CN114466282A - Acoustic transducer and acoustic device - Google Patents
Acoustic transducer and acoustic device Download PDFInfo
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- CN114466282A CN114466282A CN202210081612.2A CN202210081612A CN114466282A CN 114466282 A CN114466282 A CN 114466282A CN 202210081612 A CN202210081612 A CN 202210081612A CN 114466282 A CN114466282 A CN 114466282A
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- 239000010410 layer Substances 0.000 claims description 136
- 239000011229 interlayer Substances 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 3
- 229910052681 coesite Inorganic materials 0.000 claims description 3
- 229910052906 cristobalite Inorganic materials 0.000 claims description 3
- 239000010445 mica Substances 0.000 claims description 3
- 229910052618 mica group Inorganic materials 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 229910052682 stishovite Inorganic materials 0.000 claims description 3
- 229910052905 tridymite Inorganic materials 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 abstract description 9
- 230000000694 effects Effects 0.000 abstract description 6
- 230000005611 electricity Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 6
- 230000009471 action Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R3/00—Circuits for transducers, loudspeakers or microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/005—Piezoelectric transducers; Electrostrictive transducers using a piezoelectric polymer
Abstract
The invention discloses an acoustic transducer and an acoustic device, relating to the technical field of acoustic transducers, wherein the acoustic transducer comprises: transducer piezoelectric layer, transducer dielectric layer and transducer quality piece, the transducer dielectric layer is located middle part one side of transducer piezoelectric layer, the transducer quality piece is located the transducer dielectric layer deviates from one side of transducer piezoelectric layer, the transducer piezoelectric layer at its both ends position with two shoulder positions of transducer quality piece are equipped with four electrode groups of electricity connection in proper order: the first electrode group, the second electrode group, the third electrode group and the fourth electrode group. Based on the structural characteristics of the clamped beam, the transducer mass block is arranged in the middle of the piezoelectric layer of the transducer, the transducer mass block can increase the area of a region with larger stress when the piezoelectric layer of the transducer vibrates, and the quality of an electric signal generated under the piezoelectric effect is higher, namely the acoustic transducer has higher sensitivity.
Description
Technical Field
The invention relates to the technical field of acoustic transducers, in particular to an acoustic transducer and an acoustic device.
Background
An acoustic transducer is an energy conversion device that converts an acoustic signal into an electrical signal using the piezoelectric effect. The acoustic transducer has the advantages of simple structure, small volume, high signal-to-noise ratio and the like, so that the acoustic transducer has great development prospect in the field of commercial application.
The existing traditional acoustic transducer mostly adopts a cantilever beam structure, when the traditional acoustic transducer is actually used, one end of a piezoelectric layer of the transducer is fixed, the other end of the piezoelectric layer is cantilevered, and an upper electrode and a lower electrode in the piezoelectric layer of the transducer are connected with a terminal and a middle electrode and are grounded.
However, in the fields of distance detection, ultrasonic imaging and the like, the sensitivity of the acoustic transducer is required to be higher, the sensitivity of the traditional acoustic transducer is lower, the final result is influenced and interfered by the low sensitivity, and the large-scale popularization and application cannot be realized.
Disclosure of Invention
The embodiment of the invention provides an acoustic transducer and an acoustic device, and aims to solve the technical problem that the acoustic transducer in the related technology is low in sensitivity.
In a first aspect, there is provided an acoustic transducer comprising:
a transducer piezoelectric layer;
the transducer dielectric layer is arranged on one side of the middle part of the transducer piezoelectric layer;
the transducer mass block is arranged on one side, away from the transducer piezoelectric layer, of the transducer dielectric layer; and
the piezoelectric layer of the energy converter is sequentially provided with four electrode groups which are electrically connected at two end positions of the piezoelectric layer and two shoulder positions of the mass block of the energy converter: the first electrode group, the second electrode group, the third electrode group and the fourth electrode group.
In some embodiments, each electrode group is provided with an upper electrode, a first middle layer electrode, a second middle layer electrode and a lower electrode at intervals, and the first middle layer electrode and the second middle layer electrode are positioned on two sides of the middle section of the piezoelectric layer of the transducer;
the upper electrode of the first electrode group is electrically connected with the upper electrode of the second electrode group, and the lower electrode of the first electrode group is electrically connected with the lower electrode of the second electrode group;
the first middle layer electrode of the second electrode group is electrically connected with the upper layer electrode of the third electrode group, and the second middle layer electrode of the second electrode group is electrically connected with the lower layer electrode of the third electrode group;
the first interlayer electrode of the third electrode group is electrically connected with the first interlayer electrode of the fourth electrode group, and the second interlayer electrode of the third electrode group is electrically connected with the second interlayer electrode of the fourth electrode group.
