CN112987147B - Method for manufacturing hollow pyramid prism - Google Patents
Method for manufacturing hollow pyramid prism Download PDFInfo
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- CN112987147B CN112987147B CN202110215112.9A CN202110215112A CN112987147B CN 112987147 B CN112987147 B CN 112987147B CN 202110215112 A CN202110215112 A CN 202110215112A CN 112987147 B CN112987147 B CN 112987147B
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- plane mirror
- mirror assembly
- direction plane
- pyramid prism
- laser interferometer
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/001—Axicons, waxicons, reflaxicons
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
Abstract
The invention relates to the technical field of precision engineering measurement, and provides a method for gluing three plane reflectors to form a high-precision large-caliber hollow pyramid prism, which comprises the following steps: step 1) detecting a plane mirror bare mirror and a plane shape after framing; step 2) building a test optical system, and roughly adjusting the relation of the plane mirror components through a light spot imaging mode of a laser interferometer; step 3) finely adjusting the relation of the plane mirror assembly through a CornCube measuring module of the laser interferometer; step 4), carrying out plane mirror assembly dispensing; step 5) fine adjusting the relation of the plane mirror assembly again through a CornCube measuring module of the laser interferometer; step 6) monitoring the curing process of the optical structure adhesive; and finishing the manufacture of the hollow pyramid prism. The method has the advantages of real-time detection and direct evaluation, is simple to operate, has high precision, and is suitable for manufacturing the hollow pyramid prism with high precision and large caliber.
Description
Technical Field
The invention relates to the technical field of precision engineering measurement, in particular to a method for manufacturing a large-caliber high-precision hollow pyramid prism.
Background
The pyramid prism is composed of three planes which are vertical to each other, and due to the structural characteristics of the pyramid prism, the pyramid prism has any angle of incidence, and after being reflected by the pyramid prism, the emergent ray direction and the incident ray direction are always kept parallel, so that the measuring distance and the measuring precision are obviously improved, and the pyramid prism is widely used in laser distance measuring instruments and wavemeters. In the field of Fourier optical remote sensing, the pyramid prism is used for replacing a moving mirror, so that the influence of a motion mechanism on spectrum detection can be obviously reduced, and the spectrum detection precision is improved.
The manufacturing method of the pyramid prism mainly adopts an optical processing method at present, the pyramid prism is processed by grinding, polishing and cutting processes, and the defects of the working surface of the pyramid prism are easily caused in the cutting process, so that the quality of parts is influenced. The cube-corner prism distinguishes big-small bore cube-corner prism according to the size of incident surface bore, and the incident surface is greater than phi 40mm and is called big-bore cube-corner prism, and along with the increase of cube-corner prism bore, the processing degree of difficulty is bigger.
The optical processing method generally manufactures a solid pyramid prism, and due to the non-uniformity of prism materials, refractive index gradient is generated inside the prism, so that the emergent wavefront reflected by the pyramid prism is influenced.
Disclosure of Invention
The invention aims to provide a method for manufacturing a large-caliber and high-precision hollow angle lens, which is visual, efficient and stable and controllable in manufacturing process.
