CN113155003B - Sensor calibration method and system based on photoetching machine - Google Patents
Sensor calibration method and system based on photoetching machine Download PDFInfo
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- CN113155003B CN113155003B CN202110240313.4A CN202110240313A CN113155003B CN 113155003 B CN113155003 B CN 113155003B CN 202110240313 A CN202110240313 A CN 202110240313A CN 113155003 B CN113155003 B CN 113155003B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
Abstract
The invention provides a sensor calibration method and a sensor calibration system based on a photoetching machine, wherein the sensor calibration method comprises the following steps: installing a sensor on a workpiece table of the photoetching machine to measure the displacement of the workpiece table, converting the displacement into voltage, and converting the voltage into a digital signal through an analog-to-digital converter; before the sensor measures the displacement of the workpiece table, inputting voltage in a set range to the analog-to-digital converter to obtain a plurality of digital values corresponding to the voltage values, and fitting curves of the voltage values and the digital values by adopting a curve fitting method; the sensor measures the displacement of the workpiece table, converts the displacement into a digital signal through an analog-to-digital converter, and carries out translation conversion on the digital signal; calibrating the digital signal through the curve; carrying out overflow value processing on the calibrated digital signal; and carrying out inverse translation transformation on the digital signal subjected to overflow value processing, and taking the obtained digital signal as an original signal. The method and the system can be used for rapidly calibrating the sensor data and accurately processing the critical value.
Description
Technical Field
The invention relates to the technical field of semiconductor equipment, in particular to a sensor calibration method and system based on a photoetching machine.
Background
Because the system is complex, the lithography machine double-workpiece table has high precision requirement, and a large number of sensors are arranged to monitor various indexes of the system. The sensor signal is greatly influenced by the system environment and the actual use situation, so that the measurement accuracy of the sensor needs to be ensured through calibration.
The eddy current sensor adopted by the invention is applied to a double-workpiece stage system of a photoetching machine, and the system has higher precision requirement, so that the sensor needs to be calibrated to obtain higher precision. The data of the sensor is transmitted to the FPGA after AD sampling, the FPGA directly performs calibration and critical value processing on the sensor data, converts the sensor data into a voltage value, and performs operations such as threshold judgment. Since the first bit of the count value of the sensor is a sign bit, 0 represents a positive voltage, and 1 represents a negative voltage, the corresponding relation between the count value and the voltage value is segmented, and jump from the positive voltage maximum value to the negative voltage maximum value is generated at the positions from 0x1FFFF to 0x20000 of the count value, so that data abnormality is generated, and the system performance is seriously affected. If the data are calibrated in sections, two sets of calibration data are needed for the same sensor, which is time-consuming.
Disclosure of Invention
In order to solve the problems in the prior art and meet the future development demands in the field, the invention provides a sensor calibration method based on a photoetching machine, which comprises the following steps:
installing a sensor on a workpiece table of the photoetching machine, wherein the sensor is used for measuring the displacement of the workpiece table, converting the displacement into voltage by the sensor, and converting the voltage into a digital signal by an analog-to-digital converter;
before the sensor measures the displacement of the workpiece table, inputting voltage in a set range to the analog-to-digital converter, obtaining a plurality of digital values corresponding to the voltage values, and fitting curves of the voltage values and the digital values by adopting a curve fitting method;
the sensor measures the displacement of the workpiece table, converts the displacement into a digital signal through the analog-to-digital converter, and carries out translation conversion on the digital signal;
calibrating the digital signal through the curve;
carrying out overflow value processing on the calibrated digital signal;
and carrying out inverse translation transformation on the digital signal subjected to overflow value processing, and taking the obtained digital signal as an original signal.
Optionally, the translating transformation is performed on the digital signal, specifically:
and subtracting a set value from the digital signal to obtain an updated digital signal, wherein the set value enables the updated digital signal to be in a digital signal range corresponding to the maximum negative voltage value and the maximum positive voltage value.
Optionally, the digital signal corresponding to the maximum positive voltage of the sensor is a first voltage, the digital signal corresponding to the maximum negative voltage is a second voltage, and the set value is a third voltage.
Optionally, the calibrating the digital signal through the curve specifically includes:
fitting a straight line of the voltage value and the digital value by adopting a curve fitting method;
and obtaining a voltage value corresponding to the updated digital signal according to the slope and intercept of the straight line fitted before the displacement of the workpiece table is measured by the sensor.
