CN100416237C - Realizing method and device of high precision radiation brightness standard based on standard detector - Google Patents
Realizing method and device of high precision radiation brightness standard based on standard detector Download PDFInfo
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- CN100416237C CN100416237C CNB2005100376627A CN200510037662A CN100416237C CN 100416237 C CN100416237 C CN 100416237C CN B2005100376627 A CNB2005100376627 A CN B2005100376627A CN 200510037662 A CN200510037662 A CN 200510037662A CN 100416237 C CN100416237 C CN 100416237C
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Abstract
The present invention relates to a novel visible light wave range realizing method and a device of high precision radiation brightness standard based on a standard detector. The present invention takes a low temperature radiometer as the primary standard of light radiation flux computation, the present invention adopts a multirange filter type radiance meter based on a light trapping structure, and the standard transfer from low temperature absolute radiometer to the Trap standard detector is realized. The multirange filter type radiance meter of the present invention has compact structure and high long-term stability, and a precise constant temperature control system is designed on the present invention. The present invention can be used for different environment temperature, the measuring precision is not reduced, and the present invention is suitable for a radiance laboratory standard to be preserved for a long time or a daily work standard to be used, which is very convenient. The uncertainty of the existing radiance standard is reduced greatly, and the present invention provides a set of fire-new ideas and methods for the establishment of a radiometry high precision measuring standard.
Description
Technical field
The invention belongs to the optical radiation accurate measurement technical field of radiometry, be specifically related to a kind of novel implement device and method of surveying benchmark based on the high precision radiation brightness of standard detector.
Background technology
Up to the present, the common method that all is based on radiation source that adopts of the realization of radiation brightness standard.The first grade standard that adopts this method is to be based upon on the absolute black body theoretical foundation, determine by Planck law, as seen-working stamndard of short-wave infrared wave band is other spoke luminance standard lamps of various uncertainty levels.According to the Planck blackbody radiation law, the outgoing spectral radiance of black matrix is corresponding one by one with the temperature of black matrix on a certain specific wavelength.Existing radiation brightness standard is exactly according to this principle, sets up radiation brightness standard by the temperature of accurate mensuration black matrix.Therefore, (the elementary benchmark of spoke brightness of 1500K～3200K) is set up in the process, and the accurate mensuration of high temperature blackbody temperature is topmost uncertain factor based on the high temperature black matrix existing.And in fact, the mensuration of high temperature blackbody temperature, its technical difficulty is bigger, and equipment needed thereby complexity, precision are difficult to improve, thereby the elementary benchmark of existing spoke brightness, and its absolute precision itself is just not high, and uncertainty is bigger, is about about 1%～4%; Through multistage standard transmission, finally arrive user's working stamndard, its absolute precision is poorer, and uncertainty reaches about 5%～10%.Because existing spoke brightness working stamndard precision itself is not high, limited the further raising of various on the market model spectral radiance meter measuring accuracy, make the metering and the measurement level of spectral radiance be in a lower level at present, seriously fettered those demands the higher industry development of spoke brightness measurement index accuracy requirement.
Summary of the invention
Purpose of the present invention has been to invent a kind of novel implementation method and device of surveying benchmark based on the high precision radiation brightness of standard detector.The first grade standard of radiation source has adopted the highest device of measuring light radiation flux precision---low temperature absolute radiometer on the our times, and the transmission standard of spoke brightness and working stamndard have all adopted the optical filtering chip spoke nitometer based on the silicon trap detector.The precision of this method is much better than existing based on the radiation source method, and because the transfer chain of standard is shorter, thereby can reduce the uncertain factor in the standard transmittance process greatly.
The present invention has invented new device---the multiband optical filtering chip spoke nitometer of a cover realization spoke brightness detection benchmark.It has adopted the unique design of light trapping structure, and volume is little, and is in light weight, and compact conformation is simple to operate, is suitable as very much daily spoke brightness and transmits standard and working stamndard use.
