CN1129965C - Strontium titanate transistor - Google Patents
Strontium titanate transistor Download PDFInfo
- Publication number
- CN1129965C CN1129965C CN 00100366 CN00100366A CN1129965C CN 1129965 C CN1129965 C CN 1129965C CN 00100366 CN00100366 CN 00100366 CN 00100366 A CN00100366 A CN 00100366A CN 1129965 C CN1129965 C CN 1129965C
- Authority
- CN
- China
- Prior art keywords
- type
- strontium titanate
- transistor
- strontium
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 title claims abstract description 36
- 239000000463 material Substances 0.000 claims abstract description 12
- 239000013078 crystal Substances 0.000 claims abstract description 8
- 229910052712 strontium Inorganic materials 0.000 claims description 39
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims description 39
- 239000010936 titanium Substances 0.000 claims description 30
- 229910002367 SrTiO Inorganic materials 0.000 claims description 15
- 238000002360 preparation method Methods 0.000 claims description 9
- 229910052738 indium Inorganic materials 0.000 claims description 6
- 229910052758 niobium Inorganic materials 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 5
- 238000002955 isolation Methods 0.000 claims description 3
- 229910052748 manganese Inorganic materials 0.000 claims description 3
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 2
- 238000009413 insulation Methods 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 239000002253 acid Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 13
- 239000010409 thin film Substances 0.000 abstract description 3
- 238000000407 epitaxy Methods 0.000 abstract description 2
- 238000003475 lamination Methods 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 27
- 238000005530 etching Methods 0.000 description 13
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 10
- 238000001259 photo etching Methods 0.000 description 7
- 238000001451 molecular beam epitaxy Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 239000010955 niobium Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 4
- 229910002113 barium titanate Inorganic materials 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000004549 pulsed laser deposition Methods 0.000 description 1
- 239000013049 sediment Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002887 superconductor Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Bipolar Transistors (AREA)
Abstract
The invention relates to the technical field of electronic transistors. The invention carries out lamination and epitaxy on doped n-type and p-type strontium titanate thin film materials together to form a p-n junction, a p-n-p junction, an n-p-n junction or a multi-junction structure, thus forming a strontium titanate crystal diode, a triode, a multi-base triode or a multi-emitter triode. The strontium titanate transistor provided by the invention has the advantages of simple process, sharper junction and good stability, so the strontium titanate transistor becomes an electronic device which is widely applied and can also be developed into a strontium titanate integrated circuit.
Description
The present invention relates to person in electronics, particularly relate to the electron-optical transistor technical field.
The discovery of germanium silicon p-n junction makes Human's production, work and life that revolutionary great variety take place.Along with progress of science and technology and development, in the last few years, the integrated level of Si semiconductor integrated circuit almost was to become magnitude ground to increase year by year.But owing to SiO as the silicon integrated circuit dielectric isolation layer
2DIELECTRIC CONSTANT be 3.8 only, the integrated level that makes silicon integrated circuit is near the limit.Therefore in recent years, people have done very big effort, utilize various device and means, attempt epitaxial growth SrTiO on silicon
3Replace SiO Deng oxide material
2Mainly due to reasons such as technologic problem and lattice mismatches, up to the present, this problem still is difficult to solve.(as document 1:R.A.McKee, et al.Phys.Rev.Lett., 81, (1998) 3041).In addition, all have higher requirement for the stability of device, power consumption etc.Because the fusing point of germanium silicon is not too high, the performance of germanium silicon device is also relatively more responsive to temperature, so for extreme conditions such as high temperature, the germanium silicon device also is difficult to be competent at.
Since high-temperature superconductor occurs, research for oxide material and film has obtained very big progress, the particularly appearance of novel high-accuracy masking technique such as laser molecular beam epitaxy and equipment, stratiform epitaxial growth multielement, dystectic oxide film material are become a reality (as document 2: Yang Guozhen, Lv Huibin, Chen Zhenghao etc., Chinese science A, 28 (1998) 260).Oxide electronics has also caused people's interest and concern (as document 3:H.Koiuma, N.Kanda, et al.Appl.Surf.Sci 109/110, (1997) 514), and methods such as utilization doping are explored the material of various performances.Because strontium titanates (SrTiO
3) fusing point height (degree more than 2000), Stability Analysis of Structures, its lattice constant matches with a lot of oxide materials, thereby is one of oxide material of everybody primary study.As using Nb, Ta partly substitutes SrTiO
3In Ti, partly substitute SrTiO with La
3In Sr etc., yet that obtain all is n type SrTiO
3, fail to obtain the SrTiO that the p type mixes always
3Material.(as document 4:A.Leitner, C.T.Rogerset al, Appl.Phys.Lett.72, (1998) 3065).We partly substitute Ti with Sb and obtain n type SrSb
xTi
1-xO
3(as document 5: Chinese patent, number of patent application: 99108056.4), partly substitute Ti and obtain p type SrIn with In
xTi
1-xO
3(as document 6: Chinese patent, number of patent application: 99123795.1), this has just laid good basis for research and preparation strontium titanates p-n junction.
