CN113074819A - High-precision infrared temperature measurement system and method - Google Patents
High-precision infrared temperature measurement system and method Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
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Abstract
The invention relates to a high-precision infrared temperature measurement system and a temperature measurement method, wherein the system comprises an infrared temperature measurement device, and the infrared temperature measurement device is connected with a liquid inlet and a liquid outlet of a water-cooling machine through a liquid outlet pipe and a liquid inlet pipe; the infrared temperature measuring device comprises an infrared detection machine core and a reflection type radiation gathering lens; the inner surface of the reflective type radiation focusing lens is in a circular truncated cone shape or a spherical truncated cone shape, and an annular liquid cooling cavity is arranged in the lens; when the infrared temperature measuring device measures the temperature of the target, the reflective type radiation gathering lens needs to be close to the measured target. Before temperature measurement, a temperature calibration formula is obtained. When the temperature is actually measured, a target temperature value is calculated by using a temperature calibration formula according to the measured gray value and the lens temperature, and the method can be used for infrared temperature measurement under two conditions of temperature control or non-temperature control of the lens. The radiation collection capacity of the black body is improved by more than 3.8 times; the invention effectively inhibits the influence of environmental stray radiation and self-radiation of the instrument on the temperature measurement precision, and can improve the human body temperature measurement precision by about ten times.
Description
Technical Field
The invention belongs to the field of infrared temperature measurement, and particularly relates to a high-precision infrared temperature measurement system and method.
Background
The infrared thermometer is widely applied to the field of industrial temperature measurement and human body temperature measurement as a non-contact temperature measuring instrument at present, but a pain point exists in the infrared temperature measuring field for a long time: the traditional infrared temperature measuring device generally has the problems of poor environmental adaptability, large temperature measuring error and the like. The national institute of semiconductor of the academy of sciences of China, Liujian, think that the outdoor infrared temperature measurement error caused by different degrees of sunlight intensity and temperature difference of the morning, the middle and the evening can reach 2 ℃. When the traditional infrared temperature measuring device measures temperature in a complex environment, infrared radiation noise generated by temperature fluctuation of a lens can be incident to a photosensitive surface of an infrared detector, so that the signal-to-noise ratio of an infrared thermometer is greatly reduced, and the temperature measuring precision is reduced. In addition, ambient infrared radiation reflected and scattered into the light path and the lower radiation collection capability of the optical lens hinder the improvement of temperature measurement accuracy.
Disclosure of Invention
In order to solve the problems, the invention provides an infrared temperature measurement system and method which can effectively improve the interference of environment temperature fluctuation and environment radiation on temperature measurement and have stronger collection capability on target radiation of a human body, a black body and the like, and can greatly improve the infrared temperature measurement precision on the human body, the black body and the like.
The invention is realized by the following technical scheme:
a high-precision infrared temperature measurement system comprises an infrared temperature measurement device, wherein the infrared temperature measurement device is connected with a liquid inlet and a liquid outlet of a water cooling machine through a liquid outlet pipe and a liquid inlet pipe;
the infrared temperature measuring device comprises an infrared detection machine core and a reflection type radiation gathering lens; the inner surface of the reflection type radiation-gathering lens is in a circular truncated cone shape or a spherical truncated cone shape, a circular through hole is formed in the center of the lens, an annular liquid cooling cavity is arranged in the lens, and a liquid inlet and a liquid outlet are formed in the annular liquid cooling cavity;
when the infrared temperature measuring device measures the temperature of the target, the reflective type radiation gathering lens needs to be close to the measured target.
Furthermore, the reflective type radiation-gathering lens comprises a lens base and a lens cover body, wherein the inner surface of the lens cover body is in a circular truncated cone shape or a spherical truncated cone shape;
a base circular through hole is formed in the center of the lens base; the periphery of the through hole on the lower surface of the lens base is provided with a special-shaped groove, and the light sensing surface of the infrared detection machine core is positioned below the central through hole of the lens base and used for receiving infrared radiation incident from the through hole.
Further, the center of the lens cover body is provided with a cover body circular through hole, the back of the lens cover body is provided with two inner annular grooves and outer annular grooves which are used for installing sealing rings and have different radiuses, the two grooves are matched with the sealing rings, and after the lens cover body is fixed with the lens base, an annular liquid cooling cavity is formed between the lens cover body and the lens base.
Furthermore, the outer side of the circular through hole of the cover body at the back of the lens cover body is provided with an annular boss, and the outer diameter of the annular boss is equal to the inner diameter of the circular through hole of the base;
after the lens cover body is fixed with the lens base, the annular boss is tightly matched with the circular through hole of the base, and infrared radiation collected by the lens is incident to the photosensitive surface of the infrared detection device through the through hole.
Furthermore, during temperature measurement, the lens is adjusted to enable the liquid inlet to be located at the bottom of the lens, and the liquid outlet is located at the top of the lens, so that the annular liquid cooling cavity of the lens is filled with cooling liquid.
Further, the cooling liquid is glycol type cooling liquid, and the freezing point is not higher than minus 45 ℃.
Furthermore, the working wave band of the infrared temperature measuring machine core is 8-14 μm or 3-5 μm.
The invention also relates to a high-precision infrared temperature measurement method, which comprises the following steps:
step (1), temperature measurement and calibration: before temperature measurement, calibration is firstly carried out to obtain a temperature calibration formula.
