CN113021184B - Method and device for grinding, blowing and aligning panel - Google Patents

Method and device for grinding, blowing and aligning panel Download PDF

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Publication number
CN113021184B
CN113021184B CN202110270061.XA CN202110270061A CN113021184B CN 113021184 B CN113021184 B CN 113021184B CN 202110270061 A CN202110270061 A CN 202110270061A CN 113021184 B CN113021184 B CN 113021184B
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China
Prior art keywords
panel
blowing
alignment mark
alignment
automatic adjusting
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CN202110270061.XA
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CN113021184A (en
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王伟
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Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Publication of CN113021184A publication Critical patent/CN113021184A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

The invention discloses a method and a device for grinding, blowing and aligning a panel. The panel grinding and air blowing alignment method comprises the following steps: providing a panel, wherein the panel is provided with at least one alignment mark; providing an air blowing device with an automatic adjusting assembly, wherein the automatic adjusting assembly is configured to adjust an air blowing position of the air blowing device so as to blow off liquid near the alignment mark, so that the alignment mark is exposed; and providing an alignment device configured to capture the alignment mark for alignment. According to the invention, the automatic adjusting assembly is used for adjusting the blowing position or the blowing angle of the blowing device, so that the blowing angle can be better adjusted, and the adjusting times and the adjusting time of personnel are reduced.

Description

Method and device for grinding, blowing and aligning panel
Technical Field
The invention relates to a method and a device for grinding, blowing and aligning a panel, in particular to a method and a device for grinding, blowing and aligning a glass panel of a display.
Background
Currently, a panel grinder performs mark-grabbing alignment before grinding, and a panel grinder is a wet process, and if a liquid (e.g., water) of the process blocks the mark, the mark-grabbing and alignment are affected, so that water in the vicinity of the mark-grabbing needs to be blown away before the mark-grabbing.
The blowing design of the existing panel grinding machine is designed to adopt a bamboo joint pipe, and the blowing angle can be manually adjusted by an operator, so that the effect of blowing water completely is achieved. However, in the existing design, when an operator touches the blowhead, the angle of the blowhead changes, and changes along with the long-time operation of the machine (for example, because the machine vibrates), so that the operator needs to frequently debug. The blowing angle of the existing panel grinder needs one person to rotate the bamboo joint pipe inside the machine table, and the other person confirms in front of the display, so that more manpower is occupied. In addition, because the bamboo joint pipe is manually twisted by an operator, the adjustment to a good effect is often time-consuming.
Therefore, it is necessary to provide a method and a device for polishing, blowing and aligning a panel to solve the problems of the prior art.
Disclosure of Invention
In view of this, the present invention provides a method and a device for grinding, blowing and aligning a panel, so as to solve the problem that the blowing head of the blowing device in the prior art needs to be twisted by an operator manually to change its angle, which results in long adjustment time.
In addition, the invention provides a method and a device for grinding, blowing and aligning a panel, which are used for solving the problem that the prior art occupies more manpower for adjusting the blowing angle of a blowing head of a blowing device.
The invention mainly aims to provide a panel grinding, blowing and aligning method and a device thereof, which can adjust a blowing position or a blowing angle of a blowing device through an automatic adjusting assembly, further adjust the blowing angle better and reduce the adjustment times and the adjustment time of personnel.
The invention provides a method and a device for grinding, blowing and aligning a panel, which can align at least one alignment mark to a focus of an alignment device when the alignment device identifies the at least one alignment mark, and enable an automatic adjusting assembly to adjust the blowing device to rotate outwards to blow off liquid on the panel in a view field by taking the view field of the alignment device as a range and taking the at least one alignment mark as a center.
To achieve the above objects, one embodiment of the present invention provides a method for polishing and air-blowing alignment of a panel, comprising the steps of:
providing a panel, wherein the panel is provided with at least one alignment mark;
providing a blowing device with an automatic adjusting component, wherein the automatic adjusting component is configured to adjust a blowing position of the blowing device so as to blow off liquid near the at least one alignment mark, so that the at least one alignment mark is exposed; and
providing a contraposition device configured to grab the contraposition mark for contraposition.
