CN1131724A

CN1131724A - Orifice element and valve with orifice element

Info

Publication number: CN1131724A
Application number: CN 95102703
Authority: CN
Inventors: G·芬德勒; J·巴哈霍尔茨; U·姚尔尼格
Original assignee: Robert Bosch GmbH
Current assignee: Robert Bosch GmbH
Priority date: 1995-03-20
Filing date: 1995-03-20
Publication date: 1996-09-25

Abstract

Orifice elements for use in valves for injecting fuel or a fuel-gas mixture. The orifice elements include two silicon plates, jointed to one another. An upper plate has one or more injection orifices. The Lower plate has a through hole introduced in it, through which a fuel jet can emerge. The lower plate follows in the downstream direction and includes a jet splitter. It divides the through hole into at least two passthrough openings so that a dual jet characteristic is produced or maintained for the valve. At least two conduits are formed between upper plate and lower plate. Gas is provided via the conduits and is mixed with fuel discharged through the injection orifice. The orifice and the valve are suited for injection systems of mixture-compressing internal-combustion engines having externally supplied ignition.

Description

Jet member and the valve that has jet member

The present invention relates to a kind of jet member that the is used for ejection medium valve of jet member (or have).Specifically, the present invention relates to a kind of jet member with a upper plate and at least one lower plate, this upper plate has a spray-hole at least, and this lower plate is positioned at the downstream part of upper plate, and has a through port at least.Especially, the present invention relates to a kind of Fuelinjection nozzle that is used for to internal-combustion engine supply air-fuel oil mixture.This Fuelinjection nozzle has a valve closure member, and this valve closure member matches with a valve base surface and a sheet-type jet member that is positioned at this valve base surface downstream.

In disclosed German patent application the 4112150th, introduce a kind of injection valve that is used for injection air-fuel oil mixture, used a jet member that comprises a silicon jet tray in this valve.This silicon jet tray is made by last silicon plate and following silicon plate are linked together.On last silicon plate, a plurality of spray-holes are arranged, then having a through port at least on the silicon plate down.In addition, on the silicon plate, also adopted groove, so that form the outer peripheral passage that is communicated with through port and silicon jet tray.For example, be blown into or suck air, just can guarantee that the liquid that flows through spray-hole is better atomized by these passages.This silicon plate processes with anisotropic engraving method.

U. S. Patent the 4th, 907 has also been introduced the injection valve that has used jet member (silicon jet tray) No. 748, this jet member by two mutually the silicon plates that connect of pairing form.The spray-hole of upper plate and the through port of lower plate are setovered mutually.These plates are to be used for being equipped with (or metering) fuel oil rather than to be used for metering (being quantity control) fuel oil gas flow on every side.

U. S. Patent 4,828 has been introduced a kind of jet member that comprises two silicon jet trays in 184.On first block of silicon plate at least one through hole is arranged, and have only a through port on second block of silicon plate.Through hole and opening on first and second blocks of silicon plates are setovered mutually, have just formed thickness between such two plates and have reduced the district, cut the shape gap thereby formed between the through hole of first block of silicon plate and second block of silicon plate and opening.In all cases, this is cut the shape gap and all parallels with the end face of silicon plate.

Above-mentioned all injection valves can carry out the simple injection of fuel oil or other media substantially, but above-mentioned injection valve is then not too suitable for obtaining the two spray characteristics of fuel oil.This pair of spray characteristic is in demand when spraying such as two injection valves to internal-combustion engine.Therefore, need a kind of injection valve.It can simply and economically make medium produce two spray characteristics in very narrow space.

The present invention satisfies above-mentioned requirements by the jet member that employing has a upper plate and at least one lower plate.Upper plate has a spray-hole at least.At least two through ports and a jet splitter are arranged at least one lower plate.This jet splitter is separated at least two through ports on the lower plate.At least one spray-hole on the upper plate at least in part with lower plate on through port and jet splitter overlaid.

The advantage of jet member of the present invention is that it can simply and economically make medium produce (or maintenance) two spray characteristics in very narrow space.And, this pair of spray characteristic be use second medium surround first medium with the uniformity of improving first medium when being equipped with, with sample doing the trick fully.

In another embodiment of valve of the present invention, except a sheet-type jet member is housed, a valve closure member is housed also.This valve closure member and valve base surface cooperatively interact.The sheet-type jet member is positioned at the downstream position of valve base surface.This upper plate is towards valve base surface.This collocation method makes two spray characteristics of fuel oil simply and economically to realize, and deviation is very little.And because machining accuracy is very high, this pair of spray characteristic is also accurate especially.

In a preferred embodiment of the invention, the thin plate of jet member is to be made by single crystal silicon, and opening on the thin plate and passage form by anisotropic etching processing.Therefore, the processing of thin plate is very simple and have a very high machining accuracy.This configuration makes that the metering of the fuel oil gas of the second medium directive fuel oil of fuel oil (or as) is very accurate.

In a preferred embodiment of the invention, the boundary dimension of the thin plate that overlaps each other is identical, and they are bonded together mutually.

Simultaneously, from two being very favorable, because needed process step can reduce various structure in making the silicon plate like this time in the face of the thin plate that comprises jet splitter carries out etching.Except the advantage that reduces expense, said method can also produce several different structures by changing etching period.At first, etching mask is placed on upper-end surface and the lower end surface that needs etched thin plate.Etching solution corrodes this thin plate then, reaches until the degree of depth till half of this lamella thickness.If etch process promptly stops at the half that the degree of depth reaches this thin plate, can obtain by mouth this moment.The smallest cross-sectional of the through port that forms by etching is about half place of this lamella thickness.So just formed jet splitter with rhombus or hexagonal section.

