KR100351391B1 - Orifice Element and Valve with It - Google Patents

Abstract

The present invention relates to an orifice element used in a valve for injection fuel or fuel-gas mixture. The orifice elements comprising two silicon plates are bound to each other. The top plate has one or more ejection orifices. The bottom plate has a through hole introduced therein through which the fuel jets can pick up. The bottom plate is located in the downstream direction and includes a jet splitter. The jet splitter separates the through opening into two or more through openings such that a dual jet characteristic is created or sustained for the valve. Two or more conduits are formed between the top plate and the bottom plate. The gas is provided through a conduit and mixed with fuel released through the injection orifice. The injection orifices and valves are particularly suitable as injection systems for mixture compression internal combustion engines with externally supplied ignition devices.

Description

Orifice Element and Valve with It

The present invention relates to an orifice element (or a valve with an orifice element) for media injection. In particular, the present invention relates to an orifice element having an upper plate with at least one injection orifice and at least one lower plate having at least one through opening and positioned downward from the upper plate. In particular, the present invention relates to a fuel injection valve for supplying an air-fuel mixture to an internal combustion engine. The fuel injection valve has a valve closure that interacts with the valve seat surface and a thin, flat orifice element disposed downward from the valve seat surface.

Background

An injection valve for injecting an air-fuel mixture in which an orifice element consisting of a silicon injection plate is used is described in German Publication No. 41 12 150. The silicon jet plate is made by joining the upper silicon plate with the lower silicon plate. The upper silicon plate has injection holes. The lower silicon plate has one or more through holes. In addition, a recess is installed in the silicon plate to form a conduit connecting this through hole to the outer edge of the silicon jet plate. For example, the flow or intake of air through the conduits improves the atomization of the fluid flowing through the injection holes. The silicon plate is manufactured by anisotropic etching.

US Patent 4,907,748 likewise describes an injection valve comprising an orifice element (silicon nozzle plate) consisting of two silicon plates bound together. The spray release opening of the upper plate and the through opening of the lower plate are offset from each other. The plates are used to prepare (or measure) fuel rather than to add (ie, quantitatively) the gas around the fuel.

U. S. Patent No. 4,828, 184 describes a nozzle comprising two silicon plates. The first silicon plate has one or more openings formed therethrough, and the second silicon plate has only one opening formed therethrough. Openings of the first and second silicon plates are offset from each other. An area of reduced thickness is formed between the plates, thereby forming a shear gap between the openings of the first plate and the openings of the second plate. In each case, the shear gap is parallel to the end face of the plates.

All the above mentioned injection valves receive a small single jet of fuel or other medium being discharged. Unfortunately the above mentioned injection valves are not suitable for making double jet properties of the fuel, such double jet properties of the fuel being for example in an internal combustion engine. It is required during the spray discharge with two injection valves. Thus, there has been a need for an economical and simple injection valve that creates a double jet characteristic of spraying media in very narrow spaces.

Summary of the Invention

The present invention satisfies the aforementioned needs by providing an orifice element having an upper plate and at least one lower plate. The top plate has one or more injection orifices. One or more bottom plates have two or more through openings and a jet splitter. The jet splitter separates at least two through openings on the bottom plate. One or more spray orifices of the upper plate partially overlap the through openings of the jet splitter and the lower plate.

The orifice element of the present invention has the advantage of making it economical and simple (or maintaining) the dual jet property in which the medium is spray released in a very narrow space. Double jet properties are also fully realized even when the second medium surrounds the first medium to improve the homogeneity and readiness of the first medium.

Another embodiment of the valve according to the present invention provides a valve closure in addition to a thin sheet orifice, the valve closure interacting with the valve seat surface. The thin sheet-shaped orifice element is arranged downstream from the valve seat surface. The top plate faces the valve seat surface. In this way, cost savings are realized while, for example, the dual jet nature of the fuel is simplified and has very small tolerances. The dual jet properties also have a particularly precise effect due to the high precision in manufacturing.

In a suitable embodiment of the present invention, the plate of the orifice element is made of monocrystalline silicon, and the openings and conduits of the plate are formed by anisotropic etching. Thus, the plate can be manufactured simply and has a high precision in manufacturing. This arrangement allows for accurate metering of the fuel (or gas) indicated as the second medium.

In a suitable embodiment of the invention, the peripheral shape of the overlapping plates has the same dimensions, and the overlapping plates are joined together.

Etching a plate comprising spray jet splitters from both sides at the same time is particularly advantageous as it reduces the number of process steps required to produce the silicon plate structure. In addition to the reduction in manufacturing cost, the above described method has the advantage that various other structures can be produced by varying the etching time. first. Etch masks are disposed on the top and bottom of the plate to be etched. The edging solution is then applied to the plate until it is etched by half the plate thickness. If the etching operation is stopped immediately the moment it reaches half the plate thickness, a through opening is formed. The minimum cross section of the through opening formed by etching is about half the plate thickness. Thus a jet splitter having a rhombic or hexagonal cross section is formed.

Continuing the etching operation beyond the time required to etch half of the plate thickness results in a jet splitter and through opening formed with a flat economy surface. Thus, a jet splitter having a rectangular cross section is formed.

