CN112964668B - Substance concentration detection device and method based on resonator - Google Patents
Substance concentration detection device and method based on resonator Download PDFInfo
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- CN112964668B CN112964668B CN202110138043.6A CN202110138043A CN112964668B CN 112964668 B CN112964668 B CN 112964668B CN 202110138043 A CN202110138043 A CN 202110138043A CN 112964668 B CN112964668 B CN 112964668B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/4133—Refractometers, e.g. differential
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
Abstract
The present disclosure provides a substance concentration detection apparatus and method based on a resonator, wherein the apparatus includes: the device comprises a polarization beam splitting unit, a light beam resonance unit, an object placing unit and a measuring unit, wherein the light beam resonance unit comprises a first resonator and a second resonator; the polarization beam splitting unit is used for splitting an input light beam into a first polarization light beam and a second polarization light beam; the first resonator is used for coupling the first wavelength light beam in the received first polarization light beam into the first resonator; the second resonator is used for coupling the second wavelength light beam in the received second polarization light beam into the second resonator; the object placing unit is used for placing an object to be tested; the measuring unit is used for determining a first drift parameter corresponding to the first resonator and a second drift parameter corresponding to the second resonator; according to the method and the device for detecting the concentration of the substance to be detected, the concentration of the substance to be detected is determined according to the first drift parameter and the second drift parameter, the large-range and high-sensitivity measurement of the optical signal is realized through the resonators in the two modes, and the accuracy of substance concentration detection is improved.
Description
Technical Field
The disclosure relates to the technical field of substance concentration detection, in particular to a substance concentration detection device and method based on a resonator.
Background
The resonator is a hot research point in the field of substance concentration detection sensors, and the principle of the resonator is that the substance concentration in an object to be detected can cause the change of the optical wave transmission property in the resonator (shown as the change of the resonance wavelength caused by the change of the effective refractive index of the resonator), namely, a substance concentration signal in a sample is converted into an optical signal change.
The silicon optical sensor based on the resonator has the advantages of compact structure and high sensitivity, and can be made into an array form, thereby realizing multifunctional detection and improving the detection efficiency. However, in practical applications, the existing silicon optical sensor cannot simultaneously satisfy the large-range and high-sensitivity measurement of optical signals, so that the detection of the substance concentration is inaccurate.
Disclosure of Invention
The invention aims to provide a substance concentration detection device and method based on a resonator, so as to realize large-range and high-sensitivity measurement of optical signals and improve the accuracy of substance concentration detection.
An embodiment of a first aspect of the present disclosure provides a substance concentration detection apparatus based on a resonator, including:
the device comprises a polarization beam splitting unit, a light beam resonance unit, an object placing unit and a measuring unit, wherein the light beam resonance unit comprises two resonators which are a first resonator and a second resonator respectively;
the polarization beam splitting unit is used for splitting an input light beam into a first polarization light beam and a second polarization light beam, transmitting the first polarization light beam to the input end of the first resonator, and transmitting the second polarization light beam to the input end of the second resonator;
the first resonator is used for coupling a first wavelength light beam in the received first polarization light beam into the first resonator and outputting the rest light beam in the first polarization light beam to the measuring unit from the output end of the first resonator;
the second resonator is used for coupling the received second wavelength light beam in the second polarization light beam into the second resonator and outputting the rest light beam in the second polarization light beam to the measuring unit from the output end of the second resonator;
the object placing unit is arranged in the resonance area of the light beam resonance unit and is used for placing an object to be tested;
the measuring unit is used for determining a first drift parameter of a Free Spectral Range (FSR) corresponding to the first wavelength light beam according to the input light beam and the rest light beam in the first polarized light beam; determining a second drift parameter of a Free Spectral Range (FSR) corresponding to the second wavelength light beam according to the input light beam and the rest light beams in the second polarized light beam; and determining the concentration of the object to be measured according to the first drift parameter and the second drift parameter.
According to some embodiments of the present disclosure, the first polarized light beam and the second polarized light beam are different modes of polarized light beams; wherein the first resonator matches a mode of the first polarized optical beam and the second resonator matches a mode of the second polarized optical beam.
In some embodiments according to the present disclosure, the first polarized light beam is in TM mode or TE mode and the second polarized light beam is in TE mode or TM mode.
