CN112162467A - Laser curved surface processing system and manufacturing method for super-hydrophobic, anti-icing and wind resistance reduction - Google Patents
Laser curved surface processing system and manufacturing method for super-hydrophobic, anti-icing and wind resistance reduction Download PDFInfo
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70408—Interferometric lithography; Holographic lithography; Self-imaging lithography, e.g. utilizing the Talbot effect
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
Abstract
The invention relates to the technical field of laser curved surface photoetching, and provides a laser curved surface processing system and a manufacturing method for super-hydrophobicity, ice coating prevention and wind resistance reduction. The method comprises the steps of preparing a patterned composite structure on a special-shaped curved surface workpiece by using a laser scanning system with a dynamic focusing function and a laser interference lithography system, firstly designing a special functional pattern, introducing the special functional pattern into the laser scanning system with the dynamic focusing function, and processing a primary patterned structure on a curved surface; and then a five-axis displacement component and a laser interference photoetching system are utilized to obtain a secondary periodic structure on the prepared primary patterned structure by controlling a laser interference light field. The invention can prepare the designed patterned structure on any complex curved surface, so that the surface of the patterned structure can realize the functions of super-hydrophobicity, ice coating prevention and wind resistance reduction.
Description
Technical Field
The invention relates to the technical field of laser curved surface photoetching, in particular to a method and a system for preparing a super-hydrophobic, anti-icing and wind resistance reducing functional surface on the surfaces of various materials based on a laser interference curved surface photoetching technology and a laser curved surface scanning technology.
Background
Wind resistance reduction has been an important issue in the research and development of moving objects, such as automobiles, ships, aerospace vehicles and parts thereof, and so on, and people only try to design moving objects or parts with various macroscopic shapes and obtain good resistance reduction effect before, but there is only a report of trying to reduce air resistance by using a micro-patterned structure surface.
Energy conservation and emission reduction are important topics of the green world, more fuel needs to be consumed to overcome the large air resistance, and the reduction of the air resistance can not only save energy and reduce emission, but also enable the movement speed to be faster and the driving mileage to be longer.
The laser interference photoetching technology is an important technology for generating a micro-nano array structure of a periodic pattern by utilizing double-beam or multi-beam laser interference exposure or direct writing, and is mainly applied to the preparation of ordered and quasi-ordered array structures such as processing stripes, dot matrixes, hole arrays, gradient structures and the like. The technology has the characteristics of low cost, large area, high efficiency, capability of realizing curved surface processing and the like, and the structures also show special functions, such as wind resistance reduction, antireflection, wetting, adhesion, self-cleaning, friction, negative refraction, anti-counterfeiting and the like, thereby bringing great attention to domestic and foreign scientists.
In recent years, the laser interference lithography patents are as follows: the chinese invention patent 201010279175.2, published 2011.02.23, describes a method and system for preparing a filter mesh structure using laser interference lithography; the Chinese invention patent 201010287019.0, published 2011.04.13, describes a method for phase-shifting in laser interference nano-lithography by using a phase-shifting positioning system; the chinese invention patent 201010511168.0, published 2011.05.04, describes a method for detecting the incident posture of a light beam in laser interference nanolithography; the Chinese invention patent 201110145715.2, published 2011.12.07, describes a method and system for generating moth compound eye periodic structure pattern by multi-beam laser interference technology; the Chinese invention patent 201210523560.6, published 2014.06.11, describes a method for rapidly manufacturing large-area black silicon by using a laser interference technology; the Chinese patent of invention 201210523661.3, published 2014.06.11, describes a method for preparing a double-period nanostructure by laser interference lithography; the Chinese invention patent 201510030088.6, published 2015.06.17, describes a preparation method for increasing the effective area of a photoelectric material; the Chinese invention patent 201510473611.2, published 2015.11.18, describes a method for preparing a low-friction high-hardness artificial hip joint ball head by surface patterning; the chinese invention patent 201510526268.3, published japanese patent No. 2015.10.28, describes a method and system for obtaining cross-scale 3D printing by using a micro-nano composite periodic structure interference light source generated by a multi-beam laser interference technique; the invention relates to a Chinese patent 201611037444.8, published Japanese 2017.01.25, in particular to a laser interference lithography optical system, which relates to the technical field of laser interference lithography processing and solves the problems that an optical platform in the prior art is complex to build, is easy to be interfered by the outside and has low flexibility; chinese invention patent 201811215327.5, published 2020.04.28, records a system and corresponding method for fabricating a non-modulated array structure using laser interference lithography.
