CN113115188A - MEMS piezoelectric microphone - Google Patents

MEMS piezoelectric microphone Download PDF

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Publication number
CN113115188A
CN113115188A CN202110332900.6A CN202110332900A CN113115188A CN 113115188 A CN113115188 A CN 113115188A CN 202110332900 A CN202110332900 A CN 202110332900A CN 113115188 A CN113115188 A CN 113115188A
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elastic
layer
piezoelectric
arm
anchoring
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CN202110332900.6A
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CN113115188B (en
Inventor
童贝
石正雨
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AAC Technologies Holdings Shenzhen Co Ltd
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AAC Acoustic Technologies Shenzhen Co Ltd
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    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00Piezoelectric transducers; Electrostrictive transducers
    • H04R17/02Microphones
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003Mems transducers or their use

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)

Abstract

The invention provides a MEMS piezoelectric microphone, comprising at least one piezoelectric unit, wherein the piezoelectric unit comprises: the diaphragm structure comprises a fixed area and a plurality of movable parts, wherein the fixed area comprises an anchoring part and a plurality of anchoring arms formed by radially extending from the edge of the anchoring part; the piezoelectric unit further comprises a plurality of elastic structures, each elastic structure comprises a fixing part and an elastic part fixed on the fixing part, the fixing part is fixed on the anchoring arm, and the elastic part surrounds the outer periphery of each movable part. The fixing parts of a plurality of elastic structures are fixed on the anchoring arms, and the elastic parts surround the outer periphery of each movable part, so that the diaphragm is bound to the substrate through the elastic structures, and the reliability of the microphone is greatly improved.

