CN113251965A - Easy cooling probe structure of vacuum evaporation machine - Google Patents
Easy cooling probe structure of vacuum evaporation machine Download PDFInfo
- Publication number
- CN113251965A CN113251965A CN202110738884.0A CN202110738884A CN113251965A CN 113251965 A CN113251965 A CN 113251965A CN 202110738884 A CN202110738884 A CN 202110738884A CN 113251965 A CN113251965 A CN 113251965A
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- probe
- grooves
- cooling
- flow passages
- cooling liquid
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- 239000000523 sample Substances 0.000 title claims abstract description 150
- 238000001816 cooling Methods 0.000 title claims abstract description 28
- 238000007738 vacuum evaporation Methods 0.000 title claims description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 44
- 238000000576 coating method Methods 0.000 claims abstract description 28
- 239000011248 coating agent Substances 0.000 claims abstract description 27
- 239000013078 crystal Substances 0.000 claims abstract description 20
- 239000000110 cooling liquid Substances 0.000 claims description 34
- 239000000498 cooling water Substances 0.000 claims description 23
- 230000001788 irregular Effects 0.000 claims description 2
- 239000002826 coolant Substances 0.000 abstract description 10
- 239000007788 liquid Substances 0.000 abstract description 7
- 238000001771 vacuum deposition Methods 0.000 abstract 2
- 238000001704 evaporation Methods 0.000 description 10
- 230000008020 evaporation Effects 0.000 description 9
- 239000010408 film Substances 0.000 description 9
- 238000001514 detection method Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000007747 plating Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000005253 cladding Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
- G01B17/02—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness
- G01B17/025—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness for measuring thickness of coating
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The application provides an easy cooling probe structure of vacuum deposition machine, easy cooling probe structure is used for detecting the thickness by the coating film rete of coating film work piece, easy cooling probe structure includes probe mounting, condenser tube and cavity mounting, condenser tube is connected with the probe mounting, the cavity mounting be used for with easy cooling probe structure is fixed with vacuum deposition machine's main cavity body board, the probe mounting has one or more recess, and the bottom surface of recess has a through-hole, and the crystal oscillator piece sets up on the bottom surface of recess, and the probe setting is in the top of crystal oscillator piece and the lower extreme of probe is in the inside of recess, the probe mounting is fixed crystal oscillator piece and probe in the corresponding position of recess, the inside of probe mounting still has the coolant liquid runner, and condenser tube comprises inlet tube and outlet pipe, the one end of coolant liquid runner with advance water piping connection, The other end is connected with the water outlet pipe.
Description
Technical Field
The invention relates to the technical field of vacuum evaporation machines, in particular to an easily-cooled probe structure of a vacuum evaporation machine.
Background
The vacuum evaporation plating machine is used for evaporating and gasifying a coating material (or called a coating material) by means of current heating, electron beam bombardment heating, ion source bombardment and the like under a vacuum condition, and then enabling gasified particles to fly to the surface of a substrate to be condensed, and finally forming a thin film. The vacuum evaporation has the advantages of simple film forming method, high film purity and compactness, unique film structure and performance and the like, thereby being widely applied.
In the processing technique of vacuum evaporation, a crucible is adopted to gasify a coating material under the vacuum condition, and the crucible comprises: the evaporation coating device comprises an evaporation coating cavity and an evaporation coating source (source) arranged in the evaporation coating cavity, wherein the evaporation coating source is heated to evaporate evaporation coating materials evaporated in the evaporation coating source, the evaporation coating materials are upwards evaporated in a fan-shaped structure, a coating pot with an umbrella-shaped structure for bearing a coated workpiece is arranged above a crucible, and the coated workpiece is fixed on the coating pot, so that molecules of the evaporation coating materials are deposited on the coated workpiece to form a coating film. In the process of coating, in order to detect the thickness of the coating on the surface of the coated workpiece, the thickness of the coating film layer of the coated workpiece needs to be detected through a probe structure in the coating process, the probe structure comprises a probe and a crystal oscillator wafer, however, in the detection process, the probe and the crystal oscillator wafer can be affected by high temperature, so that the detection is unstable, and the detection precision is reduced. Therefore, in the prior art, the cooling water pipe is directly contacted with the surface of the probe, but the contact area of the cooling water pipe and the probe is small, and the cooling effect is still not ideal.
