CN113061876B - 一种cvd法制备石墨烯用基底金属薄片加热装置 - Google Patents
一种cvd法制备石墨烯用基底金属薄片加热装置 Download PDFInfo
- Publication number
- CN113061876B CN113061876B CN202110208289.6A CN202110208289A CN113061876B CN 113061876 B CN113061876 B CN 113061876B CN 202110208289 A CN202110208289 A CN 202110208289A CN 113061876 B CN113061876 B CN 113061876B
- Authority
- CN
- China
- Prior art keywords
- fixedly connected
- plate
- sliding
- heating device
- limiting plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 38
- 238000005229 chemical vapour deposition Methods 0.000 title claims abstract description 27
- 239000010953 base metal Substances 0.000 title claims abstract description 20
- 229910002804 graphite Inorganic materials 0.000 title claims description 3
- 239000010439 graphite Substances 0.000 title claims description 3
- -1 graphite alkene Chemical class 0.000 title claims description 3
- 238000002360 preparation method Methods 0.000 title claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 24
- 229910021389 graphene Inorganic materials 0.000 claims abstract description 23
- 238000009434 installation Methods 0.000 claims description 8
- 239000011888 foil Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 239000007789 gas Substances 0.000 description 15
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 6
- 238000005520 cutting process Methods 0.000 description 5
- 230000033001 locomotion Effects 0.000 description 5
- 239000002184 metal Substances 0.000 description 4
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 3
- 235000017491 Bambusa tulda Nutrition 0.000 description 3
- 241001330002 Bambuseae Species 0.000 description 3
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 3
- 239000011425 bamboo Substances 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/182—Graphene
- C01B32/184—Preparation
- C01B32/186—Preparation by chemical vapour deposition [CVD]
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Nanotechnology (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202110208289.6A CN113061876B (zh) | 2021-02-24 | 2021-02-24 | 一种cvd法制备石墨烯用基底金属薄片加热装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202110208289.6A CN113061876B (zh) | 2021-02-24 | 2021-02-24 | 一种cvd法制备石墨烯用基底金属薄片加热装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN113061876A CN113061876A (zh) | 2021-07-02 |
CN113061876B true CN113061876B (zh) | 2022-07-01 |
Family
ID=76558967
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202110208289.6A Active CN113061876B (zh) | 2021-02-24 | 2021-02-24 | 一种cvd法制备石墨烯用基底金属薄片加热装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN113061876B (zh) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103996620A (zh) * | 2013-02-15 | 2014-08-20 | 大日本网屏制造株式会社 | 基板处理装置 |
CN203794983U (zh) * | 2014-01-29 | 2014-08-27 | 厦门烯成新材料科技有限公司 | 一种带滑轨的用于制备石墨烯的化学气相沉积装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004259964A (ja) * | 2003-02-26 | 2004-09-16 | Renesas Technology Corp | 成膜装置およびその成膜装置を用いた半導体装置の製造方法 |
JP4935417B2 (ja) * | 2007-02-26 | 2012-05-23 | ウシオ電機株式会社 | 光照射式加熱処理装置 |
-
2021
- 2021-02-24 CN CN202110208289.6A patent/CN113061876B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103996620A (zh) * | 2013-02-15 | 2014-08-20 | 大日本网屏制造株式会社 | 基板处理装置 |
CN203794983U (zh) * | 2014-01-29 | 2014-08-27 | 厦门烯成新材料科技有限公司 | 一种带滑轨的用于制备石墨烯的化学气相沉积装置 |
Non-Patent Citations (1)
Title |
---|
"国外CVD法制备石墨烯的创新研究";苏东艳;《江苏科技信息》;20160131(第1期);第63-66页 * |
Also Published As
Publication number | Publication date |
---|---|
CN113061876A (zh) | 2021-07-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN113061876B (zh) | 一种cvd法制备石墨烯用基底金属薄片加热装置 | |
CN111499164A (zh) | 一种高硼硅玻璃容器制造用玻璃管加热烧制装置 | |
CN210905018U (zh) | 一种可调节式旋转蒸发仪 | |
CN210596783U (zh) | 一种新型精准全自动裁布平台装置 | |
CN110549000A (zh) | 双工位激光打标设备 | |
CN207987404U (zh) | 一种纺纱机的活动辊架 | |
CN217996406U (zh) | 一种电梯维修用安全维修架 | |
CN215573893U (zh) | 一种化制罐用防烫取样器 | |
CN207272061U (zh) | 一种钟形壳搓齿前顶装置 | |
CN220999821U (zh) | 一种高均匀性化学气相沉积碳化硅涂层载盘 | |
CN220997468U (zh) | 一种市政管道堆放架 | |
CN216099189U (zh) | 一种快速板材切割的装置 | |
CN108642820B (zh) | 一种棉被床单晾晒装置 | |
CN113730256A (zh) | 一种便捷悬挂式婴儿奶瓶固定器 | |
CN216062956U (zh) | 一种用于微生物和分子生物实验的旋转摇床 | |
CN212156446U (zh) | 一种自动化设备安装台 | |
CN220516728U (zh) | 一种维修作业支撑装置 | |
CN215179610U (zh) | 一种手提式荧光观察箱 | |
CN219213205U (zh) | 一种机器人安装架 | |
CN213827861U (zh) | 一种用于锁螺丝机的高度自动调整装备 | |
CN218313057U (zh) | 一种阀门隔离滴盘表面除冰装置 | |
CN219447087U (zh) | 一种钕铁硼粉料罐转运车 | |
CN219064905U (zh) | 一种标准物质检测用取样装置 | |
CN219582016U (zh) | 多功能摆臂式焊接工作台 | |
CN219930038U (zh) | 一种多功能生化培养箱 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20220610 Address after: 412007 floors 1-6, office building 1, Riedel Science Park, No. 755, Xianyue Ring Road, Tianyuan District, Zhuzhou City, Hunan Province Applicant after: Zhuzhou ruidel Intelligent Equipment Co.,Ltd. Address before: Room 408, No. 2286, Gaoqi community, Xiamen area, China (Fujian) pilot Free Trade Zone, Xiamen City, Fujian Province, 361000 Applicant before: Xiamen Tongxi Technology Co.,Ltd. |
|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A heating device for preparing graphene substrate metal sheets using CVD method Effective date of registration: 20231229 Granted publication date: 20220701 Pledgee: Agricultural Bank of China Limited Zhuzhou branch Pledgor: Zhuzhou ruidel Intelligent Equipment Co.,Ltd. Registration number: Y2023980075790 |