If after half the required time that this thin plate is etched to its thickness, carry out etching again, will cause through port and jet splitter to form flat interface.Therefore, jet splitter just has the square-section.

Adopt engraving method to help changing easily the geometrical shape of through port, this geometrical shape then can have influence on the characteristic of jet member (or injection valve).For example, the size of jet splitter has determined the spray angle of injected medium.And for example by changing the channel width of carrying second medium, the geometric condition of medium injection just can change over flat the injection.

Therefore, the passage that only processes through port, jet splitter and supply gas by an etch process is very favorable.The structure of specific embodiment is very simple, and makes and very economical, and in this embodiment, the passage that is adopted parallels with jet splitter.Through port forms by two-sided etching, and passage then forms by the single face etching in same etch process.These passages all are concentric, and every passage all leads to a through port, and they are only blocked by the through port on the thin plate.

Now describe other purposes of the present invention, structure, method and feature in detail by following drawings and the specific embodiments, wherein:

Fig. 1 is the partial cross-sectional side view of-first exemplary embodiments of the injection valve of design according to the present invention;

Fig. 2 is the top view of upper plate of the jet member of the present invention's one first exemplary embodiments, also shows the jet splitter of lower plate among the figure;

Fig. 3 shows along a section of the intercepting of the III-III line among Fig. 2;

Fig. 4 is and plan view along the corresponding upper plate of section of the IV-IV line among Fig. 3 and Fig. 7 intercepting;

Fig. 5 is and plan view along the corresponding lower plate of section of the V-V line among Fig. 3,9,12,18 and 19 intercepting;

Fig. 6 is and the plan view of the present invention's one second exemplary embodiments along the corresponding upper plate of section of the VI-VI line intercepting of Fig. 3 and Fig. 7;

Fig. 7 shows the section of the present invention 1 the 3rd exemplary embodiments along the intercepting of the VII-VII line among Fig. 2;

Fig. 8 shows the section of the present invention 1 the 4th exemplary embodiments along the intercepting of the VIII-VIII line among Fig. 2;

Fig. 9 shows the section of the present invention 1 the 5th embodiment along the intercepting of the IX-IX line among Fig. 2;

Figure 10 is and plan view along the corresponding upper plate of section of the X-X line among Fig. 8 and Fig. 9 intercepting;

Figure 11 is and plan view along the corresponding lower plate of section of the XI-XI line among Fig. 7 and Fig. 8 intercepting;

Figure 12 shows the section of the present invention 1 the 6th exemplary embodiments along the intercepting of the XII-XII line among Fig. 2;

Figure 13 is and plan view along the corresponding accessory plate of section of the XIII-XIII line among Figure 12 intercepting;

Figure 14 is the top view of upper plate of the jet member of the present invention 1 the 7th exemplary embodiments, also shows the jet splitter of lower plate among the figure;

Figure 15 shows the section of the present invention 1 the 8th exemplary embodiments along the intercepting of the XV-XV line among Fig. 2;

Figure 16 shows the section of the present invention 1 the 9th exemplary embodiments along the intercepting of the XVI-XVI line among Figure 14;

Figure 17 is and plan view along the corresponding lower plate of section of the XVII-XVII line among Figure 15 and Figure 16 intercepting;

Figure 18 shows the section of the present invention-the tenth exemplary embodiments along the intercepting of the XVIII-XVIII line among Figure 14; With

Figure 19 shows the section of the present invention 1 the 11 exemplary embodiments along the intercepting of the XIX-XIX line among Fig. 2.

Fig. 1 partly shows one first embodiment of fuel injection valve, and this valve can be used for for example having the injection system of outside mixture compression-type IC engine of lighting a fire.The valve nozzle spare of being made by for example ferromagnetic material 2 has the flow channel 5 of a taper convergent, and the longitudinal axis 1 of this passage and valve disposes with one heart.A needle 8 is housed in this flow channel 5.The downstream of needle 8 is designed to along the valve closure member 9 of conical ground of downstream direction convergent.The valve closure member 9 of this needle 8 is worked in coordination with the valve base surface 10 of flow channel 5.Valve base surface 10 streamwises are made for conical convergent.The targeting part 11 guiding needles 8 of flow channel 5 that are positioned at the upstream of valve base surface 10 are done axial motion.Guiding collar 13 on the needle 8 is with the targeting part 11 of very little warp spacers by flow channel 5.

The axial motion of needle 8 and therefore make valve open and close with known usually mode for example electromagnetic drive mode carry out.As shown in Figure 1, needle 8 end of valve base surface 10 (promptly away from) at its upstream end is connected with armature 17, and the electromagnetic coil 18 of this armature and fuel injection valve and iron core 19 interact.

At the downstream direction of 10 back, conical valve seat surface the direction of electromagnetic coil 18 (promptly away from), flow channel 5 continues to constitute a columniform circulation part 20.One sheet-type jet member 22 is configured in the downstream direction that is right after in circulation part 20 back.This sheet-type jet member 22 comprises a thin square upper plate 24 and the thin square lower plate 25 towards valve seat 10.Upper plate 24 is fitted on the upper-end surface 27 of the lower plate 25 of upper plate 24 with its lower end surface 26 away from circulation part 20 at least in part, and is connected with this upper-end surface 27.Upper plate 24 and lower plate 25 can be made by single crystal silicon.But upper plate 24 and lower plate 25 also can be made by other material that is fit to, for example other single crystal semiconductor (as germanium) or compound semiconductor (as germanium arsenide or glass).

