥家军
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Gaoxin Environmental Protection Technology Suzhou Co ltd
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Gaoxin Environmental Protection Technology Suzhou Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/406Cells and probes with solid electrolytes
    • G01N27/407Cells and probes with solid electrolytes for investigating or analysing gases
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/406Cells and probes with solid electrolytes
    • G01N27/407Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4075Composition or fabrication of the electrodes and coatings thereon, e.g. catalysts
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02TCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T10/00Road transport of goods or passengers
    • Y02T10/10Internal combustion engine [ICE] based vehicles
    • Y02T10/40Engine management systems

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Abstract

The invention provides a novel nitrogen-oxygen sensor ceramic chip, and relates to the technical field of sensors. This nitrogen oxygen sensor ceramic chip includes from last to the sixth zirconia ceramic layer that stacks gradually down, be provided with the main pump cavity in the second zirconia ceramic layer, assist pump cavity and measure the pump cavity, through first diffusion channel intercommunication between main pump cavity and the nitrogen oxygen sensor ceramic chip outside, the main pump cavity passes through the second diffusion channel intercommunication with assisting the pump cavity, assist and pass through the third diffusion channel intercommunication between pump cavity and the measurement pump cavity, first diffusion channel, second diffusion channel and third diffusion channel are the cellular type diffusion channel structure that admits air. Through adopting the cellular type diffusion channel structure that admits air, effectively prevent the sensor inefficacy problem that knudsen diffusion, carbon deposit blockked up and inlet channel micro-cracking arouse, reduced the risk of nitrogen oxygen sensor ceramic chip degradation, promoted nitrogen oxygen sensor ceramic chip manufacture factory product percent of pass greatly.

Description

Novel nitrogen oxygen sensor ceramic chip
Technical Field
The invention relates to the technical field of sensors, in particular to a novel nitrogen-oxygen sensor ceramic chip.
Background
In a vehicle exhaust gas exhaust system, the nitrogen-oxygen concentration in the exhaust gas is detected by a ceramic core of a nitrogen-oxygen sensor sensing probe. The ceramic core is the most core part of the whole sensor, and the tail gas enters a cavity in the ceramic core through a diffusion channel in the ceramic core.
The design and preparation of the diffusion channel are the technical difficulties of the ceramic core. In the conventional art, one way is: the diffusion channel can be formed by a microporous structure with certain porosity, but the pore size of the micropores is too small, carbon deposition is easy to occur, and the gas molecules are diffused to cause that the concentration of the inlet gas is inaccurate due to the dispersion instability of the Knudsen diffusion; the other mode is as follows: the diffusion channel is formed by vertically non-attaching two adjacent layers of base materials of the ceramic sheet core, the process is difficult to realize, cracks are easily caused in the gap after sintering or under the high-temperature condition of 800 ℃ of the nitrogen-oxygen sensor, in addition, the sectional area of the gap is difficult to control, the air inflow is difficult to control, the product is scrapped, and the product scrappage is high in the scheme. Both of the above diffusion channels tend to degrade the performance of the ceramic core.
Disclosure of Invention
The invention aims to provide a novel nitrogen-oxygen sensor ceramic chip aiming at the defects of the prior art, so as to solve the problem that the performance of the ceramic chip is easily deteriorated due to the diffusion channel in the prior art.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
the invention provides a novel nitrogen-oxygen sensor ceramic chip, which comprises a first zirconia ceramic layer, a second zirconia ceramic layer, a third zirconia ceramic layer, a fourth zirconia ceramic layer, a fifth zirconia ceramic layer and a sixth zirconia ceramic layer which are sequentially laminated from top to bottom,
a common electrode is arranged on the first zirconium oxide ceramic layer, a main pump chamber, an auxiliary pump chamber and a measuring pump chamber are sequentially arranged in the second zirconium oxide ceramic layer from left to right, a main pump electrode is arranged on the upper side of the main pump chamber, a main pump reference electrode is arranged on the lower side of the main pump chamber, an auxiliary pump electrode is arranged on the upper side of the auxiliary pump chamber, a measuring pump electrode is arranged on the upper side of the measuring pump chamber, a measuring pump reference electrode is arranged on the lower side of the measuring pump chamber, the main pump chamber is communicated with the outside of the oxynitride sensor ceramic chip through a first diffusion channel, the main pump chamber is communicated with the auxiliary pump chamber through a second diffusion channel, the auxiliary pump chamber is communicated with the measuring pump chamber through a third diffusion channel, and the first diffusion channel, the second diffusion channel and the third diffusion channel are all in a hole type air inlet diffusion channel structure, the hole type air inlet diffusion channel structure is a cylindrical hollow airflow channel with a preset aperture;
a reference chamber communicated with the atmosphere is arranged on the right side of the fourth zirconia ceramic layer, and a reference electrode is arranged on the lower side of the reference chamber;
a platinum electrode heating wire is arranged between the fifth zirconia ceramic layer and the sixth zirconia ceramic layer.