In view of the above, the invention provides an easily-cooled probe structure of a vacuum evaporation machine, which has the advantages of remarkably improving the cooling effect, obviously improving the detection precision of the probe for detecting the coating thickness of a coated workpiece and having low cost.
Disclosure of Invention
The invention aims to provide an easily-cooled probe structure of a vacuum evaporation machine, which has the advantages of obviously improved cooling effect, obviously improved detection precision of the probe for detecting the coating thickness of a coated workpiece and low cost.
The utility model provides an easy cooling probe structure of vacuum evaporation machine, be provided with the coolant liquid runner in probe mounting 1, the coolant liquid runner distributes around the probe, the area of contact of coolant liquid and probe has been increased, thereby promote the cooling effect, and, the coolant liquid is direct and probe mounting direct contact, the coolant liquid of prior art is in the coolant pipe, contact with the probe mounting through condenser pipe, the conductibility of this application than prior art temperature is more excellent, thereby promote the cooling effect from two aspects, the cooling effect is showing and is improving, the detection precision of the cladding material thickness of probe detection by the coating film work piece has obviously been improved. Furthermore, the easily-cooled probe structure of the vacuum evaporation machine can be one or more probes, and the shape of the probe fixing piece and the shape of the cooling liquid flow channel can be adaptively designed according to the number of the probes. The present applicant has completed the present application on this basis.
An easy-cooling probe structure of a vacuum evaporation machine is used for detecting the thickness of a coating film layer of a coated workpiece, and comprises a probe fixing piece 1, a cooling water pipe 2 and a cavity fixing piece 3, wherein the cooling water pipe 2 is connected with the probe fixing piece 1, the cavity fixing piece 3 is used for fixing the easy-cooling probe structure with a main cavity plate of the vacuum evaporation machine, the probe fixing piece 1 is provided with one or more grooves 11, the bottom surface of each groove 11 is provided with a through hole 111, a crystal oscillator plate 4 is arranged on the bottom surface of each groove 11, a probe 5 is arranged above the crystal oscillator plate 4, the lower end of the probe 5 is arranged inside each groove 11, the probe fixing piece 1 fixes the crystal oscillator plate 4 and the probe 5 at the corresponding position of each groove 11, a cooling liquid flow passage 12 is also arranged inside the probe fixing piece 1, and the cooling water pipe 2 consists of a water inlet pipe 21 and a water outlet pipe 22, one end of the cooling liquid flow passage 12 is connected with the water inlet pipe 21, and the other end is connected with the water outlet pipe 22.
In some embodiments, the depth of the groove 11 is less than the thickness of the probe holder 1, the width of the through hole 111 is less than the width of the groove 11, and the through hole 111 is located in the middle of the groove 11.
Further, the groove 11 is one of a square, a rectangle, a circle and an irregular shape, and the shape of the through hole 111 is the same as that of the groove 11.
Further preferably, the groove 11 and the through hole 111 are both circular, the diameter of the groove 11 is smaller than the width of the probe fixing part 1, and the diameter of the through hole 111 is smaller than the diameter of the groove 11.
In some embodiments, the probe holder 1 is one of a cube, a cuboid, and a cylinder, one or more grooves 11 are uniformly distributed in the probe holder 1, the number of the grooves 11 is the same as the number of the crystal plates 4 and the probes 5, and one crystal plate 4 and one probe 5 are disposed in one groove 11.
Further, there are a plurality of grooves 11, the shape of the cooling liquid flow channel 12 is related to the number of the grooves 11, and the shape or/and size of the cooling liquid flow channel 12 is different when the number of the grooves 11 is different.
Further, there are two grooves 11, and the cooling liquid flow passage 12 is an elliptical flow passage provided at the periphery of the two grooves 11.
Further, there are three grooves 11, and the cooling liquid flow passage 12 is a circular flow passage provided at the periphery of the three grooves 11, or the cooling liquid flow passage 12 is a circular flow passage provided at the inner and outer peripheries of the three grooves 11 and having a flow passage connecting the two circular flow passages.
Further, there are four grooves 11, the cooling liquid channel 12 is "cross" shaped or "field" shaped, or the cooling liquid channel 12 is a circular channel disposed at the inner periphery of the four grooves 11 and an elliptical channel disposed at the outer periphery and has a channel connecting the inner and outer channels.
Further, there are five grooves 11, and the cooling liquid flow passages 12 are wave-shaped flow passages provided at the peripheries of the five grooves 11, or the cooling liquid flow passages 12 are circular flow passages provided at the inner peripheries of the five grooves 11 and oval flow passages provided at the peripheries and have flow passages connecting the inner and outer flow passages.