Between upper plate 24 and lower plate 25, be formed with a passage 28 at least.Be used for producing combustible gas mixture

gas slave plate

24,25 around enter inside, by at least one passage 28, mix mutually with the fuel oil of directly introducing by

plate

24,25.

There is a groove 30 at fuel oil ejection end 29 places in the downstream of nozzle member 2.In order to guarantee that the sheet-type jet member 22 and the relative position of the circulation part 20 of conical convergent flow channel 5 remain unchanged, groove 30 has surrounded jet member 22 and circulation part 20 communicates with groove 30.Along being formed with an air supply trough 33 in the radial direction at least between the periphery of the fuel oil of nozzle member 2 ejection end 29 and the groove 30.This at least one air supply trough 33 is connected with at least one passage 28, thereby gas is entered at least one passage 28 of jet member 22.

Nozzle member 2 radially and is axially all surrounded by an air feed sleeve 36 near its fuel oil ejection end 29 at least in part.Along axial direction, near fuel oil ejection end 29, this air feed sleeve 36 has several transverse openings 37, and transverse opening 37 radially extends inward into the annular air feed chamber 38 from the periphery of air feed sleeve 36.This annular air feed chamber 38 is to be made of formed space between the stepped shaft axially open 39 of the periphery of fuel oil ejection end 29 and air feed sleeve 36.

On the base 40 of the air feed sleeve 36 of the fuel oil of nozzle member 2 ejection end 29 bearing surface 42 is arranged, bearing surface 42 disposes and perpendicular with this axis with one heart around the longitudinal axis 1 of valve.Bearing surface 42 is towards the fuel oil ejection end 29 of nozzle member 2.Bearing surface 42 comprises one radially towards the side of the longitudinal axis 1 of valve.Utilize bearing surface 42, air feed sleeve 36 fixedly leans against jet member 22 on the nozzle member 2 tightly, thereby it is fixing reliably that the axial position of jet member 22 in the groove 30 of nozzle member 2 obtained, and guarantee that gas can only mix with the fuel oil that sprays mutually by at least one passage 28.It below the jet member 22 is a cylindrical hole 44 that the tight dust of streamwise, and extend and concentric with the longitudinal axis 1 of valve downstream from the base of air feed sleeve in this hole.Below cylindrical hole 44 is a fuel oil mixture spray-hole 45, and this hole flare enlarges.

The circular groove 47 that can place a seal ring 48 is formed on its axially open 39 away from the air feed sleeve 36 of fuel oil mixture spray-hole 45 1 ends.Seal ring 48 has formed sealing between the axially open 39 of the periphery of nozzle member 2 and air feed sleeve 36.

If valve is installed on the valve seat together with its air feed sleeve 36, for example be installed on the inlet line of internal-combustion engine, must from the inwall of valve seat air feed sleeve 36, it transverse opening 37 above and below all be closed.Periphery at air feed sleeve 36 is processed with the groove 50 that can both install seal ring (not showing) under institute's situation for this reason.

Fig. 2 is the top view of upper plate 24 of the jet member 22 of the present invention's first exemplary embodiments.Fig. 3 shows one first exemplary embodiments with a corresponding jet member 22 of section that intercepts along III-III line among Fig. 2.As shown in these figures, this upper plate 24 (for example it can be square) has an awl cylindricality spray-hole 60 with trapezoid cross section, spray-hole 60 disposes relatively symmetrically with the longitudinal axis 1 of valve, and it enlarges to the lower end surface 26 of upper plate 24 from end face 61 beginnings of upper plate 24.The cylindrical circulation part 20 of flow channel 5 has with spray-hole 60 equitant cross sections and is positioned at the upstream of spray-hole 60.

The profile of lower plate 25 equally also can be square, and with regard to the assembling of jet member 22, making upper plate 24 and lower plate 25 have same peripheral size is especially easily.For each

independent plate

24,25, making them have identical size is easy to reach, because can earlier two wafer adjustment that contain

plate

24,25 be aimed at so that they can bond together, and then by certain sequence of

operation plate

24,25 is sawed from wafer, sheet-type jet member 22 just can separate from wafer like this.

Jet member 22 has one first axis of symmetry 62 and second axis of symmetry 63 perpendicular to first axis of symmetry.Each axis in first and second axis of

symmetry

62,63 all half-and-half separates the outer side surface of upper plate 24 and lower plate 25, and is limited with a plane perpendicular to the longitudinal axis 1 of valve.The longitudinal axis 1 of valve on the crosspoint of first and second axis of

symmetry

62,63 with this Plane intersects.

Channel shaped passage 28 with rectangle bottom of trench 67 under any circumstance all is to begin to form from the outer edge surface of upper plate 24 in its lower end surface 26, symmetrical (see figure 4) in the middle of it and the axis of

symmetry

62 and 63 all are.Four rectangle bottoms of trench 67 are to be formed by four passages 28 away from upper-end surface 27 parts of lower plate 25 on the lower end surface 26 that leans against upper plate 24.These passages 28 are widened in echelon along the direction of leading to the lower end surface 26 of upper plate 24 from bottom of trench 67.Each passage 28 forms an inflow chamber 68 with the upper-end surface 27 of lower plate 25.