Optionally, an alumina protective layer is provided in a part of a region between the common electrode and the first zirconia ceramic layer.
Alternatively, the hole type air inlet diffusion channel structure is manufactured by the following method: and clamping a cylindrical carbon rod with a preset aperture between the raw zirconia ceramic chips for isostatic pressing, and then sintering at a preset sintering temperature to ensure that the carbon rod is burnt to become carbon dioxide gas to be discharged, thereby forming a cylindrical hollow channel structure with the same shape as the carbon rod in the sintered zirconia ceramic layer.
Optionally, the carbon rod is made by: the carbon powder is molded into a cylindrical shape having a predetermined pore size to form a pre-formed carbon rod, and then the pre-formed carbon rod is sintered at a predetermined curing temperature to cure the structure of the pre-formed carbon rod, thereby forming the carbon rod.
Optionally, the first diffusion channel includes a plurality of first sub-diffusion channels arranged in parallel with each other and having the same size, the number of the plurality of first sub-diffusion channels is a1, and the aperture diameter of each first sub-diffusion channel is b1, the total through-hole area c1 of the first diffusion channel; the second diffusion channel includes a plurality of second sub-diffusion channels which are arranged in parallel with each other and have the same size, the number of the plurality of second sub-diffusion channels is a2, the aperture of each second sub-diffusion channel is b2, and the total through hole area of the second diffusion channel is c 2; the third diffusion channel includes a plurality of third sub-diffusion channels which are arranged in parallel with each other and have the same size, the number of the plurality of third sub-diffusion channels is a3, the aperture of each third sub-diffusion channel is b3, and the total through hole area of the third diffusion channel is c 3; the total through hole area is equal to the product of the through hole area of each corresponding sub-diffusion channel and the number of the sub-diffusion channels; wherein a1, a2 and a3 are all positive integers, b1, b2 and b3 are all in the range of 50-150 μm, b1 is not less than b2 is not less than b3, and c1 is not less than c2 is not less than c 3.
Alternatively, b1< b2< b3, and c1> c2> c 3.
Alternatively, b2 ═ d1 ═ b1, b3 ═ d2 × b2, c2 ═ e1 ═ c1, c3 ═ e2 ═ c2, where d1 is used to represent the proportionality coefficient of the aperture diameter of the second sub-diffusion channel to the aperture diameter of the first sub-diffusion channel, d2 is used to represent the proportionality coefficient of the aperture diameter of the third sub-diffusion channel to the aperture diameter of the second sub-diffusion channel, e1 is used to represent the proportionality coefficient of the total through-hole area of the second diffusion channel to the total through-hole area of the first diffusion channel, e2 is used to represent the proportionality coefficient of the total through-hole area of the third diffusion channel to the total through-hole area of the second diffusion channel, and 1.1< d1, d2< 1.5; 0.5< e1, e2< 0.9.
Alternatively, d1 ═ d2, and e1 ═ e 2.
Optionally, the plurality of first sub-diffusion channels, the plurality of second sub-diffusion channels and the plurality of third sub-diffusion channels all extend in the same plane parallel to the upper surface of the second zirconia ceramic layer.
Optionally, the same plane is located at a middle position in the second zirconia ceramic layer in a direction perpendicular to the upper surface of the second zirconia ceramic layer.
