CN115567859B - Push-pull type electrostatic film ultrasonic transducer and directional sounding device - Google Patents
Push-pull type electrostatic film ultrasonic transducer and directional sounding device Download PDFInfo
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- CN115567859B CN115567859B CN202211470344.XA CN202211470344A CN115567859B CN 115567859 B CN115567859 B CN 115567859B CN 202211470344 A CN202211470344 A CN 202211470344A CN 115567859 B CN115567859 B CN 115567859B
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/01—Electrostatic transducers characterised by the use of electrets
Abstract
The application discloses a push-pull type electrostatic film ultrasonic transducer and a directional sounding device, wherein the push-pull type electrostatic film ultrasonic transducer comprises a first electrode assembly, a second electrode assembly and a vibration structure; the vibration structure is arranged between the first electrode assembly and the second electrode assembly, a first potential difference is arranged between the first electrode assembly and the vibration structure, a second potential difference is arranged between the second electrode assembly and the vibration structure, the first potential difference is the sum of a first direct current bias voltage and a first alternating current voltage, and the second potential difference is the difference between a second direct current bias voltage and a second alternating current voltage; the first direct current bias voltage and the second direct current bias voltage have the same polarity, the first alternating current voltage and the second alternating current voltage have opposite polarities, and the vibration structure performs push-pull vibration under the combined action of the first potential difference and the second potential difference, generates ultrasonic waves and radiates the ultrasonic waves to the outside through the arranged through holes; the push-pull type electrostatic film ultrasonic transducer can effectively improve electroacoustic conversion efficiency and improve sound pressure level of generated ultrasonic waves.
Description
Technical Field
The application relates to the technical field of directional sounding, in particular to a push-pull type electrostatic film ultrasonic transducer and a directional sounding device.
Background
The electrostatic membrane ultrasonic transducer is also called a capacitive membrane ultrasonic transducer, and uses electrostatic force generated by the upper electrode and the lower electrode to drive the membrane to vibrate, so that ultrasonic waves are radiated.
As shown in fig. 1, a structure of a common electrostatic film ultrasonic transducer 500 is shown, the electrostatic film ultrasonic transducer 500 includes a film 01, a top electrode 02, a support column 03, an insulating layer 04, a bottom electrode 05, a fixed bottom plate 06, and the like, which are sequentially arranged from top to bottom, and an air gap 07 is formed between the top electrode 02 and the insulating layer 04. Through experiments, the electroacoustic conversion efficiency of the electrostatic film ultrasonic transducer 500 under the structure is not high enough, and the ultrasonic sound pressure level needs to be further improved.
Therefore, there is a need to find an electrostatic membrane ultrasonic transducer that can effectively improve electroacoustic conversion rate.
Disclosure of Invention
The application aims to provide a push-pull type electrostatic film ultrasonic transducer and a directional sounding device, which can effectively improve electroacoustic conversion efficiency and improve sound pressure level of generated ultrasonic waves.
In order to achieve the above purpose, the present application proposes the following technical scheme:
in a first aspect, a push-pull electrostatic thin film ultrasound transducer is provided, the push-pull electrostatic thin film ultrasound transducer comprising:
a first electrode assembly and a second electrode assembly disposed opposite to each other;
the vibration structure is arranged between the first electrode assembly and the second electrode assembly, a first air gap is formed between the vibration structure and the first electrode assembly, a second air gap is formed between the vibration structure and the second electrode assembly, the first electrode assembly is electrically connected with the vibration structure, a first potential difference is arranged between the first electrode assembly and the vibration structure, the second electrode assembly is electrically connected with the vibration structure, a second potential difference is arranged between the second electrode assembly and the vibration structure, the first potential difference is the sum of a first direct current bias voltage and a first alternating current voltage, and the second potential difference is the difference between a second direct current bias voltage and a second alternating current voltage; at any moment, the polarity of the first direct current bias voltage is the same as that of the second direct current bias voltage, the polarity of the first alternating current voltage is opposite to that of the second alternating current voltage, and the vibrating structure performs push-pull vibration between the first air gap and the second air gap under the combined action of the first potential difference and the second potential and generates ultrasonic waves;
and the through hole is used for radiating the ultrasonic waves to the outside, is arranged on the push-pull type electrostatic film ultrasonic transducer and is communicated with the outside.