The technical scheme provided by the invention is as follows: a method for manufacturing a hollow pyramid prism comprises the following steps:
1) detecting the bare surface type of the plane mirror and the surface type after framing;
11) measuring an X-direction plane mirror profile by using a laser interferometer;
12) assembling the X-direction plane mirror and a plane mirror supporting frame matched with the X-direction plane mirror, and confirming that the X-direction plane mirror is stably fixed in the supporting frame to form an X-direction plane mirror assembly;
13) measuring the plane mirror shape of the X-direction plane after framing by using a laser interferometer;
14) according to the operations of the steps 11) -13), finishing the plane shape detection and assembly of the Y-direction plane mirror and the Z-direction plane mirror to form a Y-direction plane mirror assembly and a Z-direction plane mirror assembly;
2) building a test optical system, and roughly adjusting the relation of the plane mirror components through a light spot imaging mode of a laser interferometer;
respectively screwing an X-direction plane mirror assembly, a Y-direction plane mirror assembly and a Z-direction plane mirror assembly with an adjusting mechanism to preliminarily complete construction of the hollow pyramid prism, and jointly building a test system with a laser interferometer; fixing a Z-direction plane mirror assembly by using a light spot alignment mode of a laser interferometer, roughly adjusting the inclination, rotation and translation of an X-direction plane mirror assembly and a Y-direction plane mirror assembly, and enabling light spot point images reflected back by a pyramid prism to coincide; determining the gap between the X-direction plane mirror assembly, the Y-direction plane mirror assembly and the Z-direction plane mirror assembly to be 0.08-0.1 mm through a feeler gauge; repeatedly adjusting gaps and angles among the X-direction plane mirror assembly, the Y-direction plane mirror assembly and the Z-direction plane mirror assembly until the superposition of the light spot points is met and the gap between every two light spot points is 0.08-0.1 mm;
3) finely adjusting the relation of the plane mirror assembly through a CornCube measuring module of a laser interferometer;
converting the measurement pattern into a measurement pattern of a laser interferometer, observing an interference fringe image formed by measurement light passing through the hollow pyramid prism and reference light on a display, selecting a double-light-path measurement pattern, and further adjusting the inclination and rotation of the X-direction plane mirror assembly, the Y-direction plane mirror assembly and the Z-direction plane mirror assembly to gradually thin interference fringes; measuring the comprehensive angle deviation of the hollow pyramid prism through a CornCube measuring module of a laser interferometer, and the pairwise angle relationship of an X-direction plane mirror assembly, a Y-direction plane mirror assembly and a Z-direction plane mirror assembly, and further finely adjusting the inclination and rotation of the X-direction plane mirror assembly and the Y-direction plane mirror assembly according to the pairwise angle relationship to enable the comprehensive angle deviation of the hollow pyramid prism to be better than 1';
4) dispensing the plane mirror assembly;
positioning the X-direction plane mirror assembly, the Y-direction plane mirror assembly and the adjusting mechanism by using movable positioning pins; separating the X-direction plane mirror assembly, the Y-direction plane mirror assembly and the adjusting mechanism, covering a glue injection point target image on the Z-direction plane mirror assembly, injecting glue at the formulated position of the target by using an injection machine, wherein the size of a glue spot is phi 5mm, and then resetting and screwing the relation between the X-direction plane mirror assembly and the adjusting mechanism and the relation between the Y-direction plane mirror assembly and the adjusting mechanism by using positioning pins;
5) fine adjusting the relation of the plane mirror assembly through a CornCube measuring module of the laser interferometer;
finely adjusting the X-direction plane mirror assembly and the Y-direction plane mirror assembly according to the step 3) to ensure that the comprehensive angle deviation of the hollow pyramid prism is better than 1';
6) monitoring the curing process of the optical structure adhesive to complete the manufacture of the hollow pyramid prism;
waiting for the optical structure adhesive to be cured, measuring the change of the comprehensive angle deviation of the hollow pyramid prism in the curing process at the frequency of 1 time/30 min, if the change is found within 4h, then the X-direction plane mirror component and the Y-direction plane mirror component are finely adjusted, so that the comprehensive wave front difference is better than 1', the comprehensive angle deviation of the hollow pyramid prism is detected within 4h-6h at the frequency of 1/30 min, if the deviation of the comprehensive angle is within 0.5 ″, standing to wait for the optical structural adhesive to be completely cured, if the variation of the comprehensive angle deviation exceeds 0.5', the bonding fails, the optical structure adhesive is cleaned by using a special solution, the steps 2) to 5) are repeated until the step 6) is implemented, in the 6h curing process of the optical structure adhesive, the deviation of the synthetic angle of the hollow pyramid prism is changed within 0.5 ", then standing and waiting for the optical structure adhesive to be completely cured, and realizing that the synthetic angle deviation of the pyramid prism is better than 2'.
The laser interferometer is a 4-inch laser interferometer and an 18-inch laser interferometer of ZYGO, comprises a CornCube module, and uses a plane wave standard head in the test process.