Optionally, the overflow value processing is performed on the calibrated digital signal, specifically:
setting a voltage value corresponding to the updated digital signal exceeding the positive voltage maximum value as the positive voltage maximum value;
and setting the voltage value corresponding to the updated digital signal smaller than the negative voltage maximum value as the negative voltage maximum value.
Optionally, before the sensor measures the displacement of the workpiece table, the voltage input to the analog-to-digital converter in the set range is specifically: the voltage of the set range is input to the analog-to-digital converter or the like.
Optionally, the set range is a negative voltage maximum to a positive voltage maximum of the sensor.
Optionally, the method further comprises:
judging whether the voltage value corresponding to the original signal exceeds a set voltage threshold value or not;
if the set voltage threshold is exceeded, stopping the workpiece table;
if the set voltage threshold is not exceeded, the sensor continues to measure the stage displacement.
According to another aspect of the present invention, there is provided a sensor calibration system based on a lithographic apparatus, comprising:
the sensor converts the measured displacement of the workpiece table into voltage and into a digital signal through the analog-to-digital converter;
a processor for performing translation conversion and calibration on the digital signal, performing overflow value processing on the calibrated digital signal, performing inverse translation conversion to convert the digital signal into an original signal,
wherein the processor comprises:
the first calibration module inputs voltage in a set range to the analog-to-digital converter before the sensor measures the displacement of the workpiece table, a plurality of digital values corresponding to the voltage values are obtained, and a curve fitting method is adopted to fit curves of the voltage values and the digital values;
the translation conversion module is used for measuring the displacement of the workpiece table by the sensor, converting the displacement into a digital signal through the analog-to-digital converter and carrying out translation conversion on the digital signal
The second calibration module is used for calibrating the digital signal through the curve obtained by the first calibration module;
the overflow value processing module is used for processing the overflow value of the digital signal calibrated by the second calibration module;
and the inverse translation conversion module is used for performing inverse translation conversion on the digital signal processed by the overflow value processing module, and the obtained digital signal is used as an original signal.
Optionally, the processor further comprises:
the threshold comparison module is used for judging whether the voltage value corresponding to the original signal exceeds a set voltage threshold value, and if the voltage value exceeds the set voltage threshold value, sending a shutdown signal to the workpiece table; if the set voltage threshold is not exceeded, a signal is sent to the sensor, and the sensor continuously measures the displacement of the workpiece table
The invention provides a sensor calibration and critical value processing method and system based on a photoetching machine, which aim at the situation that jump abnormality is possibly generated in sensor calibration data in a double workpiece stage of the photoetching machine, and can be used for rapidly calibrating the sensor data and accurately processing the critical value, so that the control precision and stability of the double workpiece stage control system are improved.
Drawings
FIG. 1 is a flow chart of a sensor calibration method based on a lithography machine according to the present invention;
FIG. 2 is a flow chart of one embodiment of a sensor calibration method based on a lithography machine according to the present invention;
FIG. 3 is a block diagram of a sensor calibration system based on a lithography machine according to the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
FIG. 1 is a flowchart of a sensor calibration method based on a lithography machine according to the present invention, as shown in FIG. 1, the sensor calibration method includes:
step S1, installing a sensor on a workpiece table of a photoetching machine, wherein the sensor is used for measuring the displacement of the workpiece table, converting the displacement into voltage by the sensor, and converting the voltage into a digital signal by an analog-to-digital converter;
step S2, before the sensor measures the displacement of the workpiece table, inputting voltage in a set range to the analog-to-digital converter to obtain a plurality of digital values corresponding to the voltage values, and fitting curves of the voltage values and the digital values by adopting a curve fitting method;
step S3, the sensor measures the displacement of the workpiece table, converts the displacement into a digital signal through the analog-to-digital converter, and carries out translation conversion on the digital signal;
s4, calibrating the digital signal through the curve;
s5, carrying out overflow value processing on the calibrated digital signal;
and S6, performing inverse translation transformation on the digital signal subjected to overflow value processing, and taking the obtained digital signal as an original signal.
