CN113210205A - Slit extrusion type high-precision flat plate coating machine and coating method - Google Patents
Slit extrusion type high-precision flat plate coating machine and coating method Download PDFInfo
- Publication number
- CN113210205A CN113210205A CN202110632139.8A CN202110632139A CN113210205A CN 113210205 A CN113210205 A CN 113210205A CN 202110632139 A CN202110632139 A CN 202110632139A CN 113210205 A CN113210205 A CN 113210205A
- Authority
- CN
- China
- Prior art keywords
- coating
- plate
- die head
- liquid
- precision
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
- B05B15/55—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C13/00—Means for manipulating or holding work, e.g. for separate articles
- B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
Landscapes
- Coating Apparatus (AREA)
Abstract
The invention discloses a slit extrusion type high-precision flat plate coating machine and a coating method, belonging to the technical field of coating machines, and comprising a workbench frame, wherein the coating machine also comprises: the adsorption platform positioning device is arranged on the worktable frame; the coating head Z-axis movement mechanism is arranged on the workbench stand, is provided with a coating die head mechanism and drives the coating die head mechanism to move up and down in the Z-axis direction, and is matched with the Y-axis direction movement of the adsorption platform positioning device to coat a workpiece through the coating die head mechanism; the coating head cleaning device is arranged on the workbench frame and is matched with the coating die head mechanism, and the coating die head mechanism is cleaned through the movement of the coating head cleaning device in the X-axis direction; the coating die head mechanism is connected with a coating liquid supply device through a pipeline control system, and the coating head cleaning device is connected with a cleaning liquid supply device, so that the purposes of coating various materials with different viscosities, realizing high performance, high uniformity and high-efficiency coating are achieved.
Description
Technical Field
The invention belongs to the technical field of coating machines, and particularly relates to a slit extrusion type high-precision flat coating machine and a coating method.
Background
In general, in a manufacturing process of a semiconductor line device and a Flat Panel Display (FPD), a process of coating a photosensitive liquid (photosensitive material) that reacts with a light source on a film, such as an oxide film, a metal film, a semiconductor film, or the like, in order to form a pattern (patterning) in a desired shape on the film that performs a specific function on a substrate (glass substrate) to be processed is performed.
Slit coating is a coating technology which extrudes coating liquid along a die gap and transfers the coating liquid to a moving substrate under a certain pressure, and represents the future development direction of wet coating due to the characteristics of high coating speed, good coating uniformity, wide coating window and the like. Slit Die Coating (slit Die Coating) is a high-precision Coating method, and is not only used for Coating optical films (brightness enhancement films, hardcoat, polarizing films, diffusion films and the like), OLED (organic light emitting diode) and the like, but also used for Coating rolled substrates such as organic solar cells OPV (oriented photovoltaic) and perovskite solar cells PVK (photovoltaic cell) and the like, and also applied to photoresist Coating of discontinuous substrates such as LCD (liquid crystal display) glass substrates.
The slit coating technology is suitable for various coating liquids, and can be widely applied to coating of different substrate surfaces, such as: glass, stainless steel, plastic substrates and the like can realize the high-efficiency, high-uniformity and high-performance coating of different functional materials.
With the rapid development of the panel industry, the requirement on the coating process is higher and higher, the viscosity of the coating liquid can reach 10000cps at most, and the coating thickness is more than +/-2% for uniform and consistent shape; the efficiency/material utilization rate is high, and the material utilization rate can reach more than 98 percent; the full-automatic feeding and discharging mode is required to be realized, and the yield is required to reach more than 99%. Aiming at the new process requirements, the coating machine on the existing market has the defects of poor uniformity and poor shape of the coating layer, the coating layer has bubble impurities, the yield is about 95 percent, the viscosity of the coating liquid is within 5000cps, and the feeding mode is manual feeding.
Disclosure of Invention
In view of the above, the present invention provides a slot extrusion type high precision plate coater and a coating method to achieve the purpose of coating various materials with different viscosities, achieving high performance, high uniformity and high coating efficiency.
The technical scheme adopted by the invention is as follows: the utility model provides a high-accuracy dull and stereotyped coating machine of formula is extruded to slit, includes the workstation frame, and this coating machine still includes:
the adsorption platform positioning device is arranged on the worktable frame;
the coating head Z-axis movement mechanism is arranged on the workbench stand, is provided with a coating die head mechanism and drives the coating die head mechanism to move up and down in the Z-axis direction, and is matched with the Y-axis direction movement of the adsorption platform positioning device to coat a workpiece through the coating die head mechanism;
the coating head cleaning device is arranged on the workbench frame and is matched with the coating die head mechanism, and the coating die head mechanism is cleaned through the movement of the coating head cleaning device in the X-axis direction;
the coating die head mechanism is connected with a coating liquid supply device through a pipeline control system, and the coating head cleaning device is connected with a cleaning liquid supply device.
Further, the adsorption platform positioning device comprises:
a linear motor moving along the Y-axis direction;
the platform assembly is used for placing a workpiece and is arranged on the linear motor through the motor mounting plate, and the platform assembly is driven to move along the Y-axis direction through the linear motor.
Furthermore, a buffer is arranged at one end of the motion path of the linear motor, and buffering acting force is provided for the motion of the linear motor through the buffer.
Further, the platform assembly comprises:
the platform comprises a platform main body, a motor mounting plate and a plurality of adsorption holes, wherein the platform main body is provided with a plurality of adsorption holes and is connected to the motor mounting plate through at least three support assemblies;
the ejector pin lifting cylinder is used for driving the ejector pin bottom frame to lift;
at least three components of reforming that locate around the platform main part carry out the work piece location to the work piece through the combined action of each component of reforming.
Furthermore, the supporting assembly comprises a connecting flange arranged on the platform main body, an adjusting screw connected with the connecting flange and a flange plate connected with the adjusting screw, and the flange plate is arranged on the motor mounting plate.
Further, the righting component comprises:
the correcting block is connected with a correcting cylinder which drives the correcting block to do lifting motion;
the air cylinder is arranged on the platform body, the correcting air cylinder is arranged on the sliding table in a sliding mode in the direction perpendicular to the side edge of the platform body, and the correcting air cylinder is driven to move through the sliding table air cylinder.
Further, the coating die mechanism comprises:
the coating nozzle is provided with a liquid discharge joint and a liquid inlet joint;
the nozzle mounting plate is connected with the coating nozzle, and two ends of the nozzle mounting plate are hinged to the Z-axis motion mechanism of the coating head;
the coating nozzle adopts a hinge type installation mode, the relative position of the coating nozzle and the adsorption platform is measured through the contact type displacement sensor, the coating gap between the coating nozzle and the glass substrate can be automatically adjusted, and further the height of the coating nozzle can be controlled in a high-precision and dynamic mode.
Further, the coating head Z-axis motion mechanism comprises:
the two vertical seats are symmetrically arranged, and a connecting plate is connected between the two vertical seats;
the A servo modules are respectively arranged on the vertical seats and are symmetrically arranged, the A servo modules are provided with connectors through servo mounting plates and drive the servo mounting plates to move in the Z-axis direction, and the connectors are connected with the nozzle mounting plates;
and the balance cylinders are respectively arranged on two sides of the connecting plate, and are respectively connected with the corresponding servo mounting plates through floating joints and drive the servo mounting plates to move in the Z-axis direction.
