CN113066944B - OLED display substrate, manufacturing method thereof and display device - Google Patents
OLED display substrate, manufacturing method thereof and display device Download PDFInfo
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- CN113066944B CN113066944B CN202110313371.5A CN202110313371A CN113066944B CN 113066944 B CN113066944 B CN 113066944B CN 202110313371 A CN202110313371 A CN 202110313371A CN 113066944 B CN113066944 B CN 113066944B
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/842—Containers
- H10K50/8428—Vertical spacers, e.g. arranged between the sealing arrangement and the OLED
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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Abstract
The invention provides an OLED display substrate, a manufacturing method thereof and a display device, and belongs to the technical field of display. An OLED display substrate comprising: the opening penetrates through the OLED display substrate; the OLED display substrate comprises a display area and an edge area surrounding the opening; the OLED display substrate further comprises: a substrate base plate; a plurality of light emitting devices on the substrate within the display area; the isolation column is of an annular structure surrounding the opening; an encapsulation layer covering the plurality of light emitting devices; the isolation column comprises a first isolation column, the first isolation column comprises a first side surface facing the opening and a second side surface far away from the opening, the first side surface is smooth, the second side surface is provided with an annular groove, and the annular groove is parallel to the substrate base plate. According to the technical scheme, the aperture halo and the Bubble can be improved on the premise that the isolation effect is not influenced.
Description
Technical Field
The invention relates to the technical field of display, in particular to an OLED display substrate, a manufacturing method thereof and a display device.
Background
An OLED (Organic Light-Emitting Diode) display device has been classified as a next generation display technology with great development prospect due to its advantages of being thin, light, wide in viewing angle, active in Light emission, continuously adjustable in Light color, low in cost, fast in response speed, low in energy consumption, low in driving voltage, wide in working temperature range, simple in production process, high in Light Emitting efficiency, capable of performing flexible display, and the like.
In order to improve the screen occupation ratio of the OLED display screen, openings can be formed in the OLED display screen, a camera and some sensors are arranged in the openings, however, the OLED device is very sensitive to water vapor and oxygen, and the OLED device is easily corroded by the water vapor and the oxygen through the openings, so that poor display is caused.
Disclosure of Invention
The invention aims to provide an OLED display substrate, a manufacturing method thereof and a display device, which can improve aperture halo and Bubble on the premise of not influencing the isolation effect.
To solve the above technical problem, embodiments of the present invention provide the following technical solutions:
in one aspect, an OLED display substrate is provided, including: an opening penetrating through the OLED display substrate; the OLED display substrate comprises a display area and an edge area surrounding the opening; the OLED display substrate further comprises:
a substrate base plate;
a plurality of light emitting devices positioned over the substrate within the display area; an organic light emitting functional layer in the light emitting device extends to the edge region;
the isolation column is positioned above the substrate base plate in the edge area; the isolation column is of an annular structure surrounding the opening; the organic light-emitting functional layers extending to the edge region are spaced at the position of the spacer;
an encapsulation layer covering the plurality of light emitting devices; the inorganic layer in the packaging layer extends to the edge area and covers the isolation column and the organic light-emitting function layer;
the isolation column comprises a first isolation column, the first isolation column comprises a first side surface facing the opening and a second side surface far away from the opening, the first side surface is flat, the second side surface is provided with an annular groove, and the annular groove is parallel to the substrate base plate.
In some embodiments, the OLED display substrate includes at least two circles of the first isolation pillars arranged at intervals.
In some embodiments, the isolation column further comprises:
the second isolation column comprises a third side surface facing the opening and a fourth side surface far away from the opening, and the third side surface and the fourth side surface are both provided with annular grooves parallel to the substrate base plate.
In some embodiments, the OLED display substrate includes at least two circles of the first isolation pillars and the second isolation pillars arranged at intervals, and the first isolation pillars and the second isolation pillars are alternately arranged.
In some embodiments, the OLED display substrate further comprises:
the retaining wall is positioned above the substrate base plate in the edge area;
the retaining wall is of an annular structure surrounding the open hole; the inorganic layer in the packaging layer covers the retaining wall.
In some embodiments, the OLED display substrate further comprises:
an anode covering the first side surface of the first isolation pillar.
