CN112269488B - Touch substrate, preparation method thereof and display device - Google Patents

Touch substrate, preparation method thereof and display device Download PDF

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Publication number
CN112269488B
CN112269488B CN202011137803.3A CN202011137803A CN112269488B CN 112269488 B CN112269488 B CN 112269488B CN 202011137803 A CN202011137803 A CN 202011137803A CN 112269488 B CN112269488 B CN 112269488B
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China
Prior art keywords
layer
touch
opening
substrate
isolation
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CN202011137803.3A
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CN112269488A (en
Inventor
杨国平
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BOE Technology Group Co Ltd
Mianyang BOE Optoelectronics Technology Co Ltd
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BOE Technology Group Co Ltd
Mianyang BOE Optoelectronics Technology Co Ltd
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Priority to CN202011137803.3A priority Critical patent/CN112269488B/en
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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0412Digitisers structurally integrated in a display
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/40OLEDs integrated with touch screens
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices

Abstract

The embodiment of the invention provides a touch substrate, a preparation method thereof and a display device. The touch substrate comprises a display area and a peripheral area surrounding the periphery of the display area, wherein the peripheral area comprises a substrate, a limiting layer formed on the substrate, an isolation groove formed in the limiting layer, a touch lead formed on the isolation groove, and a flat layer formed in the isolation groove, and the touch lead is formed on the flat layer.

