CN113008124B - Multimode sensor and preparation method thereof - Google Patents
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Abstract
The invention provides a multimode sensor and a preparation method thereof. The multimode sensor includes: the touch screen comprises a first electrode, a second electrode which is arranged opposite to the first electrode, and a pressure-sensitive layer which is arranged between the first electrode and the second electrode, wherein the first electrode and the second electrode are interdigital electrodes. According to the invention, various external stimuli such as stretching, pressing, bending and the like can be converted into distinguishable current change signals through the combined action of the signal response trend and the signal response size of the two groups of electrodes, and the deformation type, direction and size of the sensor are obtained by decoupling the signal change of the upper group of interdigital electrodes and the lower group of interdigital electrodes under the stress state, so that the accurate real-time monitoring of the external stimuli and deformation is realized.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a multi-mode sensor and a preparation method thereof.
Background
The wearable mechanical sensor is widely applied in the field of accurate visual monitoring of physiological signals and mechanical deformation. Because of the variety and complexity of external stimuli and human deformation, a single-mode mechanical sensor cannot realize accurate monitoring of various complex deformations. The existing multimode mechanical sensor only recognizes complex external stimulus and uniformly converts the complex external stimulus into an electric signal change, and can not realize decoupling distinguishing monitoring of the complex signal, namely all mechanical stimulus is finally converted into a changed electric signal, and the type, direction, size and the like of the mechanical stimulus can not be determined through the indistinguishable electric signal, so that accurate monitoring of the external stimulus can not be realized.
Disclosure of Invention
The invention solves the problem that the existing multimode mechanical sensor cannot realize accurate monitoring of external stimulus.
To solve at least one of the above problems, the present invention provides a multimode sensor comprising: the touch screen comprises a first electrode, a second electrode which is arranged opposite to the first electrode, and a pressure-sensitive layer which is arranged between the first electrode and the second electrode, wherein the first electrode and the second electrode are interdigital electrodes.
Preferably, the first electrode and the second electrode are respectively adhered to two symmetrical sides of the pressure sensitive layer.
Preferably, the pressure sensitive layer is an electrically conductive porous foam material comprising a carbon nanotube/polydimethylsiloxane porous foam.
The invention also provides a preparation method of the multimode sensor, which is used for preparing the multimode sensor and comprises the following steps: and respectively preparing interdigital electrodes and a pressure-sensitive layer, and bonding the two interdigital electrodes on two symmetrical sides of the pressure-sensitive layer to obtain the multi-mode sensor.
Preferably, the preparation method of the interdigital electrode comprises the following steps:
preparing a polymer spinning solution and a conductive solution;
respectively applying positive voltages to two ends of the polymer spinning solution and the conductive solution, applying negative voltages to the receiving roller end, and simultaneously carrying out electrostatic spinning and electrostatic spraying to prepare a flexible stretchable electrode;
and attaching the flexible stretchable electrode to a polydimethylsiloxane film for laser cutting, wherein the cutting power is 30-60W, and the interdigital electrode is obtained.
Preferably, the terminal voltage of the polymer spinning solution is 8-11kV, the speed of electrostatic spinning is 0.03-0.05ml/min, the terminal voltage of the conductive solution is 14-16kV, and the speed of electrostatic spraying is 0.3-0.5ml/min.
Preferably, the preparation method of the interdigital electrode comprises the following steps:
preparing a polyvinyl alcohol nanofiber film by utilizing electrostatic spinning;
performing magnetron sputtering deposition on the surface of the polyvinyl alcohol nanofiber film to obtain a PVA/AgNFs film;
mixing, degassing and drying the polydimethylsiloxane main agent and the curing agent to obtain a PDMS film;
depositing the PVA/AgNFs film on the PDMS film to obtain silver nanofibers;
spin-coating photoresist on the surface of the silver nanofiber, and obtaining a mask layer through UV lithography;
and carrying out chemical etching on the silver nanofiber, and cleaning the residual photoresist to obtain the interdigital electrode.