Further, the number of the grooves 11 is six, and the cooling liquid flow passages 12 are wave-shaped flow passages provided on the peripheries of the six grooves 11, or the cooling liquid flow passages 12 are circular flow passages provided on the inner and outer peripheries of the six grooves 11 and have flow passages connecting the two circular flow passages.
In some embodiments, one or more cooling water pipes 2 are provided, and the water inlet pipe 21 and the water outlet pipe 22 of the cooling water pipe 2 are distributed and fixed on any surface of the probe fixing member 1.
Further preferably, the water inlet pipe 21 and the water outlet pipe 22 are both connected with the upper surface of the probe fixing member 1, or one of the water inlet pipe 21 and the water outlet pipe 22 is connected with the upper surface of the probe fixing member 1, and the other is connected with the lower surface of the probe fixing member 1, or one of the water inlet pipe 21 and the water outlet pipe 22 is connected with the left side surface of the probe fixing member 1, and the other is connected with the right side surface of the probe fixing member 1, or one of the water inlet pipe 21 and the water outlet pipe 22 is connected with the front side surface of the probe fixing member 1, and the other is connected with the right side surface of the probe fixing member 1.
In some embodiments, the probe fixture 1 may or may not be rotatable.
Further, when there are one or two grooves 11 of the probe fixing member 1, the probe fixing member 1 cannot rotate, and when the number of the grooves 11 of the probe fixing member 1 is greater than or equal to three, the probe fixing member 1 can rotate.
In some embodiments, the cavity fixing member 3 is connected to the cooling water pipe 2 or the probe fixing member 1, and the cavity fixing member 3 is fixed and sealed to a main cavity plate of the vacuum evaporation machine.
Drawings
The above described and other features of the present disclosure will be more fully described when read in conjunction with the following drawings. It is appreciated that these drawings depict only several embodiments of the disclosure and are therefore not to be considered limiting of its scope. The present disclosure will be described more clearly and in detail by using the accompanying drawings.
Fig. 1 is a schematic structural diagram of an easy-cooling probe structure of a vacuum evaporator according to embodiment 1 of the present application.
Fig. 2 is a sectional view of a probe holder of an easy-cooling probe structure of a vacuum evaporator according to embodiment 1 of the present application.
Fig. 3 is a schematic structural view of a probe holder of an easy-cooling probe structure of a vacuum evaporator according to embodiment 2 of the present application.
Fig. 4 is an exploded view of fig. 3 of the present application.
Fig. 5 is a schematic structural diagram of a groove and a coolant flow channel of a probe fixing member of an easy-cooling probe structure of a vacuum evaporator according to embodiment 2 of the present application.
Description of the main element symbols:
the device comprises a probe fixing piece 1, a cooling water pipe 2, a cavity fixing piece 3, a crystal oscillator plate 4, a probe 5, a groove 11, a through hole 111, a cooling liquid flow channel 12, a water inlet pipe 21 and a water outlet pipe 22.
Detailed Description
The following examples are described to aid in the understanding of the present application and are not, and should not be construed to, limit the scope of the present application in any way.
In the following description, those skilled in the art will recognize that components may be described throughout this discussion as separate functional units (which may include sub-units), but those skilled in the art will recognize that various components or portions thereof may be divided into separate components or may be integrated together (including being integrated within a single system or component).
Also, connections between components or systems are not intended to be limited to direct connections. Rather, data between these components may be modified, reformatted, or otherwise changed by the intermediate components. Additionally, additional or fewer connections may be used. It should also be noted that the terms "coupled," "connected," or "input" and "fixed" are understood to encompass direct connections, indirect connections, or fixed through one or more intermediaries.
In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "side", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings or orientations or positional relationships commonly recognized in the product of the application, and are only used for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present application.
