CN113083799A - Laser cleaning system and method for detecting laser cleaning state and quality in real time - Google Patents
Laser cleaning system and method for detecting laser cleaning state and quality in real time Download PDFInfo
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- CN113083799A CN113083799A CN201911336549.7A CN201911336549A CN113083799A CN 113083799 A CN113083799 A CN 113083799A CN 201911336549 A CN201911336549 A CN 201911336549A CN 113083799 A CN113083799 A CN 113083799A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
- B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
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Abstract
The invention relates to the laser cleaning technology, in particular to a laser cleaning system and a method for detecting the cleaning state and quality of laser in real time, wherein the laser cleaning system comprises a cleaning laser, a laser cleaning head, a spectrum collection system, a control module and a PC (personal computer); the PC is respectively connected with the spectrum collection system and the control module through cables and is used for receiving the spectrum information sent by the spectrum collection system and sending a control command to the control module; the control module is respectively connected with the cleaning laser, the laser cleaning head and the spectrum collecting system and is used for sending an acquisition trigger signal to the spectrum collecting system and sending a control command to the cleaning laser and the laser cleaning head; the invention can be arranged in a manipulator to carry out movable cleaning and measurement on a large-volume sample, so that the cleaning process and the quality are more refined, and meanwhile, the closed-loop operation of the cleaning process can be realized through the cleaning quality information, so that the full-automatic cleaning is realized. Can effectively improve the cleaning quality degree and the completion degree.
Description
Technical Field
The invention relates to a laser cleaning technology, in particular to a laser cleaning system and a laser cleaning method for detecting the laser cleaning state and quality in real time.
Background
The traditional cleaning industry mainly relies on cleaning the surface of a sample by using a chemical reagent or a mechanical method so as to achieve the purpose of removing substances on the surface of the sample. Different reagents need to be considered for different types of samples by using chemical reagents, the variety is complicated, the process is complicated, and meanwhile, the environmental pollution is increased. The mechanical method is often used to damage the sample, and the purpose of fine cleaning cannot be achieved. The laser cleaning is an emerging cleaning technology along with the development of laser technology, has the characteristics of non-contact, no thermal effect, accurate cleaning and suitability for various materials, and is considered to be the most reliable and effective cleaning technology. However, the existing laser cleaning technology cannot acquire the cleaning state and quality information in real time, and the process parameters are determined by empirical exploration, which seriously restricts the development of the laser cleaning technology.
Disclosure of Invention
Aiming at the defects of the existing laser cleaning technology, the invention provides a laser cleaning system capable of detecting the laser cleaning state and quality in real time in the laser cleaning process and a detection method of the laser cleaning state and quality.
The technical scheme adopted by the invention for realizing the purpose is as follows: a laser cleaning system for detecting the cleaning state and quality of laser in real time comprises a laser for cleaning, a laser cleaning head, a spectrum collection system, a control module and a PC (personal computer);
the PC is respectively connected with the spectrum collection system and the control module through cables and is used for receiving the spectrum information sent by the spectrum collection system and sending a control command to the control module;
the control module is respectively connected with the laser for cleaning, the laser cleaning head and the spectrum collecting system and used for sending a collecting trigger signal to the spectrum collecting system and sending a control command to the laser for cleaning and the laser cleaning head.
The spectrum collection system includes: the system comprises a dichroic mirror, a spectrum collecting mirror group, an optical fiber and a spectrometer; plasma light generated by cleaning the laser cleaning head sequentially passes through the laser cleaning head, the dichroic mirror, the spectrum collecting mirror group and the optical fiber sending spectrometer.
The included angle between the laser emitting direction of the cleaning laser and the laser incidence direction of the laser cleaning head is 90 degrees;
plasma light generated in the laser cleaning process passes through the laser cleaning head, is transmitted through the dichroic mirror along the laser incidence direction, enters the spectrum collecting lens group, is focused to the optical fiber end face, passes through the optical fiber and enters the spectrometer, and the spectrometer obtains spectrum data through photoelectric conversion and transmits the spectrum data to the PC.
The included angle between the laser emitting direction of the cleaning laser and the laser incidence direction of the laser cleaning head is 0 degree;
plasma light generated in the laser cleaning process passes through the laser cleaning head, is reflected by the dichroic mirror along the laser incidence direction, enters the spectrum collection lens group, is focused to the optical fiber end face, passes through the optical fiber and enters the spectrometer, and the spectrometer obtains spectrum data through photoelectric conversion and transmits the spectrum data to the PC.