However, the laser interference lithography technology is always limited to planar processing, while laser interference curved surface lithography is an advanced rapid processing technology, and full-coverage processing of various curved surfaces can be realized by utilizing a developed laser interference processing system and a five-axis displacement assembly, so that the defect that the conventional laser lithography cannot process curved surfaces is overcome.
Disclosure of Invention
The invention solves the problems: the invention aims to provide a method for preparing a composite patterned surface on a special-shaped curved surface on the basis of overcoming the limitation of the appearance design of a moving object and not changing the overall appearance structure. The invention can prepare the designed patterned structure on any complex curved surface structure, so that the surface of the patterned structure has the functions of super-hydrophobicity, ice coating prevention and wind resistance reduction.
The technical scheme of the invention is as follows:
the invention discloses a laser curved surface processing system and a manufacturing method of super-hydrophobic, anti-icing and wind resistance reduction, which consists of a laser scanning curved surface manufacturing system and a laser interference curved surface processing system, wherein the system comprises: the device comprises a laser (1), a laser scanning assembly (2), a dynamic focusing assembly (3), a laser interference assembly (4), a five-axis displacement assembly (5), a light spot positioning assembly (6) and a computer (7); the laser (1) provides a high-energy processing light source for the whole system; the dynamic focusing assembly (3) is positioned at the light outlet of the laser scanning assembly (2), so that the real-time dynamic change of the position of a focal plane can be realized, and the curved surface processing of any pattern can be quickly realized; the laser interference component (4) takes the laser (1) as a light source, processes a periodic structure, and can realize large-area curved surface processing by combining with the five-axis displacement component (5); the five-axis displacement assembly (5) can enable the workpiece to move in five dimensions, namely a front-back translation shaft, a left-right translation shaft, a vertical translation shaft, a horizontal rotating shaft and a vertical rotating shaft, so that the irradiation area of a processing light source is increased, and a curved surface workpiece with higher curvature can be processed; the light spot positioning assembly (6) is used for detecting the position information of the laser light spot on the five-axis displacement assembly (5) in real time and feeding the position information back to the computer (7), and the computer (7) controls software to control the five-axis displacement assembly (5) to calibrate the initial processing position of the processing light source;
the system can be split into a laser scanning curved surface manufacturing system and a laser interference curved surface processing system which are respectively responsible for processing a primary random pattern structure and a secondary periodic structure, the system can also independently use the laser scanning system or the laser interference system according to application requirements in practical application, and can also be mixed with the laser scanning curved surface manufacturing system and the laser interference curved surface processing system, namely, a primary patterning structure is processed by the laser scanning curved surface manufacturing system, and a secondary patterning structure is realized by the laser interference curved surface processing system, so that the method for realizing the super-hydrophobic, ice coating prevention and wind resistance reduction structure specifically comprises the following steps:
designing a patterning structure with special functions, drawing a 3D structure diagram of a corresponding workpiece, and importing the 3D structure diagram into a laser scanning curved surface manufacturing system;
fixing the workpiece on a five-axis displacement assembly (5), positioning a light spot at a processing starting point by using a light spot positioning assembly (6), and performing primary patterning processing on the curved surface by using a dynamic focusing function of a laser scanning curved surface manufacturing system;
designing a machining path according to the curved surface of the workpiece, and programming a five-axis path;
establishing a multi-beam laser interference assembly, fixing the workpiece on a five-axis displacement assembly, and positioning an interference plane of a processing light source at a sample processing starting point by using a light spot positioning assembly (6);
fifthly, performing laser interference curved surface photoetching by using a laser interference curved surface processing system, and rapidly processing in a large area to obtain a secondary micron-scale periodic structure;
testing the performance of the workpiece, changing parameters of a laser scanning curved surface manufacturing system, and optimizing a primary pattern structure; and changing the parameters of the interference light field to obtain the periodic micro-nano structure with the adjustable structure period from 0.2 mu m to 100 mu m and controllable depth.
In the scheme, the laser scanning curved surface manufacturing system is composed of a dynamic focusing assembly (3), a laser scanning assembly (2) and a five-axis displacement assembly (5), and the depth and the line width of a primary pattern prepared by laser scanning can be adjusted by changing scanning parameters (energy, scanning speed, scanning times and laser pulse frequency).
