CN113193349A - Method for generating real space and K space Airy beam array based on metasurface - Google Patents
Method for generating real space and K space Airy beam array based on metasurface Download PDFInfo
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Abstract
The invention discloses a method for generating a real-space and K-space Airy beam array based on a metasurface, and belongs to the field of micro-nano optics. According to the method, the simulation calculation is carried out on the nano antenna by adopting a simulation method, the transmission distance and the transmission track of the emergent Airy light beam are accurately and effectively regulated and controlled by adjusting the size and the azimuth angle distribution of the nano column array, and the nano antenna meeting the requirement of the metamaterial surface composition is selected and obtained. After the geometric dimensions of the nano-pillar units are determined, the dimension and azimuth angle distribution of the nano-pillar arrays covering the phase of 0 to 2 pi are obtained according to a phase distribution algorithm for generating real space and K space Airy beam arrays, namely the dimension and the rotation angle of each nano-pillar unit are determined, and a processing file of a corresponding medium metasurface structure is generated through coding. The processing file is utilized, the micro-nano processing technology is adopted to process the metamaterial surface of the broadband medium, and when different circularly polarized light beams are incident, the Airy light beam array in real space and K space is obtained, so that the parallel working efficiency of the device is obviously improved.
Description
Technical Field
The invention relates to a method for generating an Airy beam array, in particular to a method for generating a real-space and K-space Airy beam array on the basis of a broadband medium metasurface independently coded by double circular polarization channels, and belongs to the field of micro-nano optics.
Background
Airy beams, as a type of non-diffracted beam, have attractive features for free-space transmission, such as non-diffraction, self-acceleration, and self-recovery. Unlike bessel beams, airy beams do not rely on simple conical superposition of plane waves, although they are all defined as being free of scattered light. Since Berry and Balazs predict that Schrodinger's equation has a wave packet solution satisfying the Airy function in the field of quantum mechanics, researchers find that the Airy function characterized by exponential "cutoff" is also the solution of Schrodinger's equation, and perform experimental verification on Airy beams with limited energy for the first time, and the Airy beams have achieved many achievements at present, such as particle manipulation, space-time wave packet, Airy laser and the like. To expand the application prospects of airy beams, various methods have been proposed to generate and control the beams. Some of these methods, such as mechanical modulation, typically complicate the power generation system. Other approaches are not suitable for optical micro-manipulation due to the bulky size of the light modulator. Therefore, a simple and effective airy beam generation and control method remains a challenging and urgent subject.
In recent years, the super-surface technology has been rapidly developed, which is composed of sub-wavelength structures and is capable of flexibly controlling the amplitude, phase and polarization of incident light waves. Super-surface technology has received much attention, and planar antenna arrays can effectively reduce the loss of light during the process of artificially designing materials. In addition, compared with the traditional bulk optical element, the super surface also has the advantages of flexibility in design, relatively lower processing difficulty and manufacturing cost, and convenience in further minimized and integrated super surface device design. Due to their novel physical properties, such as phase discontinuity that produces abrupt changes over ultra-short distances, metasurfaces have been widely used in various applications, such as optical holography, structural color and ultra-fast light pulse shaping. In the fields of micro-nano processing and optical detection, the generation of the optical focus array can greatly shorten the scanning time of an optical device to improve the efficiency of work, and the generation device of the array Airy beam can provide a more efficient choice for various work purposes. The super surface and the Airy beam array are combined, so that a foundation can be laid for integration and miniaturization of the micro-nano device.
Disclosure of Invention
The invention discloses a method for generating a real space and K space Airy beam array based on a metasurface, which aims to solve the technical problems that: the Airy beam array can be generated in real space and K space respectively under the condition of different chiral circular polarization incidence, and the metamaterial surface designed based on the combination of circular polarization multiplexing and Dammann grating has the advantages of high efficiency and wide waveband. The invention is beneficial to realizing generation of Airy beam array in a miniaturized and compact optical system.
The purpose of the invention is realized by the following technical scheme.