Description

MEMS piezoelectric microphone
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of sound-electricity conversion, in particular to an MEMS piezoelectric microphone.
[ background of the invention ]
Micro-Electro-Mechanical systems (MEMS), also called Micro-electromechanical systems, microsystems, micromachines, etc., are a tiny high-tech device. Common products include MEMS piezoelectric microphones and the like, and existing MEMS piezoelectric microphones include a piezoelectric unit including a substrate, a support, and a diaphragm structure, wherein the diaphragm structure is composed of four fan-shaped diaphragms independent of each other, and a small portion of the middle of the diaphragm structure is fixed on a support pillar of the support, while a support arm area on the support does not cover the diaphragm structure, that is, only a vertex portion of each fan-shaped diaphragm is fixed on the support pillar of the support. However, one end of the structure is fixed at the middle position, and the other end is free, so that the free end of the film layer of the structure can be greatly warped under the stress condition, and meanwhile, the reliability of the structure in the falling process can be poor, and certain influence can be caused on the reliability of the MEMS piezoelectric microphone.
[ summary of the invention ]
The invention aims to provide a highly reliable MEMS piezoelectric microphone.
To achieve the above object, the present invention provides a MEMS piezoelectric microphone including at least one piezoelectric unit, the piezoelectric unit including: the substrate comprises an annular peripheral wall and a supporting structure, wherein the annular peripheral wall surrounds a containing cavity, the supporting structure is arranged in the containing cavity, and the supporting structure comprises a supporting part and a plurality of extension arms, the supporting part is arranged at intervals with the peripheral wall, and the extension arms extend from the peripheral wall to the supporting part; the diaphragm structure is of an integral structure and comprises a fixed area and a plurality of movable parts, the fixed area comprises an anchoring part and a plurality of anchoring arms which radially extend from the edge of the anchoring part, the anchoring part is fixed on the supporting part, the anchoring arms are fixed on the extension arms, and each movable part surrounds the anchoring part and is arranged at intervals with the anchoring arms; the piezoelectric unit further comprises a plurality of elastic structures, each elastic structure comprises a fixing part and an elastic part fixed on the fixing part, the fixing part is fixed on the anchoring arm, and the elastic part surrounds the outer periphery of each movable part.
Preferably, the elastic part includes first elastic arm and second elastic arm and the linking arm that sets up relatively, the both ends of first elastic arm respectively with fixed part and linking arm fixed connection, the second elastic arm with linking arm fixed connection, and the cooperation subsides are located the periphery side of movable part.
Preferably, each of the elastic structures is a spring structure.
Preferably, the spring structure comprises one of a single-arm structure, a serpentine structure or an i-shaped structure.
Preferably, each of the elastic structures and the anchoring arm are integrally formed.
Preferably, the membrane structure includes a first electrode layer, a first piezoelectric layer and a second electrode layer stacked in sequence along a vibration direction of the membrane structure, and the first electrode layer is disposed on a side of the membrane structure close to the support structure.
Preferably, the diaphragm structure further includes a second piezoelectric layer stacked on a side of the second electrode layer away from the first piezoelectric layer, and a third electrode layer stacked on the second piezoelectric layer.
Preferably, the elastic structure includes a first elastic structure layer, a second elastic structure layer, a third elastic structure layer, a fourth elastic structure layer and a fifth elastic structure layer which are stacked in sequence along the vibration direction, and the first elastic structure layer, the second elastic structure layer, the third elastic structure layer, the fourth elastic structure layer and the fifth elastic structure layer respectively surround the first electrode layer, the first piezoelectric layer, the second electrode layer, the second piezoelectric layer and the third electrode layer at the periphery.
Preferably, the first elastic structure layer, the second elastic structure layer, the third elastic structure layer, the fourth elastic structure layer and the fifth elastic structure layer have the same structure.
The invention has the beneficial effects that: the diaphragm structure of the MEMS piezoelectric microphone is fixed on a substrate through an anchoring part and a plurality of anchoring arms formed by radially extending from the edge of the anchoring part, and the fixing parts of a plurality of elastic structures are fixed on the substrate, the elastic parts surround the outer peripheral side of each movable part, so that the anchoring arms of the diaphragm structure are bound on the substrate through the elastic structures, and the reliability of the MEMS piezoelectric microphone is greatly improved.
[ description of the drawings ]
Fig. 1 is a schematic structural view of a piezoelectric unit according to an embodiment of the present invention;
