CN113134971B - System and method for manufacturing bionic sharkskin structure - Google Patents

System and method for manufacturing bionic sharkskin structure Download PDF

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Publication number
CN113134971B
CN113134971B CN202110455913.2A CN202110455913A CN113134971B CN 113134971 B CN113134971 B CN 113134971B CN 202110455913 A CN202110455913 A CN 202110455913A CN 113134971 B CN113134971 B CN 113134971B
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bionic
substrate
laser
coherent
beams
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CN113134971A (en
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翁占坤
李韬
王深智
郭川川
董莉彤
王璐
王作斌
宋正勋
许红梅
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Changchun University of Science and Technology
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Changchun University of Science and Technology
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10—Processes of additive manufacturing
    • B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
    • B29C64/124—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified
    • B29C64/129—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask
    • B29C64/135—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask the energy source being concentrated, e.g. scanning lasers or focused light sources
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/264—Arrangements for irradiation
    • B29C64/268—Arrangements for irradiation using laser beams; using electron beams [EB]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/264—Arrangements for irradiation
    • B29C64/286—Optical filters, e.g. masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing

Abstract

The invention provides a manufacturing system and a manufacturing method of a bionic shark skin structure. According to the invention, the liquid photosensitive material is solidified to form the bionic sharkskin structure by converging N beams of coherent laser and interfering, so that not only can the macro structure of the bionic sharkskin structure be controlled, but also microscopic interference fringes can be superposed on the macro structure by utilizing the interference effect, and the performance of the bionic sharkskin structure is further improved, thereby realizing large-area, convenient, high-efficiency and low-energy-consumption preparation of the cross-scale bionic sharkskin structure in a common atmospheric environment.

Description

System and method for manufacturing bionic sharkskin structure
Technical Field
The invention relates to the technical field of micro-nano structure processing, in particular to a manufacturing system and a manufacturing method of a bionic sharkskin structure.
Background
The preparation of the bionic sharkskin structure is a hot research problem in bionics and is mainly applied to the aspects of hydrophobicity, antifouling and drag reduction. The existing preparation technologies are basically template method, hot stamping and precise 3D printing technology.
In 2014, George Lauder and the like established a single-tooth 3D model with the length of only 0.15mm according to the gray mackerel scurf, consumed 1 year by using a 3D printing technology, and embedded tens of thousands of small teeth into a flexible and smooth membrane to obtain the bionic sharkskin.
In the process of implementing the invention, the applicant finds that the manufacturing method of the bionic sharkskin structure in the traditional technology can only control the macro structure, but can not control the microstructure in the bionic sharkskin structure.
Disclosure of Invention
Technical problem to be solved
The present invention is intended to solve at least one of the above technical problems at least in part.
(II) technical scheme
To achieve the above object, according to one aspect of the present invention, there is provided a bionic shark skin structure manufacturing system comprising: the coherent laser system is used for generating N coherent laser beams, wherein N is more than or equal to 2; the angle frame is internally provided with a hollow area, and a clamping groove is formed on the side surface of the hollow area; when the substrate is inserted into the clamping groove, the first plane of the substrate faces the inner side of the hollow area, and a growth pool for containing the liquid photosensitive material is formed by the first plane and the corresponding surface of the hollow area; the second plane of the bionic shark skin structure faces to the direction of incidence of the N coherent laser beams, the N coherent laser beams are converged in the local area of the first plane after penetrating through the substrate and interfere with each other, and the liquid photosensitive material in the local area in the growth pool is solidified to form the bionic shark skin structure with an interference microstructure.
In some embodiments of the present invention, a first plane of a substrate is formed with a mask pattern; after N beams of coherent laser penetrate through a light transmission area defined by the mask pattern on the substrate, the coherent laser is converged and interfered in a corresponding area of the first plane, and the liquid photosensitive material in the corresponding area in the growth pool is solidified to form a bionic shark skin structure taking the mask pattern as a contour.
In some embodiments of the present invention, the mask pattern comprises: t multiplied by S shark fin units distributed in an array in a staggered manner, wherein T is more than or equal to 3, and S is more than or equal to 3; the shark fin unit is in a trident shape with a downward tip, and the outer contour of the shark fin unit is on the same circumference, and the shark fin unit comprises: a central main fin; and a left fin and a right fin respectively located on both sides of the main fin; wherein the left and right fins are separated from the main fin and mirror symmetric with respect to a midline of the main fin.
In some embodiments of the invention, M clamping grooves are formed on the side surface of the hollow area of the angle frame, wherein M is more than or equal to 2; the substrate can be selectively inserted into one of the M card slots to form a growth pool, and when the substrate is inserted into different card slots, the substrate and the incident N beams of coherent laser light form different angles.
In some embodiments of the present invention, the N coherent laser beams have the same energy, and the incident angles to the substrate are the same and are uniformly distributed on the conical surface with the convergence point as the vertex.
In some embodiments of the invention, the angle of incidence β satisfies: theta is more than or equal to 5 degrees and less than or equal to 75 degrees.