In some embodiments of the present invention, the automatic adjustment assembly comprises an electromagnet assembly, and the air blowing device comprises an air blowing head made of a magnetic material, wherein when the automatic adjustment assembly adjusts the air blowing position of the air blowing device, the electromagnet assembly applies a magnetic field to the air blowing head to deflect the air blowing head by an angle, thereby changing the air blowing position of the air blowing device.
In some embodiments of the present invention, the automatic adjustment assembly comprises a spring assembly, the spring assembly providing a pulling force to the blowhead, such that when the electromagnet assembly does not apply the magnetic field to the blowhead, the blowhead is pulled in a direction of the spring assembly by the pulling force provided by the spring assembly to the blowhead.
In some embodiments of the present invention, the automatic adjustment assembly comprises a motor, a horizontal rotation assembly and a vertical rotation assembly, the motor rotates a blowing head of the blowing device horizontally by the horizontal rotation assembly and/or vertically by the vertical rotation assembly, thereby blowing off the liquid near the at least one alignment mark.
In some embodiments of the present invention, the alignment device includes a camera module, and when the camera module recognizes the at least one alignment mark, the at least one alignment mark is aligned with a focal point of the camera module, and the automatic adjusting component adjusts the blowing device to blow off the liquid on the panel in the field of view by rotating outwards with the at least one alignment mark as a center and a field of view of the camera module as a range.
Furthermore, another embodiment of the present invention provides a panel polishing and air blowing alignment apparatus, which includes:
a panel conveying device configured to convey a panel having at least one alignment mark;
a blowing device having an automatic adjusting component configured to adjust a blowing position of the blowing device to blow off liquid near the at least one alignment mark so as to expose the at least one alignment mark; and
an alignment device configured to capture the at least one alignment mark for alignment.
In some embodiments of the present invention, the automatic adjustment assembly comprises an electromagnet assembly and a current control device, and the air blowing device comprises an air blowing head made of a magnetic material, wherein when the automatic adjustment assembly adjusts the air blowing position of the air blowing device, the electromagnet assembly generates a magnetic field to be applied to the air blowing head through the current control device, so that the air blowing head deflects by an angle, thereby changing the air blowing position of the air blowing device.
In some embodiments of the present invention, the automatic adjustment assembly comprises a spring assembly, and the spring assembly provides a traction force to the blowhead, so that when the electromagnet assembly does not apply the magnetic field to the blowhead, the blowhead is pulled toward the spring assembly by the traction force provided by the spring assembly to the blowhead.
In some embodiments of the present invention, the automatic adjustment assembly comprises a motor, a horizontal rotation assembly and a vertical rotation assembly, the motor rotates a blowing head of the blowing device horizontally by the horizontal rotation assembly and/or vertically by the vertical rotation assembly, thereby blowing off the liquid near the at least one alignment mark.
In some embodiments of the present invention, the alignment device includes a camera module, and when the camera module recognizes the at least one alignment mark, the at least one alignment mark is aligned with a focal point of the camera module, and the automatic adjusting component adjusts the blowing device to blow off the liquid on the panel in the field of view by rotating outwards with the at least one alignment mark as a center and a field of view of the camera module as a range.
Compared with the prior art, the panel grinding, blowing and aligning method and the device thereof adjust a blowing position or a blowing angle of the blowing device through the automatic adjusting assembly, further adjust the blowing angle better, and reduce the adjusting times and the adjusting time of personnel; when the alignment device identifies the at least one alignment mark, the at least one alignment mark is aligned to a focus of the alignment device, the automatic adjusting assembly adjusts the air blowing device to blow off liquid on the panel in the view field outwards in a rotating mode by taking the at least one alignment mark as a center and the view field of the alignment device as a range, so that the air blowing position or the air blowing angle of the air blowing device can be automatically controlled, and the problem that the air blowing head of the air blowing device in the prior art needs to be twisted manually by an operator to achieve angle turning, and therefore adjustment time is long is solved; and the problem that the blowing angle of the blowing head of the blowing device in the prior art occupies more manpower.