According to some embodiments of the present disclosure, the first drift parameter and the second drift parameter are both composed of an integer multiple FSR and a fractional multiple FSR;
the measurement unit is specifically configured to: combining integral multiple FSR in the drift parameters corresponding to the TE mode and decimal multiple FSR in the drift parameters corresponding to the TM mode into third drift parameters; and determining the concentration of the object to be detected according to the third drift parameter.
According to some embodiments of the present disclosure, the first resonator is of the type of a microring resonator or a microdisc resonator; the second resonator is of a micro-ring resonator or a micro-disk resonator.
According to some embodiments of the present disclosure, the polarization beam splitting unit is a polarization beam splitter.
According to some embodiments of the present disclosure, the polarization beam splitting unit is connected to an input end of the first resonator through a first optical waveguide; and the polarization beam splitting unit is connected with the input end of the second resonator through a second optical waveguide.
In an embodiment of the second aspect of the present disclosure, there is provided a substance concentration detection method based on the resonator-based substance concentration detection apparatus described in the first aspect, the method including:
in the object placing unit placing an object to be tested;
the polarization beam splitting unit splits an input light beam into a first polarization light beam and a second polarization light beam, transmits the first polarization light beam to the input end of the first resonator, and transmits the second polarization light beam to the input end of the second resonator;
the first resonator couples the first wavelength light beam in the received first polarization light beam into the first resonator and outputs the rest light beam in the first polarization light beam to the measuring unit from the output end of the first resonator;
the second resonator couples the second wavelength light beam in the received second polarization light beam into the second resonator and outputs the rest light beam in the second polarization light beam to the measuring unit from the output end of the second resonator;
the measuring unit determines a first drift parameter of a Free Spectral Range (FSR) corresponding to the first wavelength light beam according to the input light beam and the rest light beam in the first polarized light beam; determining a second drift parameter of the free spectral range FSR corresponding to the second wavelength light beam according to the input light beam and the rest light beam in the second polarized light beam; and determining the concentration of the substance to be detected according to the first drift parameter and the second drift parameter.
According to some embodiments of the present disclosure, the first polarized light beam is a TM mode and the second polarized light beam is a TE mode.
According to some embodiments of the present disclosure, the first drift parameter and the second drift parameter are both composed of an integer multiple FSR and a fractional multiple FSR;
the determining the concentration of the substance to be detected according to the first drift parameter and the second drift parameter comprises the following steps:
combining integral multiple FSR in the drift parameters corresponding to the TE mode and decimal multiple FSR in the drift parameters corresponding to the TM mode into third drift parameters; and determining the concentration of the object to be detected according to the third drift parameter.
This disclosure compares advantage with prior art and lies in:
the utility model provides a substance concentration detection device and method based on a resonator, wherein a light beam resonance unit comprises a first resonator and a second resonator; a polarization beam splitting unit for splitting an input beam into a first polarized beam and a second polarized beam; a first resonator for coupling the first wavelength beam of the received first polarized beam into the first resonator; a second resonator for coupling the received second wavelength beam of the second polarized beam into the second resonator; the object placing unit is used for placing an object to be tested; the measuring unit is used for determining a first drift parameter corresponding to the first resonator and a second drift parameter corresponding to the second resonator; the concentration of the object to be detected is determined according to the first drift parameter and the second drift parameter, compared with the prior art, the large-range and high-sensitivity measurement of the optical signal is realized through the resonators in the two modes, and the accuracy of detecting the concentration of the substance is improved.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the disclosure. Also, like reference numerals are used to refer to like parts throughout the drawings. In the drawings:
FIG. 1 illustrates a schematic diagram of a resonator-based species concentration detection apparatus provided by the present disclosure;
fig. 2 shows an optical path diagram of an example of two micro-ring resonators provided by the present disclosure.
Detailed Description
Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. It should be understood that the description is illustrative only and is not intended to limit the scope of the present disclosure. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present disclosure.
Various structural schematics according to embodiments of the present disclosure are shown in the figures. The figures are not drawn to scale, wherein certain details are exaggerated and possibly omitted for clarity of presentation. The shapes of various regions, layers, and relative sizes and positional relationships therebetween shown in the drawings are merely exemplary, and deviations may occur in practice due to manufacturing tolerances or technical limitations, and a person skilled in the art may additionally design regions/layers having different shapes, sizes, relative positions, as actually required.
In the context of the present disclosure, when a layer/element is referred to as being "on" another layer/element, it can be directly on the other layer/element or intervening layers/elements may be present. In addition, if a layer/element is "on" another layer/element in one orientation, then that layer/element may be "under" the other layer/element when the orientation is reversed.
The existing sensor based on the micro-ring resonator is used for measuring the concentration of an object to be measured, when the concentration of the object to be measured changes, a resonance peak of the micro-ring resonator can drift, a drift amount delta lambda = (m + alpha) FSR, m is an integer, alpha is a decimal between 0 and 1, and FSR (Free Spectral Range) is an important characteristic parameter for representing an optical cavity. When the FSR of the resonant cavity is constant, the measurement range R of the resonant cavity is in inverse proportion to the detection sensitivity S, i.e., S · R = FSR, which results in that the high sensitivity and the large measurement range of the existing sensor based on the micro-ring resonator are not compatible.
In order to solve the above-mentioned problems in the prior art, embodiments of the present disclosure provide a substance concentration detection apparatus and a concentration detection method based on a resonator, which are described below with reference to the accompanying drawings.
FIG. 1 illustrates a schematic diagram of a resonator-based species concentration detection apparatus provided by the present disclosure; as shown in fig. 1, the substance concentration detection apparatus provided by the present disclosure includes:
a polarization beam splitting unit 100, a beam resonance unit 200, a placement unit (not shown), and a measurement unit 300, the beam resonance unit 200 including two resonators, a first resonator 210 and a second resonator 220, respectively;
the polarization beam splitting unit 100 is connected to the input end of the first resonator 210 through a first optical waveguide; the polarization beam splitting unit 100 is connected to an input end of the second resonator 220 through a second optical waveguide.
Wherein the polarization beam splitting unit 100 is configured to split an input light beam into a first polarized light beam and a second polarized light beam, transmit the first polarized light beam to an input end of the first resonator 210, and transmit the second polarized light beam to an input end of the second resonator 220;
specifically, the first polarized light beam and the second polarized light beam are polarized light beams in different modes; wherein the first resonator 210 matches the mode of the first polarized beam and the second resonator 220 matches the mode of the second polarized beam.
Preferably, the polarization beam splitter unit 100 is a polarization beam splitter, and may be a Y-type polarization beam splitter.
Preferably, the first polarized light beam is in a TE mode, and the second polarized light beam is in a TM mode; or, the first polarized light beam is in a TM mode, and the second polarized light beam is in a TE mode.
It should be understood that the light beam in the embodiments of the present application may also be referred to as an optical signal.
A first resonator 210 for coupling the first wavelength beam of the received first polarized beam into the first resonator and outputting the remaining beam of the first polarized beam from the output end of the first resonator to the measurement unit 300;
a second resonator 220 for coupling the second wavelength beam of the received second polarized beam into the second resonator and outputting the remaining beam of the second polarized beam from the output end of the second resonator to the measurement unit 300;
specifically, the type of the first resonator 210 may be a micro-ring resonator or a micro-disk resonator; the second resonator 220 may be of the type of a microring resonator or a microdisc resonator.
It should be understood that when the edge of the micro-ring resonator and other devices (e.g., straight waveguides) are close to each other in space until the distance between the two devices reaches the same order of magnitude (e.g., micrometer order) or less (e.g., nanometer order) as the wavelength, the optical fields in the two devices interact, which is called coupling.
It should be understood that the resonators described in this application include resonant cavities and straight waveguides.
The object placing unit is arranged in the resonance area of the light beam resonance unit and used for placing an object to be tested; the analyte may be a biochemical liquid with a certain concentration, and may also be other kinds of liquids, which is not limited in this application.
In this application, the determinand of placing in the thing unit can cause the regional refractive index of syntonizer perception to change, and when the regional refractive index of syntonizer perception changed, the resonant frequency of resonant cavity also shifted thereupon, through measuring and the skew change of resonance wavelength peak value in the analysis reflectance spectrum, can obtain the determinand concentration that the refractive index change corresponds.
A measuring unit 300 for determining a first drift parameter of the free spectral range FSR corresponding to the first wavelength beam from the input light beam and the remaining light beam of the first polarized light beam; determining a second drift parameter of the free spectral range FSR corresponding to the second wavelength light beam according to the input light beam and the rest light beams in the second polarized light beam; and determining the concentration of the object to be detected according to the first drift parameter and the second drift parameter.
Specifically, the change of the concentration of the object to be measured may cause the resonance peak of the resonator to drift, the drift amount Δ λ = (m + α) FSR, m is an integer, α is a decimal between 0 and 1, and the drift parameter corresponds to the values of m and α.
Therefore, the first drift parameter and the second drift parameter are both composed of an integral multiple FSR and a fractional multiple FSR.
The measurement unit 300 is specifically configured to: combining integral multiple FSR in the drift parameters corresponding to the TE mode and decimal multiple FSR in the drift parameters corresponding to the TM mode into third drift parameters; and determining the concentration of the object to be detected according to the third drift parameter. Specifically, the drift amount is calculated according to the third drift parameter and the FSR, and the concentration of the substance to be measured is determined according to the obtained drift amount.
As shown in fig. 2, two micro-ring resonators are used for example, TE and TM modes are input simultaneously, and the TE and TM modes are separated and transmitted to the two micro-ring resonators by the polarization beam splitting unit 100, and the two micro-ring resonators simultaneously measure the drift amount Δ λ caused by the same object to be measured;
in the conventional optical waveguide, the sensitivity of the TM mode is much higher than that of the TE mode, and the drift amount Δ λ = (m + α) α in the FSR can be accurately measured using the TM mode, and m of the FSR can be measured using the TE mode.
In the substance concentration detection device based on the resonator, the detection sensitivity is determined by the resonator in which the TM mode is located, the measurement range is determined by the resonator in which the TE mode is located, the measurement range is just like a clock, the TM mode is regarded as a minute hand, the TE mode is regarded as an hour hand, and the two modes are matched with each other to realize the measurement of the drift amount delta lambda in a large range and high precision. And the concentration of the object to be measured can be accurately determined according to the obtained drift amount delta lambda.
This disclosure compares advantage with prior art and lies in:
compared with the prior art, the substance concentration detection device based on the resonator has the advantages that large-range and high-sensitivity measurement of optical signals is realized through the two modes of resonators, and the substance concentration detection accuracy is improved.
The present disclosure also provides a substance concentration detection method based on the resonator-based substance concentration detection apparatus in the above embodiment, including the following steps:
placing an object to be tested in the object placing unit;
the polarization beam splitting unit splits an input light beam into a first polarization light beam and a second polarization light beam, transmits the first polarization light beam to the input end of the first resonator, and transmits the second polarization light beam to the input end of the second resonator;
the first resonator couples the first wavelength light beam in the received first polarization light beam into the first resonator and outputs the rest light beam in the first polarization light beam to the measuring unit from the output end of the first resonator;
the second resonator couples the second wavelength light beam in the received second polarization light beam into the second resonator and outputs the rest light beam in the second polarization light beam to the measuring unit from the output end of the second resonator;
the measuring unit determines a first drift parameter of a Free Spectral Range (FSR) corresponding to the first wavelength light beam according to the input light beam and the rest light beam in the first polarized light beam; determining a second drift parameter of the free spectral range FSR corresponding to the second wavelength light beam according to the input light beam and the rest light beams in the second polarized light beam; and determining the concentration of the substance to be detected according to the first drift parameter and the second drift parameter.
Preferably, the first polarized light beam is in a TM mode, and the second polarized light beam is in a TE mode.
Preferably, the first drift parameter and the second drift parameter are both composed of integral multiple FSR and decimal multiple FSR;
the determining the concentration of the substance to be detected according to the first drift parameter and the second drift parameter comprises the following steps:
combining integral multiple FSR in the drift parameters corresponding to the TE mode and decimal multiple FSR in the drift parameters corresponding to the TM mode into third drift parameters; and determining the concentration of the object to be detected according to the third drift parameter.
This disclosure compares advantage with prior art and lies in:
compared with the prior art, the substance concentration detection method provided by the disclosure realizes large-range and high-sensitivity measurement of optical signals through the resonators in two modes, and improves the accuracy of substance concentration detection.
One skilled in the art can also devise methods that are not exactly the same as those described above in order to form the same structure. In addition, although the embodiments are described separately above, this does not mean that the measures in the embodiments cannot be used in advantageous combination.
The embodiments of the present disclosure are described above. However, these examples are for illustrative purposes only and are not intended to limit the scope of the present disclosure. The scope of the disclosure is defined by the appended claims and equivalents thereof. Various alternatives and modifications can be devised by those skilled in the art without departing from the scope of the present disclosure, and such alternatives and modifications are intended to be within the scope of the present disclosure.
Claims (5)
1. A resonator-based substance concentration detection apparatus, comprising: the device comprises a polarization beam splitting unit, a light beam resonance unit, an object placing unit and a measuring unit, wherein the light beam resonance unit comprises two resonators which are a first resonator and a second resonator respectively;
the polarization beam splitting unit is used for splitting an input light beam into a first polarization light beam and a second polarization light beam, transmitting the first polarization light beam to the input end of the first resonator, and transmitting the second polarization light beam to the input end of the second resonator;
the first resonator is used for coupling a first wavelength light beam in the received first polarization light beam into the first resonator and outputting the rest light beam in the first polarization light beam to the measuring unit from the output end of the first resonator;
the second resonator is used for coupling the received second wavelength light beam in the second polarization light beam into the second resonator and outputting the rest light beam in the second polarization light beam to the measuring unit from the output end of the second resonator;
the object placing unit is arranged in a resonance area of the light beam resonance unit and is used for placing an object to be tested;
the measuring unit is used for determining a first drift parameter of a Free Spectral Range (FSR) corresponding to the first wavelength light beam according to the input light beam and the rest light beam in the first polarized light beam; determining a second drift parameter of a Free Spectral Range (FSR) corresponding to the second wavelength light beam according to the input light beam and the rest light beams in the second polarized light beam; determining the concentration of the object to be detected according to the first drift parameter and the second drift parameter;
the first polarized light beam and the second polarized light beam are polarized light beams with different modes; wherein the first resonator matches a mode of the first polarized optical beam and the second resonator matches a mode of the second polarized optical beam;
the first polarized light beam is in a TM mode or a TE mode, and the second polarized light beam is in the TE mode or the TM mode;
the first drift parameter and the second drift parameter are both composed of integral multiple FSR and decimal multiple FSR;
the measurement unit is specifically configured to: combining integral multiple FSR in the drift parameters corresponding to the TE mode and decimal multiple FSR in the drift parameters corresponding to the TM mode into third drift parameters; and determining the concentration of the object to be detected according to the third drift parameter.
2. The resonator-based substance concentration detecting device according to claim 1, wherein the first resonator is of a type of a micro-ring resonator or a micro-disk resonator; the second resonator is a micro-ring resonator or a micro-disk resonator.
3. The resonator-based substance concentration detecting device according to claim 1, wherein the polarization beam splitting unit is a polarization beam splitter.
4. The resonator-based substance concentration detecting device according to claim 1, wherein the polarization beam splitting unit is connected to an input end of the first resonator through a first optical waveguide; and the polarization beam splitting unit is connected with the input end of the second resonator through a second optical waveguide.
5. A method for detecting a concentration of a substance based on the resonator as claimed in any one of claims 1-4, the method comprising:
placing an object to be tested in the object placing unit;
the polarization beam splitting unit splits an input light beam into a first polarization light beam and a second polarization light beam, transmits the first polarization light beam to the input end of the first resonator, and transmits the second polarization light beam to the input end of the second resonator;
the first resonator couples the first wavelength light beam in the received first polarization light beam into the first resonator and outputs the rest light beam in the first polarization light beam to the measuring unit from the output end of the first resonator;
the second resonator couples the second wavelength light beam in the received second polarization light beam into the second resonator and outputs the rest light beam in the second polarization light beam to the measuring unit from the output end of the second resonator;
the measuring unit determines a first drift parameter of a Free Spectral Range (FSR) corresponding to the first wavelength light beam according to the input light beam and the rest light beam in the first polarized light beam; determining a second drift parameter of the free spectral range FSR corresponding to the second wavelength light beam according to the input light beam and the rest light beams in the second polarized light beam; determining the concentration of the object to be detected according to the first drift parameter and the second drift parameter;
the first polarized light beam is in a TM mode, and the second polarized light beam is in a TE mode;
the first drift parameter and the second drift parameter are both composed of integral multiple FSR and decimal multiple FSR;
the determining the concentration of the substance to be detected according to the first drift parameter and the second drift parameter comprises the following steps:
combining integral multiple FSR in the drift parameters corresponding to the TE mode and decimal multiple FSR in the drift parameters corresponding to the TM mode into third drift parameters; and determining the concentration of the object to be detected according to the third drift parameter.
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