Description

Touch substrate, preparation method thereof and display device
Technical Field
The invention relates to the technical field of display, in particular to a touch substrate, a preparation method thereof and a display device.
Background
The organic light emitting diode (Organic Light Emitting Diode, OLED) is an active light emitting display device, and has the advantages of self-luminescence, wide viewing angle, high contrast, low power consumption, high reaction speed and the like. With the continuous development of display technology, OLED technology is increasingly applied to various display devices, especially smart terminal products such as mobile phones and tablet computers.
The OLED touch substrate comprises a display area and a peripheral area surrounding the periphery of the display area, wherein the display area comprises a touch electrode, and the peripheral area comprises a touch wiring connected with the touch electrode. In the production of the OLED touch substrate, the photoresist cannot be exposed due to insufficient exposure, and short circuit occurs, so that the normal use of the touch function of a product is affected, and the yield of the product is reduced.
Disclosure of Invention
The embodiment of the invention aims to solve the technical problem of providing a touch substrate, a preparation method thereof and a display device, so as to improve the short circuit phenomenon of touch wiring and improve the product yield.
In order to solve the above technical problems, an embodiment of the present invention provides a touch substrate, including a display area and a peripheral area surrounding the periphery of the display area, where the peripheral area includes a substrate, a limiting layer formed on the substrate, an isolation groove formed in the limiting layer, and a touch lead formed on the isolation groove, and the peripheral area further includes a flat layer formed in the isolation groove, and the touch lead is formed on the flat layer.
In an exemplary embodiment, the peripheral region further includes an isolation layer formed between the planarization layer and the defining layer, the isolation layer isolating the planarization layer from the defining layer.
In an exemplary embodiment, a surface of the planar layer on a side remote from the substrate is not higher than a surface of the limiting layer on a side remote from the substrate.
In an exemplary embodiment, the peripheral region further includes an encapsulation layer formed over the planarization layer, the encapsulation layer over which the touch leads are formed.
In an exemplary embodiment, the encapsulation layer includes a first inorganic encapsulation layer formed over the planarization layer, an organic encapsulation layer formed over the first inorganic encapsulation layer, and a second inorganic encapsulation layer formed over the organic encapsulation layer.
In an exemplary embodiment, the isolation groove is disposed around the periphery of the display area.
In an exemplary embodiment, the limiting layer includes a first organic layer formed on the substrate, a first opening is formed in the first organic layer, a second opening communicating with the first opening is formed in the second organic layer, an opening area of the second opening is larger than an opening area of the first opening, and the first opening and the second opening form the isolation groove in a stepped shape.
In an exemplary embodiment, the peripheral region further includes a protective layer formed over the touch lead.
The embodiment of the invention also provides a display device which comprises any one of the touch substrates.
The embodiment of the invention also provides a preparation method of the touch substrate, wherein the touch substrate comprises a display area and a peripheral area surrounding the periphery of the display area, and the preparation method of the touch substrate comprises the following steps:
forming a defining layer disposed on a substrate at the peripheral region;
forming an isolation groove in the limiting layer;
forming a flat layer over the isolation trench;
and forming a touch lead above the flat layer.
The invention provides a touch substrate, a preparation method thereof and a display device, wherein a flat layer is formed in an isolation groove to reduce the break difference generated by the isolation groove, so that the formation of touch wiring on the isolation groove is effectively ensured, and the defect that photoresist cannot be exposed due to insufficient exposure caused by the break difference and short circuit occurs between the touch wiring is avoided.
Of course, it is not necessary for any one product or method of practicing the invention to achieve all of the advantages set forth above at the same time. Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of embodiments of the invention may be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
Drawings
The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate and do not limit the invention. The shapes and sizes of the various components in the drawings are not to scale, and are intended to illustrate the present invention only.
FIG. 1 is a schematic diagram of a peripheral region of a touch substrate;
FIG. 2 is a cross-sectional view taken along the direction A-A in FIG. 1;
FIG. 3 is a schematic structural diagram of a touch substrate according to an embodiment of the present invention;
FIG. 4 is an enlarged view of FIG. 3 at a;
fig. 5 is a sectional view in the direction B-B of fig. 4.
Detailed Description
The following describes in further detail the embodiments of the present invention with reference to the drawings and examples. The following examples are illustrative of the invention and are not intended to limit the scope of the invention. It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be arbitrarily combined with each other.