In some embodiments of the present invention, N ═ 3; a coherent laser system includes:
a laser;
a total reflection mirror;
a first coherent optical path comprising: a first beam splitter; laser emitted by the laser is divided into two beams by a first beam splitter, the first beam is reflected to a total reflector and is reflected to the substrate by the total reflector to form a first coherent laser beam; the second beam is incident to the next coherent light path;
A second coherent optical path comprising: the second beam splitter, the first reflector and the second reflector; the second beam of the laser divided by the first beam splitter is divided into two beams by the second beam splitter, and the first beam is reflected to the substrate by the first reflector, the second reflector and the total reflector to become a second beam of coherent laser; the second beam is incident to the next coherent light path;
a third trunk circuit comprising: the second beam of the laser divided by the second beam splitter is reflected to the substrate through the third reflector and the total reflector to become third coherent laser;
the first beam splitter, the second reflector and the third reflector meet the position relation of an equilateral triangle.
In some embodiments of the invention, the laser is a continuous laser.
In some embodiments of the invention, the biomimetic sharkskin structure manufacturing system further comprises: and the angle frame is fixed on the platform surface of the three-dimensional displacement platform.
In some embodiments of the invention, each of the first, second and third coherent optical paths comprises: the focusing lens and the aperture diaphragm are positioned on the same optical axis with other optical elements in the same optical path, the optical path upstream of the total reflector, and the aperture diaphragm is positioned on the focal plane of the focusing lens.
In order to achieve the above object, according to a second aspect of the present invention, there is also provided a method for manufacturing a biomimetic shark skin structure, comprising: step A, forming a mask pattern on a first plane of a substrate; and step B, forming a bionic sharkskin structure with an interference microstructure on the substrate by using the manufacturing system of the bionic sharkskin structure.
In some embodiments of the invention, in step B: by adopting mask patterns with different sizes and specifications, the characteristic size and the periodic interval of the bionic sharkskin structure are controlled.
In some embodiments of the invention, in step B: the period of the interference microstructure and the growth mode of the bionic shark skin structure are controlled by controlling the incident angle beta and the light intensity of each laser beam in the N coherent laser beams.
In some embodiments of the invention, in step B: the growth inclination angle of the bionic sharkskin structure is controlled by controlling the angle theta formed by the substrate and the normal line of the incident N beams of coherent laser.
In some embodiments of the invention, in step B: the growth size of the bionic sharkskin structure is controlled by controlling the incidence time of the N coherent laser beams.
In some embodiments of the invention, in step B: the growth rate of the bionic shark skin structure is controlled by controlling the energy density of the N beams of coherent laser.
(III) advantageous effects
According to the technical scheme, the invention has at least one of the following beneficial effects:
(1) gather and take place to interfere through N bundle coherent laser and solidify liquid photosensitive material and form bionical sharkskin structure, not only can control the macrostructure of bionical sharkskin structure, utilize the interference effect moreover, can also overlap microcosmic interference fringe on macrostructure, further promote bionical sharkskin structure's performance to realize large tracts of land, convenient, high-efficient, the preparation of the bionical sharkskin structure of low energy consumption strides under ordinary atmospheric environment.
(2) Before the bionic sharkskin structure is formed, a mask pattern is formed on the substrate, so that the growth of the bionic sharkskin structure in a light-transmitting area can be controlled, and a flexible, low-cost and large-area preparation method of the bionic sharkskin structure is provided.
(3) Unlike the conventional mask pattern, the shark fin units are distributed in an array staggered manner, and the single shark fin unit is in a trident shape with a downward tip part on the whole and the outline of the shark fin unit is on the same circumference. Compared with the forward projection of the shark skin structure adopted in the traditional technology, the mask pattern has the advantages that unnecessary crosslinking reaction during photocuring can be reduced, and a macroscopic groove structure is generated; compared with the line model in the prior art, the mask pattern in the invention has the advantages of maximally maintaining the original structural shape of the sharkskin and preparing a microstructure with a larger area.
(4) Be formed with a plurality of draw-in grooves on the angle frame, in actual production, the draw-in groove is inserted in the alternative of substrate, and when the substrate inserted different draw-in grooves, the substrate was the incident angle of difference with the incident N normal of restrainting coherent laser, consequently, can be through controlling incident angle, the growth inclination of control bionical sharkskin structure has further promoted the flexibility of bionical sharkskin structure preparation.
(5) The N-beam coherent laser is formed by adopting 1 laser and combining a beam splitter, a reflector and the like, and has the advantages of low cost and flexible operation.
(6) The first beam splitter in the first coherent light path, the second reflector in the second coherent light path and the third reflector in the third coherent light path are arranged in an equilateral triangle position relationship, so that the incident angles of three coherent laser beams incident on the substrate are the same, the light paths are in the optimal positions, and the interference patterns are uniform and regular.
(7) The light energy regulating component is arranged in the light path of each coherent laser to regulate and homogenize the energy of the laser, so that the texture condition of the interference fringes can be flexibly regulated.
(8) In the preparation process, the characteristic size and the periodic interval of the bionic sharkskin structure are controlled by adopting different mask patterns; controlling the period of the interference microstructure and the growth mode of the bionic shark skin structure by controlling the incident angle and the light intensity of each laser beam in the N coherent lasers; controlling the growth inclination angle of the bionic sharkskin structure by controlling the angle theta formed by the substrate and the normal line of the incident N beams of coherent laser; controlling the growth size of the bionic sharkskin structure by controlling the incidence time of the N coherent laser beams; controlling the growth rate of the bionic sharkskin structure by controlling the energy density of the N coherent laser beams; greatly enhances the flexibility and the selectivity of the preparation, and is beneficial to providing a proper bionic shark skin structure according to the requirement.