The surface type RMS of the X-direction plane mirror, the Y-direction plane mirror and the Z-direction plane mirror is required to be controlled within 19nm, and the RMS variation quantity before and after framing is controlled within 2 nm.
The adjusting mechanism is adjusted by using a screw micrometer head, realizes angle continuous adjustment and has a locking function.
The optical structure adhesive adopts 2216B/A optical structure adhesive of 3M company.
The glue injection machine can inject glue by controlling the time to control the glue output amount, so that the glue output amount is uniform and controllable.
The single-side gap between the movable positioning pin and the corresponding pin hole on the adjusting mechanism is 0.01mm, and the single-side gap between the pin hole corresponding to the X-direction plane mirror assembly and the pin hole corresponding to the Y-direction plane mirror assembly is 4 mm; after the step 3) is finished, filling optical structure glue between the movable positioning pin and the pin holes corresponding to the X-direction plane mirror assembly and the Y-direction plane mirror assembly, wherein the grade of the optical structure glue is SE-14-80; before glue injection, the movable positioning pin is coated with silicone grease, so that adhesion of the optical structure glue after curing is prevented.
In the implementation process of the steps 1) to 6), the temperature change is controlled within 1 ℃.
The outgoing angle of the light measured by the laser interferometer and the Z-direction plane mirror assembly of the hollow pyramid prism form 35.26 degrees +/-1 degree, so that the hollow pyramid prism is always kept in a horizontal state in the adjusting and curing processes, and the influence of gravity on the structural stability is eliminated.
The invention has the beneficial effects that:
1) in the prior art, an auto-collimation detection method is adopted, and the detection and the processing are separated, so that errors are inevitably introduced in the process of guiding the processing of the pyramid prism by a detection result, and the precision of the pyramid prism is reduced; the invention adopts a laser interferometer measuring means, can intuitively and accurately measure the comprehensive angle deviation and the plane mirror pairwise angle deviation, has the measuring precision superior to 0.2', synchronizes the manufacturing process and the detection process of the hollow pyramid prism, and can eliminate error iteration in the detection and processing processes;
2) in the prior art, an optical processing method is adopted, and due to the processing technology, the processing difficulty is multiplied when the volume of the pyramid prism is larger, so that the aperture of a common pyramid prism is smaller than phi 40 mm; the invention adopts the method of plane mirror component adjustment and bonding, the precision of the corner cube prism is influenced by the product to a small extent, therefore, the corner cube prism with large caliber can be manufactured;
3) in the prior art, an optical processing method is adopted, a solid pyramid prism is generally manufactured, and the application range of the pyramid prism is limited due to the influence of a refractive index in the use process; the invention adopts plane mirrors to bond to finish the manufacture of the hollow pyramid prism, and has wider application range due to the adoption of mirror reflection;
4) in the prior art, an optical processing method is adopted, and a pyramid prism with the comprehensive angle deviation superior to 2' is difficult to process due to the process problem; the invention adopts the laser interferometer for real-time detection, the detection precision is superior to 0.2', the manufacture of the high-precision pyramid prism can be realized, and the use requirements of high-precision instruments and equipment, such as the manufacture of Fourier spectrometers in the aerospace field, are met.
Drawings
FIG. 1 is a diagram of a plane mirror bare mirror and a plane mirror assembly test light path;
FIG. 2 is a schematic structural view of the flat mirror assembly after being screwed with the adjusting mechanism;
FIG. 3 is a schematic diagram of a test optical system;
fig. 4 is a schematic view of the use of a removable locating pin.
