CN115421223B - Frequency dispersion device based on parabolic phase super surface - Google Patents
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Abstract
The invention discloses a frequency dispersion device based on a parabolic phase super-surface, and belongs to the fields of micro-nano optics, frequency dispersion regulation and control and spectrum analysis. According to the invention, the super-surface phase is modulated based on Bei Li phase in a visible light broadband, parabolic phase distribution is formed on the super-surface, dispersion and focusing of incident light are realized, and the focal length of focusing light after the effect of a super-surface device is in inverse proportion to the wavelength. The rectangular pillar metaatom structure adopted by the metasurface is convenient for the phase modulation of Bei Li phases on the metasurface, and each metaatom forming the metasurface is only formed by a single nano pillar, so that the Gao Chaoying atom structure simplicity can be improved; the dispersion and focusing of the incident light can be realized by only using a single-layer dielectric super surface, so that the simplicity of the frequency dispersion device is further improved. By selecting metaatoms that have higher polarization conversion efficiency over the entire broadband range required for operation to make up the supersurface, it is ensured that the supersurface has higher polarization conversion efficiency.
Description
Technical Field
The invention relates to a frequency dispersion device, in particular to a frequency dispersion device based on a parabolic phase super-surface, and belongs to the technical fields of micro-nano optics, frequency dispersion regulation and control and spectrum analysis.
Background
The dispersion devices have a vital function in optical instruments such as spectrometers and the like, the dispersion devices realize the spatial separation of light with different frequencies by utilizing the dispersion generated by structural materials or artificial structures, the light splitting function is realized, and the analysis function of the spectrum can be realized through the functions of the dispersion devices, the focusing devices, the detectors and the like. In recent years, along with the miniaturization of instruments such as spectrometers, the miniaturization and integration of dispersion devices have also become a necessary trend. The ultra-surface becomes a new choice of a spectrum dispersion device due to the ultra-light and ultra-thin structure and good frequency dispersion regulation and control capability. The super-surface is generally composed of a periodic, quasi-periodic or randomly arranged metal or dielectric nano-antenna array of sub-wavelength dimensions, and is capable of modulating physical quantities such as amplitude, phase and the like of an optical field in sub-wavelength dimensions. The ultra-surface is utilized to modulate physical quantities such as phase, group delay dispersion and the like of electromagnetic waves, so that the regulation and control of frequency dispersion can be realized, the function of a spectrum dispersion device is realized, and compared with the traditional dispersion device, the device has the characteristics of microminiaturization and easy integration, and has more flexible frequency dispersion regulation and control capability.
Some research works have realized a Bei Li phase super-surface-based frequency dispersion device, and the device uses the dispersion effect generated by the beta phase to construct a lens to realize a dispersion focusing function, but the device can only realize a more ideal focusing effect at a designed wavelength, and can not realize ideal focusing when working at other wavelengths. In recent years, related research works are carried out to correct errors caused by the non-ideal focusing condition, namely [1]Zhu A Y,Chen W T,Sisler J,et al.Compact aberration-corrected spectrometers in the visible using dispersion-tailored metasurfaces [ J ]. Advanced Optical Materials,2019,7 (14): 1801144.1-1801144.8 ], proper metaatomic structures are selected, phases, group delay dispersion and the like are designed by changing the morphology of metaatoms, the focusing effect in the wide-band range of visible light is corrected, and good dispersion focusing effect is realized. However, in order to achieve a good focusing effect, a large number of metaatoms with complex structures or low polarization conversion efficiency are generally required to be selected, and the selection of the metaatoms can reduce the working efficiency of the whole device and increase the processing difficulty of the device. Because of the limited ability of monolithic supersurfaces to regulate phase and group delay equivalent, devices made of multiple supersurfaces have also been proposed in recent years, [2] faraji-Dana M S, arbabi E, arbabi a, et al compact folded metasurface spectrometer ] [ J ]. Nature communications,2018,9 (1): 4196. A folded spectrometer is constructed using three reflective dielectric supersurfaces on a glass substrate, the phase distribution of several supersurfaces is designed rationally by means of beam tracking simulation, etc., and appropriate metaatomic structures are selected to provide the phase distribution. The design scheme uses a plurality of super-surfaces, so that more flexible modulation can be realized, and the complexity of the system is increased.
In general, the existing super-surface-based dispersion devices still have the defects of complex structure or low working efficiency, and related contents are required to be further researched and improved.