Preferably, the preparation method of the pressure-sensitive layer comprises the following steps:
mixing sodium chloride particles with the polydimethylsiloxane prepolymer, and curing to obtain polydimethylsiloxane elastic porous foam; and performing ultrasonic dispersion on the carbon nanotube solution to obtain a uniformly dispersed carbon nanotube solution;
soaking the polydimethylsiloxane elastic porous foam into the uniformly dispersed carbon nano tube solution, performing ultrasonic dispersion and freeze drying to obtain the carbon nano tube/polydimethylsiloxane porous foam, wherein the carbon nano tube/polydimethylsiloxane porous foam is used as the pressure-sensitive layer.
Preferably, the mass ratio of the sodium chloride particles to the polydimethylsiloxane prepolymer is 5:1-12:1.
Preferably, the preparation method of the pressure-sensitive layer comprises the following steps:
using methane as a carbon source, and growing a plurality of layers of graphene on a foam nickel template by adopting a chemical vapor deposition method to obtain foam nickel coated with graphene;
mixing polydimethylsiloxane and a cross-linking agent to obtain a prepolymer;
immersing the foam nickel coated with the graphene into the prepolymer, and removing a nickel skeleton through vacuum drying, curing and chemical etching to obtain a porous nanocomposite, wherein the porous nanocomposite is used as the pressure-sensitive layer.
Compared with the prior art, the invention has the following beneficial effects:
the multimode sensor provided by the invention has an upper interdigital electrode structure and a lower interdigital electrode structure, various external stimuli such as stretching, pressing, bending and the like can be converted into distinguishable current change signals under the combined action of the signal response trend and the size of the two interdigital electrodes, and the deformation type, direction and size of the sensor are obtained by decoupling the signal changes of the upper interdigital electrode and the lower interdigital electrode under the stress state, so that the accurate real-time monitoring of the external stimuli and deformation is realized.
Drawings
FIG. 1 is a schematic diagram of a multimode sensor according to an embodiment of the invention;
FIG. 2 is a graph showing the current signal variation of the multimode sensor under different stress conditions according to an embodiment of the present invention.
Reference numerals illustrate:
1-a first electrode; 2-a pressure sensitive layer; 3-a second electrode.
Detailed Description
Most of the existing mechanical sensors convert various mechanical stimuli into a group of changed electric signals, the types, the sizes and the directions of the mechanical stimuli cannot be reversely deduced through the changes of the electric signals, and the purpose of accurate deformation monitoring cannot be achieved.
In order that the above objects, features and advantages of the invention will be readily understood, a more particular description of the invention will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings.
Referring to fig. 1, an embodiment of the present invention provides a multimode sensor, which includes a first electrode 1, a second electrode 3 disposed opposite to the first electrode 1, and a pressure-sensitive layer 2 disposed between the first electrode 1 and the second electrode 3, wherein the first electrode 1 and the second electrode 3 are both interdigital electrodes.
In order to accurately monitor the types, sizes and directions of external stimuli, the embodiment provides a multimode sensor, wherein the upper electrode and the lower electrode are interdigital electrodes, so that the upper electrode and the lower electrode can respectively generate a group of signals. It should be appreciated that in this embodiment, the first electrode 1 and the second electrode 3 are flexible electrodes, and the intermediate layer is a conductive elastic layer, so that the sensor can be applied to the wearable field.
In this embodiment, by arranging the upper and lower sets of interdigital electrodes, when the multimode sensor is mechanically deformed, the deformation trends of the two sets of interdigital electrodes are different, so that the types and deformation degrees of the applied external stimulus can be reversely estimated and determined through the combined action of the signal response trend and the magnitude of the two sets of electrodes, thereby identifying various mechanical stimuli including extrusion, positive bending, negative bending, horizontal stretching, vertical stretching and the like.
Referring to fig. 2, the multi-mode sensor of the present embodiment applies the pressing, bending and stretching stimuli respectively, and the recognition of the external stimuli (including the type, direction and magnitude of the stimuli) according to the sensing mechanism aspect of the multi-mode sensor is described, for convenience of description, according to the placement position of the multi-mode sensor in fig. 2, the multi-mode sensor sequentially includes an upper interdigital electrode, a middle elastic layer and a lower interdigital electrode from top to bottom. In fig. 2, i, ii, iii, iv, v respectively represent five different states of the multimode sensor, and in a current change diagram in each state, a current signal change diagram of an upper interdigital electrode and a current signal change diagram of a lower interdigital electrode are respectively from left to right.