By etching as described above, the shape of the through opening can be simply changed, thereby affecting the different properties of the orifice element (or valve). E.g. The size of the jet splitter thus determines the jet angle of the medium to be sprayed. By changing the width of the conduit for supplying the second medium, the shape of the jet media can be changed, for example to form a flat jet.

The creation of through openings and thus the jet splitter and the gas supply conduits in one single etching operation is a unique advantage of the present invention. Such unusual embodiments are very simple and particularly economical. In this embodiment, the introduced conduit is parallel to the jet splitter. The through opening is created by two side etching, while the conduit is formed in the same etching operation by one side etching. The conduits are colinear, each opening through the through opening. The conduit is interrupted only by the through openings in the plate.

Detailed description of the invention

1 shows, in part, a first embodiment of a fuel injection valve that can be used with an injection system of a mixture compression internal combustion engine with an externally supplied ignition. The valve nozzle member 2, for example made of ferromagnetic material, has a conical tapered flow conduit 5 arranged concentrically on the longitudinal valve shaft 1. A valve needle 8 is disposed in the flow conduit 5. The downstream foot of the valve needle 8 is designed, for example, as a valve closure 9 tapered conically to the downstream side. The valve closure 9 of the valve needle 8 interacts with the valve seat surface 10 of the flow conduit 5. The valve seat surface 10 is, for example, tapered conically in the flow direction. The guide end surface 11 of the flow conduit 5 formed upstream from the valve seat surface 10 guides the axial movement of the valve needle 8. The valve needle 8 protrudes with the guide collar 13 in a small radial gap through the guide cross section 11 of the flow conduit 5.

The axial movement of the valve needle 8 and thus the opening and closing movement of the valve are made in a generally known manner, for example electromagnetically. As shown in FIG. 1, the valve needle 8 has a solenoid coil 18 and a core 19 of the fuel injection valve at its upstream end (i.e., the end facing away from the valve seat surface 10). Is connected to the interacting amateur 17.

The flow conduit 5 is shifted in the cylindrical flow through cross section 20 in the downstream direction following the conical valve seat surface 110 (ie, the direction spaced apart from the solenoid coil 18). A thin orifice element 22 is arranged in the downstream direction immediately after this flow through cross section 20. Said thin orifice element 22 comprises, for example, a thin top plate 24 of a quadrilateral shape and a thin bottom plate 25 of a tetragonal shape opposite the valve seat surface 10. The upper plate 24 at least partially coincides with the lower end face 26 facing away from the flow through end section 20 on the upper end face 27 of the lower plate 25 facing the upper plate 24. And is bound to the upper end surface 27. The upper plate 24 and the lower plate 25 are made of monocrystalline silicon. However, the upper plate 24 and the lower plate 25 may also be made of, for example, germanium or synthetic semiconductors and other suitable materials such as germanium or glass.

One or more conduits 28 are formed between the upper plate 24 and the lower plate 25. The gas used to produce the fuel-gas mixture is moved inward from around the plates 24 and 25 toward the fuel directly passing through the plates 24 and 25 via one or more conduits 28.

The recess 30 is formed at the spray discharge end 29 downstream of the nozzle member 2. In order to ensure a certain position of the thin orifice element 22 relative to the flow through cross section 20 of the circularly tapered flow conduit 5, the recess 30 surrounds the orifice element 22 and flows through. The cross section 20 is open at the recess 30. One or more feed grooves 33 are formed radially, for example, between the recess 30 and the periphery of the spray discharge end 29 of the nozzle member 2. One or more feed grooves 33 communicate with one or more conduits 28 to allow gas to reach one or more conduits 28 of the orifice element 22.

At the spray discharge end 29, the nozzle member 2 is at least partially enclosed axially and radially, for example by a feed bushing 36. In the axial direction, in the vicinity of the spray discharge end 29, the feed bushing 36 extends radially inwardly inwardly, for example from the periphery of the feed bushing 36 to the annular feed space 38. Has The annular supply space 38 is formed between the periphery of the spray discharge end 29 and the stepwise longitudinal opening 39 of the feed bushing 36.

The base 40 of the feed bushing 36 facing the spray discharge end 29 of the nozzle member 2 has a bearing surface 42. The bearing surface 42 is perpendicular to the longitudinal valve shaft 1 and is arranged concentrically around it. The bearing surface 42 faces the spray discharge end 29 of the nozzle member 2. The bearing surface 42 comprises a side facing the longitudinal valve shaft 1 in the radial direction. Together with the bearing face 42, the feed bushing 36 holds the orifice element 22 firmly relative to the valve nozzle 2, and thus the orifice element 22 in the recess 30 of the nozzle member 2. To securely axially position the gas and to ensure that the gas flows through the one or more conduits 28 toward the atomizing fuel. In the flow direction, a cylindrical opening 44 extending downstream from the base 40 of the feed bushing 36 concentrically with respect to the longitudinal valve shaft 1 is located after the orifice element 22.

A mixture spray discharge opening 45 widened in a funnel shape is located after the cylindrical opening 44.