The beneficial effects of the invention include:
the invention provides a nitrogen-oxygen sensor ceramic chip which comprises a first zirconium oxide ceramic layer, a second zirconium oxide ceramic layer, a third zirconium oxide ceramic layer, a fourth zirconium oxide ceramic layer, a fifth zirconium oxide ceramic layer and a sixth zirconium oxide ceramic layer which are sequentially laminated from top to bottom, wherein a common electrode is arranged on the first zirconium oxide ceramic layer, a main pump cavity, an auxiliary pump cavity and a measuring pump cavity are sequentially arranged in the second zirconium oxide ceramic layer from left to right, a main pump electrode is arranged on the upper side of the main pump cavity, a main pump reference electrode is arranged on the lower side of the main pump cavity, an auxiliary pump electrode is arranged on the upper side of the auxiliary pump cavity, an auxiliary pump reference electrode is arranged on the lower side of the auxiliary pump cavity, a measuring pump electrode is arranged on the upper side of the measuring pump cavity, a measuring pump reference electrode is arranged on the lower side of the measuring pump cavity, and the main pump cavity is communicated with the outside of the nitrogen-oxygen sensor ceramic chip through a first diffusion channel, the main pump chamber is communicated with the auxiliary pump chamber through a second diffusion channel, the auxiliary pump chamber is communicated with the measuring pump chamber through a third diffusion channel, the first diffusion channel, the second diffusion channel and the third diffusion channel are all of a hole type air inlet diffusion channel structure, and the hole type air inlet diffusion channel structure is a cylindrical hollow airflow channel with a preset aperture; a reference chamber communicated with the atmosphere is arranged on the right side of the fourth zirconia ceramic layer, and a reference electrode is arranged on the lower side of the reference chamber; a platinum electrode heating wire is arranged between the fifth zirconia ceramic layer and the sixth zirconia ceramic layer. Through adopting the cellular type diffusion channel structure that admits air, effectively prevent the sensor inefficacy problem that knudsen diffusion, carbon deposit blockked up and inlet channel micro-cracking arouse, reduced the risk of nitrogen oxygen sensor ceramic chip degradation, promoted nitrogen oxygen sensor ceramic chip manufacture factory product percent of pass greatly.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed for the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a novel oxynitride sensor ceramic chip provided by an embodiment of the invention;
FIG. 2 is a schematic cross-sectional view of a first diffusion channel of a novel ceramic chip for a NOx sensor according to another embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In a vehicle exhaust gas exhaust system, the nitrogen-oxygen concentration in the exhaust gas is detected by a ceramic core of a nitrogen-oxygen sensor sensing probe. The ceramic core is the most core part of the whole sensor, and the tail gas enters a cavity in the ceramic core through a diffusion channel in the ceramic core. The design and preparation of the diffusion channel are the technical difficulties of the ceramic core. In the conventional art, one way is: the diffusion channel can be formed by a microporous structure with certain porosity, but the pore size of the micropores is too small, carbon deposition is easy to occur, and the gas molecules are diffused to cause that the concentration of the inlet gas is inaccurate due to the dispersion instability of the Knudsen diffusion; the other mode is as follows: the diffusion channel is formed by vertically non-attaching two adjacent layers of base materials of the ceramic sheet core, the process is difficult to realize, cracks are easily caused in the gap after sintering or under the high-temperature condition of 800 ℃ of the nitrogen-oxygen sensor, in addition, the sectional area of the gap is difficult to control, the air inflow is difficult to control, the product is scrapped, and the product scrappage is high in the scheme. Both of the above diffusion channels tend to degrade the performance of the ceramic core. Therefore, the invention provides a novel nitrogen-oxygen sensor ceramic chip.
Fig. 1 shows a schematic structural diagram of a novel oxynitride sensor ceramic chip provided by an embodiment of the invention. As shown in fig. 1, the ceramic chip of the oxynitride sensor comprises a first zirconia ceramic layer 101, a second zirconia ceramic layer 102, a third zirconia ceramic layer 103, a fourth zirconia ceramic layer 104, a fifth zirconia ceramic layer 105 and a sixth zirconia ceramic layer 106 which are stacked in sequence from top to bottom, a common electrode 107 is disposed on the first zirconia ceramic layer 101, a main pump chamber 108, an auxiliary pump chamber 109 and a measurement pump chamber 110 are disposed in the second zirconia ceramic layer 102 in sequence from left to right, a main pump electrode 181 is disposed on the upper side of the main pump chamber 108, a main pump reference electrode 182 is disposed on the lower side of the main pump chamber 108, an auxiliary pump electrode 191 is disposed on the upper side of the auxiliary pump chamber 109, an auxiliary pump reference electrode 192 is disposed on the lower side of the auxiliary pump chamber 109, a measurement pump electrode 111 is disposed on the upper side of the measurement pump chamber 110, a measurement pump reference electrode 112 is disposed on the lower, the main pump chamber 108 is communicated with the outside of the nitrogen-oxygen sensor ceramic chip through a first diffusion channel 113, the main pump chamber 108 is communicated with an auxiliary pump chamber 108 through a second diffusion channel 114, the auxiliary pump chamber 108 is communicated with the measuring pump chamber 110 through a third diffusion channel 115, the first diffusion channel 113, the second diffusion channel 114 and the third diffusion channel 115 are all of a hole-type air inlet diffusion channel structure, and the hole-type air inlet diffusion channel structure is a cylindrical hollow airflow channel with a preset aperture; a reference chamber 116 communicated with the atmosphere is arranged on the right side of the fourth zirconia ceramic layer 104, and a reference electrode 117 is arranged on the lower side of the reference chamber 116; a platinum electrode heating wire 118 is disposed between the fifth zirconia ceramic layer 105 and the sixth zirconia ceramic layer 106.