Further, the connector includes:
the nut connecting plate is arranged on the servo mounting plate;
the adjusting plate is arranged on the nut connecting plate, and fixing plates are symmetrically arranged at two ends of the adjusting plate;
the two support arms of the rotating plate are arranged on the fixed plate through bearings, and a base plate is arranged at the bottom of the rotating plate.
Further, the coating head cleaning device includes:
the mounting seat is arranged between the two vertical seats;
the B servo module is arranged on the mounting seat and connected with a cleaning scraper, and a cleaning nozzle is arranged on one side of the cleaning scraper;
the coating head cleaning device can better remove the residual coating liquid on the coating head, and can effectively improve the coating uniformity.
Further, the coating head cleaning device further comprises:
the waste liquid collecting box is arranged below the coating die head mechanism, is connected with an adjusting cylinder and is driven to move along the Y-axis direction by the adjusting cylinder;
a scraper mounted on one side of the waste liquid collecting box cleans the spray head.
Further, the coating head cleaning device further comprises:
the mounting bottom plate is arranged between the two vertical seats;
the coating head soaking box is arranged below the coating die head mechanism and is connected with at least one telescopic cylinder for driving the coating head soaking box to move along the Y-axis direction, and the telescopic cylinder is arranged on the mounting bottom plate;
the coating head soaking box can reduce the cleaning period of the coating nozzle, and further improve the efficiency.
Further, the coating liquid supply device and the cleaning liquid supply device each include:
the device comprises at least two stirring pressure barrels, wherein weighing sensors are respectively arranged below the stirring pressure barrels in a matched mode, each stirring pressure barrel is communicated with a nitrogen pipe and a liquid supply pipe, and the liquid supply pipes are connected in parallel to form a liquid supply output connector;
the compressed air pipes connected with the stirring pressure barrels respectively vacuumize the stirring pressure barrels through the compressed air pipes, so that poor coating caused by bubbles can be reduced, and the yield of equipment is improved.
Further, the pipeline control system comprises:
the nitrogen pressure sensors are respectively arranged on the nitrogen pipes, and each nitrogen pressure sensor is connected with a nitrogen pressure display instrument;
the coating liquid pipe is connected with a liquid supply output connector in the coating liquid supply device, the coating liquid pipe is connected with a temporary storage tank, the temporary storage tank is provided with a liquid level sensor for monitoring the liquid level of the temporary storage tank, the temporary storage tank is connected with a filter through an intermediate pipeline, a hydraulic control valve and a servo injection pump are arranged on the intermediate pipeline, the filter is connected to a coating die head mechanism through a liquid inlet pipeline, and the coating die head mechanism is connected with a liquid discharge pipeline;
wherein, be equipped with feed liquor pilot operated valve and flowing back pilot operated valve on liquid inlet pipe way and the fluid-discharge pipeline way respectively.
The invention also provides a slit extrusion type high-precision flat plate coating method, which comprises the following steps:
s1: the workpiece is placed on the adsorption platform positioning device through the manipulator, and the workpiece is positioned through the adsorption platform positioning device and then is firmly adsorbed;
s2: the adsorption platform positioning device moves towards the Y-axis direction, the coating die head mechanism descends to a preset position under the driving action of the coating head Z-axis movement mechanism, and the coating die head mechanism coats the workpiece according to preset parameters;
s3: the adsorption platform positioning device continues to move towards the Y-axis direction until the coating of the workpiece is finished;
s4: the coating die head mechanism stops and returns to the initial position, and the coating head cleaning device is started to clean the coating die head mechanism;
s5: the adsorption platform positioning device is switched to a discharging state, and after the workpiece is taken out through the manipulator, the adsorption platform positioning device returns to the charging state to perform a coating process of the next workpiece.
The invention has the beneficial effects that:
1. by adopting the slit extrusion type high-precision flat plate coating machine and the coating method provided by the invention, under the mutual cooperation of the adsorption platform positioning device, the coating head Z-axis movement mechanism, the coating die head mechanism, the coating head cleaning device, the coating liquid supply device, the cleaning liquid supply device and the like, the coating head cleaning device can automatically clean the coating head and realize stable coating liquid supply control by the pipeline control system, so that the full-automatic coating of the glass substrate can be realized, various materials with different viscosities can be coated on the glass substrate, and meanwhile, the slit extrusion type high-precision flat plate coating machine has the advantages of high precision, high yield, good coating consistency and high reliability, further, the slit extrusion type high-precision flat plate coating machine has the advantages of high performance, high uniformity and high efficiency during operation, and has wide popularization value.
Drawings
FIG. 1 is a schematic view of the overall structure of a slit extrusion type high-precision plate coater provided by the present invention;
FIG. 2 is a schematic view of the overall internal layout of a slit extrusion type high-precision plate coater provided by the present invention;
FIG. 3 is a schematic structural diagram of an adsorption platform positioning device in a slit extrusion type high-precision plate coater provided by the present invention;
FIG. 4 is a schematic structural diagram of a stage assembly of the positioning apparatus for an adsorption stage according to the present invention;
FIG. 5 is a schematic structural diagram of a coating die head mechanism in a slit extrusion type high-precision plate coater provided by the present invention;
FIG. 6 is a schematic structural diagram of a Z-axis movement mechanism of a coating head in a slit extrusion type high-precision plate coater provided by the invention;
FIG. 7 is a schematic structural diagram of a Z-axis movement mechanism of a coating head in a slit extrusion high-precision plate coater provided by the invention at another view angle;
FIG. 8 is a schematic view of the assembly of the coating head Z-axis movement mechanism and the coating head cleaning device in the slit extrusion type high-precision flat coater provided by the invention;
FIG. 9 is a schematic structural view of a cleaning device for a coating head in a slit extrusion type high-precision plate coater according to the present invention;
FIG. 10 is a schematic structural view of a coating liquid supply device in a slit extrusion high-precision plate coater provided by the present invention;
FIG. 11 is a schematic structural diagram of a piping control system in a slit extrusion type high-precision plate coater provided by the present invention;
FIG. 12 is a schematic view of the pipeline connection in the slit extrusion type high precision plate coater provided by the present invention;
FIG. 13 is a schematic view of the slot-extrusion high-precision plate coating method of the present invention in operation;
the drawings are labeled as follows:
1-a frame outer cover, 2-a coating liquid supply device, 3-a cleaning liquid supply device, 4-a workbench frame, 5-an adsorption platform positioning device, 6-a coating head cleaning device, 7-a coating head Z-axis movement mechanism, 8-a pipeline control system, 9-a coating die head mechanism, 10-a platform main body, 11-a correcting block, 12-a needle head, 13-a motor mounting plate, 14-a linear motor, 15-a cable protection chain, 16-a high-precision linear slide rail, 17-a buffer, 18-a grating ruler, 19-a sliding table cylinder, 20-a correcting cylinder, 21-a contact type displacement sensor, 22-a needle lifting cylinder, 23-a needle, 24-a cylindrical magnet seat, 25-a needle bottom frame and 26-a connecting flange, 27-adjusting screw, 28-flange plate, 29-eye bolt, 30-nozzle mounting plate, 31-coating nozzle, 32-liquid inlet joint, 33-liquid outlet joint, 34-connecting plate, 35-shock-absorbing rubber pad, 36-servo mounting plate, 37-photoelectric sensor, 38-vertical seat, 39-A servo module, 40-servo motor, 41-balance cylinder, 42-floating joint, 43-adjusting plate, 44-nut connecting plate, 45-adjusting connecting plate, 46-bearing mounting plate, 47-bearing flange, 48-rotating shaft, 49-bearing, 50-backing plate, 51-rotating plate, 52-fixing plate, 53-mounting base plate, 54-mounting seat, 55-cleaning nozzle, 56-cleaning scraper, 57-B servo module, 58-waste liquid collection box, 59-scraper cleaning spray head, 60-adjusting air cylinder, 61-coating head soaking box, 62-telescopic air cylinder, 63-weighing sensor, 64-stirring pressure barrel, 65-safety door, 66-weighing sensor controller, 67-nitrogen pressure display instrument, 68-protective cabinet body, 69-coating liquid pipe, 70-fire-fighting spray head, 71-nitrogen pipeline, 72-temperature sensor, 73-compressed air pipe, 74-hydraulic control valve, 75-nitrogen pressure sensor, 76-fire control cabinet, 77-nozzle zero point display instrument, 78-pressure display instrument, 79-liquid discharge hydraulic control valve, 80-liquid inlet hydraulic control valve, 81-discharge port, 82-feed port, 83-nitrogen gas control valve, 84-shockproof pad, 85-temporary storage tank, 86-liquid level sensor, 87-lower frame, 88-servo injection pump, 89-filter and 90-needle valve.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the embodiments of the present invention, it should be noted that the indication of the orientation or the positional relationship is based on the orientation or the positional relationship shown in the drawings, or the orientation or the positional relationship which is usually placed when the product of the present invention is used, or the orientation or the positional relationship which is usually understood by those skilled in the art, or the orientation or the positional relationship which is usually placed when the product of the present invention is used, and is only for the convenience of describing the present invention and simplifying the description, but does not indicate or imply that the indicated device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and therefore, cannot be understood as limiting the present invention. Furthermore, the terms "first" and "second" are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance.