FIG. 2 is a top view of a piezoelectric unit of an embodiment of the present invention;
FIG. 3 is a bottom view of a piezoelectric unit of an embodiment of the present invention;
FIG. 4 is a cross-sectional view taken along A-A of FIG. 1;
FIG. 5 is a perspective view of a piezoelectric unit of an embodiment of the present invention;
FIG. 6 is a schematic structural diagram of a spring structure according to an embodiment of the present invention;
FIG. 7 is a partial enlarged view of B in FIG. 6;
FIG. 8 is a schematic structural diagram of a substrate according to an embodiment of the present invention;
FIG. 9 is a schematic structural diagram of a first substrate according to an embodiment of the invention;
FIG. 10 is a top view of a second substrate according to an embodiment of the invention;
FIG. 11 is a schematic structural diagram of a first electrode layer according to an embodiment of the invention;
fig. 12 is a schematic structural diagram of the first piezoelectric layer according to an embodiment of the invention.
[ detailed description ] embodiments
The invention is further described with reference to the following figures and embodiments.
It should be noted that all directional indicators (such as upper, lower, left, right, front, back, inner, outer, top, bottom … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components in a specific posture (as shown in the figure), and if the specific posture is changed, the directional indicator is changed accordingly.
Referring to fig. 1 to 12, the present invention provides a MEMS piezoelectric microphone, where the MEMS piezoelectric microphone includes a plurality of piezoelectric units 1, and the plurality of piezoelectric units 1 are distributed in an array structure, in this embodiment, there are 1 piezoelectric units 1, and certainly, when a certain sensitivity or signal-to-noise ratio is ensured, the piezoelectric units 1 may also be distributed in a 2 × 2 array structure, or distributed in a 3 × 3 array structure or in more array structures.
Referring to fig. 1 to 5, the piezoelectric unit 1 includes a substrate 10, a diaphragm structure 30, and an elastic structure 20, wherein the square substrate 10 has a receiving cavity 101; the diaphragm structure 30 is formed above the substrate 10, and the elastic structure 20 is fixed on the diaphragm structure 30 and is circumferentially arranged on the outer periphery side of the diaphragm structure 30.
The substrate 10 comprises an annular peripheral wall 102 surrounding a containing cavity 101 and a supporting structure arranged in the containing cavity 101, wherein the supporting structure comprises a supporting part 103 arranged at an interval with the peripheral wall 102 and a plurality of extending arms 104 extending from the peripheral wall 102 to the supporting part 103.
Diaphragm structure 30, diaphragm structure 30 is structure as an organic whole, including fixed region 301 and a plurality of movable part 302, fixed region 301 includes anchor portion 303 and from a plurality of anchor arm 304 that anchor portion 303's edge radial extension formed, anchor portion 303 is fixed in supporting part 103, anchor arm 304 is fixed in extension arm 104, every movable part 302 encircle anchor portion 303, and with anchor arm 304 interval sets up.
A plurality of elastic structures 20, each of the elastic structures 20 includes a fixed portion 21 and an elastic portion 22 fixed on the fixed portion 21, the fixed portion 21 is fixed on the anchoring arm 304, and the elastic portion 22 surrounds an outer peripheral side of each of the movable portions 302.
The diaphragm structure 30 of the piezoelectric unit 1 is fixed on the substrate by the anchoring portion 303 and the plurality of anchoring arms 304 formed by extending radially from the edge of the anchoring portion, and the elastic portion 22 surrounds the outer circumference side of each of the movable portions 302 by fixing the fixing portions 21 of the plurality of elastic structures 20 on the anchoring arms 304, so that the diaphragm is bound to the substrate 10 by the elastic structures, thereby greatly improving the reliability of the microphone.
In this embodiment, one end of the extension arm 104 is connected to the support portion 103, the other end of the extension arm 104 is connected to the peripheral wall 102 so as to divide the housing cavity 101 into a plurality of cavities 105 disposed at intervals along the circumferential direction of the extension arm 104, and the elastic structure 20 and the movable portion 302 fall into the cavities 105 along the orthogonal projection of the axial direction of the base 10. Specifically, a flexible structure 20 and a movable portion 302 are suspended above each cavity 105, and a projection contour of each flexible structure 20 and a projection contour of each movable portion 302 in a direction perpendicular to the diaphragm structure 30 are located within a projection contour of the corresponding cavity 105 in a direction perpendicular to the diaphragm structure 30.
In the present embodiment, four supporting structures are disposed on the substrate 10, and correspondingly, four membrane structures 30 and four elastic structures 20 are disposed; three supporting structures may be provided on the substrate 10, three membrane structures 30 and three elastic structures 20 are correspondingly provided, and the electrode layer may be made into a multi-block structure on each membrane. Specifically, the number of electrodes needs to be designed according to the size requirement of the capacitor. Of course, the support structure, the membrane structure and the elastic structure are not limited to three, four, etc. as described above, but may be five, six, etc., and may be selected and arranged according to actual situations.