In a preferred embodiment, the first electrode assembly includes a first electrode layer, the second electrode assembly includes a second electrode layer, the vibration structure includes a thin film layer and a third electrode layer that are disposed in a laminated manner, the first electrode layer is electrically connected to the third electrode layer to form the first potential difference, and the second electrode layer is electrically connected to the third electrode layer to form the second potential difference.
In a preferred embodiment, the voltage value of the first dc bias voltage is not smaller than the amplitude of the first ac voltage, and the voltage value of the second dc bias voltage is not smaller than the amplitude of the second ac voltage.
In a preferred embodiment, the magnitudes of the first ac voltage and the second ac voltage are both 10 v-1000 v, and the first dc bias voltage and the second dc bias voltage are both 10 v-1000 v.
In a preferred embodiment, the third electrode layer is grounded.
In a preferred embodiment, the push-pull electrostatic thin film ultrasonic transducer further comprises a first support and a second support;
the first support piece is arranged between the first electrode assembly and the vibration structure, and the first air gap is formed by enclosing the first support piece, the first electrode assembly and the vibration structure;
the second support piece is arranged between the second electrode assembly and the vibration structure, and the second air gap is formed by enclosing the second support piece, the second electrode assembly and the vibration structure.
In a preferred embodiment, the through hole is provided at least on any one structure or any two or more structures of the first electrode assembly, the second electrode assembly, the first support member and the second support member, and the vibration structure communicates with the outside through the through hole.
In a preferred embodiment, the sum of the cross-sectional areas of the through holes provided on the first electrode assembly does not exceed half the cross-sectional area of the first electrode assembly, and the sum of the cross-sectional areas of the through holes provided on the second electrode assembly does not exceed half the cross-sectional area of the second electrode assembly.
In a preferred embodiment, the first electrode assembly further includes a first insulating layer and a first fixing base plate, the first insulating layer is disposed on a side of the first electrode layer, which is close to the vibration structure, and the first fixing base plate is disposed on a side of the first electrode layer, which is far away from the vibration structure;
the second electrode assembly further comprises a second insulating layer and a second fixing bottom plate, wherein the second insulating layer is arranged on one side, close to the vibration structure, of the second electrode layer, and the second fixing bottom plate is arranged on one side, far away from the vibration structure, of the second electrode layer.
In a second aspect, a directional sound generating apparatus is provided, the directional sound generating apparatus comprising a push-pull electrostatic thin film ultrasound transducer according to any of the first aspects.
