CN113091606A - Cross-scale micro-nano structure laser manufacturing detection system and control method - Google Patents
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Abstract
The invention discloses a cross-scale micro-nano structure laser manufacturing detection system and a control method, wherein the cross-scale micro-nano structure laser manufacturing detection system comprises a programmable SoC main control chip, a laser generator, a photon converter, a display interaction platform, a piezoelectric controller and a micro-nano translation platform; the micro-nano translation table bears a micro-nano structure, displacement control is realized by a main control chip through a piezoelectric controller, laser is generated by a laser generator to complete manufacturing and detection, and detection result reading is realized through a photon converter; the detection control method can realize the on-line detection control of three modes; according to the invention, a set of cross-micro-nano-scale laser manufacturing detection control system with higher efficiency, lower cost and higher yield is constructed, the defects of the current cross-scale micro-nano structure manufacturing in the aspect of nano precision online detection are overcome, and the yield of the micro-nano structure is effectively controlled.
Description
Technical Field
The invention belongs to the technical field of micro-nano manufacturing, and particularly relates to a laser manufacturing detection system and a control method.
Background
With the increasing precision of manufacturing detection, cross-scale analysis methods and techniques have become important means in the research fields of life science, material science, information science, and the like. The manufacture of the trans-scale micro-nano structure depends on the combination of multiple physical mechanisms and multiple technologies, and the current common technical method comprises the following steps: ultraviolet exposure, particle beam lithography, nanoimprint, laser fabrication, and the like. Compared with other technologies, the laser manufacturing technology has the advantages of low cost, good universality, large energy, non-contact, abundant sample materials, high manufacturing precision and the like, and is a leading-edge hotspot of international research for many years. The laser manufacturing technology can be classified into a single photon effect manufacturing technology and a two-photon effect manufacturing technology according to an interaction mechanism between laser and a substance. The single photon effect manufacturing technology is used for manufacturing a microstructure based on a linear absorption mechanism of a material to photons, the two-photon effect manufacturing technology is used for manufacturing a high-precision micro-nano structure based on a nonlinear absorption mechanism of the material to photon energy, and the laser manufacturing technology based on the single photon effect and the two-photon effect can be used for manufacturing the micro-nano structure with high precision and can realize the manufacturing of the micro-nano structure with millimeter-micron-submicron order.
Although various micro-nano manufacturing technologies can manufacture micro-nano structures with different precision and different sizes, the existing micro-nano manufacturing technologies still have great defects in the aspects of efficiency, cost, yield and the like, and the design and the manufacture of a cross-scale micro-nano structure unit and the development of related scientific research are seriously influenced. In addition, the existing various micro-nano structure manufacturing technologies lack the capability of performing on-line detection on the nano precision of the manufacturing result, so that the yield of the manufactured micro-nano structure cannot be effectively controlled.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a cross-scale micro-nano structure laser manufacturing detection system and a control method, wherein the cross-scale micro-nano structure laser manufacturing detection system comprises a programmable SoC main control chip, a laser generator, a photon converter, a display interaction platform, a piezoelectric controller and a micro-nano translation table; the micro-nano translation table bears a micro-nano structure, displacement control is realized by a main control chip through a piezoelectric controller, laser is generated by a laser generator to complete manufacturing and detection, and detection result reading is realized through a photon converter; the detection control method can realize the on-line detection control of three modes; according to the invention, a set of cross-micro-nano-scale laser manufacturing detection control system with higher efficiency, lower cost and higher yield is constructed, the defects of the current cross-scale micro-nano structure manufacturing in the aspect of nano precision online detection are overcome, and the yield of the micro-nano structure is effectively controlled.
The technical scheme adopted by the invention for solving the technical problems is as follows:
a cross-scale micro-nano structure laser manufacturing detection system comprises a main control chip, a laser generator, a photon converter, a display interaction platform, a piezoelectric controller and a micro-nano translation platform;
the main control chip is a core control unit of the system and plays a role in coordinating and controlling other parts in the system; the micro-nano translation table is used for bearing a micro-nano structure unit to be manufactured and detected, can realize displacement in the three-axis direction, and is communicated with the main control chip through the piezoelectric controller; the main control chip issues an instruction to the piezoelectric controller, the piezoelectric controller changes the three-axis position of the micro-nano translation table according to the instruction, and the three-axis position of the micro-nano translation table can be synchronously transmitted back to the main control chip;
the laser generator is used for generating laser to perform manufacturing detection work, and the laser detection result converts an optical signal into an electric signal through the photon converter and transmits the electric signal back to the main control chip;
the display interaction platform is controlled by the main control chip and used for man-machine interaction, and working mode selection, detection parameter setting and real-time position display are completed.