In some embodiments, the upper layer electrode, the first middle layer electrode, the second middle layer electrode or the lower layer electrode of the four electrode groups are located on the same horizontal layer, and the electrode thicknesses are the same.
In some embodiments, the upper electrode and the lower electrode of each of the electrode sets have the same thickness, and the first intermediate electrode and the second intermediate electrode of each of the electrode sets have the same thickness and are half the thickness of the upper electrode or the lower electrode.
In some embodiments, the distance between the upper layer electrode and the first middle layer electrode, and the distance between the second middle layer electrode and the lower layer electrode of each electrode group are larger than the distance between the first middle layer electrode and the second middle layer electrode.
In some embodiments, the transducer dielectric layer is SiO2、ZrO2Or mica.
In some embodiments, the transducer piezoelectric layer is made of AlN or ZnO.
In some embodiments, the transducer mass is made of silicon, aluminum, or copper.
In some embodiments, the electrodes of four of the electrode sets are made of molybdenum, aluminum, or copper.
In a second aspect, there is provided an acoustic device comprising the acoustic transducer as described above.
The technical scheme provided by the invention has the beneficial effects that:
the embodiment of the invention provides an acoustic transducer and an acoustic device, wherein the acoustic transducer is provided with a transducer mass block in the middle of a piezoelectric layer of the transducer, electrode groups are arranged at two shoulder positions of the transducer mass block, and in the process of converting an acoustic signal into an electric signal, due to the structural characteristics of a clamped beam, the transducer mass block arranged in the middle of the clamped beam can increase the area of a region with larger stress when the piezoelectric layer of the transducer vibrates, and the quality of the electric signal generated under the piezoelectric effect is higher.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an acoustic transducer according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a plurality of acoustic transducers used in combination according to an embodiment of the present invention;
FIG. 3 is a graph illustrating the comparative effect of an acoustic transducer provided by an embodiment of the present invention with respect to a conventional acoustic transducer;
in the figure: 1. a transducer piezoelectric layer; 2. a transducer dielectric layer; 3. a transducer mass.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
The embodiment of the invention provides an acoustic transducer, which can solve the technical problem that the existing acoustic transducer is not high in sensitivity.
Referring to fig. 1, an embodiment of the present invention provides an acoustic transducer including: a transducer piezoelectric layer 1, a transducer dielectric layer 2 and a transducer mass 3.
The transducer medium layer 2 is arranged on one side of the middle part of the transducer piezoelectric layer 1, and the transducer mass block 3 is arranged on one side of the transducer medium layer 2, which deviates from the transducer piezoelectric layer 1.
The piezoelectric layer 1 of the transducer is sequentially provided with four electrode groups which are electrically connected at two end positions and two shoulder positions of the mass block 3 of the transducer: the first electrode group, the second electrode group, the third electrode group and the fourth electrode group.
Specifically, referring to fig. 1, when the acoustic transducer is actually used, two ends of the transducer piezoelectric layer 1 of the acoustic transducer are fixed to form a clamped beam structure, a part of the electrodes of the first electrode group are grounded, a part of the electrodes of the fourth electrode group are connected to an external terminal, the acoustic transducer vibrates in response to an acoustic signal, the transducer piezoelectric layer 1 generates a large stress not only in a region near the two fixed ends, but also generates a large stress change at two shoulder positions of the transducer mass block 3, the area of the region with the large stress is increased, and then a high-quality electrical signal is generated and sent to the terminal. It should be noted that the acoustic transducer can also be used to convert an electrical signal into an acoustic signal, with similar effects. Referring to fig. 2, a plurality of the acoustic transducers may be used in parallel and in series electrical connection to further improve the quality of the electrical signal.