In one embodiment, in step S3, the translating transformation is performed on the digital signal, specifically:
and subtracting a set value from the digital signal to obtain an updated digital signal, wherein the set value enables the updated digital signal to be in a digital signal range corresponding to the maximum negative voltage value and the maximum positive voltage value.
Optionally, the digital signal corresponding to the maximum positive voltage of the sensor is a first voltage, the digital signal corresponding to the maximum negative voltage is a second voltage, the set value is a third voltage, for example, the first voltage is 0x1FFFF, the second voltage is-0 x20000, and the third voltage is 0x40000.
In one embodiment, in step S4, the calibrating the digital signal through the curve is specifically:
fitting a straight line of the voltage value and the digital value by adopting a curve fitting method;
and obtaining a voltage value corresponding to the updated digital signal according to the slope and intercept of the straight line fitted before the displacement of the workpiece table is measured by the sensor.
In one embodiment, in step S5, the overflow value processing is performed on the calibrated digital signal, specifically:
setting a voltage value corresponding to the updated digital signal exceeding the positive voltage maximum value as the positive voltage maximum value;
and setting the voltage value corresponding to the updated digital signal smaller than the negative voltage maximum value as the negative voltage maximum value.
In one embodiment, the voltage of the set range is input to the analog-to-digital converter, specifically, the voltage of the set range is input to the analog-to-digital converter or the like before the sensor measures the displacement of the workpiece stage.
In one embodiment, the set range is a negative voltage maximum to a positive voltage maximum of the sensor.
In one embodiment, the lithography machine-based sensor calibration method further comprises:
judging whether the voltage value corresponding to the original signal exceeds a set voltage threshold value or not;
if the set voltage threshold is exceeded, stopping the workpiece table;
if the set voltage threshold is not exceeded, the sensor continues to measure the stage displacement.
In one embodiment of the present invention, as shown in fig. 2, the sensor is an eddy current sensor, and the voltage value output by the eddy current sensor corresponds to the count value (digital value) obtained by sampling by the analog-to-digital converter ADC, optionally, the eddy current sensor outputs a voltage in the range of-10V to +10v, the count value is an 18-bit binary number, 0x00000 to 0x1FFFF corresponds to 0 to 10V, and 0x20000 to 0x3FFFF corresponds to-10V to 0V.
After the workpiece table is driven by the motor and the control system to execute the movement, displacement can be generated in three directions X, Y, Z. After the displacement is measured by the eddy current sensor, an analog voltage signal is input into an AI channel of the bottom plate card, AD conversion is carried out on the analog signal by the bottom plate card (the function of an analog-to-digital converter is realized through the plate card), and the analog signal is converted into a digital signal A to be stored in a register of the FPGA. Firstly, carrying out translation transformation and calibration on an initial digital signal A, then carrying out overflow value processing on calibrated data, and finally, carrying out inverse translation transformation to convert the signal into an original signal.
The calibration method of the eddy current sensor based on the photoetching machine comprises the following steps:
the eddy current sensor measures the stage position and transmits an analog signal to the bottom plate card through the AI port. An AD converter (analog-to-digital converter) in the bottom board card samples the analog signal into an 18-bit original digital signal A and stores the 18-bit original digital signal A into a register of the FPGA;
judging whether the original digital signal A is larger than 0x1FFFF;
and subtracting 0x40000 from all data greater than 0x1FFFF in the original digital signal A to obtain a group of new digital signals B, wherein the value range of B is-0 x20000 to +0x1FFFF.
Voltages of-10V to +10v are sequentially equi-differentially input to the AI channel (e.g., using multimeter direction), and voltages of-10V to +10v are sequentially equi-differentially input to the AI channel, each voltage corresponding to a count value. And (3) measuring a corresponding count value, fitting a voltage value-count value straight line through a least square method, setting a slope as a, an intercept as b, setting a vertical axis as the voltage value, and setting a horizontal axis as the count value before calibration.
Substituting the digital signal B into the linear expression gives a voltage value c=a·b+b. For the part of the voltage value C greater than +10V, making it equal to +10V; for the portion of the voltage value C smaller than-10V, it is made equal to-10V.
And carrying out voltage threshold judgment on the voltage value obtained after the calibration and the critical value processing. If the voltage threshold is exceeded, stopping the machine; otherwise, turning to the first step, and circularly executing the calibration method.