Take the jet splitter 70 of thin slice (or blade) form to be installed in the lower plate 25, and this partition thickness from top to bottom equate with lower plate 25 thickness from top to bottom.Jet splitter 70 can guarantee to make the fuel of spray-hole 60 ejections of the upper plate 24 of that flow out and the jet member 22 by the downstream of the circulation part 20 of nozzle 2 to be separated into two strands and enter through port 72.

Jet splitter 70 is extended along the axis of symmetry 62, and it separates the through port 72 that the through port 72 on the right side of the axis of symmetry 62 that is arranged in Fig. 2 is located on the left side of the axis of symmetry 62, and the sectional shape of through port 72 can be a rectangle, or square.It is particularly advantageous forming jet splitter 70 in the lower plate 25 of the jet member 22 of two injection valves.Because the jet performance of two injection valves is obviously owing to the existence of the surrounding atmosphere in each through port 72 is improved.

Though the existence of surrounding atmosphere is arranged, two spray characteristics of valve can produce and keep fully by jet splitter 70.Have along the passage 28 of the bottom of trench 67 that extends in parallel with the axis of symmetry 62 and/or 63 and in upper plate 24, form, thereby can not any direct relation take place with spray-hole 60.On the contrary, spray-hole 60 separates by projection 73 and passage 28.Along the direction of the longitudinal axis 1 of valve, the size of projection 73 and passage 28 measure-alike.Vertically, projection 73 extends downwardly into the lower end surface 26 of upper plate 24 from the bottom of trench 67 of passage 28.

Because spray-hole 60 is covered by the external boundary of through port 72 fully, and 28 of passwaies are partly covered by the external boundary of the through port on the lower plate 25 72, thereby fuel oil and gas (for example air) just can flow in the through port 72 at an easy rate.Therefore, mixture at first forms in the through port 72 of lower plate 25.

Fig. 4, Fig. 5 and Fig. 6 show the sectional view of first and second exemplary embodiments of the present invention.The section that Fig. 4, Fig. 5 and Fig. 6 are intercepted along the IV-IV among Fig. 3, V-V and VI-VI line respectively.The phase cross surface is exactly the junction surface of upper plate 24 and lower plate 25.It is the intersection points of how to guide the axis of

symmetry

62 and 63 into that Fig. 4 shows four passages 28.Four passages 28 extend internally outside the outward edge of the through port on the lower plate 25 72, as shown in Figures 4 and 5.Therefore, four passages 28 can guarantee to make gas to flow in the through port 72.When gas met along the axis of symmetry 62 inflows and with jet splitter 70 by two passages 28, this gas just was separated into two strands and enters in two through ports 72.

Fig. 6 shows one second exemplary embodiments of the present invention, in this embodiment, has only two passages 28 to form along the axis of symmetry 63, does not then form passage 28 along the axis of symmetry 62.Therefore, the gas in each passage 28 flows into the through port 72 of a vicinity.Compare with first exemplary embodiments, second embodiment can reduce significantly along the through port 72 of the axis of symmetry 63 and the size of jet splitter 70, thereby (for example) formed square through port 72.

In upper plate of making by single crystal silicon 24 and lower plate 25, process spray-hole 60, passage 28 and through port 72, can be by known method, for example anisotropic etching forms.The implementation process of this method is as follows: at first, the plane of thin silicon plate is polished; Secondly plane plating last layer is thin oxide layer; Then photolayer is applied on this plane, optical mask is placed on the photolayer, and shine subsequently; Add developing solution, on the silicon plate, just formed the pattern of each position of an oxide skin(coating) that hiding by photolayer and that exposing like this; In an electrolytic bath that hydrofluoric acid is housed, the oxide position that exposes is eroded at last, and then photolayer is removed.

Like this, just obtained the pattern of oxide skin(coating) on the silicon plate, this oxide skin(coating) is promptly as the surface layer that corrodes in operation subsequently.Alkaline solution or acid can erode the silicon that exposes and can form groove part on this single-chip.Using anisotropic etch process to add man-hour, the degree of depth of these grooves will be deepened, and its width does not then have significant change.At this moment, the sidewall of groove is that crystal face by the silicon plate constitutes.Thereby formed groove with trapezoid cross section.

Except the passage 28 of awl spray-hole 60 (it has the trapezoid cross section) of cylindricality and trapezoid cross section can obtain with engraving method, can also obtain the rectangular cross-section, for example the shape shown in the through port 72 among the figure.This sectional shape can corrode the both sides of silicon plate simultaneously by (for example) and obtains.For example can corrode simultaneously to the upper-end surface 27 of lower plate 25 with a side 75 on these upper-end surface 27 opposed lower plates 25.These engraving methods also can be used to produce the flat interface of jet splitter 70.

The lower end surface 26 of upper plate 24 and the upper-end surface 27 of lower plate 25 can fuse to closing (bonding) by the wafer that comprises

plate

24,25 to two, for this reason, tackle the lower end surface 26 of upper plate 24 and the upper-end surface 27 of lower plate 25 at last and polish, and then chemical treatment is carried out on these surfaces.Thereby on the surface of

plate

24 and 25, just can produce (or apply) thin layer (for example thin layer of silicon oxide).Another kind of surface treatment comprises

plate

24 and 25 is immersed in corrosion and the cleaning solution, therefore the process that need fuse especially the wafer surface of processing be the surface of upper plate 24 and lower plate 25, just can at room temperature carry out bonding.