Detailed Description
As shown in fig. 1 to 4, this embodiment provides a method for manufacturing a hollow cube-corner prism, which includes the following steps:
1) detecting the bare mirror surface type of the plane mirror and the surface type after framing:
11) measuring the surface shape of an X-direction plane mirror 2 by using a laser interferometer 1;
12) assembling the X-direction plane mirror 2 and a plane mirror support frame matched with the X-direction plane mirror 2, and confirming that the X-direction plane mirror 2 is stably fixed in the support frame to form an X-direction plane mirror assembly 5;
13) measuring the plane shape of the X-direction plane mirror 2 after framing by using a laser interferometer 1;
14) according to the operations of the steps 11) -13), finishing the surface type detection and assembly of the Y-direction plane mirror 3 and the Z-direction plane mirror 4 to form a Y-direction plane mirror assembly 6 and a Z-direction plane mirror assembly 7;
the test light path is shown in fig. 1, and the X-direction plane mirror assembly 5, the Y-direction plane mirror assembly 6 and the Z-direction plane mirror assembly 7 are shown in fig. 2.
2) Building a test optical system, and roughly adjusting the relationship of the plane mirror components through a light spot imaging mode of a laser interferometer:
the X-direction plane mirror assembly 5, the Y-direction plane mirror assembly 6 and the Z-direction plane mirror assembly 7 are respectively in threaded connection with an adjusting mechanism 8, the construction of the hollow pyramid prism is preliminarily completed, and the hollow pyramid prism and the laser interferometer 1 are combined to build a test system; fixing a Z-direction plane mirror assembly 7 by using a light spot alignment mode of a laser interferometer 1, roughly adjusting the inclination, rotation and translation of an X-direction plane mirror assembly 5 and a Y-direction plane mirror assembly 6, and enabling light spot point images reflected back by a pyramid prism to coincide; the clearance between the X-direction plane mirror assembly 5, the Y-direction plane mirror assembly 6 and the Z-direction plane mirror assembly 7 is determined to be 0.08 mm-0.1 mm through the feeler gauge; the gaps and the angles among the X-direction plane mirror assembly 5, the Y-direction plane mirror assembly 6 and the Z-direction plane mirror assembly 7 are repeatedly adjusted until the superposition of light spot points is met and the gap between every two light spot points is 0.08 mm-0.1 mm; the test optical system is shown in fig. 3.
And 3) finely adjusting the relation of the plane mirror assembly through a CornCube measuring module of the laser interferometer:
the measurement mode is converted into the measurement mode of the laser interferometer 1, an interference fringe image formed by the measurement light passing through the hollow pyramid prism and the reference light can be observed on a display, a double-optical-path measurement mode is selected, and the inclination and rotation of the X-direction plane mirror assembly 5, the Y-direction plane mirror assembly 6 and the Z-direction plane mirror assembly 7 are further adjusted, so that interference fringes are gradually thinned; measuring the comprehensive angle deviation of the hollow pyramid prism and the angle relation of the X-direction plane mirror assembly 5, the Y-direction plane mirror assembly 6 and the Z-direction plane mirror assembly 7 through a CornCube measuring module of the laser interferometer 1, and further finely adjusting the inclination and rotation of the X-direction plane mirror assembly 5 and the Y-direction plane mirror assembly 6 according to the angle relation of every two, so that the comprehensive angle deviation of the hollow pyramid prism is better than 1';
step 4), carrying out plane mirror assembly dispensing:
the X-direction plane mirror assembly 5, the Y-direction plane mirror assembly 6 and the adjusting mechanism 8 are positioned by using a movable positioning pin 9; separating the X-direction plane mirror assembly 5, the Y-direction plane mirror assembly 6 and the adjusting mechanism 8, covering a glue injection point target diagram on the Z-direction plane mirror assembly 7, injecting glue into an optical structure glue 10 at a target set position through a glue injection machine, wherein the size of a glue spot is phi 5mm, and then resetting and screwing the relation between the X-direction plane mirror assembly 5 and the Y-direction plane mirror assembly 6 and the adjusting mechanism 8 through positioning pins;
and 5) fine adjusting the relation of the plane mirror assembly through a CornCube measuring module of the laser interferometer again:
and (4) finely adjusting the X-direction plane mirror assembly 5 and the Y-direction plane mirror assembly 6 according to the step 3) to ensure that the comprehensive angle deviation of the hollow pyramid prism is better than 1'.