According to the acoustic transducer in the embodiment of the invention, the transducer mass block 3 is arranged in the middle of the transducer piezoelectric layer 1, the electrode groups are arranged at the two shoulder positions of the transducer mass block 3, and in the process of converting an acoustic signal into an electric signal, due to the structural characteristics of the clamped beam, the transducer mass block 2 arranged in the middle of the transducer piezoelectric layer 1 can increase the area of a region with larger stress when the transducer piezoelectric layer 1 vibrates, and the quality of the electric signal generated under the piezoelectric effect is higher.
As an alternative implementation manner, in an embodiment of the invention, referring to fig. 1, each of the electrode sets is provided with an upper layer electrode, a first middle layer electrode, a second middle layer electrode and a lower layer electrode at intervals, and the first middle layer electrode and the second middle layer electrode are located on two sides of a middle cross section of the piezoelectric layer 1 of the transducer.
The upper electrode of the first electrode group is electrically connected with the upper electrode of the second electrode group, and the lower electrode of the first electrode group is electrically connected with the lower electrode of the second electrode group.
The first middle layer electrode of the second electrode group is electrically connected with the upper layer electrode of the third electrode group, and the second middle layer electrode of the second electrode group is electrically connected with the lower layer electrode of the third electrode group.
The first interlayer electrode of the third electrode group is electrically connected with the first interlayer electrode of the fourth electrode group, and the second interlayer electrode of the third electrode group is electrically connected with the second interlayer electrode of the fourth electrode group.
Specifically, referring to fig. 1, the upper electrode, the first intermediate layer electrode, the second intermediate layer electrode, and the lower layer electrode in the first electrode group are respectively an electrode P1, an electrode P2, an electrode P3, and an electrode P4, the upper electrode, the first intermediate layer electrode, the second intermediate layer electrode, and the lower layer electrode in the second electrode group are respectively an electrode P5, an electrode P6, an electrode P7, and an electrode P8, the upper electrode, the first intermediate layer electrode, the second intermediate layer electrode, and the lower layer electrode in the third electrode group are respectively an electrode P1 ', an electrode P2', an electrode P3 ', an electrode P4', and the upper electrode, the first intermediate layer electrode, the second intermediate layer electrode, and the lower layer electrode in the fourth electrode group are respectively an electrode P5 ', an electrode P6', an electrode P7 ', and an electrode P8'. Electrode P1 was connected to electrode P5, electrode P4 was connected to electrode P8, electrode P6 was connected to electrode P1 ', electrode P7 was connected to electrode P4', electrode P2 'was connected to electrode P6', and electrode P3 'was connected to electrode P7'. In practice, the electrode P2 and the electrode P3 are grounded, and the electrode P5 'and the electrode P8' are connected to external terminals.
The traditional single middle layer electrode is optimized into the double middle layer electrode by the acoustic transducer in the embodiment of the invention, the first middle layer electrode and the second middle layer electrode are positioned on two sides of the middle section of the piezoelectric layer 1 of the transducer, and the middle section area with lower stress when the piezoelectric layer 1 of the transducer vibrates is avoided, so that the acoustic transducer in the embodiment of the invention has more outstanding sensitivity compared with the traditional acoustic transducer. Referring to fig. 3, the acoustic transducer according to the embodiment of the present invention has higher sensitivity than a conventional acoustic transducer.
As an alternative implementation manner, in an embodiment of the present invention, referring to fig. 1, the upper layer electrode, the first middle layer electrode, the second middle layer electrode, or the lower layer electrode of the four electrode groups are located in the same horizontal layer, and the thicknesses of the electrodes are the same.
Specifically, referring to fig. 1, the electrode P1, the electrode P5, the electrode P1 ', the electrode P5' are at a first horizontal plane and are located at the top end of the transducer piezoelectric layer 1, the electrode P2, the electrode P6, the electrode P2 ', the electrode P6' are at a second horizontal plane and are located below the first horizontal plane, the electrode P3, the electrode P7, the electrode P3 ', the electrode P7' are at a third horizontal plane and are located below the second horizontal plane, and the electrode P4, the electrode P8, the electrode P4 ', the electrode P8' are at a fourth horizontal plane and are located at the bottom end of the transducer piezoelectric layer 1, so as to generate an electrical signal.
As an alternative implementation manner, in an embodiment of the invention, referring to fig. 1, the thickness of the upper layer electrode and the lower layer electrode of each electrode group is the same, and the thickness of the first middle layer electrode and the second middle layer electrode of each electrode group is the same and is half of that of the upper layer electrode or the lower layer electrode.