Compared with the prior art, the application has the following beneficial effects:
the application provides a push-pull type electrostatic film ultrasonic transducer and a directional sounding device, wherein the push-pull type electrostatic film ultrasonic transducer comprises a first electrode assembly, a second electrode assembly, a vibrating structure and a through hole for radiating ultrasonic waves to the outside, wherein the first electrode assembly, the second electrode assembly and the vibrating structure are oppositely arranged; the vibration structure is arranged between the first electrode assembly and the second electrode assembly, a first air gap is formed between the vibration structure and the first electrode assembly, a second air gap is formed between the vibration structure and the second electrode assembly, the first electrode assembly is electrically connected with the vibration structure, a first potential difference is arranged between the first electrode assembly and the vibration structure, the second electrode assembly is electrically connected with the vibration structure, a second potential difference is arranged between the second electrode assembly and the vibration structure, the first potential difference is the sum of a first direct current bias voltage and a first alternating current voltage, and the second potential difference is the difference between a second direct current bias voltage and a second alternating current voltage; at any moment, the polarity of the first direct-current bias voltage is the same as that of the second direct-current bias voltage, the polarity of the first alternating-current voltage is opposite to that of the second alternating-current voltage, the vibration structure performs push-pull vibration between the first air gap and the second air gap under the combined action of the first potential difference and the second potential difference and generates ultrasonic waves, and the through hole is arranged on the push-pull electrostatic film ultrasonic transducer and is communicated with the outside; the push-pull type electrostatic film ultrasonic transducer enables the vibration structure to be in a tensioning state all the time and can effectively increase the amplitude of the vibration structure when in vibration by arranging two electric field superposition acting on the vibration structure, so that the electroacoustic conversion efficiency is effectively improved, the sound pressure level of the generated ultrasonic wave is improved, and the push-pull type electrostatic film ultrasonic transducer can effectively radiate the generated ultrasonic wave to the outside by arranging the through holes;
further, the voltage value of the first direct current bias voltage is not smaller than the amplitude of the first alternating current voltage, and the voltage value of the second direct current bias voltage is not smaller than the amplitude of the second alternating current voltage, so that the first potential difference and the second potential difference are all positive values all the time, and the vibrating structure is always in a tensioning state when vibrating up and down under the action of the first alternating current and the second alternating current;
of course, the present application is only required to achieve at least one of the above technical effects.
Drawings
FIG. 1 is a schematic diagram of the structure of an electrostatic thin film ultrasound transducer in the background;
FIG. 2 is a schematic diagram of the structure of a push-pull electrostatic thin film ultrasonic transducer in example 1;
FIG. 3 is a plot of the frequency response of the push-pull electrostatic thin film ultrasound transducer of example 1 versus a conventional electrostatic thin film ultrasound transducer;
the marks in the figure: 500-electrostatic thin film ultrasonic transducer, 01-thin film, 02-top electrode, 03-support column, 04-insulating layer, 05-bottom electrode, 06-fixed bottom plate, 07-air gap, 100-push-pull electrostatic thin film ultrasonic transducer, 10-first electrode assembly, 11-first fixed bottom plate, 12-first electrode layer, 13-first insulating layer, 20-second electrode assembly, 21-second fixed bottom plate, 22-second electrode layer, 23-second insulating layer, 30-vibrating structure, 31-thin film layer, 32-third electrode layer, 40-first air gap, 50-second air gap, 60-first support, 70-second support, 81-first power supply, 82-second power supply, 90-through hole.
Description of the embodiments
For the purpose of making the objects, technical solutions and advantages of the present application more apparent, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application, and it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments of the present application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
In the description of the present application, it should be understood that the directions or positional relationships indicated by the terms "upper", "lower", "top", "side", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of description and simplification of the description, and do not indicate or imply that the apparatus or element in question must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present application. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present application, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.
Example 1
As shown in fig. 2, the present embodiment provides a push-pull electrostatic film ultrasonic transducer 100, where the push-pull electrostatic film ultrasonic transducer 100 includes a first electrode assembly 10, a second electrode assembly 20, a vibration structure 30, and at least one through hole 90, where the first electrode assembly 10 is disposed opposite to the second electrode assembly 20, and the vibration structure 30 is disposed between the first electrode assembly 10 and the second electrode assembly 20. A first air gap 40 is formed between the first electrode assembly 10 and the vibration structure 30, and a second air gap 50 is formed between the second electrode assembly 20 and the vibration structure 30. The first electrode assembly 10 is electrically connected with the vibration structure 30 with a first potential difference between the first electrode assembly 10 and the vibration structure 30, the second electrode assembly 20 is electrically connected with the vibration structure 30 with a second potential difference between the second electrode assembly 20 and the vibration structure 30, and the vibration structure 30 performs push-pull vibration between the first air gap 40 and the second air gap 50 under the combined action of the first potential difference and the second potential difference and generates ultrasonic waves. At least one through hole 90 is provided on the push-pull electrostatic thin film ultrasonic transducer and communicates with the outside for radiating ultrasonic waves to the outside.
