CN214455001U - Self-adaptive high-precision vacuum chuck - Google Patents
Self-adaptive high-precision vacuum chuck Download PDFInfo
- Publication number
- CN214455001U CN214455001U CN202120677530.5U CN202120677530U CN214455001U CN 214455001 U CN214455001 U CN 214455001U CN 202120677530 U CN202120677530 U CN 202120677530U CN 214455001 U CN214455001 U CN 214455001U
- Authority
- CN
- China
- Prior art keywords
- hole
- air
- air hole
- valve
- sucking disc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001179 sorption measurement Methods 0.000 claims abstract description 6
- 238000001125 extrusion Methods 0.000 claims abstract description 4
- 238000007789 sealing Methods 0.000 claims description 25
- 230000006835 compression Effects 0.000 claims description 18
- 238000007906 compression Methods 0.000 claims description 18
- 230000003044 adaptive effect Effects 0.000 claims description 6
- 239000000758 substrate Substances 0.000 abstract description 18
- 238000010521 absorption reaction Methods 0.000 abstract 1
- 239000002156 adsorbate Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 210000001503 joint Anatomy 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- 239000005041 Mylar™ Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Landscapes
- Manipulator (AREA)
Abstract
The utility model discloses a self-adaptation high accuracy vacuum chuck, its characterized in that: including the sucking disc main part and set up air flue and a plurality of vacuum suction hole in the sucking disc main part, this vacuum suction hole includes gas pocket one and gas pocket two, gas pocket one link up with the adsorption plane of sucking disc main part, and the downthehole sealed valve member and the elasticity piece that resets of vacuum suction, this sealed valve member can block up gas pocket one and gas pocket two through the extrusion that the elasticity piece resets, and sealed valve member has part to expose outside gas pocket one and make gas pocket one link up with the external world through with adsorbate surface contact with sealed valve member jack-up, gas pocket two and air flue intercommunication. This vacuum chuck, the substrate of any size can all carry out fine absorption on the sucking disc to do not need other operations.
Description
Technical Field
The utility model relates to a laser direct writing exposure machine, especially a laser direct writing exposure machine is last to be used for snatching the self-adaptation high accuracy vacuum chuck of circuit board.
Background
When the laser direct writing exposure machine is used for exposure, the sizes of the base materials to be exposed are different, and the sizes of most of the base materials are smaller than the size of a vacuum chuck of the exposure machine, so that part of suction holes on the vacuum chuck of the exposure machine are exposed, and the vacuum suction force of the base materials is insufficient. The conventional treatment method is that in an area where a vacuum chuck is not covered by a substrate, a mylar film or other thin plates are utilized to block suction holes on the chuck, so that all the suction holes on the vacuum chuck can be covered, the vacuum suction of the vacuum chuck is improved, the substrate is better attached to the vacuum chuck, the exposure yield is ensured, if the substrate is not blocked by the suction holes in the area where the substrate is not covered, the vacuum degree of the vacuum chuck cannot meet the requirement, and because part of the substrate to be exposed has the condition of four-side warping, the condition of poor exposure in the area where the substrate is warped can be caused, and the product yield is influenced.
Disclosure of Invention
In order to overcome the defects of the prior art, the utility model provides a laser is direct write for exposure machine self-adaptation high accuracy vacuum chuck.
The utility model provides a technical scheme that its technical problem adopted is:
the utility model provides a self-adaptation high accuracy vacuum chuck which characterized in that: the vacuum suction hole comprises a first air hole and a second air hole, the first air hole is communicated with an adsorption surface of the sucker body, a sealing valve and an elastic reset piece are arranged in the vacuum suction hole, the sealing valve can be used for plugging the first air hole and the second air hole through extrusion of the elastic reset piece, part of the sealing valve is exposed out of the first air hole and jacks up the sealing valve through surface contact with an adsorbed object, so that the first air hole is communicated with the second air hole, and the second air hole is communicated with the air passage.