In order to make the aforementioned and other objects of the present invention more comprehensible, preferred embodiments accompanied with figures are described in detail below:
drawings
Fig. 1 is a schematic flow chart illustrating a method for polishing and air-blowing alignment of a panel according to a first embodiment of the present invention.
FIG. 2 is a schematic view of a panel polishing and blowing apparatus according to a first embodiment of the present invention.
Fig. 3 is a schematic view of a camera module and an air blowing device of the alignment apparatus according to the first embodiment of the invention.
Fig. 4 shows a schematic enlarged view of the air blowing device according to the first embodiment of the present invention.
Fig. 5 shows a schematic enlarged view of a first embodiment of the automatic adjustment assembly according to the invention.
Fig. 6A and 6B show schematic enlarged views of a second embodiment of the automatic adjustment assembly according to the invention.
Detailed Description
The following description of the embodiments refers to the accompanying drawings for illustrating the specific embodiments in which the invention may be practiced. Furthermore, directional phrases used herein, such as, for example, upper, lower, top, bottom, front, rear, left, right, inner, outer, lateral, peripheral, central, horizontal, transverse, vertical, longitudinal, axial, radial, uppermost and lowermost, are simply those referring to the orientation of the appended figures. Accordingly, the directional terms used are used for explanation and understanding of the present invention, and are not used for limiting the present invention.
Referring to fig. 1, in order to achieve the above-mentioned object of the present invention, an embodiment of the present invention provides a method for polishing, blowing and aligning a panel, comprising the following steps:
(S1) providing a panel having at least one alignment mark;
(S2) providing an insufflation apparatus having an automatic adjustment assembly configured to adjust an insufflation position of the insufflation apparatus to blow liquid away from a vicinity of the at least one alignment mark so as to expose the at least one alignment mark; and
(S3) providing an alignment device configured to grab the at least one alignment mark for alignment.
Next, referring to fig. 2, a schematic top view of the panel polishing and air-blowing alignment apparatus 1 according to the first embodiment of the present invention is shown. The panel polishing and air blowing alignment device 1 comprises a panel conveying device 20, an alignment device 30, a polishing device 40 and a detection device 50. The panel conveying device 20 includes a plurality of panel brackets 21 and a plurality of ribs 22 connected to the panel brackets 21.
Referring to fig. 1 and 2, a panel 10 is provided. The panel 10 is conveyed by the panel conveying device 20, and the panel 10 is provided with at least one alignment mark 11. Optionally, the at least one alignment mark 11 is disposed on an upper surface of the panel 10. When the panel 10 is disposed on the panel conveying device 20, the panel 10 is dragged by the plurality of panel dragging brackets 21 of the panel conveying device 20. The plurality of ribs 22 are provided with a plurality of vacuum nozzles (not shown) to suck the panel 10 to fix the panel 10 to the panel transfer device 20.
Before the panel 10 is transported to the polishing device 40 by the panel transporting device 20, the panel 10 may have liquid (e.g., deionized water) remained thereon (e.g., after a water washing step). When the panel 10 is conveyed to the alignment device 30 by the panel conveying device 20, the alignment device 30 will grab the at least one alignment mark 11 on the panel 10 for alignment, and the liquid remaining on the at least one alignment mark 11 will affect the alignment device 30 to grab the at least one alignment mark 11, thereby causing alignment failure. Therefore, before the alignment device 30 grasps the at least one alignment mark 11, the automatic adjusting component 321 of the air blowing device 32 adjusts an air blowing position of the air blowing device 32, so as to blow off the liquid near the at least one alignment mark 11, so as to expose the at least one alignment mark 11. After the blowing device 32 blows off the liquid near the at least one alignment mark 11 to expose the at least one alignment mark 11, the alignment device 30 grabs the at least one alignment mark 11 for alignment.