In the description of the embodiments of the present invention, it should be further noted that the terms "disposed" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected, unless explicitly stated or limited otherwise; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood in specific cases by those skilled in the art; the drawings in the embodiments are used for clearly and completely describing the technical scheme in the embodiments of the invention, and obviously, the described embodiments are a part of the embodiments of the invention, but not all of the embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Example 1
The present embodiment provides a slit extrusion type high precision plate coater that is suitable for coating liquids of various viscosities and has high uniformity, high precision, high efficiency, and high performance characteristics compared to conventional coaters by optimizing the coater.
As shown in fig. 1, the work table frame 4 is used as a main body of the coater, and the work table frame 4 is a base for stable operation of the coater, and is a prerequisite for ensuring normal operation of the coater, and is also a main body component of the coater. A lower frame 87 for bearing the worktable frame 4 is arranged below the worktable frame 4, and a shock pad is arranged between the worktable frame 4 and the lower frame 87 for absorbing shock.
As shown in fig. 2, the coater further includes: the device comprises an adsorption platform positioning device 5, a coating die head mechanism 9, a coating head Z-axis movement mechanism 7, a coating head cleaning device 6, a coating liquid supply device 2, a cleaning liquid supply device 3 and a pipeline control system 8. In actual production, the frame cover 1 is also provided outside, and each part of the coating machine is arranged inside the frame cover 1.
First, adsorption platform positioning device
As shown in fig. 3 and 4, the adsorption platform positioning device 5 is arranged on the worktable frame 4, the adsorption platform positioning device 5 adopts a high-precision linear motor 14 and a high-precision linear slide rail 16 to drive the platform main body 10 to move in the coating direction (Y axis direction), and the movement track (including acceleration and deceleration parameters) can be accurately controlled, and meanwhile, the platform main body 10 can accurately position the glass substrate, and the basic flatness of the glass substrate can be ensured through scientific and reasonable vacuum adsorption hole arrangement. The design of the positioning device 5 for the adsorption platform is as follows:
the adsorption platform positioning device 5 comprises: the linear motor 14 drives the platform assembly to move along the Y-axis direction, high-precision linear sliding rails 16 are symmetrically arranged on two sides of the linear motor 14, a plurality of sliding blocks slide on each high-precision linear sliding rail 16 and are connected with the motor mounting plate 13 through each sliding block, so that the motor mounting plate 13 moves along the direction (namely, the Y-axis direction) of the high-precision linear sliding rails 16 under the driving action of the linear motor 14, meanwhile, the motor mounting plate 13 is connected with a cable protection chain 15, and the other end of the cable protection chain 15 is fixed in a wire slot of the workbench frame 4 on one side of the high-precision linear sliding rails 16, so that when the motor mounting plate 13 moves, all electric components on the motor mounting plate 13 can be normally powered by cables in the cable protection chain 15.
In order to further ensure that the linear motor 14 can safely operate when the motor mounting plate 13 is driven by the linear motor 14 to move in the Y-axis direction, a buffer 17 is arranged at one end of the linear motor 14, and a buffer acting force is provided for the movement of the linear motor 14 through the buffer 17. Wherein the buffer 17 includes: the buffer device comprises a buffer plate and buffer rods symmetrically arranged on two sides of the buffer plate, wherein the buffer rods are slidably sleeved on the buffer plate, one end of each buffer rod is provided with buffer rubber, and the other end of each buffer rod is sleeved with a buffer spring; when motor mounting panel 13 moved to linear electric motor 14's tip, motor mounting panel 13 collided with the buffer rubber earlier, and the buffer beam produced the motion thereupon, and when the buffer beam motion, buffer spring can provide the buffering effort to it, and then provides the buffering for motor mounting panel 13's motion, prevents that motor mounting panel 13 velocity of movement is too big, appears great collision and produces the damage.
The workpiece to be coated is placed through the platform assembly, the platform assembly is installed on the linear motor 14 through the motor installation plate 13, under the action of the linear motor 14, the platform assembly drives the linear motor 14 to move along the Y-axis direction, the linear motor 14 operates stably, repeated positioning accuracy is high, compared with screw transmission, speed fluctuation is avoided, the thickness uniformity of the coating can be improved, and when the Y-axis moves, the motion track (including acceleration and deceleration parameters) of the adsorption platform can be accurately controlled.
For the design of the platform assembly, it mainly includes: a return subassembly for adsorbing glass substrate's platform main part 10, a plurality of supporting components that are used for mounting platform main part 10 and are used for the glass substrate location, platform main part 10 adopts the marble platform, and marble platform machining precision is high, and the dimensional stability can satisfy the required plane degree requirement of equipment, it has a plurality of to adsorb the hole to distribute on the platform main part 10, forms the negative pressure through each absorption hole, and its main action adsorbs the location to glass substrate. Preferably, in this embodiment, set up the vacuum tank that is the checkerboard formula on the marble platform, each has been arranged to the inside in each vacuum tank each adsorption hole, and then can effectively improve the adsorption area of glass substrate, be favorable to the adsorption stability of coating formula glass substrate.