Specifically, the vibration structure 30 includes a thin film layer 31 and a third electrode layer 32 that are bonded to each other. A first potential difference exists between the first electrode assembly 10 and the third electrode layer 32, so that an electrostatic force is generated between the first electrode assembly 10 and the third electrode layer 32 to drive the thin film layer 31 to vibrate to generate ultrasonic waves. A second potential difference exists between the second electrode assembly 20 and the third electrode layer 32, so that an electrostatic force is generated between the second electrode assembly 20 and the third electrode layer 32 to drive the thin film layer 31 to vibrate to generate ultrasonic waves. Therefore, the film layer 31 in the present embodiment vibrates under the combined action of the two electrostatic forces to generate the ultrasonic wave, and the directions of the two electrostatic forces are consistent, and the amplitudes of the film layer 31 are superimposed to increase, so that the sound pressure level of the generated ultrasonic wave is effectively improved.
Further, the push-pull electrostatic membrane ultrasonic transducer 100 further includes a first support 60 and a second support 70. The first support member 60 is supported and arranged between the first electrode assembly 10 and the vibration structure 30, one end of the first support member 60 is connected with the first electrode assembly 10, the other end of the first support member 60 is connected with the vibration structure 30, and the first support member 60, the first electrode assembly 10 and the vibration structure 30 enclose to form a first air gap 40. Similarly, the second support member 70 is supported between the second electrode assembly 20 and the vibration structure 30, and the second support member 70, the second electrode assembly 20 and the vibration structure 30 enclose a second air gap 50.
And, the first electrode assembly 10 includes a first fixing base plate 11, a first electrode layer 12 and a first insulating layer 13, the first insulating layer 13 is attached to one side of the first electrode layer 12 close to the vibration structure 30, the first fixing base plate 11 is disposed on one side of the first electrode layer 12 far away from the vibration structure 30, and the first insulating layer 13 is connected with the first supporting member 60. Similarly, the second electrode assembly 20 includes a second fixing base 21, a second electrode layer 22, and a second insulating layer 23, wherein the second insulating layer 23 is disposed on a side of the second electrode layer 22 near the vibration structure 30, and the second fixing base 21 is disposed on a side of the second electrode layer 22 far from the vibration structure 30. The second insulating layer 23 is connected to the second support 70.
At any moment, the first potential difference is a first DC bias voltage V dc1 With a first alternating voltage V ac1 The second potential difference is the second DC bias voltage V dc2 With a second alternating voltage V ac2 And (3) a difference. And at any one time, a first DC bias voltage V dc1 With a second DC bias voltage V dc2 The polarities are the same, the voltage values are the same or different, the first alternating voltage V ac1 With a second alternating voltage V ac2 The polarities are opposite and the magnitudes are the same or different. It should be noted that, under the fixing action of the first fixing base plate 11, the first electrode layer 12 does not mechanically deform under the action of the first potential difference, and similarly, the second electrode layer 22 does not deform under the action of the second potential difference, that is, the deformation of the whole push-pull electrostatic thin film ultrasonic transducer 100 is represented by the thin film layer 31, that is, the vibration structure 30 under the action of the first potential difference and the second potential difference.
Specifically, as shown in FIG. 2, the first DC bias voltage V dc1 With a second DC bias voltage V dc2 Is the same in polarity and the first DC bias voltage V dc1 With a second DC bias voltage V dc2 While acting on the membrane layer 31. In one state, the thin film layer 31 is subjected to a first DC bias voltage V dc1 The thin film layer 31 receives a second DC bias voltage V while deforming toward the first electrode assembly 10 due to the generated electrostatic force dc2 The generated electrostatic force acts to deform the second electrode assembly 20, and the thin film layer 31 is in a tensioned state. In another state, the thin film layer 31 is subjected to a first DC bias voltage V dc1 The thin film layer 31 receives a second DC bias voltage V while deforming toward the first electrode assembly 10 due to the generated electrostatic force dc2 Generated silenceThe force of the electric power is applied to deform the second electrode assembly 20, and the thin film layer 31 is also in a tensioned state. Thus, the film layer 31 is always in tension due to the action of the electrostatic forces in opposite directions.