Fig. 3 shows a schematic view of a positioning device according to a first embodiment of the invention. The blowing device 32 has a camera module 31 and a blowing device 32. The air blowing device 32 comprises an air blowing head 322 and an automatic adjusting component 321, wherein the automatic adjusting component 321 can adjust an air blowing angle or position of the air blowing head 322 of the air blowing device 32, so as to adjust an air blowing position of the air blowing device 32, and further blow off liquid near the at least one alignment mark 11, so as to expose the at least one alignment mark 11.
Optionally, when the camera module 31 (partially or completely) identifies the at least one alignment mark 11 (only image recognition, without precise alignment), the at least one alignment mark 11 is aligned with the focal point of the camera module 31, and the automatic adjusting component 321 adjusts the blowing device 32 to rotate outwards to blow off the liquid on the panel 10 in the field of view by taking the at least one alignment mark 11 as the center and taking a field of view of the camera module 31 as the range. Alternatively, when the camera module 31 does not recognize the at least one alignment mark 11, the camera module 31 pulls the lens away (zoom out), and the automatic adjusting component 321 adjusts the blowing device 32 to cause the blowing head 322 to be centered toward the focal point of the camera module 31, and to rotate outwards to blow off the liquid on the panel 10 in the field of view of the camera module 31.
Fig. 4 shows a schematic enlarged view of the air blowing device according to the first embodiment of the present invention. As shown in FIG. 4, the blowing device 32 includes an automatic adjusting unit 321, a blowing head 322 and an air pipe 323. The air pipe 323 is connected with the blowing head 322, and the angle and position of the blowing head 322 are adjusted by the automatic adjusting assembly 321. Optionally, the blowhead 322 comprises a straight metal pipe and a bamboo joint pipe. In addition to the automatic adjustment assembly 321 capable of automatically adjusting the angle and position of the blowhead 322, the knotted bamboo tube can further adjust the angle and position of the blowhead 322 to provide a larger margin for the angle and position of the blowhead 322.
Fig. 5 shows a schematic enlarged view of a first embodiment of the automatic adjustment assembly according to the invention. The automatic adjusting assembly 321 includes an electromagnet assembly 3211 and a current control device 323. The blowing head 322 is made of a magnetic material (e.g., a ferromagnetic material). When the automatic adjusting component 321 adjusts the blowing position of the blowing device 32, the current control device 323 causes the electromagnet component 3211 to generate a magnetic field to apply to the blowing head 322, so that the blowing head 322 deflects by an angle, thereby changing the blowing position of the blowing device 32. The automatic adjustment assembly 321 includes a spring assembly 3212, and the spring assembly 3212 provides a traction force to the blowhead 322, so that when the electromagnet assembly 3211 does not apply the magnetic field to the blowhead 322, the blowhead 322 pulls the blowhead 322 toward the spring assembly 3212 by the traction force provided by the spring assembly 3212 to the blowhead 322.
Fig. 6A and 6B show schematic enlarged views of a second embodiment of the automatic adjustment assembly according to the invention. As shown in fig. 6A and 6B, the automatic adjusting assembly 321 includes a motor 3213, a horizontal rotating assembly 3214, and a vertical rotating assembly 3215, and the motor 3213 horizontally rotates through the horizontal rotating assembly 3214 and/or vertically rotates through the vertical rotating assembly 3215 a blowing head 322 of the blowing device 32, thereby blowing off the liquid near the at least one alignment mark 11. Alternatively, the horizontal rotation assembly 3214 may be a first horizontal gear attached to the air duct 323; the vertical pivoting assembly 3215 may be a first vertical gear that is removably attached to the blowhead 322. Alternatively, the motor 3213 may also include a second horizontal rotary gear 3216 and a second vertical rotary gear 3217. When the second horizontal rotation gear 3216 of the motor 3213 moves to engage with the first horizontal gear, the motor 3213 controls the horizontal rotation of the blowhead 322; when the first vertical rotary gear is moved to be attached to the blowhead 322 and the second vertical rotary gear 3217 of the motor 3213 is moved to be engaged with the first vertical gear, the motor 3213 controls the leftward and rightward swinging (i.e., rotation in the vertical direction of the drawing) of the blowhead 322.