The invention discloses a method for generating a real-space and K-space Airy beam array based on a metasurface. The geometric dimension of the nano-column unit is designed, so that the nano-column has a half-wave plate function under the irradiation of light with required wavelength. The simulation method is adopted to carry out analog calculation on the nano antenna, the transmission distance and the transmission track of the emergent Airy beam can be accurately and effectively regulated and controlled by adjusting the size and the azimuth angle distribution of the nano column array, and the nano antenna meeting the requirement of the metasurface composition is selected and obtained through the simulation regulation and control result. After the geometric dimensions of the nano-pillar units are determined, the dimension and azimuth angle distribution of the nano-pillar arrays covering the phase of 0 to 2 pi are obtained according to a phase distribution algorithm for generating real space and K space Airy beam arrays, namely the dimension and the rotation angle of each nano-pillar unit are determined, and therefore a processing file of a corresponding medium metasurface structure is generated through coding. The processing file is utilized, the micro-nano processing technology is adopted to process the metamaterial surface of the broadband medium, and when different circularly polarized light beams are incident, the Airy light beam array in real space and K space is obtained, so that the parallel working efficiency of the device is obviously improved.
The invention discloses a method for generating a real space and K space Airy beam array based on a metasurface, which comprises the following steps:
the method comprises the following steps: the simulation method is adopted to carry out analog calculation on the nano antenna, the transmission distance and the transmission track of the emergent Airy beam are accurately and effectively regulated and controlled by adjusting the size and the azimuth angle distribution of the nano column array, and the nano antenna meeting the requirement of the metamaterial surface composition is selected according to the simulation regulation and control result.
The metasurface used to generate the airy beam array finds a nanoantenna with higher cross-polarization conversion efficiency and covers a 0-2 pi propagation phase profile. The geometric dimension of the nano-column unit is designed through simulation, so that the nano-column has a half-wave plate function under the irradiation of light with required wavelength. The geometric dimensions include the long axis length L, the short axis length W, the height H of the nano-pillars and the period S of the metamaterial surface unit. Scanning simulation is carried out to obtain the electric field condition of linearly polarized light along the x-axis direction and the y-axis direction after the linearly polarized light respectively passes through the nano-column units with different sizes. Calculating the phase phi of linearly polarized light in the x direction after passing through the nano columns with different sizes according to the electric field data obtained by simulationxAnd the transmission intensity txx. Similarly, when linearly polarized light in the y direction is incident, the corresponding phase phi is obtainedyAnd the transmission intensity tyy. Namely, the nano antenna meeting the requirement of the metamaterial surface composition is selected.
The simulation method adopts RCWA of a strict coupled wave analysis method, a finite difference time domain method FDTD or a finite element method COMSOL.
Step two: and calculating the phase distribution of the Airy beam array generated in real space and K space based on the nano antenna meeting the composition requirements of the metasurface obtained in the step one, obtaining the size and azimuth angle distribution of the nano column array through a circular polarization multiplexing theory, and determining a processing file for generating the transmission type metasurface by coding.
The formula (1) and the formula (2) are phase calculation formulas for generating the Airy beam array in K space and real space respectively.
Wherein:
and
phase distributions of the K-space and real-space airy beams, respectively; a. b is a constant respectively, and the propagation distance and the propagation track of the Airy beam in the K space and the real space are determined; k is a spectral plane coordinate, λ is a wavelength of an incident light wave, and ∈ and ζ represent two-dimensional coordinates of a real space.
In order to generate the array Airy beams, the array Airy beams are generated by adopting a design method of combining the Airy beam phase and the Dammann grating phase. And the phase distribution of the Dammann grating in the period adopts an optimization method. The continuous phases from 0 to 2-pi are divided into target orders with equal intervals, corresponding codes of the target orders are optimized, the size of a field of view of the microscope objective is fully considered to ensure that all the orders can be completely detected and optimized, and the Dammann grating phases with uniformly distributed intensities are obtained by reaching a convergence condition through preset iteration times. The phase distribution required for generating the Airy beam array is obtained by linearly superposing the phase of the Dammann grating and the phase of the Airy beam.
Based on the multiplexing theory, the effect of the metamaterial surface on the Jones matrix modulation of incident circular polarization is as follows:
in order to enable different incident circular polarized light to be subjected to independent phase modulation while polarization conversion is carried out, an optical modulation Jones matrix with a metasurface is given by a formula (3), and since the orthogonal basis of the Jones matrix is linearly polarized light, P is regarded as a rotation matrix, and Lambda is a diagonal matrix, X and Y phase modulation of the required nano antenna is obtained.
