CN113155003A - Sensor calibration method and system based on photoetching machine - Google Patents
Sensor calibration method and system based on photoetching machine Download PDFInfo
- Publication number
- CN113155003A CN113155003A CN202110240313.4A CN202110240313A CN113155003A CN 113155003 A CN113155003 A CN 113155003A CN 202110240313 A CN202110240313 A CN 202110240313A CN 113155003 A CN113155003 A CN 113155003A
- Authority
- CN
- China
- Prior art keywords
- voltage
- digital signal
- sensor
- value
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
Abstract
The invention provides a sensor calibration method and a system based on a photoetching machine, which comprises the following steps: mounting a sensor on a workpiece table of a photoetching machine to measure the displacement of the workpiece table, converting the displacement into voltage, and converting the voltage into a digital signal through an analog/digital converter; before the sensor measures the displacement of the workpiece table, inputting a voltage in a set range to the analog-digital converter to obtain a plurality of digital values corresponding to a plurality of voltage values, and fitting a curve of the voltage values and the digital values by adopting a curve fitting method; the sensor measures the displacement of the workpiece platform, converts the displacement into a digital signal through an analog/digital converter, and performs translation transformation on the digital signal; calibrating the digital signal through the curve; carrying out overflow value processing on the calibrated digital signal; and performing inverse translation transformation on the digital signal subjected to overflow value processing to obtain a digital signal serving as an original signal. The method and the system can be used for quickly calibrating the sensor data and correctly processing the critical value.
Description
Technical Field
The invention relates to the technical field of semiconductor equipment, in particular to a sensor calibration method and system based on a photoetching machine.
Background
The dual-workpiece table of the photoetching machine is complex in system and high in precision requirement, and a large number of sensors are arranged to monitor various indexes of the system. The sensor signal is greatly influenced by the system environment and the actual use scene, so the measurement accuracy of the sensor needs to be ensured by calibration.
The eddy current sensor adopted by the invention is applied to a double-workpiece-table system of a photoetching machine, and the system has higher precision requirement, so that the sensor needs to be calibrated to obtain higher precision. And the data of the sensor is subjected to AD sampling and then transmitted to the FPGA, and the FPGA directly performs calibration and critical value processing on the data of the sensor, converts the data into a voltage value, and performs operations such as threshold judgment and the like. Since the first bit of the sensor count value is the sign bit, 0 represents a positive voltage, and 1 represents a negative voltage, the correspondence between the count value and the voltage value is segmented, and jumps from the maximum value of the positive voltage to the maximum value of the negative voltage occur from 0x1FFFF to 0x20000 of the count value, thereby generating data anomalies and seriously affecting the system performance. And if the data is calibrated in sections, two sets of calibration data are needed for the same sensor, which is time-consuming.
Disclosure of Invention
In order to solve the problems in the prior art and meet the future development requirements in the field, the invention provides a sensor calibration method based on a photoetching machine, which comprises the following steps:
installing a sensor on a workpiece table of the photoetching machine, wherein the sensor is used for measuring the displacement of the workpiece table, converting the displacement into voltage by the sensor, and converting the voltage into a digital signal by an analog-to-digital converter;
before the sensor measures the displacement of the workpiece table, inputting a voltage in a set range to the analog-to-digital converter to obtain a plurality of digital values corresponding to a plurality of voltage values, and fitting a curve of the voltage values and the digital values by adopting a curve fitting method;
the sensor measures the displacement of the workpiece table, converts the displacement into a digital signal through the analog-to-digital converter, and performs translation conversion on the digital signal;
calibrating the digital signal through the curve;
carrying out overflow value processing on the calibrated digital signal;
and performing inverse translation transformation on the digital signal subjected to overflow value processing to obtain a digital signal serving as an original signal.
Optionally, the performing translation transformation on the digital signal specifically includes:
and subtracting a set value from the digital signal to obtain an updated digital signal, wherein the set value enables the updated digital signal to be in a digital signal range corresponding to the maximum value of the negative voltage and the maximum value of the positive voltage.
Optionally, the digital signal corresponding to the maximum positive voltage of the sensor is a first voltage, the digital signal corresponding to the maximum negative voltage of the sensor is a second voltage, and the set value is a third voltage.