On the basis, at any moment, the first alternating voltage V ac1 With a second alternating voltage V ac2 And of opposite polarity, co-operate to generate ultrasound waves in the film layer 31. In one state, when the thin film layer 31 is subjected to the first alternating voltage V ac1 The generated electrostatic force is attracted to the second alternating voltage V while being deformed toward the first electrode assembly 10 ac2 The repulsion of the generated electrostatic force is also deformed toward the first electrode assembly 10, and the amplitudes respectively formed by the two mechanical deformations generated by the thin film layer 31 are increased by superposition, thereby increasing the sound pressure level of the generated ultrasonic wave. In another state, when the thin film layer 31 is subjected to the first alternating voltage V ac1 The repulsion of the generated electrostatic force is deformed toward the second electrode assembly 20 while it is subjected to the second alternating voltage V ac2 The attraction of the generated electrostatic force is also deformed toward the second electrode assembly 20, and the amplitudes respectively formed by the two mechanical deformations generated by the thin film layer 31 are increased by superposition, which also increases the sound pressure level of the generated ultrasonic wave.
On the basis of this, a first DC bias voltage V dc1 The voltage value of (2) is not less than the first AC voltage V ac1 Is a second DC bias voltage V dc2 The voltage value of (2) is not smaller than the second alternating voltage V ac2 Is a function of the magnitude of (a). In this arrangement, the first potential difference and the second potential difference are both positive values all the time, so as to further realize that the vibration structure 30 is at the first ac voltage V ac1 Second alternating voltage V ac1 The vibration structure 30 is further ensured to be always in a tensioning state while vibrating up and down under the combined action so as to improve the sound pressure level.
On the premise of meeting the above conditions, the first alternating voltage V in the present embodiment ac1 With a second alternating voltage V ac2 The amplitudes of the voltage ranges from 10V to 1000V, and the first direct current bias voltage V dc1 With a second DC bias voltage V dc2 The voltage values of the voltage are 10V-1000V.
As described above, by providing the first insulating layer 13 and the second insulating layer 23, insulation between the first electrode layer 12 and the third electrode layer 32 and insulation between the second electrode layer 22 and the third electrode layer 32 can be achieved, and short-circuiting due to breakdown of an air gap between the two electrodes facing each other can be avoided.
Further, the third electrode layer 32 is grounded. The first electrode layer 12 is electrically connected to the third electrode layer 32 with the first power source 81 connected therebetween, so that the first electrode layer 12 and the third electrode layer 32 form the first potential difference. The second electrode layer 22 is electrically connected to the third electrode layer 32 with the second power source 82 connected therebetween, so that the second potential difference is formed between the second electrode layer 22 and the third electrode layer 32.
Of course, the positional relationship between the thin film layer 31 and the third electrode layer 32 is not limited in this embodiment, and the thin film layer 31 may be disposed close to or far from the first electrode assembly 10.
And, the present embodiment does not limit the arrangement position of at least one through hole 90, and the through hole 90 is provided at least on any one structure or any two or more structures of the first electrode assembly 10, the second electrode assembly 20, the first support 60, and the second support 70, and the vibration structure 30 communicates with the outside through the through hole 90.
Illustratively, the first electrode assembly 10 is provided with at least one through-hole 90, and the first air gap 40 communicates with the outside through the at least one through-hole 90; and/or, the second electrode assembly 20 is provided with at least one through hole 90, and the second air gap 50 communicates with the outside through the at least one through hole 90; and/or the first support 60 is provided with at least one through hole 90, and/or the second support 70 is provided with at least one through hole 90. Of course, the present embodiment is not limited thereto.
