CN113182158B - Piezoelectric transducer with flexible pre-tightening mechanism and isolating sheet - Google Patents

Piezoelectric transducer with flexible pre-tightening mechanism and isolating sheet Download PDF

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Publication number
CN113182158B
CN113182158B CN202110614034.XA CN202110614034A CN113182158B CN 113182158 B CN113182158 B CN 113182158B CN 202110614034 A CN202110614034 A CN 202110614034A CN 113182158 B CN113182158 B CN 113182158B
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China
Prior art keywords
side wall
ultrasonic vibrator
tightening mechanism
piezoelectric transducer
isolation layer
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CN113182158A (en
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张昕阳
贺云波
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Guangdong Ada Semiconductor Equipment Co ltd
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Guangdong Ada Intelligent Equipment Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B3/00Methods or apparatus specially adapted for transmitting mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B3/02Methods or apparatus specially adapted for transmitting mechanical vibrations of infrasonic, sonic, or ultrasonic frequency involving a change of amplitude

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

The invention provides a piezoelectric transducer with a flexible pre-tightening mechanism and a spacer, which comprises the pre-tightening mechanism, an amplitude transformer, a back plate and an ultrasonic vibrator, wherein the amplitude transformer is connected at the front end of the pre-tightening mechanism, the back plate is connected at the rear end of the pre-tightening mechanism, an installation space is arranged in the middle of the pre-tightening mechanism, and the ultrasonic vibrator is positioned in the installation space. The middle parts of the left side wall and the right side wall of the installation space are extended outwards to form fixing parts, and the side wall between each fixing part and the back plate is a spring-shaped connecting wall. The piezoelectric transducer with the flexible pre-tightening mechanism and the isolation sheet can realize pre-installation alignment adjustment, so that the transducer is easy to install, more stable after installation and good in consistency.