Example 1:
an easily-cooled probe structure of a vacuum evaporation machine is disclosed, as shown in fig. 1-2, the easily-cooled probe structure is used for detecting the thickness of a coating film layer of a coated workpiece, the easily-cooled probe structure comprises a probe fixing member 1, a cooling water pipe 2 and a cavity fixing member 3, the cooling water pipe 2 is connected with the probe fixing member 1, the cavity fixing member 3 is used for fixing the easily-cooled probe structure with a main cavity plate of the vacuum evaporation machine, the probe fixing member 1 is provided with two grooves 11, the bottom surface of each groove 11 is provided with a through hole 111, a crystal oscillator plate 4 is arranged on the bottom surface of each groove 11, a probe 5 is arranged above the crystal oscillator plate 4, the lower end of the probe 5 is arranged inside each groove 11, the probe fixing member 1 fixes the crystal oscillator plate 4 and the probe 5 at a position corresponding to the groove 11, and a cooling liquid flow channel 12 is further arranged inside the probe fixing member 1, the cooling water pipe 2 is composed of a water inlet pipe 21 and a water outlet pipe 22, one end of the cooling liquid flow passage 12 is connected with the water inlet pipe 21, and the other end is connected with the water outlet pipe 22.
The depth of the groove 11 is smaller than the thickness of the probe fixing piece 1, the width of the through hole 111 is smaller than the width of the groove 11, and the through hole 111 is located in the middle of the groove 11. The groove 11 and the through hole 111 are both circular, the diameter of the groove 11 is smaller than the width of the probe fixing piece 1, and the diameter of the through hole 111 is smaller than the diameter of the groove 11. The probe fixing piece 1 is a cuboid, and the two grooves 11 are uniformly distributed in the probe fixing piece 1. The number of the grooves 11 is two, and the cooling liquid flow passages 12 are oval flow passages arranged on the peripheries of the two grooves 11. One cooling water pipe 2 is arranged, and the water inlet pipe 21 and the water outlet pipe 22 are both connected with the upper surface of the probe fixing piece 1. The probe fixture 1 is not rotatable. The cavity fixing piece 3 is fixed with the cooling water pipe 2, and the cavity fixing piece 3 is fixed and sealed with a main cavity plate of the vacuum evaporation plating machine.
Example 2:
an easily-cooled probe structure of a vacuum evaporation machine is disclosed, as shown in fig. 3-5, the easily-cooled probe structure is used for detecting the thickness of a coating film layer of a coated workpiece, the easily-cooled probe structure comprises a probe fixing member 1, a cooling water pipe 2 and a cavity fixing member 3, the cooling water pipe 2 is connected with the probe fixing member 1, the cavity fixing member 3 is used for fixing the easily-cooled probe structure with a main cavity plate of the vacuum evaporation machine, the probe fixing member 1 is provided with six grooves 11, the bottom surface of each groove 11 is provided with a through hole 111, a crystal oscillator plate 4 is arranged on the bottom surface of each groove 11, a probe 5 is arranged above the crystal oscillator plate 4, the lower end of the probe 5 is arranged inside each groove 11, the probe fixing member 1 fixes the crystal oscillator plate 4 and the probe 5 at the corresponding position of each groove 11, and a cooling liquid flow channel 12 is further arranged inside the probe fixing member, the cooling water pipe 2 is composed of a water inlet pipe 21 and a water outlet pipe 22, one end of the cooling liquid flow passage 12 is connected with the water inlet pipe 21, and the other end is connected with the water outlet pipe 22.
The depth of the groove 11 is smaller than the thickness of the probe fixing piece 1, the width of the through hole 111 is smaller than the width of the groove 11, and the through hole 111 is located in the middle of the groove 11. The groove 11 and the through hole 111 are both circular, the diameter of the groove 11 is smaller than the width of the probe fixing piece 1, and the diameter of the through hole 111 is smaller than the diameter of the groove 11. The probe fixing piece 1 is a cylinder, and six grooves 11 are uniformly distributed in the probe fixing piece 1. The number of the grooves 11 is six, and the coolant flow channel 12 is a circular flow channel provided at the inner and outer peripheries of the six grooves 11 and has three branch flow channels connecting the two circular flow channels. One of the cooling water pipes 2 is provided, and one of the water inlet pipe 21 and the water outlet pipe 22 is connected with the upper surface of the probe fixing member 1, and the other is connected with the lower surface of the probe fixing member 1. The probe fixing piece 1 can rotate, the cavity fixing piece 3 is connected with the probe fixing piece 1 through a connecting part, and the cavity fixing piece 3 is fixed and sealed with a main cavity body plate of the vacuum evaporation plating machine.
While various aspects and embodiments have been disclosed herein, it will be apparent to those skilled in the art that other aspects and embodiments can be made without departing from the spirit of the disclosure, and that several modifications and improvements can be made without departing from the spirit of the disclosure. The various aspects and embodiments disclosed herein are presented by way of example only and are not intended to limit the present disclosure, which is to be controlled in the spirit and scope of the appended claims.
Claims (10)
1. An easily-cooled probe structure of a vacuum evaporation machine is used for detecting the thickness of a coating film layer of a coated workpiece and comprises a probe fixing piece (1), a cooling water pipe (2) and a cavity fixing piece (3), wherein the cooling water pipe (2) is connected with the probe fixing piece (1), the cavity fixing piece (3) is used for fixing the easily-cooled probe structure with a main cavity body plate of the vacuum evaporation machine, the easily-cooled probe structure is characterized in that the probe fixing piece (1) is provided with one or more grooves (11), the bottom surface of each groove (11) is provided with a through hole (111), a crystal oscillator plate (4) is arranged on the bottom surface of each groove (11), a probe (5) is arranged above the crystal oscillator plate (4) and the lower end of the probe (5) is arranged inside each groove (11), and the probe fixing piece (1) fixes the crystal oscillator plate (4) and the probe (5) at the corresponding positions of the grooves (11), the probe fixing piece (1) is characterized in that a cooling liquid flow channel (12) is further arranged inside the probe fixing piece (1), a cooling water pipe (2) is composed of a water inlet pipe (21) and a water outlet pipe (22), one end of the cooling liquid flow channel (12) is connected with the water inlet pipe (21), and the other end of the cooling liquid flow channel is connected with the water outlet pipe (22).
2. The structure of easy-cooling probe of vacuum evaporator according to claim 1, wherein the depth of the groove (11) is smaller than the thickness of the probe holder (1), the width of the through hole (111) is smaller than the width of the groove (11), and the through hole (111) is located in the middle of the groove (11).
3. The structure of easy-cooling probe of vacuum evaporator according to claim 2, wherein the groove (11) is one of square, rectangle, circle and irregular shape, and the shape of the through hole (111) is the same as the shape of the groove (11).
4. The structure of easy-cooling probe of vacuum evaporator according to claim 1, wherein the probe holder (1) is one of a cube, a cuboid and a cylinder, and the one or more grooves (11) are uniformly distributed in the probe holder (1).
5. The structure of easy-cooling probe for vacuum evaporator according to claim 4, wherein there are a plurality of grooves (11), the shape of the cooling liquid channel (12) is related to the number of grooves (11), and the shape or/and size of the cooling liquid channel (12) is different when the number of grooves (11) is different.
6. The easy-cooling probe structure of vacuum evaporation machine according to claim 5, wherein there are two grooves (11), and the cooling liquid flow channel (12) is an elliptical flow channel disposed at the periphery of the two grooves (11); the number of the grooves (11) is three, the cooling liquid flow channels (12) are circular flow channels arranged on the peripheries of the three grooves (11), or the cooling liquid flow channels (12) are circular flow channels arranged on the inner peripheries and the peripheries of the three grooves (11) and are provided with flow channels for connecting the two circular flow channels; the number of the grooves (11) is four, the cooling liquid flow passages (12) are in a cross shape or a field shape, or the cooling liquid flow passages (12) are circular flow passages arranged on the inner periphery of the four grooves (11) and oval flow passages arranged on the periphery of the four grooves and are provided with flow passages for connecting the inner flow passages and the outer flow passages; the number of the grooves (11) is five, the cooling liquid flow passages (12) are wave-shaped flow passages arranged on the peripheries of the five grooves (11), or the cooling liquid flow passages (12) are circular flow passages arranged on the inner peripheries of the five grooves (11) and oval flow passages arranged on the peripheries of the five grooves and are provided with flow passages for connecting the inner flow passages and the outer flow passages; the number of the grooves (11) is six, and the cooling liquid flow passages (12) are wave-shaped flow passages arranged on the peripheries of the six grooves (11), or the cooling liquid flow passages (12) are circular flow passages arranged on the inner peripheries and the peripheries of the six grooves (11) and are provided with flow passages for connecting the two circular flow passages.
7. The structure of easy-cooling probe of vacuum evaporator according to claim 1, wherein the number of the cooling water pipes (2) is one or more, and the water inlet pipe (21) and the water outlet pipe (22) of the cooling water pipe (2) are distributed and fixed on any surface of the probe fixing member (1).
8. The structure of an easy-cooling probe of a vacuum evaporator according to claim 7, wherein the water inlet tube (21) and the water outlet tube (22) are both connected to the upper surface of the probe holder (1), or one of the water inlet tube (21) and the water outlet tube (22) is connected to the upper surface of the probe holder (1) and the other is connected to the lower surface of the probe holder (1), or one of the water inlet tube (21) and the water outlet tube (22) is connected to the left side surface of the probe holder (1) and the other is connected to the right side surface of the probe holder (1), or one of the water inlet tube (21) and the water outlet tube (22) is connected to the front side surface of the probe holder (1) and the other is connected to the right side surface of the probe holder (1).
9. The structure of easy-cooling probe of vacuum evaporator according to claim 1, wherein the probe holder (1) is rotatable or non-rotatable.
10. The structure of an easy-cooling probe for a vacuum evaporator according to claim 9, wherein the probe holder (1) portion cannot rotate when there are one or two grooves (11) of the probe holder (1), and the probe holder (1) portion can rotate when there are three or more grooves (11) of the probe holder (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110738884.0A CN113251965A (en) | 2021-06-30 | 2021-06-30 | Easy cooling probe structure of vacuum evaporation machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110738884.0A CN113251965A (en) | 2021-06-30 | 2021-06-30 | Easy cooling probe structure of vacuum evaporation machine |
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| Publication Number | Publication Date |
|---|---|
| CN113251965A true CN113251965A (en) | 2021-08-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110738884.0A Pending CN113251965A (en) | 2021-06-30 | 2021-06-30 | Easy cooling probe structure of vacuum evaporation machine |
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| Country | Link |
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| CN (1) | CN113251965A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006078302A (en) * | 2004-09-09 | 2006-03-23 | Ulvac Japan Ltd | Film thickness monitoring method and device |
| KR20060030427A (en) * | 2004-10-05 | 2006-04-10 | 삼성에스디아이 주식회사 | Vacuum evaporating apparatus |
| CN106990209A (en) * | 2017-05-15 | 2017-07-28 | 成都西沃克真空科技有限公司 | A kind of crystal oscillator probe for being used to detect evaporator evaporation amount |
| CN209522915U (en) * | 2018-11-24 | 2019-10-22 | 苏州佑伦真空设备科技有限公司 | One kind being used for the dedicated water cooling heat insulation mechanism of high vacuum coating unit |
| CN209522914U (en) * | 2018-11-24 | 2019-10-22 | 苏州佑伦真空设备科技有限公司 | One kind being used for the dedicated water cooling probe socket of high vacuum coating unit |
| CN212390975U (en) * | 2020-06-09 | 2021-01-22 | 成都四盛科技有限公司 | Optical vacuum coating film thickness measuring device |
| CN112729095A (en) * | 2020-12-31 | 2021-04-30 | 苏州佑伦真空设备科技有限公司 | Probe structure at top of vacuum evaporation machine cavity |
| CN214843074U (en) * | 2021-06-30 | 2021-11-23 | 苏州佑伦真空设备科技有限公司 | Easy cooling probe structure of vacuum evaporation machine |
-
2021
- 2021-06-30 CN CN202110738884.0A patent/CN113251965A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006078302A (en) * | 2004-09-09 | 2006-03-23 | Ulvac Japan Ltd | Film thickness monitoring method and device |
| KR20060030427A (en) * | 2004-10-05 | 2006-04-10 | 삼성에스디아이 주식회사 | Vacuum evaporating apparatus |
| CN106990209A (en) * | 2017-05-15 | 2017-07-28 | 成都西沃克真空科技有限公司 | A kind of crystal oscillator probe for being used to detect evaporator evaporation amount |
| CN209522915U (en) * | 2018-11-24 | 2019-10-22 | 苏州佑伦真空设备科技有限公司 | One kind being used for the dedicated water cooling heat insulation mechanism of high vacuum coating unit |
| CN209522914U (en) * | 2018-11-24 | 2019-10-22 | 苏州佑伦真空设备科技有限公司 | One kind being used for the dedicated water cooling probe socket of high vacuum coating unit |
| CN212390975U (en) * | 2020-06-09 | 2021-01-22 | 成都四盛科技有限公司 | Optical vacuum coating film thickness measuring device |
| CN112729095A (en) * | 2020-12-31 | 2021-04-30 | 苏州佑伦真空设备科技有限公司 | Probe structure at top of vacuum evaporation machine cavity |
| CN214843074U (en) * | 2021-06-30 | 2021-11-23 | 苏州佑伦真空设备科技有限公司 | Easy cooling probe structure of vacuum evaporation machine |
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