CN112938484A

CN112938484A - Self-adaptive high-precision vacuum chuck

Info

Publication number: CN112938484A
Application number: CN202110357673.2A
Authority: CN
Inventors: 汪孝军; 梅文辉; 王建新; 李贵鸿
Original assignee: Zhongshan Aiscent Technologies Co ltd
Current assignee: Zhongshan Aiscent Technologies Co ltd
Priority date: 2021-04-01
Filing date: 2021-04-01
Publication date: 2021-06-11

Abstract

The invention discloses a self-adaptive high-precision vacuum chuck, which is characterized in that: including the sucking disc main part and set up air flue and a plurality of vacuum suction hole in the sucking disc main part, this vacuum suction hole includes gas pocket one and gas pocket two, gas pocket one link up with the adsorption plane of sucking disc main part, and the downthehole sealed valve member and the elasticity piece that resets of vacuum suction, this sealed valve member can block up gas pocket one and gas pocket two through the extrusion that the elasticity piece resets, and sealed valve member has part to expose outside gas pocket one and make gas pocket one link up with the external world through with adsorbate surface contact with sealed valve member jack-up, gas pocket two and air flue intercommunication. This vacuum chuck, the substrate of any size can all carry out fine absorption on the sucking disc to do not need other operations.

Description

Self-adaptive high-precision vacuum chuck

Technical Field

The invention relates to a laser direct-writing exposure machine, in particular to a self-adaptive high-precision vacuum chuck for grabbing a circuit board on the laser direct-writing exposure machine.

Background

When the laser direct writing exposure machine is used for exposure, the sizes of the base materials to be exposed are different, and the sizes of most of the base materials are smaller than the size of a vacuum chuck of the exposure machine, so that part of suction holes on the vacuum chuck of the exposure machine are exposed, and the vacuum suction force of the base materials is insufficient. The conventional treatment method is that in an area where a vacuum chuck is not covered by a substrate, a mylar film or other thin plates are utilized to block suction holes on the chuck, so that all the suction holes on the vacuum chuck can be covered, the vacuum suction of the vacuum chuck is improved, the substrate is better attached to the vacuum chuck, the exposure yield is ensured, if the substrate is not blocked by the suction holes in the area where the substrate is not covered, the vacuum degree of the vacuum chuck cannot meet the requirement, and because part of the substrate to be exposed has the condition of four-side warping, the condition of poor exposure in the area where the substrate is warped can be caused, and the product yield is influenced.

Disclosure of Invention

In order to overcome the defects of the prior art, the invention provides a self-adaptive high-precision vacuum chuck for a laser direct-writing exposure machine.

The technical scheme adopted by the invention for solving the technical problems is as follows:

the utility model provides a self-adaptation high accuracy vacuum chuck which characterized in that: the vacuum suction hole comprises a first air hole and a second air hole, the first air hole is communicated with an adsorption surface of the sucker body, a sealing valve and an elastic reset piece are arranged in the vacuum suction hole, the sealing valve can be used for plugging the first air hole and the second air hole through extrusion of the elastic reset piece, part of the sealing valve is exposed out of the first air hole and jacks up the sealing valve through surface contact with an adsorbed object, so that the first air hole is communicated with the second air hole, and the second air hole is communicated with the air passage.

The sucking disc main part is including setting up sucking disc groove in the sucking disc main part and closing the apron in sucking disc groove, setting up the pneumatic valve unit in sucking disc groove, the pneumatic valve unit includes the valve body, the hole is the inner chamber of valve body is inhaled in the vacuum, gas pocket one and gas pocket two set up on the valve body, sealed valve member and elasticity reset the piece and are located the valve body, be equipped with the through-hole on the apron, pneumatic valve unit tip is arranged in the through-hole and with the sealed cooperation of through-hole, just gas pocket one also is arranged in the through-hole, the space between the pneumatic valve unit constitutes the air flue.

The sucker main body is provided with a screw hole, and the valve body is provided with a thread matched with the mounting screw hole.

The sealing valve is a ball.

The vacuum suction hole comprises a hole top surface and a hole side surface, the first air hole is located on the hole top surface, and the second air hole is located on the hole side surface.

The elastic resetting piece comprises a first compression spring and a second compression spring, and the first compression spring can reset the sealing valve piece to block the first air hole; the second compression spring can enable the sealing valve to reset so as to seal the second air hole.