A circumferential groove 47 for receiving the sealing ring 48 is formed in the longitudinal opening 39 of the feed bushing 36 at its end facing away from the mixture spray discharge opening 45. The sealing ring 48 seals between the periphery of the nozzle member 2 and the longitudinal opening 39 of the feed bushing 36.

If the valve with the supply bushing 36 is assembled to, for example, a valve mount of the internal combustion engine suction line, the supply bushing 36 is sealed off from the inner wall of the valve mount up and down the lateral opening 37. Needs to be. For this purpose a groove 50 is formed on the periphery of the feed bushing 36 in which in each case a sealing ring (not shown) can be arranged.

FIG. 2 is a plan view of the top plate 24 of the orifice element 22 according to the first embodiment of the invention shown in FIG.

FIG. 3 shows a first embodiment of the backcountry element 22 corresponding to the cross-section cut along the III-III line of FIG. 2, as described in these figures, top plate 24 (example). Quadrilateral) has a pyramidal cutout injection orifice 60 having a trapezoidal cross section. The injection orifice 60 is symmetrically disposed on the longitudinal valve shaft 1 and extends from the upper side 61 of the upper plate 24 toward the lower end face 26 of the upper plate 24. The cylindrical flow through cross section 20 of the flow conduit 5 has a cross section overlapping the injection orifice 60 and is located upstream from the injection orifice 60.

The outer plate 25 likewise has a quadrangular shape, for example. With regard to the assembly of the orifice element 22, it is particularly suitable that the upper plate 24 and the lower plate 25 have the same dimensions with respect to the peripheral shape. Since the wafers containing the plates 24.25 are adjusted to bind to each other, it is simple to obtain these same dimensions for the individual plates 24 and 25. The thin orifice element 22 is then separated in a series of operations by sawing two plates 24 and 25 from the wafer.

The orifice element 22 has a first axis of symmetry 62 and a second axis of symmetry 63 perpendicular to the first axis of symmetry. Each of the first and second axes of symmetry 62, 63 half-circles the outer sides of the lower and upper plates 25, 24 and defines a plane perpendicular to the longitudinal valve axis 1. The longitudinal valve shaft 1 intersects the plane at the intersection of the first and second axes of symmetry 62, 63.

Trench-shaped conduits 28 with a rectangular trench bottom 67 are formed in each case on the bottom end face 26 in the middle of each axis of symmetry 62,63 from the outer edge surface of the top plate 24 ( See, eg, FIG. 4). For example, the trench bottom 67 produced by the four conduits 28 is on the lower end face 26 of the upper plate 24 facing away from the upper end face 27 of the lower plate 25. Contact. The conduit 28 extends in a trapezoidal shape in a direction from the trench bottom 67 toward the lower end face 26 of the top plate 24. Each of the conduits 28 forms an inlet space 68 together with the upper end face 27 of the lower plate 25.

A jet splitter 70 in the shape of a web (or blade) is provided in the bottom plate 25 and has an upstream thickness on the downstream side that is equal to the upstream thickness on the downstream side of the bottom plate 25. The jet splitter 70 is a fuel that flows downstream from the flow through end section 20 of the nozzle member 2 and through the injection orifice 60 of the upper plate 24 of the orifice element 22. For example, it is divided into two through openings 72.

The jet splitter 70 extending along the axis of symmetry 62 separates the through opening 72 located on the right side of the axis of symmetry 62 (FIG. 2) from the position only opening 72 located to the left of the axis of symmetry 62. The through opening 72 has a rectangular or square cross section. By forming the jet splitter 70 in the lower plate 25 of the orifice element 22, the atomization of the double jet valve is particularly increased for the double jet valve because the degree of atomization of the double jet valve is clearly increased by the surrounding gas of the respective through opening 72. Has an advantage.

Despite the surrounding casing, the dual jet nature of the valve can be created by the jet splitter 70 and fully maintained. A conduit 28 having a trench bottom 67 extending parallel to the axis of symmetry 62 and / or 63 is formed in the top plate 24 so as not to allow any direct connection to the injection orifice 60. The injection orifice 60 is also spatially separated from the conduit 28 by the projection 73. The extension of the projection 73 in the direction of the longitudinal valve shaft 1 is the same as that of the conduit 28. In the vertical direction, the projection 73 extends from the trench bottom 67 of the conduit 28 below the lower end face 26 of the top plate 24.

Since the injection orifice 60 is completely overlapped by the outer boundary edge of the through opening 72, and the conduit 28 is partially overlapped by the outer boundary edge of the through opening 72 in the lower plate 25. Gas and fuel, such as air, can be easily flowed into the through opening 72. Thus, the mixture is first formed in the through opening 72 of the bottom plate 25.

4 to 6 show cross-sectional views of the first and second embodiments of the present invention. 4 through 6 are cross-sectional views taken along the lines IV-IV, V-V and Vl-Vl of FIG. 3, respectively. The transverse section is the binding surface of the upper plate 24 and the lower plate 25. 4 illustrates how the four conduits 28 face the intersection of the axes of symmetry 62, 63. The four conduits 28 extend inward beyond the outer boundary edge of the through opening 72 in the lower plate 25 as shown in FIGS. 4 and 5. Thus, the four conduits 28 ensure that gas enters the through opening 72. When gas flowing through the two conduits 28 along the axis of symmetry 62 meets the jet splitter 70, it splits into two through openings 72.