Bonding process is by heat-treating upper plate 24 and placing lower plate 25 nitrogen to finish.At this moment, Si direct bonding (silicon fusion gummed) and anode gummed (under the situation of glass-silicon compound) can use an electric field.After wafer is bonded, they can be cut into many blocks of

plates

24,25.

As shown in Figure 1, be used for forming the gas of fuel oil-gaseous mixture by in the annular air feed of the transverse opening 37 inflows chamber 38.This air feed chamber 38 forms between the axially open 39 of the periphery of nozzle member 2 and air feed sleeve 36.Air from this chamber by four inflow chambers 68 that limited by passage 28, air also can flow into from this chamber jet member 22 by spaced-apart two through ports 72 of jet splitter 70.Fuel oil from spray-hole 60 also flows in two through ports 72 of this jet member.

Passage 28 has a narrow and small cross section.This narrow and small cross section is useful for the measurement of inlet gas.In addition, this narrow and small cross section can make gas quicken, thereby when this gas runs into the fuel oil of ejection at a high speed and be enclosed in around the fuel oil, the globule that gas stream formation is very little.So just produced uniform basically fuel oil-gaseous mixture.This fuel oil-gaseous mixture sprays in the intake line of explosive motor by fuel oil mixture spraying hole 45.This gas can be air, and air is shunted by the arm of the throttle valve upstream in the induction manifold of explosive motor.But, also can be used for reducing the discharge of pollutant from the waste gas of the repetitive cycling of explosive motor, also can use an auxiliary blower to come conveying gas.

The the 3rd, the 4th and the 5th exemplary embodiments of the present invention is shown in respectively among Fig. 7, Fig. 8 and Fig. 9.These several figure are the sectional drawings that intercepted along the VII-VII among Fig. 2, VIII-VIII and IX-IX line respectively.(jet splitter 70 shown in Fig. 2 is rectangular cross-sections, but can be used to represent various forms of jet splitter 70, and for example it can represent the jet splitter 70 with six square sections).Identical parts or the part with identical function all are denoted by like references in Fig. 1 to Fig. 6.

These exemplary embodiments and the difference of first, second two exemplary embodiments only are by the structure of the jet splitter that length limited 70 of through port 72 or the passage in upper plate 24 28 different.

Fig. 7 shows one the 3rd exemplary embodiments of the present invention, this embodiment has the jet splitter 70 different with first, second two exemplary embodiments, and perhaps there is the outward edge of the through port 72 of a different types in the outside of the jet splitter 70 of this embodiment in lower plate 25.Say that exactly the cross section of this jet splitter 70 no longer is the rectangle that its side parallels with the longitudinal axis 1 of valve on the whole height of lower plate 25.The definite cross section of this jet splitter should be hexagonal shaped or rhombus.

The hexagonal shaped of jet splitter 70 can obtain by two sides of silicon system lower plate 25 are carried out anisotropic etching simultaneously.Be etched on the upper-end surface 27 of upper plate 25 and the downside 75 and carry out.Etching mask is placed on the lower plate 25, reaches the pact of thickness of this plate till half so that etching solution is corroded until etch depth lower plate 25.Therefore formed a peripheral chamfered portion 77 in each through port 72, its length is approximately jet splitter 70 and through port 72 along half of the longitudinal axis 1 direction extended length of valve.

In all cases, to form and make the plane section at the through port 72 at the upper-end surface 27 of lower plate 25 and downside 75 places at the medium position of the thickness of lower plate 25 be the maximum cross-section to this chamfered portion 77 minimum plane section of making through port 72.Therefore, carry out etching since two sides at the same time, reach a half of the thickness of lower plate 25 when etch depth, this etch process can accurately stop, and has so just formed said structure.This structure all has two awl cylindricality volumes (two trapezoid cross sections are arranged) in each through port 72 in all cases.

For in the employed structure (see figure 3) of the present invention's first exemplary embodiments, can obtain continuous, the uniform parallel surfaces of jet splitter 70 and through port 72, etch process should carry out continuously, till peripheral chamfered portion 77 complete obiterations.Equally, gas is supplied by the passage of introducing in the lower end surface 26 of upper plate 24 28.Four passages 28 in the present invention's first exemplary embodiments, or two passages 28 in the present invention's second exemplary embodiments can be used for supply gas.The size of through port 72 should design according to the quantity of passage 28.For example, the size of the through port 72 in structure with two passages 28, should be significantly less than the size of the passway in the structure with four passages 28 72.

The 4th exemplary embodiments of the present invention and the present invention's the 3rd exemplary embodiments shown in Figure 8 are similar, but its passage 28 improves.These passage 28

slave plates

24 and 25 periphery extend in the spray-hole 60 in Fig. 8, and promptly they no longer separate with projection 73 with spray-hole 60.Equally, because passage 28 is also etched at 26 places, lower end surface of upper plate 24, the mixture of fuel oil and gas just can directly produce in the upstream scope of jet splitter 70.In this embodiment, two or four passages 28 can adopt.

In the present invention shown in Figure 9 the 5th exemplary embodiments, show the combination of the jet splitter 70 of passage 28 in upper plate 24 and the present invention's first exemplary embodiments.From the present invention's the 4th exemplary embodiments as can be known, direct slave plate 24 of this passage and 25 periphery extend to (being that passage no longer separates with projection 73 with spray-hole 60) in the spray-hole 60.This jet splitter 70 has rectangular cross-section (or the outward edge of the through port in lower plate 25 72 is straight).