The invention has the beneficial effects that: any size of substrate can be well adsorbed on the sucker without other operations, which is as follows:

1. the self-adaptive high-precision vacuum chuck can be compatible with exposure base materials of various sizes, and other objects do not need to be additionally used on the chuck to block vacuum suction holes except for the base material covering, so that the universality of the chuck is improved, and the production efficiency is improved;

2. the self-adaptive high-precision vacuum chuck can not cause the substrate to slightly fluctuate up and down due to the change of the internal pressure formed by vacuum, and can avoid poor exposure caused by substrate shaking.

Drawings

The invention is further illustrated with reference to the following figures and examples.

FIG. 1 is an overall structural view of the present invention;

FIG. 2 is an enlarged structural view of the portion A of FIG. 1;

FIG. 3 is a cross-sectional structural view of the present invention;

FIG. 4 is a schematic view of the gas valve unit in a sealed state;

fig. 5 is a schematic view of the gas valve unit in an open state.

Detailed Description

Referring to fig. 1 to 5, the invention discloses a self-adaptive high-precision vacuum chuck, which comprises a chuck main body 1, an air passage 2 and a plurality of vacuum suction holes 3, wherein the air passage 2 and the vacuum suction holes 3 are arranged in the chuck main body 1, the vacuum suction holes 3 are square, the air holes 3 comprise an air hole I4 and an air hole II 5, the air hole II 5 is communicated with the air passage 2, the air hole I4 is communicated with the suction surface of the chuck main body 1, a sealing valve 6 and an elastic reset piece are arranged in the vacuum suction holes 3, the sealing valve 6 is preferably a sphere in structure, the elastic reset piece is preferably a compression spring, the air passage 2 is connected with a vacuum generating device (not shown in the figure) through a vacuum butt joint pipe orifice 7, the vacuum butt joint pipe orifices 7 can be provided with a plurality of air holes, so that air suction is uniform, the sealing valve 6 can seal the air hole I4 and the air hole II 5 through extrusion of the elastic reset piece, and the sealing valve 6 is partially exposed out of the air hole I4 The vacuum suction hole 3 comprises a hole top surface and a hole side surface, the air hole I4 is located on the hole top surface, and the air hole II 5 is located on the hole side surface, so that when the vacuum pumping is performed, the air hole II 5 can be tightly plugged by the sealing valve 6 which is not extruded by the substrate under the vacuum effect, and good sealing is guaranteed, and air leakage cannot occur. The elastic resetting piece is preferably a compression spring I8 and a compression spring II 9, of course, the elastic resetting piece can also adopt a compression spring to reset the sealing valve piece 6, the fixing modes of the compression spring I8 and the compression spring II 9 are conventional modes, such as welding and the like, so that detailed description is omitted, and the compression spring I8 can reset the sealing valve piece 6 to seal the air hole I4; the second compression spring 9 can restore the sealing valve member 6 to close the second air hole 5.

In the application, if it is very difficult to process a plurality of vacuum suction holes 3 directly on the sucker main body 1 and install the sealing valve member 6 and the elastic reset member in the vacuum suction hole 3, the processing difficulty is high, the cost is also high, in order to realize the purpose of easy manufacture and assembly, the sucker main body 1 comprises a sucker groove arranged in the sucker main body 1, a cover plate 10 for sealing the sucker groove, an air valve unit arranged in the sucker groove, the air valve unit comprises a valve body 11, the vacuum suction hole 3 is an inner cavity of the valve body 11, an air hole one 4 and an air hole two 5 are arranged on the valve body 11, the sealing 6 and the elastic reset member are positioned in the valve body 11, a through hole is arranged on the cover plate 10, the end part of the air valve unit is positioned in the through hole and is in sealing fit with the through hole, and the air hole one is also positioned in the through hole, and the air gap between the air valve units forms, therefore, the air valve unit can be manufactured independently firstly and then is installed in the sucker groove through simple assembly, and the air valve unit can be produced in batches and is easy to process. The specific mounting structure is as follows: the sucker body 1 is provided with a screw hole, and the valve body 11 is provided with a thread matched with the screw hole, so that the structure is convenient to disassemble and assemble.