Optionally, the calibrating the digital signal by the curve specifically includes:
fitting a straight line of the voltage value and the digital value by adopting a curve fitting method;
and obtaining a voltage value corresponding to the updated digital signal according to the slope and intercept of the fitted straight line before the displacement of the workpiece table is measured by the sensor.
Optionally, the performing overflow value processing on the calibrated digital signal specifically includes:
setting the voltage value corresponding to the updated digital signal exceeding the positive voltage maximum value as the positive voltage maximum value;
and setting the voltage value corresponding to the updated digital signal smaller than the maximum negative voltage value as the maximum negative voltage value.
Optionally, before the sensor measures the displacement of the workpiece stage, the inputting the voltage of the set range to the analog-to-digital converter specifically includes: and inputting the voltage in a set range to the analog-to-digital converter arithmetic difference.
Optionally, the set range is from a maximum of negative voltage to a maximum of positive voltage of the sensor.
Optionally, the method further comprises:
judging whether the voltage value corresponding to the original signal exceeds a set voltage threshold value or not;
if the voltage exceeds the set voltage threshold, the workpiece table is stopped;
and if the set voltage threshold value is not exceeded, the sensor continues to measure the displacement of the workpiece table.
According to another aspect of the present invention, there is provided a sensor calibration system based on a lithography machine, including:
the analog-to-digital converter is used for converting the measured displacement of the workpiece table into voltage and converting the voltage into a digital signal through the analog-to-digital converter;
the processor performs translation conversion and calibration on the digital signal, performs overflow value processing on the calibrated digital signal, performs inverse translation conversion on the digital signal to convert the digital signal into an original signal,
wherein the processor comprises:
the first calibration module is used for inputting voltage in a set range to the analog-to-digital converter before the sensor measures the displacement of the workpiece table to obtain a plurality of digital values corresponding to the plurality of voltage values, and fitting a curve of the voltage values and the digital values by adopting a curve fitting method;
the translation conversion module is used for measuring the displacement of the workpiece table by the sensor, converting the displacement into a digital signal by the analog-to-digital converter and performing translation conversion on the digital signal
The second calibration module calibrates the digital signal through the curve obtained by the first calibration module;
the overflow value processing module is used for processing the overflow value of the digital signal calibrated by the second calibration module;
and the inverse translation conversion module is used for performing inverse translation conversion on the digital signal processed by the overflow value processing module to obtain a digital signal as an original signal.
Optionally, the processor further comprises:
the threshold comparison module is used for judging whether the voltage value corresponding to the original signal exceeds a set voltage threshold or not, and sending a stop signal to the workpiece platform if the voltage value exceeds the set voltage threshold; if the voltage does not exceed the set voltage threshold, a signal is sent to the sensor, and the sensor continues to measure the displacement of the workpiece table
The sensor calibration method and system based on the photoetching machine provided by the invention can be used for rapidly calibrating the sensor data and correctly processing the critical value aiming at the situation that the sensor calibration data is likely to generate jumping abnormity in the double workpiece tables of the photoetching machine, so that the control precision and stability of the double workpiece table control system are improved.
Drawings
FIG. 1 is a flow chart of a sensor calibration method based on a lithography machine according to the present invention;
FIG. 2 is a flowchart of an embodiment of a method for calibrating a sensor based on a lithography machine according to the present invention;
FIG. 3 is a block diagram of a sensor calibration system based on a lithography machine according to the present invention.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Fig. 1 is a flowchart of a sensor calibration method based on a lithography machine according to the present invention, as shown in fig. 1, the sensor calibration method includes:
step S1, a sensor is arranged on a workpiece table of the photoetching machine, the sensor is used for measuring the displacement of the workpiece table, the sensor converts the displacement into voltage, and the voltage is converted into a digital signal through an analog-to-digital converter;
step S2, before the sensor measures the displacement of the work piece platform, inputting the voltage of the set range to the analog-digital converter, obtaining a plurality of digital values corresponding to a plurality of voltage values, and fitting the curve of the voltage values and the digital values by adopting a curve fitting method;
step S3, the sensor measures the displacement of the work piece platform, and converts the displacement into digital signals through the analog-to-digital converter, and the digital signals are translated;
step S4, calibrating the digital signal through the curve;
step S5, overflow value processing is carried out on the calibrated digital signal;
and step S6, performing inverse translation transformation on the digital signal after overflow value processing, and taking the obtained digital signal as an original signal.