Step 6), monitoring the curing process of the optical structure adhesive to complete the manufacture of the hollow pyramid prism:
waiting for the optical structure adhesive 10 to cure, measuring the change of the comprehensive angle deviation of the hollow pyramid prism in the curing process at the frequency of 1 time/30 min, if the change is found within 4h, finely adjusting the X-direction plane mirror assembly 5 and the Y-direction plane mirror assembly 6 to enable the comprehensive wave front difference to be better than 1 ', detecting the comprehensive angle deviation of the hollow pyramid prism within 4h-6h at the frequency of 1 time/30 min, if the comprehensive angle deviation change is within 0.5', standing for the optical structure adhesive 10 to be completely cured, if the comprehensive angle deviation change exceeds 0.5 ', failing to bond, cleaning the optical structure adhesive 10 by using a special solution, repeating the steps 2) -5) until the optical structure adhesive 10 is cured within 6h in the implementation process of the step 6), and the comprehensive angle deviation change of the hollow pyramid prism is within 0.5', standing for the optical structure adhesive 10 to be completely cured, the synthetic angle deviation of the pyramid prism is better than 2'.
The laser interferometer 1 is a 4-inch and 18-inch laser interferometer of ZYGO, comprises a CornCube module, and uses a plane wave standard head in the test process.
The X-direction plane mirror bare mirror 2, the Y-direction plane mirror bare mirror 3, the Z-direction plane mirror bare mirror 4 and the X-direction plane mirror assembly 5, the Y-direction plane mirror assembly 6 and the Z-direction plane mirror assembly 7 formed after framing have the surface type RMS requirement controlled within 19nm, and the RMS variation amount before and after framing is controlled within 2 nm.
The adjusting mechanism 8 is adjusted by using a micrometer screw head, can realize continuous angle adjustment and has a locking function.
The optical structure adhesive 10 is 2216B/A optical structure adhesive of 3M company.
The glue injection machine can inject glue by controlling the time to control the glue output amount, so that the glue output amount is uniform and controllable.
The unilateral clearance of the corresponding pin hole on the movable positioning pin 9 and the adjusting mechanism 8 is 0.01mm, the unilateral clearance of the corresponding pin hole on the plane mirror assembly 5, 6 is 4mm, after the pyramid prism is adjusted, before glue dispensing, the optical structure glue 11 is filled between the movable positioning pin 9 and the corresponding pin hole on the plane mirror assembly 5, 6, the number of the optical structure glue is SE-14-80, in order to prevent the positioning pin from being adhered with the optical structure glue, the movable positioning pin is coated with silicone grease before glue dispensing, and adhesion after the optical structure glue is cured can be prevented.
In the implementation process of the steps 1) to 6), the temperature change is controlled within 1 ℃.
Theoretically, the outgoing angle of the light measured by the laser interferometer 1 and the Z-direction plane mirror assembly 7 of the hollow pyramid prism form 35.26 degrees +/-1 degree, so that the hollow pyramid prism is always kept in a horizontal state in the adjusting and curing process, and the influence of gravity on the structural stability is eliminated.
The above examples are merely illustrative of the present invention and should not be construed as limiting the scope of the present invention, and any design similar or equivalent to the present invention is within the scope of the present invention.