The dimension of the nano-pillar array required by processing is as follows
The determined nano-antenna is given, wherein deltaxRepresents the length of the nano-antenna, deltayRepresenting the width and azimuth distribution of the nano-antenna
And (4) determining the size and the rotation angle of each nano-pillar unit so as to encode the processing file for generating the corresponding medium metamaterial surface structure.
Step three: and (4) preparing the broadband medium metasurface by utilizing the processing file of the transmission type medium metasurface structure obtained in the step two and through a micro-nano processing method, and realizing that Airy beam arrays are respectively generated in real space and K space under the condition of different chiral circular polarized light incidence.
Preferably, a micro-nano processing technology of electron beam etching or focused ion beams is adopted to process the metamaterial surface of the broadband medium.
Has the advantages that:
1. the invention discloses a method for generating an Airy beam array based on a broadband medium metasurface, which can realize the transmission distance and the transmission track of emergent Airy beams by adjusting the size and the azimuth distribution of a nano-column array.
2. The invention discloses a method for generating an Airy beam array based on a broadband medium metasurface. Due to the fact that the two polarization working states and different space generation conditions exist, the polarization optical system can be applied to an optical system efficiently and conveniently.
3. The method for generating the real-space and K-space Airy beam array based on the metasurface has the advantages of sub-wavelength pixels, small volume and light weight based on the transmission type medium metasurface, so that the method can be widely applied to a miniaturized and compact optical system and lays a foundation for the research of material processing, particle manipulation, space-time light wave packet and Airy laser.
4. The method for generating the real-space and K-space Airy beam array based on the metasurface is independently designed according to the required wavelength, so that the nano-column array with the function of the half-wave plate realizes higher transmission efficiency. Meanwhile, an optimal design method combined with Dammann gratings is adopted, the generation of array Airy beams in real space and K space is realized, and the parallel working efficiency of the device is obviously improved.
5. Compared with the traditional method for generating Airy beams, the method for generating the Airy beam array based on the broadband medium metasurface disclosed by the invention is used for generating the Airy beams with a plurality of wave bands simultaneously due to the adoption of a broadband design method. The operating band of e-beam lithography is significantly advantageous at shorter wavelengths because of its high resolution characteristics.
Drawings
FIG. 1 is a flow chart of a method for generating an Airy beam array based on a broad band medium metasurface according to the present invention;
figure 2 is a schematic diagram of an embodiment of the invention for generating an airy beam array based on a broad-band dielectric metasurface,
fig. 3 is a schematic diagram of simulation results of selected nano-antennas in the embodiment of the present invention, in which fig. 3A is a schematic diagram of a nano-antenna structure, and fig. 3B is a simulation result of efficiency and phase of selected 16 nano-antennas.
FIG. 4 is a phase diagram of an array of Airy beams generated according to an embodiment of the present invention, wherein FIG. 4A is a Dammann grating phase, FIG. 4B is an 3/2 th order phase, FIG. 4C is a cubic phase, FIG. 4D is a 3/2 th order Dammann grating phase, and FIG. 4E is a cubic Dammann phase.
Fig. 5 is a partial photograph of a sample of the metasurface produced by processing in an embodiment of the present invention, where fig. 5A is a top view of a sample SEM and fig. 5B is a side view of the sample SEM.
FIG. 6 is a diagram of experimental light paths used in experiments in an embodiment of the present invention;
fig. 7 is a result of airy beam intensity simulation and experiment in the XY plane in the embodiment of the present invention, where fig. 7A is a real space simulation result, fig. 7B is a real space experiment result, fig. 7C is a K space simulation result, and fig. 7D is a K space experiment result.
FIG. 8 is a graph illustrating experimental results of different transmission distances between real space and K space according to an embodiment of the present invention;
FIG. 9 shows experimental results of real-space and K-space broadband operation characteristics;
Detailed Description
For better illustrating the objects and advantages of the present invention, the following description will be made with reference to the accompanying drawings and examples.