Disclosure of Invention
The invention mainly aims to provide a frequency dispersion device based on a parabolic phase super-surface, which can modulate the super-surface phase based on Bei Li phase in a visible light broadband, form parabolic phase distribution on the super-surface, realize dispersion and focusing of incident light, and realize the inverse proportion relation between focal length and wavelength of focused light after the effect of the super-surface device. The rectangular pillar metaatom structure adopted by the metasurface is convenient for the phase modulation of Bei Li phases on the metasurface, and each metaatom forming the metasurface is only formed by a single nano pillar, so that the Gao Chaoying atom structure simplicity can be improved; the dispersion and focusing of the incident light can be realized by only using a single-layer dielectric super surface, so that the simplicity of the frequency dispersion device is further improved. By selecting metaatoms that have higher polarization conversion efficiency over the entire broadband range required for operation to make up the supersurface, it is ensured that the supersurface has higher polarization conversion efficiency.
The invention aims at realizing the following technical scheme:
according to the frequency dispersion device based on the parabolic phase super-surface, the super-surface is formed by selecting the metaatoms with higher polarization conversion efficiency in the whole wideband range required by operation, so that the super-surface is ensured to have higher polarization conversion efficiency. The metasurface is composed of selected metaatomic structure arrangement. The rectangular pillar metaatom structure adopted by the metasurface is convenient for modulating the phase of the metasurface by Bei Li phases, and each metaatom forming the metasurface is only formed by a single nano pillar, so that the Gao Chaoying atom structure simplicity can be improved. The dispersion and focusing of the incident light can be realized by only using a single-layer dielectric super surface, so that the simplicity of the frequency dispersion device is further improved. Based on Bei Li phase modulation on the super-surface phase, parabolic phase distribution is formed on the super-surface, dispersion and focusing of incident light are achieved, and the focal length of focusing light after the effect of a super-surface device is in inverse proportion to the wavelength.
Preferably, in a visible light broadband, titanium dioxide rectangular column nano-antennas with high polarization conversion efficiency are used for being distributed on a super surface according to parabolic phases, so that a super surface frequency dispersion device is constructed.
By selecting metaatoms that have higher polarization conversion efficiency over the entire broadband range required for operation to make up the supersurface, it is ensured that the supersurface has higher polarization conversion efficiency. Preferably, the method is implemented as follows,
the super surface is based on Bei Li phase principle, cuboid nano-columns are selected as basic structures of metaatoms, incident light is circularly polarized light, after the effect of the nano-structures, the phase change of a part with the opposite rotation direction to the incident light in emergent light is twice of the rotation angle of the metaatoms, and the phase change is the phase response of the metaatoms. In order to increase the intensity of the opposite spin component in the outgoing light, the metaatoms should have a higher polarization conversion efficiency in the whole working band. The method comprises the steps of taking the length and the width of a nano column as variables, selecting different wavelengths in a working wave band by using a strict coupling wave analysis method, respectively simulating metaatoms with different structural parameters, calculating polarization conversion efficiency, selecting structures with higher polarization conversion efficiency at corresponding wavelengths in the working wave band, then using the selected metaatom structures to simulate by taking the wavelengths as variables, verifying whether the selected metaatom structures have higher polarization conversion efficiency in the whole working wave band, and if the simulation results show that the selected metaatom structures have higher conversion efficiency in the whole working wave band, indicating that the selected metaatom structures can ensure that the metasurfaces have higher polarization conversion efficiency, and constructing a metasurface device.
The selected metaatomic structure arrangement is adopted to form the super surface. Based on Bei Li phase modulation on the super-surface phase, parabolic phase distribution is formed on the super-surface, dispersion and focusing of incident light are achieved, and the focal length of focusing light after the effect of a super-surface device is in inverse proportion to the wavelength. Preferably, the implementation method is as follows:
the phase profile of the subsurface device is shown in equation (1).
Wherein: right side x is the position along x direction on the supersurface, lambda 0 To design the maximum wavelength in the band, f 0 At wavelength lambda for super surface dispersion device 0 Focal length, x of focus in operation 0 Is the magnitude of the offset distance of the device focal plane position from the origin. According to formula (1), the metaatoms are rotated at arbitrary positions on the surface at each position by a rotation angle ofProviding a light source having +.>The phase response structure can ensure that the parabolic phase super-surface-based frequency dispersion device realizes the dispersion and focusing functions of light beams in a wide band range.