It is simple to the purpose of this invention is to provide a kind of technology, the strontium titanate transistor of good stability.Provide p type and n type barium titanate film by doping, lamination forms crystal diode, transistor, many base stages transistor and multi-emitter transistor mutually again, can be widely used in all kinds of electronics circuits.
The object of the present invention is achieved like this:
Adopt the displacement doping method, use laser molecular beam epitaxy, pulsed laser deposition, magnetron sputtering, film-forming methods such as electron beam evaporation or molecular beam epitaxy, at monocrystal chip (as SrTiO
3, YSZ, LaAlO
3, Nb:SrTiO
3Deng) on prepare n type strontium titanates SrA
xTi
1-xO
3Or Sr
1-xLa
xTiO
3Thin-film material, wherein A is Nb or Sb; Prepare p type strontium titanates SrB
xTi
1-xO
3Thin-film material, wherein B is In or Mn.The span of all x is 0.005-0.5.One deck p type strontium titanates and one deck n type strontium titanates extension are in the same place, and the different strontium titanate film of this two-layer conduction type is just forming a p-n junction at the interface, and this p-n junction has just constituted the strontium titanate crystals diode; One deck p type strontium titanates and one deck n type strontium titanates and another layer p type strontium titanates extension are in the same place, and these three layers of strontium titanate films just form a p-n-p knot, and this p-n-p knot has just constituted p-n-p strontium titanates triode; One deck n type strontium titanates, one deck p type strontium titanates is in the same place with another layer n type strontium titanates extension, and these three layers of strontium titanate films have just formed a n-p-n knot, and this n-p-n knot has just constituted n-p-n strontium titanates triode.
In addition, also can be directly at the bottom of the p type strontium titanate base extension one deck n type strontium titanates or at the bottom of the n type strontium titanate base extension one deck p type strontium titanates, form the strontium titanates p-n junction, be used for preparing the strontium titanates diode; Or directly extension one deck n type strontium titanates and another layer p type strontium titanates at the bottom of the p type strontium titanate base, form strontium titanates p-n-p knot, be used for preparing barium titanate p-n-p triode; Or at the bottom of the n type strontium titanate base extension one deck p type strontium titanates and another layer n type strontium titanates, form strontium titanates n-p-n knot, be used for preparing strontium titanates n-p-n triode.
The germanium silicon transistor mainly is that the method with diffusion prepares p-n junction, and strontium titanate transistor is that the method with extension prepares p-n junction fully.They all are to control carrier concentration by doping content.The structure of strontium titanate transistor is complete and the germanium silicon transistor is similar, can design with needs as requested.Drawing and encapsulating of strontium titanate crystals pipe electrode can be used the existing device and the technology of germanium silicon transistor fully, adopts photoetching, corrosion or etching, electrode evaporation.As needs, with silicon transistor first deposit SiO before the etching lead-in wire
2The same, the upper surface extension dielectric isolation layer at strontium titanates p-n junction or p-n-p or n-p-n knot film is promptly etching collector electrode, behind the slot electrode of base stage and emitter, at its outer surface extension one deck SrTiO
3Or ZrO
2Or BaTiO
3Or LaAlO
3Or Al
2O
3Or SiO
2, and then etch and draw electrode hole, just just the same thereafter with germanium silicon transistor contact conductor, evaporated metal layer, photoetching, the etching lead-in wire, encapsulation also can be adopted the existing shell of germanium silicon transistor.
Strontium titanate transistor provided by the invention, adopt full epitaxy technique, therefore every layer bed thickness and carrier concentration are all more easy to control than the germanium silicon transistor, and the knot face is sharper, and strontium titanates fusing point height, good stability so strontium titanate transistor will become a kind of electronic device of extensive use, also can develop into the strontium titanates integrated circuit.
The present invention will be further described below in conjunction with drawings and Examples:
Fig. 1: SrNb
0.01Ti
0.99O
3/ SrIn
0.1Ti
0.9O
3The volt-ampere characteristic of diode
Embodiment 1,
Use laser molecular beam epitaxy, at the SrNb of the twin polishing of 5mm * 10mm * 0.5mm
0.01Ti
0.99O
3Substrate on, epitaxial growth thickness is the SrIn of 300nm
0.1Ti
0.9O
3Film cuts into epitaxial wafer the core pipe of 0.5mm * 0.5mm again, does electrode, preparation strontium titanate crystals diode in the upper and lower surface of each tube core with the burn-on copper wire of φ 80 μ of indium respectively.Fig. 1 is the volt-ampere characteristic that records with above-mentioned diode.As can be seen from Figure 1, its forward and reverse characteristic all is extraordinary.