When a pressing stimulus is applied to the sensor: as shown by i in fig. 2, a pressing force is applied to the uppermost layer of the multimode sensor, and when a pressing force is applied to the sensor, the conductive paths of both the upper and lower sets of interdigital electrodes increase, resulting in an increase in the current of both the upper and lower sets of electrodes. However, as the pressing force increases, the middle elastic layer deforms, resulting in deformation of the upper interdigital electrode, so that the interdigital gap increases, and thus, the current of the upper interdigital electrode decreases. Thus, the end result of applying a compressive stimulus to a multimode sensor is: as shown in the current signal change chart of i in fig. 2, the current signal change trend of the two electrodes is the same, but the magnitudes are different, which means that the upper and lower electrode currents both increase with increasing pressing force, but the lower electrode current increases more than the upper electrode current.
When a bending stimulus is applied to the sensor: for ease of description, the bending of the upper interdigital electrode under tension and the lower interdigital electrode under pressure as shown in ii in fig. 2 is defined herein as positive bending, and the bending of the multimode sensor in iii in fig. 2 as negative bending.
As shown in ii in fig. 2, when the multimode sensor is bent positively, the upper interdigital electrode is positioned on the pulled surface, the interdigital gap is increased, so that the current of the upper interdigital electrode is reduced, and the current of the lower interdigital electrode is increased when the lower interdigital electrode is positioned on the pressed surface, so that in the current signal change chart in ii in fig. 2, the change trend of two current signals is opposite, which means that one of the upper electrode and the lower electrode is increased, and the other is decreased.
As shown in fig. 2 iii, when the multimode sensor is negatively bent, the upper interdigital electrode is positioned on the pressure receiving surface, the current increases, and the lower interdigital electrode is positioned on the pulling surface, and the current decreases.
When a tensile stimulus is applied to the sensor: when the multimode sensor is stretched in a direction parallel to the electrode fingers as shown in iv in fig. 2, the gap between the fingers of the finger electrodes is reduced by the stretching, the middle conductive substance is pressed in the current transmission direction, the current of both the upper and lower sets of finger electrodes is gradually increased along with the stretching, and in the current signal change diagram of iv in fig. 2, the current change trend and the current change of both electrodes are the same.
As shown in v in fig. 2, when the multimode sensor is stretched in a direction perpendicular to the electrode fingers, the gap between the electrode fingers of the fingers is increased due to the stretching, the middle conductive substance is pulled in the current transmission direction, and the current of the upper and lower groups of electrode fingers is gradually reduced along with the stretching, and in the current signal change diagram of v in fig. 2, the current change trend and the current change trend of the two electrodes are the same, but are opposite to the current signal change trend in iv in fig. 2.
It can be seen that each deformation of the multimode sensor provided in this embodiment corresponds to a unique current variation trend, that is, each detected current variation trend corresponds to a unique deformation, and the magnitude of the current variation corresponds to the magnitude of the deformation. Therefore, the mechanical sensor with the structure of the upper and lower groups of interdigital electrodes can convert various external stimuli such as stretching, pressing, bending and the like into distinguishable current change signals in real time, and the type, the direction and the size of deformation of the sensor are obtained by reversely decoupling the signal change of the upper and lower groups of interdigital electrodes under the stress state, so that the accurate real-time monitoring of the external stimuli and the deformation is realized.
Another embodiment of the present invention provides a method for manufacturing a multimode sensor, including:
and respectively preparing an interdigital electrode and a pressure-sensitive layer 2, and bonding the two interdigital electrodes on two symmetrical sides of the pressure-sensitive layer 2 to obtain the multi-mode sensor.
The interdigital electrode can be prepared in one of the following ways. In one embodiment, the interdigital electrode is prepared by adopting a mode of combining electrostatic spinning and electrostatic spraying, and the steps are as follows:
preparing a polymer spinning solution and a conductive solution;
respectively applying positive voltage to two ends of the polymer spinning solution and the conductive solution, applying negative voltage to the receiving roller end, and simultaneously carrying out electrostatic spinning and electrostatic spraying to obtain a flexible stretchable electrode; wherein, the terminal voltage of the polymer spinning solution is 8-11kV, the speed of electrostatic spinning is 0.03-0.05ml/min, the terminal voltage of the conductive solution is 14-16kV, and the speed of electrostatic spraying is 0.3-0.5ml/min.