Specifically, referring to fig. 1, the thickness of the electrode P1, the electrode P4, the electrode P5, the electrode P8, the electrode P1 ', the electrode P4', the electrode P5 'and the electrode P8' are the same, and the thickness of the electrode P2, the electrode P3, the electrode P6, the electrode P7, the electrode P2 ', the electrode P3', the electrode P6 'and the electrode P7' is the same and is half of the thickness of the electrode P1, the electrode P4, the electrode P5, the electrode P8, the electrode P1 ', the electrode P4', the electrode P5 'and the electrode P8', so as to generate an electrical signal.
As an alternative implementation manner, in an embodiment of the present invention, referring to fig. 1, a distance between the upper layer electrode and the first intermediate layer electrode, and a distance between the second intermediate layer electrode and the lower layer electrode of each electrode group are both greater than a distance between the first intermediate layer electrode and the second intermediate layer electrode.
Specifically, referring to fig. 1, taking the first electrode group as an example, the distance between the electrodes P1 and P2 is greater than the distance between the electrodes P2 and P3, and the distance between the electrodes P3 and P4 is greater than the distance between the electrodes P1 and P2, so as to generate an electrical signal.
As an alternative embodiment, in one inventive embodiment, the transducer dielectric layer 2 is SiO2、ZrO2Or mica, low cost and convenient manufacture.
As an alternative implementation, in an embodiment of the invention, the piezoelectric layer 1 of the transducer is made of AlN or ZnO, so that the price is low and the manufacturing is convenient.
As an alternative implementation, in an embodiment of the invention, the transducer mass 3 is made of silicon, aluminum or copper, so that the cost is low and the manufacturing is convenient.
As an optional implementation manner, in an embodiment of the invention, the electrodes of the four electrode groups are made of molybdenum, aluminum or copper, so that the price is low, and the electricity transmission performance is good.
An embodiment of the present invention provides an acoustic apparatus comprising the aforementioned acoustic transducer.
In the acoustic device in the embodiment of the invention, the transducer mass block 3 is arranged in the middle of the transducer piezoelectric layer 1 of the acoustic transducer, the electrode groups are arranged at the two shoulder positions of the transducer mass block 3, and in the process of converting an acoustic signal into an electric signal, due to the structural characteristics of the clamped beam, the transducer mass block 2 arranged in the middle of the transducer piezoelectric layer 1 can increase the area of a region with larger stress when the transducer piezoelectric layer 1 vibrates, the quality of the electric signal generated under the piezoelectric effect is higher, and the acoustic transducer has higher sensitivity.
In the description of the present invention, it should be noted that the terms "upper", "lower", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and operate, and thus, should not be construed as limiting the present invention. Unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are intended to be inclusive and mean, for example, that they may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
It is to be noted that, in the present invention, relational terms such as "first" and "second", and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The foregoing are merely exemplary embodiments of the present invention, which enable those skilled in the art to understand or practice the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. An acoustic transducer, characterized in that the acoustic transducer comprises:
a transducer piezoelectric layer (1);
the transducer dielectric layer (2), the transducer dielectric layer (2) is arranged on one side of the middle part of the transducer piezoelectric layer (1);
the transducer mass block (3) is arranged on one side, away from the transducer piezoelectric layer (1), of the transducer dielectric layer (2); and
the piezoelectric layer (1) of the transducer is sequentially provided with four electrode groups which are electrically connected at two end positions and two shoulder positions of the mass block (3) of the transducer: the first electrode group, the second electrode group, the third electrode group and the fourth electrode group.
2. The acoustic transducer of claim 1, wherein:
each electrode group is provided with an upper electrode, a first middle layer electrode, a second middle layer electrode and a lower electrode at intervals, and the first middle layer electrode and the second middle layer electrode are positioned on two sides of the middle section of the piezoelectric layer (1) of the transducer;
the upper electrode of the first electrode group is electrically connected with the upper electrode of the second electrode group, and the lower electrode of the first electrode group is electrically connected with the lower electrode of the second electrode group;
the first middle layer electrode of the second electrode group is electrically connected with the upper layer electrode of the third electrode group, and the second middle layer electrode of the second electrode group is electrically connected with the lower layer electrode of the third electrode group;
the first interlayer electrode of the third electrode group is electrically connected with the first interlayer electrode of the fourth electrode group, and the second interlayer electrode of the third electrode group is electrically connected with the second interlayer electrode of the fourth electrode group.