The spectrum collecting mirror group is a single-chip or multi-chip lens and is arranged between the dichroic mirror and the optical fiber along the light path of the plasma.
The laser cleaning head is a linear array or area array laser cleaning lens with a galvanometer scanning type and is used for scanning and cleaning specified areas of different sample sizes.
The laser cleaning method for detecting the laser cleaning state and quality in real time comprises the following steps:
1) the PC sends a control command for adjusting the process parameters to the control module;
2) synchronous spectrum collection: in the laser cleaning process, a spectrometer spectrum acquisition trigger signal is given out through a control module, a spectrum acquisition signal is synchronously given out from the cleaning starting moment in a designated cleaning area, and the spectrum acquisition time is the duration of the cleaning area of a designated unit;
3) the PC machine collects spectrum data of photoelectric conversion of a spectrometer;
4) the PC machine processes the collected spectral data under different cleaning quality states;
5) the PC machine establishes a relationship between the laser cleaning quality state and the spectral data.
The step 4) is a method for processing spectral data, and comprises the following steps:
the acquired spectral data is subjected to background processing, namely continuous background is removed, characteristic spectral lines are reserved, and the peak intensity of element characteristic spectral lines is obtained.
The step 5) of establishing the relationship between the laser cleaning quality state and the spectral data comprises the following steps:
obtaining characteristic spectrum peak intensities of surface layer and bottom layer elements of the sample in different cleaning quality states according to process parameters, establishing a regression model according to the characteristic variables and the cleaning quality by taking the characteristic spectrum peak intensities as characteristic variables, and obtaining a regression model for evaluating the cleaning quality;
in the cleaning process, characteristic spectrum peak intensity is extracted from the spectrum data obtained in real time and is input into the regression model, and the time and the corresponding cleaning state and quality are obtained.
The invention has the following beneficial effects and advantages:
1. the system integrates the spectrum collection system, plasma spectrums generated by laser cleaning are collected in real time in the laser cleaning process, and the laser cleaning state and quality at the spectrum collection time can be effectively obtained through the establishment of a regression model between the cleaning quality and the real-time spectrums. Meanwhile, the cleaning state and quality are calculated by the PC, the calculation speed is in millisecond level, and the cleaning state and quality at the current moment can be given in real time.
2. The system of the invention is an integral body, the volume is not increased much compared with the conventional laser cleaning system, and the system can be arranged in a moving device such as a manipulator and the like the conventional laser cleaning system to carry out movable cleaning and measurement on large-volume samples.
3. The real-time cleaning state and the quality information are obtained, the cleaning process parameters can be adjusted in real time, the cleaning process and the quality are more refined, meanwhile, the cleaning process can be closed-loop operated through the cleaning quality information, and full-automatic cleaning is realized. Can effectively improve the cleaning quality degree and the completion degree.
Drawings
FIG. 1 is a schematic diagram of the general structure of the mode A of the present invention;
FIG. 2 is a schematic diagram of the general structure of the mode B of the present invention;
wherein, 1 is a laser for cleaning, 2 is a laser cleaning head, 3 is a spectrum collecting system, 4 is a control module, 5 is a PC, 6 is a dichroic mirror, 7 is a spectrum collecting mirror group, 8 is an optical fiber, and 9 is a spectrometer.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
As shown in FIGS. 1-2, the system of the present invention comprises: the device comprises a cleaning laser 1, a laser cleaning head 2, a spectrum collection system 3 and a control module 4. The spectrum collection system 3 comprises a dichroic mirror 6, a spectrum collection mirror group (7), an optical fiber 8 and a spectrometer 9.
The control module 4 is connected with the cleaning laser 1, the laser cleaning head 3 and the spectrometer 9 through cables. The PC 5 is connected with the spectrometer 9 of the control module 4 through a cable. The PC 5 is a cleaning operation upper computer, and sends a cleaning planning control command to the control module 4 during cleaning, and receives the spectral information of the spectrometer 9 and calculates to obtain the laser cleaning state and quality information. The control module 4 sends cleaning control signals to the cleaning laser 1 and the laser cleaning head 2 according to the cleaning plan of the PC 5, and simultaneously sends spectrum acquisition trigger signals to the spectrometer 9.