In this embodiment, the platform main body 10 is designed to be a rectangular structure, and is connected to the motor mounting plate 13 through the supporting components at four corners of the platform main body 10. For the design of the supporting component, the supporting component comprises a connecting flange 26 arranged on the platform main body 10, an adjusting screw 27 connected with the connecting flange 26 and a flange plate 28 connected with the adjusting screw 27, wherein the flange plate 28 is arranged on the motor mounting plate 13, so that the assembly of the platform main body 10 is realized. In practical application, the flatness of the marble platform can be effectively adjusted by screwing the adjusting screw 27, and the flatness out-of-tolerance caused by the machining error of the marble platform is eliminated.
Four ejector pins 23 are slidably provided in the platform body 10, each of the ejector pins 23 is attached to an ejector pin chassis 25, and an ejector pin lift cylinder 22 for driving the ejector pin chassis 25 to move up and down is provided in the ejector pin chassis 25, so that the lift cylinder moves up and down the ejector pin chassis 25. When the four ejector pins 23 are driven by the ejector pin underframe 25 to rise to the same height position, they can be used for bearing glass substrates, and at this time, they are also called as the loading and unloading states of the adsorption platform positioning device 5; on the contrary, when the four pins 23 are driven to descend by the pin base 25, the glass substrate is adsorbed on the stage main body 10, and thus the glass substrate can be coated. In order to realize stable and quick installation of each thimble 23, a cylindrical magnet seat 24 is arranged at one end part of each thimble 23, and is arranged on a thimble underframe 25 through the cylindrical magnet seat 24, and the other end of each thimble 23 is a thimble head 12.
Six correcting assemblies are arranged around the platform main body 10, each two correcting assemblies are a pair, and the correcting assemblies of the same pair are respectively arranged on two opposite sides of the platform main body 10. In the present embodiment, based on the size of the platform main body 10, a pair of the centering assemblies is disposed on the short side of the platform main body 10, and two pairs of the centering assemblies are disposed on the long side, and the workpiece is positioned by the combined action of the centering assemblies.
For the design of the reforming assembly, the reforming assembly comprises: the glass substrate correcting device comprises a correcting block 11 and a sliding table air cylinder 19 arranged on a platform main body 10, wherein the correcting block 11 is connected with a correcting air cylinder 20 for driving the correcting block 11 to move up and down, under the action of the correcting air cylinder 20, the correcting block 11 rises to enable the correcting block 11 to correspond to the height position of the side edge of a glass substrate, preferably, the correcting block 11 is of a cylindrical structure so as to ensure point-to-point contact between the correcting block 11 and the glass substrate, and meanwhile, a piston rod of the correcting block 11 and a piston rod of the correcting air cylinder 20 are movably sleeved.
The restoring cylinder 20 is slidably disposed on the sliding table along a direction perpendicular to the side of the platform main body 10, and the restoring cylinder 20 is driven to move by the sliding table cylinder 19, so that the restoring block 11 connected to the restoring cylinder 20 also slides in the direction perpendicular to the side of the platform main body 10. In order to ensure that the centering block 11 can be well contacted with the glass substrate, a notch groove matched with the centering block 11 is formed at the side of the platform main body 10 to allow for movement of the centering block 11.
The working principle is as follows: after the glass substrate is placed on the surface of the platform main body 10, the reforming block 11 is lifted by the reforming cylinder 20 until the glass substrate can correspond to the side edge of the glass substrate; then, the sliding table air cylinders 19 are contracted, and the contraction mileage of each sliding table air cylinder 19 is preset, so that the glass substrate can be accurately positioned under the action of each sliding table air cylinder 19, at the moment, the adsorption function of the platform main body 10 is started, the glass substrate is firmly adsorbed, and the restoring air cylinder 20 and the sliding table air cylinders 19 are restored.
Coating head Z-axis motion mechanism
As shown in fig. 6, 7 and 8, the table frame 4 is provided with a coating head Z-axis movement mechanism 7, and the coating head Z-axis movement mechanism 7 is mounted on the coating head Z-axis movement mechanism 7 by a high-precision servo module and a high-precision grating scale 18 on both sides and by a hinge, so that the angle of the coating head can be adjusted. In practical application, the Z-axis motion mechanism 7 of the coating head has the advantages of high precision in controlling the coating gap and dynamic control of the height of the coating head in the Z-axis direction.
For the coating head Z-axis motion mechanism 7, it includes: the device comprises two symmetrically arranged vertical seats 38, a connecting plate 34 connected between the two vertical seats 38, a symmetrically arranged A servo module 39 respectively arranged on each vertical seat 38, and balance cylinders 41 respectively arranged at two sides of the connecting plate 34. Wherein, a shock-absorbing rubber pad 35 is arranged between the connecting plate 34 and the end of the vertical seat 38.
The A servo module 39 is provided with a connector through the servo mounting plate 36 and drives the servo mounting plate 36 to move in the Z-axis direction, the A servo module 39 comprises a servo motor 40, the A servo module 39 is provided with a photoelectric sensor 37 in the operation process, and the two groups of photoelectric sensors 37 are respectively used for the origin and the end of the A servo module 39 in the movement process. Be connected with nozzle mounting panel 30 through the connector, when practical application, the connector includes: the servo mechanism comprises a nut connecting plate 44 arranged on the servo mounting plate 36, an adjusting plate 43 arranged on the nut connecting plate 44 and a U-shaped rotating plate 51, wherein fixing plates 52 are symmetrically arranged at two ends of the adjusting plate 43, two arms of the rotating plate 51 are arranged on the fixing plates 52 through bearings 49, the inside of each bearing 49 is connected with the corresponding fixing plate 52 through a rotating shaft 48, a bearing 49 baffle is arranged outside each bearing 49, and the arm of the rotating plate 51 is used as a bearing mounting plate 46 for fixing a bearing flange 47. The backing plate 50 is arranged at the bottom of the rotating plate 51, so that the nozzle mounting plate 30 in the coating die head mechanism 9 is buffered through the backing plate 50, the installation mode of the coating die head mechanism 9 is hinge installation, the installation mode is favorable for adjusting the parallelism between the coating nozzle 31 and the surface of the platform main body 10, the error between the coating nozzle 31 and the platform main body 10 can be automatically corrected through the measurement of the sizes of the contact type displacement sensor 21 on the platform main body 10 and the two sides of the coating nozzle 31, and the coating uniformity is greatly improved. In practical application, the grating ruler 18 is also installed on the servo installation plate 36, so that real-time feedback of the position is realized through the grating ruler 18.
In the Z-axis direction drive of the coating die mechanism 9, in addition to the a-servo module 39, each of the balance cylinders 41 is connected to an adjustment link plate 45 via a floating joint 42, and the adjustment link plate 45 is connected to the corresponding servo mount plate 36 and drives the servo mount plate 36 to move in the Z-axis direction. Furthermore, the whole mechanism is driven by two power sources simultaneously, and the matching action of the two balance cylinders 41 and the A servo module 39 can eliminate the difference caused by possible desynchrony of servo double-drive actions.
Coating die head mechanism
As shown in fig. 5, the coating die head mechanism 9 uses a high-precision coating nozzle, and performs die design and manufacture for high consistency, chemical compatibility, low filling capacity and strip coating, and changes in internal pressure and flow rate of the coating nozzle can be detected in real time and uploaded to a central control system.