For incident light with wavelength lambda in the working band, the focal length f is as large as
Indicating that the focal length is exactly inversely proportional to the wavelength.
Specific formula of Bei Li phase modulation principle modulation phaseThe method comprises the following steps: based on the unique chiral selective phase regulation and control characteristic of Bei Li phase, when left/right circular polarized incident light is incident to an azimuth angle ofWhen the dielectric coupling pole antenna or the dielectric nano rod antenna is arranged, the right/left-handed circular polarized emergent light can be formed into the size of +.>Wherein "+" or "-" is determined by the specific polarization state combination (left/right, right/left) of the incoming and outgoing light. By utilizing the Bei Li phase modulation principle, the obtained phase is only dependent on the azimuth angle of the dielectric coupling pole antenna or the dielectric nano rod antenna, so that the spectral response of the super surface is not influenced.
The method of processing the subsurface device includes Electron Beam Lithography (EBL) or Atomic Layer Deposition (ALD).
The beneficial effects are that:
1. the parabolic phase super-surface-based frequency dispersion device disclosed by the invention is based on Bei Li phase modulation on the super-surface phase, parabolic phase distribution is formed on the super-surface, dispersion and focusing on incident light are realized, and the focal length of focusing light after the effect of the super-surface device is in inverse proportion to the wavelength. The device is equivalent to the combination of a dispersion device and a follow-up focusing device in a spectrometer, namely, the integrated function of the dispersion device and the follow-up focusing device can be realized.
2. The working principle of the super-surface of the frequency dispersion device based on the parabolic phase super-surface is based on Bei Li phase, and the principle can realize the phase modulation of ultra-wide wave bands, so that the frequency dispersion device can realize the frequency dispersion function of the ultra-wide wave bands.
3. The frequency dispersion device based on the parabolic phase super-surface disclosed by the invention only uses a single-layer medium super-surface, and each metaatom forming the super-surface is only formed by a single nano-column, so that the device has a simple structure and is convenient to process.
4. According to the frequency dispersion device based on the parabolic phase super-surface, disclosed by the invention, the super-surface is formed by selecting the metaatoms with higher polarization conversion efficiency in the whole wideband range required by work, so that the super-surface is ensured to have higher polarization conversion efficiency, and therefore, the whole device has higher working efficiency in the working band.
5. The frequency dispersion device based on the parabolic phase super-surface disclosed by the invention can be applied to the fields of spectrometers, adjustable filters, hyperspectral imaging equipment and the like due to the super-light and super-thin characteristics of the super-surface and the characteristic of integration of the super-surface, and is beneficial to realizing the miniaturization and integration development of related equipment.
Drawings
Fig. 1 is a prior art parabolic mirror.
Fig. 2 is a schematic diagram of a parabolic phase subsurface-based frequency dispersion device in accordance with the present disclosure.
FIG. 3 shows the simulated polarization conversion efficiency of the titanium dioxide metastructures used in the supersurfaces of the media disclosed in this example and their selection; FIG. (a) is a schematic diagram of the dimension ratio of the titanium dioxide nano-pillar structure; FIG. (b) polarization conversion efficiency obtained by scanning the length and width of the nanopillars at a wavelength of 450 nm; FIG. (c) polarization conversion efficiency obtained by scanning the length and width of the nanopillars at a wavelength of 550 nm; FIG. (d) polarization conversion efficiency obtained by scanning the length and width of the nano-pillar at 650nm wavelength;
FIG. 4 is a simulation of a subsurface; FIG. (a) is a simulated subsurface phase distribution; the graph (b) is the simulation result of each wavelength in the working wave band; graph (c) is a focal length simulation value and theoretical value curve;
FIG. 5 is a phase distribution, a scanning electron micrograph, and an experimental verification device for samples processed in the examples; FIG. (a) is a sample phase distribution; graph (b) shows the phase distribution of the center portion of the sample; FIGS. (c-d) are scanning electron micrographs of the samples; FIG. (e) is a schematic diagram of an experimental apparatus of an embodiment;
FIG. 6 is a graph showing experimental results of samples of the examples; FIG. (a) is a graph of experimentally measured dispersion effects; FIG. (b) is the light intensity distribution at the focal plane of the sample; FIG. (c) is a plot of experimental and simulated values of polarization conversion efficiency of a sample in the operating band; graph (d) is a graph of experimental and simulated values of the focal length of the sample in the operating band; graph (e) is the amount of focal length change at each wavelength within the operating band for the sample in the example.
