CN113207311A - 一种半导体元件巨量转移方法和系统 - Google Patents
一种半导体元件巨量转移方法和系统 Download PDFInfo
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
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Abstract
本发明提供了一种半导体元件的巨量转移系统,用于将设置于临时基板的半导体元件转移至目标基板。所述转移系统包括加速设备,所述加速设备设有沿第一方向的加速电场、以及沿所述第一方向设置且与所述加速电场连通的第一入口和第一出口;旋转设备,所述旋转设备设有沿第二方向的磁场、以及与所述磁场连通的第二入口和第二出口,所述第二入口与所述第一出口对准。此外,本发明还提供一种半导体元件的巨量转移方法。所述方法包括放置所述临时基板于所述第一入口处,并将所述第一入口对准需要转移至所述目标基板的目标半导体元件;利用所述加速电场对所述目标半导体元件进行加速;利用所述磁场改变所述目标半导体元件的运动方向;安装所述目标半导体元件于所述目标基板。
Description
PCT国内申请,说明书已公开。
Claims (23)
- PCT国内申请,权利要求书已公开。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CN2019/122816 WO2021109007A1 (zh) | 2019-12-03 | 2019-12-03 | 一种半导体元件巨量转移方法和系统 |
Publications (2)
Publication Number | Publication Date |
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CN113207311A true CN113207311A (zh) | 2021-08-03 |
CN113207311B CN113207311B (zh) | 2023-05-16 |
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CN201980004149.8A Active CN113207311B (zh) | 2019-12-03 | 2019-12-03 | 一种半导体元件巨量转移方法和系统 |
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Country | Link |
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US (1) | US20210249553A1 (zh) |
CN (1) | CN113207311B (zh) |
WO (1) | WO2021109007A1 (zh) |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110127856A1 (en) * | 2008-07-23 | 2011-06-02 | Georges Lochak | Magnetic monopole accelerator |
CN102446693A (zh) * | 2011-11-29 | 2012-05-09 | 邱永红 | 一种带电粒子的加速方法及其应用 |
CN105883420A (zh) * | 2016-04-22 | 2016-08-24 | 京东方科技集团股份有限公司 | 一种基板传送装置 |
WO2016160322A1 (en) * | 2015-04-01 | 2016-10-06 | Sxaymiq Technologies Llc | Electrostatic cleaning device |
US20170154919A1 (en) * | 2015-11-27 | 2017-06-01 | Innolux Corporation | Manufacturing method of display with lighting devices |
CN106816451A (zh) * | 2015-11-27 | 2017-06-09 | 群创光电股份有限公司 | 微型发光显示装置及其制造方法 |
CN107685539A (zh) * | 2017-09-22 | 2018-02-13 | 京东方科技集团股份有限公司 | 喷墨打印喷头、喷墨量测量系统和方法及喷墨量控制方法 |
CN108526468A (zh) * | 2018-04-25 | 2018-09-14 | 西北工业大学 | 模拟微重力环境中金属液滴3d打印的物理系统及打印方法 |
CN108807213A (zh) * | 2017-04-27 | 2018-11-13 | 宏碁股份有限公司 | 微小元件的转移方法及微小元件转移装置 |
US20190067510A1 (en) * | 2017-08-16 | 2019-02-28 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Transferring device and transferring method of micro light emitting diode |
CN109548396A (zh) * | 2018-11-29 | 2019-03-29 | 上海九山电子科技有限公司 | 微型发光二极管芯片的巨量转移系统以及方法 |
CN110335844A (zh) * | 2019-06-17 | 2019-10-15 | 华中科技大学 | 一种基于选择性加热去磁的MicroLED巨量转移装置及方法 |
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2019
- 2019-12-03 WO PCT/CN2019/122816 patent/WO2021109007A1/zh active Application Filing
- 2019-12-03 CN CN201980004149.8A patent/CN113207311B/zh active Active
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2021
- 2021-04-27 US US17/241,783 patent/US20210249553A1/en not_active Abandoned
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110127856A1 (en) * | 2008-07-23 | 2011-06-02 | Georges Lochak | Magnetic monopole accelerator |
CN102446693A (zh) * | 2011-11-29 | 2012-05-09 | 邱永红 | 一种带电粒子的加速方法及其应用 |
WO2016160322A1 (en) * | 2015-04-01 | 2016-10-06 | Sxaymiq Technologies Llc | Electrostatic cleaning device |
US20170154919A1 (en) * | 2015-11-27 | 2017-06-01 | Innolux Corporation | Manufacturing method of display with lighting devices |
CN106816451A (zh) * | 2015-11-27 | 2017-06-09 | 群创光电股份有限公司 | 微型发光显示装置及其制造方法 |
CN105883420A (zh) * | 2016-04-22 | 2016-08-24 | 京东方科技集团股份有限公司 | 一种基板传送装置 |
CN108807213A (zh) * | 2017-04-27 | 2018-11-13 | 宏碁股份有限公司 | 微小元件的转移方法及微小元件转移装置 |
US20190067510A1 (en) * | 2017-08-16 | 2019-02-28 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Transferring device and transferring method of micro light emitting diode |
CN107685539A (zh) * | 2017-09-22 | 2018-02-13 | 京东方科技集团股份有限公司 | 喷墨打印喷头、喷墨量测量系统和方法及喷墨量控制方法 |
CN108526468A (zh) * | 2018-04-25 | 2018-09-14 | 西北工业大学 | 模拟微重力环境中金属液滴3d打印的物理系统及打印方法 |
CN109548396A (zh) * | 2018-11-29 | 2019-03-29 | 上海九山电子科技有限公司 | 微型发光二极管芯片的巨量转移系统以及方法 |
CN110335844A (zh) * | 2019-06-17 | 2019-10-15 | 华中科技大学 | 一种基于选择性加热去磁的MicroLED巨量转移装置及方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2021109007A1 (zh) | 2021-06-10 |
CN113207311B (zh) | 2023-05-16 |
US20210249553A1 (en) | 2021-08-12 |
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