FIG. 3 is a schematic diagram of a block diagram of a sensor calibration system based on a lithography machine according to the present invention, and as shown in FIG. 3, the sensor calibration system 10 based on a lithography machine includes:
the analog-to-digital converter 1, the sensor converts the displacement of the measured workpiece table into voltage, and the voltage is converted into a digital signal through the analog-to-digital converter;
the processor 2 carries out translation conversion and calibration on the digital signals, carries out overflow value processing on the calibrated digital signals, then carries out inverse translation conversion to convert the digital signals into original signals,
wherein the processor 2 comprises:
the first calibration module 21 inputs a voltage in a set range to the analog-to-digital converter before the sensor measures the displacement of the workpiece table, obtains a plurality of digital values corresponding to the voltage values, and fits a curve of the voltage values and the digital values by adopting a curve fitting method;
the translation conversion module 22 is used for measuring the displacement of the workpiece table by the sensor, converting the displacement into a digital signal by the analog-to-digital converter and performing translation conversion on the digital signal
The second calibration module 23 calibrates the digital signal through the curve obtained by the first calibration module;
the overflow value processing module 24 is used for processing the overflow value of the digital signal calibrated by the second calibration module;
the inverse translation conversion module 25 performs inverse translation conversion on the digital signal processed by the overflow value processing module, and the obtained digital signal is used as an original signal.
In one embodiment, the processor further comprises:
the threshold comparison module 26 is used for judging whether the voltage value corresponding to the original signal exceeds a set voltage threshold value, and sending a shutdown signal to the workpiece table if the voltage value exceeds the set voltage threshold value; if the set voltage threshold is not exceeded, a signal is sent to the sensor, which continues to measure the stage displacement.
Of course, the present invention is capable of other various embodiments and its several details are capable of modification in accordance with the present invention by one skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (9)
1. A sensor calibration method based on a photoetching machine is characterized by comprising the following steps:
installing a sensor on a workpiece table of the photoetching machine, wherein the sensor is used for measuring the displacement of the workpiece table, converting the displacement into voltage by the sensor, and converting the voltage into a digital signal by an analog-to-digital converter;
before the sensor measures the displacement of the workpiece table, inputting voltage in a set range to the analog-to-digital converter, obtaining a plurality of digital values corresponding to the voltage values, and fitting curves of the voltage values and the digital values by adopting a curve fitting method;
the sensor measures the displacement of the workpiece table, converts the displacement into a digital signal through the analog-to-digital converter, and carries out translation conversion on the digital signal;
calibrating the digital signal through the curve;
carrying out overflow value processing on the calibrated digital signal;
performing inverse translation transformation on the digital signal after overflow value processing to obtain a digital signal serving as an original signal,
the overflow value processing is carried out on the calibrated digital signal, and specifically comprises the following steps:
setting a voltage value corresponding to the updated digital signal exceeding the positive voltage maximum value as the positive voltage maximum value;
and setting the voltage value corresponding to the updated digital signal smaller than the negative voltage maximum value as the negative voltage maximum value.
2. The sensor calibration method based on the lithography machine according to claim 1, wherein the translating transformation of the digital signal is specifically:
and subtracting a set value from the digital signal to obtain an updated digital signal, wherein the set value enables the updated digital signal to be in a digital signal range corresponding to the maximum negative voltage value and the maximum positive voltage value.
3. The method for calibrating a sensor based on a lithography machine according to claim 2, wherein the digital signal corresponding to the positive voltage maximum value of the sensor is a first voltage, the digital signal corresponding to the negative voltage maximum value is a second voltage, and the set value is a third voltage.
4. The method for calibrating a sensor based on a lithography machine according to claim 1, wherein the calibrating the digital signal by the curve is specifically:
fitting a straight line of the voltage value and the digital value by adopting a curve fitting method;
and obtaining a voltage value corresponding to the updated digital signal according to the slope and intercept of the straight line fitted before the displacement of the workpiece table is measured by the sensor.
5. The method for calibrating a sensor based on a lithography machine according to claim 1, wherein the inputting the voltage of the set range to the analog-to-digital converter before the sensor measures the displacement of the stage is specifically: the voltage of the set range is input to the analog-to-digital converter or the like.
6. The method of claim 1, wherein the set range is a negative voltage maximum to a positive voltage maximum of the sensor.