Description

Piezoelectric transducer with flexible pre-tightening mechanism and isolating sheet
Technical Field
The invention relates to the technical field of electronic devices, in particular to a piezoelectric transducer with a flexible pre-tightening mechanism and a spacer.
Background
The piezoelectric transducer is generally composed of a back plate, an ultrasonic vibrator, an amplitude transformer, a fixing pin and a bonding tool. Piezoelectric transducers convert electrical energy into mechanical vibration by using the piezoelectric effect of piezoelectric ceramics having the same resonance frequency as the piezoelectric transducer. Therefore, as an energy conversion device, a piezoelectric transducer functions to convert an input electric power into a mechanical power (i.e., an ultrasonic wave) for output.
However, in the existing piezoelectric transducer, the back plate and the ultrasonic vibrator and the amplitude transformer and the ultrasonic vibrator are directly connected, and are not electrically isolated; because the backboard and the amplitude transformer are connected as the zero position, the ground noise is easily introduced, the zero position level is influenced, and the output of the ultrasonic vibrator is influenced. In addition, because the electrodes in the ultrasonic vibrator have a certain thickness which cannot be ignored, the double-layer electrodes can cause the ultrasonic vibrator to be asymmetric, and the output of the ultrasonic vibrator is influenced.
In addition, the existing transducer generally has no pre-tightening mechanism, and can only be installed in an installation space as large as the size of the transducer or an installation space larger than the size of the transducer; when the reserved installation space is small, only the smaller transducer can be replaced. In addition, because the existing transducer does not have a pre-tightening mechanism, the transducer can only be fixed through screws, the transducer cannot be pre-installed during installation to carry out alignment adjustment, when the installation position has deviation, the screws need to be loosened, and then the whole transducer is taken down to be installed again, so that the installation is difficult.
Disclosure of Invention
The piezoelectric transducer with the flexible pre-tightening mechanism and the isolating sheet provided by the invention can effectively isolate external noise, improve the output of an ultrasonic vibrator, can be subjected to pre-installation alignment adjustment, and reduces the installation difficulty.
The technical scheme adopted by the invention is as follows: a piezoelectric transducer having a flexible pretensioning mechanism and a spacer, comprising: the ultrasonic vibration generator comprises a pre-tightening mechanism, an amplitude transformer, a back plate and an ultrasonic vibrator, wherein the amplitude transformer is connected to the front end of the pre-tightening mechanism, the back plate is connected to the rear end of the pre-tightening mechanism, an installation space is arranged in the middle of the pre-tightening mechanism, the ultrasonic vibrator is located in the installation space, the middles of the left side wall and the right side wall of the installation space are all protruded outwards to form fixing parts, and each fixing part is connected with the side wall between the back plate through a spring.
Furthermore, the left side wall and the right side wall of the installation space are respectively provided with a first bulge part in a protruding manner at positions close to the amplitude transformer, and each first bulge part is provided with a first through groove.
Furthermore, second through grooves are further formed in the left side wall and the right side wall of the installation space, and each second through groove is located between each first protruding portion and each fixing portion.
Furthermore, the left side and the right side of the back plate are both protruded outwards to form second protruding parts, and each second protruding part is provided with a third through groove.
Furthermore, a first isolation layer is arranged at one end, close to the amplitude transformer, of the ultrasonic vibrator, the first isolation layer is located between the amplitude transformer and the ultrasonic vibrator, a second isolation layer is arranged at one end, close to the back plate, of the ultrasonic vibrator, and the second isolation layer is located between the back plate and the ultrasonic vibrator.
Further, gaps exist between the left side wall and the right side wall of the installation space and the ultrasonic vibrator.
Furthermore, the thicknesses of the first isolation layer and the second isolation layer are both larger than 0mm and smaller than or equal to 1mm.
Further, first isolation layer with the second isolation layer is one or more in ceramic layer, piezoceramics layer, ruby layer or sapphire layer.
Furthermore, the front end of the amplitude transformer is provided with a mounting hole, and a bonding tool is arranged in the mounting hole; and a fixing screw is arranged at the position of the amplitude transformer close to the bonding tool, and the fixing screw is vertical to the bonding tool.
Furthermore, each fixing portion is provided with a fixing hole for a screw to pass through.
Compared with the prior art, the piezoelectric transducer with the flexible pre-tightening mechanism and the isolating sheet is connected between the amplitude transformer and the back plate through the pre-tightening mechanism, the ultrasonic vibrator is arranged in the pre-tightening mechanism and positioned between the amplitude transformer and the back plate, so that the transducer has a pre-tightening function, and the transducer can be pre-tightened at a mounting position smaller than the pre-tightening mechanism by compressing the pre-tightening mechanism during mounting; when the installation position has deviation, the pre-installation contraposition adjustment is carried out through the pre-tightening mechanism, so that the installation of the transducer is easier.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings, there is shown in the drawings,
FIG. 1: the invention discloses a top view of a piezoelectric transducer with a flexible pre-tightening mechanism and a spacer;
FIG. 2: the invention discloses a three-dimensional view of a piezoelectric transducer with a flexible pre-tightening mechanism and a spacer;
FIG. 3: another perspective view of a piezoelectric transducer having a flexible pretensioning mechanism and a spacer in accordance with the present invention.
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.
As shown in fig. 1 to 3, the piezoelectric transducer with the flexible pretensioning mechanism and the spacer of the present invention includes a pretensioning mechanism 1, a horn 2, a back plate 3 and an ultrasonic vibrator 4, wherein the horn 2 is connected to the front end of the pretensioning mechanism 1, the back plate 3 is connected to the rear end of the pretensioning mechanism 1, and the ultrasonic vibrator 4 is connected between the horn 2 and the back plate 3. Wherein the horn 2 is used to transmit vibration generated from the ultrasonic vibrator 4 to perform bonding. Typically, the vibration is transmitted in the form of an oscillating waveform.