Preferably, the main control chip is a programmable SoC main control chip.
Preferably, the type of the programmable SoC main control chip is ZYNQ7020 SoC.
Preferably, the piezoelectric controller and the main control chip adopt an RS-232 serial communication interface when communicating.
Preferably, the display interaction platform uses an HDMI display or a touch display.
A control method of a cross-scale micro-nano structure laser manufacturing detection system comprises the following steps:
step 1: selecting a working mode through a display interaction platform, wherein the working mode comprises three working modes, namely a real-time positioning detection mode, a scanning detection mode and a single-point detection mode, and the three working modes correspond to different working requirements;
in the real-time positioning detection mode, the micro-nano translation stage stays at each detection point, and the detection of the next point is carried out after the detection of the current detection point is finished until the detection work of all the detection points is finished; in the scanning mode, the micro-nano translation stage does not stay at the detection points, and the detection work of all the detection points is finished in the continuous movement of the micro-nano translation stage according to a preset detection mode and a preset path; in the single-point detection mode, the micro-nano translation table stays at a single detection point to carry out multiple detections;
step 2: according to the working mode selected in the step 1, completing the detection work corresponding to each working mode, which specifically comprises the following steps:
step 2-1: a real-time positioning detection mode;
step 2-1-1: checking the connection condition of each component in the detection system to ensure that each component is correctly connected;
step 2-1-2: carry out detection parameter setting through showing interactive platform, include: (1) the detection range in the three-axis direction is used for determining the total detection area of the detection; (2) the detection step length in the three-axis direction is used for determining the detection distance interval between two adjacent detection points; (3) the photon pulse counting time and the residence time at a single detection point during detection; the photon pulse count time is defined as: when the laser generator emits laser for detection, photon signals are generated and converted into electric pulse signals through the photon converter, the electric pulse signals are counted and converted into light intensity values by the main control chip within set time, and the set time is photon pulse counting time; the stay time is the stay waiting time after the micro-nano translation stage reaches the detection point and before the photon pulse counting is started;
step 2-1-3: the main control chip sends a position instruction, the piezoelectric controller converts the position instruction into a voltage signal and transmits the voltage signal to the micro-nano translation table after receiving the position instruction, and the micro-nano translation table moves according to the change of voltage; the micro-nano translation table feeds back the real-time position of the micro-nano translation table to the main control chip, and the main control chip stays for a period of time and the like after judging that the micro-nano translation table reaches the specified position; the laser generator emits laser to detect, the optical signal is converted into an electric pulse signal through the photon converter, and the master control chip performs photon pulse counting work; after the counting is finished, storing the position of the detection point, the time for detection and the information of the photon pulse counting value;
step 2-1-4: repeating the steps 2-1-3 to finish the detection of the next detection point until all the detection points in the detection range finish the detection;
step 2-2: a scanning detection mode;
step 2-2-1: checking the connection condition of each component in the detection system to ensure that each component is correctly connected;
step 2-2-2: carry out detection parameter setting through showing interactive platform, include: (1) detection range in the three-axis direction; (2) detecting time interval, namely the time interval of detection phase difference between two adjacent detection points in the scanning detection process; (3) photon pulse count time;
step 2-2-3: the main control chip sends an instruction to start scanning detection, the scanning detection is carried out according to a pre-specified path, the position of the micro-nano translation table at the moment is read every time a detection time interval passes, and photon pulse counting is carried out once; storing the position, the detection time and the pulse count value of the micro-nano translation table during the detection to finish the detection work of one detection point;
step 2-2-4: detecting all detection points according to a pre-specified path, wherein the micro-nano translation table does not stay in the detection process;
step 2-3: a single point detection mode;
step 2-2-1: checking the connection condition of each component in the detection system to ensure that each component is correctly connected;
step 2-2-2: carry out detection parameter setting through showing interactive platform, include: (1) detecting the three-axis coordinates of the point; (2) a detection time period, which is a time interval for detecting the same detection point in the scanning detection process; (3) detecting times;
step 2-2-3: the main control chip sends a position instruction, a voltage signal is transmitted to the micro-nano translation table through the piezoelectric controller, the micro-nano translation table moves to a specified position according to voltage change, and detection work is started after the detection point is judged to move in place through position feedback; the main control chip counts the photon pulse of the detection point and stores the position information, the photon pulse count value and the time of the detection;
step 2-2-4: according to the interval of the detection time period, repeatedly detecting the detection points appointed in the step 2-2-3 until the detection times are reached;
and step 3: processing data stored in the detection process: processing the detection result into a visible image by adopting an imaging algorithm for the data stored in the real-time positioning detection mode and the scanning detection mode; for the data stored in the single-point detection mode, the data is directly displayed.