The coating die head mechanism 9 is arranged on the coating head Z-axis movement mechanism 7, the coating head Z-axis movement mechanism 7 drives the coating die head mechanism 9 to move up and down in the Z-axis direction, and the coating die head mechanism 9 is matched with the Y-axis direction movement of the adsorption platform positioning device 5 to coat a workpiece. In practical use, the contact displacement sensor 21 is mounted on the side of the platform main body 10 to measure the distance between the coating nozzle 31 and the surface of the platform main body 10 in real time, so that the measurement accuracy of the contact displacement sensor 21 is high, and the coating gap can be dynamically monitored by direct measurement with the coating head.
The coating die mechanism 9 includes: the coating nozzle 31 is provided with a liquid discharge joint 33 and a liquid inlet joint 32, the two ends of the nozzle mounting plate 30 are hinged and connected to the coating head Z-axis movement mechanism 7, namely, the nozzle mounting plate is connected with the rotating plate 51 in the coating head Z-axis movement mechanism 7, and the rotating plate 51 realizes the assembly in a hinged mode. In practical application, in order to facilitate the installation of the coating die head mechanism 9, two lifting bolts 29 are further connected to the surface of the nozzle mounting plate 30 to realize the lifting of the nozzle mounting plate 30.
In practical application, the coating nozzle 31 is in a slit extrusion type, and an inner pipeline of the coating nozzle performs flow channel analysis according to the flow rate, the liquid viscosity, the pressure and the diameters of a liquid inlet and a liquid outlet to simulate the deviation of the internal pressure of a hole and the coating thickness; meanwhile, compared with the prior SUS630 material, the superhard alloy material adopted by the nozzle cutter head is greatly improved, for example, the straightness of the flow channel surface can reach 0.75um, the surface roughness can reach Rz0.1, the hardness of the superhard alloy material is improved by 2 times compared with the SUS630 material, the abrasion loss of the superhard alloy material is greatly reduced, and the damage of the cutter head caused by the interference caused by glass can be reduced.
Coating head cleaning device
As shown in fig. 9, the coating head cleaning device 6 is provided on the table frame 4 and the coating head cleaning device 6 is fitted to the coating die mechanism 9 to clean the coating die mechanism 9 by the movement of the coating head cleaning device 6 in the X-axis direction.
For the applicator head cleaning device 6, it comprises: the coating device comprises a mounting base 54 arranged between the two vertical bases 38 and a B servo module 57 arranged on the mounting base 54, wherein the B servo module 57 is connected with a cleaning scraper 56, one side of the cleaning scraper 56 is provided with a cleaning nozzle 55, the cleaning scraper 56 can reciprocate in the length direction of the coating nozzle 31 under the driving of the B servo module 57, so that residual liquid on the coating nozzle 31 is removed, and meanwhile, white alcohol liquid is sprayed on a coating head through the cleaning nozzle 55 in the cleaning process to dilute the coating liquid, so that the cleaning action of the cleaning scraper 56 is facilitated.
In order to further promote the collection of the waste liquid, the coating head cleaning device 6 further comprises: and the waste liquid collecting box 58 is arranged below the coating die head mechanism 9, and the waste liquid collecting box 58 is connected with an adjusting cylinder 60 and driven by the adjusting cylinder 60 to move along the Y-axis direction so as to drive the waste liquid collecting box 58 to move to a proper position for rapidly collecting waste liquid. Meanwhile, in order to ensure timely cleaning of the cleaning blade 56, a blade cleaning nozzle 59 is provided at one side of the waste liquid collecting box 58.
In order to prevent the coating liquid of the coating nozzle 31 from solidifying and even clogging the coating head, the coating head cleaning device 6 further includes: the coating head soaking box 61 is arranged below the coating die head mechanism 9, the coating head soaking box 61 is connected with a telescopic cylinder 62 which drives the coating head soaking box 61 to move along the Y-axis direction, the telescopic cylinder 62 is arranged on the mounting base plate 53, and the coating head soaking box 61 is pushed to a proper position under the driving of the telescopic cylinder 62, so that the coating nozzle 31 can be soaked in the coating head soaking box 61. Meanwhile, guide shafts are arranged on two sides of the telescopic cylinder 62, one end of each guide shaft is connected to the coating head soaking box 61, and the other end of each guide shaft is mounted on the mounting base plate 53 through a linear bearing.
Based on the coating head cleaning device 6, the working principle is as follows:
the coating nozzle 31 returns to the initial position after finishing coating, the waste liquid collecting box 58 extends out, the cleaning device of the coating nozzle 31 is started, white alcohol liquid is sprayed to the coating nozzle 31 through the cleaning nozzle 55 to dilute the coating liquid, and meanwhile, the coating liquid on the coating nozzle 31 is removed by the reciprocating motion of the cleaning scraper 56 until the cleaning is finished; coating nozzle 31 cleaning device gets back to the initiating position after the completion, and at this moment, sprays the cleaning solution by scraper cleaning nozzle 59 and cleans cleaning blade 56, and until clean the completion, waste liquid collection box 58 then retracts, and the coating shower nozzle begins to carry out the coating action next time, and then can improve the yields of coating, makes high and non-staining board of production efficiency, increases the maintenance cycle of coating head.
When the coating nozzle 31 does not work for a long time, the coating head soaking device is started, the coating head soaking box 61 is extended out, the coating nozzle 31 descends until being soaked in the liquid, the coating nozzle 31 is automatically cleaned through the liquid in the coating head soaking box 61 (the cleaning of the coating liquid with different high and low viscosities can be adapted), and due to the fact that the coating head soaking device is arranged, when the coating machine stops, the coating head is soaked in the cleaning liquid, the coating liquid is prevented from being solidified, and the coating nozzle 31 is prevented from being blocked.
The coating head cleaning device 6 can automatically clear residual coating liquid on the coating nozzle 31, and meanwhile, has the functions of waste liquid collection, nozzle soaking and the like, and can solve the problems that high-viscosity coating liquid is not easy to clean and easily blocks the coating head and the like.
Fifth coating liquid supply device
As shown in fig. 10, the coating die mechanism 9 is connected to a coating liquid supply device 2 through a line control system 8 to supply a coating liquid thereto, when operating.
For the coating liquid supply apparatus 2, it includes: the protection cabinet 68, the two stirring pressure barrels 64 arranged in the protection cabinet 68 and the safety door 65 arranged on the protection cabinet 68 are mutually redundant, the coating liquid is stored in the two 15L stirring pressure barrels 64, even if one stirring pressure barrel 64 has no liquid, the other stirring pressure barrel 64 can be connected after the control valve is opened, and the real-time supply of the coating liquid is ensured. Weighing sensors 63 are respectively arranged below the stirring pressure barrels 64, the weighing sensors 63 are connected with weighing sensor controllers 66 for controlling the weighing sensors 63, the weighing sensor controllers 66 are connected with weighing display instruments for sensing the weight condition of the stirring pressure barrels 64 in real time, and the weighing sensors 63 are arranged below the stirring pressure barrels 64, so that an operator is prompted to supplement the stirring pressure barrels 64 when the weight of the stirring pressure barrels 64 is lower than a set value, and the stirring pressure barrels 64 are of a drawer type structure in practical application, so that the operation and maintenance of the operator are facilitated. And a nitrogen pipe and a liquid supply pipe are communicated with each stirring pressure barrel 64, wherein the liquid supply pipes are connected in parallel to form a liquid supply output connector, the liquid supply output connector is used for supplying the coating liquid supply device 2 with the coating liquid, and the nitrogen pipe 71 is communicated with the stirring pressure barrel 64 so as to realize that the coating liquid is supplied by taking clean nitrogen as a power source.