The method specifically comprises the following steps: the middle of the pre-tightening mechanism 1 is provided with an installation space 5, the ultrasonic vibrator 4 is located in the installation space 5, and gaps 6 exist between the left side wall and the right side wall of the installation space 5 and the ultrasonic vibrator 4, so that the ultrasonic vibration of the transducer is dynamically isolated, and energy loss is avoided. The middle parts of the left side wall and the right side wall of the installation space 5 are protruded outwards to form fixing parts 7, and each fixing part 7 is provided with a fixing hole 8 for a screw to pass through for installing and fixing the transducer on a machine. The side wall between each fixing part 7 and the back plate 3 is a spring-shaped connecting wall 19, so that the transducer has a pre-tightening function, and the transducer can be pre-tightened to a smaller installation position by compressing the pre-tightening mechanism 1 during installation. In addition, when the installation position has deviation, the pre-installation contraposition adjustment is carried out through the pre-tightening mechanism 1, so that the installation of the transducer is easier.
In this embodiment, the horn 2, the pre-tightening mechanism 1 and the back plate 3 are integrally formed, and it can be understood that in other embodiments, the horn 2, the pre-tightening mechanism 1 and the back plate 3 may be formed separately and fixed to each other by a mechanical connection, which is not limited thereto.
Further, the left side wall and the right side wall of the installation space 5 are provided with first protruding parts 9 at positions close to the horn 2, and each first protruding part 9 is provided with a first through groove 10. The left side wall and the right side wall of the installation space 5 are further provided with second through grooves 11, and each second through groove 11 is positioned between each first protruding part 9 and each fixing part 7. Through the combined action of first wearing groove 10 and second wearing groove 11, realize the ultrasonic vibration of dynamic isolation piezoelectric transducer to the ultrasonic vibration that prevents ultrasonic vibrator 4 to produce effectively avoids energy loss to the machine transmission, can also make piezoelectric transducer's spectral characteristic and impedance not receive external environment's influence simultaneously, stable piezoelectric transducer's operating condition.
The left and right sides of backplate 3 all outwards protrudes to stretch and forms second bellying 12, all is equipped with the third on each second bellying 12 and wears groove 13, wear groove 10 and the second combined action with first wearing, further realize dynamic isolation piezoelectric transducer's ultrasonic vibration to the ultrasonic vibration that prevents ultrasonic vibrator 4 production transmits to the machine, effectively avoids energy loss, makes piezoelectric transducer's spectral characteristic and impedance not receive external environment's influence simultaneously, stabilizes piezoelectric transducer's operating condition.
In addition, a first isolation layer 14 is arranged at one end, close to the amplitude transformer 2, of the ultrasonic vibrator 4, the first isolation layer 14 is located between the amplitude transformer 2 and the ultrasonic vibrator 4, a second isolation layer 15 is arranged at one end, close to the back plate 3, of the ultrasonic vibrator 4, and the second isolation layer 15 is located between the back plate 3 and the ultrasonic vibrator 4. Keep apart external noise through setting up first isolation layer 14 and second isolation layer 15 for the level of ultrasonic vibrator 4 and driver inside keeps unanimous, improves ultrasonic vibrator 4's output, thereby effectual reduction external electrical noise guarantees the uniformity of piezoelectric transducer work, does not influence the frequency and the amplitude of piezoelectric transducer work simultaneously. In addition, the center of the ultrasonic vibrator 4 can be adjusted by providing the first isolation layer 14 and the second isolation layer 15, and the operating state of the piezoelectric transducer is stabilized.
Wherein, the thickness of first isolation layer 14 and second isolation layer 15 all is greater than 0mm, less than or equal to 1mm, and first isolation layer 14 and second isolation layer 15 are the ceramic layer, piezoceramics layer, one or more in ruby or the sapphire layer, and do not use this as the limit.
It will be appreciated that in other embodiments, the first and second barrier layers 14, 15 may also be insulating coatings when the horn 2, pretensioning mechanism 1 and backing plate 3 are formed separately, wherein the first barrier layer 14 is coated on the horn 2 and the second barrier layer 15 is coated on the backing plate 3, but not limited thereto.
Besides, the front end of the amplitude transformer 2 is provided with a mounting hole 16, and a bonding tool 17 is arranged in the mounting hole 16 to perform bonding operation; and a set screw 18 is mounted to the horn 2 at a position adjacent to the bonding tool 17, the set screw 18 being perpendicular to the bonding tool 17 to lock the bonding tool 17 at the front end of the horn 2.
In summary, the piezoelectric transducer with the flexible pre-tightening mechanism and the spacer has the following advantages:
1. the pre-tightening mechanism 1 is connected between the amplitude transformer 2 and the back plate 3, the ultrasonic vibrator 4 is arranged in the pre-tightening mechanism 1 and is positioned between the amplitude transformer 2 and the back plate 3, so that the transducer has a pre-tightening function, and during installation, the pre-tightening mechanism 1 can be compressed to pre-tighten the transducer at an installation position smaller than the pre-tightening function; when the installation position has deviation, the pre-installation contraposition adjustment is carried out through the pre-tightening mechanism 1, so that the installation of the transducer is easy, the installation is more stable, and the consistency is good.
2. Keep apart external noise through setting up first isolation layer 14 and second isolation layer 15 for the level of ultrasonic vibrator 4 and driver inside keeps unanimous, improves ultrasonic vibrator 4's output, thereby effectual reduction external electrical noise guarantees the uniformity of piezoelectric transducer work, does not influence the frequency and the amplitude of piezoelectric transducer work simultaneously. In addition, the center of the ultrasonic vibrator 4 can be adjusted by providing the first isolation layer 14 and the second isolation layer 15, and the operating state of the piezoelectric transducer is stabilized.
3. Through the combined action of the first penetrating groove 10, the second penetrating groove 11 and the third penetrating groove 13, the ultrasonic vibration of the piezoelectric transducer is dynamically isolated, so that the ultrasonic vibration generated by the ultrasonic vibrator 4 is transmitted to a machine, the energy loss is effectively avoided, the frequency spectrum characteristic and the impedance of the piezoelectric transducer are not influenced by the external environment, and the working state of the piezoelectric transducer is stabilized.
Any combination of the various embodiments of the present invention should be considered as disclosed in the present invention, unless the inventive concept is contrary to the present invention; within the scope of the technical idea of the invention, any combination of various simple modifications and different embodiments of the technical solution without departing from the inventive idea of the present invention shall fall within the protection scope of the present invention.