Step (2), measuring the temperature according to the following steps:
2.1 temperature measurement method of lens without temperature control:
a circulating liquid cooling system is not used, and a temperature sensor is additionally arranged on the back of the lens and used for measuring the temperature of the lens in real time;
2.11 fixing the distance between the lens and the target to make the distance between the lens and the target be d;
2.12 starting the infrared temperature measuring device, obtaining an instrument reading Rm, and obtaining a corresponding lens temperature Te by using a temperature sensor;
2.13 calculating the radiation brightness LE of the black body with the temperature of Te in the wave band r 1-r 2 of the infrared temperature measuring machine core;
2.14 obtaining coefficients a, b and c according to temperature calibration, substituting Rm and the band radiance LE corresponding to the lens temperature Te into a temperature calibration formula R ═ a × L + b × LE + c, and calculating the band radiance L of the target;
2.15 calculating the blackbody temperature equal to the radiance of the target wave band within the wave band of r 1-r 2 according to the radiance of the target wave band and the Planck blackbody radiation law, namely the measured target temperature;
2.2 temperature measurement method during temperature control of lens:
2.21 starting a water cooling machine to provide constant-temperature cooling liquid for the infrared temperature measuring device, wherein the temperature is recorded as Te;
2.22 fixing the distance between the lens and the target to make the distance between the lens and the target be d;
2.23 starting an infrared temperature measuring device to obtain an instrument reading Rm;
2.24, giving a black body with the temperature of Te, and radiating brightness LE in a wave band within the working wave band r 1-r 2 of the infrared temperature measuring machine core;
2.25 obtaining coefficients a, b and c according to calibration, substituting Rm and waveband radiance LE into a formula R ═ a × L + b × LE + c, and calculating target waveband radiance L;
2.26 calculating the black body temperature equal to the target wave band radiance in the r 1-r 2 wave band according to the target wave band radiance, namely the target temperature.
9. The high-precision infrared temperature measurement method according to claim 8, characterized in that: in the step (1), the calibration method comprises the following steps:
1.1 determining a calibration temperature range: according to the temperature variation range of the measured target, providing a calibration range [ Tn, Tx ] covering the temperature variation range of the target;
1.2 temperature changing device for calibration is determined: selecting a temperature changing device with very close radiance according to the radiance of the detected target, wherein the temperature adjusting range of the temperature changing device covers the calibration temperature range; for a detected target with radiance larger than 0.95, the temperature changing device selects a surface source black body;
1.3, sampling m terms at equal intervals in a calibration temperature range [ Tn, Tx ] to obtain a temperature sequence { Ti }, wherein i is 1,2, … m;
1.4 determining the change range of the environmental temperature: according to the use environment of the temperature measuring equipment, an environment temperature range [ TEN, TEx ] covering fluctuation of the environment temperature is given; sampling n terms at equal intervals in an environment temperature range [ TEN, TEx ], and obtaining a temperature sequence { TEj }, wherein j is 1, 2.. n;
1.5 combining { Ti } and { TEj } in pairs to obtain MxN temperature parameter combinations [ Ti, TEj ];
1.6 measuring the corresponding instrument readings of different temperature parameter combinations:
starting from the first item of the temperature parameter combination [ Ti, TEj ], setting the temperature of the temperature varying device and the temperature of the cooling liquid of the reflective condenser lens as temperature values corresponding to each item of the temperature parameter combination [ Ti, TEj ], wherein the temperature of the cooling liquid of the reflective condenser lens corresponds to TEj, and simultaneously acquiring an instrument reading { Rs }, where s is 1,2,. k, where k is mxn, corresponding to the infrared temperature measuring device; the distance between the lens and the target is fixed and is marked as d when measuring each item;
when the infrared temperature measuring device adopts a focal plane array detector, the reading R of the instrument is the average value or the sum of the readings of all the pixels;
1.7, giving out the wave band radiation brightness of each temperature value in the blackbody temperature series { Ti } and { TEj } corresponding to the working wave band r 1-r 2 of the infrared temperature measuring device, and recording as the series { Li } and { LEj };
(iii) combining { Li } and { LEj } two by two to obtain k (mxn) radiance parameter combinations [ Li, LEj ], each combination corresponding to an instrument reading { Rs }, s ═ 1,2,. k;
each radiance combination [ Li, LEj ] is associated with a corresponding instrument reading { Rs } for a point in a three-dimensional cartesian coordinate system, wherein the radiance combination corresponds to the x/y axis and the instrument reading corresponds to the z axis for a total of k points;
1.8 obtain k linear equations in two-dimensional form according to R ═ a × L + b × LE + c, forming an overdetermined system of equations, written in the form of a matrix:
and obtaining a least square solution of the overdetermined equation set according to a least square method, namely obtaining linear equation coefficients a, b and c corresponding to the square sum minimum value of each equation error.