In one embodiment, in step S3, the performing translation transformation on the digital signal specifically includes:
and subtracting a set value from the digital signal to obtain an updated digital signal, wherein the set value enables the updated digital signal to be in a digital signal range corresponding to the maximum value of the negative voltage and the maximum value of the positive voltage.
Optionally, the digital signal corresponding to the maximum positive voltage of the sensor is a first voltage, the digital signal corresponding to the maximum negative voltage is a second voltage, and the setting value is a third voltage, for example, the first voltage is 0x1FFFF, the second voltage is-0 x20000, and the third voltage is 0x 40000.
In one embodiment, in step S4, the calibrating the digital signal by the curve includes:
fitting a straight line of the voltage value and the digital value by adopting a curve fitting method;
and obtaining a voltage value corresponding to the updated digital signal according to the slope and intercept of the fitted straight line before the displacement of the workpiece table is measured by the sensor.
In one embodiment, in step S5, the overflow value processing is performed on the calibrated digital signal, specifically:
setting the voltage value corresponding to the updated digital signal exceeding the positive voltage maximum value as the positive voltage maximum value;
and setting the voltage value corresponding to the updated digital signal smaller than the maximum negative voltage value as the maximum negative voltage value.
In one embodiment, before the sensor measures the displacement of the workpiece table, a voltage with a set range is input to the analog-to-digital converter, specifically, a voltage with a set range is input to the analog-to-digital converter in an equal difference mode.
In one embodiment, the set range is from a maximum negative voltage to a maximum positive voltage of the sensor.
In one embodiment, the method for calibrating a sensor based on a lithography machine further comprises:
judging whether the voltage value corresponding to the original signal exceeds a set voltage threshold value or not;
if the voltage exceeds the set voltage threshold, the workpiece table is stopped;
and if the set voltage threshold value is not exceeded, the sensor continues to measure the displacement of the workpiece table.
In one embodiment of the present invention, as shown in fig. 2, the sensor is an eddy current sensor, and the eddy current sensor outputs a corresponding relationship between a voltage value and a count value (digital value) sampled by the analog-to-digital converter ADC, and optionally, the eddy current sensor outputs a voltage in a range of-10V to +10V, the count value is an 18-bit binary number, 0x00000 to 0x1FFFF corresponds to 0 to 10V, and 0x20000 to 0x3FFFF corresponds to-10V to 0V.
After the workpiece table performs movement under the drive of the motor and the control system, the workpiece table generates displacement in X, Y, Z three directions. After the eddy current sensor measures the displacement, an analog voltage signal is input into a bottom board card AI channel, the bottom board card performs AD conversion on the analog signal (the function of an analog-to-digital converter is realized through the board card), and the analog signal is converted into a digital signal A which is stored in a register of the FPGA. Firstly, carrying out translation transformation and calibration on an initial digital signal A, then carrying out overflow value processing on calibrated data, and finally carrying out inverse translation transformation to convert the signal into an original signal.
The calibration method of the eddy current sensor based on the photoetching machine comprises the following steps:
the eddy current sensor measures the position of the workpiece table and transmits the analog signal to the bottom board card through the AI port. An AD converter (analog-to-digital converter) in the bottom board card samples an analog signal into an 18-bit original digital signal A, and stores the signal A into a register of the FPGA;
judging whether the original digital signal A is larger than 0x1 FFFF;
and (3) subtracting 0x40000 from all the data which is larger than 0x1FFFF in the original digital signal A to obtain a group of new digital signals B, wherein the value range of B is-0 x20000 to +0x1 FFFF.
Voltages in-10V to +10V are sequentially isostatically input to the AI channel (e.g., using a multimeter), and voltages in-10V to +10V are sequentially isostatically input to the AI channel, each voltage corresponding to a count value. And measuring a corresponding count value, fitting a voltage value-count value straight line by a least square method, and setting the slope as a, the intercept as b, the vertical axis as the voltage value and the horizontal axis as the pre-calibration count value.