The invention has the following beneficial effects:
according to the invention, the laser generator, the photon converter, the micro-nano translation table, the piezoelectric controller and other components are coordinately controlled by the main control chip, so that a set of cross micro-nano scale laser manufacturing detection control system with higher efficiency, lower cost and higher yield is constructed, meanwhile, the provided online detection control method with multiple modes makes up the defects of the current cross scale micro-nano structure manufacturing in the aspect of online detection of nanometer precision, and can effectively control the yield of the micro-nano structure.
Drawings
FIG. 1 is a general block diagram of the system of the present invention.
FIG. 2 is a software flow diagram of the method of the present invention in a real-time location detection mode.
FIG. 3 is a software flow diagram of a scan test mode of the method of the present invention.
FIG. 4 is a software flow diagram of a single point detection mode of the method of the present invention.
FIG. 5 shows the overall framework of the method detection control software of the present invention.
Detailed Description
The invention is further illustrated with reference to the following figures and examples.
As shown in fig. 1, a cross-scale micro-nano structure laser manufacturing detection system includes a main control chip, a laser generator, a photon converter, a display interaction platform, a piezoelectric controller and a micro-nano translation stage;
the main control chip is a core control unit of the system and plays a role in coordinating and controlling other parts in the system; the micro-nano translation table is used for bearing a micro-nano structure unit to be manufactured and detected, can realize displacement in the three-axis direction, and is communicated with the main control chip through the piezoelectric controller; the main control chip issues an instruction to the piezoelectric controller, the piezoelectric controller changes the three-axis position of the micro-nano translation table according to the instruction, and the three-axis position of the micro-nano translation table can be synchronously transmitted back to the main control chip;
the laser generator is used for generating laser to perform manufacturing detection work, and the laser detection result converts an optical signal into an electric signal through the photon converter and transmits the electric signal back to the main control chip;
the display interaction platform is controlled by the main control chip and used for man-machine interaction, and working mode selection, detection parameter setting and real-time position display are completed.
Preferably, the main control chip is a programmable SoC main control chip.
Preferably, the type of the programmable SoC main control chip is ZYNQ7020 SoC.
Preferably, the piezoelectric controller and the main control chip adopt an RS-232 serial communication interface when communicating.
Preferably, the display interaction platform uses an HDMI display or a touch display.
A control method of a cross-scale micro-nano structure laser manufacturing detection system comprises the following steps:
step 1: selecting a working mode through a display interaction platform, wherein the working mode comprises three working modes, namely a real-time positioning detection mode, a scanning detection mode and a single-point detection mode, and the three working modes correspond to different working requirements;
in the real-time positioning detection mode, the micro-nano translation stage stays at each detection point, and the detection of the next point is carried out after the detection of the current detection point is finished until the detection work of all the detection points is finished; in the scanning mode, the micro-nano translation stage does not stay at the detection points, and the detection work of all the detection points is finished in the continuous movement of the micro-nano translation stage according to a preset detection mode and a preset path; in the single-point detection mode, the micro-nano translation table stays at a single detection point to carry out multiple detections;
step 2: according to the working mode selected in the step 1, completing the detection work corresponding to each working mode, which specifically comprises the following steps:
step 2-1: real-time location detection mode, as shown in fig. 2;
step 2-1-1: checking the connection condition of each component in the detection system to ensure that each component is correctly connected;
step 2-1-2: carry out detection parameter setting through showing interactive platform, include: (1) the detection range in the three-axis direction is used for determining the total detection area of the detection; (2) the detection step length in the three-axis direction is used for determining the detection distance interval between two adjacent detection points; (3) the photon pulse counting time and the residence time at a single detection point during detection; the photon pulse count time is defined as: when the laser generator emits laser for detection, photon signals are generated and converted into electric pulse signals through the photon converter, the electric pulse signals are counted and converted into light intensity values by the main control chip within set time, and the set time is photon pulse counting time; the stay time is the stay waiting time after the micro-nano translation stage reaches the detection point and before the photon pulse counting is started;
step 2-1-3: the main control chip sends a position instruction, the piezoelectric controller converts the position instruction into a voltage signal and transmits the voltage signal to the micro-nano translation table after receiving the position instruction, and the micro-nano translation table moves according to the change of voltage; the micro-nano translation table feeds back the real-time position of the micro-nano translation table to the main control chip, and the main control chip stays for a period of time and the like after judging that the micro-nano translation table reaches the specified position; the laser generator emits laser to detect, the optical signal is converted into an electric pulse signal through the photon converter, and the master control chip performs photon pulse counting work; after the counting is finished, storing the position of the detection point, the time for detection and the information of the photon pulse counting value;