Figure 10 be with along the section of X-X line intercepting among Fig. 8 and Fig. 9 corresponding from the lower end surface plan view of the upper plates 24 of 26 beginnings.Passage 28 makes the outward edge of plate 24 realize that with spray-hole 60 fluid is communicated with.The spray-hole 60 (having the trapezoid cross section) of awl cylindricality is widened to the lower end surface 26 of upper plate 24 gradually from the end face 61 of upper plate 24.In all cases, the spray-hole 60 of this awl cylindricality all is to be positioned at the axis of symmetry 62 of four sides 78 of boring column and 63 center, and intersects by four air supply channels 28 and the zone of lower end surface 26.Therefore, the side 78 of the spray-hole 60 of this awl cylindricality surrounds three sides of each passage 28 at channel entrance 80 places.

Three sides of passage 28 are sealed by upper plate 24, and the periphery of slave plate 24 extends to channel entrance 80 always.The upper-end surface 27 of lower plate 25 has constituted the 4th side of passage 28.But the periphery of the 4th a side slave plate 25 extends to through port 72, thereby it promptly stopped before arriving spray-hole 60.The passage 28 that is surrounded fully is inflow chamber 68.

Figure 11 is and plan view along the corresponding lower plate 25 of section of the XI-XI line among Fig. 7 and Fig. 8 intercepting.Through port 72 is characterised in that it has peripheral chamfered portion 77, and this chamfered portion has reduced the cross section of through port 72.Jet splitter 70 also has peripheral chamfered portion 77 in the scope about half of its axial dimension, this chamfered portion produces when etching is carried out in bi-side.The size of through port 72 can according to employed in upper plate 24 be that two passages 28 or four passages 28 design.

Under the situation of above-mentioned all each exemplary embodiments, the various factors of valve nozzle and characteristic can be affected by how much variations.For example, the size of jet splitter 70 under any circumstance all determined spray the synthetic angle of attack of fuel oil.By changing the width of passage 28, passage 28 all will be subjected to decisive influence perpendicular to the size of the extending direction of the axis of

symmetry

62 and 63 and the sectional dimension of passage 28.Thereby the fuel-injected geometric condition that is surrounded by gas also can change, and for example makes flat the injection into.

Figure 12 is a view of add-in card 82, and Figure 13 is and plan view along the corresponding add-in card 82 of section of XIII-XIII line intercepting among Figure 12, there is shown the jet member 22 of the present invention 1 the 6th exemplary embodiments.Be marked with identical reference number with identical among Fig. 1 to Figure 11 with part identical function.The same with the situation of the present invention's first to the 5th exemplary embodiments, in the 6th exemplary embodiments, square upper plate 24 and square lower plate 25 are all made by single crystal silicon.

Spray-hole 60, passage 28 and through port 72 all use anisotropic etching to process.This jet member 22 comprises three blocks of plates, i.e. upper plate 24, lower plate 25 and be installed in add-in card 82 below the lower plate 25.This add-in card 82 also is square, and its outside dimensions is identical with single crystal silicon plate 24 and 25.These three blocks of

plates

24,25 and 82 all are bonded on together.

The tap hole 83 that in add-in card 82, shapes out, the longitudinal axis 1 of itself and valve disposes with one heart, and this hole is from the upper-end surface 84 of add-in card 82, and streamwise is widened into awl cylindricality (having the trapezoid cross section).Square through port 72 is divided into two spaces by jet splitter 70, and they form balanced configuration with the longitudinal axis 1 of valve in lower plate 25.This square through port is communicated with tap hole 83 fluids.

Two through ports 72 of lower plate 25 are positioned at the downstream of the spray-hole 60 of upper plate 24, because the external boundary size of this through port 72 is greater than the size of the spray-hole 60 on the lower end surface 26 of square upper plate 24, thereby fuel oil are entered in the through port 72 at an easy rate.Spray-hole 60 is from the end face 61 of upper plate 24, is widened into awl cylindricality (having the trapezoid cross section) along the direction of its lower end surface 26.

Three blocks of

plates

24,25 and 82 external boundary are limited by its side, are mutually the right angle in the tail end of each side.Passage 28 with rectangle bottom of trench 67 begins directly inwardly to extend to exhaust port 83 always from each side, and is shaped on the upper-end surface 84 of add-in card 82.Passage 28 is by the both sides of balanced configuration in the axis of symmetry 62 (or 63).Passage 28 is inclined to trapezoidal along the direction of the downside 86 of add-in card 82.In all cases, the downside 75 of passage 28 and lower plate 25 forms inflow chamber 68.

Like this, be used for the passage 28 of supply gas just on add-in card 82, to form, be used for producing or keep the fuel oil of two spray characteristics then to be separated out at lower plate 25 upstream ends by jet splitter 70.After fuel jet was separated by jet splitter 70, the fuel oil of discharging from through port 72 at first and basically met with the gas of discharging perpendicular to the fuel oil direction.The narrow and small cross section of passage 28 is accelerated gas, thereby this gas to be meeting with the fuel oil that ejects at a high speed, and this strand fuel oil is surrounded, and has so just formed very little fuel vapor pearl.Thereby produced uniform basically fuel oil-gaseous mixture.

The 6th exemplary embodiments of the present invention can realize that these methods require to provide add-in card 82 to above-mentioned the 5th exemplary embodiments of the present invention by diverse ways.The geometrical shape of the jet splitter 70 in lower plate 25 can change over jet splitter 70 (not shown) with hexagon section.In addition, the number of passage 28 also can change.Therefore, except the exemplary embodiments in Figure 13 had four passages 28, according to second exemplary embodiments, it also was possible only etching two passages 28.Have only separation to be considered under the effective situation, just can not need ambient gas when jet.Change also can influence the geometry deformation of fuel jet perpendicular to the ratio of the width dimensions of the passage 28 of the axis of

symmetry

62 and 63.