As in configuration a of fig. 1, dichroic mirror 6 is highly reflective for the laser wavelength and highly transmissive for the other wavelengths. The laser beam emitted by the laser 1 for cleaning passes through the dichroic mirror 6 and is reflected to the laser incident window of the laser cleaning head 2, and enters the laser cleaning head 2. Laser beams pass through the laser cleaning head 2 and then are focused on the surface of the sample, and the surface is cleaned by laser. Plasma light generated in the laser cleaning process passes through the laser cleaning head 2, then is transmitted through the dichroic mirror 6 along the laser incidence direction, enters the spectrum collection lens group 7, is focused to the end face of the optical fiber 8, passes through the optical fiber and then enters the spectrometer 9, and the spectrometer obtains a spectrum signal through photoelectric conversion and transmits the spectrum signal to the PC 5.
As in the case of configuration B in fig. 2, the dichroic mirror 6 is highly transmissive for the laser wavelength and highly reflective for the other wavelengths. The laser beam emitted by the laser 1 for cleaning is transmitted to the laser incident window of the laser cleaning head 2 through the dichroic mirror 6 and enters the laser cleaning head 2. Laser beams pass through the laser cleaning head 2 and then are focused on the surface of the sample, and the surface is cleaned by laser. Plasma light generated in the laser cleaning process passes through the laser cleaning head 2, is reflected by the dichroic mirror 6 along the laser incidence direction, enters the spectrum collection lens group 7, is focused to the end face of the optical fiber 8, passes through the optical fiber and enters the spectrometer 9, and the spectrometer obtains a spectrum signal through photoelectric conversion and transmits the spectrum signal to the PC 5.
The laser cleaning head 2 can be a linear array or an area array laser cleaning lens with a galvanometer scanning type, so as to realize the scanning cleaning of specified areas with different sample sizes.
The cleaning system is an integral body and can be fixed on moving devices such as a mechanical arm and the like to carry out laser cleaning and real-time cleaning quality detection on samples with different sizes and shapes.
A method for detecting laser cleaning status and quality in real time during a laser cleaning process, comprising the steps of:
1) the PC 5 sends a control command for adjusting the process parameters to the control module;
2) synchronous spectrum collection: in the laser cleaning process, a spectrum acquisition trigger signal is given out from a spectrometer 9 through a control module 4, a spectrum acquisition signal is synchronously given out from the cleaning starting time in a designated cleaning area, and the spectrum acquisition time is the duration of the designated unit cleaning area;
3) the PC 5 collects the spectrum data photoelectrically converted by the spectrometer 9;
4) the PC 5 processes the collected spectral data under different cleaning quality states;
5) the PC 5 establishes a relationship between the laser cleaning quality status and the spectral data.
Step 4) a method of processing spectral data, comprising the steps of:
the acquired spectral data is subjected to background processing, namely continuous background is removed, characteristic spectral lines are reserved, and the peak intensity of element characteristic spectral lines is obtained.
Step 5) the method for establishing the relation between the laser cleaning quality state and the spectral data comprises the following steps:
obtaining characteristic spectrum peak intensities of surface layer and bottom layer elements of the sample in different cleaning quality states according to process parameters, establishing a regression model according to the characteristic variables and the cleaning quality by taking the characteristic spectrum peak intensities as characteristic variables, and obtaining a regression model for evaluating the cleaning quality;
in the cleaning process, characteristic spectrum peak intensity is extracted from the spectrum data obtained in real time and is input into the regression model, and the time and the corresponding cleaning state and quality are obtained.
Claims (9)
1. A laser cleaning system for detecting the cleaning state and quality of laser in real time is characterized by comprising a cleaning laser (1), a laser cleaning head (2), a spectrum collection system (3), a control module (4) and a PC (personal computer) (5);
the PC (5) is respectively connected with the spectrum collection system (3) and the control module (4) through cables and is used for receiving the spectrum information sent by the spectrum collection system (3) and sending a control command to the control module (4);
the control module (4) is respectively connected with the laser device (1) for cleaning, the laser cleaning head (2) and the spectrum collection system (3) and is used for sending a collection trigger signal to the spectrum collection system (3) and sending a control command to the laser device (1) for cleaning and the laser cleaning head (2) at the same time.
2. A laser cleaning system for real-time detection of laser cleaning status and quality according to claim 1, characterized in that the spectrum collection system (3) comprises: a dichroic mirror (6), a spectrum collecting mirror group (7), an optical fiber (8) and a spectrometer (9); plasma light generated by cleaning of the laser cleaning head (2) is sent to the spectrometer (9) through the laser cleaning head (2), the dichroic mirror (6), the spectrum collecting mirror group (7) and the optical fiber (8) in sequence.