Claims (5)

1. A piezoelectric transducer having a flexible pretensioning mechanism and a spacer, comprising: the ultrasonic vibration generator comprises a pre-tightening mechanism, an amplitude transformer, a back plate and an ultrasonic vibrator, wherein the amplitude transformer is connected to the front end of the pre-tightening mechanism, the back plate is connected to the rear end of the pre-tightening mechanism, an installation space is arranged in the middle of the pre-tightening mechanism, the ultrasonic vibrator is located in the installation space, the middles of the left side wall and the right side wall of the installation space protrude outwards to form fixing parts, and the side wall between each fixing part and the back plate is a spring-shaped connecting wall;
a first isolation layer is arranged at one end, close to the amplitude transformer, of the ultrasonic vibrator, the first isolation layer is positioned between the amplitude transformer and the ultrasonic vibrator, a second isolation layer is arranged at one end, close to the back plate, of the ultrasonic vibrator, and the second isolation layer is positioned between the back plate and the ultrasonic vibrator; the thicknesses of the first isolation layer and the second isolation layer are both larger than 0mm and smaller than or equal to 1mm;
the left side wall and the right side wall of the installation space are respectively convexly provided with a first bulge part at the positions close to the amplitude transformer, and each first bulge part is provided with a first through groove;
second through grooves are further formed in the left side wall and the right side wall of the mounting space, and each second through groove is located between each first protruding portion and each fixing portion;
the left side and the right side of the back plate are both extended outwards in a protruding mode to form second protruding portions, and each second protruding portion is provided with a third penetrating groove.
2. A piezoelectric transducer having a flexible pretensioning mechanism and a spacer as in claim 1, characterized in that: gaps are reserved between the left side wall and the right side wall of the mounting space and the ultrasonic vibrators.
3. A piezoelectric transducer having a flexible pretensioning mechanism and a spacer as in claim 1, characterized in that: first isolation layer with the second isolation layer is ceramic layer, piezoceramics layer, one or more in red precious stone layer or the sapphire layer.
4. A piezoelectric transducer having a flexible pretensioning mechanism and a spacer as in claim 1, characterized in that: the front end of the amplitude transformer is provided with a mounting hole, and a bonding tool is arranged in the mounting hole; and a fixing screw is arranged at the position of the amplitude transformer close to the bonding tool, and the fixing screw is vertical to the bonding tool.
5. A piezoelectric transducer having a flexible pretensioning mechanism and a spacer as in claim 1, characterized in that: each fixing part is provided with a fixing hole for a screw to pass through.
CN202110614034.XA 2021-06-02 2021-06-02 Piezoelectric transducer with flexible pre-tightening mechanism and isolating sheet Active CN113182158B (en)

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Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN203886774U (en) * 2014-04-11 2014-10-22 上海相友超声科技有限公司 Short energy converter with flange structure
US9640512B2 (en) * 2014-07-24 2017-05-02 Asm Technology Singapore Pte Ltd Wire bonding apparatus comprising an oscillator mechanism
CN204338451U (en) * 2014-11-19 2015-05-20 东莞市优超精密技术有限公司 There is the transducer of external vibration isolation structure
CN106269455A (en) * 2016-11-16 2017-01-04 上海相友超声科技有限公司 Crude aluminum silk bonding ultrasonic transducer
CN207154077U (en) * 2017-02-23 2018-03-30 重庆西山科技股份有限公司 Ultrasonic transducer
CN110961335B (en) * 2018-09-28 2021-10-26 佛山市顺德区美的电热电器制造有限公司 Ultrasonic vibrator device and cooking utensil with same
CN112059742B (en) * 2020-09-04 2022-04-26 广州大学 Piezoelectric special-shaped amplitude transformer ultrasonic grinding and polishing device

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Address after: Room 101, 201, 301, 401, 501, Building 10, Standard Industrial Park, No. 49 Wantai Road, Nansha District, Guangzhou City, Guangdong Province 511400

Patentee after: Guangdong Ada Semiconductor Equipment Co.,Ltd.

Country or region after: China

Address before: Room 507, Building B, Phase I, Nanhai Industrial Think Tank City, Taoyuan Road, Software Park, Shishan Town, Nanhai District, Foshan City, Guangdong Province

Patentee before: GUANGDONG ADA INTELLIGENT EQUIPMENT Co.,Ltd.

Country or region before: China