Jet member 22 in one the 7th exemplary embodiments of the present invention figure 14 illustrates the top view of its upper plate 24.Be marked with identical reference number with identical among Fig. 1 to Figure 13 with part identical function.Compare with the situation of the first six exemplary embodiments of the present invention, the upper plate 24 of the 7th exemplary embodiments has a conical jet hole 60 (having the trapezoid cross section), this spray-hole balanced configuration in the both sides of the longitudinal axis 1 of valve and the lower end surface 26 from end face 61 beginnings of upper plate 24 towards upper plate 24 reduce (promptly dwindling) gradually.Therefore, the jet area on the lower end surface 26 of upper plate 24 just diminishes, and jet is quickened.Thereby fuel jet the jet splitter 70 that is arranged in lower plate 25 with high speed impact.

One the 8th exemplary embodiments of jet member 22 of the present invention is shown in Figure 15, has not gone out among the figure along a section of the intercepting of the XV-XV line among Fig. 2.Square upper plate 24 has the spray-hole 60 (having the trapezoid cross section) of awl cylindricality, this hole be configured in symmetrically valve longitudinal axis 1 both sides and widen gradually to the lower end surface 26 of upper plate 24 from the end face 61 of upper plate 24.The mobile part 20 of the flow channel 5 of injection valve has a cross section overlapping with spray-hole 60, and this cross section is connected in the mode that fluid is communicated with the upstream of spray-hole 60.

One the 9th exemplary embodiments of jet member 22 of the present invention is shown among Figure 16.The 9th exemplary embodiments and not the existing together of exemplary embodiments that is shown among Figure 15 only be, the spray-hole 60 (having the trapezoid cross section) of the awl cylindricality in upper plate 24 is that the end face 61 from upper plate 24 reduces (promptly dwindling) gradually to the lower end surface 26 of upper plate 24.Figure 16 is a sectional drawing along the intercepting of the XVI-XVI line among Figure 14.

The 8th with the jet member 22 of the 9th exemplary embodiments in lower plate 25 have identical structure.Figure 17 is the view along the intersection of the intercepting of the XVII-XVII line among Figure 15 and Figure 16, so this figure is suitable for the 8th and the 9th exemplary embodiments.In all cases, intersecting plane is the junction surface of upper plate 24 and lower plate 25.

The profile of lower plate 25 equally also is square, and jet member 22 has the axis of

symmetry

62 and 63, each axis of symmetry all the outer side surface of two

boards

24 and 25 to dividing.Jet splitter 70 thickness from top to bottom equates with lower plate 25 thickness from top to bottom, and it has hexagonal cross section.Jet demarcation strip 70 extends on whole plate 25 along the axis of symmetry 62, extends to another outer side surface opposed with it from an outer side surface always.70 of the jet splitter whole thickness along lower plate 25 in the scope of through port 72 forms, and through port 72 outwards stretches, then is the half thickness from top to bottom along lower plate 25.In this embodiment, jet splitter 70 not only makes fuel jet separately enter in two through ports 72, but also can guarantee that gas separately enters in two passages 28, and each passage 28 all parallels with the axis of symmetry 62 and jet splitter 70.

Jet splitter 70 forms in the zone of through port 72 by simultaneously anisotropic etching being carried out in two sides of silicon lower plate 25.Etching begins to carry out from the upper-end surface 27 and the downside 75 of lower plate 25.Etching mask is placed on the lower plate 25, so that solution can corrode lower plate 25, reaches the pact of this plate thickness till half until the degree of depth.But, etching mask should be designed to only in the zone of the through port 72 that forms two sides be corroded, outside the zone of the through port 72 that is parallel to the axis of symmetry 62, etching is only carried out on a side, and promptly the upper-end surface 27 from lower plate 25 begins till nearly half thickness of lower plate 25.Thereby just produced and be used for the passage 28 of supply gas.

With such method, the minimum planes cross section of through port 72 is the directions along the longitudinal axis 1 of the valve of jet splitter 70 and through port 72, and half place at the extended length of each through port 72 forms by periphery chamfered portion 77.Planar cross-sectional at 72 places, passway at the upper-end surface 27 of lower plate 25 and downside 75 places then is maximum.When carrying out etched depth since two sides when reaching a half thickness of lower plate 25, etch process just stops.

Four passages 28 that are used for the gas supply flow is crossed the fuel oil of through port 72 extend to another side along this plate from a side always, and are parallel to each other.Have only two passages 28 to be blocked by the top awl cylindricality of the through port 72 of aiming at upper plate 24.Passage 28 has formed inflow chamber 68 with the lower end surface 26 of upper plate 24.According to etch process, upwards until half thickness place of the pact of this plate, the size of passage 28 reduces (promptly dwindling) in echelon and just in time opposite opposite side and the axis of symmetry 62 symmetrical configurations along an outer side surface of lower plate 25 to lower plate 25 gradually along the downside 75 of lower plate 25.

Lower plate 25 in the present invention the 8th and the 9th exemplary embodiments is because it is simple in structure, thereby processing charges is very low, and this is very favourable.In a single etch process, promptly passage 28 and jet splitter 70 (or through port 72) all can process on a plate 25.The width of jet splitter 70 (or passage 28) can change, so that adjust the angle of attack of fuel oil.