6 shows a second embodiment of the invention, in which only two conduits 28 are formed along the axis of symmetry 63, and no conduits 28 are formed along the axis of symmetry 62. Thus, the gas in each plate 28 flows into the adjacent through opening 72. The extension of the jet splitter 70 along the through opening 72 and the axis of symmetry 63 can be substantially smaller compared to the first embodiment, so that, for example, a square through opening 72 is formed.

The injection orifices 60 and the conduits 28 as well as the through openings 72 of the upper plate 24 and the lower plate 25 formed of monocrystalline silicon are formed, for example, by anisotropic etching, as is generally known. do.

First, the plane of the silicon thin plate is polished. This plane is then coated with a thin oxide layer, and a photo layer is added to the plane. A photomask is placed on this photo layer and then emitted. The developer is applied for pattern formation to form a position covered with the oxide and photo layer exposed on the plate. The exposed oxide spots are etched away in the bath with hydrofluoric acid and then the photo layer is removed.

Thus, a plate-shaped oxide pattern serving as a next etching mask is obtained. Alkaline solutions or acids interfere with the exposed silicon or cause depressions in the monocrystalline plates. When anisotropic etching means are used, the depressions are formed deeper without substantial expansion. In this case, the side wall of the depression is formed by the crystal surface of the silicon plate. As a result, a depression having a trapezoidal cross section is formed.

In addition to the trapezoidal cross section of the conduit 28 formed by anisotropic etching and the pyramidal cutout injection orifice 60 (with a trapezoidal cross section), for example, a rectangular cross sectional shape represented by the through opening 72 is also shown. It is also possible. This cross sectional shape can be achieved, for example, by etching the plate simultaneously from two sides. Thus, for example, the lower plate 25 may be etched from the upper end face 27, or may be etched from the side 75 of the lower plate 25 positioned opposite the upper end face 27. . This etching method also creates a flat interface of the jet splitter 70.

The lower end face 26 of the upper plate 24 and the upper end face 27 of the lower plate 25 are joined together by binding two wafers comprising plates 24 and 25. For this purpose, the lower end face 26 of the upper plate 24 and the upper button face 27 of the lower plate 25 are first polished and the face is chemically treated. Thereby a thin layer, for example silicon oxide, can be produced (or laminated) on the top surfaces of the plates 24, 25. Another surface treatment is carried out, for example, by dipping the plates 24, 25 in an etching and cleaning solution. The surface prepared by bonding the wafer, the upper plate 24 and the lower plate 25 together, is joined at room temperature.

The binding process is terminated, for example, by placing the top plate 24 under temperature treatment and the bottom plate 25 under a nitrogen environment. In this case, in the case of glass-silicon mixtures, silicon direct bonding (silicon melt bonding) as well as anode bonding can be used by applying an electric field. After the wafer is bound, it is cut into a number of plates 24, 25.

As shown in FIG. 1, the gas forming the fuel-gas mixture flows through the horizontal opening 37 into the annular supply space 38. The feed space 38 is formed between the nozzle member 2 and the longitudinal opening 39 of the feed bushing 36. From there, the gas flows through four inlet spaces 68 defined, for example, by conduits 28. From there the gas flows into the two through openings 72 of the orifice element 22, which are separated from each other by the jet splitter 70. Fuel from the injection orifice 60 is discharged into the two through openings 72 of the orifice element.

Conduit 28 has a narrow cross section. This narrow cross section is useful for the measurement of gases. In addition, the narrow cross section accelerates the gas so that the gas collides with the high velocity atomizing fuel and surrounds the fuel while very fine small particles are formed. Thus, a substantially homogeneous fuel-gas mixture is produced. The fuel-gas mixture is discharged through the mixture-spray-discharge opening 45, for example into the intake line of the internal combustion engine. The gas is air branching through an upstream bypass from, for example, a throttle valve in an induction manifold of an internal combustion engine. However, exhaust gases recycled from internal combustion engines can also be used to reduce pollutant emissions. Gas delivered by the auxiliary fan may also be used.

Third, fourth and fifth embodiments of the invention are shown in FIGS. 7, 8 and 9, respectively. These figures are cross-sectional views taken along the lines VII-VII, VIII-VIII and IX-IX in FIG. 2, respectively. (The jet splitter 70 shown in FIG. 2 is shown to have a rectangular cross section, but in all forms. It is not representative of the jet splitter 70, but for example, a jet splitter 70 having a hexagonal cross section is also possible) The same element or an element having the same function is the same as in FIGS. Has a sign.

The above embodiments differ from the first and second embodiments only in the design of the jet splitter 70 defined by the through opening 72 or only in the length of the conduit 28 of the top plate 24.

7 shows the present invention having a jet splitter 70 different from the first and second embodiments, or another outer boundary edge of the through opening 72 outside the jet splitter 70 in the bottom plate 25. The third embodiment will be described. In particular, the cross section of the jet splitter 70 no longer has a rectangular shape with sides extending parallel to the longitudinal valve shaft 1 over the entire thickness of the bottom plate 25. Rather, the cross section of the jet splitter may have a hexagonal or rhombic shape.