7. The method of calibrating a sensor based on a lithography machine according to claim 1, further comprising:
judging whether the voltage value corresponding to the original signal exceeds a set voltage threshold value or not;
if the set voltage threshold is exceeded, stopping the workpiece table;
if the set voltage threshold is not exceeded, the sensor continues to measure the stage displacement.
8. A sensor calibration system based on a lithography machine, comprising:
the sensor converts the measured displacement of the workpiece table into voltage and into a digital signal through the analog-to-digital converter;
a processor for performing translation conversion and calibration on the digital signal, performing overflow value processing on the calibrated digital signal, performing inverse translation conversion to convert the digital signal into an original signal,
wherein the processor comprises:
the first calibration module inputs voltage in a set range to the analog-to-digital converter before the sensor measures the displacement of the workpiece table, a plurality of digital values corresponding to the voltage values are obtained, and a curve fitting method is adopted to fit curves of the voltage values and the digital values;
the translation conversion module is used for measuring the displacement of the workpiece table by the sensor, converting the displacement into a digital signal through the analog-to-digital converter and carrying out translation conversion on the digital signal
The second calibration module is used for calibrating the digital signal through the curve obtained by the first calibration module;
the overflow value processing module is used for carrying out overflow value processing on the digital signal calibrated by the second calibration module and setting the voltage value corresponding to the updated digital signal exceeding the positive voltage maximum value as the positive voltage maximum value;
setting a voltage value corresponding to the updated digital signal smaller than the negative voltage maximum value as the negative voltage maximum value;
and the inverse translation conversion module is used for performing inverse translation conversion on the digital signal processed by the overflow value processing module, and the obtained digital signal is used as an original signal.
9. The lithography machine-based sensor calibration system of claim 8, wherein the processor further comprises:
the threshold comparison module is used for judging whether the voltage value corresponding to the original signal exceeds a set voltage threshold value, and if the voltage value exceeds the set voltage threshold value, sending a shutdown signal to the workpiece table; if the set voltage threshold is not exceeded, a signal is sent to the sensor, which continues to measure the stage displacement.
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| CN202110240313.4A CN113155003B (en) | 2021-03-04 | 2021-03-04 | Sensor calibration method and system based on photoetching machine |
| PCT/CN2022/077643 WO2022183965A1 (en) | 2021-03-04 | 2022-02-24 | Sensor calibration method and system based on lithography machine |
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| CN202110240313.4A CN113155003B (en) | 2021-03-04 | 2021-03-04 | Sensor calibration method and system based on photoetching machine |
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| CN113155003B true CN113155003B (en) | 2023-05-16 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH0652869B2 (en) * | 1989-04-27 | 1994-07-06 | 日本コロムビア株式会社 | Digital / analog converter |
| CN102571088B (en) * | 2010-12-31 | 2014-06-18 | 国民技术股份有限公司 | Overflow judging circuit for pipelined analog-to-digital converter |
| ES2845748T3 (en) * | 2013-05-29 | 2021-07-27 | Icu Medical Inc | Infusion system and method of use that prevent oversaturation of an analog-digital converter |
| JP2015154285A (en) * | 2014-02-14 | 2015-08-24 | 国立研究開発法人科学技術振興機構 | Analog/digital converter and method thereof |
| US10505557B2 (en) * | 2016-02-25 | 2019-12-10 | Sony Corporation | Analog-to-digital converter, electronic device, and method of controlling analog-to-digital converter |
| CN107181489B (en) * | 2016-03-11 | 2020-06-30 | 北京君正集成电路股份有限公司 | Analog-to-digital conversion calibration method and device |
| CN105827241A (en) * | 2016-03-17 | 2016-08-03 | 苏州易瑞得电子科技有限公司 | Intelligent signal control method and controller |
| TWI657666B (en) * | 2017-10-31 | 2019-04-21 | 聯陽半導體股份有限公司 | Analog-to-digital converter and calibration method thereof and callbration apparatus |
| CN108306645A (en) * | 2018-01-19 | 2018-07-20 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Sensor digital collection capacity acquisition methods, apparatus and system |
| JP2019176314A (en) * | 2018-03-28 | 2019-10-10 | 株式会社オートネットワーク技術研究所 | Correction device for ad converter and ad conversion device |
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