Drawings
FIG. 1 is a schematic structural diagram of a system for manufacturing a bionic shark skin structure according to an embodiment of the invention.
FIG. 2 is a schematic diagram of laser incidence after a substrate in the manufacturing system of the bionic shark skin structure shown in FIG. 1 is inserted into a clamping groove in an angle frame.
FIG. 3 is a schematic diagram of a mask pattern of a substrate in the system for manufacturing a biomimetic shark skin structure shown in FIG. 1.
FIG. 4 is a schematic view of an angle frame used in the system for manufacturing a bionic shark skin structure shown in FIG. 1.
FIG. 5 is a schematic view of the structural contour of the bionic shark skin structure grown after the substrate is inserted into different slots in the manufacturing system of the bionic shark skin structure shown in FIG. 1.
Fig. 6A and 6B are a top view and a side view of the light path trajectory of three coherent laser beams after passing through the total reflector in the system for manufacturing a bionic sharkskin structure shown in fig. 1, respectively.
FIG. 7 is a scanning electron microscope of a shark skin structure prepared by the method of the present invention.
FIG. 8 is an enlarged scanning electron microscope image of the shark skin structure of FIG. 7.
FIG. 9 is a scanning electron microscope photograph of the top structure of a bionic shark skin structure prepared by the second embodiment of the method for manufacturing a bionic shark skin structure of the present invention.
FIG. 10 is a scanning electron microscope image of the shark skin pattern shown in FIG. 9 under magnification.
FIG. 11 is a scanning electron microscope photograph of the bottom structure of a bionic shark skin structure prepared by the second embodiment of the method for manufacturing a bionic shark skin structure of the present invention.
Fig. 12 is a scanning electron microscope photograph of the bottom structure of a bionic shark skin structure prepared by a third embodiment of the method for manufacturing a bionic shark skin structure according to the invention.
[ description of main reference symbols in the drawings ]
200-a three-dimensional displacement platform;
300-a substrate; 301-a first plane; 302-a second plane;
410-a growth pool; 421. 422, 423-card slot;
111-a laser;
121 — total mirror;
131-a first beam splitter; 132-a first focusing lens; 133-a first aperture stop;
141 a second beam splitter; 142-a first mirror; 143-a second mirror;
144-a second focusing lens; 145-a second aperture stop;
151 a third mirror; 152-a third focusing lens; 153-third aperture stop;
LB1、LB2、LB3-coherent laser light; o isgrow-a structure growth direction.
Detailed Description
The invention realizes the preparation of the cross-scale bionic shark skin structure based on the combination of laser interference and mask surface exposure technology.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to specific embodiments and the accompanying drawings. It is to be understood that these embodiments are provided merely to enable the invention to meet the requirements of law, and that the invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.
Manufacturing system of bionic sharkskin structure
The invention firstly provides a manufacturing system of a bionic sharkskin structure.
In one exemplary embodiment of the present invention, a biomimetic sharkskin structure manufacturing system is provided. FIG. 1 is a schematic structural diagram of a system for manufacturing a bionic shark skin structure according to an embodiment of the invention. FIG. 2 is a schematic view of laser incidence after a substrate in the manufacturing system of the bionic sharkskin structure shown in FIG. 1 is inserted into a clamping groove in an angle frame. As shown in fig. 1, the system for manufacturing a bionic shark skin structure of the present embodiment includes:
coherent laser system for generating three coherent Laser Beams (LB)1、LB2、LB3)；
A three-dimensional displacement platform 200;
the angle frame is fixed on the three-dimensional displacement platform, and a hollow area is formed in the angle frame;
as shown in fig. 2, when the substrate 300 is inserted into the slot 421 of the angle frame, the first plane 301 thereof faces the inner side of the hollow area and forms a growth pool 410 for containing the liquid photosensitive material with the corresponding surface of the hollow area; the second plane 302 of the laser beam is oriented in the direction of incidence of three coherent Laser Beams (LB)1、LB2、LB3) After penetrating through the substrate, the light beams converge and interfere with a local area of the first plane 301, so that the liquid photosensitive material in the local area is cured to form a bionic shark skin structure with an interference microstructure. Wherein the dotted line direction O growIs the growth direction of the bionic shark skin structure.
In the embodiment, the three coherent laser beams are converged and interfered to solidify the liquid photosensitive material to form the bionic sharkskin structure, the macrostructure of the bionic sharkskin structure can be controlled, microscopic interference fringes can be superposed on the macrostructure by utilizing the interference effect, and the performance of the bionic sharkskin structure is further improved, so that the large-area, convenient, high-efficiency and low-energy-consumption cross-scale bionic sharkskin structure under the common atmospheric environment is prepared.
In addition, the angle frame is carried on a three-dimensional displacement platform, and the transverse splicing of the substrate can be realized by moving the X axis; by Y, Z, the substrates can be longitudinally spliced, so that the preparation of larger area and industrial preparation can be realized.