The hexagon is formed in the jet splitter 70 by simultaneously anisotropically etching silicon on both sides of the lower plate 25.

The etching takes place from the upper end face 27 and the lower side 75 of the lower plate 25. An etching mask is arranged on the lower plate 25 so that the etching solution erodes the lower plate 25 while etching about half of its thickness. Thus, the peripheral indentations 77 are formed in the through openings 72 from the jet splitter 70 and the through openings 72, respectively, about half the length of extension along the longitudinal valve shaft 1.

In each case, the indentation 77 ensures that the minimum planar cross section of the through opening 72 is formed in the middle of the bottom plate 25 thickness, while the upper end face 27 and the lower side of the bottom plate 25 are The planar cross section of the through opening 72 on 75 is the widest. Thus, the etching operation stops when it starts at both etching surfaces and reaches exactly half the thickness of the lower plate 25. The above-described structure is formed with two pyramid cut volume (per two through ladders 72 having a cross-sectional shape).

In order to achieve continuous uniform and parallel planes of the through opening 72 and the jet splitter 70 for the structure used in the first embodiment of the present invention (see FIG. 3), the etching operation is carried out by It lasts until it disappears. The gas is likewise supplied via a conduit 28 introduced at the lower end face 26 of the upper plate 24. Four conduits 28 as in the first embodiment of the invention or two conduits 28 as in the second embodiment of the invention can be used to supply gas. The size of the through opening 72 is designed based on the number of conduits 28. For example, the size of the through opening 72 can be designed to be much smaller in the shape of the two conduits 28 than in the shape of the four conduits 28.

The fourth embodiment of the present invention shown in FIG. 8 is similar to the third embodiment of the present invention-has a conduit 28 modified. In FIG. 8, the conduit 28 extends from the peripheral edges of the plates 24, 25 to the injection orifice 60. That is, they are not separated from the injection orifice 60 by the projection 73. As the conduits are alternately etched at the lower end face 26 of the top plate 24, a mixture of fuel and gas is produced directly in the upstream region from the jet splitter 70. In this embodiment both two or four conduits 28 may be introduced.

The fifth embodiment of the invention shown in FIG. 9 combines the conduit 28 in the upper plate 24 described in the fourth embodiment of the invention with the jet splitter 70 of the first embodiment of the invention. In the case of the fourth embodiment, the conduit acts directly from the periphery of the plates 24, 25 into the spraying orifice 60 (ie they are not separated from the spraying orifice 60 by the projection 73). The jet splitter 70 has a rectangular cross section (or is flat on the outer boundary of the through opening 72 in the bottom plate 25).

FIG. 10 is a plan view of the top plate 24 starting from the lower front end 26 followed by the cross section taken along the X-X lines of FIGS. 8 and 9. The conduit 28 allows the outer peripheral edge of the plate 24 to flow in communication with the injection orifice 60. The pyramidal cutout injection orifice 60 (having a trapezoidal cross section) extends from the upper side 61 of the upper plate 24 to the lower end face 26 of the upper plate 24. In each case, the pyramidal cutout injection orifice 60 is centered with respect to the axes of symmetry 62 and 63 at the four sides 78 of the pyramidal cutout and is lowered by four conduits 28 for gas supply. In the area of the end face 26. The side 78 of the pyramidal cut injection orifice 60 thus surrounds three sides of each conduit 28 at the conduit inlet 80.

Three sides of the conduit 28 are covered by the top plate 24 from the periphery of the plate 24 to the conduit inlet 80. The upper end face 27 of the lower plate 25 constitutes a fourth side boundary edge of the conduit 28. However, only the fourth side boundary edge extends from the periphery of the plate 25 to the through opening 72, thus ending, for example, before the injection orifice 60 begins. Fully enclosed conduit 28 represents inlet space 68.

FIG. 11 is a top view of the lower plate 25 along the cross section taken along the lines XI-XI of FIGS. 7 and 8. The through hole 72 is characterized by a peripheral indentation 77 that reduces the cross section of the through hole. The jet splitter 70 having a hexagonal cross section in a region approximately half the length of the axis also has a peripheral indentation 77 formed by two side etchings. The size of the through opening 72 is designed based on whether two or four conduits 22 will be used in the top plate 24.

In all the embodiments described above, the various elements and features of the valve nozzle are in each case affected by a change in shape. Thus, for example, the size of the jet splitter 70 determines the synthetic jet angle of the fuel that is sprayed off. By varying the width of the conduit 28, the dimensions perpendicular to the direction of extension of the axes of symmetry 62, 63 and thus the cross section of the conduit 28 are greatly affected. Can be changed to get a flat jet.

In FIG. 13 showing a plan view of an additional plate 82 along a cross section taken along the XIII-XIII line of FIG. 12 and FIG. 12 showing the additional plate 82, the orifice element 22 is the invention. According to the sixth embodiment of the. Portions having the same division and the same function are used with the same reference numerals as FIGS. 1 to 11. As in the first to fifth embodiments of the present invention, the upper square plate 24 and the lower square plate 25 in the sixth embodiment are made of monocrystalline silicon.