Furthermore, a second embodiment of the present invention provides a panel polishing and air-blowing alignment apparatus 1, comprising:
a panel conveying device 20 configured to convey a panel 10, the panel 10 having at least one alignment mark 11;
an air blowing device 32 having an automatic adjusting component 321, wherein the automatic adjusting component 321 is configured to adjust an air blowing position of the air blowing device 32, so as to blow off the liquid near the at least one alignment mark 11, so as to expose the at least one alignment mark 11; and
an alignment device 30 configured to capture the at least one alignment mark 11 for alignment.
Optionally, the automatic adjusting component 321 includes an electromagnet component 3211 and a current control device 323, and the air blowing device 32 includes an air blowing head 322 made of a magnetic material, wherein when the automatic adjusting component 321 adjusts the air blowing position of the air blowing device 32, the electromagnet component 3211 generates a magnetic field through the current control device 323 and applies the magnetic field to the air blowing head 322 so that the air blowing head 322 deflects by an angle, thereby changing the air blowing position of the air blowing device 32.
Optionally, the automatic adjusting assembly 321 includes a spring assembly 3212, and the spring assembly 3212 provides a traction force to the blowhead 322, so that when the electromagnet assembly 3211 does not apply the magnetic field to the blowhead 322, the blowhead 322 pulls the blowhead 322 toward the spring assembly 3212 by the traction force provided by the spring assembly 3212 to the blowhead 322.
Optionally, the automatic adjusting assembly 321 includes a motor 3213, a horizontal rotating assembly 3214, and a vertical rotating assembly 3215, and the motor 3213 rotates horizontally by the horizontal rotating assembly 3214 and/or vertically by the vertical rotating assembly 3215 to blow off the liquid near the at least one alignment mark 11 by rotating a blowing head 322 of the blowing device 32.
Optionally, the alignment device 30 includes a camera module 31, when the camera module 31 recognizes the at least one alignment mark 11, the at least one alignment mark 11 is aligned with a focal point of the camera module 31, and the automatic adjusting component 321 adjusts the blowing device 32 to blow off the liquid on the panel 10 in the field of view by rotating outwards with the at least one alignment mark 11 as a center and a field of view of the camera module 31 as a range.
The method and the device for grinding, blowing and aligning the panel provided by the embodiment of the present application are introduced in detail, and specific examples are applied herein to explain the principle and the embodiment of the present application, and the description of the above embodiments is only used to help understand the method and the core idea of the present application; meanwhile, for those skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.

Claims (5)

1. A panel grinding and air blowing alignment method is characterized in that: the method for grinding and air blowing alignment of the panel comprises the following steps:
providing a panel, wherein the panel is provided with at least one alignment mark, the panel is conveyed by a panel conveying device, when the panel is arranged on the panel conveying device, the panel is supported and dragged by a plurality of panel supporting brackets of the panel conveying device, a plurality of vacuum suction nozzles are arranged on a plurality of rib parts connected with the panel supporting brackets so as to suck the panel, so that the panel is fixed on the panel conveying device, the panel is conveyed to a grinding device by the panel conveying device, and liquid is remained on the panel by a water washing step; providing an aligning device configured to capture the at least one alignment mark for alignment, wherein when the panel is conveyed to the aligning device by the panel conveying device, the aligning device captures the at least one alignment mark on the panel for alignment, and the liquid remaining on the at least one alignment mark influences the aligning device to capture the at least one alignment mark;
providing an air blowing device with an automatic adjusting component, wherein the automatic adjusting component is configured to adjust an air blowing position of the air blowing device so as to blow off liquid near the at least one alignment mark, so that the at least one alignment mark is exposed; and
when the alignment device identifies the at least one alignment mark, the at least one alignment mark is aligned with a focus of the alignment device, and the automatic adjusting assembly adjusts the air blowing device to rotate outwards to blow off liquid on the panel in the visual field by taking the at least one alignment mark as a center and the visual field of the alignment device as a range, so that an air blowing position or an air blowing angle of the air blowing device can be automatically controlled,
when the automatic adjusting assembly adjusts the blowing position of the blowing device, the electromagnet assembly is applied to the blowing head through a magnetic field to enable the blowing head to deflect an angle, and then the blowing position of the blowing device is changed.