3. The acoustic transducer of claim 2, wherein:
the upper layer electrode, the first middle layer electrode, the second middle layer electrode or the lower layer electrode of the four electrode groups are positioned on the same horizontal layer, and the thicknesses of the electrodes are the same.
4. The acoustic transducer of claim 2, wherein:
the thickness of the upper layer electrode and the lower layer electrode of each electrode group is the same, and the thickness of the first middle layer electrode and the second middle layer electrode of each electrode group is the same and is half of that of the upper layer electrode or the lower layer electrode.
5. The acoustic transducer of claim 2, wherein:
the distance between the upper layer electrode and the first middle layer electrode and the distance between the second middle layer electrode and the lower layer electrode of each electrode group are larger than the distance between the first middle layer electrode and the second middle layer electrode.
6. The acoustic transducer of claim 1, wherein: the transducer dielectric layer (2) is SiO2、ZrO2Or mica.
7. The acoustic transducer of claim 1, wherein: the piezoelectric layer (1) of the transducer is made of AlN or ZnO.
8. The acoustic transducer of claim 1, wherein: the transducer mass block (3) is made of silicon, aluminum or copper.
9. The acoustic transducer of claim 1, wherein: the electrodes of the four electrode groups are made of molybdenum, aluminum or copper.
10. An acoustic device comprising the acoustic transducer of claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210081612.2A CN114466282B (en) | 2022-01-24 | 2022-01-24 | Acoustic transducer and acoustic device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210081612.2A CN114466282B (en) | 2022-01-24 | 2022-01-24 | Acoustic transducer and acoustic device |
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| CN114466282A true CN114466282A (en) | 2022-05-10 |
| CN114466282B CN114466282B (en) | 2022-11-25 |
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| CN202210081612.2A Active CN114466282B (en) | 2022-01-24 | 2022-01-24 | Acoustic transducer and acoustic device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116828367A (en) * | 2023-06-25 | 2023-09-29 | 联合微电子中心有限责任公司 | Electrical control method for acoustic transducer, acoustic transducer and manufacturing method |
| WO2024020846A1 (en) * | 2022-07-27 | 2024-02-01 | 深圳市韶音科技有限公司 | Acoustic output device |
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| EP3232682A1 (en) * | 2016-04-12 | 2017-10-18 | BAE Systems PLC | Electroacoustic transducer |
| CN110071658A (en) * | 2018-01-22 | 2019-07-30 | 原子能与替代能源委员会 | Piezoelectric transducer |
| CN110944274A (en) * | 2019-11-20 | 2020-03-31 | 武汉大学 | Tunable MEMS piezoelectric transducer with mass load based on Pitton-mode |
| CN112235703A (en) * | 2019-07-15 | 2021-01-15 | 英飞凌科技股份有限公司 | MEMS acoustic transducer element |
| CN112672260A (en) * | 2019-10-16 | 2021-04-16 | 意法半导体股份有限公司 | Transducer, MEMS device comprising a transducer and method for manufacturing a transducer |
| CN113115188A (en) * | 2021-03-29 | 2021-07-13 | 瑞声声学科技(深圳)有限公司 | MEMS piezoelectric microphone |
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2022
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| Publication number | Priority date | Publication date | Assignee | Title |
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| EP3232682A1 (en) * | 2016-04-12 | 2017-10-18 | BAE Systems PLC | Electroacoustic transducer |
| CN110071658A (en) * | 2018-01-22 | 2019-07-30 | 原子能与替代能源委员会 | Piezoelectric transducer |
| CN112235703A (en) * | 2019-07-15 | 2021-01-15 | 英飞凌科技股份有限公司 | MEMS acoustic transducer element |
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| CN110944274A (en) * | 2019-11-20 | 2020-03-31 | 武汉大学 | Tunable MEMS piezoelectric transducer with mass load based on Pitton-mode |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2024020846A1 (en) * | 2022-07-27 | 2024-02-01 | 深圳市韶音科技有限公司 | Acoustic output device |
| CN116828367A (en) * | 2023-06-25 | 2023-09-29 | 联合微电子中心有限责任公司 | Electrical control method for acoustic transducer, acoustic transducer and manufacturing method |
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| CN114466282B (en) | 2022-11-25 |
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