Injection orifice 60, conduit 28 and through opening 72 are formed, for example, by anisotropic etching. The orifice element 22 comprises three plates, namely an upper plate 24, a lower plate 25 and an additional plate 82 arranged downstream from the lower plate 25. The additional plate 82 also has a square shape with the same external dimensions as for example plates 24 and 25 of monocrystalline silicon. The three plates 24, 25, 82 are bound together.

An outlet orifice disposed concentrically on the longitudinal valve axis 1 and extending from the upper end face 84 of the additional plate 82 and extending in the flow direction in a pyramidal cutout (having a trapezoidal cross section); 83 is formed in the additional plate 82. Square through openings 72 spatially separated from each other by a jet splitter 70 and symmetrically formed in the longitudinal valve shaft 1 at the lower plate 25 communicate with the outlet orifice 83.

The two through openings 72 of the lower plate 25 are located downstream from the injection orifice 60 of the upper plate 24. Accordingly, the outer boundary edge of the through opening 72 has a larger dimension than the injection orifice 60 in the lower end face 26 of the upper square plate 24 so that the fuel can be easily introduced into the through opening 72. do. The injection orifice 60 extends from the upper side face 61 of the upper plate 24 to a pyramidal cutout shape (having a trapezoidal cross section) in the lower end face 26 direction.

The three plates 24, 25, 82 are bounded to the outside by sides perpendicular to each other at their ends. Starting from each side, one conduit 28 having a right angle trench bottom 67 and extending inwards directly to the outlet orifice 83 is formed in the upper end face 84 of the additional plate 82. . The conduit 28 is disposed symmetrically about an axis of symmetry 62 or 63. The conduit 28 is tapered in a trapezoidal shape in the direction of the lower side 86 of the additional plate 82. Together with the lower side 75 of the lower plate 25, the conduits 28 each form an inlet space 68.

A gas supply conduit 28 is formed in the additional plate 82 while fuel for generating and sustaining dual jet characteristics is provided downstream from the lower plate 25 by the jet splitter 70. After the jet of fuel is split into the jet splitter 70, the fuel discharged out of the through opening 72 first encounters a gas that is discharged substantially perpendicular to it. The narrow cross section of the conduit 28 causes the gas to accelerate, with the result that the gas encounters the sprayed fuel at high speed and at the same time forms very fine particles surrounding the fuel. Thus, a substantially homogeneous fuel-gas mixture is produced.

The sixth embodiment of the present invention can be realized with other variations caused by additionally providing additional plates 82 of the first to fifth embodiments of the present invention described above. The coupling structure of the jet splitter 70 in the lower plate 25 can be clearly changed using the jet splitter 70 (not shown) having a hexagonal cross section. The number of conduits 28 may also vary. Thus, in addition to the embodiment of FIG. 13 with four conductors 28, only two conductors 28 can be etched, according to the second embodiment, provided that only splitting of jets is assumed to be effective. No gas is needed. The shape of the fuel jet is modified by varying the ratio of the width of the conduit 28 perpendicular to the axes of symmetry 62, 63.

The orifice element 22 according to the seventh embodiment of the invention is shown in FIG. 14 as a top view of the top plate 24. The same element and the same functioning element have the same reference numerals as those shown in FIGS. 1 to 13. Compared to the first to sixth embodiments of the present invention, the upper plate 24 of the seventh embodiment is disposed symmetrically on the longitudinal valve shaft 1 and starts at the upper surface 61 of the upper plate 24. It has a tapered (ie narrowed) pyramidal cutout injection orifice 60 (having a trapezoidal cross section) towards the lower end face 26 of the top plate 24. The fuel jet at the lower end face 26 of the upper plate 24 thus becomes smaller in cross section and thus accelerated. As a result, the fuel impinges at high speed on the jet splitter 70 located on the bottom plate 25.

An eighth embodiment of the orifice element 22 of the invention is shown in FIG. 5 along a cross section taken along the XV-XV line in FIG. Pyramidal cutting arranged symmetrically on the square upper plate 24 longitudinal valve shaft 1 and starting from the upper surface 61 of the upper plate 24 toward the lower end face 26 of the upper plate 24. Shaped injection orifice 60 (having a trapezoidal cross section). The through cross section 20 of the flow conduit 5 of the injection valve overlaps the injection orifice 60 and has a cross section connected to allow fluid to flow upstream from the injection orifice 60.

A ninth embodiment of the orifice element 22 of the present invention is shown in FIG. In a ninth embodiment, the pyramidal cutout injection orifice 60 (having a trapezoidal cross-section) of the upper plate 24 starts at the upper surface 61 of the upper plate and has a lower end face of the upper plate 24 ( It differs from the embodiment in FIG. 15 only at the point of tapering (ie narrowing) toward 26). FIG. 16 shows a cross section resulting from a section cut along the XVI-XVI line of FIG. 14.

In the orifice elements 22 of the eighth and ninth embodiments, the bottom plate 25 is of the same design. FIG. 17 shows a cross section taken along the XVIl-XVll lines of FIGS. 15 and 16 and thus applies to both the eighth and ninth embodiments. In each case, the mutual cut surface is the binding surface of the upper plate 24 and the lower plate 25.