In order to prevent the air bubbles in the stirring pressure barrel 64 from influencing the coating effect, the stirring pressure barrel 64 is provided with a stirring motor, the coating liquid is stirred at regular time according to the process requirements, the mixture in the liquid is prevented from precipitating, the stirring pressure barrels 64 are respectively connected with a compressed air pipe 73, the compressed air pipe 73 is connected with a vacuum pump, the compressed air pipe 73 pumps out the air in the stirring pressure barrel 64, and then after the stirring is completed, the vacuum pump vacuumizes the stirring pressure barrel 64, so that the air bubbles generated by the stirring are extracted, and the coating effect is prevented from being influenced by the air bubbles.
Since the coating liquid is inflammable, a fire-fighting nozzle 70 and a temperature sensor 72 are arranged in the cabinet body, and if a fire is generated, the fire-fighting nozzle 70 and the temperature sensor 72 can be put out in time, and are both connected to a fire-fighting control cabinet 76.
To achieve a normal supply of coating liquid, for the line control system 8, it comprises: nitrogen pressure sensors 75 respectively arranged on the nitrogen pipes, wherein each nitrogen pressure sensor 75 is connected with a nitrogen pressure display instrument 67 so as to monitor the nitrogen pressure value and the pressure value in the stirring pressure barrel 64 through the nitrogen pressure sensor 75; the nitrogen gas pipe is also provided with a nitrogen gas control valve 83, the nitrogen gas control valve 83 controls the opening and closing of the nitrogen gas pipeline, nitrogen gas is introduced into the stirring pressure barrel 64 through the opening and closing of the nitrogen gas control valve 83, and the supply of the coating liquid is realized under the action of the nitrogen gas pressure.
As shown in fig. 11 and 12, the pipeline control system 8 further includes a coating liquid pipe 69, the coating liquid pipe 69 is connected to a liquid supply output connector of the coating liquid supply device 2, the other end of the coating liquid pipe 69 is connected to a temporary storage tank 85, the temporary storage tank 85 is provided with a liquid level sensor 86 for monitoring the liquid level of the coating liquid pipe, the temporary storage tank 85 is connected to a filter 89 through an intermediate pipeline, the intermediate pipeline is provided with a hydraulic control valve 74 and a servo injection pump 88, the filter 89 is connected to the coating die head mechanism 9 through a liquid inlet pipeline, the coating die head mechanism 9 is connected to a liquid discharge pipeline, and the liquid discharge pipeline is connected to the waste liquid collecting box 58. Wherein, the liquid inlet pipeline and the liquid discharge pipeline are respectively provided with a liquid inlet hydraulic control valve 80 and a liquid discharge hydraulic control valve 79 for controlling the opening and closing of each coating liquid pipeline 69; the servo injection pump 88 mainly comprises a servo motor, a ball screw and a piston, and the structure has high repeated positioning precision, is beneficial to quantitative output of coating liquid, is used for conveying the coating liquid into the temporary storage tank 85, and is conveyed to the coating nozzle 31 side through a liquid feeding pipeline; the filter 89 filters impurities in the coating liquid; the temporary storage tank 85 is used for storing a certain amount of coating liquid, and reduces the speed loss between the coating nozzle 31 and the stirring pressure barrel 64 caused by the friction resistance of a pipeline; the liquid level sensor 86 is used for detecting the volume of the coating liquid in the temporary storage tank 85.
The pipeline control system 8 further comprises a nozzle zero point display instrument 77 and a pressure display instrument 78 which are arranged on the protection cabinet body 68, and whether the coating nozzle 31 is reset to zero or not is displayed through the nozzle zero point display instrument 77 (signals are fed back by a photoelectric sensor); the pressure display instrument 78 displays the vacuum pressure (measured by the pressure sensor arranged on the vacuum compression pipe) matched with the platform main body, the air source pressure (measured by the nitrogen pressure sensor) of the main pipeline, the internal pressure (measured by the pressure sensor matched with the temporary storage tank) of the temporary storage tank, the pressure (measured by the pressure sensor matched with the coating nozzle) of the coating nozzle and the like.
The coating liquid supply device 2 comprises a stirring pressure barrel 64 with a stirring function and a weighing sensor 63, and can be used for uniformly stirring the coating liquid to ensure the coating effect.
The pipe control system 8 is composed of a high-precision injection pump, a PFA pipe, a pressure sensor, a filter 89 and the like, and can perform high-precision digital control on coating speed (steady coating) and coating profile (front and rear edges).
Device for supplying cleaning liquid
The coating head cleaning device 6 is connected with a cleaning liquid supply device 3 to supply the cleaning liquid through the cleaning liquid supply device 3, and the internal design thereof is the same as that of the coating liquid supply device 2, and the description thereof is omitted.
Based on the coating machine that provides, its theory of operation does:
preparation working phase
Before the coating work starts, the coating liquid is poured into the stirring pressure barrel 64, the motor on the stirring pressure barrel 64 starts to stir the coating liquid, and after a certain time, the stirring is stopped, so that each mixed liquid in the coating liquid is uniformly stirred;
turning on a vacuum pump, extracting bubbles generated by stirring in the stirring pressure barrel 64, turning off the vacuum pump after a certain time, then turning on a nitrogen gas control valve 83 on the stirring pressure barrel 64, turning on a liquid control valve 74 between the stirring pressure barrel 64 and a temporary storage tank 85, conveying the coating liquid into the temporary storage tank 85 by taking nitrogen as power, and turning off the nitrogen gas control valve 83 and the liquid control valve 74 after reaching the set amount of a liquid level sensor 86;
starting the servo injection pump 88, when the piston on the servo injection pump 88 retreats, opening the hydraulic control valve 74 between the temporary storage tank 85 and the servo injection pump 88 and the needle valve 90 on the filter 89, so that the coating liquid is filled in the cylinder body of the servo injection pump 88, then observing the needle valve 90 on the filter 89, and when no bubble is generated on the pipeline on the needle valve 90 and the coating liquid is filled to the top of the needle valve 90, closing the needle valve 90;
then the liquid inlet hydraulic control valve 80 and the liquid discharge hydraulic control valve 79 are opened, and the coating liquid is discharged into the waste liquid collecting box 58 through the coating nozzle 31;
and then closing all the control valves, and finishing the preparation work before coating, wherein the step aims to eliminate bubbles of coating liquid on the pipelines and detect whether each pipeline is blocked.