It can be understood by those skilled in the art that although three coherent laser beams are used in the present embodiment, the present invention is not limited thereto, and in other embodiments of the present invention, two, four, five or more coherent laser beams may be used, as long as the number of coherent laser beams is greater than two, and the coherent laser beams can be converged and interfered in a local area of the first plane of the substrate to form an interference fringe.
The substrate in this embodiment is formed by repeatedly etching an aluminum mask on quartz glass. In the present invention, the mask pattern of the substrate is a pattern designed in a case where a cross-linking reaction is generated by combining a forward projected contour of shark's skin and photocuring. FIG. 3 is a schematic diagram of a mask pattern of a substrate in the system for manufacturing a biomimetic sharkskin structure shown in FIG. 1. As shown in fig. 3, the mask pattern includes: t multiplied by S shark fin units are distributed in an array in a staggered mode, T is larger than or equal to 3, and S is larger than or equal to 3. Regarding the mask pattern, it should be noted that:
(1) staggered distribution of shark fin unit array
Referring to fig. 3, the mask pattern includes T rows and S columns of shark fin units, and the shark fin units are spaced at equal intervals in the vertical direction; in the horizontal direction, the shark fin units in adjacent rows are distributed in a staggered way, namely the shark fin units Q in t rows and s columnst,sShark fin unit Q located in t-1 row and s-1 columnt-1,s-1And t-1 rows and s +1 columns of shark fin unit Qt-1,s+1To the intermediate position of (c).
(2) Shape of single shark fin unit
The shark fin unit is in the shape of a trident with a downward tip, the outer contour of the shark fin unit is on the same circumference, and the shark fin unit comprises: a central main fin; and a left fin and a right fin respectively located on both sides of the main fin; wherein the left and right fins are separated from the main fin and mirror symmetric with respect to a midline of the main fin.
In this embodiment, the circumferential radius is 40 micrometers, and the horizontal gap between the main fin and the sub-fin is 10 micrometers. The lower end of the main fin converges to the intersection of the midline and the circumference. The upper end of the inner arc of the auxiliary fin is respectively connected to the half height of the lower end of the outer arc in the Y direction and the quarter height of the upper end of the outer arc at the half height of the Y direction. Other feature sizes may be scaled down or up by equal ratio.
After the three beams of coherent laser penetrate through a light transmission area defined by the mask pattern on the substrate, the three beams of coherent laser are converged and interfered in a corresponding area of the first plane, and the liquid photosensitive material in the corresponding area is solidified to form the bionic shark skin structure taking the mask pattern as the outline.
Compared with the forward projection of the shark skin structure adopted in the traditional technology, the mask pattern has the advantages that unnecessary crosslinking reaction during photocuring can be reduced, and a macroscopic groove structure is generated; compared with the line model in the traditional technology, the mask pattern in the invention has the advantages of maximally maintaining the original structural shape of the sharkskin and preparing a microstructure with a larger area.
It will be understood by those skilled in the art that, in addition to quartz glass, inorganic light-transmitting materials such as ordinary glass, optical glass, ITO glass, and FTO glass can be used as the original support of the mask pattern; other opaque materials than aluminum, such as copper, may be used to form the mask pattern. Regarding the process of forming the mask pattern on the inorganic light-transmitting material, reference may be made to the related description of the prior art, and further description thereof is omitted here.
FIG. 4 is a schematic view of an angle frame used in the system for manufacturing a bionic shark skin structure shown in FIG. 1. As shown in fig. 4, the interior of the angled stock forms a hollow area. Three locking grooves (421, 422, 423) are formed in the angle frame. When the substrate is inserted into one of the three clamping grooves, a growth pool can be formed with other surfaces of the hollow area, liquid photosensitive materials are injected into the growth pool, and injected resin does not overflow the highest position of the base. The liquid photosensitive material may be cured by ultraviolet light.
With continued reference to fig. 4, the substrates are inserted into different card slots with the difference that they will be at different angles to the incident coherent laser light. From the order of the inclination angle from large to small, when the substrate is inserted into different card slots, the angles formed by the substrate and the incident coherent laser are respectively as follows: theta.theta.1＝15°，θ2＝30°，θ3＝45°。
FIG. 5 is a schematic view showing the structural profile of a bionic shark skin structure grown after a substrate is inserted into different slots in the manufacturing system of the bionic shark skin structure shown in FIG. 1. At theta1For example, a 15 ° slot would be formed such that when the substrate is inserted into the slot, the simulated sharkskin structure would lie along an angle θ with the substrate1The direction of (a) is referred to as a structure growth direction, and the angle θ is referred to as a structure growth angle.
In this embodiment, three slots are provided in the angle frame, and in actual operation, the slot into which the substrate is inserted can be selected according to the desired growth direction of the structure. Therefore, the growth inclination angle of the bionic sharkskin structure can be controlled by controlling the angle theta formed by the substrate and the normal line of the incident coherent laser, and the flexibility of the preparation of the bionic sharkskin structure is further improved.
It should be clear to those skilled in the art that the number of the slots and the angle θ in this embodiment are examples. In practical application, the number of the slots and the angle between the substrate and the incident coherent laser can be set according to requirements, and the invention is within the protection scope.
Referring to fig. 1, in the present embodiment, the three coherent laser beams are formed by splitting 1 laser beam. To achieve this effect, the coherent laser system in this embodiment includes: laser 111, first coherent light path, second coherent light path, third coherent light path, total reflection mirror 121.