When the sensor works, tail gas sequentially enters a main pump chamber 108, an auxiliary pump chamber 109 and a measuring pump chamber 110 from a first diffusion channel 113, a second diffusion channel 114 and a third diffusion channel 115, oxygen in the chambers is continuously pumped out by a pump oxygen electrode in a ceramic chip, and the concentration value of the tail gas is fed back to a controller electric control unit in a current form (Ip0 represents oxygen current; Ip2 represents nitrogen-oxygen current; Ip1 is that adjusting current is not output); the electronic control unit controls the heating temperature of the sensor probe (heated by the platinum electrode heater wire 118) at the same time, and through a series of signal conditioning, the Nox concentration and the oxygen concentration in the measurement pump chamber 110 are finally calculated and determined. When the device is used in a vehicle, the electronic control unit is communicated with a vehicle control center through a CAN bus, the concentration of Nox and O2 is sent to the vehicle CAN bus in real time, and nitrogen and oxygen before China Liu provides basis for SCR injection amount so as to reduce the emission of Nox. In addition, after the national six, the nitrogen and oxygen signals are read and written by an OBD system and then whether the emission is qualified is judged; the back oxynitride and the front oxynitride form a closed-loop control.
Through adopting the cellular type diffusion channel structure that admits air, effectively prevent the sensor inefficacy problem that knudsen diffusion, carbon deposit blockked up and inlet channel micro-cracking arouse, reduced the risk of nitrogen oxygen sensor ceramic chip degradation, promoted nitrogen oxygen sensor ceramic chip manufacture factory product percent of pass greatly.
Alternatively, an alumina protective layer 119 is provided in a part of the region between the common electrode 107 and the first zirconia ceramic layer 101.
Alternatively, the hole type air inlet diffusion channel structure is manufactured by the following method: and clamping a cylindrical carbon rod with a preset aperture between the raw zirconia ceramic chips for isostatic pressing, and then sintering at a preset sintering temperature to ensure that the carbon rod is burnt to become carbon dioxide gas to be discharged, thereby forming a cylindrical hollow channel structure with the same shape as the carbon rod in the sintered zirconia ceramic layer. Optionally, the carbon rod is made by: the carbon powder is molded into a cylindrical shape having a predetermined pore size to form a pre-formed carbon rod, and then the pre-formed carbon rod is sintered at a predetermined curing temperature to cure the structure of the pre-formed carbon rod, thereby forming the carbon rod.
Optionally, the first diffusion channel includes a plurality of first sub-diffusion channels arranged in parallel with each other and having the same size, the number of the plurality of first sub-diffusion channels is a1, and the aperture diameter of each first sub-diffusion channel is b1, the total through-hole area c1 of the first diffusion channel; the second diffusion channel includes a plurality of second sub-diffusion channels which are arranged in parallel with each other and have the same size, the number of the plurality of second sub-diffusion channels is a2, the aperture of each second sub-diffusion channel is b2, and the total through hole area of the second diffusion channel is c 2; the third diffusion channel includes a plurality of third sub-diffusion channels which are arranged in parallel with each other and have the same size, the number of the plurality of third sub-diffusion channels is a3, the aperture of each third sub-diffusion channel is b3, and the total through hole area of the third diffusion channel is c 3; the total through hole area is equal to the product of the through hole area of each corresponding sub-diffusion channel and the number of the sub-diffusion channels; wherein a1, a2 and a3 are all positive integers, b1, b2 and b3 are all in the range of 50-150 μm, b1 is not less than b2 is not less than b3, and c1 is not less than c2 is not less than c 3.