The implementation method of the novel high precision radiation brightness standard based on standard detector of a kind of visible light wave range, may further comprise the steps: (1), design a multiband optical filtering chip spoke nitometer, in fact this optical filtering chip spoke nitometer is made up of three parts: columnar diaphragm tube part, Trap explorer portion and circuit acquisition controlling part, (2), in columnar diaphragm tube, field stop is installed successively, remove the parasitic light diaphragm, aperture diaphragm and spike interference filter, then this diaphragm tube is installed on the casing, casing is equipped with the Trap skeleton of a polyhedral structure near spike interference filter one side, leave the incident light hole of a circle on the face of being close to the diaphragm tube of Trap skeleton, be fixed with a silicon photoelectric diode respectively on each face of its excess-three face, set these three faces and be respectively the bottom surface, left surface, right flank, close the position of these three faces: plane, incident light hole place and bottom surface vertical plane, right flank and plane, incident light hole place are in angle of 45 degrees, and right flank is vertical with the bottom surface, left surface and bottom surface are in angle of 45 degrees, left surface is vertical with plane, incident light hole place, three silicon photoelectric diodes that are fixed on the Trap polyhedron skeleton adopt the mode that is connected in parallel on circuit, three photo-signals that photodiode in parallel is exported, make I-V changes and amplifies through preceding discharge road, change voltage signal into, after the signal conditioning circuit pre-service, send into A/D conversion and signal processing unit part again, (3) by Single Chip Microcomputer (SCM) system control, in (1), (2) polyhedral structure Trap skeleton in the spoke nitometer described in and the discharge circuit of its rear end part have constituted the Trap detector of a light trapping structure jointly; Selected several wavelength lasers in the visible light wave range scope, on each wavelength points, the incidenting laser radiation flux that utilizes low temperature absolute radiometer and HP34970A 6.5 bit digital voltage tables to measure respectively to enter light trapping structure Trap detector and the output voltage signal of Trap detector, set up light trapping structure Trap detector in input light radiant flux on each wavelength points and the one-to-one relationship between its output voltage, by interpolation and extrapolation, calculate the absolute spectral response rate of Trap detector in whole visible light wave range; Through the absolute calibration of above-mentioned low temperature absolute radiometer, the Trap detector just becomes an optical radiation power standard detector; (4), according to the definition of radiation power and radiance, radiation power (radiation flux) φ is meant that unit interval dt by certain locus radiation energy dQ, has: φ=dQ/dt; Radiance L is meant and leaves, arrives or pass the radiation flux d Φ on a certain surface unit solid angle d Ω, the projected area dScos θ of unit, has: L=d φ/d Ω dScos θ; The relatively difference of radiation flux and radiance definition, as can be seen, with respect to radiation flux, only many geometric factors (d Ω dScos θ) in the definition of radiance, and this geometric factor is actually by input aperture and the common decision of solid angle; That is, the measurement of spoke brightness with respect to the measurement of radiation flux only many accurate mensuration by the geometric factor of input aperture and the common decision of solid angle; Therefore, introduce the columnar diaphragm tube that can limit input aperture and solid angle in Trap optical power standard detector input path the place ahead, and after this input aperture and solid angle accurately measured, calculate by formula is strict, just can make Trap optical radiation power standard detector change spoke luminance standard detector into; (5), when certain lambert's characteristic target of actual measurement, pass through temperature control system, spoke luminance standard detector temperature is controlled at Trap optical power standard detector in (3) makes the temperature of absolute power timing signal, so far, set up based on the spoke luminance standard of standard detector and to finish with respect to low temperature radiometer.
By freely changing the spike interference filter of different centre wavelengths, benchmark is surveyed in the spoke brightness that can constitute different centre wavelengths.
The implement device of benchmark is surveyed in described high precision radiation brightness, it is characterized in that it comprises: place to go parasitic light diaphragm, precision temperature sensor, field stop, aperture diaphragm, spike interference filter, VFD fluorescence digital display screen, front panel keys keyboard, RS232-C serial line interface and based on the Trap detector of light trapping structure.
Structural design light trapping structure has cleverly been adopted in Trap detector core.This project organization, make incident light in Trap inside through after the reflection-absorption repeatedly, almost all incident lights can both be detected device and accept to finish opto-electronic conversion.And Trap detector polarized non-sensitive can not exert an influence to measurement result because of polarization of incident light attitude difference when repeatedly measuring.