The sucking disc main part is including setting up sucking disc groove in the sucking disc main part and closing the apron in sucking disc groove, setting up the pneumatic valve unit in sucking disc groove, the pneumatic valve unit includes the valve body, the hole is the inner chamber of valve body is inhaled in the vacuum, gas pocket one and gas pocket two set up on the valve body, sealed valve member and elasticity reset the piece and are located the valve body, be equipped with the through-hole on the apron, pneumatic valve unit tip is arranged in the through-hole and with the sealed cooperation of through-hole, just gas pocket one also is arranged in the through-hole, the space between the pneumatic valve unit constitutes the air flue.
The sucker main body is provided with a screw hole, and the valve body is provided with a thread matched with the mounting screw hole.
The sealing valve is a ball.
The vacuum suction hole comprises a hole top surface and a hole side surface, the first air hole is located on the hole top surface, and the second air hole is located on the hole side surface.
The elastic resetting piece comprises a first compression spring and a second compression spring, and the first compression spring can reset the sealing valve piece to block the first air hole; the second compression spring can enable the sealing valve to reset so as to seal the second air hole.
The utility model has the advantages that: any size of substrate can be well adsorbed on the sucker without other operations, which is as follows:
1. the self-adaptive high-precision vacuum chuck can be compatible with exposure base materials of various sizes, and other objects do not need to be additionally used on the chuck to block vacuum suction holes except for the base material covering, so that the universality of the chuck is improved, and the production efficiency is improved;
2. the self-adaptive high-precision vacuum chuck can not cause the substrate to slightly fluctuate up and down due to the change of the internal pressure formed by vacuum, and can avoid poor exposure caused by substrate shaking.
Drawings
The present invention will be further explained with reference to the drawings and examples.
FIG. 1 is a view of the overall structure of the present invention;
FIG. 2 is an enlarged structural view of the portion A of FIG. 1;
fig. 3 is a cross-sectional structural view of the present invention;
FIG. 4 is a schematic view of the gas valve unit in a sealed state;
fig. 5 is a schematic view of the gas valve unit in an open state.
Detailed Description
Referring to fig. 1 to 5, the utility model discloses a self-adaptation high accuracy vacuum chuck, inhale hole 3 including sucking disc main part 1 and air flue 2 and a plurality of vacuum that set up in sucking disc main part 1, sucking disc main part 1 is squarely, and this vacuum inhales hole 3 and includes air pocket one 4 and air pocket two 5, air pocket two 5 and air flue 2 intercommunication, air pocket one 4 link up with the adsorption plane of sucking disc main part 1, and is equipped with sealed valve member 6 and elasticity piece that resets in the vacuum inhales hole 3, and the preferred spheroid of structure of sealed valve member 6, elasticity reset the preferred compression spring of piece, and air flue 2 is connected with vacuum generator (not shown in the picture) through vacuum butt joint mouth of pipe 7, and vacuum butt joint mouth of pipe 7 can set up a plurality ofly, and it is even to bleed like this, and this sealed valve member 6 can block up air pocket one 4 and air pocket two 5 through the extrusion that elasticity resets the piece, and sealed valve member 6 has part to expose outside air pocket one 4 and make air pocket one 4 and two air pockets with valve member adsorbed material surface contact and jack-up sealed 6 through with by valve member surface contact 5, the vacuum suction hole 3 comprises a hole top surface and a hole side surface, the first air hole 4 is positioned on the hole top surface, and the second air hole 5 is positioned on the hole side surface, so that when the vacuum pumping is performed, the second air hole 5 can be plugged more tightly by the sealing valve 6 which is not extruded by the substrate under the action of vacuum, and the good sealing is ensured, and no air leakage occurs. The elastic resetting piece is preferably a compression spring I8 and a compression spring II 9, of course, the elastic resetting piece can also adopt a compression spring to reset the sealing valve piece 6, the fixing modes of the compression spring I8 and the compression spring II 9 are conventional modes, such as welding and the like, so that detailed description is omitted, and the compression spring I8 can reset the sealing valve piece 6 to seal the air hole I4; the second compression spring 9 can restore the sealing valve member 6 to close the second air hole 5.