In the present embodiment, the projection profile of the inner sidewall of the annular peripheral wall 102 in the direction perpendicular to the diaphragm structure 30 may be a circle or a polygon, and the number of the extension arms 104 may be set according to actual needs, specifically, the number of the extension arms is at least two, and as a more preferred embodiment, the number of the extension arms 104 is four.
In the present embodiment, the projection profiles of the inner sidewall of the annular peripheral wall 102 and the outer sidewall of the support 103 in the substrate 10 in the direction perpendicular to the diaphragm structure 30 are both circular; the projection contour of the anchoring part 303 in the direction vertical to the diaphragm structure 30 is circular, and the projection contour of the anchoring arm 304 in the direction vertical to the diaphragm structure 30 is strip-shaped; the projection profile of the single movable portion 302 in the direction perpendicular to the diaphragm structure 30 is a fan-ring shape.
In this embodiment, each of the elastic structures 20 and the anchoring arms 304 are integrally formed. The fixing effect is good, and the structural strength is high.
In this embodiment, the elastic portion 22 includes a first elastic arm 221, a second elastic arm 222 and a connecting arm 223, which are oppositely disposed, two ends of the first elastic arm 221 are fixedly connected to the fixing portion and the connecting arm 223, respectively, and the second elastic arm 222 is fixedly connected to the connecting arm 223 and is fittingly attached to an outer peripheral side of the movable portion. The first elastic arm 221 and the second elastic arm 222 are oppositely arranged between the substrate and the membrane structure, and one end of the first elastic arm 221 and one end of the second elastic arm 222 are fixedly connected through the connecting arm 223, so that the elastic performance of the first elastic arm 221 and the second elastic arm 222 acts on the membrane structure, and then the membrane structure 30 is bound to the substrate 10 through the elastic structure 20, and the reliability of the MEMS piezoelectric microphone is greatly improved.
In this embodiment, an elastic gap 224 is formed between the first elastic arm 221 and the second elastic arm 222. The elastic gap 224 can increase the elastic performance between the first elastic arm 221 and the second elastic arm 222, thereby improving the overall elastic performance of the elastic structure 20, and further improving the reliability of the microphone.
Further, the first elastic arm 221 and the second elastic arm 222 may be disposed in an arc-shaped structure, and are correspondingly disposed on the outer peripheral side of the diaphragm structure 30, so as to conveniently bind the diaphragm structure to the substrate, and the fixing effect is good.
In the present embodiment, each of the elastic structures 20 is a spring structure. The spring structure has good elastic recovery effect, so that the diaphragm structure 30 is conveniently bound on the substrate 10, and the reliability of the microphone is effectively improved.
In other embodiments, the spring structure further comprises one of a single arm structure, a serpentine structure, or an i-shaped structure.
In this embodiment, the membrane structure 30 is formed by stacking at least three layers of materials. Optionally, the membrane structure 30 includes a first electrode layer 31, a first piezoelectric layer 32, and a second electrode layer 33 stacked in sequence along the vibration direction, and the first electrode layer 31 is disposed on a side of the membrane structure 30 close to the support structure.
In this embodiment, the membrane structure 30 further includes a second piezoelectric layer 34 stacked on a side of the second electrode layer 33 away from the first piezoelectric layer 32, and a third electrode layer 35 stacked on the second piezoelectric layer 34.
In this embodiment, the elastic structure includes a first elastic structure layer 23, a second elastic structure layer 24, a third elastic structure layer 25, a fourth elastic structure layer 26, and a fifth elastic structure layer 27, which are sequentially stacked in the vibration direction, and the first elastic structure layer 23, the second elastic structure layer 24, the third elastic structure layer 25, the fourth elastic structure layer 26, and the fifth elastic structure layer 27 respectively surround the peripheries of the first electrode layer 31, the first piezoelectric layer 32, the second electrode layer 33, the second piezoelectric layer 34, and the third electrode layer 35.
The first elastic structure layer 23, the second elastic structure layer 24, the third elastic structure layer 25, the fourth elastic structure layer 26 and the fifth elastic structure layer 27 are the same in structure.
The first electrode layer 31 includes a first electrode sheet 311 located in the movable portion 302 and a second electrode sheet 312 located in the fixed region 301, and the first electrode sheet 311 and the second electrode sheet 312 are disposed at an interval. The second electrode layer 33 and the third electrode layer 35 have the same structure as the first electrode layer 31.