Claims (9)
1. The method for manufacturing the hollow pyramid prism is characterized by comprising the following steps of:
1) detecting the bare surface type of the plane mirror and the surface type after framing;
11) measuring the surface shape of an X-direction plane mirror (2) by using a laser interferometer (1);
12) assembling the X-direction plane mirror (2) and a plane mirror support frame matched with the X-direction plane mirror (2), and confirming that the X-direction plane mirror (2) is stably fixed in the support frame to form an X-direction plane mirror assembly (5);
13) measuring the surface shape of the X-direction plane mirror (2) after framing by using a laser interferometer (1);
14) according to the operations of the steps 11) -13), finishing surface type detection and assembly of the Y-direction plane mirror (3) and the Z-direction plane mirror (4) to form a Y-direction plane mirror assembly (6) and a Z-direction plane mirror assembly (7);
2) building a test optical system, and roughly adjusting the relation of the plane mirror components through a light spot imaging mode of a laser interferometer;
the X-direction plane mirror assembly (5), the Y-direction plane mirror assembly (6) and the Z-direction plane mirror assembly (7) are respectively in threaded connection with an adjusting mechanism (8), the construction of the hollow pyramid prism is preliminarily completed, and the hollow pyramid prism and the laser interferometer (1) are combined to build a test system; fixing a Z-direction plane mirror assembly (7) by using a light spot alignment mode of a laser interferometer (1), and roughly adjusting the inclination, rotation and translation of the X-direction plane mirror assembly (5) and the Y-direction plane mirror assembly (6) to ensure that light spot images reflected back by the pyramid prism coincide; the clearance between the X-direction plane mirror assembly (5), the Y-direction plane mirror assembly (6) and the Z-direction plane mirror assembly (7) is determined to be 0.08 mm-0.1 mm through the feeler gauge; the gaps and the angles among the X-direction plane mirror assembly (5), the Y-direction plane mirror assembly (6) and the Z-direction plane mirror assembly (7) are repeatedly adjusted until the superposition of light spot points and the gap between every two components are met to be 0.08-0.1 mm;
3) finely adjusting the relation of the plane mirror assembly through a CornCube measuring module of a laser interferometer;
the measurement mode is converted into the measurement mode of a laser interferometer (1), an interference fringe image formed by the measurement light passing through the hollow pyramid prism and the reference light is observed on a display, a double-optical-path measurement mode is selected, and the inclination and the rotation of the X-direction plane mirror assembly (5), the Y-direction plane mirror assembly (6) and the Z-direction plane mirror assembly (7) are adjusted, so that the interference fringes are gradually thinned; measuring the comprehensive angle deviation of the hollow pyramid prism through a CornCube measuring module of a laser interferometer (1), and the angle relations of an X-direction plane mirror assembly (5), a Y-direction plane mirror assembly (6) and a Z-direction plane mirror assembly (7) in pairs, and finely adjusting the inclination and rotation of the X-direction plane mirror assembly (5) and the Y-direction plane mirror assembly (6) according to the angle relations in pairs so that the comprehensive angle deviation of the hollow pyramid prism is better than 1';
4) dispensing the plane mirror assembly;
the X-direction plane mirror assembly (5), the Y-direction plane mirror assembly (6) and the adjusting mechanism (8) are positioned by using a movable positioning pin (9); separating the X-direction plane mirror assembly (5), the Y-direction plane mirror assembly (6) and the adjusting mechanism (8), covering a glue injection point target diagram on the Z-direction plane mirror assembly (7), injecting glue into a first optical structure glue (10) at a target set position through a glue injection machine, wherein the glue spot size is phi 5mm, and then resetting and screwing the relation between the X-direction plane mirror assembly (5), the Y-direction plane mirror assembly (6) and the adjusting mechanism (8) through positioning pins;
5) fine adjusting the relation of the plane mirror assembly through a CornCube measuring module of the laser interferometer;
finely adjusting the X-direction plane mirror assembly (5) and the Y-direction plane mirror assembly (6) according to the step 3) to enable the comprehensive angle deviation of the hollow pyramid prism to be better than 1';
6) monitoring the curing process of the optical structure adhesive to complete the manufacture of the hollow pyramid prism;
waiting for the first optical structure adhesive (10) to be cured, measuring the change of the comprehensive angle deviation of the hollow pyramid prism in the curing process at the frequency of 1 time/30 min, if the change is found within 4h, finely adjusting the X-direction plane mirror assembly (5) and the Y-direction plane mirror assembly (6), enabling the comprehensive wave front difference to be better than 1, detecting the comprehensive angle deviation of the hollow pyramid prism at the frequency of 1 time/30 min within 4h-6h, if the comprehensive angle deviation change is within 0.5 ', standing for the first optical structure adhesive (10) to be completely cured, if the comprehensive angle deviation change exceeds 0.5 ', failing in bonding, cleaning the first optical structure adhesive (10) by using a solution, repeating the steps 2) -5 until the comprehensive angle deviation of the hollow pyramid prism is within 0.5 ' during the curing process of the first optical structure adhesive (10) within 6h in the implementation process of the step 6), then standing and waiting for the first optical structure adhesive (10) to be completely cured to realize that the synthetic angle deviation of the pyramid prism is better than 2'.