Detailed Description
For a better description of the objects and advantages of the present invention, the following description will be given with reference to the accompanying drawings and examples.
Example 1
As shown in fig. 2, the present embodiment provides a frequency dispersion device based on a parabolic phase super-surface, which can modulate the super-surface phase based on Bei Li phase in a broadband of visible light, form parabolic phase distribution on the super-surface, realize dispersion and focusing of incident light, and make the focal length of the focused light inversely proportional to the wavelength after the light acts on the super-surface device. The rectangular pillar metaatom structure adopted by the metasurface is convenient for the phase modulation of Bei Li phases on the metasurface, and each metaatom forming the metasurface is only formed by a single nano pillar, so that the Gao Chaoying atom structure simplicity can be improved; the dispersion and focusing of the incident light can be realized by only using a single-layer dielectric super surface, so that the simplicity of the frequency dispersion device is further improved. By selecting metaatoms that have higher polarization conversion efficiency over the entire broadband range required for operation to make up the supersurface, it is ensured that the supersurface has higher polarization conversion efficiency.
The super surface is formed by selecting metaatoms with higher polarization conversion efficiency in a visible light broadband range, so that the super surface is ensured to have higher polarization conversion efficiency. The metasurface is composed of selected metaatomic structure arrangement. The rectangular pillar metaatom structure adopted by the metasurface is convenient for modulating the phase of the metasurface by Bei Li phases, and each metaatom forming the metasurface is only formed by a single nano pillar, so that the Gao Chaoying atom structure simplicity can be improved. The dispersion and focusing of the incident light can be realized by only using a single-layer dielectric super surface, so that the simplicity of the frequency dispersion device is further improved. Based on Bei Li phase modulation on the super-surface phase, parabolic phase distribution is formed on the super-surface, dispersion and focusing of incident light are achieved, and the focal length of focusing light after the effect of a super-surface device is in inverse proportion to the wavelength.
In the visible light wave band of 450-650nm, titanium dioxide rectangular column nano-antennas are used for arrangement on a super surface according to parabolic phases, so that a super surface frequency dispersion device is constructed, and the parabolic phase distribution is beneficial to realizing a focusing function similar to that of a traditional parabolic reflector, as shown in fig. 1. By selecting metaatoms with higher polarization conversion efficiency in the whole wideband range required by the work to form the super surface, the super surface is ensured to have higher polarization conversion efficiency, and the working effect of the super surface frequency dispersion device is shown in figure 2. The implementation method is as follows:
the metasurface is based on Bei Li phase principle, and a cuboid nano-column is selected as a basic structure of the metaatoms, as shown in fig. 3 (a), the period of the metaatoms is 400nm, the height of the nano-column is 600nm, incident light is circularly polarized light, after the effect of the nano-structure, the phase change of a part with the opposite rotation direction to the incident light in emergent light is twice of the rotation angle of the metaatoms, and the phase change is the phase response of the metaatoms. In order to increase the intensity of the opposite spin component in the outgoing light, the metaatoms should have a higher polarization conversion efficiency in the whole working band. The method comprises the steps of selecting different wavelengths in a working wave band by using a strict coupling wave analysis method with the length and the width of a nano column as variables, simulating the metaatoms with different structural parameters, calculating polarization conversion efficiency, selecting the minimum wavelength of 450nm, the middle wavelength of 550nm and the maximum wavelength of 650nm in the wave band, performing simulation calculation, wherein the change range of the metaatoms is 100nm to 300nm, the change step length is 10nm, simulating calculation to obtain conversion efficiency under the selected wavelengths, as shown in fig. 3 (b-d), weighing the efficiency of the wavelengths, selecting the structure with higher polarization conversion efficiency at the wavelengths in the working wave band, for example, taking the average of the efficiency of the wavelengths, selecting the structure with highest average efficiency as the metaatom, and selecting the obtained structure with the length of 300nm, the width of 120nm and the height of 600nm. And then, simulating by using the selected metastructure and taking the wavelength as a variable, and verifying whether the selected metastructure has higher polarization conversion efficiency in the whole working wave band, wherein if the simulation result shows that the selected metastructure has higher conversion efficiency in the whole working wave band, the selected metastructure can ensure that the metasurface has higher polarization conversion efficiency and is used for constructing a super-surface device.