And attaching the prepared flexible stretchable electrode on a Polydimethylsiloxane (PDMS) film for laser cutting, wherein the cutting power is 30-60W, and obtaining the required interdigital electrode.
Wherein the conductive solution comprises silver nanowire dispersion liquid and liquid metal dispersion liquid. The concentration of the silver nanowire dispersion is 1-2mg/ml. The preparation process of the liquid metal dispersion liquid comprises the following steps: adding the liquid metal eutectic alloy into isopropanol solution, adopting a cell pulverizer to treat, standing, taking suspension to obtain liquid metal dispersion liquid, and taking the liquid metal dispersion liquid as electrostatic spraying solution.
In another embodiment, the interdigital electrode is made in the following manner;
preparing a polyvinyl alcohol (PVA) nanofiber film by using an electrostatic spinning technology, wherein spinning parameters comprise: the solution solubility is 10wt%, the spinning voltage is 13kV, and the spinning distance is 10cm;
depositing a layer of 200nm thick metal Ag on the surface of the PVA nanofiber film by a magnetron sputtering technology to obtain a PVA/AgNFs film;
thoroughly mixing a PDMS main agent and a curing agent according to a weight ratio of 10:1, degassing for 5min, removing bubbles, and then spin-drying on a glass substrate to obtain a PDMS film;
depositing a PVA/AgNFs film on the PDMS film through deionized water to obtain silver nano fibers (AgNFs), and drying the AgNFs to ensure the strong adhesive force of the AgNFs to a substrate;
spin-coating negative photoresist on the AgNFs surface at 2000rpm for 60 seconds, obtaining various mask layers through a series of UV lithography steps, and preparing different masks by using a laser direct writing lithography system;
with 5mol/L HNO 3 AgNFs were etched, the solution was stirred during the etching process to eliminate the bubbles generated, and the remaining photoresist was cleaned with acetone to give a flexible stretchable electrode.
The pressure-sensitive layer 2 is prepared in one of the following ways. In one embodiment, the pressure sensitive layer 2 comprises a carbon nanotube/polydimethylsiloxane (CNTs/PDMS) porous foam, wherein the method of making comprises:
mixing sodium chloride particles and polydimethylsiloxane prepolymer according to a mass ratio of 5:1-12:1, uniformly stirring for 10-20min to obtain a mixture, adding the mixture into a square mold, compacting, curing at 60-80 ℃ for 1-3h, and curing to obtain PDMS elastic porous foam; ultrasonically dispersing the CNTs solution to obtain uniformly dispersed CNTs solution;
soaking the PDMS elastic porous foam into uniformly dispersed CNTs solution, performing ultrasonic dispersion for 30min, and performing freeze drying to obtain the CNTs/PDMS porous foam.
In another embodiment, the method for preparing the pressure-sensitive layer 2 includes:
using methane as a carbon source, and growing a plurality of layers of graphene on a foam nickel template by adopting a Chemical Vapor Deposition (CVD) method to obtain foam nickel coated with graphene;
thoroughly mixing PDMS and a cross-linking agent according to a mass ratio of 8:1-10:1 to obtain a prepolymer;
immersing foam nickel coated with graphene into the prepolymer;
vacuum drying the sample for 1h, and then curing in a hot plate at 100 ℃ to remove bubbles in the solution;
due to the rigid mechanical properties of metallic nickel, it is not possible to realize flexible, compressible, stretchable piezoresistive sensors. Therefore, it is necessary to remove the nickel skeleton using hydrochloric acid, cut the PDMS prior to chemical etching, and cut the excess PDMS so that there is good contact between the foamed nickel and the acid solution, to produce a porous conductive foam.
The present embodiment produces a multi-modal flexible wearable sensor with unique sensing mechanism and unique structure that can accurately detect and identify multiple stimuli and convert to different current change signals. When the sensor is subjected to external stimulus (such as pressure, stretching and bending), the deformation, the direction and the size of the applied force are monitored and analyzed by the two groups of independent interdigital electrodes respectively, and the sensor is converted into corresponding different current change trends and peaks, wherein one-to-one correspondence exists between the various deformation and current change trends.
The present invention will be described in detail with reference to the following examples.