Described multiband optical filtering chip spoke nitometer, design has the exact constant temperature control system of based semiconductor cooling technic.Abandoned the method for traditional temperature control water jacket, adopted semiconductor cooler Peltier, digital temperature sensor DS18B20.Digital temperature sensor DS18B20 is fixedly mounted on the spoke nitometer, adopts heat conductive silica gel bonding, the bonding or solder welding with heat-conduction epoxy resin between spoke nitometer and temperature sensor and the Peltier.
Described multiband optical filtering chip spoke nitometer has friendly alternating interface between man and computer, can be set to remote computer automatic control mode or local mode of operation.Have the power down nonvolatile memory, when being set to measure state automatically, spoke nitometer of the present invention can be finished automatically to gather and measure, and the result is stored in the on-chip memory, measures after finishing to import the data statistic analysis processing that upper PC carries out the later stage into by the RS232C serial ports.
The elementary benchmark of radiation source of the present invention has adopted the highest device of measuring light radiation flux precision---low temperature absolute radiometer on the our times.The low temperature absolute radiometer utilizes the absolute power of electricity substituted principle measuring light radiation.Incident light raises the temperature of the inner reception cavity of radiometer, block incident light after reaching thermal equilibrium, produce the needed electric power of same temperature rise with electrical heating and promptly equal actual incident optical power, wherein temperature and electrical heating power are used germanium thermometer thermometer and electric bridge precision measurement respectively.The tubular reception cavity inwall of radiometer inner cone has applied the high-absorbility material, and incident light repeatedly approaches to be absorbed fully after the reflection therein.Cavity is under liquid nitrogen (77K) and the double-deck cold shield of liquid helium (4.2K), has completely cut off the environment heat radiation, also makes light and electrical heating process reach high equivalence.Low temperature lower wire and joint all are in superconducting state, and its ohmic loss can be ignored.The above-mentioned design feature of low temperature radiometer makes its precision that is used for optical radiation measurement very high, and uncertainty of measurement can reach 0.01%.
Multiband optical filtering chip spoke nitometer of the present invention is characterized in that adopting the unique texture design of light trapping.This light trapping project organization adopts three plate plane type silicon photoelectric diodes, make according to the mirror reflection principle and to incide first reflected light on the silicon photoelectric diode and get to second silicon photoelectric diode, reflected light on second silicon photoelectric diode is got on the 3rd silicon photoelectric diode again, and the reflected light on the 3rd silicon photoelectric diode follows Yuan Lu again and turns back on second silicon photoelectric diode and get on first silicon photoelectric diode at the reflected light that produces on second silicon photoelectric diode thus again.Like this, the part light that loses because of reflection on every silicon photoelectric diode will be received by next piece silicon photoelectric diode, and the like.Principle is as follows:
For single silicon photoelectric diode, have:
I
f＝η(1-ρ)(λe/hc)·P
So, have in the light trapping structure:
I
f＝[η
1(1-ρ
1)+η
2ρ
2(1-ρ
1)+η
3ρ
1ρ
2(1-ρ
3)+η
2ρ
1ρ
2ρ
3
(1-ρ
2)+η
1ρ
1ρ
2ρ
2ρ
3(1-ρ
1)]·(λe/h?c)·P
In the formula: I
fBe photogenerated current; P is an incident optical power; λ is a lambda1-wavelength; H is the Plank constant; C is a vacuum light speed; η
1, η
2, η
3Be respectively the internal quantum efficiency of 1#, 2#, 3# silicon photoelectric diode;
ρ
1, ρ
2Be the reflectivity of incident angle 1#, 2# photodiode when being 45 °, ρ
3The reflectivity of 3# photodiode during for vertical incidence.
In fact, be the photodiode of model of the same race owing to what adopt, so have: η
1=η
2=η
3And ρ
1=ρ
2=ρ
3, then following formula can be reduced to:
I
f＝η(1-ρ
5)(λe/hc)·P
So just formed a light trapping, compare with the single piece of silicon photodiode, its surface reflectivity greatly reduces, simultaneously, this three-chip type structure also can reduce the polarization sensitivity of single device to radiation greatly, promptly reduce to greatest extent silicon photodiode detector part surface reflectivity because of the difference of incident angle to measuring the radiometric uncertain factor that the influence that brought and polarization sensitivity cause, thereby can improve measuring accuracy greatly.