The outer shape of the lower plate 25 is similarly square. The orifice element 22 has axes of symmetry 62, 63, each of which bisects the outer surface of the two plates 24, 25. The jet splitter 70 has an upstream to downstream thickness ratio equal to the upstream to downstream thickness ratio of the bottom plate 25 and has a hexagonal cross section. The jet splitter 70 extends along the axis of symmetry 62 over the entire plate 25 from the outer side to the opposite outer side. The jet splitter 70 is formed only in the region of the through opening 72 across the thickness of the entire lower plate 25, while only up to half of the thickness of the upstream to downstream side of the lower plate 25 ( Extend out of 72). In this embodiment, the jet splitter 70 splits the fuel jet into two through openings 72 as well as two conduits 28 in which gas acts parallel to the axis of symmetry 62 and the jet splitter 70. To be separated into

The jet splitter 70 is formed in the region of the through opening 72 by anisotropically etching both sides of the silicon of the lower plate 25 simultaneously. The etching is carried out from the upper end face 27 and the lower plate 25 of the lower plate 25. An etching mask is arranged on the lower plate 25 so that an etching solution necessary for etching about half of the thickness of the lower plate 25 is applied. However, the etching mask is designed to allow two-sided etching only in the region of the through opening 72 to be formed. In the outer region of the through opening 72 parallel to the axis of symmetry 62, the etching is performed only on one side starting at the upper end face 27 of the lower plate 25 and up to about half of the thickness of the lower plate 25. do. As a result, a conduit 28 is formed which is used for gas supply.

In this manner, the minimum planar cross section of the through opening 72 is along the longitudinal valve shaft 1 of the jet splitter 70 and the through opening 72 by the peripheral indents 77 of the through opening 72, respectively. It is formed at about half of the extension length. The planar cross section of the through opening 72 at the lower side 75 and the upper end face 27 of the lower plate 25 is the largest. The etching operation starts on both etching sides and stops when reaching half of the thickness of the bottom plate 25.

Four conduits 28 used for supplying gas to the fuel flowing through the through opening 72 extend continuously from one side to the other through the plate and extend in parallel to each other. The two conduits 28 are only blocked by the upper pyramidal cut section of the through opening 72 towards the top plate 24. Together with the lower end face 26 of the top plate 24, the conduit 28 defines an inlet space 68. The conduit 28 is tapered (ie, narrowed) in the direction of the bottom surface 75 of the bottom plate 25 to about half the thickness of the plate 25 in accordance with an etching operation, and thus, the bottom plate 25. Extends symmetrically about an axis of symmetry 62 from one outer side of the lower plate 25 to the opposite side of the lower plate 25.

According to the eighth and ninth embodiments of the present invention, the lower plate 25 is improved, so that the manufacturing can be made inexpensively due to the simple structure. In a single etching operation, that is, conduit 28 and jet splitter 70 (or through opening 72) may be formed on one plate 25. The width of the jet splitter 70 (or the width of the conduit 28) can be varied to alternately adjust various jet angles for fuel.

18 and 19 show another embodiment according to the invention. This embodiment is practiced with a combination of structures of the already known lower and upper plates 25 and 24 in the upper and lower plates 24 and 25 without using ambient gas. FIG. 18 shows a cross section taken along the line XVIII-XVIII in FIG. 14, and FIG. 19 shows a cross section taken along the line XIX-XIX in FIG. The two plates 24, 25 are bound together.

There are no gas supply conduits in both embodiments that differ only on the side of the pyramidal cut injection orifice 60 of the top plate 24. In the embodiment according to FIG. 18, the injection orifice 60 is tapered (ie, narrowed) in the manner described above from the upper side 61 to the lower end face 26, while the embodiment according to FIG. 19. The injection orifice 60 in the example starts at the upper side 61 and extends toward the bottom end face 26. The jet splitter 70 of the lower plate 25 causes the fuel coming from the injection orifice 60 to be split between the two through openings 72. In this way, the dual jet characteristic of the valve is created or retained. The jet angle of the fuel is affected by changing the shape of the jet splitter 70.

The orifice element 22 can be used for fuel injection valves for fuel injection systems as well. It can be applied to where very fine liquid small particles such as uniform spraying of dyes and lacquers are required and used to atomize other media in the process of making them.

1 is a side view partially showing a cross section of a first exemplary embodiment of an injection valve designed in accordance with the present invention;

2 is a plan view showing a jet splitter of an upper plate and a lower plate of an orifice element according to a first embodiment of the present invention.

3 is a cross-sectional view taken along the line II-III of FIG.

4 is a plan view of the top plate corresponding to the cross-sectional view taken along the IV-IV line of FIGS. 3 and 7;

5 is a plan view of the bottom plate corresponding to the cross-sectional view taken along the V-V line of FIGS. 3, 9, 12, 18 and 19. FIG.

6 is a plan view of a top plate corresponding to a cross-sectional view taken along the line VI-VI of FIGS. 3 and 7 in accordance with a second embodiment of the present invention.

7 is a cross-sectional view taken along the line VII-VII of FIG. 2 in accordance with a third embodiment of the present invention.

8 is a cross-sectional view taken along the line VIII-VIII of FIG. 2 in accordance with a fourth embodiment of the present invention.