Figure 18 and Figure 19 show some other exemplary embodiments of the present invention.These embodiments do not use ambient gas, but can regard the combination of the known structure of upper plate 24 and lower plate 25 equally as.Figure 18 shows along a section of the intercepting of the XVIII-XVIII line among Figure 14, and Figure 19 illustrates along a section of the intercepting of the XIX-XIX line among Fig. 2.

Difference between above-mentioned two exemplary embodiments only is the spray-hole 60 in the upper plate 24, and the passage of supply gas is not set herein.In exemplary embodiments shown in Figure 180, spray-hole 60 is that the mode from top by the agency of reduces (promptly dwindling) from end face 61 gradually to lower end surface 26, and in exemplary embodiments shown in Figure 19, spray-hole 60 is to enlarge gradually to lower end surface 26 from end face 61 beginnings.Jet splitter 70 in the lower plate 25 guarantees that being divided into two strands from the fuel oil that spray-hole 60 penetrates enters two through ports 72.So just produce or kept two spray characteristics of valve.By changing the physical dimension of jet splitter 70, just can influence the angle of attack of fuel oil.

Jet member 22 not only can be used in the injection valve of fuel injection system, and can be used for other various media are atomized in many applications that needs produce very little liquid pearl, for example jet-dye and paint etc. equably.Can be applied in some course of working or other similar applications in addition.

Claims

1. one kind is used for the jet member of ejection medium, and this jet member comprises:

A) upper plate has a spray-hole at least on this upper plate;

B) lower plate, this lower plate

I) be positioned at the downstream part of upper plate, and

A through port and a jet splitter are ii) arranged, and this jet splitter is divided at least two through ports to this through port, and wherein, at least one spray-hole of upper plate is configured at least in part at least two through ports and the jet splitter overlaid with lower plate.

2. jet member as claimed in claim 1, wherein, upper plate and lower plate are made by single crystal silicon.

3. jet member as claimed in claim 1, wherein, lower plate has a basic thickness, and jet splitter has same basic thickness.

4. jet member as claimed in claim 3, wherein, at least two through ports have inward flange and outward edge, inward flange is determined the sidewall of jet splitter, inward flange and outward edge are parallel to each other on the basic thickness direction of lower plate, and thus, jet splitter has the rectangular cross-section.

5. jet member as claimed in claim 3, wherein, at least two through ports, wherein each through port has a lateral cross that is limited by two awl cylindrical portion branch, and one minimum plane section in these at least two through ports is positioned at half place of the basic thickness of lower plate, and is limited by the jut branch.

6. jet member as claimed in claim 5, wherein, the cross section of jet splitter is a rhombus.

7. jet member as claimed in claim 5, wherein, the cross section of jet splitter is a hexagonal shaped.

8. jet member as claimed in claim 1, wherein, on the lower end surface of upper plate, define two passages at least, this lower end surface is towards lower plate, these at least two passages start from the outward edge of upper plate and inwardly extend towards the spray-hole of upper plate, and wherein the upper-end surface on this passage and the lower plate forms the gas inflow chamber.

9. jet member as claimed in claim 8, wherein, upper plate also comprises several webs, this web is separated the spray-hole of passage and upper plate from the space.

10. jet member as claimed in claim 8, wherein, this passage extends to the spray-hole of upper plate from the outward edge of upper plate and lower plate.

11. jet member as claimed in claim 5, wherein, be limited with the passage of supply gas on the upper-end surface of lower plate, the upper-end surface of lower plate is towards upper plate, in all cases, each passage that parallels with jet splitter all extends to half zone, place of the basic thickness of lower plate at the height of projection from the outward edge of lower plate.

12. jet member as claimed in claim 11, wherein, two opposed passages extensions at least two through ports respectively alignedly.

13. jet member as claimed in claim 1 wherein, also comprises an additional bottom, this additional bottom

-be positioned at the downstream part of lower plate, and

-tap hole arranged, this tap hole at least in part with at least two through port overlaids.

14. jet member as claimed in claim 13, wherein, the upper-end surface of this add-in card defines two passages at least, and the upper-end surface of this add-in card is towards lower plate, these two passages begin to extend internally from the outward edge of add-in card, and constitute the inflow chamber of gas with the lower end surface of lower plate.

15. jet member as claimed in claim 13, wherein, upper plate has the lateral section shape of the tap hole in spray-hole, at least two through ports and the add-in card to remain unchanged.

16. jet member as claimed in claim 13, wherein, the lateral section of the tap hole in the spray-hole of upper plate, at least two through ports and the add-in card enlarges along downstream direction.

17. jet member as claimed in claim 8, wherein, spray-hole, at least two through ports and passage form by anisotropic etching and processing.

18. jet member as claimed in claim 2, wherein, the etching and processing of lower plate is carried out simultaneously from two sides.

19. a valve that is used for supplying fuel oil-gaseous mixture, this valve comprises:

A) valve closure member;

B) valve base surface, the shape of this valve base surface and valve closure member adapt, and are positioned at the downstream of valve closure member; And

C) sheet-type jet member that is positioned at the valve base surface downstream position, this jet member comprises:

I) upper plate towards valve base surface, and this upper plate has a spray-hole at least, and

Ii) at least one lower plate along downstream direction has two through ports and a jet splitter at least on this lower plate, and this shim forms on lower plate and at least two through ports are separated;

Wherein, at least one spray-hole of upper plate is overlapping with at least two through ports and jet splitter at least in part.