Example 1
The embodiment provides a preparation method of a multi-mode sensor, which comprises the following steps:
(1) Preparation of interdigital electrode: preparing a 4% thermoplastic polyurethane elastomer rubber (TPU) spinning solution and 1.5mg/ml AgNWs dispersion liquid, and preparing a flexible stretching electrode by adopting a mode of combining electrostatic spinning and electrostatic spraying, wherein the electrostatic spinning and the electrostatic spraying are carried out simultaneously, and AgNWs are uniformly cut between TPU nanofibers to form a conductive network. The voltage of the electrostatic spinning polyurethane nanofiber is +9kV, the spinning speed is 0.04ml/min, the voltage of the electrostatic spraying AgNWs dispersion liquid is +15kV, and the spraying speed is 0.4ml/min;
attaching the prepared polymer fiber-based flexible electrode on a PDMS substrate for laser cutting to obtain a required interdigital electrode;
the resulting interdigitated electrodes were transferred from the PDMS film using VHB double-sided tape with polymer fibers on one side.
(2) Preparation of CNTs/PDMS porous foam: uniformly mixing sodium chloride particles and uncured PDMS solution according to a mass ratio of 8:1, then placing the mixture into a mold, curing the mixture at a high temperature of 75 ℃ for 2 hours, and then placing the completely cured compound into distilled water for ultrasonic cleaning to remove the sodium chloride particles to obtain PDMS porous foam;
adding CNTs into distilled water, and performing ultrasonic crushing to obtain uniformly dispersed CNTs solution;
and soaking the prepared PDMS porous foam into uniformly dispersed CNTs solution, performing ultrasonic crushing for 30min at 300W to enable the CNTs solution to be filled in holes of the PDMS foam, and then performing low-temperature freeze drying to obtain the CNTs/PDMS porous foam.
(3) Preparation of the multimode sensor: and attaching two interdigital electrodes transferred onto the VHB adhesive tape face to face on two sides of the CNTs/PDMS porous foam to obtain the multi-mode sensor.
Example 2
This example differs from example 1 in that the electrospun polyurethane nanofiber has a voltage of 8kV, a spinning speed of 0.03ml/min, an electrospray AgNWs dispersion of 14kV, and a spray speed of 0.3ml/min.
Example 3
This example differs from example 1 in that the voltage of the electrospun polyurethane nanofiber was 11kV, the spinning speed was 0.05ml/min, the voltage of the electrospun AgNWs dispersion was 16kV, and the spraying speed was 0.5ml/min.
Example 4
This example differs from example 1 in that sodium chloride particles are mixed with uncured PDMS solution in a mass ratio of 5:1.
Example 5
This example differs from example 1 in that sodium chloride particles are mixed with uncured PDMS solution in a mass ratio of 12:1.
Example 6
This example differs from example 1 in that the electrospray solution at the time of preparation of the interdigitated electrodes is:
adding the liquid metal eutectic alloy into isopropanol solution with the mass concentration of 15%, treating for 15min by a cell pulverizer (power: 300W), and standing for 20min to obtain suspension to obtain electrostatic spray solution.
Example 7
This example differs from example 1 in that the preparation of CNTs/PDMS porous foams is:
and (3) taking methane as a carbon source, growing a plurality of layers of graphene on a foam nickel template by adopting a CVD method, mixing PDMS and a prepolymer of a cross-linking agent according to a mass ratio of 10:1, and immersing the foam nickel coated with the graphene into the prepolymer, wherein attention is paid to the fact that the solution must submerge all foam surfaces so as to ensure that pores completely permeate the PDMS. The resulting sample was placed in a vacuum dryer for 1h and then cured in a hot plate at 100 ℃. Excess PDMS is excessively cut, and the nickel skeleton is removed by hydrochloric acid, so that the porous conductive foam is obtained.
Although the present disclosure is described above, the scope of protection of the present disclosure is not limited thereto. Various changes and modifications may be made by one skilled in the art without departing from the spirit and scope of the disclosure, and these changes and modifications will fall within the scope of the invention.
Claims (9)
1. A multimode sensor, comprising: the electrode comprises a first electrode (1), a second electrode (3) and a pressure-sensitive layer (2), wherein the second electrode (3) is arranged opposite to the first electrode (1), the pressure-sensitive layer (2) is arranged between the first electrode (1) and the second electrode (3), the first electrode (1) and the second electrode (3) are respectively adhered to two symmetrical sides of the pressure-sensitive layer (2), the first electrode (1) and the second electrode (3) are interdigital electrodes, and the first electrode and the second electrode can respectively generate a group of signals.