FIG. 1 is a schematic diagram of a peripheral region of a touch substrate; fig. 2 is a cross-sectional view taken along the direction A-A in fig. 1. As shown in fig. 1 and 2, the touch substrate includes a display area 100 and a peripheral area 200 surrounding the periphery of the display area 100, wherein the display area 100 includes a display device 1 disposed on a substrate 10, an encapsulation layer 2 formed on the display device 1, and a touch electrode 5 formed on the encapsulation layer 2. The peripheral region 200 includes an isolation trench 3 disposed on the substrate 10, a packaging layer 2 formed over the isolation trench 3, and a touch trace 6 formed over the packaging layer 2. The isolation groove 3 is disposed around the display area 100 to isolate moisture intrusion so as to protect the display area 100. In the production of the touch substrate, because the position of the isolation groove 3 is greatly broken, when the touch wiring 6 is formed on the isolation groove 3, the photoresist can not be exposed due to insufficient exposure, so that the touch wiring 6 is short-circuited, the normal use of the touch function of a product is affected, and the yield of the product is reduced.
The embodiment of the invention provides a touch substrate, which comprises a display area and a peripheral area surrounding the periphery of the display area, wherein the peripheral area comprises a substrate, a limiting layer formed on the substrate, an isolation groove formed in the limiting layer and a touch lead formed on the isolation groove, the peripheral area further comprises a flat layer formed in the isolation groove, and the touch lead is formed on the flat layer.
According to the touch substrate provided by the embodiment of the invention, the flat layer is formed in the isolation groove, so that the break difference generated by the isolation groove is reduced, the formation of the touch wiring on the isolation groove is effectively ensured, and the defect that the photoresist cannot be exposed due to insufficient exposure caused by the break difference and the short circuit between the touch wirings occurs is avoided.
FIG. 3 is a schematic structural diagram of a touch substrate according to an embodiment of the present invention; FIG. 4 is an enlarged view of FIG. 3 at a; fig. 5 is a sectional view in the direction B-B of fig. 4. As shown in fig. 3, 4 and 5, the display area 100 includes a plurality of light emitting units distributed in an array and touch electrodes 5 surrounding the light emitting units on a plane parallel to the touch substrate. Each light-emitting unit is used as a sub-pixel, and 3 light-emitting units emitting light with different colors (such as red, green and blue) or 4 light-emitting units emitting light with different colors (such as red, green, blue and white) form a pixel unit.
On a plane perpendicular to the touch substrate, the display area includes a display device 1 disposed on a base 10, an encapsulation layer 2 formed over the display device 1, and a touch electrode 5 formed over the encapsulation layer 2. The display device 1 includes a driving structure layer disposed on the substrate 10, and a light emitting structure layer disposed on the driving structure layer, the driving structure layer mainly including a plurality of thin film transistors (Thin Film Transistor, TFTs), the light emitting structure layer mainly including an anode, an organic light emitting layer, and a cathode. The specific type of the touch electrode 5 is not limited, and may be a self-capacitance type touch electrode or a mutual-capacitance type touch electrode.
On a plane parallel to the touch substrate, the peripheral area 200 includes a plurality of touch traces 6 disposed on the base 10. The touch trace 6 is connected to the touch electrode 5 on the display area 100, so that a touch signal can be transmitted.
On a plane perpendicular to the touch substrate, the peripheral region 200 includes a base 10, a defining layer 4 disposed on the base 10, isolation trenches 3 formed in the defining layer 4, a planarization layer 8 formed in the isolation trenches 3, and a touch trace 6 formed over the planarization layer 8. The isolation groove 3 is disposed around the display area 100 to isolate moisture intrusion so as to protect the display area 100. The material of the planarization layer 8 may be an organic material. The flat layer 8 may have a single-layer or multi-layer structure, and the thickness of the flat layer 8 is equal to or less than the sum of the thicknesses of the limiting layers 4, and the flat layer 8 may be prepared by a single process or may be prepared in the same layer as the organic layers of the other display device 1. The substrate 10 may have a single-layer and multi-layer structure, and the multi-layer structure may be composed of a composite of an organic film layer and an inorganic film layer.
The preparation method of the touch wiring 6 in the embodiment of the invention comprises the following steps: depositing a metal film on the flat layer 8, and then coating a photoresist on the metal film; then exposing by ultraviolet light through a mask plate; after development, only retaining a photoresist pattern at the position of the touch trace 6; then removing the metal film in the area outside the photoresist pattern through an etching process; and finally, stripping the residual photoresist to form the pattern of the touch trace 6.
In the preparation process of the touch trace 6, the flat layer 8 is formed in the isolation groove 3 to reduce the break difference generated by the isolation groove 3, so that the formation of the touch trace 6 above the isolation groove 3 is effectively ensured, and the defect that the photoresist cannot be exposed due to insufficient exposure of the touch trace 6 at the isolation groove 3 and short circuit between the touch traces 6 occurs is avoided.
In the exemplary embodiment, peripheral region 200 also includes an isolation layer 12 formed between planar layer 8 and confinement layer 4, and isolation layer 12 isolates planar layer 8 from confinement layer 4, rendering planar layer 8 incapable of forming a pathway for moisture intrusion, ensuring isolation from moisture intrusion. The isolation layer 12 and the planarization layer 8 are located at the isolation trench 3, and the isolation layer 12 covers the entire isolation trench 3 and the partial confinement layers 4 located at both sides of the isolation trench 3. The planar layer 8 is arranged on top of the spacer layer 12 and is not connected to the confining layer 4 by the spacer layer 12. Among them, the material of the isolation layer 12 may be an inorganic material. The isolation layer 12 may have a single-layer or multi-layer structure, and the isolation layer 12 may be manufactured by a separate process or may be manufactured in the same layer as the insulating inorganic layer of the other display device 1.