The digital signal B is substituted into the linear expression, and the voltage value C becomes a · B + B. For the part of the voltage value C which is larger than +10V, the voltage value C is equal to + 10V; for the part of the voltage value C smaller than-10V, it is made equal to-10V.
And judging the voltage threshold value of the voltage value obtained after the calibration and the critical value processing. If the voltage threshold is exceeded, stopping the machine; otherwise, turning to the first step, and circularly executing the calibration method.
Fig. 3 is a schematic diagram of a block diagram of the sensor calibration system based on the lithography machine according to the present invention, and as shown in fig. 3, the sensor calibration system 10 based on the lithography machine includes:
the device comprises an analog-to-digital converter 1, a sensor and a controller, wherein the sensor converts the measured displacement of a workpiece table into voltage and converts the voltage into a digital signal through the analog-to-digital converter;
the processor 2 carries out translation transformation and calibration on the digital signal, carries out overflow value processing on the calibrated digital signal, carries out inverse translation transformation to convert the digital signal into an original signal,
wherein the processor 2 comprises:
the first calibration module 21 is configured to input a voltage in a set range to the analog-to-digital converter before the sensor measures the displacement of the workpiece stage, obtain a plurality of digital values corresponding to the plurality of voltage values, and fit a curve of the voltage values and the digital values by using a curve fitting method;
a translation conversion module 22, wherein the sensor measures the displacement of the workpiece table, converts the displacement into a digital signal through an analog-to-digital converter, and performs translation conversion on the digital signal
The second calibration module 23 calibrates the digital signal according to the curve obtained by the first calibration module;
the overflow value processing module 24 is used for processing the overflow value of the digital signal calibrated by the second calibration module;
and an inverse translation conversion module 25, which performs inverse translation conversion on the digital signal processed by the overflow value processing module, and takes the obtained digital signal as an original signal.
In one embodiment, the processor further comprises:
the threshold comparison module 26 is used for judging whether the voltage value corresponding to the original signal exceeds a set voltage threshold, and if the voltage value exceeds the set voltage threshold, sending a stop signal to the workpiece table; and if the voltage does not exceed the set voltage threshold, sending a signal to the sensor, and continuously measuring the displacement of the workpiece table by the sensor.
The present invention is capable of other embodiments, and various changes and modifications can be made by one skilled in the art without departing from the spirit and scope of the invention.
Claims (10)
1. A sensor calibration method based on a photoetching machine is characterized by comprising the following steps:
installing a sensor on a workpiece table of the photoetching machine, wherein the sensor is used for measuring the displacement of the workpiece table, converting the displacement into voltage by the sensor, and converting the voltage into a digital signal by an analog-to-digital converter;
before the sensor measures the displacement of the workpiece table, inputting a voltage in a set range to the analog-to-digital converter to obtain a plurality of digital values corresponding to a plurality of voltage values, and fitting a curve of the voltage values and the digital values by adopting a curve fitting method;
the sensor measures the displacement of the workpiece table, converts the displacement into a digital signal through the analog-to-digital converter, and performs translation conversion on the digital signal;
calibrating the digital signal through the curve;
carrying out overflow value processing on the calibrated digital signal;
and performing inverse translation transformation on the digital signal subjected to overflow value processing to obtain a digital signal serving as an original signal.
2. The method for calibrating a sensor according to claim 1, wherein the translation transformation of the digital signal is performed by:
and subtracting a set value from the digital signal to obtain an updated digital signal, wherein the set value enables the updated digital signal to be in a digital signal range corresponding to the maximum value of the negative voltage and the maximum value of the positive voltage.
3. The method for calibrating a sensor according to claim 2, wherein the digital signal corresponding to the maximum positive voltage of the sensor is a first voltage, the digital signal corresponding to the maximum negative voltage of the sensor is a second voltage, and the set value is a third voltage.
4. The method for calibrating a sensor based on a lithography machine according to claim 1, wherein the calibration of the digital signal by the curve is specifically:
fitting a straight line of the voltage value and the digital value by adopting a curve fitting method;
and obtaining a voltage value corresponding to the updated digital signal according to the slope and intercept of the fitted straight line before the displacement of the workpiece table is measured by the sensor.