3. The laser cleaning system for detecting the laser cleaning state and quality in real time according to claim 1 or 2, wherein the included angle between the laser emitting direction of the cleaning laser (1) and the laser incident direction of the laser cleaning head (2) is 90 degrees;
plasma light generated in the laser cleaning process passes through the laser cleaning head (2), is transmitted through the dichroic mirror (6) along the laser incidence direction, enters the spectrum collection lens group (7), is focused to the end face of the optical fiber (8), enters the spectrometer (9) after passing through the optical fiber, and is subjected to photoelectric conversion to obtain spectrum data, and the spectrum data is transmitted to the PC (5).
4. The laser cleaning system for detecting the laser cleaning state and quality in real time according to claim 1 or 2, wherein an included angle between the laser emitting direction of the cleaning laser (1) and the laser incident direction of the laser cleaning head (2) is 0 °;
plasma light generated in the laser cleaning process passes through the laser cleaning head (2), is reflected through the dichroic mirror (6) along the laser incidence direction, enters the spectrum collection lens group (7), is focused to the end face of the optical fiber (8), enters the spectrometer (9) after passing through the optical fiber, and is subjected to photoelectric conversion to obtain spectrum data, and the spectrum data is transmitted to the PC (5).
5. The laser cleaning system for detecting the laser cleaning state and quality in real time according to claim 2, wherein the spectrum collection mirror group (7) is a single-chip or multi-chip lens, and the spectrum collection mirror group (7) is placed between the dichroic mirror (6) and the optical fiber (8) along the optical path of the plasma.
6. The laser cleaning system for detecting the laser cleaning state and quality in real time according to claim 1, wherein the laser cleaning head (2) is a linear array or area array laser cleaning lens with a vibrating mirror scanning type, and is used for realizing the scanning and cleaning of designated areas with different sample sizes.
7. A laser cleaning method for detecting the laser cleaning state and quality in real time is characterized by comprising the following steps:
1) the PC (5) sends a control command for adjusting the process parameters to the control module;
2) synchronous spectrum collection: in the laser cleaning process, a spectrum acquisition trigger signal of a spectrometer (9) is given through a control module (4), a spectrum acquisition signal is synchronously given from the cleaning start time in a designated cleaning area, and the spectrum acquisition time is the time length in the designated unit cleaning area;
3) the PC (5) collects the spectrum data of the photoelectric conversion of the spectrometer (9);
4) the PC (5) processes the collected spectral data under different cleaning quality states;
5) the PC (5) establishes a relation between the laser cleaning quality state and the spectral data.
8. The laser cleaning method for detecting the laser cleaning state and quality in real time according to claim 7, wherein the step 4) of processing the spectral data comprises the following steps:
the acquired spectral data is subjected to background processing, namely continuous background is removed, characteristic spectral lines are reserved, and the peak intensity of element characteristic spectral lines is obtained.
9. The laser cleaning method for detecting the laser cleaning state and quality in real time according to claim 7, wherein the step 5) of establishing the relation between the laser cleaning quality state and the spectral data comprises the following steps:
obtaining the characteristic spectrum peak intensity of the surface layer and bottom layer elements of the sample under different cleaning quality states according to the process parameters, taking the characteristic spectrum peak intensity as a characteristic variable, establishing a regression model according to the characteristic variable and the cleaning quality, and obtaining a regression model for evaluating the cleaning quality;
in the cleaning process, characteristic spectrum peak intensity is extracted from the spectrum data obtained in real time and is input into the regression model, and the time and the corresponding cleaning state and quality are obtained.
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Cited By (4)
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| CN114029636A (en) * | 2021-11-10 | 2022-02-11 | 广东宏石激光技术股份有限公司 | Cutting device and perforation process based on spectrum detection technology |
| CN114216896A (en) * | 2021-11-18 | 2022-03-22 | 合肥正阳光电科技有限责任公司 | Laser monitoring station and laser detection method for online rapid identification of steel number plate |
| CN114850140A (en) * | 2022-05-30 | 2022-08-05 | 内蒙古电力(集团)有限责任公司乌兰察布供电分公司 | Cleaning system for high-voltage isolating switch |
| CN115041469A (en) * | 2022-06-01 | 2022-09-13 | 长春理工大学 | Tunable multi-pulse laser cleaning system and working method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115041469A (en) * | 2022-06-01 | 2022-09-13 | 长春理工大学 | Tunable multi-pulse laser cleaning system and working method thereof |
| CN115041469B (en) * | 2022-06-01 | 2024-01-23 | 长春理工大学 | Tunable multi-pulse laser cleaning system and working method thereof |
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