9 is a cross-sectional view taken along the line IX-IX of FIG. 2 in accordance with a fourth embodiment of the present invention.

FIG. 10 is a plan view of the top plate according to the section taken along the X-X line of FIGS. 8 and 9;

FIG. 11 is a plan view of the lower plate according to the section taken along the XI-XI line of FIGS. 7 and 8;

12 is a cross-sectional view taken along the line XII-XII of FIG. 2 in accordance with a sixth embodiment of the present invention.

13 is a plan view of an additional plate corresponding to the cross-sectional view taken along the line XIII-XIII of FIG. 12,

14 is a plan view showing the jet splitter of the lower plate and the upper plate of the orifice element according to the seventh embodiment of the present invention.

FIG. 15 is a cross-sectional view taken along the line XV-XV of FIG. 2 in accordance with an eighth embodiment of the present invention.

16 is a cross-sectional view taken along line XVI-XVI of FIG. 14 according to a ninth embodiment of the present invention.

17 is a plan view of the bottom plate corresponding to the cross-sectional view taken along the lines XVII-XVII in FIGS. 15 and 16;

18 is a cross-sectional view taken along the line XVIII-XVIII of FIG. 14 in accordance with a tenth embodiment of the present invention.

19 is a cross-sectional view taken along the line XIX-XIX of FIG. 2 in accordance with an eleventh embodiment of the invention.

Explanation of symbols on the main parts of the drawings

1: longitudinal valve shaft

5: flow conduit

9: valve seal

10: valve seat surface

22: orifice element 24: upper plate

25: lower plate 36: feed bushing

38: annular supply space 68: inflow space

70: jet splitter

Claims (19)

An upper plate having one or more spraying orifices; And a lower plate arranged downstream from the upper plate and having a jet splitter separating the through opening and the through opening into two or more through openings. At least one injection orifice of the top plate is arranged to at least partially overlap at least two through openings and a jet splitter. The orifice element of claim 1, wherein the top plate and bottom plate are made of unitary stagnant silicon. The method of claim 1, wherein the lower plate has a first thickness. And the jet splitter also has a first thickness. 4. The apparatus of claim 3, wherein the two or more through openings have an inner boundary edge and an outer boundary edge defining a sidewall of the jet splitter, the inner boundary edge and the outer boundary edge being parallel to each other over a first thickness of the bottom plate. And the jet splitter has a rectangular cross section. 4. The two or more through openings of claim 3, each having a side cross section defined by two pyramidal cut sections, each minimum planar cross section of the two or more through openings being about half the first thickness of the bottom plate. An orifice element for media ejection, characterized in that it is laid down and defined by protrusions. 6. An orifice element according to claim 5, wherein the jet splitter has a rhombic cross section. 6. An orifice element according to claim 5, wherein the jet splitter has a hexagonal cross section. The method of claim 1. The two or more conduits are defined on the lower end face of the upper plate, the lower end faces facing the lower plate, and the two or more conduits start at the peripheral edge of the upper plate and towards the injection orifice of the upper plate. Extending inwardly, wherein the upper end faces of the conduit and the lower plate define an inlet space for the gas. 9. The orifice element of claim 8, wherein the top plate further comprises a web that spatially separates the conduit from the orifice of the top plate. 9. The orifice element of claim 8, wherein the conduit extends from the peripheral edges of the upper and lower plates to the ejection orifices of the upper plate. 6. The upper surface of the lower plate of claim 5, wherein the upper surface of the lower plate defines a gas supply conduit and faces the upper plate, each conduit having a first height of the lower plate protruding from the peripheral edge of the lower plate parallel to the jet splitter. An orifice element for media ejection, characterized in that it extends to an area of half the thickness. 12. The orifice element of claim 11, wherein two conduits opposite in diameter are aligned and each extend into at least two through openings. The method of claim 1, located downstream from the bottom plate. And an additional plate having an outlet orifice at least partially overlapping at least two through openings. 15. The conduit of claim 13 wherein the upper end face of the additional plate defines two or more conduits and faces the lower plate, the conduits extending inward starting from the perimeter of the additional plate and extending therein. And the lower surface of the lower plate defines an inlet space for the gas. 14. An orifice element according to claim 13, wherein the side cross section of the injection orifice of the top plate, the two or more through openings and the exit orifice on the additional plate is kept constant. 14. The side cross section of claim 13, wherein the injection orifice of the top plate, the two or more through openings, and the exit orifice on the additional plate are downstream. 9. The orifice element of claim 8, wherein said orifice, at least two through openings and conduits are formed by anisotropic etching. The orifice element of claim 2, wherein the bottom plate is etched simultaneously from two sides. A valve closure; A valve seat surface having a shape corresponding to the valve closure and located downstream from the valve closure, the valve seat surface comprising: an upper plate arranged downstream from the valve seat surface and facing the valve seat surface and having one or more injection orifices; A thin flat orifice element having one or more bottom plates additionally positioned downstream, wherein the one or more bottom plates are formed in two or more through openings and the bottom plate in the downstream direction to separate two or more through openings. An orifice element having a splitter, At least one injection orifice of the top plate at least partially overlaps at least two through openings and a jet splitter