5. The method for calibrating a sensor based on a lithography machine according to claim 4, wherein the overflow value processing is performed on the calibrated digital signal, specifically:
setting the voltage value corresponding to the updated digital signal exceeding the positive voltage maximum value as the positive voltage maximum value;
and setting the voltage value corresponding to the updated digital signal smaller than the maximum negative voltage value as the maximum negative voltage value.
6. The method for calibrating a sensor based on a lithography machine according to claim 1, wherein before the sensor measures the displacement of the stage, the inputting of the voltage of the set range to the analog-to-digital converter specifically comprises: and inputting the voltage in a set range to the analog-to-digital converter arithmetic difference.
7. The method according to claim 1, wherein the setting range is from a maximum value of negative voltage to a maximum value of positive voltage of the sensor.
8. The method for calibrating a sensor based on a lithography machine according to claim 1, further comprising:
judging whether the voltage value corresponding to the original signal exceeds a set voltage threshold value or not;
if the voltage exceeds the set voltage threshold, the workpiece table is stopped;
and if the set voltage threshold value is not exceeded, the sensor continues to measure the displacement of the workpiece table.
9. A sensor calibration system based on a photoetching machine is characterized by comprising:
the analog-to-digital converter is used for converting the measured displacement of the workpiece table into voltage and converting the voltage into a digital signal through the analog-to-digital converter;
the processor performs translation conversion and calibration on the digital signal, performs overflow value processing on the calibrated digital signal, performs inverse translation conversion on the digital signal to convert the digital signal into an original signal,
wherein the processor comprises:
the first calibration module is used for inputting voltage in a set range to the analog-to-digital converter before the sensor measures the displacement of the workpiece table to obtain a plurality of digital values corresponding to the plurality of voltage values, and fitting a curve of the voltage values and the digital values by adopting a curve fitting method;
the translation conversion module is used for measuring the displacement of the workpiece table by the sensor, converting the displacement into a digital signal by the analog-to-digital converter and performing translation conversion on the digital signal
The second calibration module calibrates the digital signal through the curve obtained by the first calibration module;
the overflow value processing module is used for processing the overflow value of the digital signal calibrated by the second calibration module;
and the inverse translation conversion module is used for performing inverse translation conversion on the digital signal processed by the overflow value processing module to obtain a digital signal as an original signal.
10. The lithography machine based sensor calibration system according to claim 9, wherein said processor further comprises:
the threshold comparison module is used for judging whether the voltage value corresponding to the original signal exceeds a set voltage threshold or not, and sending a stop signal to the workpiece platform if the voltage value exceeds the set voltage threshold; and if the voltage does not exceed the set voltage threshold, sending a signal to the sensor, and continuously measuring the displacement of the workpiece table by the sensor.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110240313.4A CN113155003B (en) | 2021-03-04 | 2021-03-04 | Sensor calibration method and system based on photoetching machine |
| PCT/CN2022/077643 WO2022183965A1 (en) | 2021-03-04 | 2022-02-24 | Sensor calibration method and system based on lithography machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110240313.4A CN113155003B (en) | 2021-03-04 | 2021-03-04 | Sensor calibration method and system based on photoetching machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113155003A true CN113155003A (en) | 2021-07-23 |
| CN113155003B CN113155003B (en) | 2023-05-16 |
Family
ID=76884168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110240313.4A Active CN113155003B (en) | 2021-03-04 | 2021-03-04 | Sensor calibration method and system based on photoetching machine |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN113155003B (en) |
| WO (1) | WO2022183965A1 (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015154285A (en) * | 2014-02-14 | 2015-08-24 | 国立研究開発法人科学技術振興機構 | Analog/digital converter and method thereof |