Further, in step 2.15, the specific calculation step for calculating the blackbody temperature is as follows:
1) determining a temperature change range [ Tmin, Tmax ] of a measured target, sampling u items at equal intervals (delta T) of the temperature range [ Tmin, Tmax ] according to temperature measurement precision requirements, obtaining an arithmetic sequence { Ti }, wherein i is 1,2 and … u, each item corresponds to a target temperature value, and the interval delta T is smaller than the absolute value of the temperature measurement precision;
2) sequentially calculating the wave band radiation emittance of blackbodies corresponding to u target temperature values in the working wave bands r 1-r 2 of the infrared detection movement from the first item of the arithmetic sequence { Ti }, and forming a sequence of numbers, which is marked as { Mi }; the method for acquiring the wave band radiance is to bring a target temperature value into a formula of spectral radiance exitance and wavelength of a black body given by the Planck black body radiation law, and integrate the target temperature value in the working wave band r 1-r 2 of the infrared detection core;
3) dividing each item of { Mi } by the circumferential rate pi in sequence to obtain u wave band radiances to form a sequence, and marking the sequence as { Li };
4) starting from a first item in an arithmetic series { Ti }, each target temperature value sequentially corresponds to a waveband radiance in a series { Li } one by one, and a database of the target temperature and the waveband radiance is established;
5) calling out a corresponding temperature value as a target temperature value according to the calculated wave band radiance L of the target; and if the wave band radiance is between the two wave band radiance values, acquiring a target temperature value by using a linear interpolation method.
Compared with the prior art, the invention has the following beneficial effects:
(1) compared with the traditional optical lens with stronger radiation gathering capability and the F number of 1, the invention improves the radiation collecting capability of the black body and the human body by more than 3.8 times.
(2) The invention effectively inhibits the interference of the environmental stray radiation to the temperature measurement precision. The current national standard for human body temperature measurement is 0.3 ℃. The infrared temperature measuring device can improve the human body temperature measuring precision by about one order of magnitude.
Drawings
FIG. 1 is a diagram of the position relationship between the system of the present invention and the target under test;
FIG. 2 is a schematic structural diagram of an infrared temperature measuring device of the present invention;
fig. 3 is a schematic structural view of a lens barrel according to a first embodiment of the present invention;
fig. 4 is a side view of a lens barrel of the first embodiment of the present invention;
fig. 5 is a schematic structural view of an upper cover of a lens barrel according to a first embodiment of the present invention;
fig. 6 is a sectional view of a lens barrel of the first embodiment of the present invention;
fig. 7 is a schematic structural view of a bottom surface of a lens barrel of the first embodiment of the present invention;
fig. 8 is a schematic structural view of a lens barrel according to a second embodiment of the present invention;
fig. 9 is a schematic structural view of the rear surface of a lens barrel of a second embodiment of the present invention;
fig. 10 is a side view of a lens barrel of a second embodiment of the present invention;
fig. 11 is a sectional view of a lens barrel of a second embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments will be described clearly and completely with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the examples without making any creative effort, shall fall within the protection scope of the present invention.
Unless otherwise defined, technical or scientific terms used in the embodiments of the present application should have the ordinary meaning as understood by those having ordinary skill in the art. The use of "first," "second," and similar terms in the present embodiments does not denote any order, quantity, or importance, but rather the terms are used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items. "mounted," "connected," and "coupled" are to be construed broadly and may, for example, be fixedly coupled, detachably coupled, or integrally coupled; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. "Upper," "lower," "left," "right," "lateral," "vertical," and the like are used solely in relation to the orientation of the components in the figures, and these directional terms are relative terms that are used for descriptive and clarity purposes and that can vary accordingly depending on the orientation in which the components in the figures are placed.
Example 1
As shown in fig. 1, the high-precision infrared temperature measurement system of the present embodiment includes an infrared temperature measurement device, and the infrared temperature measurement device is connected to the liquid inlet and the liquid outlet of the water cooling machine through the liquid outlet pipe and the liquid inlet pipe to form a circulating liquid cooling. During infrared temperature measurement, a lens of the infrared temperature measurement equipment is close to a measured target to 1-5 cm.
As shown in fig. 2, the infrared temperature measuring device includes an infrared detection core 2 and a reflective radiation-collecting lens 1.
As shown in fig. 3, 4, 5, and 6, the reflective condenser lens 1 of the present embodiment has a cylindrical shape, a truncated cone-shaped inner surface, a circular through hole at the center, an annular liquid cooling cavity 1.7 in the lens, a liquid inlet 1.5 and a liquid outlet 1.6 in the liquid cooling cavity 1.7, and a circulating liquid cooling system based on a water chiller. The liquid inlet 1.5 and the liquid outlet 1.6 are arranged on the side wall of the reflective type radiation focusing lens 1.
The reflective condenser lens 1 comprises two parts, namely a lens base 1.3 and a lens cover 1.2, as shown in fig. 6, the center of the lens base 1.3 is provided with a base circular through hole 1.11. The periphery of the through hole on the lower surface of the lens base 1.3 is provided with a special-shaped groove, and the special-shaped groove and four screw holes (matched screws) around the special-shaped groove are used for installing an infrared detector core and play a role in fixed connection. The light sensing surface of the infrared detection movement is positioned below the circular through hole A in the center of the lens base 1.3 and receives infrared radiation incident from the through hole.
The lens cover body 1.2 is fixed on the lens base 1.3 through screws (totally 8). As shown in fig. 4 and 5, a circular through hole 1.4 of the lens cover body is arranged at the center of the lens cover body 1.2, two annular grooves with different radiuses and sizes for installing sealing rings are arranged on the back of the lens cover body, the two annular grooves are respectively an inner annular groove 1.9 and an outer annular groove 1.10, and the two grooves are matched with the sealing rings. Based on the sealing rings in the two annular grooves, the lens cover body 1.2 and the lens base 1.3 form an annular liquid cooling cavity 1.7 after being fixed.
As shown in fig. 3 and 6, the truncated cone-shaped inner surface 1.1 of the lens cover body 1.2 is used for improving the infrared radiation collection capability of the temperature measurement target. The outside of the circular through hole B of the lens cover body 1.2 is an annular boss 1.8, and the outer diameter of the annular boss 1.8 is equal to the inner diameter of the circular through hole 1.11 of the lens base 1.3. After the lens cover body 1.2 is fixed with the lens base 1.3, the annular boss is tightly matched with the circular through hole 1.11 of the base. The infrared radiation collected by the lens is incident on the photosensitive surface of the infrared detection device through the circular through hole B of the lens cover body 1.2.
Lens cover body 1.2 is equipped with inlet 1.5 and liquid outlet 1.6, and during the temperature measurement, adjusting the camera lens makes inlet 1.5 be located the bottom of camera lens, and liquid outlet 1.6 is located the top of camera lens, ensures that the cooling water can be full of the water-cooling cavity of camera lens to fully control the temperature to the camera lens.
The cooling liquid is glycol cooling liquid, the freezing point is not higher than minus 45 ℃, and the cooling water machine carries out high-precision temperature control on the cooling liquid.
In this embodiment, the infrared detection core is an existing conventional non-refrigeration type infrared core or refrigeration type infrared detection core with an optical lens removed. The infrared detector of this embodiment takes the remaining portion of the optical lens out of the uncooled infrared movement (640 x 512) produced by smoke station wise photoelectric technology limited. The working waveband of the infrared temperature measuring device is 8-14 mu m, and the AD is 14 bits.
The infrared temperature measuring device is provided with a high-precision temperature control circulating liquid cooling system, and the circulating liquid cooling system consists of an energy-saving high-temperature control precision water cooler, a matched water pipe and a matched valve. The cooling liquid is subjected to high-precision temperature control by a water cooling machine in the circulating liquid cooling system. The temperature control precision of the water cooler is better than +/-0.02 ℃, and the water cooler has a large temperature control range and is a mature product in the market. Constant temperature coolant provided by the water cooling machine flows into the lens through the water pipe.
The lens is made of metal material with high thermal conductivity, such as red copper. The inner surface of the lens is plated with metal film layers with high reflectivity at the working wave band, such as a gold film, a silver film, an aluminum film and the like.
The high-precision infrared temperature measurement method of the embodiment is specifically carried out as follows:
step (1), temperature measurement and calibration: before temperature measurement, calibration is firstly carried out, and the calibration method is as follows;
1.1 determining a calibration temperature range: and according to the temperature change range of the detected target, providing a calibration range [ Tn, Tx ] covering the temperature change range of the target.
1.2 temperature changing device for calibration is determined: selecting a temperature changing device with very close radiance according to the radiance of the detected target, wherein the temperature adjusting range of the temperature changing device covers the calibration temperature range; for the measured target with radiance larger than 0.95, the temperature changing device can select a surface source black body.
1.3, sampling m items of a calibration temperature range [ Tn, Tx ] at equal intervals to obtain a temperature array { Ti }, wherein i is 1,2,. m;
1.4 determining the change range of the environmental temperature: according to the use environment of the temperature measuring equipment, an environment temperature range [ TEN, TEx ] covering fluctuation of the environment temperature is given, for example, when the infrared temperature measuring equipment is used outdoors, the environment temperature range can be set to-45 ℃. Sampling n terms at equal intervals in an environment temperature range [ TEN, TEx ], and obtaining a temperature sequence { TEj }, wherein j is 1,2,. n;
1.5 combining { Ti } and { TEj } in pairs to obtain MxN temperature parameter combinations [ Ti, TEj ];
1.6 measuring the corresponding instrument readings of different temperature parameter combinations:
starting from the first item of the temperature parameter combination [ Ti, TEj ], the temperature varying device temperature and the cooling liquid temperature of the reflective condenser lens are respectively set as temperature values corresponding to each item of the temperature parameter combination [ Ti, TEj ], wherein the cooling liquid temperature of the reflective condenser lens corresponds to TEj, and an instrument reading { Rs }, s is 1, 2. The distance between the lens and the target is constant during each measurement and is marked as d.
When the infrared temperature measuring device adopts a focal plane array detector, the reading R of the instrument is the average value or the sum of the readings of all the pixels.
1.7, the radiation brightness of the wave band of the infrared temperature measuring device working wave band r 1-r 2 corresponding to each temperature value in the series of numbers { Ti } and { TEj } of the black body temperature is given as the number series of numbers { Li } and { LEj }.
{ Li } and { LEj } are combined pairwise to obtain k (mxn) radiance parameter combinations [ Li, LEj ], each combination corresponding to one of the above-mentioned instrument readings { Rs }, s ═ 1, 2.
Each radiance combination [ Li, LEj ] is associated with a corresponding instrument reading { Rs } for a point in a three-dimensional cartesian coordinate system, where the radiance combination corresponds to the x/y axis and the instrument reading corresponds to the z axis, for a total of k points.
1.8 obtain k linear equations in two-dimensional form according to R ═ a × L + b × LE + c, forming an overdetermined system of equations, written in the form of a matrix:
and obtaining a least square solution of the overdetermined equation set according to a least square method, namely obtaining linear equation coefficients a, b and c corresponding to the square sum minimum value of each equation error. And performing linear regression fitting based on a least square method on k points in the three-dimensional Cartesian coordinate system.
Step (2) temperature measurement is carried out according to the following steps:
there are two practical temperature measurement methods, which are respectively aimed at the conditions of lens temperature control and lens temperature control:
2.1 temperature measurement method of lens without temperature control:
the lens does not need to be matched with a circulating liquid cooling system comprising a water cooler without controlling the temperature. The back of the lens is additionally provided with a temperature sensor for measuring the temperature of the lens in real time.
2.11 fix the distance between the lens and the target to d.
2.12 starting the infrared temperature measuring device, obtaining the reading Rm of the instrument, and obtaining the corresponding lens temperature Ts according to the temperature sensor.
2.13 calculating the radiation brightness Ls of the black body with the temperature of Ts in the working wave band r 1-r 2 of the infrared temperature measuring device.
And 2.14, obtaining coefficients a, b and c according to calibration, substituting Rm and the corresponding lens temperature Ls into a formula R ═ a × L + b × LE + c, and calculating the target wave band radiance L.
2.15 calculating the black body temperature equal to the target wave band radiance in the r 1-r 2 wave band according to the target wave band radiance L, namely the measured target temperature.
The specific calculation steps for calculating the blackbody temperature are as follows:
2.151, determining a temperature change range [ Tmin, Tmax ] of a measured target, sampling u items at equal intervals (delta T) in the temperature range [ Tmin, Tmax ] according to temperature measurement precision requirements, obtaining an arithmetic sequence { Ti }, wherein i is 1,2, … u, each item corresponds to a target temperature value, and the interval delta T is smaller than the absolute value of the temperature measurement precision;
2.152 sequentially calculating the wave band radiation emittance of the black body corresponding to u target temperature values in the working wave bands r 1-r 2 of the infrared detection movement from the first item of the arithmetic sequence { Ti }, and forming a series of numbers, which are marked as { Mi }; the method for acquiring the wave band radiance is to bring a target temperature value into a formula of spectral radiance exitance and wavelength of a black body given by the Planck black body radiation law, and integrate the target temperature value in the working wave band r 1-r 2 of the infrared detection core;
2.153 dividing each item of { Mi } by the circumferential rate pi to obtain u wave band radiances to form a sequence, which is marked as { Li };
2.154 starting from the first item in the arithmetic progression { Ti }, each target temperature value is in one-to-one correspondence with the wave band radiance in the progression { Li }, and a database of the target temperature and the wave band radiance is established;
2.155 according to the calculated wave band radiance L of the target, calling out a corresponding temperature value as a target temperature value; and if the wave band radiance is between the two wave band radiance values, acquiring a target temperature value by using a linear interpolation method.
2.2 temperature measurement method during temperature control of lens:
a circulating liquid cooling system including a water cooler needs to be matched to accurately control the temperature of the lens.
2.21 fix the distance between the lens and the target to d.
2.22 starting the infrared temperature measuring device, and obtaining the reading Rm of the instrument and the temperature Ts of the corresponding circulating cooling liquid, wherein the Ts is also the temperature of the lens.
2.23 the radiation brightness Ls of the blackbody with the temperature Ts in the working wave band r 1-r 2 of the infrared temperature measuring device is given.
And 2.24, obtaining coefficients a, b and c according to calibration, substituting Rm and the corresponding lens temperature Ls into a formula R ═ a × L + b × LE + c, and calculating the radiance L of the target waveband.
2.25 calculating the black body temperature equal to the target wave band radiance in the r 1-r 2 wave band according to the target wave band radiance, namely the target temperature.
Example 2
As shown in fig. 1, the high-precision infrared temperature measurement system of the present embodiment includes an infrared temperature measurement device, and the infrared temperature measurement device is connected to the circulating liquid cooling system through a liquid outlet pipe and a liquid inlet pipe to form a circulation, so as to bring the infrared temperature measurement device close to a target to be measured.
As shown in fig. 2, the infrared thermometry equipment includes an existing infrared detection movement 2 and a reflective condenser lens 1.
As shown in fig. 8, 9,10, and 11, the lens of this embodiment is a cylinder with a truncated-spherical inner surface, an annular liquid cooling cavity 1.7 is provided in the lens, the annular liquid cooling cavity 1.7 is provided with a liquid inlet 1.5 and a liquid outlet 1.6, and the liquid inlet/outlet is connected to the liquid outlet/inlet of the water chiller, so as to form a circulating liquid cooling system. The liquid inlet 1.5 and the liquid outlet 1.6 are arranged on the side wall of the lens cover body of the reflective type spotlight lens 1.
The reflective type radiation-collecting lens 1 comprises two parts, namely a lens base 1.3 and a lens cover 1.2, and as shown in fig. 9, a base circular through hole 1.11 is arranged in the center of the lens base 1.3. The periphery of the circular through hole is provided with a special-shaped groove, and the special-shaped groove is matched with a mechanical shell at the photosensitive surface end of the infrared detection machine core.
The lens cover body 1.2 is fixed on the lens base 1.3 through screws (totally 8). As shown in fig. 7 and 10, the lens cover 1.2 is provided with two annular grooves with different radiuses for installing the sealing rings, an annular liquid cooling cavity 1.7 is formed between the two annular grooves and the lens base 1.3, and the sealing rings in the grooves are used for sealing the cooling liquid in the liquid cooling cavity.
As shown in fig. 8 and 11, the inner surface of the lens cover 1.2 is a frustum-shaped hole surface 1.1, and the gold-plated film improves the reflection rate of infrared radiation to improve the infrared radiation collection capability of a temperature measurement target. The center of the lens cover body 1.2 is provided with a cover body circular through hole 1.4, and the outer side of the cover body circular through hole 1.4 is provided with an annular boss. The outer diameter of the annular boss corresponds to the inner diameter of the circular through hole 1.4 of the cover body. The infrared radiation collected by the lens is incident to the photosensitive surface of the infrared detection device through the circular through hole 1.11 of the base. The lens base 1.3 is fixed on one end of the light sensing surface of the infrared detection device by screws (four in all).
The lens cover body 1.2 is provided with a liquid inlet 1.5 and a liquid outlet 1.6, during temperature measurement, the lens is rotated to enable the liquid inlet 1.5 to be located in the bottom area of the lens, the liquid outlet 1.6 is located at the top of the lens, the annular liquid cooling cavity 1.7 of the lens can be fully filled with cooling water, and the temperature of the lens is fully controlled.
The rest is the same as in example 1.
Examples of detection
Based on the device of example 1, the following steps are specifically carried out:
step (1), temperature measurement calibration
1.1 according to the temperature variation range of a certain temperature measurement target, determining a calibration temperature range [13, 31] DEG C.
1.2 temperature changing device for calibration is determined: the radiance of the measured target is about 0.97, and a surface source black body is selected as a temperature changing device. The black body used is SR800N-12D-LT face source black body manufactured by CISystems of Israel. The size of the emission surface of the SR800N-12D-LT blackbody is 300 x 300mm, and when the ambient temperature is lower than 50 ℃, the absolute temperature control precision is +/-0.007 ℃. The emissivity of the emitting surface is 0.97 +/-0.02; the surface source black body meets the requirement of a temperature changing device within the temperature range of +/-10 ℃, the temperature stability is +/-0.003 ℃, the temperature space uniformity of the emitting surface is +/-0.01 ℃.
1.3 sampling 4 terms at equal intervals in the calibration temperature range [13, 31] to obtain a temperature sequence { Ti }: 13,19,25, 31;
1.4 determining the change range of the environmental temperature: and determining the environmental temperature range covering the fluctuation of the environmental temperature to be [10, 19] by combining the specific use environment of the infrared temperature measuring device. The ambient temperature range [10, 19] is sampled at 4 equally spaced terms to obtain the ambient temperature array { TEj }: 10,13,16, 19;
1.5{ Ti } and { TEj } are combined two by two to obtain 16 temperature parameter combinations [ Ti, TEj ]: [13,10], [13,13], [13,16], [13,19], [19,10], …, [31,19 ].
1.6 measurement of the corresponding instrument reading for each temperature parameter combination: the temperature of the temperature varying device and the temperature of the cooling liquid of the reflex condenser lens are set to the temperature value of each temperature parameter combination, for example, for the temperature parameter combinations [13,10], the temperature varying device and the temperature of the cooling liquid are set to 13 and 10 degrees centigrade, respectively. And then acquiring instrument readings { Rs }, wherein s is 1,2, 16, of the corresponding infrared temperature measuring device, wherein the readings are all located in a linear region of the infrared detector, and the instrument readings in the region are approximately in a linear relation with the radiance of a photosensitive surface of the infrared detector. The instrument reading R is the average of all pixel (640 x 512) readings. The distance between the lens and the target is fixed and marked as d.
1.7 calculate 16 band radiance combinations corresponding to the 16 temperature parameter combinations [ Li, LEj ]. Li is a black body with the temperature of Ti, and the radiance is in the unit of W/(cm2 × sr) at the wave band of the working wave band (8-14 μm) of the infrared temperature measuring device. LEj is the band amplitude of the black body at temperature TEj in the operating band. Each radiance combination [ Li, LEj ] corresponds to one instrument reading and the corresponding term [ Ti, TEj ] of the combination of temperature parameters corresponds to the same instrument reading. The radiance combinations and corresponding instrument readings constitute points in a three-dimensional cartesian coordinate system with X and Y axes corresponding to radiances Li and LEj, respectively, and the Z axis corresponding to instrument readings for a total of 16 points.
1.8 obtain 16 linear equations according to R ═ a × L + b × LE + c, wherein L and LE are respectively the wave band radiance of 8-14 μm wave band of black body with the same temperature as the temperature changing device and the lens. 16 linear equations form an overdetermined equation set, and the form of writing the overdetermined equation set into a matrix is as follows:
and calculating a least square solution of the over-determined equation set according to a least square method, namely obtaining the coefficients a, b and c of the linear binary equations corresponding to the square sum minimum value of the errors of each equation, wherein the coefficients a, b and c are 2912524.8703, 1503557.8041 and-12952.1102 respectively.
And then the temperature measurement equation is obtained as follows: R2912524.8703L +1503557.8041 LE-12952.1102. Step (2), actual temperature measurement: and liquid cooling is adopted for controlling temperature.