step 2-1-4: repeating the steps 2-1-3 to finish the detection of the next detection point until all the detection points in the detection range finish the detection;
step 2-2: scan detection mode, as shown in fig. 3;
step 2-2-1: checking the connection condition of each component in the detection system to ensure that each component is correctly connected;
step 2-2-2: carry out detection parameter setting through showing interactive platform, include: (1) detection range in the three-axis direction; (2) detecting time interval, namely the time interval of detection phase difference between two adjacent detection points in the scanning detection process; (3) photon pulse count time;
step 2-2-3: the main control chip sends an instruction to start scanning detection, the scanning detection is carried out according to a pre-specified path, the position of the micro-nano translation table at the moment is read every time a detection time interval passes, and photon pulse counting is carried out once; storing the position, the detection time and the pulse count value of the micro-nano translation table during the detection to finish the detection work of one detection point;
step 2-2-4: the detection of all detection points is completed according to a pre-designated path, the micro-nano translation table does not stop in the detection process, and the detection speed is obviously improved compared with a real-time positioning detection mode;
step 2-3: single point detection mode, as shown in FIG. 4;
step 2-2-1: checking the connection condition of each component in the detection system to ensure that each component is correctly connected;
step 2-2-2: carry out detection parameter setting through showing interactive platform, include: (1) detecting the three-axis coordinates of the point; (2) a detection time period, which is a time interval for detecting the same detection point in the scanning detection process; (3) detecting times;
step 2-2-3: the main control chip sends a position instruction, a voltage signal is transmitted to the micro-nano translation table through the piezoelectric controller, the micro-nano translation table moves to a specified position according to voltage change, and detection work is started after the detection point is judged to move in place through position feedback; the main control chip counts the photon pulse of the detection point and stores the position information, the photon pulse count value and the time of the detection;
step 2-2-4: according to the interval of the detection time period, repeatedly detecting the detection points appointed in the step 2-2-3 until the detection times are reached;
and step 3: processing data stored in the detection process: processing the detection result into a visible image by adopting an imaging algorithm for the data stored in the real-time positioning detection mode and the scanning detection mode; for the data stored in the single-point detection mode, the data is directly displayed.
As shown in fig. 5, the scanning detection control software mainly comprises 5 modules, namely a mode selection module, a scanning detection module, a single-point detection module, a movement detection module and a communication module.
The mode selection module is mainly used for selecting a detection mode according to requirements so as to jump to one of the scanning detection module, the fixed point detection module and the movement detection module for detection. The scanning detection module corresponds to a scanning detection mode, and the translation stage performs scanning according to a set scanning mode in the mode without stopping in the middle. The single-point detection module corresponds to a fixed-point detection mode, and multiple detection works of a single detection point can be completed in the mode. The mobile detection module corresponds to a real-time positioning detection mode, and each detection point is accurately detected in a mode that each detection point stays in the mode.
The communication module completes communication work, in this embodiment, RS-232 communication is performed between the main control chip and the piezoelectric controller, and the communication module completes transceiving work of a communication protocol instruction according to detection requirements of each detection module by calling a communication function library. The control system uses FT232RL USB chip of FTDI company to perform signal conversion communication work between the USB interface and the RS-232 interface.
Claims (6)
1. A cross-scale micro-nano structure laser manufacturing detection system is characterized by comprising a main control chip, a laser generator, a photon converter, a display interaction platform, a piezoelectric controller and a micro-nano translation platform;
the main control chip is a core control unit of the system and plays a role in coordinating and controlling other parts in the system; the micro-nano translation table is used for bearing a micro-nano structure unit to be manufactured and detected, can realize displacement in the three-axis direction, and is communicated with the main control chip through the piezoelectric controller; the main control chip issues an instruction to the piezoelectric controller, the piezoelectric controller changes the three-axis position of the micro-nano translation table according to the instruction, and the three-axis position of the micro-nano translation table can be synchronously transmitted back to the main control chip;
the laser generator is used for generating laser to perform manufacturing detection work, and the laser detection result converts an optical signal into an electric signal through the photon converter and transmits the electric signal back to the main control chip;
the display interaction platform is controlled by the main control chip and used for man-machine interaction, and working mode selection, detection parameter setting and real-time position display are completed.
2. The system according to claim 1, wherein the main control chip is a programmable SoC main control chip.
3. The system according to claim 2, wherein the programmable SoC master control chip is ZYNQ7020 SoC in type.
4. The system according to claim 1, wherein the piezoelectric controller communicates with the main control chip via an RS-232 serial communication interface.