Embodiment 2,
Press embodiment 1 and make, prepare with pulse laser sediment method.
Embodiment 3,
Use laser molecular beam epitaxy, at the SrNb of 3mm * 10mm * 0.5mm twin polishing
0.01Ti
0.99O
3In the substrate, the SrIn that first extension 100nm is thick
0.05Ti
0.95O
3Film, with the baffle plate that a silicon chip is done, the height of 0.5mm blocks 1/2nd epitaxial wafer surfaces above epitaxial wafer, and the part that is blocked is for drawing the usefulness of electrode./ 2nd SrIn that be not blocked again
0.05Ti
0.95O
3The SrNb that film surface extension 200nm is thick
0.1Ti
0.9O
3Film.Epitaxial wafer is cut into the rectangular of wide 0.5mm along the direction of vertical baffle line.Mix the substrate of niobium n type and be collector electrode C, mix indium p type thin layer and be base stage b, topmost mix niobium n type film to do emitter e, do three electrodes, preparation strontium titanates n-p-n transistor with the burn-on copper wire of φ 50 μ of indium.We have observed the voltage-current characteristic of triode.
Embodiment 4,
Use laser molecular beam epitaxy, at the SrTiO of φ 30mm * 0.5mm
3In the substrate, the SrIn that first extension 200nm is thick
0.05Ti
0.95O
3Film is made collector electrode, at SrIn
0.05Ti
0.95O
3Film on the SrNb of extension 150nm
0.05Ti
0.95O
3Film is done base stage, again at SrNb
0.05Ti
0.95O
3The SrIn of extension 200nm on the film
0.2Ti
0.8O
3Film is done emitter e.Method with photoetching and ion beam etching etches φ 20 μ-φ 30 μ and the φ 40 μ-semicircle base stage b of φ 50 μ and the electrode hole of collector electrode c respectively.The SrTiO of extension 400nm again on the epitaxial wafer surface of the good electrode hole of etching
3Do the insulation separator.At separator SrTiO
3Last photoetching and etch three electrode lead holes after, at the aluminium of surperficial evaporation 200nm, photoetching and etch contact conductor, the pressure welding lead-in wire, the encapsulation shell is prepared into strontium titanates p-n-p transistor.
Embodiment 5,
Do by embodiment 4, prepare film with magnetron sputtering method.
Embodiment 6,
Do by embodiment 4, deposited by electron beam evaporation prepares film.
Embodiment 7,
Do by embodiment 4, use SrMn
0.05Ti
0.95O
3Film is collector electrode c, uses SrMn
0.5Ti
0.5O
3Film is done emitter e.
Embodiment 8,
Do by embodiment 4, method with photoetching and ion beam etching, the electrode hole of three base stage b of etching on the annulus of φ 20 μ-φ 30 μ, the electrode hole of a collection of etching utmost point c on φ 40 μ-φ 50 μ and last concentric semicircles, barium titanate p-n-p transistor of three base stage b of preparation.
Embodiment 9,
Do by embodiment 4, method with photoetching and ion beam etching, the electrode hole of a base stage b of etching on the semicircular ring of φ 30 μ-φ 40 μ, the electrode hole of three emitter e of etching in φ 20 μ and last concentric circles, the electrode hole of a collection of etching utmost point c on φ 50 μ-φ 60 μ and last concentric semicircles, the barium titanate p-n-p transistor of three emitter e of preparation.
Embodiment 10,
Do by embodiment 4, prepare film with molecular beam epitaxial device.
Embodiment 11,
Do by embodiment 4, use SrSb
0.02Ti
0.98O
3Film is collector electrode c, uses SrIn
0.1Ti
0.9O
3Film is base stage b, uses SrSb
0.3Ti
0.7O
3Film is done emitter e.Preparation n-p-n strontium titanate crystals triode.
Embodiment 12,
Do by embodiment 9, use Sr
0.98La
0.02TiO
3Film is collector electrode c, uses Sr
0.7La
0.3TiO
3Film is done emitter e.