The selected metaatomic structure arrangement is adopted to form the super surface. Based on Bei Li phase modulation on the super-surface phase, parabolic phase distribution is formed on the super-surface, dispersion and focusing of incident light are achieved, and the focal length of focusing light after the effect of a super-surface device is in inverse proportion to the wavelength. The implementation method comprises the following steps:
the phase profile of the subsurface device is shown in equation (3).
Wherein: right side x is the position along x direction on the supersurface, lambda 0 To design the maximum wavelength in the band, f 0 At wavelength lambda for super surface dispersion device 0 Focal length, x of focus in operation 0 Is the magnitude of the offset distance of the device focal plane position from the origin. According to formula (3), the metaatoms are rotated at arbitrary positions on the surface at each position by a rotation angle ofProviding a light source having +.>The phase response structure can ensure that the parabolic phase super-surface-based frequency dispersion device realizes the dispersion and focusing functions of light beams in a wide band range.
For incident light with wavelength lambda in the working band, the focal length f is as large as
Indicating that the focal length is exactly inversely proportional to the wavelength.
Constructing a super surface by using the selected metaatomic structure with higher polarization conversion efficiency to carry out simulation verification, and obtaining a focal length f 0 Set to 200 μm, the off-axis distance x of the focal position 0 The dimension of the supersurface in the x-direction was also determined to be 20 μm. The phases of the various locations of the subsurface are calculated according to equation (3), and the desired phase distribution is provided to the subsurface by rotating the metaatoms based on the Bei Li phases, as shown in fig. 4 (a). Simulation is carried out by using a time domain finite difference method to obtain electromagnetic field distribution after super-surface action, and components in opposite rotation directions of incident light are taken for observation, as shown in fig. 4 (b), and the focusing and dispersion effects are good. Comparing the simulated focal length value with the formula calculated focal length value, as shown in fig. 4 (c), the simulated focal length has the same change trend as the theoretical value, and has a good dispersion function.
The parameters of the frequency dispersion device based on the parabolic phase super-surface are set to be focal length 1cm, the off-axis distance 1mm, the device size 400 μm×400 μm, namely, the device is composed of 1001×1001 nanometer column array, the phase distribution is calculated according to the formula (3), as shown in fig. 5 (a-b), a super-surface sample is obtained by processing through an Atomic Layer Deposition (ALD) method, and a Scanning Electron Microscope (SEM) of the super-surface is shown in fig. 5 (c-d).
The experimental light path shown in fig. 5 (e) is constructed to test the performance of the frequency dispersion device based on the parabolic phase super surface, a CCD camera is used for shooting a light intensity distribution diagram of an x-y plane, namely, a plane parallel to the super surface, a direction vertical to the super surface is defined as a z direction, an x-z plane diagram shown in fig. 6 (a) is obtained based on experimental obtained data, and after the super surface is acted, the dispersion effect is generated by light with different wavelengths, and the focusing is realized at an off-axis position of 1 mm. The light intensity distribution at the focal plane 1mm off-axis was experimentally measured as shown in fig. 6 (b). The power meter is used for measuring the light intensity of the incident light and the emergent light after passing through the super surface, the ratio of the incident light power to the emergent light power is the actual working efficiency, and the actual efficiency and the theoretical value are compared with those shown in fig. 6 (c), so that the efficiency of the device is slightly reduced compared with the theoretical value in the actual working process, but the device still keeps higher efficiency. The experimental focal length and the theoretical value of the focal length are shown in fig. 6 (d), and the actual focal length and the design value can be well matched. Fig. 6 (e) is a focal length variation at each wavelength within the operating band, and the spectral resolution of the device can be obtained by comparing the focal length variation with the full width half maximum value in the optical axis direction.
In summary, the present embodiment provides a frequency dispersion device based on a parabolic phase super surface, which can realize the dispersion and focusing functions of incident light in a visible light broadband, has a focal length and wavelength in an inverse proportion relation, is easy to analyze, has higher efficiency in the whole broadband, and is beneficial to practical broadband dispersion application. The device can realize the effect of frequency dispersion regulation and control by utilizing the super-surface structure with the thickness of a single piece of submicron, and the application of the device is favorable for the development of devices such as a new-generation spectrometer, an adjustable filter and the like, and has wide application prospect in the field of spectrum analysis.
While the foregoing is directed to embodiments of the present invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.