2. The multimode sensor according to claim 1, characterized in that the pressure sensitive layer (2) is an electrically conductive porous foam material comprising a carbon nanotube/polydimethylsiloxane porous foam.
3. A method of manufacturing a multimode sensor for manufacturing a multimode sensor according to claim 1 or 2, comprising:
and respectively preparing an interdigital electrode and a pressure-sensitive layer (2), and adhering the two interdigital electrodes to two symmetrical sides of the pressure-sensitive layer (2) to obtain the multi-mode sensor.
4. A method of manufacturing a multimode sensor according to claim 3, wherein the method of manufacturing an interdigital electrode comprises:
preparing a polymer spinning solution and a conductive solution;
respectively applying positive voltages to two ends of the polymer spinning solution and the conductive solution, applying negative voltages to the receiving roller end, and simultaneously carrying out electrostatic spinning and electrostatic spraying to prepare a flexible stretchable electrode;
and attaching the flexible stretchable electrode to a polydimethylsiloxane film for laser cutting, wherein the cutting power is 30-60W, and the interdigital electrode is obtained.
5. The method for manufacturing a multimode sensor according to claim 4, wherein the terminal voltage of the polymer spinning solution is 8-11kV, the speed of the electrospinning is 0.03-0.05ml/min, the terminal voltage of the conductive solution is 14-16kV, and the speed of the electrostatic spraying is 0.3-0.5ml/min.
6. A method of manufacturing a multimode sensor according to claim 3, wherein the method of manufacturing an interdigital electrode comprises:
preparing a polyvinyl alcohol nanofiber film by utilizing electrostatic spinning;
performing magnetron sputtering deposition on the surface of the polyvinyl alcohol nanofiber film to obtain a PVA/AgNFs film;
mixing, degassing and drying the polydimethylsiloxane main agent and the curing agent to obtain a PDMS film;
depositing the PVA/AgNFs film on the PDMS film to obtain silver nanofibers;
spin-coating photoresist on the surface of the silver nanofiber, and obtaining a mask layer through UV lithography;
and carrying out chemical etching on the silver nanofiber, and cleaning the residual photoresist to obtain the interdigital electrode.
7. A method of manufacturing a multimode sensor according to claim 3, characterized in that the method of manufacturing a pressure sensitive layer comprises:
mixing sodium chloride particles with the polydimethylsiloxane prepolymer, and curing to obtain polydimethylsiloxane elastic porous foam; and performing ultrasonic dispersion on the carbon nanotube solution to obtain a uniformly dispersed carbon nanotube solution;
soaking the polydimethylsiloxane elastic porous foam into the uniformly dispersed carbon nano tube solution, performing ultrasonic dispersion and freeze drying to obtain the carbon nano tube/polydimethylsiloxane porous foam, wherein the carbon nano tube/polydimethylsiloxane porous foam is used as the pressure-sensitive layer.
8. The method of manufacturing a multimode sensor according to claim 7, wherein the mass ratio of the sodium chloride particles to the polydimethylsiloxane prepolymer is 5:1 to 12:1.
9. A method of manufacturing a multimode sensor according to claim 3, characterized in that the method of manufacturing a pressure sensitive layer comprises:
using methane as a carbon source, and growing a plurality of layers of graphene on a foam nickel template by adopting a chemical vapor deposition method to obtain foam nickel coated with graphene;
mixing polydimethylsiloxane and a cross-linking agent to obtain a prepolymer;
immersing the foam nickel coated with the graphene into the prepolymer, and removing a nickel skeleton through vacuum drying, curing and chemical etching to obtain a porous nanocomposite, wherein the porous nanocomposite is used as the pressure-sensitive layer.
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| CN113970394A (en) * | 2021-10-22 | 2022-01-25 | 安徽大学 | Flexible piezoresistive sensor based on porous microstructure and preparation method thereof |
| CN115507981A (en) * | 2022-10-25 | 2022-12-23 | 云南电网有限责任公司电力科学研究院 | Flexible piezoresistive sensor and preparation method thereof |
| CN115854855B (en) * | 2023-02-27 | 2023-05-09 | 中国科学院深海科学与工程研究所 | Flexible tensile strain sensor, and preparation method and application thereof |
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