The laser 111 is an ultraviolet continuous semiconductor laser capable of generating ultraviolet laser with a wavelength of 360nm, and the energy of the laser is adjustable.
(1) First coherent light path
The first coherent optical path includes: a first beam splitter 131, a first focusing lens 132, and a first aperture stop 133, the central axes of which propagate.
A first aperture stop 133 is arranged in the focal plane of said first focusing lens 132. When the laser light emitted from the ultraviolet continuous laser is incident on the first beam splitter 131, the laser light is divided into two parts. The first portion is reflected by the first beam splitter 131, homogenized and energy-adjusted by the first focusing lens 132 and the aperture stop 133, and then incident on the total reflection mirror 121, and the total reflection mirror 121 reflects the portion of the laser light toward the substrate. The second portion is transmitted by the first beam splitter 131 and is incident on the second coherent optical path.
(2) Second coherent light path
The second coherent optical path includes: a second beam splitter 141, a first mirror 142, a second mirror 143, a second focusing lens 144, and a second aperture stop 145, which propagate along the central axis. A second aperture stop 145 is disposed at the focal plane of the second focusing lens 144.
When the laser light enters the second coherent light path, the laser light is divided into two parts by the second beam splitter 141. The first portion is reflected by the second beam splitter 141, then reflected by the first beam splitter mirror 142, the third beam splitter mirror 143, and then incident to the total mirror 121 after being normalized and energy-adjusted by the second focusing lens and the second aperture stop 145. The total reflection mirror 121 reflects the part of the laser light toward the substrate. The second portion is transmitted by the second beam splitter 141 and enters the third trunk path.
(3) Third phase trunk circuit
The third trunk circuit includes: a third reflector 151, a third focusing lens 152, and a third aperture stop 153. Wherein the third aperture stop 153 is arranged in the focal plane of the third focusing lens 152. The first beam splitter 131, the second mirror 143, and the third mirror 151 are arranged in an equilateral triangle.
When the laser light enters the third main beam path, the laser light is reflected by the third reflecting mirror 151, homogenized and regulated by the third focusing lens 152 and the third aperture stop 153, and energy is adjusted to enter the total reflecting mirror 121, and the total reflecting mirror 121 reflects the laser light to the substrate direction.
In this embodiment, the first beam splitter in the first coherent optical path, the second mirror in the second coherent optical path, and the third mirror in the third coherent optical path are arranged in an equilateral triangle position relationship, so as to ensure that the incident angles of the three coherent laser beams incident on the substrate are the same, so as to ensure that the optical paths are at the optimal positions, and thus the interference patterns are uniform and regular. In addition, a light energy adjusting component is arranged in each coherent light path to adjust and homogenize the energy of the laser light of the path, so that the texture condition of interference fringes can be flexibly adjusted.
Fig. 6A and 6B are a top view and a side view of the light path trajectory of three coherent laser beams after passing through the total reflector in the system for manufacturing a bionic sharkskin structure shown in fig. 1, respectively.
As shown in fig. 6A, the light spots of the three related light paths are arranged in an equilateral triangle, and finally converge to the center of gravity of the equilateral triangle. As shown in fig. 6B, the black dotted line is the normal line direction of the laser incidence, the angle β is the laser incidence angle, in the figure, β is 5 °, the two remaining lights are overlapped in the side view, and are respectively indicated by the black dotted arrow and the gray solid arrow, and the angle θ is the angle formed by the substrate and the normal line of the incident coherent laser light.
Wherein three beams of coherent laser light incident to the substrate converge and interfere at a local area of a first plane of the substrate, wherein for the three beams of coherent laser light:
(1) the three coherent laser beams are spatially satisfied, and the laser incident angles of the three coherent laser beams are kept consistent.
(2) The energy relation of the three coherent laser beams is satisfied, and the energy of the three coherent laser beams is the same.
(3) It meets the requirement on an interference surface and has high light spot coincidence degree.
Three coherent laser beams interfere with each other, wherein the incidence angle beta of the three beams is 5 DEG according to the formula
Figure GDA0003692903580000101
d is the period, λ is the laser wavelength, and β is the angle of incidence, so that the period d of the interference nanopattern is 2 microns.
In this embodiment, the three coherent laser beams converge to form a circular spot with an interference area of approximately 1cm in diameter, and when projected to the substrate, the circular spot is an elliptical spot with a major axis of 1.5cm and a minor axis of 1 cm.
So far, the introduction of the manufacturing system of the bionic shark skin structure is finished.
Method for manufacturing bionic shark skin structure
Based on the manufacturing system of the bionic sharkskin structure, the invention also provides a manufacturing method of the bionic sharkskin structure.
1. First embodiment of manufacturing method of bionic sharkskin structure
The manufacturing method of the bionic shark skin structure comprises the following steps:
step A, forming a mask pattern on a first plane of a substrate;
and step B, forming a bionic sharkskin structure with an interference microstructure on the substrate by utilizing the bionic sharkskin structure manufacturing system.
The method for forming the mask pattern on the first plane of the substrate in step a can refer to the related description of the prior art, and is not repeated here.
In step B, the following aspects need to be explained:
laser type
The laser is a semiconductor laser capable of emitting ultraviolet laser light having a wavelength of 360 nm.