Entering the coating working stage
Opening a nitrogen gas control valve 83 on the pressure barrel, opening a liquid control valve 74 between the pressure barrel and the temporary storage tank 85, conveying the coating liquid into the temporary storage tank 85 by taking nitrogen as power, and closing the nitrogen gas control valve 83 and the liquid control valve 74 after the coating liquid reaches the set amount of the liquid level sensor 86;
then, the servo syringe pump 88 is started, when the piston of the servo syringe pump 88 is retracted, the nitrogen gas control valve 83, the pilot control valve 74 between the temporary storage tank 85 and the servo syringe pump 88 are opened, so that the coating liquid is filled in the pump cylinder, the nitrogen gas pressure sensor 75 detects the internal pressure of the supply line, compares the current detected pressure with the predetermined pressure, and when the detected pressure is greater than or equal to the predetermined pressure as a result of the comparison, the liquid inlet pilot control valve 80 is opened, and the coating nozzle 31 starts the coating operation. The predetermined pressure is set based on the length of the supply line and the viscosity of the coating liquid in the supply line, and means a pressure value at which the opening timing of the inlet pilot valve 80 and the discharge timing of the coating liquid from the coating nozzle 31 coincide with each other.
After the glass substrate is adsorbed by the stage body 10, the Y-axis direction movement is started to perform the coating work, and in this process, when the coating liquid is about to be discharged, the signal delay time from the start time of the servo syringe pump 88 to the coating liquid discharge time at which the coating liquid is discharged through the coating nozzle 31 needs to be set, which is set based on the length of the supply line and the viscosity of the coating liquid in the supply line; and judging whether the signal delay time reaches the preset time or not, and stopping the movement of the adsorption positioning platform when the judgment result is that the preset time is reached.
Example 2
The present invention also provides a slit extrusion type high precision flat coating method, as shown in fig. 13, the coating method comprising:
s1: each thimble 23 is lifted to place the workpiece on the plane of each thimble 23 of the adsorption platform positioning device 5 through the feed inlet 82 by the manipulator, each thimble 23 is lowered, the glass substrate is accurately positioned on the surface of the platform main body 10 by matching with the actions of the correcting cylinder 20 and the sliding table cylinder 19, the workpiece is firmly adsorbed after being positioned by the adsorption platform positioning device 5, the vacuum generator generates vacuum to enable the surface of the platform main body 10 to generate negative pressure, and the platform main body 10 adsorbs the glass substrate;
s2: the adsorption platform positioning device 5 moves towards the Y-axis direction, the coating die head mechanism 9 descends to a preset position (position information is fed back by the contact type displacement sensor 21 in real time) under the driving action of the coating head Z-axis movement mechanism 7, the coating die head mechanism 9 coats the workpiece according to preset parameters, and at the moment, the coating liquid supply device 2 connected with the coating die head mechanism 9 is started and supplies liquid normally;
s3: the adsorption platform positioning device 5 continues to move towards the Y-axis direction until the coating of the workpiece is completed, and at the moment, the coating liquid supply device 2 stops;
s4: the coating die head mechanism 9 is stopped and raised to return to the initial position, and the coating head cleaning device 6 is started to clean the coating die head mechanism 9 to remove the residual coating liquid;
s5: the adsorption platform positioning device 5 is switched to the blanking state (i.e., the adsorption vacuum is released and the ejector pins 23 are lifted), and after the workpiece is taken out from the discharge port 81 by the manipulator, the adsorption platform positioning device 5 is returned to the blanking state to perform the coating process of the next workpiece.
The invention is not limited to the above alternative embodiments, and any other various forms of products can be obtained by anyone in the light of the present invention, but any changes in shape or structure thereof, which fall within the scope of the present invention as defined in the claims, fall within the scope of the present invention.
Claims (15)
1. The utility model provides a high-accuracy dull and stereotyped coating machine of formula is extruded to slit, includes the workstation frame, its characterized in that, this coating machine still includes:
the adsorption platform positioning device is arranged on the worktable frame;
the coating head Z-axis movement mechanism is arranged on the workbench stand, is provided with a coating die head mechanism and drives the coating die head mechanism to move up and down in the Z-axis direction, and is matched with the Y-axis direction movement of the adsorption platform positioning device to coat a workpiece through the coating die head mechanism;
the coating head cleaning device is arranged on the workbench frame and is matched with the coating die head mechanism, and the coating die head mechanism is cleaned through the movement of the coating head cleaning device in the X-axis direction;
the coating die head mechanism is connected with a coating liquid supply device through a pipeline control system, and the coating head cleaning device is connected with a cleaning liquid supply device.
2. The slot-extrusion high-precision plate coater of claim 1, wherein the adsorption platform positioning device comprises:
a linear motor moving along the Y-axis direction;
the platform assembly is used for placing a workpiece and is arranged on the linear motor through the motor mounting plate, and the platform assembly is driven to move along the Y-axis direction through the linear motor.
3. The slit extrusion type high precision plate coater of claim 2, wherein a buffer is provided at one end of the motion path of the linear motor, and a buffer force is provided to the motion of the linear motor through the buffer.
4. The slot-extrusion high-precision plate coater of claim 2, wherein the stage assembly comprises:
the platform comprises a platform main body, a motor mounting plate and a plurality of adsorption holes, wherein the platform main body is provided with a plurality of adsorption holes and is connected to the motor mounting plate through at least three support assemblies;
the ejector pin lifting cylinder is used for driving the ejector pin bottom frame to lift;
at least three components of reforming that locate around the platform main part carry out the work piece location to the work piece through the combined action of each component of reforming.
5. The slot extrusion type high precision plate coater of claim 4, wherein the support assembly comprises a connection flange provided on the platform body, an adjusting screw connected with the connection flange, and a flange plate connected with the adjusting screw, the flange plate being mounted on the motor mounting plate.
6. The slot-extrusion high-precision plate coater of claim 4, wherein the righting assembly comprises:
the correcting block is connected with a correcting cylinder which drives the correcting block to do lifting motion;
the air cylinder is arranged on the platform body, the correcting air cylinder is arranged on the sliding table in a sliding mode in the direction perpendicular to the side edge of the platform body, and the correcting air cylinder is driven to move through the sliding table air cylinder.
7. The slot-extrusion high-precision plate coater according to claim 1, wherein the coating die mechanism comprises:
the coating nozzle is provided with a liquid discharge joint and a liquid inlet joint;
and the two ends of the nozzle mounting plate are hinged to a Z-axis motion mechanism of the coating head.
8. The slot-extrusion high-precision plate coater of claim 7, wherein the coating head Z-axis motion mechanism comprises:
the two vertical seats are symmetrically arranged, and a connecting plate is connected between the two vertical seats;
the A servo modules are respectively arranged on the vertical seats and are symmetrically arranged, the A servo modules are provided with connectors through servo mounting plates and drive the servo mounting plates to move in the Z-axis direction, and the connectors are connected with the nozzle mounting plates;
and the balance cylinders are respectively arranged on two sides of the connecting plate, and are respectively connected with the corresponding servo mounting plates through floating joints and drive the servo mounting plates to move in the Z-axis direction.
9. The slit extrusion type high-precision plate coater of claim 8, wherein the connector comprises:
the nut connecting plate is arranged on the servo mounting plate;
the adjusting plate is arranged on the nut connecting plate, and fixing plates are symmetrically arranged at two ends of the adjusting plate;
the two support arms of the rotating plate are arranged on the fixed plate through bearings, and a base plate is arranged at the bottom of the rotating plate.