Example (b): method for generating Airy beam array
As shown in fig. 1, the method for regulating and generating an airy beam array in real space and K space based on a metasurface disclosed in this embodiment is specifically implemented as follows:
the method comprises the following steps: in order to realize the generation of the airy beam array based on the broadband medium metasurface, the simulation method is adopted to perform simulation calculation on the nano antenna, and as shown in fig. 2, the airy beam array is generated in a real space and a K space respectively under the condition of different chiral circular polarized light incidence. Different circular polarization states of an incident light field are independently regulated and controlled through the accurate selection and rotation of the nano-column. The geometric dimension of a nano-column unit is designed, so that a group of nano-antennas with the function of half-wave plates, which are modulated into 0-2 pi by a propagation phase, are selected from the nano-column under the irradiation of light with the working wavelength (800 nanometers), and the specific implementation method is as follows:
the geometric dimension of the nano-column unit is designed, and the simulation method adopts a strict coupled wave analysis method RCWA. The nano-column has the function of a half-wave plate under the irradiation of light with the working wavelength of 800 nm. In order to realize the nano-pillar array with higher transmission efficiency and the function of the half-wave plate, amorphous silicon is selected as an antenna material, and silicon dioxide is used as a substrate to support the nano-antenna. The above-described geometrical dimensions include the long axis length L, the short axis length W, the height H of the nanopillars, and the period S of the metasurface unit, as shown in fig. 3A. With the nanopillar height H and period S fixed, the long axis length L and short axis length W of the simulated nanopillars are scanned. Scanning simulation is carried out to obtain the electric field condition of linearly polarized light along the x-axis direction and the y-axis direction after the linearly polarized light respectively passes through the nano-column units with different sizes. Calculating the linear polarized light in the x direction to pass through different sizes according to the electric field data obtained by simulationPhase after nano-column of
And the transmission intensity txx. Similarly, when linearly polarized light in the y direction enters, a corresponding phase is obtained
And the transmission intensity tyy. Limitation by half-wave plate
A group of nano antennas with high circular deflection efficiency is selected, the conversion efficiency is all over 80%, and phase modulation with 0-2 pi phase coverage is propagated at the same time, as shown in fig. 3B.
Step two: respectively calculating the phase distribution of Airy beam arrays generated in real space and K space, obtaining the size and azimuth angle distribution of the nano-pillar arrays through a circular polarization multiplexing theory, namely determining the size and the rotation angle of each nano-pillar unit, and encoding to generate a processing file of a corresponding medium metasurface structure, wherein the specific implementation method comprises the following steps:
the formula (1) and the formula (2) are phase calculation formulas for generating the Airy beam array in K space and real space respectively. In order to generate the array Airy beams, a design method of combining the phase of the Airy beams and the phase of the Dammann grating is adopted. In order to obtain a uniform light intensity distribution of the target diffraction order, a genetic algorithm is used to optimize the phase distribution within a period, the target diffraction order is 3 × 3, and each period is composed of 12 × 12 pixels. The subsurface area was 400 x 400 square microns and the lattice constant was 500 nm for each unit size. The phase distribution required for generating the airy beam array is obtained by linearly superimposing the phase of the dammann grating and the phase of the airy beam by using the phase distribution of the dammann grating optimized by the genetic algorithm, as shown in fig. 4.
In order to enable different incident circular polarized light to be subjected to independent phase modulation while polarization conversion is carried out, an optical modulation Jones matrix with a metasurface is given based on a multiplexing theory, namely formula (3), and since the orthogonal basis of the Jones matrix is linearly polarized light, P looks atMaking a rotation matrix, and taking lambda as a diagonal matrix, thereby obtaining the X and Y phase modulation of the required nano antenna,
in an azimuth of
Namely, the size and the rotation angle of each nano-pillar unit are determined, so that a processing file for generating the corresponding medium metamaterial surface structure is encoded.
Step three: and (4) preparing the broadband medium metasurface by utilizing the processing file of the transmission type medium metasurface structure obtained in the step two and a micro-nano processing method of electron beam etching, and realizing that Airy light beam arrays are respectively generated in real space and K space under the condition of different chiral circular polarized light incidence. To verify the correctness of the design, the metasurface sample as shown in fig. 5 was processed to see the nanoantennas on the metasurface with fresh dimensional feature profiles and good angular alignment.
An experimental light path diagram as shown in fig. 6 is experimentally established by using the metasurface sample, and laser is collimated and converted into circularly polarized light after passing through a linear polarizer and a quarter wave plate, and finally is irradiated to the metasurface. The resulting array of airy beams then passes through an objective lens and a tube lens for collection in a charge coupled device in a real-space mode of operation. By changing the tube lens to a fourier lens, the operation mode of K space can be observed. Wherein the dynamic switching of different working modes is realized by adjusting the distance between the sample and the microscope objective.