Laser power-
Here, laser power refers to the energy of a single laser beam at the substrate. In this example, the laser power was 0.8 mW.
Coherent laser incidence angle
For the three beams of light incident on the substrate, the incidence angle of the three coherent laser beams is 5 °. According to the formula
Figure GDA0003692903580000111
The interference pattern period was found to be 2 microns.
Exposure time
Here, the exposure time refers to a time during which the laser irradiates the first plane. In this example, the exposure time was 5 s.
Angle theta formed by substrate and normal line of incident laser
Here, the growth direction of the structure depends on the angle θ formed by the substrate and the normal of the incident laser, and referring to fig. 6, it can be seen that the smaller θ is, the smaller the angle between the bottom of the structure and the base is, and vice versa. In this example, θ is 30 °.
FIG. 7 is a scanning electron microscope photograph of a bionic shark skin structure prepared by the first embodiment of the method for manufacturing a bionic shark skin structure according to the present invention. As shown in FIG. 7, the first embodiment of the manufacturing method of the bionic shark skin structure of the invention realizes large-area, orderly and regular preparation.
FIG. 8 is a scanning electron microscope photograph of the shark skin structure of FIG. 7 under magnification. As can be seen from FIG. 8, the structure grows in a three-beam interference lattice structure, and the three-beam lattice structure can be clearly seen at the top, thus proving that the controllable bionic sharkskin surface microstructure can be prepared in a cross-scale manner through laser interference.
2. Method for producing bionic shark skin Structure
This embodiment is similar to the first embodiment of the manufacturing method of the bionic sharkskin structure, except that: the exposure time was 10 s.
FIG. 9 is a scanning electron microscope photograph showing the top structure of a bionic shark skin structure prepared by a second embodiment of the method of manufacturing a bionic shark skin structure according to the present invention. As can be seen from FIG. 9, it can realize large-area, ordered and regular production under longer exposure time, and the growth size of the large-area structure produced is longer compared with that of FIG. 7.
FIG. 10 is a scanning electron microscope image of the shark skin pattern shown in FIG. 9 under magnification. It can be seen that the structure grows in a three-beam interference lattice structure, which is clearly visible on top. Compared with the graph shown in FIG. 8, the growth size of the structure is longer, and the area of the top part is relatively smaller, so that the growth size of the bionic sharkskin structure can be controlled by controlling the exposure time.
FIG. 11 is a scanning electron microscope photograph of the bottom structure of a bionic shark skin structure prepared by the second embodiment of the method for manufacturing a bionic shark skin structure of the present invention. As can be seen from FIG. 11, a clear lattice structure appears at the bottom of the structure, and the lattice is a raised part, which proves that the bionic sharkskin structure in the case grows from the base to the top of the lattice structure formed by three-beam interference, and proves the growth mode of the laser interference regulation structure.
3. Method for manufacturing bionic sharkskin structure
This embodiment is similar to the first embodiment of the manufacturing method of the bionic sharkskin structure, except that: two coherent lasers were used for preparation, i.e. N2, laser power 1.2mW and exposure time 10 s.
FIG. 12 is a scanning electron microscope photograph of the bottom structure of a bionic shark skin structure prepared by the third embodiment of the method for manufacturing a bionic shark skin structure of the present invention. As can be seen from FIG. 12, the bottom of the structure appears clear fringe structure, and the fringe is a convex part, which indicates that the bionic shark skin structure in this case grows from the base to the top by the fringe structure formed by two-beam interference, and by comparing with FIG. 11, it is proved that the different growth modes of the structure can be regulated and controlled by changing the number of laser interference beams.
So far, the embodiments of the present invention have been described in detail with reference to the accompanying drawings.
It is noted that for some implementations, if not essential to the invention and well known to those of ordinary skill in the art, they are not illustrated in detail in the drawings or in the text of the description, as they may be understood with reference to the relevant prior art.
Furthermore, the above definitions of the various elements and methods are not limited to the particular structures, shapes or arrangements of parts mentioned in the examples, which may be easily modified or substituted by one of ordinary skill in the art, for example:
(1) The coherent light path system can also adopt other light path forms, such as a form that each laser beam is reflected from the top part and downwards to form interference, and is not emitted downwards through a total reflection mirror;
(2) the aperture stop may be replaced by other energy adjusting means such as a polarizing crystal and a wave plate.
The present invention should be clearly recognized by those skilled in the art from the above description.
In conclusion, the bionic sharkskin structure is formed by solidifying the liquid photosensitive material through the convergence and interference of mask surface exposure and N beams of coherent laser, the macroscopic structure of the bionic sharkskin structure can be controlled, microscopic interference fringes can be superposed on the macroscopic structure by utilizing the interference effect, and the performance of the bionic sharkskin structure is further improved, so that the preparation of the large-area, convenient, high-efficiency and low-energy-consumption cross-scale bionic sharkskin structure in a common atmospheric environment is realized, and the preparation method has a high practical value.
It should also be noted that directional terms, such as "upper", "lower", "front", "rear", "left", "right", "inner", "outer", etc., used in the embodiments are only directions referring to the drawings, and are not intended to limit the scope of the present invention. Throughout the drawings, like elements are represented by like or similar reference numerals. Conventional structures or constructions will be omitted when they may obscure the understanding of the present invention.