10. The slit extrusion-type high-precision flat coater according to claim 8, wherein the coating head cleaning device comprises:
the mounting seat is arranged between the two vertical seats;
locate the servo module of B on the mount pad, the servo module of B is connected with the cleaning blade, and one side of cleaning blade is equipped with the cleaning nozzle.
11. The slit extrusion-type high-precision flat coater according to claim 1, wherein the coating head cleaning device further comprises:
the waste liquid collecting box is arranged below the coating die head mechanism, is connected with an adjusting cylinder and is driven to move along the Y-axis direction by the adjusting cylinder;
a scraper mounted on one side of the waste liquid collecting box cleans the spray head.
12. The slit extrusion-type high-precision flat coater according to claim 8, wherein the coating head cleaning device further comprises:
the mounting bottom plate is arranged between the two vertical seats;
the coating head soaking box is arranged below the coating die head mechanism, is connected with at least one telescopic cylinder for driving the coating head soaking box to move along the Y-axis direction, and is arranged on the mounting bottom plate.
13. The slit extrusion-type high-precision plate coater according to claim 1, wherein each of said coating liquid supply device and cleaning liquid supply device comprises:
the device comprises at least two stirring pressure barrels, wherein weighing sensors are respectively arranged below the stirring pressure barrels in a matched mode, each stirring pressure barrel is communicated with a nitrogen pipe and a liquid supply pipe, and the liquid supply pipes are connected in parallel to form a liquid supply output connector;
and the compressed air pipes are respectively connected with the stirring pressure barrels, and the stirring pressure barrels are vacuumized through the compressed air pipes.
14. The slot-extrusion high-precision plate coater of claim 13, wherein the pipe control system comprises:
the nitrogen pressure sensors are respectively arranged on the nitrogen pipes, and each nitrogen pressure sensor is connected with a nitrogen pressure display instrument;
the coating liquid pipe is connected with a liquid supply output connector in the coating liquid supply device, the coating liquid pipe is connected with a temporary storage tank, the temporary storage tank is provided with a liquid level sensor for monitoring the liquid level of the temporary storage tank, the temporary storage tank is connected with a filter through an intermediate pipeline, a hydraulic control valve and a servo injection pump are arranged on the intermediate pipeline, the filter is connected to a coating die head mechanism through a liquid inlet pipeline, and the coating die head mechanism is connected with a liquid discharge pipeline;
wherein, be equipped with feed liquor pilot operated valve and flowing back pilot operated valve on liquid inlet pipe way and the fluid-discharge pipeline way respectively.
15. A slit-extrusion-type high-precision plate coating method applied to the slit-extrusion-type high-precision plate coater of any one of claims 1 to 14, comprising:
s1: the workpiece is placed on the adsorption platform positioning device through the manipulator, and the workpiece is positioned through the adsorption platform positioning device and then is firmly adsorbed;
s2: the adsorption platform positioning device moves towards the Y-axis direction, the coating die head mechanism descends to a preset position under the driving action of the coating head Z-axis movement mechanism, and the coating die head mechanism coats the workpiece according to preset parameters;
s3: the adsorption platform positioning device continues to move towards the Y-axis direction until the coating of the workpiece is finished;
s4: the coating die head mechanism stops and returns to the initial position, and the coating head cleaning device is started to clean the coating die head mechanism;
s5: the adsorption platform positioning device is switched to a discharging state, and after the workpiece is taken out through the manipulator, the adsorption platform positioning device returns to the charging state to perform a coating process of the next workpiece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110632139.8A CN113210205A (en) | 2021-06-07 | 2021-06-07 | Slit extrusion type high-precision flat plate coating machine and coating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110632139.8A CN113210205A (en) | 2021-06-07 | 2021-06-07 | Slit extrusion type high-precision flat plate coating machine and coating method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113210205A true CN113210205A (en) | 2021-08-06 |
Family
ID=77083143
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110632139.8A Pending CN113210205A (en) | 2021-06-07 | 2021-06-07 | Slit extrusion type high-precision flat plate coating machine and coating method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113210205A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113600411A (en) * | 2021-09-03 | 2021-11-05 | 苏州希盟科技股份有限公司 | Coating equipment |
| CN117019567A (en) * | 2023-10-10 | 2023-11-10 | 常州捷佳创智能装备有限公司 | Silicon wafer feeding and coating mechanism, coating platform and silicon wafer coating machine |
-
2021
- 2021-06-07 CN CN202110632139.8A patent/CN113210205A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113600411A (en) * | 2021-09-03 | 2021-11-05 | 苏州希盟科技股份有限公司 | Coating equipment |
| CN117019567A (en) * | 2023-10-10 | 2023-11-10 | 常州捷佳创智能装备有限公司 | Silicon wafer feeding and coating mechanism, coating platform and silicon wafer coating machine |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN215141614U (en) | Slit extrusion type high-precision flat plate coating machine | |
| CN113210205A (en) | Slit extrusion type high-precision flat plate coating machine and coating method | |
| CN201257421Y (en) | Gum coater | |
| CN207951886U (en) | A kind of high-accuracy injection dispensing location structure of online dispenser | |
| JP2002500099A (en) | Moving head, coating apparatus and method | |
| CN111054783A (en) | Automatic production line for flattening non-ferrous metal plate and flattening method | |
| CN112170074A (en) | Film-scratching gold-spraying device for PCT test paper | |
| CN112691821A (en) | Robot for spraying product and working method thereof | |
| CN112642665A (en) | Automatic glue spreader for fuel cell bipolar plate | |
| CN204656801U (en) | A kind of anti-dirty film automatic sprayer | |
| CN113547370A (en) | PCB milling cutter processing self-checking device and method thereof | |
| CN109353582A (en) | A kind of aluminum profile film sticking apparatus | |
| CN219850456U (en) | Automatic change high accuracy point equipment of gluing | |
| CN111530656A (en) | Anti-coating tool for spraying PVC (polyvinyl chloride) on bottom of lower box of battery pack | |
| CN214320744U (en) | Semi-automatic spraying machine | |
| CN115431012A (en) | Automatic installation device for sliding table cylinder floating joint and use method | |
| CN115184259A (en) | UV curing coating adhesive force detection device and detection method thereof | |
| CN212759242U (en) | Anti-coating tool for spraying PVC (polyvinyl chloride) on bottom of lower box of battery pack | |
| CN210474446U (en) | Spray coating equipment | |
| CN210391626U (en) | Filling device special for adhesive removing agent | |
| CN219224517U (en) | Salt fog test box with movable support | |
| CN220177362U (en) | Automatic dispensing assembly line | |
| CN213996528U (en) | Semi-automatic glue dripping machine | |
| CN210632358U (en) | Device is evenly paintd on work piece surface | |
| CN218762619U (en) | Automatic lubricating grease coating machine for door closer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20230803 Address after: 610000 No. 618, Junyue Road, East Industrial Zone, Xindu District, Chengdu, Sichuan Applicant after: Chengdu tuomi Intelligent System Technology Co.,Ltd. Address before: 611730 No.389, Wende West Street, new economic Industrial Park, Chengdu modern industrial port, Pidu District, Chengdu City, Sichuan Province Applicant before: Chengdu tuomi Electronic Equipment Manufacturing Co.,Ltd. |
|
| TA01 | Transfer of patent application right |