The second electrode layer 33 includes a third electrode sheet located at the movable portion 302 and a fourth electrode sheet located at the fixed region 301, and the third electrode sheet and the fourth electrode sheet are disposed at an interval.
The third electrode layer 35 includes a fifth electrode sheet located at the movable portion 302 and a sixth electrode sheet located at the fixed region 301, and the fifth electrode sheet and the sixth electrode sheet are disposed at an interval.
The first piezoelectric layer 32 includes a first movable portion 321 located in the movable portion 302 and a first fixed region 322 located in the fixed region 301, and the first movable portion 321 is connected to the first fixed region 322. The first piezoelectric layer 32 is integrally formed and has a circular structure as a whole, that is, the first movable portion 321 is connected to the first fixing area 322, so as to improve the reliability of the membrane structure 30. The second piezoelectric layer 34 is identical in structure to the first piezoelectric layer 32.
The second piezoelectric layer 34 includes a second movable portion located at the movable portion 302 and a second fixed region located at the fixed region 301, the second movable portion being connected to the second fixed region.
In this embodiment, the extension arm 104 divides the accommodating cavity 101 into a plurality of cavities, and the movable portion falls into the cavities along the orthogonal projection of the axial direction of the base.
In this embodiment, the number of extension arms 104 is at least two.
In this embodiment, the base 10 includes a first substrate 11 and a second substrate 12, the accommodating cavity 101 includes a first cavity 111 formed in the first substrate 11, the peripheral wall 102 includes a first peripheral wall 112 enclosing the first cavity, the supporting portion 103 includes a first supporting portion 113 disposed in the first cavity 111 and spaced apart from the first peripheral wall 112, and the extension arms 104 include a plurality of first extension arms 114 extending from the first peripheral wall 112 to the first supporting portion 113.
Referring to fig. 9-10, the first substrate 11 includes a first peripheral wall 112 enclosing a first cavity 111, a first supporting portion 113 disposed in the first cavity 111 and spaced apart from the first peripheral wall 112, and a first extension arm 114 extending from the first peripheral wall 112 to the first supporting portion 113, the first supporting portion 113 being disposed at a center position of the first cavity 111, wherein the first supporting portion 113 and the first extension arm 114 form a first supporting structure; one end of the first extension arm 114 is connected to the first support portion 113, and the other end of the first extension arm 114 is connected to the first peripheral wall 112, so as to divide the first cavity 111 into a plurality of first sub-cavities 115 arranged at intervals along the circumference of the first extension arm 114.
The second substrate 12 includes a second peripheral wall 122 enclosing a second cavity 121, a second supporting portion 123 disposed in the second cavity 121 and spaced apart from the second peripheral wall 122, and a second extension arm 124 extending from the second peripheral wall 122 to the second supporting portion 123, the second supporting portion 123 is disposed at a central position of the second cavity 121, wherein the second supporting portion 123 and the second extension arm 124 form a second supporting structure; one end of the second extension arm 124 is connected to the second support portion 123, and the other end of the second extension arm 124 is connected to the second peripheral wall 122 so as to divide the second cavity 121 into a plurality of second sub-cavities 125 arranged at intervals along the circumferential direction of the second extension arm 124.
The first cavity 111 is communicated with the second cavity 121 to form a containing cavity 101, and the first peripheral wall 112 and the second peripheral wall 122 enclose to form an annular peripheral wall 102; the first support part 113 and the second support part 123 are overlapped to form the support part 103 of the substrate 10, the first extension arm 114 and the second extension arm 124 form the extension arm 104 of the substrate 10, and the support part 103 and the extension arm 104 form a support structure; the first subchamber 115 communicates with the second subchamber 125 to form the chamber 105. The extension arms 104 may be used to provide some support protection to the diaphragm structure 30 when the diaphragm structure 30 is greatly deformed, thereby preventing the diaphragm structure 30 from breaking.
Specifically, the diaphragm structure 30 of the piezoelectric unit 1 is fixed on the substrate 10 through the anchor portion 303 and the plurality of anchor arms 304 radially extending from the edge of the anchor portion 303, and the elastic portion 22 surrounds the outer peripheral side of each of the movable portions 302 by fixing the fixing portions 21 of the plurality of elastic structures 20 on the anchor arms 304, so that the diaphragm structure 30 is bound to the substrate 10 through the elastic structures 20, thereby greatly improving the reliability of the MEMS piezoelectric microphone.
While the foregoing is directed to embodiments of the present invention, it will be understood by those skilled in the art that various changes may be made without departing from the spirit and scope of the invention.