5. The system according to claim 1, wherein the display interaction platform uses an HDMI display or a touch display.
6. A control method of a cross-scale micro-nano structure laser manufacturing detection system is characterized by comprising the following steps:
step 1: selecting a working mode through a display interaction platform, wherein the working mode comprises three working modes, namely a real-time positioning detection mode, a scanning detection mode and a single-point detection mode, and the three working modes correspond to different working requirements;
in the real-time positioning detection mode, the micro-nano translation stage stays at each detection point, and the detection of the next point is carried out after the detection of the current detection point is finished until the detection work of all the detection points is finished; in the scanning mode, the micro-nano translation stage does not stay at the detection points, and the detection work of all the detection points is finished in the continuous movement of the micro-nano translation stage according to a preset detection mode and a preset path; in the single-point detection mode, the micro-nano translation table stays at a single detection point to carry out multiple detections;
step 2: according to the working mode selected in the step 1, completing the detection work corresponding to each working mode, which specifically comprises the following steps:
step 2-1: a real-time positioning detection mode;
step 2-1-1: checking the connection condition of each component in the detection system to ensure that each component is correctly connected;
step 2-1-2: carry out detection parameter setting through showing interactive platform, include: (1) the detection range in the three-axis direction is used for determining the total detection area of the detection; (2) the detection step length in the three-axis direction is used for determining the detection distance interval between two adjacent detection points; (3) the photon pulse counting time and the residence time at a single detection point during detection; the photon pulse count time is defined as: when the laser generator emits laser for detection, photon signals are generated and converted into electric pulse signals through the photon converter, the electric pulse signals are counted and converted into light intensity values by the main control chip within set time, and the set time is photon pulse counting time; the stay time is the stay waiting time after the micro-nano translation stage reaches the detection point and before the photon pulse counting is started;
step 2-1-3: the main control chip sends a position instruction, the piezoelectric controller converts the position instruction into a voltage signal and transmits the voltage signal to the micro-nano translation table after receiving the position instruction, and the micro-nano translation table moves according to the change of voltage; the micro-nano translation table feeds back the real-time position of the micro-nano translation table to the main control chip, and the main control chip stays for a period of time and the like after judging that the micro-nano translation table reaches the specified position; the laser generator emits laser to detect, the optical signal is converted into an electric pulse signal through the photon converter, and the master control chip performs photon pulse counting work; after the counting is finished, storing the position of the detection point, the time for detection and the information of the photon pulse counting value;
step 2-1-4: repeating the steps 2-1-3 to finish the detection of the next detection point until all the detection points in the detection range finish the detection;
step 2-2: a scanning detection mode;
step 2-2-1: checking the connection condition of each component in the detection system to ensure that each component is correctly connected;
step 2-2-2: carry out detection parameter setting through showing interactive platform, include: (1) detection range in the three-axis direction; (2) detecting time interval, namely the time interval of detection phase difference between two adjacent detection points in the scanning detection process; (3) photon pulse count time;
step 2-2-3: the main control chip sends an instruction to start scanning detection, the scanning detection is carried out according to a pre-specified path, the position of the micro-nano translation table at the moment is read every time a detection time interval passes, and photon pulse counting is carried out once; storing the position, the detection time and the pulse count value of the micro-nano translation table during the detection to finish the detection work of one detection point;
step 2-2-4: detecting all detection points according to a pre-specified path, wherein the micro-nano translation table does not stay in the detection process;
step 2-3: a single point detection mode;
step 2-2-1: checking the connection condition of each component in the detection system to ensure that each component is correctly connected;
step 2-2-2: carry out detection parameter setting through showing interactive platform, include: (1) detecting the three-axis coordinates of the point; (2) a detection time period, which is a time interval for detecting the same detection point in the scanning detection process; (3) detecting times;
step 2-2-3: the main control chip sends a position instruction, a voltage signal is transmitted to the micro-nano translation table through the piezoelectric controller, the micro-nano translation table moves to a specified position according to voltage change, and detection work is started after the detection point is judged to move in place through position feedback; the main control chip counts the photon pulse of the detection point and stores the position information, the photon pulse count value and the time of the detection;
step 2-2-4: according to the interval of the detection time period, repeatedly detecting the detection points appointed in the step 2-2-3 until the detection times are reached;
and step 3: processing data stored in the detection process: processing the detection result into a visible image by adopting an imaging algorithm for the data stored in the real-time positioning detection mode and the scanning detection mode; for the data stored in the single-point detection mode, the data is directly displayed.
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