In the scheme, the laser interference curved surface photoetching system consists of a five-axis displacement component (5) and a laser interference component (4), the laser interference component consists of a high reflecting mirror, a spectroscope, a half-wave plate and a polaroid, and the characteristic size of an interference pattern can be adjusted from a nanometer level to a micron level by changing interference parameters (wavelength, spatial angle, incidence angle, phase angle, polarization state, interference light intensity, exposure time and frequency) of each beam of light, so that an array structure with different periods, characteristic sizes and depths can be obtained by interference on the surface of a curved surface workpiece.
In the scheme, the laser is a nanosecond pulse laser with high peak power and a certain coherence length, the output wavelengths are 1064nm, 532nm and 355nm, and the output pulse width is nanosecond.
In the above scheme, the multiple light beams are two light beams, three light beams, four light beams, five light beams or six light beams.
In the above scheme, the primary patterning structure is characterized in that: the size of each line is larger than 50 mu m wide, the structural depth of the pattern and the width of the line can be controlled by changing the scanning power, the scanning speed and the scanning times, lotus leaves, shark scales and feathers (complex bionic structures) can be simulated, and the first-stage patterning processing is realized on a curved surface workpiece by utilizing the dynamic focusing function of a laser scanning system.
In the above scheme, the secondary micron-scale periodic structure is characterized in that: the laser is an ordered periodic structure, can be controlled by changing the incidence angle, the space angle and the polarization state of laser, and can be a stripe, a lattice or a hole array structure, and the period of the structure array is 0.2-100 mu m.
In the above scheme, the material of processing sample, its characterized in that: can be metal, semiconductor material, photosensitive resin and polymer material.
In the above scheme, the laser scanning system with the dynamic focusing function can project onto a pre-drawn 3D graph according to a designed plane pattern, thereby realizing 3D curved surface patterning lithography.
In the scheme, the rapid large-area processing refers to one-time processing of 1.1cm by utilizing laser interference2And the five-axis displacement assembly can accurately move a specific displacement to realize rapid large-area machining.
Compared with the prior art, the invention has the following advantages:
1. the invention overcomes the limitation of the appearance design of a moving object, and aims to provide a method for preparing a composite patterned surface on the surface of a special-shaped curved surface on the basis of not changing the overall appearance structure, so that the surface has the function of reducing resistance.
2. The system can be used for preparing the composite structure with the superposed primary pattern and the superposed secondary pattern by using a laser scanning system and a laser interference system in a mixed way, and the system can also be used for preparing a surface structure surface with the functions of super-hydrophobicity, ice coating prevention and wind resistance by independently selecting the laser scanning system or the laser interference system according to the application requirements in practical application.
3. The processing method of the invention combines the laser interference system and the five-axis displacement component to realize the processing of the direction-controllable periodic structure, and can control the direction and the period of the etching pattern by changing the parameters of laser wavelength, laser beam number, incidence angle, space angle, polarization state and the like. Compared with other technologies, the method has the advantages of no need of complex steps, simple manufacturing process and high efficiency, and can design corresponding interference systems to prepare various patterns according to required effects.
Drawings
FIG. 1 is a schematic diagram of the system of the present invention;
FIG. 2 is a schematic diagram of a two-beam laser interference system; HR: a mirror; BS: a beam splitter; h: a quarter wave plate; p: a polarizing plate; 5: a five-axis displacement assembly;
FIG. 3 is a schematic diagram of a three-beam laser interference system; HR: a mirror; BS: a beam splitter; h: a quarter wave plate; p: a polarizing plate; 5: a five-axis displacement assembly;
FIG. 4 is a schematic diagram of the effect of a primary pattern projected on a workpiece implementing an exemplary design;
FIG. 5 is an SEM image of an example of a titanium alloy (TC4) workpiece after being processed into a primary bionic shark skin structure;
FIG. 6 is an SEM image of an example of a titanium alloy (TC4) workpiece after secondary striation structure machining;
FIG. 7 is an SEM image of a copper (H62) workpiece after curved surface laser interference machining;
fig. 8 is an SEM image of an example of an aluminum alloy (7075) workpiece after secondary structure processing.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Examples of the present invention will be described in further detail below with reference to the accompanying drawings.