Claims (4)
1. A parabolic phase subsurface based frequency dispersion device, characterized by: the metaatoms with higher polarization conversion efficiency in the whole broadband range required by work are selected to form the super surface, so that the super surface is ensured to have higher polarization conversion efficiency; the super surface is formed by arranging selected metaatoms in a structure; the rectangular pillar metaatom structure adopted by the metasurface is convenient for the phase modulation of Bei Li phases on the metasurface, and each metaatom forming the metasurface is only formed by a single nano pillar, so that the Gao Chaoying atom structure simplicity can be improved; the dispersion and focusing of the incident light can be realized by only using a single-layer medium super surface, so that the simplicity of the frequency dispersion device is further improved; based on Bei Li phase modulation on the super-surface phase, parabolic phase distribution is formed on the super-surface, dispersion and focusing of incident light are realized, and the focal length of focusing light after the effect of a super-surface device is in inverse proportion to the wavelength;
in a visible light broadband, arranging titanium dioxide rectangular column nano antennas with high polarization conversion efficiency on a super surface according to parabolic phases to construct a super surface frequency dispersion device;
the metaatoms with higher polarization conversion efficiency in the whole broadband range required by work are selected to form the super surface, so that the super surface is ensured to have higher polarization conversion efficiency; the implementation method is as follows,
the method is characterized in that the super surface is based on Bei Li phase principle, a cuboid nano column is selected as a basic structure of the metaatoms, incident light is circularly polarized light, after the effect of the nano structure, the phase change of a part with the opposite rotation direction to the incident light in emergent light is twice of the rotation angle of the metaatoms, and the phase change is the phase response of the metaatoms; in order to improve the intensity of the opposite spin component in the emergent light, the metaatoms have higher polarization conversion efficiency in the whole working wave band; the method comprises the steps of taking the length and the width of a nano column as variables, selecting different wavelengths in a working wave band by using a strict coupling wave analysis method, respectively simulating metaatoms with different structural parameters, calculating polarization conversion efficiency, selecting structures with higher polarization conversion efficiency at corresponding wavelengths in the working wave band, then using the selected metaatom structures to simulate by taking the wavelengths as variables, verifying whether the selected metaatom structures have higher polarization conversion efficiency in the whole working wave band, and if the simulation results show that the selected metaatom structures have higher conversion efficiency in the whole working wave band, indicating that the selected metaatom structures can ensure that the metasurfaces have higher polarization conversion efficiency, and constructing a metasurface device.
2. A parabolic phase subsurface based frequency dispersive device as claimed in claim 1, wherein: forming a super surface by adopting the selected metaatomic structure arrangement; based on Bei Li phase modulation on the super-surface phase, parabolic phase distribution is formed on the super-surface, dispersion and focusing of incident light are realized, and the focal length of focusing light after the effect of a super-surface device is in inverse proportion to the wavelength; the implementation method is as follows,
the phase distribution of the super-surface device is shown in formula (1);
wherein: right side x is the position along x direction on the supersurface, lambda 0 To design the maximum wavelength in the band, f 0 At wavelength lambda for super surface dispersion device 0 Focal length, x of focus in operation 0 The offset distance of the focal plane position of the device relative to the origin is the magnitude; according to formula (1), the metaatoms are rotated at arbitrary positions on the surface at each position by a rotation angle ofProviding a light source having +.>The phase response structure can ensure that the parabolic phase super-surface-based frequency dispersion device realizes the dispersion and focusing functions of light beams in a wide band range;
for incident light with wavelength lambda in the working band, the focal length f is as large as
Indicating that the focal length is exactly inversely proportional to the wavelength.
3. A parabolic phase subsurface based frequency dispersive device as claimed in claim 2, wherein: the specific method for modulating the phase by the Bei Li phase principle comprises the following steps: based on the unique chiral selective phase regulation and control characteristic of Bei Li phase, when left/right circular polarized incident light is incident to an azimuth angle ofWhen the dielectric coupling pole antenna or the dielectric nano rod antenna is arranged, the right/left-handed circular polarized emergent light can be formed into the size of +.>Wherein "+" or "-" is determined by the specific polarization state combination of the incident and the outgoing light; by utilizing Bei Li phase principle, the obtained phase is only dependent on the azimuth angles of the dielectric coupling pole antenna and the dielectric nano rod antenna, so that the spectral response of the super surface is not influenced.
4. A parabolic phase subsurface based frequency dispersive device as claimed in claim 3, wherein: the method of processing the subsurface device includes Electron Beam Lithography (EBL) or Atomic Layer Deposition (ALD).
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