In some embodiments, the first isolation pillar includes a first metal pattern and a second metal pattern stacked in sequence along a direction away from the substrate base plate, and an orthogonal projection of the first metal pattern on the substrate base plate falls within an orthogonal projection of the second metal pattern on the substrate base plate; or
The first isolation column comprises a first metal pattern, a second metal pattern and a third metal pattern which are sequentially stacked along the direction far away from the substrate base plate, the orthographic projection of the second metal pattern on the substrate base plate falls into the orthographic projection of the first metal pattern on the substrate base plate, and the orthographic projection of the second metal pattern on the substrate base plate falls into the orthographic projection of the third metal pattern on the substrate base plate.
In some embodiments, the organic light emitting functional layer is broken at the second lateral surface of the first separation column.
Embodiments of the present invention also provide a display device including the OLED display substrate as described above.
The embodiment of the invention also provides a manufacturing method of the OLED display substrate, and the OLED display substrate comprises the following steps: an opening extending through the OLED display substrate; the OLED display substrate comprises a display area and an edge area surrounding the opening; the manufacturing method of the OLED display substrate comprises the following steps:
providing a substrate base plate;
forming a plurality of light emitting devices on the substrate of the display region, organic light emitting functional layers of the light emitting devices extending to the edge region;
forming an isolation column on the substrate base plate in the edge area, wherein the isolation column is of an annular structure surrounding the opening; the organic light-emitting functional layers extending to the edge region are spaced at the position of the spacer;
forming an encapsulation layer covering the plurality of light emitting devices, wherein an inorganic layer in the encapsulation layer extends to the edge region and covers the isolation pillars and the organic light emitting function layer;
forming the isolation pillar includes:
and forming a first isolation column, wherein the first isolation column comprises a first side surface facing the opening and a second side surface far away from the opening, the first side surface is flat, the second side surface is provided with an annular groove, and the annular groove is parallel to the substrate base plate.
The embodiment of the invention has the following beneficial effects:
in the above scheme, the isolation column includes a first isolation column, the first isolation column includes a first side surface facing the opening of the display substrate and a second side surface far away from the opening, and the first side surface is flat, so that after the first isolation column is formed, when the pixel defining layer material is coated, since the first side surface of the first isolation column, which is far away from the gluing direction, is flat, no notch exists, the area near the first side surface can be completely covered by the pixel defining layer material, no Bubble is generated, thereby improving halo and Bubble phenomena, and ensuring the display quality of the display substrate; in addition, the second side surface of the first isolation column is provided with an annular groove, so that the isolation effect and the packaging performance of the display substrate can be guaranteed.
Drawings
FIGS. 1-3 are schematic diagrams illustrating the occurrence of bubbles in a substrate for OLED display according to the prior art;
FIGS. 4-9 are schematic views illustrating an OLED display substrate according to an embodiment of the present invention;
fig. 10 to fig. 11 are schematic layout views of the separation column according to the embodiment of the present invention.
Reference numerals
1. Air bubble
2. Pixel defining layer material
3. Anode material
31. Photoresist
4. Organic light-emitting functional layer
5. First isolation column
6. Second isolation column
Detailed Description
In order to make the technical problems, technical solutions and advantages to be solved by the embodiments of the present invention clearer, the following detailed description will be given with reference to the accompanying drawings and specific embodiments.
In order to ensure the display quality of the OLED display substrate, isolation columns can be arranged around the opening, as shown in FIG. 1, the existing isolation columns are made of source and drain metal layers and are of a Ti/Al/Ti structure, notches are formed in the side faces of the isolation columns, and organic light-emitting functional layers can be separated from the notches, so that transmission paths of water vapor and oxygen can be blocked, and inorganic layers in the packaging layers cover the isolation columns and the organic light-emitting functional layers, so that the water vapor and the oxygen are prevented from invading a display area through the organic light-emitting functional layers at the edge area of the opening, and the phenomenon of poor display is avoided.