In the application, if it is very difficult to process a plurality of vacuum suction holes 3 directly on the sucker main body 1 and install the sealing valve member 6 and the elastic reset member in the vacuum suction hole 3, the processing difficulty is high, the cost is also high, in order to realize the purpose of easy manufacture and assembly, the sucker main body 1 comprises a sucker groove arranged in the sucker main body 1, a cover plate 10 for sealing the sucker groove, an air valve unit arranged in the sucker groove, the air valve unit comprises a valve body 11, the vacuum suction hole 3 is an inner cavity of the valve body 11, an air hole one 4 and an air hole two 5 are arranged on the valve body 11, the sealing 6 and the elastic reset member are positioned in the valve body 11, a through hole is arranged on the cover plate 10, the end part of the air valve unit is positioned in the through hole and is in sealing fit with the through hole, and the air hole one is also positioned in the through hole, and the air gap between the air valve units forms the air passage 2, therefore, the air valve unit can be manufactured independently firstly and then is installed in the sucker groove through simple assembly, and the air valve unit can be produced in batches and is easy to process. The specific mounting structure is as follows: the sucker body 1 is provided with a screw hole, and the valve body 11 is provided with a thread matched with the screw hole, so that the structure is convenient to disassemble and assemble.
The specific installation process is briefly described as follows: the through holes in the cover plate 10 correspond to the threaded holes for installing the air valves on the sucker main body 1 one by one, after the air valve units are installed on the sucker main body 1, the sucker cover plate 10 is installed, the surface of the sucker cover plate 10 is an adsorption surface and the top surface of the sucker main body 1, and the air valve units are sealed with the sucker cover plate 10. Meanwhile, two vacuum butt joint pipe orifices 7 at the rear part of the sucker main body 1 are provided with vacuum generating devices. The air valve unit is the free encapsulated situation when not placing the substrate of treating the exposure on sucking disc main part 1, after placing the substrate on sucking disc main part 1's the top surface, the substrate can be pressed down the spheroid in the air valve unit, thereby let air hole one 4 of air valve unit's top surface and two 5 UNICOMs of air hole of side form an air current passageway, then through vacuum generating device to the sucking disc evacuation, in the evacuation, the air current will follow the top surface of vacuum suction hole 3 and toward the side circulation, thereby form the low pressure that is less than external atmospheric pressure in vacuum suction hole 3, thereby adsorb the object of top surface on the precision sucking disc. At this time, the air valve unit of the substrate covering area is opened, and the sucker body 1 can stably adsorb the substrate on the surface of the sucker body 1 when the vacuum generating device performs vacuum pumping, so that the vacuum adsorption is relatively stable, and the substrate cannot cause the vibration of an air valve ball body due to the fluctuation of vacuum, thereby influencing the stable state of the substrate.
In the area which is not covered by the base material, the air valve unit is in a free sealing state, and in the free sealing state, the compression spring I8 and the compression spring II 9 can prop against the ball body to seal the air hole I4 on the top surface and the air hole II 5 on the side surface, so that the whole precision air valve is in a closed state; when the top surface of the sucker main body 1 has slight pressure, the air valve ball body can be pressed downwards, and the air vents on the top and the side of the air valve can be communicated at the moment. During the vacuum pumping, the airflow can flow from the top to the side, so that the object on the top is adsorbed on the precise sucker.
The above detailed description is made on the adaptive high-precision vacuum chuck provided by the embodiment of the present invention, and the specific examples are applied herein to explain the principle and the implementation of the present invention, and the description of the above embodiments is only used to help understand the method and the core idea of the present invention; meanwhile, for the general technical personnel in the field, according to the idea of the present invention, there are changes in the specific implementation and application scope, to sum up, the content of the present specification should not be understood as the limitation of the present invention.
Claims (6)
1. The utility model provides a self-adaptation high accuracy vacuum chuck which characterized in that: the vacuum suction hole comprises a first air hole and a second air hole, the first air hole is communicated with an adsorption surface of the sucker body, a sealing valve and an elastic reset piece are arranged in the vacuum suction hole, the sealing valve can be used for plugging the first air hole and the second air hole through extrusion of the elastic reset piece, part of the sealing valve is exposed outside the first air hole and jacks up the sealing valve through surface contact with an adsorbed object, so that the first air hole is communicated with the second air hole, and the second air hole is communicated with the air passage.