The specific installation process is briefly described as follows: the through holes in the cover plate 10 correspond to the threaded holes for installing the air valves on the sucker main body 1 one by one, after the air valve units are installed on the sucker main body 1, the sucker cover plate 10 is installed, the surface of the sucker cover plate 10 is an adsorption surface and the top surface of the sucker main body 1, and the air valve units are sealed with the sucker cover plate 10. Meanwhile, two vacuum butt joint pipe orifices 7 at the rear part of the sucker main body 1 are provided with vacuum generating devices. The air valve unit is the free encapsulated situation when not placing the substrate of treating the exposure on sucking disc main part 1, after placing the substrate on sucking disc main part 1's the top surface, the substrate can be pressed down the spheroid in the air valve unit, thereby let air hole one 4 of air valve unit's top surface and two 5 UNICOMs of air hole of side form an air current passageway, then through vacuum generating device to the sucking disc evacuation, in the evacuation, the air current will follow the top surface of vacuum suction hole 3 and toward the side circulation, thereby form the low pressure that is less than external atmospheric pressure in vacuum suction hole 3, thereby adsorb the object of top surface on the precision sucking disc. At this time, the air valve unit of the substrate covering area is opened, and the sucker body 1 can stably adsorb the substrate on the surface of the sucker body 1 when the vacuum generating device performs vacuum pumping, so that the vacuum adsorption is relatively stable, and the substrate cannot cause the vibration of an air valve ball body due to the fluctuation of vacuum, thereby influencing the stable state of the substrate.

In the area which is not covered by the base material, the air valve unit is in a free sealing state, and in the free sealing state, the compression spring I8 and the compression spring II 9 can prop against the ball body to seal the air hole I4 on the top surface and the air hole II 5 on the side surface, so that the whole precision air valve is in a closed state; when the top surface of the sucker main body 1 has slight pressure, the air valve ball body can be pressed downwards, and the air vents on the top and the side of the air valve can be communicated at the moment. During the vacuum pumping, the airflow can flow from the top to the side, so that the object on the top is adsorbed on the precise sucker.

The foregoing detailed description of the adaptive high-precision vacuum chuck provided by the embodiments of the present invention has been presented, and the principles and embodiments of the present invention are explained herein by using specific examples, and the descriptions of the foregoing embodiments are only used to help understand the method and the core ideas of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.

Claims

1. The utility model provides a self-adaptation high accuracy vacuum chuck which characterized in that: the vacuum suction hole comprises a first air hole and a second air hole, the first air hole is communicated with an adsorption surface of the sucker body, a sealing valve and an elastic reset piece are arranged in the vacuum suction hole, the sealing valve can be used for plugging the first air hole and the second air hole through extrusion of the elastic reset piece, part of the sealing valve is exposed outside the first air hole and jacks up the sealing valve through surface contact with an adsorbed object, so that the first air hole is communicated with the second air hole, and the second air hole is communicated with the air passage.

2. An adaptive high precision vacuum chuck according to claim 1, wherein: the sucking disc main part is including setting up sucking disc groove in the sucking disc main part and closing the apron in sucking disc groove, setting up the pneumatic valve unit in sucking disc groove, the pneumatic valve unit includes the valve body, the hole is the inner chamber of valve body is inhaled in the vacuum, gas pocket one and gas pocket two set up on the valve body, sealed valve member and elasticity reset the piece and are located the valve body, be equipped with the through-hole on the apron, pneumatic valve unit tip is arranged in the through-hole and with the sealed cooperation of through-hole, just gas pocket one also is arranged in the through-hole, the space between the pneumatic valve unit constitutes the air flue.

3. An adaptive high precision vacuum chuck according to claim 2, wherein: the sucker main body is provided with a screw hole, and the valve body is provided with a thread matched with the mounting screw hole.

4. An adaptive high precision vacuum chuck according to claim 1, wherein: the sealing valve is a ball.

5. An adaptive high precision vacuum chuck according to claim 1 or 2, wherein: the vacuum suction hole comprises a hole top surface and a hole side surface, the first air hole is located on the hole top surface, and the second air hole is located on the hole side surface.

6. An adaptive high precision vacuum chuck according to claim 1 or 2, wherein: the elastic resetting piece comprises a first compression spring and a second compression spring, and the first compression spring can reset the sealing valve piece to block the first air hole; the second compression spring can enable the sealing valve to reset so as to seal the second air hole.