As shown in fig. 1, the laser curved surface processing system of the present invention includes: the device comprises a laser 1, a laser scanning component 2, a dynamic focusing component 3, a laser interference component 4, a five-axis displacement component 5, a light spot positioning component 6 and a computer 7; the laser 1 provides a high-energy processing light source for the whole system; the dynamic focusing assembly 3 is positioned at the light outlet of the laser scanning assembly 2, so that the real-time dynamic change of the position of a focal plane can be realized, and the curved surface processing of any pattern can be quickly realized; the laser interference component 4 takes the laser 1 as a light source, processes a periodic structure, and can realize large-area curved surface processing by combining with the five-axis displacement component 5; the five-axis displacement assembly 5 can enable the workpiece to move in five dimensions, namely a front-back translation shaft, a left-right translation shaft, a vertical translation shaft, a horizontal rotating shaft and a vertical rotating shaft, so that the irradiation area of a processing light source is increased, and a curved surface workpiece with higher curvature can be processed; the light spot positioning assembly 6 is used for detecting the position information of the laser light spot on the five-axis displacement assembly 5 in real time and feeding the position information back to the computer 7, and the computer 7 controls software to control the five-axis displacement assembly 5 to calibrate the initial processing position of the processing light source; the system can be split into a laser scanning curved surface manufacturing system and a laser interference curved surface processing system which are respectively responsible for processing a primary random pattern structure and a secondary periodic structure, the system can also independently use the laser scanning system or the laser interference system according to application requirements in practical application, and can also be mixed with the laser scanning curved surface manufacturing system and the laser interference curved surface processing system, namely, a primary patterning structure is processed by the laser scanning curved surface manufacturing system, and a secondary patterning structure is realized by the laser interference curved surface processing system, so that the method for realizing the super-hydrophobic, ice coating prevention and wind resistance reduction structure specifically comprises the following steps:
designing a patterning structure with special functions, drawing a 3D structure diagram of a corresponding workpiece, and importing the 3D structure diagram into a laser scanning curved surface manufacturing system;
fixing the workpiece on a five-axis displacement assembly 5, positioning a light spot at a processing starting point by using a light spot positioning assembly 6, and performing primary patterning processing on the curved surface by using a dynamic focusing function of a laser scanning curved surface manufacturing system;
designing a machining path according to the curved surface of the workpiece, and programming a five-axis path;
establishing a multi-beam laser interference assembly, fixing the workpiece on a five-axis displacement assembly, and positioning an interference plane of a processing light source at a sample processing starting point by using a light spot positioning assembly 6;
fifthly, performing laser interference curved surface photoetching by using a laser interference curved surface processing system, and rapidly processing in a large area to obtain a secondary micron-scale periodic structure;
testing the performance of the workpiece, changing parameters of a laser scanning curved surface manufacturing system, and optimizing a primary pattern structure; and changing the parameters of the interference light field to obtain the periodic micro-nano structure with the adjustable structure period from 0.2 mu m to 100 mu m and controllable depth.
FIG. 2 is a schematic diagram of a two-beam laser interference system; the laser 1 emits a beam of high-energy laser, the high-energy laser is divided into two beams of coherent light by a spectroscope BS, and the two beams of coherent light are reflected to a sample stage of a five-axis displacement assembly 5 through an energy adjusting combination formed by a quarter-wave plate H and a polarizing plate P at a certain angle by two reflecting mirrors HR.
FIG. 3 is a schematic diagram of a three-beam laser interference system; the laser 1 emits a beam of high-energy laser, the high-energy laser is divided into two beams of coherent light with the energy ratio of 1:2 through a spectroscope BS, one beam with higher energy is divided into two beams of coherent light with the same energy through the spectroscope BS, the two beams of coherent light are reflected to a sample stage of the five-axis displacement assembly 5 through an energy adjusting combination formed by a quarter-wave plate H and a polaroid P at a certain angle through three reflectors HR, and a three-beam interference system with different energy distributions can be obtained by adjusting the polarization angle of the polaroid P.
FIG. 4 shows a projected ball-end model diagram of a first-level design according to an exemplary embodiment of the present invention; designing a shark skin-like surface structure by adopting CAD software, importing the shark skin-like surface structure into scanning component control software, establishing a spherical working area and projecting the designed structure on the spherical working area.