By providing at least one through hole 90, not only generated ultrasonic waves can be effectively radiated to the outside, but also acoustic impedance matching can be effectively improved, thereby improving the output sound pressure level.
Preferably, the sum of the cross-sectional areas of the through holes 90 provided on the first electrode assembly 10 does not exceed half of the cross-sectional area of the first electrode assembly 10; and/or, the sum of the cross-sectional areas of the through holes 90 provided on the second electrode assembly 20 is not more than half of the cross-sectional area of the second electrode assembly 20 to protect the push-pull electrostatic thin film ultrasonic transducer 100 while achieving communication with the outside.
Of course, when the thin film layer 31 is disposed on the side of the third electrode layer 32 adjacent to the first electrode assembly 10, it is preferable to provide the through-hole 90 on the first electrode assembly 10, and when the thin film layer 31 is disposed on the side of the third electrode layer 32 adjacent to the second electrode assembly 20, it is preferable to provide the through-hole 90 on the second electrode assembly 20.
The push-pull electrostatic film ultrasonic transducer in this embodiment is subjected to frequency response simulation test, and the simulation test result is shown in fig. 3. It can be seen that the push-pull electrostatic thin-film ultrasonic transducer in this embodiment has a larger total sound pressure level at any frequency band than the conventional electrostatic thin-film ultrasonic transducer.
In summary, the push-pull electrostatic film ultrasonic transducer provided in this embodiment always ensures that the vibration structure is in a tensioned state and effectively increases the amplitude of the vibration structure when the vibration structure vibrates by setting two electric fields to act together on the vibration structure, so as to effectively improve electroacoustic conversion efficiency and increase the sound pressure level of the generated ultrasonic wave, and the push-pull electrostatic film ultrasonic transducer can effectively radiate the generated ultrasonic wave to the outside by setting a through hole;
further, the voltage value of the first direct current bias voltage is not smaller than the amplitude of the first alternating current voltage, and the voltage value of the second direct current bias voltage is not smaller than the amplitude of the second alternating current voltage, so that the first potential difference and the second potential difference are all positive values all the time, and the vibrating structure is always in a tensioning state when vibrating up and down under the action of the first alternating current and the second alternating current.
Example two
On the basis of embodiment 1, this embodiment further provides a directional sound production device, where the directional sound production device is one of a single-sided directional sound production speaker, a double-sided directional sound production speaker, a single-sided directional sound production screen, and a double-sided directional sound production screen.
Illustratively, when the directional sound generating device is a dual-sided directional sound generating screen, the directional sound generating device comprises a dual-sided display screen and two push-pull type electrostatic thin film ultrasonic transducers respectively integrated on two opposite display surfaces of the dual-sided display screen, and the specific structure of the push-pull type electrostatic thin film ultrasonic transducer is described in embodiment 1.
The directional sounding device provided by the embodiment realizes directional sounding and even double-sided directional sounding and display by integrating the push-pull type electrostatic film ultrasonic transducer in the existing device, and can effectively improve electroacoustic conversion efficiency and sound pressure level of generated ultrasonic waves based on the thin type of the push-pull type electrostatic film ultrasonic transducer.
All the above optional technical solutions can be combined to form an optional embodiment of the present application, and any multiple embodiments can be combined, so as to obtain the requirements of coping with different application scenarios, which are all within the protection scope of the present application, and are not described in detail herein.
It should be noted that the above-mentioned embodiments are only preferred embodiments of the present application, and are not intended to limit the present application, and any modifications, equivalent substitutions, improvements, etc. within the spirit and principle of the present application should be included in the protection scope of the present application.