| CN105827241A (en) * | 2016-03-17 | 2016-08-03 | 苏州易瑞得电子科技有限公司 | Intelligent signal control method and controller |
| CN107181489A (en) * | 2016-03-11 | 2017-09-19 | 北京君正集成电路股份有限公司 | A kind of analog-to-digital conversion calibration method and device |
| CN108306645A (en) * | 2018-01-19 | 2018-07-20 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Sensor digital collection capacity acquisition methods, apparatus and system |
| US20190036538A1 (en) * | 2016-02-25 | 2019-01-31 | Sony Corporation | Analog-to-digital converter, electronic device, and method of controlling analog-to-digital converter |
| CN111837340A (en) * | 2018-03-28 | 2020-10-27 | 株式会社自动网络技术研究所 | AD converter correction device and AD converter |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0652869B2 (en) * | 1989-04-27 | 1994-07-06 | 日本コロムビア株式会社 | Digital / analog converter |
| CN102571088B (en) * | 2010-12-31 | 2014-06-18 | 国民技术股份有限公司 | Overflow judging circuit for pipelined analog-to-digital converter |
| EP3003442B1 (en) * | 2013-05-29 | 2020-12-30 | ICU Medical, Inc. | Infusion system and method of use which prevents over-saturation of an analog-to-digital converter |
| TWI657666B (en) * | 2017-10-31 | 2019-04-21 | 聯陽半導體股份有限公司 | Analog-to-digital converter and calibration method thereof and callbration apparatus |
-
2021
- 2021-03-04 CN CN202110240313.4A patent/CN113155003B/en active Active
-
2022
- 2022-02-24 WO PCT/CN2022/077643 patent/WO2022183965A1/en active Application Filing
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015154285A (en) * | 2014-02-14 | 2015-08-24 | 国立研究開発法人科学技術振興機構 | Analog/digital converter and method thereof |
| US20190036538A1 (en) * | 2016-02-25 | 2019-01-31 | Sony Corporation | Analog-to-digital converter, electronic device, and method of controlling analog-to-digital converter |
| CN107181489A (en) * | 2016-03-11 | 2017-09-19 | 北京君正集成电路股份有限公司 | A kind of analog-to-digital conversion calibration method and device |
| CN105827241A (en) * | 2016-03-17 | 2016-08-03 | 苏州易瑞得电子科技有限公司 | Intelligent signal control method and controller |
| CN108306645A (en) * | 2018-01-19 | 2018-07-20 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Sensor digital collection capacity acquisition methods, apparatus and system |
| CN111837340A (en) * | 2018-03-28 | 2020-10-27 | 株式会社自动网络技术研究所 | AD converter correction device and AD converter |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113155003B (en) | 2023-05-16 |
| WO2022183965A1 (en) | 2022-09-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI509997B (en) | Data conversion circuitry and method therefor | |
| CN106374923B (en) | High-precision ADC reference voltage calibration system and calibration method | |
| US8890731B2 (en) | Conversion circuit and chip | |
| US7042373B2 (en) | Error measuring method for digitally self-calibrating pipeline ADC and apparatus thereof | |
| McCreary et al. | Precision capacitor ratio measurement technique for integrated circuit capacitor arrays | |
| CN108387834B (en) | Wide area ADC error correction test method and device | |
| CN111521857B (en) | Multi-conductor current measuring system based on TMR tunnel magnetic resistance | |
| CN113155003B (en) | Sensor calibration method and system based on photoetching machine | |
| CN113364461B (en) | Analog-to-digital conversion calibration method and system for chip to be tested | |
| CN113514168B (en) | Multi-channel temperature sensor testing device | |
| CN105717393B (en) | A kind of parameter test system and test method for electronic component | |
| JP2008092195A (en) | Semiconductor integrated circuit, automatic error calculation program, and automatic error calculation method | |
| CN107490438B (en) | Sensor circuit and method of use | |
| CN112311393B (en) | Testing device and method for high-voltage high-precision analog-to-digital converter based on J750 | |
| KR102244196B1 (en) | Method for calibrating tolerance of adc module and electronic device thereof | |
| CN112557988A (en) | Voltage measurement calibration system and method | |
| JP2012169860A (en) | High resolution digital-analog conversion device and method | |
| CN112152623A (en) | System and method for testing analog-to-digital converter | |
| JP5732335B2 (en) | Successive comparison type AD conversion method and apparatus | |
| Balestrieri et al. | Research trends and challenges on DAC testing | |
| Li et al. | An Ultra-fast ADC Linearity Test and Calibration Method | |
| CN219107428U (en) | ADC correction circuit | |
| Balestrieri et al. | DAC testing: recent research directions | |
| Yang et al. | High-precision resistance calibrator error analysis and error distribution technology research | |
| CN110554350B (en) | Calibration method of measuring device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |