CN210773918U - Non-contact lens center thickness measuring device - Google Patents
Non-contact lens center thickness measuring device Download PDFInfo
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- CN210773918U CN210773918U CN201921853153.5U CN201921853153U CN210773918U CN 210773918 U CN210773918 U CN 210773918U CN 201921853153 U CN201921853153 U CN 201921853153U CN 210773918 U CN210773918 U CN 210773918U
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Abstract
The utility model provides a non-contact lens center thickness measuring device, including the first adjustment platform that bears the standard bobble, the second adjustment platform that bears the upper optical flat plate, the third adjustment platform that bears the lens to be measured, the fourth adjustment platform that bears the lower optical flat plate, mirror surface locator and lens centering appearance, first adjustment platform, second adjustment platform, third adjustment platform and fourth adjustment platform all include eccentric adjustment mechanism and slope adjustment mechanism, and connect from top to bottom through a mechanical support frock; the locator measuring head of mirror surface locator and the centering appearance measuring head of lens centering appearance set up in the top of first adjustment platform and can switch each other. The utility model discloses with the help of lens centering appearance and mirror surface locater, just can carry out non-contact, the quick measurement of high accuracy to the central thickness of lens that awaits measuring under the condition that need not to know the refracting index of lens that awaits measuring, can be used to the measurement of plane, sphere and aspheric surface optical element center thickness.
Description
Technical Field
The utility model relates to an optical measurement technical field, concretely relates to non-contact lens center thickness measurement device.
Background
In the field of optics, the measurement of the thickness of the center of a lens is of great significance. The central thickness of the lens is an important parameter in the optical system, and the quality of the processing of the central thickness has a great influence on the imaging quality of the optical system. Particularly, for lenses in high-performance optical systems such as an objective lens of a lithography machine and an aerospace camera, the axial gap, the radial offset and the optical axis deflection angle of the lenses need to be precisely adjusted according to the curvature radius, the refractive index and the central thickness of the lenses in the lenses. Taking the objective lens of the lithography machine as an example, the aberration of the lithography objective lens can be caused by the deviation of the central thickness of each single lens, and the imaging quality of the objective lens is affected. The precision of the central thickness of the lens is generally several micrometers, and a high-precision instrument is also required for measurement and inspection, so that the central thickness of the lens is one of the items of inspection and strict control of optical parts.
Currently, lens center thickness measurement techniques can be divided into contact measurement and non-contact measurement.
In contact measurement, the measurement is generally performed using tools such as a micrometer and a height gauge. Lens center thickness measurements are typically made using micrometers, height gauges, and the like. In the measuring process, a protective layer is needed to be padded, and the influence of factors such as a vertex finding extreme value, a measuring force, a lens weight and the like is added, so that the measuring accuracy is about 0.01-0.02 mm generally. During measurement, the accuracy of the position of the center point of the lens directly affects the measurement precision, so an inspector needs to move the lens to be measured back and forth during measurement to search the highest point (convex mirror) or the lowest point (concave mirror), so the measurement speed is low, the error is large, the material of the currently used high-transmittance optical material is soft, the surface type requirement is high, and the measurement head moves on the surface of the lens during measurement to scratch the surface of the lens easily. For the coated lens, a contact type measuring method cannot be adopted to ensure the quality of the film layer.
Non-contact measurements are often imagewise, coplanar capacitive, white light confocal and interferometric. With the continuous development of science and technology, the requirements of non-contact measurement on precision, anti-interference capability and convenience are higher and higher, and a convenient and simple method for measuring the center thickness of the lens is urgently needed.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a non-contact lens center thickness measurement device carries out non-contact, the high-accuracy rapid survey to the center thickness of the lens that awaits measuring under the unknown condition of the refracting index of the lens that awaits measuring.
The utility model provides a non-contact lens center thickness measurement device, include: the lens aligning device comprises a first adjusting platform for bearing a standard ball, a second adjusting platform for bearing an upper optical flat plate, a third adjusting platform for bearing a lens to be measured, a fourth adjusting platform for bearing a lower optical flat plate, a mirror surface positioning instrument and a lens centering instrument, wherein the first adjusting platform, the second adjusting platform, the third adjusting platform and the fourth adjusting platform respectively comprise an eccentric adjusting mechanism and an inclined adjusting mechanism and are connected from top to bottom through a mechanical supporting tool; the locater measuring head of the mirror surface locater and the centering instrument measuring head of the lens centering instrument are arranged above the first adjusting platform and can be switched mutually.
Optionally, before the central thickness of the lens is measured, the optical axes of the mirror surface locator and the lens centering instrument are adjusted to be coaxial.
Optionally, the first adjusting platform, the second adjusting platform, the third adjusting platform and the fourth adjusting platform are arranged in parallel.
Optionally, the eccentricity of the standard small ball and the lens to be measured is adjusted to be within the eccentricity index range by adjusting the eccentricity adjusting mechanisms of the first adjusting platform and the third adjusting platform.
Optionally, the tilt of the upper optical flat plate, the lens to be measured, and the lower optical flat plate is adjusted to a tilt index range by adjusting tilt adjusting mechanisms of the second adjusting platform, the third adjusting platform, and the fourth adjusting platform.
Optionally, the tilt index range is 0 μ rad to 25 μ rad, and the eccentricity index range is 0 μm to 2 μm.
Optionally, light emitted by the position finder measuring head passes through the upper optical flat plate, the lens to be measured and the lower optical flat plate can be reflected back to the position finder measuring head by the upper optical flat plate, the lens to be measured and the upper optical flat plate respectively.
Optionally, the mirror locator is used to measure a distance L1 between the lower surface of the upper optical flat plate and the upper surface of the lower optical flat plate, a distance L2 between the lower surface of the upper optical flat plate and the center of the upper surface of the lens to be measured, and a distance L3 between the center of the lower surface of the lens to be measured and the lower surface of the lower optical flat plate.
Optionally, the central thickness H of the lens to be tested is L1-L2-L3.
Optionally, the lens to be measured is a plane, a spherical surface or an aspheric surface.
Optionally, the standard bead, the upper optical flat plate, and the lower optical flat plate are all made of transparent materials.
Optionally, the transparent material is fused quartz, K9 or microcrystal.
To sum up, the utility model provides a non-contact lens center thickness measuring device just can carry out non-contact, the quick measurement of high accuracy to the center thickness of the lens that awaits measuring under the condition that need not to know the refracting index of the lens that awaits measuring with the help of lens centering appearance and mirror surface locater, can be used to the measurement of plane, sphere and aspheric surface optical element center thickness.
Drawings
Fig. 1 is a schematic structural diagram of a non-contact lens center thickness measuring device according to an embodiment of the present invention;
fig. 2 is another schematic structural diagram of a non-contact lens center thickness measuring apparatus according to an embodiment of the present invention;
fig. 3 is a flowchart of a method for measuring a center thickness of a non-contact lens according to an embodiment of the present invention.
Description of reference numerals:
101-standard pellets; 102-upper optical flat plate; 103-a lens to be tested; 104-lower optical plate; 105-a centering meter measuring head; 106-a locator measurement head; 110-a first conditioning stage; 120-a second conditioning stage; 130-a third adjustment stage; 140-a fourth adjustment stage; and 111-mechanically supporting the tool.
Detailed Description
In order to make the contents of the present invention clearer and more understandable, the contents of the present invention will be further explained with reference to the drawings attached to the specification. Of course, the invention is not limited to this specific embodiment, and general alternatives known to those skilled in the art are also covered by the scope of the invention.
Secondly, the utility model discloses utilize the schematic diagram to carry out detailed expression, when detailing the utility model discloses the example, for the convenience of explanation, the schematic diagram is not according to general proportion local amplification, should not regard this as the utility model's injecion.
Fig. 1 is the utility model provides a non-contact lens center thickness measurement device's schematic structure diagram, as shown in fig. 1, the utility model provides a non-contact lens center thickness measurement device, include: the lens aligner comprises a first adjusting platform 110 for bearing a standard small ball 101, a second adjusting platform 120 for bearing an upper optical flat plate 102, a third adjusting platform 130 for bearing a lens 103 to be measured, a fourth adjusting platform 140 for bearing a lower optical flat plate 104, a mirror surface locator and a lens centering instrument, wherein the first adjusting platform 110, the second adjusting platform 120, the third adjusting platform 130 and the fourth adjusting platform 140 comprise an eccentric adjusting mechanism and an inclined adjusting mechanism and are connected from top to bottom through a mechanical support tool 111; the aligner measuring head 105 of the mirror aligner and the centering head 106 of the lens centering apparatus are disposed above the first adjusting platform 110 and can be switched with each other.
The lens 103 to be measured is an optical element such as a plane, a spherical surface or an aspheric surface, and the standard small sphere 101, the upper optical flat plate 102 and the lower optical flat plate 104 can be made of transparent materials, such as fused quartz, K9 or microcrystal. The upper optical plate 102 and the lower optical plate 104 can be flat crystals, such as setting the upper optical plate 102 to be a first flat crystal and the lower optical plate 104 to be a second flat crystal.
The first adjusting platform 110, the second adjusting platform 120, the third adjusting platform 130 and the fourth adjusting platform 140 are arranged in parallel, and the optical axes of the mirror surface positioning instrument and the lens centering instrument are coaxial. The optical axes of the mirror surface positioning instrument and the lens centering instrument can be adjusted through the following steps, so that the optical axes of the mirror surface positioning instrument and the lens centering instrument are coaxially adjusted.
Specifically, in step S1, the lower optical flat plate 104 is placed on the fourth adjusting stage 140, the fourth adjusting stage 140 may be a carrying stage of the lens centering apparatus, the measuring head of the centering apparatus is adjusted, the lower optical flat plate 104 is measured by using a collimator of the lens centering apparatus, and the tilt of the lower optical flat plate 104 is adjusted by the eccentricity adjusting mechanism of the fourth adjusting stage 140, so that the tilt of the lower optical flat plate 104 is less than 25 μ rad.
Step S2, the centering device measuring head 105 is rotated, the centering device measuring head 106 is switched to, and the inclination of the collimating head in the centering device measuring head 106 is adjusted, so that the returned optical signal is strongest. The collimated light beam is emitted to the lower optical plate 104, reflected by the lower optical plate 104, and then returns to the collimating head. For example, by adjusting the collimation head in two directions (horizontal and vertical), the optical signal gain tends to increase and then decrease, and the optical signals in the two directions are adjusted to the maximum value.
Step S3, rotating the aligner measuring head 106, switching to the centering instrument measuring head 105, placing the standard small ball 101 on the first adjusting table 110, and measuring the eccentricity of the standard small ball 101. The eccentricity of the standard small ball 101 is adjusted to be less than 2 μm by adjusting the eccentricity adjusting mechanism of the first adjusting table 110. The eccentricity of the standard bead 101 can be measured, for example, by mounting an objective lens having a focal length of 100 on the centering head 105.
And step S4, synchronizing step S2, rotating the measuring head 105 of the centering instrument, switching to the measuring head 106 of the positioning instrument, and adjusting the inclination of a collimation head in the measuring head 106 of the positioning instrument to enable the returned optical signal to be strongest.
Step S5, removing the standard small ball 101, measuring the tilt of the lower optical flat plate 104 again, and if the tilt of the lower optical flat plate 104 is less than 25 μ rad, ending the adjustment; if the measurement of the tilt of the lower optical flat plate 104 is greater than or equal to 25 μ rad, the procedure returns to step S1 for repeated adjustment.
By the adjustment, the optical axis of the lens centering instrument and the optical axis of the mirror surface positioning instrument are adjusted to be coaxial. In addition, the optical axes of the mirror aligner and the lens centering apparatus may be further adjusted by placing the upper optical plate 102 on the second adjustment stage 120 using the above steps S1 to S5.
After the optical axis adjustment of the mirror surface positioning instrument and the lens centering instrument is completed, the eccentricity and the inclination of the collimating head of the mirror surface positioning instrument are strictly forbidden to be adjusted in the subsequent operation of the non-contact lens center thickness measuring method.
Fig. 3 is a flowchart of a method for measuring a center thickness of a non-contact lens according to this embodiment, and as shown in fig. 3, the method for measuring a center thickness of a non-contact lens according to this embodiment includes the following steps:
step S01: adjusting the fourth adjustment stage 140 to make the tilt of the lower optical flat plate 104 within the index range;
step S02: adjusting the third adjusting platform 130 to control the eccentricity and the inclination of the lens 103 to be measured within an index range;
step S03: adjusting the second adjusting platform to enable the inclination of the upper optical flat plate to be within an index range;
step S04: measuring a distance L2 between the lower surface of the upper optical flat plate 102 and the center of the upper surface of the lens 103 to be measured and a distance L3 between the center of the lower surface of the lens 103 to be measured and the lower surface of the lower optical flat plate 104; and
step S05: the distance L1 between the lower surface of the upper optical flat plate and the upper surface of the lower optical flat plate was measured.
Specifically, step S01 is executed to place the lower optical flat plate 104 on the fourth adjusting platform 140, where the fourth adjusting platform 140 may be a carrying platform of a lens centering instrument, adjust the tilt adjusting mechanism of the fourth adjusting platform 140, and directly measure by using a measuring head of the lens centering instrument, so as to control the tilt of the lower optical flat plate 104 within an index range. The index range is less than 25 μ rad.
Next, step S02 is executed to mount the lens 103 to be measured on the third adjusting platform 130, adjust the eccentricity adjusting mechanism and the tilt adjusting mechanism of the third adjusting platform 130, and measure the eccentricity and the tilt of the lens 103 to be measured by the lens centering instrument, so that the eccentricity and the tilt of the lens 103 to be measured are within the index range. The eccentricity index range is 0-2 μm, and the inclination index range is 0-25 μ rad.
Next, step S03 is executed to place the upper optical flat plate 102 on the second adjustment platform 120, and adjust the tilt adjustment mechanism of the second adjustment platform 120 to control the tilt of the upper optical flat plate 102 within the index range. The index range is less than 25 μ rad.
Next, step S04 is executed to rotate the centering head, switch to the positioning head, and measure the distance L2 between the lower surface of the upper optical plate 102 and the center of the upper surface of the lens 103 to be measured and the distance L3 between the lower surface of the lens 103 to be measured and the lower surface of the lower optical plate 104 through the positioning head.
Next, step S05 is executed to detach the lens 103 to be measured separately, and measure the distance L1 between the lower surface of the upper optical flat plate 102 and the upper surface of the lower optical flat plate 104 by the aligner measuring head, so as to obtain the lens center thickness H, i.e., H is L1-L2-L3.
Before the optical axes of the mirror surface positioning instrument and the lens centering instrument are adjusted to be coaxial, the upper optical plate 102, the lens 103 to be measured, and the lower optical plate 104 are adjusted to be parallel to each other by the tilt adjusting mechanisms of the second adjusting platform 120, the third adjusting platform 130, and the fourth adjusting platform 140. And light emitted by the locator measuring head can be reflected back to the locator measuring head by the upper optical flat plate 102, the lens 103 to be measured and the lower optical flat plate 104 respectively when passing through the upper optical flat plate 102, the lens 103 to be measured and the upper optical flat plate 104. During the adjustment of the optical axes of the lens aligner and the lens centering apparatus, the tilt of the lower optical flat plate 104 (or the upper optical flat plate 102) is within the index range, and the influence on the measurement of the center thickness of the subsequent lens by L1, L2, or L3 is negligible.
It should be noted that, since the optical axes of the lens centering device and the mirror surface positioning device need to be adjusted to be coaxial, the upper optical plate 102 and the lower optical plate 104 are set to be flat crystals. After the optical axes of the lens centering instrument and the mirror surface positioning instrument are adjusted to be coaxial, when the lens center thickness of the lens 103 to be measured is measured in a non-contact manner, a spherical mirror may be used instead of a flat crystal, as shown in fig. 2, the specific measurement method is the same as the flat crystal measurement, specifically refer to step S01 to step S05, and details thereof are not repeated.
To sum up, the utility model provides a non-contact lens center thickness measuring device, which comprises a first adjusting platform for bearing a standard ball, a second adjusting platform for bearing an upper optical flat plate, a third adjusting platform for bearing a lens to be measured, a fourth adjusting platform for bearing a lower optical flat plate, a mirror surface positioning instrument and a lens centering instrument, wherein the first adjusting platform, the second adjusting platform, the third adjusting platform and the fourth adjusting platform all comprise an eccentric adjusting mechanism and an inclined adjusting mechanism and are connected from top to bottom through a mechanical supporting tool; the locater measuring head of the mirror surface locater and the centering instrument measuring head of the lens centering instrument are arranged above the first adjusting platform and can be switched mutually. The utility model provides a non-contact lens center thickness measurement device with the help of lens centering appearance and mirror surface locater, just can carry out non-contact, the quick measurement of high accuracy to the center thickness of the lens that awaits measuring under the condition that need not to know the refracting index of the lens that awaits measuring, can be used to the measurement of plane, sphere and aspheric surface optical element center thickness.
The above description is only for the preferred embodiment of the present invention and is not intended to limit the scope of the present invention, and any modification and modification made by those skilled in the art according to the above disclosure are all within the scope of the claims.
Claims (12)
1. A non-contact lens center thickness measuring device, comprising: the lens aligning device comprises a first adjusting platform for bearing a standard ball, a second adjusting platform for bearing an upper optical flat plate, a third adjusting platform for bearing a lens to be measured, a fourth adjusting platform for bearing a lower optical flat plate, a mirror surface positioning instrument and a lens centering instrument, wherein the first adjusting platform, the second adjusting platform, the third adjusting platform and the fourth adjusting platform respectively comprise an eccentric adjusting mechanism and an inclined adjusting mechanism and are connected from top to bottom through a mechanical supporting tool; the locater measuring head of the mirror surface locater and the centering instrument measuring head of the lens centering instrument are arranged above the first adjusting platform and can be switched mutually.
2. The apparatus of claim 1, wherein the optical axes of the lens aligner and the lens centralizer are aligned prior to measuring the center thickness of the lens.
3. The apparatus of claim 2, wherein the first, second, third and fourth adjustment stages are disposed in parallel.
4. The apparatus of claim 3, wherein the eccentricity of the standard small ball and the lens to be measured is adjusted to be within the eccentricity index range by adjusting the eccentricity adjusting mechanisms of the first adjusting platform and the third adjusting platform.
5. The apparatus of claim 4, wherein the tilt of the upper optical flat plate, the lens to be measured, and the lower optical flat plate is adjusted to a tilt index range by adjusting the tilt adjusting mechanisms of the second adjusting platform, the third adjusting platform, and the fourth adjusting platform.
6. The apparatus of claim 5, wherein light from the aligner measuring head passes through the upper plate, the lens under test and the lower plate and is reflected by the upper plate, the lens under test and the upper plate back to the aligner measuring head.
7. The apparatus of claim 6, wherein the distance L1 between the lower surface of the upper optical flat plate and the upper surface of the lower optical flat plate, the distance L2 between the lower surface of the upper optical flat plate and the center of the upper surface of the lens to be measured, and the distance L3 between the center of the lower surface of the lens to be measured and the lower surface of the lower optical flat plate are measured by the mirror aligner.
8. The apparatus of claim 7, wherein the lens under test has a center thickness H-L1-L2-L3.
9. The non-contact lens center thickness measuring device according to claim 5, wherein the tilt index range is 0 μ rad to 25 μ rad, and the decentration index range is 0 μm to 2 μm.
10. The non-contact lens center thickness measuring device according to any one of claims 1 to 8, wherein the lens under test is a plane, a spherical surface or an aspherical surface.
11. The non-contact lens center thickness measuring device according to any one of claims 1-8, wherein the standard ball, the upper optical flat and the lower optical flat are made of transparent material.
12. The non-contact lens center thickness measuring device according to claim 11, wherein the transparent material is fused silica, K9, or a microcrystal.
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| CN201921853153.5U CN210773918U (en) | 2019-10-30 | 2019-10-30 | Non-contact lens center thickness measuring device |
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| CN201921853153.5U CN210773918U (en) | 2019-10-30 | 2019-10-30 | Non-contact lens center thickness measuring device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112284319A (en) * | 2020-10-29 | 2021-01-29 | 中国航空工业集团公司洛阳电光设备研究所 | Tool and method for measuring central thickness of meniscus lens with non-coincident vertex and gravity center |
| CN112710267A (en) * | 2020-11-23 | 2021-04-27 | 中国工程物理研究院激光聚变研究中心 | Detection equipment for thickness deviation of square spherical lens |
| CN114577125A (en) * | 2022-04-08 | 2022-06-03 | 上海树突精密仪器有限公司 | Non-contact optical lens center thickness measuring method and measuring device |
| CN117146678B (en) * | 2023-10-27 | 2024-01-23 | 四川华体照明科技股份有限公司 | LED light source module lens check out test set |
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2019
- 2019-10-30 CN CN201921853153.5U patent/CN210773918U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112284319A (en) * | 2020-10-29 | 2021-01-29 | 中国航空工业集团公司洛阳电光设备研究所 | Tool and method for measuring central thickness of meniscus lens with non-coincident vertex and gravity center |
| CN112710267A (en) * | 2020-11-23 | 2021-04-27 | 中国工程物理研究院激光聚变研究中心 | Detection equipment for thickness deviation of square spherical lens |
| CN114577125A (en) * | 2022-04-08 | 2022-06-03 | 上海树突精密仪器有限公司 | Non-contact optical lens center thickness measuring method and measuring device |
| CN114577125B (en) * | 2022-04-08 | 2024-01-19 | 上海树突精密仪器有限公司 | Non-contact optical lens center thickness measuring method and measuring device |
| CN117146678B (en) * | 2023-10-27 | 2024-01-23 | 四川华体照明科技股份有限公司 | LED light source module lens check out test set |
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