In the exemplary embodiment, the thickness of the planarization layer 8 is not less than the limiting layer 4, so that the surface of the planarization layer 8 on the side away from the substrate 10 is not higher than the surface of the limiting layer 4 on the side away from the substrate 10, and further, the planarization layer 8 can effectively reduce the offset generated by the isolation trench 3.
In an exemplary embodiment, the confinement layer 4 includes a first organic layer 11 formed over the substrate 10, a first opening is opened in the first organic layer 11, and a second opening communicating with the first opening is opened in the second organic layer 13, which is formed over the first organic layer 11. The second opening has an opening area larger than that of the first opening, and the first opening and the second opening form a stepped isolation groove 3. The thickness of the flat layer 8 is greater than the thickness of the first organic layer 11 and less than or equal to the sum of the thickness of the first organic layer 11 and the thickness of the second organic layer 13, so that the offset generated by the isolation groove 3 can be effectively reduced.
In an exemplary embodiment, the display device 1 further includes an inorganic insulating layer 18, the inorganic insulating layer 18 being located between the first organic layer 11 and the second organic layer 13, and being generated by chemical vapor deposition. The isolation layer 12 and the inorganic insulating layer 18 can be made of the same mask plate, the isolation layer 12 is made while the inorganic insulating layer 18 is made, and the production cost is saved without adding an extra mask plate.
In an exemplary embodiment, the planarization layer 8 and the second organic layer 13 may be the same mask, and the planarization layer 8 is prepared while the second organic layer 13 is prepared, so as to further save production cost.
In an exemplary embodiment, the peripheral region 200 further includes an encapsulation layer 2 formed over the planarization layer 8, and the touch leads 6 are formed over the encapsulation layer 2. The encapsulation layer 2 covers the entire isolation trench 3 in the display region 100 and the peripheral region 200. The packaging layer 2 and the isolation groove 3 are used for packaging and protecting the display device 1, so that the driving structure layer and the light-emitting structure layer are effectively isolated from water vapor, oxygen and the like in the environment. The encapsulation layer 2 may be a single-layer or multi-layer structure, and is typically a multi-layer structure in which two inorganic film layers are wrapped with one organic layer. Specifically, the encapsulation layer 2 includes a first inorganic encapsulation layer 14 formed on the planarization layer 8, an organic encapsulation layer 15 formed on the first inorganic encapsulation layer 14, and a second inorganic encapsulation layer 16 formed on the organic encapsulation layer 15, the first inorganic encapsulation layer 14 and the second inorganic encapsulation layer 16 are generated by chemical vapor deposition, and the organic encapsulation layer 15 is prepared by an inkjet printing process.
In an exemplary embodiment, the peripheral region 200 further includes a protective layer 17 formed over the touch lead 6. The protective layer 17 covers the touch electrode 5 on the display area 100 and the touch trace 6 on the peripheral area 200, and isolates the external environment, thereby playing a protective role.
In the embodiment of the invention, the touch electrode 5, the touch trace 6 and the protective layer 17 thereon are positioned on the packaging layer 2 to jointly form a touch unit so as to realize a touch function. The touch electrode 5 can be a self-capacitance type touch electrode and a mutual capacitance type touch electrode, and is composed of conductive metal grids. The touch control wiring 6 is formed by parallel arrangement of metal wires along the packaging isolation groove 3, and is connected with the touch control electrode 5 to realize signal transmission.
The embodiment of the invention also provides a display device, which comprises the touch substrate of the embodiment. The display device may be: any product or component with display function such as a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, a navigator and the like.
The embodiment of the invention also provides a preparation method of the touch substrate, wherein the touch substrate comprises a display area and a peripheral area surrounding the periphery of the display area, and the preparation method of the touch substrate comprises the following steps:
forming a defining layer disposed on a substrate at the peripheral region;
forming an isolation groove in the limiting layer;
forming a flat layer over the isolation trench;
and forming a touch lead above the flat layer.
In the description of the embodiments of the present invention, it should be understood that the terms "middle," "upper," "lower," "front," "rear," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, merely to facilitate description of the present invention and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.
In describing embodiments of the present invention, it should be noted that, unless explicitly stated and limited otherwise, the terms "mounted," "connected," and "connected" should be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
Although the embodiments of the present invention are described above, the embodiments are only used for facilitating understanding of the present invention, and are not intended to limit the present invention. Any person skilled in the art can make any modification and variation in form and detail without departing from the spirit and scope of the present disclosure, but the scope of the present disclosure is to be determined by the appended claims.

Claims (9)

1. The touch substrate is characterized by comprising a display area and a peripheral area surrounding the periphery of the display area, wherein the peripheral area comprises a substrate, a limiting layer formed on the substrate, isolation grooves formed in the limiting layer and touch leads formed on the isolation grooves, the peripheral area further comprises a flat layer formed in the isolation grooves, and the touch leads are formed on the flat layer; the limiting layer comprises a first organic layer formed on the substrate and a second organic layer formed on the first organic layer, wherein a first opening is formed in the first organic layer, a second opening communicated with the first opening is formed in the second organic layer, the opening area of the second opening is larger than that of the first opening, and the first opening and the second opening form the isolation groove in a step shape.
2. The touch substrate of claim 1, wherein the peripheral region further comprises an isolation layer formed between the planar layer and the defined layer, the isolation layer isolating the planar layer from the defined layer.
3. The touch substrate according to claim 1, wherein a surface of the flat layer on a side away from the base is not higher than a surface of the defining layer on a side away from the base.
4. The touch substrate of claim 1, wherein the peripheral region further comprises an encapsulation layer formed over the planar layer, the encapsulation layer over which the touch leads are formed.
5. The touch substrate of claim 4, wherein the encapsulation layer comprises a first inorganic encapsulation layer formed over the planar layer, an organic encapsulation layer formed over the first inorganic encapsulation layer, and a second inorganic encapsulation layer formed over the organic encapsulation layer.
6. The touch substrate of claim 1, wherein the isolation trenches are disposed around the periphery of the display area.
7. The touch substrate of claim 1, wherein the peripheral region further comprises a protective layer formed over the touch leads.
8. A display device comprising the touch substrate according to any one of claims 1 to 7.
9. The method for manufacturing a touch substrate according to any one of claims 1 to 7, wherein the touch substrate includes a display area and a peripheral area surrounding the periphery of the display area, the method for manufacturing a touch substrate comprising:
forming a defining layer disposed on a substrate at the peripheral region; the limiting layer comprises a first organic layer formed on the substrate and a second organic layer formed on the first organic layer, wherein a first opening is formed in the first organic layer, a second opening communicated with the first opening is formed in the second organic layer, the opening area of the second opening is larger than that of the first opening, and the first opening and the second opening form the isolation groove in a step shape;
forming an isolation groove in the limiting layer;
forming a flat layer over the isolation trench;
and forming a touch lead above the flat layer.
CN202011137803.3A 2020-10-22 2020-10-22 Touch substrate, preparation method thereof and display device Active CN112269488B (en)

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Publication number Priority date Publication date Assignee Title
CN112885885A (en) * 2021-02-01 2021-06-01 武汉华星光电半导体显示技术有限公司 Display panel, display device and manufacturing method of display panel

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CN104317445A (en) * 2014-10-15 2015-01-28 重庆京东方光电科技有限公司 Touch substrate and preparation method thereof, and touch display panel
CN106354298A (en) * 2016-08-12 2017-01-25 京东方科技集团股份有限公司 OGS touch screen with white frame and manufacturing method thereof and display device
CN106933431A (en) * 2017-02-15 2017-07-07 上海天马微电子有限公司 Organic Light Emitting Diode touch display substrate and touch control display apparatus
CN109683743A (en) * 2018-12-24 2019-04-26 武汉华星光电技术有限公司 A kind of touch-control display panel and electronic device
CN111524949A (en) * 2020-04-29 2020-08-11 京东方科技集团股份有限公司 Display panel, manufacturing method thereof and display device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104317445A (en) * 2014-10-15 2015-01-28 重庆京东方光电科技有限公司 Touch substrate and preparation method thereof, and touch display panel
CN106354298A (en) * 2016-08-12 2017-01-25 京东方科技集团股份有限公司 OGS touch screen with white frame and manufacturing method thereof and display device
CN106933431A (en) * 2017-02-15 2017-07-07 上海天马微电子有限公司 Organic Light Emitting Diode touch display substrate and touch control display apparatus
CN109683743A (en) * 2018-12-24 2019-04-26 武汉华星光电技术有限公司 A kind of touch-control display panel and electronic device
CN111524949A (en) * 2020-04-29 2020-08-11 京东方科技集团股份有限公司 Display panel, manufacturing method thereof and display device

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