Optical filtering chip spoke nitometer of the present invention, its beam splitter has adopted spike interference filter, and assembly structure has adopted the project organization of being convenient to change different centre wavelength optical filters.To required different-waveband, can realize by the optical filter of changing different centre wavelengths.
Drift cause the measuring accuracy of spoke nitometer to reduce owing to can take place with the variation of environment temperature key parameters such as the centre wavelength of optical filter, transmitance, so optical filtering chip spoke nitometer of the present invention, designed complete intelligent temperature monitoring and control system, it can realize exact constant temperature control to optical filter.
Optical filtering chip spoke nitometer of the present invention, design has friendly human-computer interaction interface and RS232C computing machine serial line interface.Keypad on its front panel is used for the relevant parameter that is provided with of input; High brightness vacuum fluorescent display screen VFD is used for real-time display operation information, work state information and measurement result.This spoke nitometer can be set to local mode of operation or computer remote control model.
Description of drawings
Fig. 1 is a spoke luminance standard transfer chain synoptic diagram of the present invention.
Fig. 2 is a light trapping structural representation of the present invention.
Fig. 3 is a multiband optical filtering chip spoke nitometer structural representation of the present invention.
Fig. 4 is multiband optical filtering chip spoke nitometer temperature control system figure.
Embodiment
Referring to Fig. 1, Fig. 2, Fig. 3, Fig. 4.
Novel high precision radiation luminance standard implementation method based on standard detector of the present invention as shown in Figure 1.Low temperature radiometer is the present the highest device of measuring light radiation power absolute precision in the world.The elementary benchmark that measures as light radiant flux with it in the inventive method.Because the low temperature absolute radiometer involves great expense, volume is bigger, the operation operation is comparatively complicated, be not easy to be used as daily working stamndard, thus the present invention again development and design based on the Trap detector of light trapping structure, its superior performance, volume is little, easy to use, long-time stability are good, are suitable as very much the transmission standard and use.At visible light wave range, adopt different wavelength of laser, response to the Trap detector is carried out the absolute magnitude calibration with respect to the low temperature absolute radiometer, then based on the spectral response curve of Trap detector, by extrapolation and interior difference algorithm, can calculate the absolute spectral response rate of Trap detector on the whole continuous wave band of visible-range.The Trap detector just becomes a luminous flux standard detector that can be used in the measurement of light radiant flux absolute magnitude like this, has finished the standard transmission of the low temperature absolute radiometer shown in Fig. 1 to the Trap standard detector.
Multiband optical filtering chip spoke nitometer of the present invention as shown in Figure 3.Wherein, 1, remove the parasitic light diaphragm, 2, the precision temperature sensor, 3, field stop, 4, aperture diaphragm, 5, spike interference filter, 6, VFD fluorescence digital display screen, 7, front panel keys, 8, the RS232-C serial line interface, 9, the Trap detector of light trapping structure.
According to definition, spoke brightness L is meant the radiation flux d Ω that leaves, arrives or pass dS cos θ on a certain surface unit solid angle d Ω, the unit projected area, has:
According to above definition, accurately measure the spoke brightness that arrives Trap detector entrance pupil place, then need to know the radiation flux d Φ that enters Trap detector entrance pupil, solid angle d Ω and projected area dS cos θ.Because the Trap detector is with respect to the low temperature absolute radiometer, done absolute radiometric calibration, its absolute spectral response rate is known, behind the output voltage signal that measures the Trap detector, can calculate the radiation flux d Φ that learns Trap detector entrance pupil place according to its absolute spectral response rate.Solid angle d Ω among the design and projected area dS cos θ pass through field stop, aperture diaphragm, and geometric factors such as distance between the two are final common determines, thereby accurately measured field stop, aperture diaphragm and both between distance after, just can calculate and learn solid angle d Ω and projected area dS cos θ.Like this, behind known d Φ, d Ω and the dS cos θ, can accurate Calculation obtain the spoke brightness value at Trap detector entrance pupil place according to the definition of above spoke brightness.
Above formula provides is spoke brightness definition in all band scope that is under no restraint of wave band, and in the practical application, and what often need to know is the spectral radiance of a certain specific wavelength in certain bandwidth range, thereby also needs to consider wavelength and bandwidth considerations.