FIG. 5 is an SEM image of an example of a titanium alloy (TC4) workpiece after being processed into a primary bionic shark skin structure;
FIG. 6 is an SEM image of an example of a titanium alloy (TC4) workpiece after secondary striation processing;
FIG. 7 shows an SEM image of a copper (H62) workpiece after curved surface laser interference machining;
fig. 8 shows an SEM image of an example of an aluminum alloy (7075) workpiece after secondary structure processing.
Example one
Firstly, importing a designed bionic sharkskin structure into scanning system software; ultrasonically cleaning a sample, and ultrasonically cleaning the sample in an acetone solution, absolute ethyl alcohol and a deionized water solution for 5min in sequence to remove surface pollutants; a first level of patterning is performed to obtain the structure shown in fig. 5. The adopted high-reflection mirror HR and the spectroscope BS of the laser interference system form a light splitting system. A1064 nm laser beam is emitted by a laser, is deflected to the light path by a reflector HR, and is then split into two coherent light beams by a spectroscope BS, a half-wave plate H and a polaroid P form an energy adjusting device, the two spatially symmetrical coherent light beams are incident at an incident angle of 3 degrees, and the surface of the titanium alloy is directly etched to obtain a secondary structure with a period of 10 microns, as shown in FIG. 6.
Example two
Ultrasonically cleaning a sample, and ultrasonically cleaning the sample in an acetone solution, absolute ethyl alcohol and a deionized water solution for 5min in sequence to remove surface pollutants; the adopted high-reflection mirror HR and the spectroscope BS of the laser interference system form a light splitting system. A1064 nm laser beam is emitted by a laser, is deflected to the light path by a reflector HR, and is then split into two coherent light beams by a spectroscope BS, a half-wave plate H and a polaroid P form an energy adjusting device, the two spatially symmetrical coherent light beams are incident at an incident angle of 1.45 degrees, and the surface of the brass is directly etched to obtain a secondary structure with a period of 42 μm, as shown in FIG. 7.
EXAMPLE III
Ultrasonically cleaning a sample, and ultrasonically cleaning the sample in an acetone solution, absolute ethyl alcohol and a deionized water solution for 5min in sequence to remove surface pollutants; the adopted high-reflection mirror HR and the spectroscope BS of the laser interference system form a light splitting system. A laser emits a 1064nm laser beam, the laser beam is deflected by a reflector HR to form a light path, and then is divided into three coherent light beams by a spectroscope BS, a half-wave plate H and a polaroid P form an energy adjusting device, and the spatial angles of incident light form a system central axis and are symmetrically distributed, namely 0 degree, 120 degrees and 240 degrees; the incident angles are all 11.69 degrees; the surface of the cobalt-chromium-molybdenum alloy is directly etched in the polarization state of TE \ TE \ TE. to obtain a lattice structure with the period of 3.5 mu m, as shown in FIG. 8.
Claims (8)
1. The invention discloses a laser curved surface processing system and a manufacturing method of super-hydrophobic, anti-icing and wind resistance reduction, which consists of a laser scanning curved surface manufacturing system and a laser interference curved surface processing system, wherein the system comprises: the device comprises a laser (1), a laser scanning assembly (2), a dynamic focusing assembly (3), a laser interference assembly (4), a five-axis displacement assembly (5), a light spot positioning assembly (6) and a computer (7); the laser is characterized in that the laser (1) provides a high-energy processing light source for the whole system; the dynamic focusing assembly (3) is positioned at the light outlet of the laser scanning assembly (2), so that the real-time dynamic change of the position of a focal plane can be realized, and the curved surface processing of any pattern can be quickly realized; the laser interference component (4) takes the laser (1) as a light source, processes a periodic structure, and can realize large-area curved surface processing by combining with the five-axis displacement component (5); the five-axis displacement assembly (5) can enable the workpiece to move in five dimensions, namely a front-back translation shaft, a left-right translation shaft, a vertical translation shaft, a horizontal rotating shaft and a vertical rotating shaft, so that the irradiation area of a processing light source is increased, and a curved surface workpiece with higher curvature can be processed; the light spot positioning assembly (6) is used for detecting the position information of the laser light spot on the five-axis displacement assembly (5) in real time and feeding the position information back to the computer (7), and the computer (7) controls software to control the five-axis displacement assembly (5) to calibrate the initial processing position of the processing light source;