Claims (6)
1. A push-pull electrostatic thin film ultrasound transducer, characterized in that the push-pull electrostatic thin film ultrasound transducer comprises:
a first electrode assembly and a second electrode assembly disposed opposite to each other;
the vibration structure is arranged between the first electrode assembly and the second electrode assembly, a first air gap is formed between the vibration structure and the first electrode assembly, a second air gap is formed between the vibration structure and the second electrode assembly, the first electrode assembly is electrically connected with the vibration structure, a first potential difference is arranged between the first electrode assembly and the vibration structure, the second electrode assembly is electrically connected with the vibration structure, a second potential difference is arranged between the second electrode assembly and the vibration structure, the first potential difference is the sum of a first direct current bias voltage and a first alternating current voltage, and the second potential difference is the difference between a second direct current bias voltage and a second alternating current voltage; at any moment, the polarity of the first direct current bias voltage is the same as that of the second direct current bias voltage, the polarity of the first alternating current voltage is opposite to that of the second alternating current voltage, and the vibration structure performs push-pull vibration between the first air gap and the second air gap under the combined action of the first potential difference and the second potential difference and generates ultrasonic waves;
the through hole is used for radiating the ultrasonic waves to the outside, is arranged on the push-pull type electrostatic film ultrasonic transducer and is communicated with the outside;
the voltage value of the first direct current bias voltage is not smaller than the amplitude of the first alternating current voltage, and the voltage value of the second direct current bias voltage is not smaller than the amplitude of the second alternating current voltage;
the vibration structure comprises a film layer and a third electrode layer which are arranged in a bonding way, and the third electrode layer is grounded;
the amplitudes of the first alternating voltage and the second alternating voltage are 10V-1000V, and the first direct current bias voltage and the second direct current bias voltage are 10V-1000V;
the sum of the cross-sectional areas of the through holes provided on the first electrode assembly is not more than half of the cross-sectional area of the first electrode assembly; and/or the sum of the cross-sectional areas of the through holes provided on the second electrode assembly is not more than half of the cross-sectional area of the second electrode assembly.
2. The push-pull electrostatic thin film ultrasound transducer of claim 1, wherein the first electrode assembly comprises a first electrode layer and the second electrode assembly comprises a second electrode layer, the first electrode layer electrically connected to the third electrode layer to form the first potential difference, the second electrode layer electrically connected to the third electrode layer to form the second potential difference.
3. The push-pull electrostatic thin film ultrasound transducer of claim 2, further comprising a first support and a second support;
the first support piece is arranged between the first electrode assembly and the vibration structure, and the first air gap is formed by enclosing the first support piece, the first electrode assembly and the vibration structure;
the second support piece is arranged between the second electrode assembly and the vibration structure, and the second air gap is formed by enclosing the second support piece, the second electrode assembly and the vibration structure.
4. The push-pull electrostatic thin film ultrasonic transducer of claim 3, wherein the through hole is provided at least on any one structure or any two or more structures of the first electrode assembly, the second electrode assembly, the first support member and the second support member, and the vibration structure communicates with the outside through the through hole.
5. The push-pull electrostatic thin film ultrasonic transducer of any one of claims 2 to 4, wherein the first electrode assembly further comprises a first insulating layer and a first fixing base plate, the first insulating layer is arranged on one side of the first electrode layer close to the vibration structure, and the first fixing base plate is arranged on one side of the first electrode layer far away from the vibration structure;
the second electrode assembly further comprises a second insulating layer and a second fixing bottom plate, wherein the second insulating layer is arranged on one side, close to the vibration structure, of the second electrode layer, and the second fixing bottom plate is arranged on one side, far away from the vibration structure, of the second electrode layer.
6. The directional sound production device is characterized by comprising the push-pull electrostatic film ultrasonic transducer according to any one of claims 1-5.
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| CN1942020A (en) * | 2005-09-27 | 2007-04-04 | 精工爱普生株式会社 | Electrostatic ultrasonic transducer and design method thereof, and ultrasonic speaker |
| CN1946248A (en) * | 2005-10-05 | 2007-04-11 | 精工爱普生株式会社 | Electrostatic ultrasonic energy exchanger and ultrasonic loudhailer |
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