Adopted the beam splitter of spike interference filter among the present invention, limited wavelength location and bandwidth as optical system.Like this, after the spectral transmittance of accurately having measured optical filter and bandwidth, in conjunction with more than the spoke brightness value that obtains can calculate the spectral radiance of a certain specific wavelength.Multiband spoke nitometer becomes a spoke brightness that can be used in the spectral radiance accurate measurement and surveys benchmark.
So far, just realized the standard transmittance process from the Trap standard detector to multiband spoke nitometer shown in Figure 1, its essence is the transmission and the conversion that have realized from the light radiant flux benchmark to the spectral radiance benchmark, set up novel spoke brightness and surveyed benchmark based on standard detector.
Benchmark is surveyed in the spoke brightness that the present invention adopts multiband spoke nitometer to be realized, the absolute precision height, and uncertainty is better than 1%, and this standard performance is highly stable, is convenient to preserve.Multiband optical filtering chip spoke nitometer of the present invention, its structure is made up of three parts as shown in Figure 3: columnar diaphragm tube part, Trap explorer portion and circuit acquisition controlling part.Field stop 3 is installed in the columnar diaphragm tube successively, removes parasitic light diaphragm 1, aperture diaphragm 4 and spike interference filter 5, then this diaphragm tube is installed on the casing, casing is equipped with the Trap skeleton 9 of a polyhedral structure near spike interference filter one side, leave the incident light hole 14 of a circle on the face of being close to the diaphragm tube of Trap skeleton, be fixed with a silicon photoelectric diode respectively on each face of its excess-three face.Incident light hole plane, 14 place and bottom surface 15 vertical planes, right flank 16 and plane, incident light hole 14 place are in angle of 45 degrees, and right flank 16 is vertical with bottom surface 15, left surface 17 and bottom surface 15 are in angle of 45 degrees, left surface 17 is vertical with plane, incident light hole 14 place, three silicon photoelectric diodes that are fixed on the Trap polyhedron skeleton adopt the mode that is connected in parallel on circuit, three photo-signals that photodiode in parallel is exported, make I-V changes and amplifies through preceding discharge road, change voltage signal into, after the signal conditioning circuit pre-service, send into A/D conversion and signal processing unit part again, and then finish the collection of signal by Single Chip Microcomputer (SCM) system control, spoke brightness absolute magnitude calculates, the functions such as real-time demonstration of storage and measurement result.Multiband optical filtering chip spoke nitometer design of the present invention has front panel keys and VFD high brightness fluorescence digital display screen, is used to import the user and parameter is set and shows measurement result in real time.When the automatic measurement pattern in this locality, system can be stored in measurement result in the power down nonvolatile memory, measures after finishing and can be uploaded to the statistical study processing that PC carries out late time data by the RS232C serial ports.
Multiband optical filtering chip spoke nitometer of the present invention is equipped with spike interference filter.Experimental study shows that the performance parameter of optical filter can rise and fall with environment temperature bigger variation takes place, and is the key factor that influences multiband optical filtering chip spoke nitometer absolute precision.Consider when multiband optical filtering chip spoke nitometer uses as daily spoke brightness detection criterion in the varying environment temperature, its precision should be not influenced by ambient temperature, the present invention has designed accurate temperature control system, come optical filter is carried out thermostatic control, thereby make the temperature of optical filter be controlled in its temperature when doing the absolute response calibration all the time with respect to the low temperature absolute radiometer.Accurate temperature control system of the present invention as shown in Figure 4, comprise: multiband optical filtering chip spoke nitometer 10, be fixed on the digital temperature sensor DS18B20 11 above the optical filtering chip spoke nitometer, the semiconductor heat electric refrigerator Peltier 12 that links to each other with optical filtering chip spoke nitometer, heating radiator 13, intelligent temperature control circuit that links to each other with the digital temperature sensor output terminal and man-machine interface circuit.