2. The method as claimed in claim 1, wherein the laser interferometer (1) is a 4-inch 18-inch laser interferometer selected from the group consisting of ZYGO, CornCube module, and a plane wave standard head is used during the test.
3. The method for manufacturing the hollow cube-corner prism according to claim 1, wherein the surface type RMS of the X-direction plane mirror (2), the Y-direction plane mirror (3) and the Z-direction plane mirror (4) is required to be controlled within 19nm, and the RMS change amount before and after framing is controlled within 2 nm.
4. The method for manufacturing the hollow cube-corner prism as claimed in claim 1, wherein the adjusting mechanism (8) is adjusted by a micrometer screw head to realize continuous angle adjustment and has a locking function.
5. The method of claim 1, wherein the first optical structure adhesive (10) is 2216B/A optical structure adhesive available from 3M company.
6. The method for manufacturing the hollow cube-corner prism as claimed in claim 1, wherein the glue injection machine injects glue by controlling the glue output amount by controlling time, so as to ensure uniform and controllable glue output amount.
7. The method for manufacturing the hollow cube-corner prism according to claim 1, wherein the single-sided clearance of the pin hole corresponding to the movable positioning pin (9) and the adjusting mechanism (8) is 0.01mm, and the single-sided clearance of the pin hole corresponding to the X-direction plane mirror assembly (5) and the Y-direction plane mirror assembly (6) is 4 mm; after the step 3) is finished, filling a second optical structure adhesive (11) between the movable positioning pin (9) and the pin holes corresponding to the X-direction plane mirror assembly (5) and the Y-direction plane mirror assembly (6), wherein the brand of the second optical structure adhesive (11) is SE-14-80; before glue injection, the movable positioning pin is coated with silicone grease, so that adhesion of the second optical structure glue (11) after curing is prevented.
8. The method as claimed in claim 1, wherein the temperature variation is controlled within 1 ℃ during the steps 1) to 6).
9. The method as claimed in claim 1, wherein the angle of the outgoing light from the laser interferometer (1) is 35.26 ° ± 1 ° to the Z-plane mirror assembly (7) of the hollow pyramid prism, so as to ensure that the hollow pyramid prism is always kept horizontal during the adjustment and curing process, thereby eliminating the influence of gravity on the structural stability.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008139731A (en) * | 2006-12-05 | 2008-06-19 | Epson Toyocom Corp | Method for manufacturing right-angled triangular prism |
| CN101566459A (en) * | 2009-05-27 | 2009-10-28 | 上海微电子装备有限公司 | Dual-frequency laser interferometer |
| CN104199133A (en) * | 2014-09-28 | 2014-12-10 | 江苏普世祥光电技术有限公司 | Pyramid prism processing technology |
| CN109856716A (en) * | 2019-03-27 | 2019-06-07 | 武汉优光科技有限责任公司 | A kind of processing, shaping and the modulator approach of hollow retroreflector |
-
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- 2021-02-25 CN CN202110215112.9A patent/CN112987147B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008139731A (en) * | 2006-12-05 | 2008-06-19 | Epson Toyocom Corp | Method for manufacturing right-angled triangular prism |
| CN101566459A (en) * | 2009-05-27 | 2009-10-28 | 上海微电子装备有限公司 | Dual-frequency laser interferometer |
| CN104199133A (en) * | 2014-09-28 | 2014-12-10 | 江苏普世祥光电技术有限公司 | Pyramid prism processing technology |
| CN109856716A (en) * | 2019-03-27 | 2019-06-07 | 武汉优光科技有限责任公司 | A kind of processing, shaping and the modulator approach of hollow retroreflector |
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