And the shapes and sizes of the respective components in the drawings do not reflect actual sizes and proportions, but merely illustrate the contents of the embodiments of the present invention. Furthermore, in the claims, any reference signs placed between parentheses shall not be construed as limiting the claim.
In the description of the present invention, it should be noted that, unless explicitly stated or limited otherwise, the terms "connected" and "connected" are to be interpreted broadly, e.g., as being fixed or detachable or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms can be understood as a special case for those of ordinary skill in the art.
Unless expressly indicated to the contrary, the numerical parameters set forth in the specification and claims of this invention may be approximations that may vary depending upon the teachings of the invention. In particular, all numbers expressing quantities of ingredients, reaction conditions, and so forth used in the specification and claims are to be understood as being modified in all instances by the term "about," which is intended to be interpreted to mean including within the meaning of a specified amount, in some embodiments, a variation of ± 10%, in some embodiments, a variation of ± 5%, in some embodiments, a variation of ± 1%, and in some embodiments, a variation of ± 0.5%.
Furthermore, the word "comprising" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements.
Ordinal numbers such as "first," "second," "third," "primary," "secondary," and arabic numerals, letters, etc., used in the specification and claims to modify a corresponding element or step are intended only to distinguish one element (or step) having a certain name from another element (or step) having the same name, and do not imply any ordinal number for the element (or step) nor the order of one element (or step) from another element (or step).
In addition, unless steps are specifically described or must occur in sequence, the order of the steps is not limited to that listed above and may be changed or rearranged as desired by the desired design. The embodiments described above may be mixed and matched with each other or with other embodiments based on design and reliability considerations, i.e., technical features in different embodiments may be freely combined to form further embodiments.
Similarly, it should be appreciated that in the foregoing description of exemplary embodiments of the invention, various features of the invention are sometimes grouped together in a single embodiment, figure, or description thereof for the purpose of streamlining the disclosure and aiding in the understanding of one or more of the various inventive aspects. However, the method of the invention should not be construed to reflect the intent: the invention as claimed requires more features than are expressly recited in each claim. Rather, as the following claims reflect, inventive aspects lie in less than all features of a single foregoing embodiment. Thus, the claims following the detailed description are hereby expressly incorporated into this detailed description, with each claim standing on its own as a separate embodiment of this invention.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention, and are not intended to limit the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (9)

1. A system for manufacturing a biomimetic sharkskin structure, comprising:
the coherent laser system is used for generating N coherent laser beams, wherein N is more than or equal to 2;
the angle frame is internally provided with a hollow area, and a clamping groove is formed on the side surface of the hollow area;
when the substrate is inserted into the clamping groove, the first plane of the substrate faces the inner side of the hollow area and forms a growth pool for containing liquid photosensitive material with the corresponding surface of the hollow area; the second plane of the bionic shark skin structure faces to the incident direction of the N coherent laser beams, the N coherent laser beams are converged in the local area of the first plane after penetrating through the substrate and interfere with each other, and the liquid photosensitive material in the local area in the growth pool is solidified to form the bionic shark skin structure with an interference microstructure;
Wherein a first plane of the substrate is formed with a mask pattern; after the N beams of coherent laser penetrate through a light transmission area defined by the mask pattern on the substrate, the N beams of coherent laser are converged and interfered in a corresponding area of the first plane, and the liquid photosensitive material in the corresponding area in the growth pool is solidified to form a bionic shark skin structure taking the mask pattern as a contour.
2. The system for manufacturing a biomimetic shark skin structure according to claim 1, wherein the mask pattern comprises: t multiplied by S shark fin units distributed in an array in a staggered manner, wherein T is more than or equal to 3, and S is more than or equal to 3;
the shark fin unit is in a trident shape with a downward tip, and the outer contour of the shark fin unit is on the same circumference, and the shark fin unit comprises: a central main fin; and a left fin and a right fin respectively located on both sides of the main fin; wherein the left and right fins are separated from the main fin and mirror symmetric with respect to a midline of the main fin.
3. The system for manufacturing a bionic shark skin structure according to claim 1, wherein M clamping grooves are formed in the side surface of the hollow area of the angle frame, and M is greater than or equal to 2;
the substrate can be selectively inserted into one of the M card slots to form the growth pool, and when the substrate is inserted into different card slots, the substrate and the incident N beams of coherent laser light form different angles.
4. The system according to claim 1, wherein said N coherent laser beams have the same energy and are incident on said substrate at the same angle and uniformly distributed on a conical surface having a converging point as a vertex.
5. System for producing a biomimetic shark skin structure according to claim 4, wherein the angle θ satisfies: theta is between 5 degrees and 75 degrees, wherein the angle theta is the angle formed by the substrate and the normal of the incident coherent laser.
6. The system according to claim 4, wherein N-3; the coherent laser system includes:
a laser;
a total reflector;
a first coherent optical path comprising: a first beam splitter; laser emitted by the laser is divided into two beams by a first beam splitter, the first beam is reflected to the total reflector and is reflected to the substrate by the total reflector to form a first coherent laser beam; the second beam is incident to the next coherent light path;
a second coherent optical path comprising: the second beam splitter, the first reflector and the second reflector; the second beam of the laser divided by the first beam splitter is divided into two beams by the second beam splitter, and the first beam is reflected to the substrate by the first reflector, the second reflector and the total reflector to become a second beam of coherent laser; the second beam is incident to the next coherent light path;
A third trunk path comprising: the second beam of the laser light split by the second beam splitter is reflected to the substrate through the third reflector and the total reflector to form third coherent laser light;
the first beam splitter, the second reflector and the third reflector meet the position relation of an equilateral triangle.