the system can be split into a laser scanning curved surface manufacturing system and a laser interference curved surface processing system which are respectively responsible for processing a primary random pattern structure and a secondary periodic structure, the system can also independently use the laser scanning system or the laser interference system according to application requirements in practical application, and can also be mixed with the laser scanning curved surface manufacturing system and the laser interference curved surface processing system, namely, a primary patterning structure is processed by the laser scanning curved surface manufacturing system, and a secondary patterning structure is realized by the laser interference curved surface processing system, so that the method for realizing the super-hydrophobic, ice coating prevention and wind resistance reduction structure specifically comprises the following steps:
designing a patterning structure with special functions, drawing a 3D structure diagram of a corresponding workpiece, and importing the 3D structure diagram into a laser scanning curved surface manufacturing system;
fixing the workpiece on a five-axis displacement assembly (5), positioning a light spot at a processing starting point by using a light spot positioning assembly (6), and performing primary patterning processing on the curved surface by using a dynamic focusing function of a laser scanning curved surface manufacturing system;
designing a machining path according to the curved surface of the workpiece, and programming a five-axis path;
establishing a multi-beam laser interference assembly, fixing a workpiece on a five-axis displacement assembly (5), and positioning an interference plane of a processing light source at a sample processing starting point by using a light spot positioning assembly (6);
fifthly, performing laser interference curved surface photoetching by using a laser interference curved surface processing system, and rapidly processing in a large area to obtain a secondary micron-scale periodic structure;
testing the performance of the workpiece, changing parameters of a laser scanning curved surface manufacturing system, and optimizing a primary pattern structure; and changing the parameters of the interference light field to obtain the periodic micro-nano structure with the adjustable structure period from 0.2 mu m to 100 mu m and controllable depth.
2. The method according to claim 1, wherein the laser scanning curved surface manufacturing system is composed of a dynamic focusing assembly (3), a laser scanning assembly (2) and a five-axis displacement assembly (5), and the depth and line width of the primary pattern prepared by laser scanning can be adjusted by changing the energy, scanning speed, scanning times and laser pulse frequency.
3. The primary patterning structure of claim 1, wherein the primary patterning process simulating lotus leaves, shark scales and feathers can be realized on a curved workpiece by using the dynamic focusing function of a laser scanning curved surface manufacturing system.
4. The secondary micron-scale periodic structure of claim 1, which is a stripe, lattice or pore array structure of an ordered periodic structure having a structure array period of 0.2 μm to 100 μm.
5. The method of claim 1, wherein: the laser interference curved surface photoetching system comprises a five-axis displacement component (5) and a laser scanning component (2), wherein the laser interference component (4) comprises a high reflecting mirror, a spectroscope, a half-wave plate and a polaroid, and the characteristic size of an interference pattern can be adjusted from nano-scale to micron-scale by changing the wavelength, the spatial angle, the incident angle, the phase angle, the polarization state, the interference light intensity, the exposure time and the frequency of each beam of light, so that the array structure with different periods, characteristic sizes and depths can be obtained by interference on the surface of a curved surface workpiece.
6. The method of claim 1, wherein the material of the processed sample is selected from the group consisting of metal, semiconductor material, photosensitive resin, and polymer material.
7. The method as claimed in claim 1, wherein the structure size of the primary pattern and the period, depth and appearance of the secondary structure are adjustable from nano-scale to micro-scale, so that different surfaces with super-hydrophobic, anti-icing and wind resistance reducing functions can be obtained.
8. The method as claimed in claim 1, wherein the system can mix the laser scanning curved surface manufacturing system and the laser interference system to prepare the composite structure with the superimposed primary pattern and secondary pattern, and in practical application, the system can also independently select the laser scanning system or the laser interference system to prepare the structural surface with the functions of super-hydrophobicity, ice coating prevention and wind resistance reduction according to application requirements.
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| CN113134971A (en) * | 2021-04-26 | 2021-07-20 | 长春理工大学 | System and method for manufacturing bionic sharkskin structure |
| CN113515020A (en) * | 2021-04-26 | 2021-10-19 | 长春理工大学 | Additive manufacturing system |
| CN113515020B (en) * | 2021-04-26 | 2022-11-11 | 长春理工大学 | Additive manufacturing system |
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