2. An adaptive high precision vacuum chuck according to claim 1, wherein: the sucking disc main part is including setting up sucking disc groove in the sucking disc main part and closing the apron in sucking disc groove, setting up the pneumatic valve unit in sucking disc groove, the pneumatic valve unit includes the valve body, the hole is the inner chamber of valve body is inhaled in the vacuum, gas pocket one and gas pocket two set up on the valve body, sealed valve member and elasticity reset the piece and are located the valve body, be equipped with the through-hole on the apron, pneumatic valve unit tip is arranged in the through-hole and with the sealed cooperation of through-hole, just gas pocket one also is arranged in the through-hole, the space between the pneumatic valve unit constitutes the air flue.
3. An adaptive high precision vacuum chuck according to claim 2, wherein: the sucker main body is provided with a screw hole, and the valve body is provided with a thread matched with the mounting screw hole.
4. An adaptive high precision vacuum chuck according to claim 1, wherein: the sealing valve is a ball.
5. An adaptive high precision vacuum chuck according to claim 1 or 2, wherein: the vacuum suction hole comprises a hole top surface and a hole side surface, the first air hole is located on the hole top surface, and the second air hole is located on the hole side surface.
6. An adaptive high precision vacuum chuck according to claim 1 or 2, wherein: the elastic resetting piece comprises a first compression spring and a second compression spring, and the first compression spring can reset the sealing valve piece to block the first air hole; the second compression spring can enable the sealing valve to reset so as to seal the second air hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120677530.5U CN214455001U (en) | 2021-04-01 | 2021-04-01 | Self-adaptive high-precision vacuum chuck |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120677530.5U CN214455001U (en) | 2021-04-01 | 2021-04-01 | Self-adaptive high-precision vacuum chuck |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214455001U true CN214455001U (en) | 2021-10-22 |
Family
ID=78177313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120677530.5U Active CN214455001U (en) | 2021-04-01 | 2021-04-01 | Self-adaptive high-precision vacuum chuck |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214455001U (en) |
-
2021
- 2021-04-01 CN CN202120677530.5U patent/CN214455001U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN205521462U (en) | Vacuum adsorption platform | |
| CN112938484A (en) | Self-adaptive high-precision vacuum chuck | |
| CN108443538A (en) | Vacuum absorption device and its suction control valve | |
| CN214455001U (en) | Self-adaptive high-precision vacuum chuck | |
| US6352189B1 (en) | Ball suction head | |
| CN205350020U (en) | Novel vacuum sucker | |
| CN111716379A (en) | Valveless non-blocking sucking disc | |
| CN204416564U (en) | One exempts from squash type glass holder | |
| TWI638759B (en) | Negative pressure adsorber for shaped sheet objects | |
| CN113814768A (en) | Suction cup device | |
| CN206154336U (en) | Absorption device | |
| CN207404674U (en) | Sucker assembly | |
| CN112045590A (en) | Compression bar device and adsorption platform | |
| CN206536498U (en) | A kind of vacuum cup | |
| CN110495646A (en) | Electronic cigarette and atomizing component and Power Supply Assembly with airflow sensor element protection function | |
| CN215325604U (en) | Suction plate device | |
| CN208381394U (en) | Vacuum absorption device and its suction control valve | |
| TWM543154U (en) | Pressure holding structure of suction device | |
| CN206533507U (en) | Earphone horn cover sucker and earphone horn cover paste net equipment automatically | |
| CN207548593U (en) | Vacuum inhales part device | |
| CN114043286A (en) | High-precision sensitive pneumatic adsorption disc | |
| CN209717514U (en) | A kind of vacuum chuck tooling jig | |
| CN108878195A (en) | Chip mounter suction nozzle | |
| CN220718085U (en) | Etching device for processing semiconductor chip | |
| CN220783616U (en) | Vacuum chuck tool |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20240122 Address after: 528400 No. 3 Mingzhu Road, Torch Development Zone, Zhongshan City, Guangdong Province Patentee after: Zhongshan Xinnuo Microelectronics Co.,Ltd. Country or region after: China Address before: 528400 No. 3 Mingzhu Road, Torch Development Zone, Zhongshan City, Guangdong Province Patentee before: ZHONGSHAN AISCENT TECHNOLOGIES Co.,Ltd. Country or region before: China |
|
| TR01 | Transfer of patent right |