After the formation of the separation column, it is necessary to fabricate the pixel defining layer, and when the pixel defining layer material 2 is coated, since the separation column is notched at both sides, as shown in fig. 1, bubbles 1 are generated to different degrees since one side thereof is away from the glue application direction (i.e., the direction in which the pixel defining layer material 2 is coated). In the subsequent Oven process, the bubbles 1 grow and move to the surface of the pixel defining layer material 2, forming halos or bubbles, which causes unevenness of the pixel defining layer material 2, as shown in fig. 2 and 3, the larger the number of the isolation pillars, the more severe the halos are, and the quality of the OLED display substrate is affected.
The embodiment of the invention provides an OLED display substrate, a manufacturing method thereof and a display device, which can improve aperture halo and Bubble on the premise of not influencing the isolation effect.
An embodiment of the present invention provides an OLED display substrate, including: an opening penetrating through the OLED display substrate; the OLED display substrate comprises a display area and an edge area surrounding the opening; the OLED display substrate further comprises:
a substrate base plate;
a plurality of light emitting devices positioned over the substrate within the display area; an organic light emitting functional layer in the light emitting device extends to the edge region;
the isolation column is positioned above the substrate base plate in the edge area; the isolation column is of an annular structure surrounding the opening; the organic light-emitting functional layers extending to the edge region are spaced at the position of the spacer;
an encapsulation layer covering the plurality of light emitting devices; the inorganic layer in the packaging layer extends to the edge area and covers the isolation column and the organic light-emitting function layer;
the isolation column comprises a first isolation column, the first isolation column comprises a first side surface facing the opening and a second side surface far away from the opening, the first side surface is flat, the second side surface is provided with an annular groove, and the annular groove is parallel to the substrate base plate.
In this embodiment, the isolation column includes a first isolation column, the first isolation column includes a first side surface facing the opening of the display substrate and a second side surface far away from the opening, and the first side surface is flat, so that after the first isolation column is formed, when the pixel defining layer material is coated, since the first side surface of the first isolation column, which is far away from the gluing direction, is flat and has no notch, a region near the first side surface is completely covered by the pixel defining layer material, no Bubble is generated, thereby improving halo and Bubble phenomena, and ensuring the display quality of the display substrate; in addition, the second side surface of the first isolation column is provided with an annular groove, so that the isolation effect and the packaging performance of the display substrate can be guaranteed.
In the embodiment of the disclosure, the camera, the sensor, the keys and the like can be arranged in the opening hole, so that the screen occupation ratio of the display screen can be increased, and the experience effect of a user is improved.
The display substrate in the embodiment of the present disclosure may be an organic electroluminescent display substrate, and specifically, the light emitting device may be an organic light emitting diode device, the organic light emitting functional layer may include an organic light emitting layer and an organic functional layer, the organic light emitting layer may be divided into light emitting layers of different colors, such as a red light emitting layer, a green light emitting layer, and a blue light emitting layer, and the organic functional layer may include film layers, such as an electron transport layer, an electron injection layer, a hole transport layer, and a hole injection layer.
The encapsulation layer may include at least two inorganic layers and at least one organic layer, wherein the inorganic layers may serve to block moisture and oxygen, and the organic layers may serve to planarize and stress release. In the display area, the packaging layer covers all the light-emitting devices to prevent the light-emitting devices from being corroded by water vapor and oxygen, and in the edge area, the inorganic layer in the packaging layer covers the isolation column and the organic light-emitting functional layer to prevent the water vapor and the oxygen from invading the display area through the organic light-emitting functional layer, so that all the light-emitting devices in the display area are further prevented from being corroded by the water vapor and the oxygen.
In some embodiments, the first isolation pillar includes a first metal pattern and a second metal pattern sequentially stacked along a direction away from the substrate base plate, an orthogonal projection of the first metal pattern on the substrate base plate falls into an orthogonal projection of the second metal pattern on the substrate base plate, and the first metal pattern is recessed from the second metal pattern on the second side surface, so that an annular groove can be formed on the second side surface of the first isolation pillar; or
The first isolation column comprises a first metal pattern, a second metal pattern and a third metal pattern which are sequentially stacked along the direction far away from the substrate base plate, the orthographic projection of the second metal pattern on the substrate base plate falls into the orthographic projection of the first metal pattern on the substrate base plate, the orthographic projection of the second metal pattern on the substrate base plate falls into the orthographic projection of the third metal pattern on the substrate base plate, and the second metal pattern is retracted relative to the first metal pattern and the third metal pattern on the second side surface, so that an annular groove can be formed on the second side surface of the first isolation column.
The second side surface of the first isolation column is provided with the annular groove, and the organic light-emitting functional layer is disconnected from the second side surface of the first isolation column, so that a transmission path of water vapor and oxygen can be blocked, and the inorganic layer in the packaging layer covers the first isolation column and the organic light-emitting functional layer, so that the water vapor and the oxygen are prevented from invading a display area through the organic light-emitting functional layer at the edge area of the opening, and the phenomenon of poor display is avoided.
In a specific example, the first isolation pillar may employ three layers of metal Ti/Al/Ti in a stacked arrangement. As shown in fig. 4, in the manufacturing process of the display substrate, after a three-layer metal Ti/Al/Ti structure is formed around the opening, an anode material 3 is formed, the anode material 3 may be a transparent conductive material such as ITO or IZO, and the anode material 3 covers the three-layer metal Ti/Al/Ti structure; as shown in fig. 5, a photoresist 31 covering the anode material 3 is formed; as shown in fig. 6, the photoresist 31 is exposed and developed to form a photoresist remaining region and a photoresist removing region; as shown in fig. 7, the photoresist is used as a mask to etch the anode material 3 by using the anode material etching solution, so as to form a pattern of the anode material 3, meanwhile, the anode material etching solution etches Al in the three-layer metal Ti/Al/Ti structure, so that Al on the side not covered by the photoresist retracts, the structure shown in fig. 7 is formed after the photoresist is stripped, and the remaining three-layer metal Ti/Al/Ti structure in fig. 7 forms a first isolation pillar, so that, on one side, al retracts relative to the upper and lower layers of Ti, and on the side, the first isolation pillar forms an annular groove parallel to the substrate; on the other side, al is flush with the upper and lower Ti layers. As shown in fig. 8, when the pixel defining layer material 2 is applied, since the side facing away from the gluing direction (i.e., the direction in which the pixel defining layer material 2 is applied) is not provided with a groove, air bubbles do not occur at the side, thereby improving the halo and bubbles.
And then forming an organic light-emitting functional layer 4, wherein an annular groove is formed on the second side surface of the first isolation column, as shown in fig. 9, the organic light-emitting functional layer 4 is disconnected on the second side surface of the first isolation column, so that the transmission path of water vapor and oxygen can be blocked. And an inorganic layer in the formed packaging layer covers the first isolation column and the organic light-emitting function layer, so that water vapor and oxygen are prevented from invading a display area through the organic light-emitting function layer at the edge area of the opening, and the phenomenon of poor display is avoided.
In this example, the first isolation pillar is described by taking an example of using three layers of metal Ti/Al/Ti stacked in a stacked manner, but the first isolation pillar is not limited to using three layers of metal Ti/Al/Ti stacked in a stacked manner, and may also be configured in other manners, for example, using two layers of metal Ti/Al stacked in a stacked manner, as long as the lowermost layer of Ti is omitted compared with the configuration in fig. 9. The first isolation column is not limited to adopting two metals of Ti and Al, and other metals can be adopted, so long as a layer of metal close to the substrate base plate can be etched by the anodic etching liquid, and a layer of metal farthest from the substrate base plate is not etched by the anodic etching liquid.
In some embodiments, in order to ensure the isolation effect, as shown in fig. 10, the OLED display substrate includes at least two circles of the first isolation pillars 5 arranged at intervals, and the outer first isolation pillar surrounds the inner first isolation pillar.
In some embodiments, the isolation column further comprises:
the second isolation column comprises a third side surface facing the opening and a fourth side surface far away from the opening, and the third side surface and the fourth side surface are both provided with annular grooves parallel to the substrate base plate.
Annular grooves are formed in the surfaces of the two sides of the second isolation column, so that the organic light-emitting function layer is disconnected from the surfaces of the third side and the fourth side of the second isolation column, the transmission path of water vapor and oxygen can be blocked, the water blocking and oxygen blocking performance of the display substrate is further improved, and the phenomenon of poor display is avoided.
In some embodiments, as shown in fig. 10, the OLED display substrate includes at least two circles of the first isolation pillars 5 and the second isolation pillars 6 arranged at intervals, and the first isolation pillars 5 and the second isolation pillars 6 are alternately arranged, so that the encapsulation performance of the OLED display substrate can be ensured.
Of course, the arrangement of the first isolation pillars 5 and the second isolation pillars 6 is not limited to that shown in fig. 10, and a plurality of first isolation pillars 5 may be arranged first, and then a plurality of second isolation pillars 6 may be arranged; alternatively, the plurality of second isolation columns 6 are arranged first, and then the plurality of first isolation columns 5 are arranged.
In some embodiments, the OLED display substrate further comprises:
a retaining wall positioned on the substrate in the edge region;
the retaining wall is of an annular structure surrounding the open hole; the inorganic layer in the packaging layer covers the retaining wall.
The retaining wall is of an annular structure surrounding the opening; the inorganic layer in the packaging layer covers the retaining wall. In the embodiment of the disclosure, the surface area of the inorganic layer can be increased by arranging the retaining wall in the edge region, so that the transmission path of water vapor and oxygen is prolonged and increased, and the water vapor and the oxygen are not easy to intrude into the display region through the opening.
In some embodiments, the OLED display substrate further comprises:
an anode covering the first side surface of the first isolation pillar. Because the first side surface is covered with the anode, the first side surface is protected by the anode in the process of forming the first isolation column, and no groove is formed.
Based on the same inventive concept, embodiments of the present invention also provide a display device including the OLED display substrate as described above.
The display device includes but is not limited to: radio frequency unit, network module, audio output unit, input unit, sensor, display unit, user input unit, interface unit, memory, processor, and power supply. It will be appreciated by those skilled in the art that the above described configuration of the display device does not constitute a limitation of the display device, and that the display device may comprise more or less of the components described above, or some components may be combined, or a different arrangement of components. In the embodiment of the present invention, the display device includes, but is not limited to, a display, a mobile phone, a tablet computer, a television, a wearable electronic device, a navigation display device, and the like.
The display device may be: the display device comprises a television, a display, a digital photo frame, a mobile phone, a tablet personal computer and any other product or component with a display function, wherein the display device further comprises a flexible circuit board, a printed circuit board and a back plate.
Based on the same inventive concept, the embodiment of the invention also provides a manufacturing method of the OLED display substrate, wherein the OLED display substrate comprises: an opening penetrating through the OLED display substrate; the OLED display substrate comprises a display area and an edge area surrounding the opening; the manufacturing method of the OLED display substrate comprises the following steps:
providing a substrate base plate;
forming a plurality of light emitting devices on the substrate of the display region, organic light emitting functional layers of the light emitting devices extending to the edge region;
forming an isolation column on the substrate base plate in the edge area, wherein the isolation column is of an annular structure surrounding the opening; the organic light-emitting functional layers extending to the edge region are spaced at the position of the spacer;
forming an encapsulation layer covering the plurality of light emitting devices, wherein an inorganic layer in the encapsulation layer extends to the edge region and covers the isolation pillars and the organic light emitting function layer;
forming the isolation pillar includes:
forming a first isolation column, wherein the first isolation column comprises a first side surface facing the opening and a second side surface far away from the opening, the first side surface is flat, the second side surface is provided with an annular groove, and the annular groove is parallel to the substrate base plate.
In this embodiment, the isolation column includes a first isolation column, the first isolation column includes a first side surface facing the opening of the display substrate and a second side surface far away from the opening, and the first side surface is flat, so that after the first isolation column is formed, when the pixel defining layer material is coated, since the first side surface of the first isolation column, which is far away from the gluing direction, is flat and has no notch, a region near the first side surface is completely covered by the pixel defining layer material, no Bubble is generated, thereby improving halo and Bubble phenomena, and ensuring the display quality of the display substrate; in addition, the second side surface of the first isolation column is provided with an annular groove, so that the isolation effect and the packaging performance of the display substrate can be guaranteed.
In the embodiment of the disclosure, the camera, the sensor, the keys and the like can be arranged in the opening hole, so that the screen occupation ratio of the display screen can be increased, and the experience effect of a user is improved.
The display substrate in the embodiment of the present disclosure may be an organic electroluminescent display substrate, and specifically, the light emitting device may be an organic light emitting diode device, the organic light emitting functional layer may include an organic light emitting layer and an organic functional layer, the organic light emitting layer may be divided into light emitting layers of different colors, such as a red light emitting layer, a green light emitting layer, and a blue light emitting layer, and the organic functional layer may include film layers, such as an electron transport layer, an electron injection layer, a hole transport layer, and a hole injection layer.
The encapsulation layer may include at least two inorganic layers and at least one organic layer, wherein the inorganic layers may serve to block moisture and oxygen, and the organic layers may serve to planarize and stress release. In the display area, the packaging layer covers all the light-emitting devices to prevent the light-emitting devices from being corroded by water vapor and oxygen, and in the edge area, the inorganic layer in the packaging layer covers the isolation column and the organic light-emitting functional layer to prevent the water vapor and the oxygen from invading the display area through the organic light-emitting functional layer, so that all the light-emitting devices in the display area are further prevented from being corroded by the water vapor and the oxygen.
In some embodiments, the first isolation pillar includes a first metal pattern and a second metal pattern sequentially stacked along a direction away from the substrate base plate, an orthogonal projection of the first metal pattern on the substrate base plate falls into an orthogonal projection of the second metal pattern on the substrate base plate, and the first metal pattern is recessed from the second metal pattern on the second side surface, so that an annular groove can be formed on the second side surface of the first isolation pillar; or
The first isolation column comprises a first metal pattern, a second metal pattern and a third metal pattern which are sequentially stacked along the direction far away from the substrate base plate, the orthographic projection of the second metal pattern on the substrate base plate falls into the orthographic projection of the first metal pattern on the substrate base plate, the orthographic projection of the second metal pattern on the substrate base plate falls into the orthographic projection of the third metal pattern on the substrate base plate, and the second metal pattern is retracted relative to the first metal pattern and the third metal pattern on the second side surface, so that an annular groove can be formed on the second side surface of the first isolation column.
The second side surface of the first isolation column is provided with the annular groove, and the organic light-emitting functional layer is disconnected from the second side surface of the first isolation column, so that a transmission path of water vapor and oxygen can be blocked, and the inorganic layer in the packaging layer covers the first isolation column and the organic light-emitting functional layer, so that the water vapor and the oxygen are prevented from invading a display area through the organic light-emitting functional layer at the edge area of the opening, and the phenomenon of poor display is avoided.
In a specific example, the first isolation pillar may employ three layers of metal Ti/Al/Ti in a stacked arrangement. As shown in fig. 4, in the manufacturing process of the display substrate, after a three-layer metal Ti/Al/Ti structure is formed around the opening, an anode material 3 is formed, the anode material 3 may be a transparent conductive material such as ITO or IZO, and the anode material 3 covers the three-layer metal Ti/Al/Ti structure; as shown in fig. 5, a photoresist 31 covering the anode material 3 is formed; as shown in fig. 6, the photoresist 31 is exposed and developed to form a photoresist remaining region and a photoresist removing region; as shown in fig. 7, the photoresist is used as a mask to etch the anode material 3 by using the anode material etching solution, so as to form a pattern of the anode material 3, meanwhile, the anode material etching solution etches Al in the three-layer metal Ti/Al/Ti structure, so that Al on the side not covered by the photoresist retracts, the structure shown in fig. 7 is formed after the photoresist is stripped, and the remaining three-layer metal Ti/Al/Ti structure in fig. 7 forms a first isolation pillar, so that, on one side, al retracts relative to the upper and lower layers of Ti, and on the side, the first isolation pillar forms an annular groove parallel to the substrate; on the other side, al is flush with the upper and lower Ti layers. As shown in fig. 8, when the pixel defining layer material 2 is applied, since the side facing away from the gluing direction (i.e., the direction in which the pixel defining layer material 2 is applied) is not provided with a groove, air bubbles do not occur at the side, thereby improving the halo and bubbles.
And then forming an organic light-emitting functional layer 4, wherein an annular groove is formed on the second side surface of the first isolation column, as shown in fig. 9, the organic light-emitting functional layer 4 is disconnected on the second side surface of the first isolation column, so that the transmission path of water vapor and oxygen can be blocked. And an inorganic layer in the formed packaging layer covers the first isolation column and the organic light-emitting function layer, so that water vapor and oxygen are prevented from invading a display area through the organic light-emitting function layer at the edge area of the opening, and the phenomenon of poor display is avoided.
In this example, the first isolation pillar is described by taking an example of using three layers of metal Ti/Al/Ti stacked in a stacked manner, but the first isolation pillar is not limited to using three layers of metal Ti/Al/Ti stacked in a stacked manner, and may also be configured in other manners, for example, using two layers of metal Ti/Al stacked in a stacked manner, as long as the lowermost layer of Ti is omitted compared with the configuration in fig. 9. The first isolation column is not limited to adopting two metals of Ti and Al, and other metals can be adopted, so long as a layer of metal close to the substrate base plate can be etched by the anodic etching liquid, and a layer of metal farthest from the substrate base plate is not etched by the anodic etching liquid.
In some embodiments, in order to ensure the isolation effect, as shown in fig. 10, the OLED display substrate includes at least two circles of the first isolation pillars 5 arranged at intervals, and the outer first isolation pillar surrounds the inner first isolation pillar.
In some embodiments, forming the isolation pillar further comprises:
and forming a second isolation column, wherein the second isolation column comprises a third side surface facing the opening and a fourth side surface far away from the opening, and the third side surface and the fourth side surface are both provided with annular grooves parallel to the substrate base plate.
Annular grooves are formed in the surfaces of the two sides of the second isolation column, so that the organic light-emitting function layer is disconnected from the surfaces of the third side and the fourth side of the second isolation column, the transmission path of water vapor and oxygen can be blocked, the water blocking and oxygen blocking performance of the display substrate is further improved, and the phenomenon of poor display is avoided.
In some embodiments, as shown in fig. 10, the OLED display substrate includes at least two circles of the first isolation pillars 5 and the second isolation pillars 6 arranged at intervals, and the first isolation pillars 5 and the second isolation pillars 6 are alternately arranged, so that the encapsulation performance of the OLED display substrate can be ensured.
Of course, the arrangement of the first isolation pillars 5 and the second isolation pillars 6 is not limited to that shown in fig. 10, and a plurality of first isolation pillars 5 may be arranged first, and then a plurality of second isolation pillars 6 may be arranged; alternatively, the plurality of second isolation columns 6 are arranged first, and then the plurality of first isolation columns 5 are arranged.
In some embodiments, the method for manufacturing the OLED display substrate further includes:
forming a retaining wall positioned above the substrate base plate in the edge area;
the retaining wall is of an annular structure surrounding the open hole; the inorganic layer in the packaging layer covers the retaining wall.
The retaining wall is of an annular structure surrounding the opening; the inorganic layer in the packaging layer covers the retaining wall. In the embodiment of the disclosure, the surface area of the inorganic layer can be increased by arranging the retaining wall in the edge region, so that the transmission path of water vapor and oxygen is prolonged and increased, and the water vapor and the oxygen are not easy to intrude into the display region through the opening.
In some embodiments, the method for manufacturing the OLED display substrate further includes:
forming an anode covering the first side surface of the first isolation pillar. Because the first side surface is covered with the anode, the first side surface can be protected by the anode in the process of forming the first isolation column, and a groove can not appear.
It should be noted that, in this specification, each embodiment is described in a progressive manner, and the same and similar parts between the embodiments are referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the embodiments, since they are substantially similar to the product embodiments, the description is simple, and the relevant points can be referred to the partial description of the product embodiments.
Unless otherwise defined, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this disclosure belongs. The use of "first," "second," and the like in this disclosure is not intended to indicate any order, quantity, or importance, but rather is used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that the element or item preceding the word comprises the element or item listed after the word and its equivalent, but does not exclude other elements or items. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.
It will be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "under" another element, it can be "directly on" or "under" the other element or intervening elements may be present.
In the foregoing description of embodiments, the particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.
The above description is only for the specific embodiments of the present disclosure, but the scope of the present disclosure is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present disclosure, and all the changes or substitutions should be covered within the scope of the present disclosure. Therefore, the protection scope of the present disclosure shall be subject to the protection scope of the claims.
Claims (9)
1. An OLED display substrate, comprising: an opening penetrating through the OLED display substrate; the OLED display substrate comprises a display area and an edge area surrounding the opening; the OLED display substrate further comprises:
a substrate base plate;
a plurality of light emitting devices positioned over the substrate within the display area; an organic light emitting functional layer in the light emitting device extends to the edge region;
the isolation column is positioned above the substrate base plate in the edge area; the isolation column is of an annular structure surrounding the opening; the organic light-emitting functional layers extending to the edge region are spaced at the position of the spacer;
an encapsulation layer covering the plurality of light emitting devices; the inorganic layer in the packaging layer extends to the edge area and covers the isolation column and the organic light-emitting function layer;
it is characterized in that the preparation method is characterized in that,
the isolation column comprises a first isolation column, the first isolation column comprises a first side surface facing the opening and a second side surface far away from the opening, the first side surface is flat, the second side surface is provided with an annular groove, and the annular groove is parallel to the substrate base plate;
the OLED display substrate further includes: an anode covering the first side surface of the first separator.
2. The OLED display substrate of claim 1, wherein the OLED display substrate comprises at least two circles of the first isolation pillars spaced apart.
3. The OLED display substrate of claim 1, wherein the spacers further comprise:
the second isolation column comprises a third side surface facing the opening and a fourth side surface far away from the opening, and the third side surface and the fourth side surface are both provided with annular grooves parallel to the substrate base plate.
4. The OLED display substrate of claim 3, wherein the OLED display substrate comprises at least two circles of the first isolation pillars and the second isolation pillars arranged at intervals, and the first isolation pillars and the second isolation pillars are arranged alternately.
5. The OLED display substrate of any one of claims 1-4, further comprising:
the retaining wall is positioned above the substrate base plate in the edge area;
the retaining wall is of an annular structure surrounding the open hole; the inorganic layer in the packaging layer covers the retaining wall.
6. The OLED display substrate according to any one of claims 1 to 4, wherein the first isolation pillar comprises a first metal pattern and a second metal pattern which are sequentially stacked in a direction away from the substrate, and an orthographic projection of the first metal pattern on the substrate falls within an orthographic projection of the second metal pattern on the substrate; or
The first isolation column comprises a first metal pattern, a second metal pattern and a third metal pattern which are sequentially stacked along the direction far away from the substrate base plate, the orthographic projection of the second metal pattern on the substrate base plate falls into the orthographic projection of the first metal pattern on the substrate base plate, and the orthographic projection of the second metal pattern on the substrate base plate falls into the orthographic projection of the third metal pattern on the substrate base plate.
7. The OLED display substrate according to any one of claims 1 to 4, wherein the organic light emitting functional layer is broken at the second side surface of the first barrier rib.
8. A display device comprising the OLED display substrate of any one of claims 1-7.
9. A method for manufacturing an OLED display substrate comprises the following steps: an opening penetrating through the OLED display substrate; the OLED display substrate comprises a display area and an edge area surrounding the opening; the manufacturing method of the OLED display substrate comprises the following steps:
providing a substrate base plate;
forming a plurality of light emitting devices on the substrate of the display region, organic light emitting functional layers of the light emitting devices extending to the edge region;
forming an isolation column on the substrate base plate in the edge area, wherein the isolation column is of an annular structure surrounding the opening; the organic light-emitting functional layers extending to the edge region are spaced at the position of the spacer;
forming an encapsulation layer covering the plurality of light emitting devices, wherein an inorganic layer in the encapsulation layer extends to the edge region and covers the isolation pillars and the organic light emitting function layer;
wherein forming the isolation pillar comprises:
forming a first isolation column, wherein the first isolation column comprises a first side surface facing the opening and a second side surface far away from the opening, the first side surface is flat, the second side surface is provided with an annular groove, and the annular groove is parallel to the substrate base plate;
the manufacturing method further comprises the following steps:
forming an anode covering the first side surface of the first isolation pillar.
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