Fig. 7 shows the simulation results and experimental results of the embodiment in real space and K space, which are quite consistent. By adjusting the distance between the ccd and the zero point position, fig. 8 shows the ari beam parabolic transmission characteristics of the real space and the K space of the embodiment, respectively, and the diffraction-free intensity distribution characteristics are maintained. Meanwhile, the separation of 20nm is adopted, the detection is carried out under different incident wavelengths of 680 nm-800 nm, the unique intensity distribution of the Airy beam array in real space and K space can be clearly observed, and the broadband working characteristic of the metamaterial surface is proved, as shown in figure 9. Finally, the designed metasurface modulation efficiency is evaluated by a fourier transform infrared spectrometer (FTIR spectrometer), and the maximum value of the metasurface modulation efficiency is 80% (800 nm).
The inventive metasurface with independently encoded double circular polarization channels can generate Airy beam arrays in real space and K space respectively under the incident conditions of different chiral circular polarizations. The design can be widely applied to a miniaturized and compact optical system, and lays a foundation for the research of material processing, particle manipulation, space-time light wave packet and Airy laser. Meanwhile, the wide-spectrum optical system has good wide-spectrum working characteristics and multiple working modes, and can be used in an optical system more conveniently and rapidly.
The above detailed description is intended to illustrate the objects, aspects and advantages of the present invention, and it should be understood that the above embodiments are only examples of the present invention and are not intended to limit the scope of the present invention, and any modifications, equivalents, improvements and the like within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (8)
1. The method for generating the real space and K space Airy beam array based on the metasurface is characterized by comprising the following steps of: comprises the following steps of (a) carrying out,
the method comprises the following steps: performing analog calculation on the nano-antenna by adopting a simulation method, realizing accurate and effective regulation and control on the propagation distance and the propagation track of the emergent Airy beam by adjusting the size and the azimuth angle distribution of the nano-column array, and selecting the nano-antenna meeting the requirement of the metasurface composition according to a simulation regulation and control result;
step two: calculating the phase distribution of Airy beam arrays generated in real space and K space based on the nano antenna meeting the composition requirements of the metasurfaces obtained in the step one, obtaining the size and azimuth angle distribution of the nano column arrays through a circular polarization multiplexing theory, and determining a processing file for generating the transmission type metasurfaces through coding;
step three: and (4) preparing the broadband medium metasurface by utilizing the processing file of the transmission type medium metasurface structure obtained in the step two and through a micro-nano processing method, and realizing that Airy beam arrays are respectively generated in real space and K space under the condition of different chiral circular polarized light incidence.
2. The method for generating a real-space and K-space airy beam array based on metasurface of claim 1, wherein: the first implementation method comprises the following steps of,
the metasurface for generating the airy beam array finds a nano antenna with higher cross polarization conversion efficiency and covering 0-2 pi propagation phase distribution; the geometric dimension of the nano-column unit is designed through simulation, so that the nano-column has a half-wave plate function under the irradiation of light with required wavelength; the geometric dimensions comprise the length L of the long axis of the nano column, the length W of the short axis of the nano column, the height H of the nano column and the period S of the metamaterial surface unit; scanning simulation is carried out to obtain the electric field condition that linearly polarized light along the x-axis direction and the y-axis direction respectively passes through the nano-column units with different sizes; calculating the phase phi of linearly polarized light in the x direction after passing through the nano columns with different sizes according to the electric field data obtained by simulationxAnd the transmission intensity txx(ii) a Similarly, when linearly polarized light in the y direction is incident, the corresponding phase phi is obtainedyAnd the transmission intensity tyy(ii) a Namely, the nano antenna meeting the requirement of the metamaterial surface composition is selected.
3. The method for generating a real-space and K-space airy beam array based on metasurface of claim 2, wherein: the second step is realized by the method that,
the formula (1) and the formula (2) are phase calculation formulas for generating the Airy beam array in K space and real space respectively;
wherein:
and
phase distributions of the K-space and real-space airy beams, respectively; a. b is a constant respectively, and the propagation distance and the propagation track of the Airy beam in the K space and the real space are determined; k is a spectral plane coordinate, λ is a wavelength of an incident light wave, and ∈ and ζ represent two-dimensional coordinates of a real space.