Fig. 2 shows a schematic cross-sectional view of a first diffusion channel of a novel ceramic chip for a nitrogen-oxygen sensor according to another embodiment of the present invention, and as shown in fig. 2, the first diffusion channel 113 may include a plurality of first sub-diffusion channels 131 arranged in parallel with each other and having the same size, and although four first sub-diffusion channels 131 are shown in fig. 2, it should be understood that the number of the first sub-diffusion channels 131 is not limited thereto. The sub-diffusion channels corresponding to the second diffusion channel 114 and the third diffusion channel 115 may also be arranged in a similar manner as in fig. 2.
Alternatively, b1< b2< b3, and c1> c2> c 3. Alternatively, b2 ═ d1 ═ b1, b3 ═ d2 × b2, c2 ═ e1 ═ c1, c3 ═ e2 ═ c2, where d1 is used to represent the proportionality coefficient of the aperture diameter of the second sub-diffusion channel to the aperture diameter of the first sub-diffusion channel, d2 is used to represent the proportionality coefficient of the aperture diameter of the third sub-diffusion channel to the aperture diameter of the second sub-diffusion channel, e1 is used to represent the proportionality coefficient of the total through-hole area of the second diffusion channel to the total through-hole area of the first diffusion channel, e2 is used to represent the proportionality coefficient of the total through-hole area of the third diffusion channel to the total through-hole area of the second diffusion channel, and 1.1< d1, d2< 1.5; 0.5< e1, e2< 0.9. Alternatively, d1 ═ d2, and e1 ═ e 2. From first diffusion channel to third diffusion channel, through enlarging aperture size in proper order, avoid getting into the carbon particle in the cavity and blockking up, through reducing total through-hole area in proper order, can increase the velocity of flow of air current in first diffusion channel to the third diffusion channel in proper order, further reduced the risk of carbon deposit.
Optionally, the plurality of first sub-diffusion channels, the plurality of second sub-diffusion channels and the plurality of third sub-diffusion channels all extend in the same plane parallel to the upper surface of the second zirconia ceramic layer. Optionally, the same plane is located at a middle position in the second zirconia ceramic layer in a direction perpendicular to the upper surface of the second zirconia ceramic layer.
In conclusion, the embodiment of the invention ensures that the gas inlet flow is stable by using the small-hole structure, the diffusion channel is not easy to deform, and the accurate measurement of the nitrogen and oxygen gas components is facilitated because the single-hole diffusion area is enlarged and the Knudsen diffusion is avoided. However, the process of the small hole is a technical difficulty, and the embodiment of the invention solves the problem by the following scheme: the raw ceramic pieces of ZrO2 were laminated by isostatic pressing with a fine carbon rod sandwiched therebetween, which did not easily cause residual thermal stress; in order to make the carbon rod not easy to be broken or crushed, the carbon rod is formed in a die-casting manner in a die press and is presintered at a certain temperature to form a certain mechanical strength (like a pencil lead shape), the whole carbon rod enters a sintering process after isostatic pressing, the carbon rod is also burnt at 1500 ℃ to become CO2 gas to be discharged, and thus, a round hole-shaped structure of the carbon rod is formed. By utilizing the hole type air inlet diffusion channel structure, the problems that the traditional product is easy to lose efficacy and the rejection rate of the ceramic tablet core of a manufacturer is high are solved, the production cost is saved and the product quality is improved.
The above embodiments are merely illustrative of the technical concept and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the content of the present invention and implement the present invention, and not to limit the scope of the present invention, and all equivalent changes or modifications made according to the spirit of the present invention should be covered in the scope of the present invention.

Claims (10)

1. A novel nitrogen-oxygen sensor ceramic chip is characterized by comprising a first zirconia ceramic layer, a second zirconia ceramic layer, a third zirconia ceramic layer, a fourth zirconia ceramic layer, a fifth zirconia ceramic layer and a sixth zirconia ceramic layer which are sequentially laminated from top to bottom,
be provided with common electrode on the first zirconia ceramic layer main pump cavity, auxiliary pump cavity and measuring pump cavity have set gradually from a left side to the right side in the second zirconia ceramic layer, the upside of main pump cavity is provided with the main pump electrode, the downside of main pump cavity is provided with the main pump reference electrode, the upside of auxiliary pump cavity is provided with auxiliary pump electrode, the downside of auxiliary pump cavity is provided with auxiliary pump reference electrode, the upside of measuring pump cavity is provided with the measuring pump electrode, the downside of measuring pump cavity is provided with the measuring pump reference electrode, the main pump cavity with through first diffusion channel intercommunication between the oxynitride sensor ceramic chip outside, the main pump cavity with auxiliary pump cavity passes through second diffusion channel intercommunication, auxiliary pump cavity with through third diffusion channel intercommunication between the measuring pump cavity, first diffusion channel, second diffusion channel, The second diffusion channel and the third diffusion channel are both of hole type air inlet diffusion channel structures, and the hole type air inlet diffusion channel structures are cylindrical hollow airflow channels with preset apertures;
a reference chamber communicated with the atmosphere is arranged on the right side of the fourth zirconia ceramic layer, and a reference electrode is arranged on the lower side of the reference chamber;
and a platinum electrode heating wire is arranged between the fifth zirconia ceramic layer and the sixth zirconia ceramic layer.