2.1 adjusting the distance between the lens and the measured object to fix the distance between the lens and the measured object as d. And starting the circulating liquid cooling system, wherein the temperature of the cooling liquid is set to be 19 ℃, and the temperature of 19 ℃ is the temperature TE of the lens.
2.2 calculating the radiation brightness LE of the blackbody at 19 ℃ in the working band of the infrared temperature measuring device within 8-14 mu m: 0.004859W/(cm2 sr).
2.3 starting the infrared temperature measuring device to obtain instrument readings Rm at different target temperatures, wherein the instrument readings of the infrared temperature measuring device are 7829.7 and 9195.4 respectively.
2.4 calculating the radiance of the target waveband of 8-14 mu m by using the temperature measurement equation: 0.004627W/(cm2 sr) and 0.005096W/(cm2 sr)
2.5 obtaining the target temperatures of 15.98 ℃ and 22.01 ℃ respectively according to the established target temperature and the 8-14 mu m waveband radiance database. According to the target temperature of accurate contact temperature measurement of 16 ℃ and 22 ℃, the temperature measurement errors are-0.02 ℃ and 0.01 ℃.
The device has high infrared temperature measurement precision on the black body, and exceeds NETD (65mK) of the used infrared detection machine core.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. The utility model provides an infrared temperature measurement system of high accuracy which characterized in that: the device comprises an infrared temperature measuring device, wherein the infrared temperature measuring device is connected with a liquid inlet and a liquid outlet of a water cooling machine through a liquid outlet pipe and a liquid inlet pipe;
the infrared temperature measuring device comprises an infrared detection machine core and a reflection type radiation gathering lens; the inner surface of the reflection type radiation-gathering lens is in a circular truncated cone shape or a spherical truncated cone shape, a circular through hole is formed in the center of the lens, an annular liquid cooling cavity is arranged in the lens, and a liquid inlet and a liquid outlet are formed in the annular liquid cooling cavity;
when the infrared temperature measuring device measures the temperature of the target, the reflective type radiation gathering lens needs to be close to the measured target.
2. The high-precision infrared temperature measurement system according to claim 1, characterized in that: the reflective type radiation-gathering lens comprises a lens base and a lens cover body, wherein the inner surface of the lens cover body is in a circular truncated cone shape or a spherical truncated cone shape;
a base circular through hole is formed in the center of the lens base; the periphery of the through hole on the lower surface of the lens base is provided with a special-shaped groove, and the light sensing surface of the infrared detection machine core is positioned below the central through hole of the lens base and used for receiving infrared radiation incident from the through hole.
3. The high-precision infrared temperature measurement system according to claim 1, characterized in that: the center of the lens cover body is provided with a circular through hole of the cover body, the back of the lens cover body is provided with an inner annular groove and an outer annular groove which are used for installing a sealing ring and have different radiuses, the two grooves are matched with the sealing ring, and after the lens cover body is fixed with the lens base, an annular liquid cooling cavity is formed between the lens cover body and the lens base.
4. The high-precision infrared temperature measurement system according to claim 3, characterized in that: the outer side of the circular through hole of the cover body at the back of the lens cover body is provided with an annular boss, and the outer diameter of the annular boss is equal to the inner diameter of the circular through hole of the base;
after the lens cover body is fixed with the lens base, the annular boss is tightly matched with the circular through hole of the base, and infrared radiation collected by the lens is incident to the photosensitive surface of the infrared detection device through the through hole.
5. The high-precision infrared temperature measurement system according to claim 1, characterized in that: during temperature measurement, the lens is adjusted to enable the liquid inlet to be located at the bottom of the lens, and the liquid outlet to be located at the top of the lens, so that the annular liquid cooling cavity of the lens is filled with cooling liquid.
6. The high-precision infrared temperature measurement system according to claim 5, characterized in that: the cooling liquid is glycol type cooling liquid, and the freezing point is not higher than minus 45 ℃.
7. The high-precision infrared temperature measurement system according to claim 1, characterized in that: the working wave band of the infrared temperature measuring machine core is 8-14 mu m or 3-5 mu m.
8. A high-precision infrared temperature measurement method is characterized in that: the method comprises the following steps:
step (1), temperature measurement and calibration: before temperature measurement, firstly calibrating to obtain a temperature calibration formula;
step (2), measuring the temperature according to the following steps:
2.1 temperature measurement method of lens without temperature control:
a circulating liquid cooling system is not used, and a temperature sensor is additionally arranged on the back of the lens and used for measuring the temperature of the lens in real time;
2.11 fixing the distance between the lens and the target to make the distance between the lens and the target be d;
2.12 starting the infrared temperature measuring device, obtaining an instrument reading Rm, and obtaining a corresponding lens temperature Te by using a temperature sensor;
2.13 calculating the radiation brightness LE of a black body with the temperature of Te in a wave band r 1-r 2 of the work wave band of the infrared temperature measuring machine core;
2.14 obtaining coefficients a, b and c according to temperature calibration, substituting Rm and the band radiance LE corresponding to the lens temperature Te into a temperature calibration formula R = a × L + b × LE + c, and calculating the band radiance L of the target;
2.15 calculating the blackbody temperature equal to the radiance of the target waveband within the r 1-r 2 according to the target waveband radiance and the Planck blackbody radiation law, namely the measured target temperature;
2.2 temperature measurement method during temperature control of lens:
2.21 starting a water cooling machine to provide constant-temperature cooling liquid for the infrared temperature measuring device, wherein the temperature is recorded as Te;
2.22 fixing the distance between the lens and the target to make the distance between the lens and the target be d;
2.23 starting an infrared temperature measuring device to obtain an instrument reading Rm;
2.24, giving a black body with the temperature of Te, and radiating brightness LE in a wave band within the working wave band r 1-r 2 of the infrared temperature measuring machine core;
2.25 obtaining coefficients a, b and c according to calibration, substituting Rm and waveband radiance LE into a formula R = a × L + b × LE + c, and calculating target waveband radiance L;
2.26 calculating the blackbody temperature equal to the target waveband radiance in the r 1-r 2 waveband according to the target waveband radiance, namely the target temperature.