Claims (9)

1. A MEMS piezoelectric microphone comprising at least one piezoelectric element, the piezoelectric element comprising:
the substrate comprises an annular peripheral wall and a supporting structure, wherein the annular peripheral wall surrounds a containing cavity, the supporting structure is arranged in the containing cavity, and the supporting structure comprises a supporting part and a plurality of extension arms, the supporting part is arranged at intervals with the peripheral wall, and the extension arms extend from the peripheral wall to the supporting part;
the diaphragm structure is of an integral structure and comprises a fixed area and a plurality of movable parts, the fixed area comprises an anchoring part and a plurality of anchoring arms which radially extend from the edge of the anchoring part, the anchoring part is fixed on the supporting part, the anchoring arms are fixed on the extension arms, and each movable part surrounds the anchoring part and is arranged at intervals with the anchoring arms; the method is characterized in that:
the piezoelectric unit further comprises a plurality of elastic structures, each elastic structure comprises a fixing part and an elastic part fixed on the fixing part, the fixing part is fixed on the anchoring arm, and the elastic part surrounds the outer periphery of each movable part.
2. The MEMS piezoelectric microphone of claim 1, wherein: the elastic part comprises a first elastic arm, a second elastic arm and a connecting arm which are arranged oppositely, the two ends of the first elastic arm are respectively fixedly connected with the fixed part and the connecting arm, the second elastic arm is fixedly connected with the connecting arm, and the second elastic arm is attached to the outer peripheral side of the movable part.
3. The MEMS piezoelectric microphone of claim 1, wherein: each elastic structure is a spring structure.
4. The MEMS piezoelectric microphone of claim 3, wherein: the spring structure is one of a single-arm structure, a snake-shaped structure or an I-shaped structure.
5. The MEMS piezoelectric microphone of claim 1, wherein: each elastic structure and the anchoring arm are integrally formed.
6. The MEMS piezoelectric microphone of claim 1, wherein: the diaphragm structure includes first electrode layer, first piezoelectric layer and the second electrode layer that stacks gradually along its vibration direction, first electrode layer set up in the diaphragm structure is close to one side of bearing structure.
7. The MEMS piezoelectric microphone of claim 6, wherein: the diaphragm structure further comprises a second piezoelectric layer and a third electrode layer, wherein the second piezoelectric layer is stacked on one side, far away from the first piezoelectric layer, of the second electrode layer, and the third electrode layer is stacked on the second piezoelectric layer.
8. The MEMS piezoelectric microphone of claim 7, wherein: the elastic structure comprises a first elastic structure layer, a second elastic structure layer, a third elastic structure layer, a fourth elastic structure layer and a fifth elastic structure layer which are sequentially stacked along the vibration direction, wherein the first elastic structure layer, the second elastic structure layer, the third elastic structure layer, the fourth elastic structure layer and the fifth elastic structure layer respectively surround the first electrode layer, the first piezoelectric layer, the second electrode layer, the second piezoelectric layer and the third electrode layer on the periphery.
9. The MEMS piezoelectric microphone of claim 8, wherein: the first elastic structure layer, the second elastic structure layer, the third elastic structure layer, the fourth elastic structure layer and the fifth elastic structure layer have the same structure.
CN202110332900.6A 2021-03-29 2021-03-29 MEMS piezoelectric microphone Active CN113115188B (en)

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CN114466282B (en) * 2022-01-24 2022-11-25 武汉大学 Acoustic transducer and acoustic device

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