In order to generate the array Airy beams, the array Airy beams are generated by adopting a design method of combining the Airy beam phase and the Dammann grating phase; the phase distribution of the Dammann grating in the period adopts an optimization method; dividing continuous phases from 0 to 2 × pi into target orders at equal intervals, optimizing corresponding codes of the target orders, fully considering the size of a field of view of a microscope objective to ensure that all the orders can be completely detected and performing optimization calculation, and obtaining Dammann grating phases with uniformly distributed intensities through a preset iteration number to achieve a convergence condition; obtaining phase distribution required by generating an Airy beam array by linearly superposing the phase of the Dammann grating and the phase of the Airy beam;
based on the multiplexing theory, the effect of the metamaterial surface on the Jones matrix modulation of incident circular polarization is as follows:
in order to make different incident circular polarizations perform independent phase modulation while polarization is converted, P can be regarded as a rotation matrix and Λ is a diagonal matrix. Processing the dimension of the required nano-pillar array according to the formula (3)
The determined nano-antenna is given, wherein deltaxRepresents the length of the nano-antenna, deltayRepresenting the width and azimuth distribution of the nano-antenna
And (4) determining the size and the rotation angle of each nano-pillar unit so as to encode the processing file for generating the corresponding medium metamaterial surface structure.
4. The method for generating real-space and K-space airy beam arrays based on metasurfaces of claim 3, wherein: the simulation method adopts RCWA of a strict coupled wave analysis method, a finite difference time domain method FDTD or a finite element method COMSOL.
5. The method for generating real-space and K-space airy beam arrays based on metasurfaces of claim 3, wherein: and processing the metamaterial surface of the broadband medium by adopting a micro-nano processing technology of electron beam etching or focused ion beams.
6. The method for generating real-space and K-space airy beam arrays based on metasurfaces of claims 1, 2, 3 or 4, wherein: generating Airy beam arrays in real space and K space respectively under the condition of different chiral circular polarized light incidence; due to the fact that the two polarization working states and different space generation conditions exist, the polarization optical system can be applied to an optical system efficiently and conveniently.
7. The method for generating real-space and K-space airy beam arrays based on metasurfaces of claims 1, 2, 3 or 4, wherein: the nano-pillar array with the half-wave plate function realizes higher transmission efficiency by independently designing according to the required wavelength; meanwhile, an optimal design method combined with Dammann gratings is adopted, the generation of array Airy beams in real space and K space is realized, and the parallel working efficiency of the device is obviously improved.
8. The method for generating a real-space and K-space airy beam array based on metasurface of claim 5, wherein: due to the adoption of a broadband design method, the method can be simultaneously used for generating multiple waveband Airy beams; the operating band of e-beam lithography is significantly advantageous at shorter wavelengths because of its high resolution characteristics.
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| CN114594539A (en) * | 2022-03-09 | 2022-06-07 | 浙江科技学院 | Elliptical Airy vortex light beam generator based on super surface and light beam generating method thereof |
| CN114895476A (en) * | 2022-07-15 | 2022-08-12 | 浙江科技学院 | Method for generating diffraction-free Lommel light beam based on super surface |
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| CN114397761B (en) * | 2022-01-18 | 2022-11-25 | 北京理工大学 | Simultaneous regulation and control method for diffraction order phase distribution and polarization based on metasurface |
| CN114594539A (en) * | 2022-03-09 | 2022-06-07 | 浙江科技学院 | Elliptical Airy vortex light beam generator based on super surface and light beam generating method thereof |
| CN114594539B (en) * | 2022-03-09 | 2023-09-19 | 浙江科技学院 | Ultra-surface-based elliptical Airy vortex beam generator and beam generation method thereof |
| CN115421223A (en) * | 2022-07-06 | 2022-12-02 | 北京理工大学 | Frequency dispersion device based on parabola phase super-surface |
| CN115421223B (en) * | 2022-07-06 | 2023-10-17 | 北京理工大学 | Frequency dispersion device based on parabolic phase super surface |
| CN114895476A (en) * | 2022-07-15 | 2022-08-12 | 浙江科技学院 | Method for generating diffraction-free Lommel light beam based on super surface |
| CN114895476B (en) * | 2022-07-15 | 2022-09-30 | 浙江科技学院 | Method for generating diffraction-free Lommel light beam based on super surface |
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