9. The high-precision infrared temperature measurement method according to claim 8, characterized in that: in the step (1), the calibration method comprises the following steps:
1.1 determining a calibration temperature range: according to the temperature variation range of the measured target, providing a calibration range [ Tn, Tx ] covering the temperature variation range of the target;
1.2 temperature changing device for calibration is determined: selecting a temperature changing device with very close radiance according to the radiance of the detected target, wherein the temperature adjusting range of the temperature changing device covers the calibration temperature range; for a detected target with radiance larger than 0.95, the temperature changing device selects a surface source black body;
1.3 sampling m terms at equal intervals of a calibration temperature range [ Tn, Tx ] to obtain a temperature sequence { Ti }, i =1, 2, … m;
1.4 determining the change range of the environmental temperature: according to the use environment of the temperature measuring equipment, an environment temperature range [ TEN, TEx ] covering fluctuation of the environment temperature is given; sampling n items at equal intervals in an environment temperature range [ TEN, TEx ], and obtaining a temperature sequence { TEj }, j =1, 2.. n;
1.5 combining { Ti } and { TEj } in pairs to obtain MxN temperature parameter combinations [ Ti, TEj ];
1.6 measuring the corresponding instrument readings of different temperature parameter combinations:
starting from the first item of the temperature parameter combination [ Ti, TEj ], setting the temperature of the temperature varying device and the temperature of the cooling liquid of the reflective condenser lens as temperature values corresponding to each item of the temperature parameter combination [ Ti, TEj ], wherein the temperature of the cooling liquid of the reflective condenser lens corresponds to TEj, and simultaneously obtaining instrument readings { Rs }, s =1, 2,. k corresponding to the infrared temperature measuring device, wherein k = M × N; the distance between the lens and the target is fixed and is marked as d when measuring each item;
when the infrared temperature measuring device adopts a focal plane array detector, the reading R of the instrument is the average value or the sum of the readings of all the pixels;
1.7, giving out wave band radiation brightness of each temperature value in the blackbody temperature series { Ti } and { TEj } corresponding to the working wave band r 1-r 2 of the infrared temperature measuring device, and recording the wave band radiation brightness as the number series { Li } and { LEj };
{ Li } and { LEj } are combined pairwise to obtain k (mxn) radiance parameter combinations [ Li, LEj ], each combination corresponding to an instrument reading { Rs }, s =1, 2,. k;
each radiance combination [ Li, LEj ] is associated with a corresponding instrument reading { Rs } for a point in a three-dimensional cartesian coordinate system, wherein the radiance combination corresponds to the x/y axis and the instrument reading corresponds to the z axis for a total of k points;
1.8 obtaining k linear equations in a binary system according to R = a × L + b × LE + c, forming an overdetermined system of equations, written in a matrix form:
and obtaining a least square solution of the overdetermined equation set according to a least square method, namely obtaining linear equation coefficients a, b and c corresponding to the square sum minimum value of each equation error.
10. The high-precision infrared temperature measurement method according to claim 8, characterized in that: in step 2.15, the specific calculation steps for calculating the blackbody temperature are as follows:
1) determining a temperature change range [ Tmin, Tmax ] of a measured target, sampling u items at equal intervals of delta T in the temperature range [ Tmin, Tmax ] according to the temperature measurement precision requirement, obtaining an arithmetic sequence { Ti }, i =1, 2, … u, wherein each item corresponds to a target temperature value, and the interval delta T is smaller than the absolute value of the temperature measurement precision;
2) sequentially calculating black body positions corresponding to u target temperature values from a first item of an arithmetic sequence { Ti }, wherein the first item is a first item of an arithmetic sequence
Forming a series of numbers, namely { Mi }, by using the radiation emittance of the wave band in the working wave band r 1-r 2 of the infrared detection machine core;
the method for acquiring the wave band radiance is to bring a target temperature value into a formula of spectral radiance exitance and wavelength of a black body given by the Planck black body radiation law, and integrate the target temperature value in the working wave bands r 1-r 2 of the infrared detection core;
3) dividing each item of { Mi } by the circumferential rate pi in sequence to obtain u wave band radiances to form a sequence, and marking the sequence as { Li };
4) starting from a first item in an arithmetic series { Ti }, each target temperature value sequentially corresponds to a waveband radiance in a series { Li } one by one, and a database of the target temperature and the waveband radiance is established;
5) calling out a corresponding temperature value as a target temperature value according to the calculated wave band radiance L of the target; and if the wave band radiance is between the two wave band radiance values, acquiring a target temperature value by using a linear interpolation method.
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