2. The novel ceramic chip for an oxynitride sensor according to claim 1, wherein an alumina protective layer is provided in a part of the region between the common electrode and the first zirconia ceramic layer.
3. The novel ceramic chip for a nitrogen-oxygen sensor as claimed in claim 1, wherein said hole-type gas-inlet diffusion channel structure is made by: and clamping the cylindrical carbon rod with the preset aperture between the green zirconia ceramic chips for isostatic pressing, and then sintering at a preset sintering temperature to ensure that the carbon rod is burnt to be changed into carbon dioxide gas to be discharged, thereby forming a cylindrical hollow channel structure with the same shape as the carbon rod in the sintered zirconia ceramic layer.
4. The novel ceramic chip of claim 3, wherein the carbon rod is made by: and molding carbon powder into a cylindrical shape having the predetermined pore size to form a pre-formed carbon rod, and then sintering the pre-formed carbon rod at a predetermined curing temperature to cure the structure of the pre-formed carbon rod, thereby forming the carbon rod.
5. The novel ceramic chip for a nitrogen oxygen sensor as claimed in claim 4, wherein the first diffusion channel comprises a plurality of first sub-diffusion channels arranged in parallel with each other and having the same size, the number of the plurality of first sub-diffusion channels is a1, the aperture diameter of each first sub-diffusion channel is b1, and the total through hole area c1 of the first diffusion channel; the second diffusion channel comprises a plurality of second sub-diffusion channels which are arranged in parallel with each other and have the same size, the number of the plurality of second sub-diffusion channels is a2, the aperture of each second sub-diffusion channel is b2, and the total through hole area of the second diffusion channel is c 2; the third diffusion channel comprises a plurality of third sub-diffusion channels which are arranged in parallel with each other and have the same size, the number of the plurality of third sub-diffusion channels is a3, the aperture of each third sub-diffusion channel is b3, and the total through hole area of the third diffusion channel is c 3; the total through hole area is equal to the product of the through hole area of each corresponding sub-diffusion channel and the number of the sub-diffusion channels; wherein a1, a2 and a3 are all positive integers, b1, b2 and b3 are all in the range of 50-150 μm, b1 is not less than b2 is not less than b3, and c1 is not less than c2 is not less than c 3.
6. The novel ceramic chip of claim 5, wherein b1< b2< b3, and c1> c2> c 3.
7. The novel ceramic chip of claim 6, wherein b2 ═ d1 × b1, b3 ═ d2 × b2, c2 ═ e1 × c1, c3 ═ e2 ═ c2, wherein d1 is used to represent the proportionality coefficient of the pore diameter of the second sub-diffusion channel relative to the pore diameter of the first sub-diffusion channel, d2 is used to represent the proportionality coefficient of the pore diameter of the third sub-diffusion channel relative to the pore diameter of the second sub-diffusion channel, e1 is used to represent the proportionality coefficient of the total through-hole area of the second diffusion channel relative to the total through-hole area of the first diffusion channel, e2 is used to represent the proportionality coefficient of the total through-hole area of the third diffusion channel relative to the total through-hole area of the second diffusion channel, and 1.1< d1, d2< 1.5; 0.5< e1, e2< 0.9.
8. The novel ceramic chip of claim 7, wherein d1 ═ d2 and e1 ═ e 2.
9. The novel ceramic oxynitride sensor chip of claim 5 wherein the first plurality of sub-diffusion channels, the second plurality of sub-diffusion channels and the third plurality of sub-diffusion channels all extend in the same plane parallel to the top surface of the second ceramic layer of zirconia.
10. The novel oxynitride sensor ceramic chip of claim 9 wherein the same plane is located at a middle position in the second zirconia ceramic layer in a direction perpendicular to the upper surface of the second zirconia ceramic layer.
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