7. The system for manufacturing a biomimetic shark skin structure according to claim 6, wherein:
the laser is continuous laser; and/or
The bionic sharkskin structure manufacturing system further comprises: the angle frame is fixed on a platform surface of the three-dimensional displacement platform; and/or
Each of the first, second and third coherent optical paths comprises: the focusing lens and the aperture diaphragm are positioned on the same optical axis with other optical elements in the same optical path, the optical path upstream of the total reflector, and the aperture diaphragm is positioned on the focal plane of the focusing lens.
8. A method for manufacturing a bionic sharkskin structure, comprising the following steps:
step A, forming a mask pattern on a first plane of a substrate;
step B, forming a bionic sharkskin structure having an interference microstructure on a substrate by using the bionic sharkskin structure manufacturing system according to any one of claims 1 to 7.
9. The method for producing a biomimetic shark skin structure according to claim 8, wherein in the step B:
controlling the characteristic size and the periodic interval of the bionic sharkskin structure by adopting mask patterns with different sizes and specifications; and/or
Controlling the period of the interference microstructure and the growth mode of the bionic shark skin structure by controlling the incident angle beta and the light intensity of each laser beam in the N coherent lasers; and/or
Controlling the growth inclination angle of the bionic shark skin structure by controlling the angle theta formed by the substrate and the normal of the incident N beams of coherent laser; and/or
Controlling the growth size of the bionic shark skin structure by controlling the incidence time of the N beams of coherent laser; and/or
And controlling the growth rate of the bionic shark skin structure by controlling the energy density of the N coherent laser beams.
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019108366A1 (en) * 2017-11-28 2019-06-06 Board Of Regents, The University Of Texas System Catalyst influenced pattern transfer technology
CN112255895A (en) * 2020-11-12 2021-01-22 中国科学院光电技术研究所 Controllable cross-scale laser interference photoetching device

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2360971A (en) * 2000-04-03 2001-10-10 Suisse Electronique Microtech Technique for microstructuring replication moulds
EP1372040B1 (en) * 2002-06-11 2008-03-05 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
EP1700161B1 (en) * 2003-12-01 2018-01-24 The Board of Trustees of the University of Illinois Methods and devices for fabricating three-dimensional nanoscale structures
TWI261687B (en) * 2005-01-17 2006-09-11 Hong Hocheng Apparatus and method for fabricating 3D nano/micro structures
WO2009089089A1 (en) * 2008-01-02 2009-07-16 Board Of Regents, The University Of Texas System Microdevice fabrication
WO2012031201A2 (en) * 2010-09-03 2012-03-08 Massachusetts Institute Of Technology Fabrication of anti-fouling surfaces comprising a micro- or nano-patterned coating
US9019468B2 (en) * 2010-09-30 2015-04-28 Georgia Tech Research Corporation Interference projection exposure system and method of using same
GB2485175A (en) * 2010-11-03 2012-05-09 Univ City Optical imaging system using incoherent light and interference fringes
CN102269936B (en) * 2011-06-01 2013-07-10 长春理工大学 Method and system for simulating moth compound eye optical antireflection structure pattern
US9176016B2 (en) * 2013-07-23 2015-11-03 Lamplight Games System and method for 3D printer material management
CN104999670B (en) * 2015-08-25 2017-05-10 长春理工大学 Multi-beam laser interference cross-scale 3D (three dimension) printing system and method
DE102016125690A1 (en) * 2016-12-23 2018-06-28 Leibniz-Institut Für Neue Materialien Gemeinnützige Gmbh Process for the production of microstructures
US10449696B2 (en) * 2017-03-28 2019-10-22 Velo3D, Inc. Material manipulation in three-dimensional printing
US20180299253A1 (en) * 2017-04-12 2018-10-18 Sandisk Technologies Llc Laser scanning method and apparatus for semiconductor device staircase step width measurement
KR101919487B1 (en) * 2017-09-14 2018-11-19 한국과학기술연구원 Method for texturing semiconductor substrate, semiconductor substrate manufactured by the method and solar cell comprising the same
US11579523B2 (en) * 2019-02-08 2023-02-14 Ecole Polytechnique Federale De Lausanne (Epfl) Method and system for fabricating glass-based nanostructures on large-area planar substrates, fibers, and textiles
CN111688184A (en) * 2020-06-18 2020-09-22 长沙理工大学 Surface microstructure array with self-transportation performance and forming method thereof
CN112162467A (en) * 2020-09-21 2021-01-01 长春理工大学 Laser curved surface processing system and manufacturing method for super-hydrophobic, anti-icing and wind resistance reduction

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019108366A1 (en) * 2017-11-28 2019-06-06 Board Of Regents, The University Of Texas System Catalyst influenced pattern transfer technology
CN112255895A (en) * 2020-11-12 2021-01-22 中国科学院光电技术研究所 Controllable cross-scale laser interference photoetching device

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