All must keep good rigidity thermo-contact between optical filtering chip spoke nitometer of this enforcement and the DS18B20 temperature sensor and between optical filtering chip spoke nitometer and the Peltier, so just can reach desirable temperature control effect.Can adopt the bonding or employing anchor clamps ways of connecting of heat conductive silica gel in actual the connection.When adopting bonding way, the bonding or solder welding of available heat-conduction epoxy resin between spoke nitometer and temperature sensor and the Peltier; When adopting anchor clamps to connect, all need evenly to smear heat conductive silica gel between spoke nitometer and temperature sensor and the Peltier, to reduce the thermal resistance of surface of contact.
Be used among the present invention to heat or the device of refrigeration operation has adopted semiconductor heat electric refrigerator Peltier, it is based on the Peltier effect many to thermoelectric cooling on electric series connection, in heat conduction, compose in parallel.Being added in galvanic polarity on the device by change is that variable refrigeration is heating, the neither endothermic nor exothermic rate then be proportional to add the size of DC current.Because Peltier not only can realize heating but also can carry out refrigeration, and volume is small and exquisite, to use simple and conveniently, the temperature that is particularly suitable for little heat and space-constrained precision instrumentation is controlled.
Implementation method and the device of surveying benchmark based on the high precision radiation brightness of standard detector of the present invention, on Key Performance Indicators such as absolute precision and long-time stability, have traditional based on the radiation source method incomparable advantage, be the brand-new radiometry mete-wand of a cover set up thinking and method.
Claims (2)
1. implementation method based on the high precision radiation brightness standard of standard detector, may further comprise the steps: (1), design a multiband optical filtering chip spoke nitometer, in fact this optical filtering chip spoke nitometer is made up of three parts: columnar diaphragm tube part, Trap explorer portion and circuit acquisition controlling part, (2), in columnar diaphragm tube, field stop is installed successively, remove the parasitic light diaphragm, aperture diaphragm and spike interference filter, then this diaphragm tube is installed on the casing, casing is equipped with the Trap skeleton of a polyhedral structure near spike interference filter one side, leave the incident light hole of a circle on the face of being close to the diaphragm tube of Trap skeleton, be fixed with a silicon photoelectric diode respectively on each face of its excess-three face, set these three faces and be respectively the bottom surface, left surface, right flank, close the position of these three faces: plane, incident light hole place is vertical with the bottom surface, right flank and plane, incident light hole place are in angle of 45 degrees, and right flank is vertical with the bottom surface, left surface and bottom surface are in angle of 45 degrees, left surface is vertical with plane, incident light hole place, three silicon photoelectric diodes that are fixed on the Trap polyhedron skeleton adopt the mode that is connected in parallel on circuit, three photo-signals that photodiode in parallel is exported, make I-V changes and amplifies through preceding discharge road, change voltage signal into, after the signal conditioning circuit pre-service, send into A/D conversion and signal processing unit part again, (3) by Single Chip Microcomputer (SCM) system control, in (1), (2) polyhedral structure Trap skeleton in the spoke nitometer described in and the discharge circuit of its rear end part have constituted the Trap detector of a light trapping structure jointly; Selected several wavelength lasers in the visible light wave range scope, on each wavelength points, the incidenting laser radiation flux that utilizes low temperature absolute radiometer and HP34970A 6.5 bit digital voltage tables to measure respectively to enter light trapping structure Trap detector and the output voltage signal of Trap detector, set up light trapping structure Trap detector in input light radiant flux on each wavelength points and the one-to-one relationship between its output voltage, by interpolation and extrapolation, calculate the absolute spectral response rate of Trap detector in whole visible light wave range; Through the absolute calibration of above-mentioned low temperature absolute radiometer, the Trap detector just becomes an optical radiation power standard detector; (4), according to the definition of radiation power and radiance, radiation power is that radiation flux φ is meant that unit interval dt by certain locus radiation energy dQ, has: φ=dQ/dt; Radiance L is meant and leaves, arrives or pass the radiation flux d Φ on a certain surface unit solid angle d Ω, the projected area dScos θ of unit, has:
2. method according to claim 1 is characterized in that by freely changing the spike interference filter of different centre wavelengths, and benchmark is surveyed in the spoke brightness that can constitute different centre wavelengths.
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| CN103256976B (en) * | 2013-03-20 | 2015-03-11 | 中国科学院安徽光学精密机械研究所 | Low-temperature absolute radiometer absolute spectral responsivity calibration method and experimental apparatus |
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