Claims (3)
1, a kind of strontium titanate transistor is characterized in that: at SrTiO
3Or Nb:SrTiO
3Monocrystal chip
Going up the p type that doping is formed is in the same place with n type strontium titanate film material laminate extension, form p-n junction, p-n-p knot, n-p-n knot or multijunction structure, promptly form strontium titanate crystals diode, transistor, many base stages transistor, multi-emitter transistor; N type titanium wherein
The acid strontium is SrA
xTi
1-xO
3Or Sr
1-xLa
xTiO
3, A is Nb or Sb; P type strontium titanates is
SrB
xTi
1-xO
3, B is In or Mn; The x span is 0.005-0.5.
2, a kind of strontium titanate transistor, it is characterized in that: with n type or p type strontium titanates is substrate, on at the bottom of the n type strontium titanate base extension one deck p type strontium titanates or at the bottom of the p type strontium titanate base extension one deck n type strontium titanate film, form p-n junction, preparation strontium titanate crystals diode; Extension one deck p type and one deck n type strontium titanate film at the bottom of the n type strontium titanate base form the n-p-n knot, preparation strontium titanates n-p-n transistor; Extension one deck n type and one deck p type strontium titanate film at the bottom of the p type strontium titanate base form the p-n-p knot, preparation strontium titanates p-n-p transistor; Wherein n type strontium titanates is SrA
xTi
1-xO
3Or Sr
1-xLa
xTiO
3, A is Nb or Sb; P type strontium titanates is SrB
xTi
1-xO
3, B is In or Mn; The x span is 0.005-0.5.
3, by the described strontium titanate transistor of claim 1, it is characterized in that: also at the upper surface extension dielectric isolation layer of strontium titanates p-n junction, p-n-p or n-p-n knot film, the oxide material that is used as described isolated insulation layer is SrTiO
3, BaTiO
3, ZrO
2, LaAlO
3, Al
2O
3Or SiO
2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00100366 CN1129965C (en) | 2000-01-19 | 2000-01-19 | Strontium titanate transistor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00100366 CN1129965C (en) | 2000-01-19 | 2000-01-19 | Strontium titanate transistor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1306308A CN1306308A (en) | 2001-08-01 |
| CN1129965C true CN1129965C (en) | 2003-12-03 |
Family
ID=4575412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 00100366 Expired - Fee Related CN1129965C (en) | 2000-01-19 | 2000-01-19 | Strontium titanate transistor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1129965C (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0423343D0 (en) * | 2004-10-21 | 2004-11-24 | Koninkl Philips Electronics Nv | Metal-oxide-semiconductor device |
| CN105976892B (en) * | 2016-03-22 | 2017-11-03 | 红河学院 | A kind of lanthanum indium codope strontium titanates conductor material and preparation method thereof |
-
2000
- 2000-01-19 CN CN 00100366 patent/CN1129965C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1306308A (en) | 2001-08-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0584777A1 (en) | Semiconductor device and process for producing the same | |
| CN101964364B (en) | Transistor device and manufacturing method thereof | |
| JPH03503946A (en) | high efficiency solar cells | |
| CN103811572B (en) | Electrooptical device and its manufacture method | |
| CN1165084C (en) | Semiconductor and strontium titanate p-n junction | |
| CN1142594C (en) | Perovskite Structure Oxide Composite Film Transistor | |
| CN101197396A (en) | Oxide p-i-n junction device and method for producing the same | |
| CN1129965C (en) | Strontium titanate transistor | |
| CN1129966C (en) | Barium titanate transistor | |
| CN1157799C (en) | Semiconductor and barium titanate P-n junction | |
| CN105977304A (en) | Transistor, production method thereof, array substrate, display panel, and display device | |
| CN1142595C (en) | semiconductor and lanthanum manganate p-n junction | |
| JPH11330569A (en) | Thermoelectric transducer and its manufacture | |
| JPH104223A (en) | Oxide superconducting josephson element | |
| CN101651150B (en) | Full oxide heterostructure field effect transistor | |
| CN100438114C (en) | Strontium titanate doping and lanthanum manganese oxygen doping giant reluctivity device and its preparing process | |
| CN2574226Y (en) | Doped strontium titanate and doped La-Mn-O huge magnetoresistance device | |
| JPS5828731B2 (en) | All silicon materials available. | |
| CN2570990Y (en) | Doped barium titanate and doped La-Mn-O giant magneto-resistor | |
| CN100438113C (en) | Barium titanate doping giant reluctivity device and its preparing process | |
| CN101055895A (en) | CaTiO3 structure La-Mn oxide/zinc oxide heterogeneous p-n junction and its making method | |
| CN216354216U (en) | Semiconductor device structure | |
| CN110620044A (en) | Manufacturing method of novel transistor | |
| CN117133836A (en) | Method for preparing Micro-LED chip by utilizing silicon on insulator, micro-LED chip and panel | |
| JPH01194315A (en) | Silicon carbide semiconductor element |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |