CN209522914U

CN209522914U - One kind being used for the dedicated water cooling probe socket of high vacuum coating unit

Info

Publication number: CN209522914U
Application number: CN201821944562.1U
Authority: CN
Inventors: 杜宝胜
Original assignee: Suzhou Youlun Vacuum Equipment Technology Co Ltd
Current assignee: Suzhou Youlun Vacuum Equipment Technology Co Ltd
Priority date: 2018-11-24
Filing date: 2018-11-24
Publication date: 2019-10-22
Anticipated expiration: 2028-11-24

Abstract

The utility model discloses one kind to be used for the dedicated water cooling probe socket of high vacuum coating unit, its structure includes connector, bend pipe and probe socket, the connector bottom and bend pipe carry out vertical welding, the bend pipe bottom is threadedly coupled with probe socket, one kind of the utility model is used for the dedicated water cooling probe socket of high vacuum coating unit, the probe of design is dual probe, when the first probe breaks down or at the end of normal working life, it can be in the case where not having to extraneous intervene, the second probe is automatically switched to work, thus continuity complete whole coating process；It is hollow inside water cooling probe socket, it is stainless steel part, (water temperature is controlled at 19 degree to 26 degree) is by the continuous circulation of cooling water after having added water cooling, the heat generated when effectively plated film is continually taken away, thus the stability and accuracy that film thickness is detected in heat radiation when being effectively guaranteed plated film.

Description

One kind being used for the dedicated water cooling probe socket of high vacuum coating unit

Technical field

The utility model is a kind of for the dedicated water cooling probe socket of high vacuum coating unit, belongs to high vacuum coating unit spy Headstock field.

Background technique

All be when domestic traditional coating machine plated film wearing or featuring stage armour high voltage power supply power invariability after certain value, when passing through stopwatch Between calculate the thickness of plated film, this traditional film thickness measuring method is difficult the problem of detecting rate overshoot, once rate mistake When rushing, not only film thickness is inaccurate, but also can be because material caused by power is excessive splashes, to the surface quality band of coated product Carry out certain injury, it is all beautiful by buying at present that the surface to product, which directly can be deposited, in the material of bulky grain by when power overshoot The water cooling probe socket of state inficon or Japanese brand, the effect of water cooling probe socket are in vacuum system that film thickness sensor is long After time service, since the radiation of heat results in the instability of film thickness detecting, failure rate wants high compared with the probe socket with water cooling Very much.

Utility model content

In view of the deficienciess of the prior art, the utility model aim be to provide it is a kind of dedicated for high vacuum coating unit Water cooling probe socket, to solve the problems, such as that heat radiation impacts film thickness detecting in prior art vacuum cavity.

To achieve the goals above, the utility model is achieved through the following technical solutions: a kind of be used for high vacuum The dedicated water cooling probe socket of coating machine, including connector, bend pipe and probe socket, the connector bottom and bend pipe carry out vertical welding, The bend pipe bottom is threadedly coupled with probe socket.

Further, there are two the connector and bend pipe are respectively provided with.

It further, is hollow form inside the connector, bend pipe and probe socket.

Further, the material that the connector, bend pipe and probe socket use is stainless steel.

One kind of the utility model is used for the dedicated water cooling probe socket of high vacuum coating unit, and the probe of design is dual probe, When the first probe breaks down or at the end of normal working life, it can be cut automatically in the case where not having to extraneous intervene The second probe is changed to work, thus continuity complete whole coating process；Be inside water cooling probe socket it is hollow, Stainless steel part, after having added water cooling (water temperature is controlled at 19 degree to 26 degree) by the continuous circulation of cooling water, effectively plated film When the heat that generates continually take away, thus film thickness is detected in heat radiation when being effectively guaranteed plated film stability and accurate Property.

Detailed description of the invention

Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other spies of the utility model Sign, objects and advantages will become more apparent upon:

Fig. 1 is the structural schematic diagram of the utility model；

Fig. 2 is the structural schematic diagram of the utility model probe socket C view；

Fig. 3 is the structural schematic diagram of the utility model probe socket main view；

Fig. 4 is the structural schematic diagram of the utility model probe socket A view；

Fig. 5 is the structural schematic diagram of the utility model probe socket left view.

In figure: connector -1, bend pipe -2, probe socket -3.

Specific embodiment

To be easy to understand the technical means, creative features, achievement of purpose, and effectiveness of the utility model, below In conjunction with specific embodiment, the utility model is further described.

Fig. 1, Fig. 2, Fig. 3, Fig. 4 and Fig. 5 are please referred to, the utility model provides a kind of for the dedicated water of high vacuum coating unit Cold probe socket: including connector 1, bend pipe 2 and probe socket 3,1 bottom of connector and bend pipe 2 carry out vertical welding, the bend pipe 2 Bottom is threadedly coupled with probe socket 3.

Wherein, there are two the connector 1 and bend pipe 2 are respectively provided with.

It wherein, is hollow form inside the connector 1, bend pipe 2 and probe socket 3.

Wherein, the material that the connector 1, bend pipe 2 and probe socket 3 use is stainless steel.

When user wants using this patent, film thickness is detected be mounted on connector with probe (film thickness sensor) first On 1, then probe socket 3 is installed with water-cooling system, to the design carry out using；When the heat generated when plated film, visit Water-cooling circulating inside headstock 3 continually takes away heat, so that the stability and accuracy that detect film thickness improve；This reality It is used for the dedicated water cooling probe socket of high vacuum coating unit with novel one kind, the probe of design to be dual probe, is popped one's head in out when first When existing failure or at the end of normal working life, the second probe can be automatically switched in the case where not having to extraneous intervene Work, thus continuity complete whole coating process；It is hollow inside water cooling probe socket, is stainless steel part, After having added water cooling (water temperature is controlled at 19 degree to 26 degree) by the continuous circulation of cooling water, effectively plated film when the heat that generates The stability and accuracy that film thickness is detected in heat radiation when continually taking away, thus being effectively guaranteed plated film.

The basic principles and main features of the present invention and the advantages of the present invention have been shown and described above, for For those skilled in the art, it is clear that the present invention is not limited to the details of the above exemplary embodiments, and without departing substantially from this In the case where the spirit or essential attributes of utility model, the utility model can be realized in other specific forms.Therefore, no matter From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the utility model is by institute Attached claim rather than above description limit, it is intended that will fall within the meaning and scope of the equivalent elements of the claims All changes are embraced therein.It should not treat any reference in the claims as limiting related right It is required that.

In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art The other embodiments being understood that.

Claims

1. one kind is used for the dedicated water cooling probe socket of high vacuum coating unit, it is characterised in that: including connector (1), bend pipe (2) and visit Headstock (3), connector (1) bottom and bend pipe (2) carry out vertical welding, and bend pipe (2) bottom and probe socket (3) carry out spiral shell Line connection.

2. according to claim 1 a kind of for the dedicated water cooling probe socket of high vacuum coating unit, it is characterised in that: described There are two connector (1) and bend pipe (2) are respectively provided with.

3. according to claim 1 a kind of for the dedicated water cooling probe socket of high vacuum coating unit, it is characterised in that: described It is hollow form that connector (1), bend pipe (2) and probe socket (3) are internal.