2. The method of claim 1, wherein the method comprises: the automatic adjusting assembly comprises a spring assembly, and the spring assembly provides traction force for the blowing head, so that when the electromagnet assembly does not apply the magnetic field to the blowing head, the blowing head is pulled towards the direction of the spring assembly through the traction force provided by the spring assembly for the blowing head.
3. The method of claim 1, wherein the method comprises: the alignment device comprises a camera module, when the camera module identifies the at least one alignment mark, the at least one alignment mark is aligned to a focus of the camera module, the automatic adjusting assembly adjusts the blowing device to blow off liquid on the panel in the view field in an outward rotating mode by taking the at least one alignment mark as a center and taking a view field of the camera module as a range.
4. The utility model provides a panel grinds aligning device that blows which characterized in that: the panel grinding and air blowing alignment device comprises:
a panel conveying device configured to convey a panel having at least one alignment mark;
a blowing device having an automatic adjusting component configured to adjust a blowing position of the blowing device to blow off liquid near the at least one alignment mark so as to expose the at least one alignment mark; and
an alignment device configured to capture the at least one alignment mark for alignment,
wherein the automatic adjusting component comprises an electromagnet component and a current control device, and the blowing device comprises a blowing head made of a magnetic material, when the automatic adjusting component adjusts the blowing position of the blowing device, the current control device enables the electromagnet component to generate a magnetic field to be applied to the blowing head to enable the blowing head to deflect an angle, so as to change the blowing position of the blowing device,
when the camera module identifies the at least one alignment mark, the at least one alignment mark is aligned to a focus of the camera module, and the automatic adjusting assembly adjusts the blowing device to blow off liquid on the panel in the view field by rotating outwards with the at least one alignment mark as a center and a view field of the camera module as a range.
5. The panel grinding and air-blowing alignment device as claimed in claim 4, wherein: the automatic adjusting assembly comprises a spring assembly, and the spring assembly provides traction force for the blowing head, so that when the electromagnet assembly does not apply the magnetic field to the blowing head, the blowing head is pulled towards the direction of the spring assembly through the traction force provided by the spring assembly for the blowing head.
CN202110270061.XA 2021-03-12 2021-03-12 Method and device for grinding, blowing and aligning panel Active CN113021184B (en)

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KR102526513B1 (en) * 2021-05-26 2023-04-26 에스케이엔펄스 주식회사 Adhesive film for polishing pad, laminated polishing pad comprising the same and method of polishing a wafer

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KR20060103416A (en) * 2006-09-06 2006-09-29 노찬호 High uneven processing method on the surface of stone
CN202779056U (en) * 2012-07-19 2013-03-13 陕西彩虹电子玻璃有限公司 Blowing device arranged at cameras and used for automatically correcting glass plate
TWI532534B (en) * 2015-04-30 2016-05-11 友達光電股份有限公司 Adjustable nozzle device and operation method thereof
CN107932249B (en) * 2017-11-20 2020-01-17 武汉华星光电技术有限公司 Panel grinding device and grinding method
CN110081671B (en) * 2019-04-04 2021-03-16 深圳市华星光电半导体显示技术有限公司 Blowing equipment of display panel
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