CN218769463U - Bernoulli sucker - Google Patents
Bernoulli sucker Download PDFInfo
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- CN218769463U CN218769463U CN202222920547.6U CN202222920547U CN218769463U CN 218769463 U CN218769463 U CN 218769463U CN 202222920547 U CN202222920547 U CN 202222920547U CN 218769463 U CN218769463 U CN 218769463U
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Abstract
The utility model discloses a Bernoulli sucking disc, bernoulli sucking disc include sucking disc shell and sucking disc core, and sucking disc shell middle part is formed with the holding chamber, and the sucking disc core is installed in the holding intracavity, forms the air cavity between sucking disc core and the holding chamber, sets up the inlet port of intercommunication air cavity on the sucking disc shell, and the bottom surface circumference interval of sucking disc shell is provided with a plurality of flexible pads, forms the space of giving vent to anger with the air cavity intercommunication between two adjacent flexible pads, and the width in the space of giving vent to anger is outwards diminished by sucking disc core center. According to the Bernoulli chuck, the air outlet gap is of a structure with the width which is reduced from the center of the chuck core to the outside, so that the Bernoulli area of the inner part of the air outlet gap is enlarged, and the adsorption area is large; meanwhile, the flow velocity of the air flow discharged from the air outlet gap can be improved, a larger lifting force is generated on the outer part of the air outlet gap, and the adsorption stability of the sucker is improved.
Description
Technical Field
The utility model relates to a sucking disc technical field especially relates to a Bernoulli sucking disc.
Background
A bernoulli chuck is a chuck suitable for handling thin, extremely delicate and fragile workpieces, typically used in conjunction with a robot, such as for handling solar cells in the photovoltaic industry. When the high compressed air is connected into the sucker by applying the Bernoulli principle, the working face of the sucker generates uniform and thin strong airflow, the gas flow rate of the upper surface of the workpiece is larger than that of the lower part of the workpiece at the moment, and the pressure difference can be generated on the upper side and the lower side of the workpiece by utilizing the principle that the fluid speed is faster and the pressure intensity is smaller, so that upward lifting force can be formed at the bottom of the workpiece, and the workpiece is adsorbed at the bottom of the sucker body.
According to the traditional Bernoulli sucker, the channel below the sucker shell is a linear rectangular channel, and the adsorption on a battery piece is unstable.
SUMMERY OF THE UTILITY MODEL
The invention aims to provide a Bernoulli chuck to solve the problem that the Bernoulli chuck in the prior art is unstable in adsorption.
To achieve the purpose, the utility model adopts the following technical proposal:
the utility model provides a Bernoulli sucker, wherein, bernoulli sucker includes sucker shell and sucker core, sucker shell middle part is formed with the holding chamber, the sucker core install in the holding intracavity, the sucker core with form the air cavity between the holding chamber, set up the intercommunication on the sucker shell the inlet port of air cavity, the bottom surface circumference interval of sucker shell is provided with a plurality of flexible pads, adjacent two form between the flexible pad with the air cavity intercommunication give vent to anger the space, give vent to anger the width in space by sucker core center diminishes outwards.
The air outlet gap is arranged to be of a structure with the width decreasing from the center of the sucker core to the outside, so that the Bernoulli area of the inner side part of the air outlet gap is increased, and the adsorption area is increased; meanwhile, the flow velocity of the air flow discharged from the air outlet gap can be improved, a larger lifting force is generated on the outer side part of the air outlet gap, and the adsorption stability of the sucker is improved.
In some embodiments, the vacuum breaking hole is formed in the middle of the sucker core, the communicating hole is formed in the sucker shell, and the vacuum breaking pipe communicated with the vacuum breaking hole is installed at the communicating hole.
The vacuum breaking pipe blows air to the battery piece adsorbed by the sucker through the vacuum breaking hole so that the adsorbed battery piece can fall better.
In some embodiments, a blocking pad for adjusting air flow is arranged on the bottom surface of the sucker shell corresponding to each air outlet gap, and the blocking pad is located at the air inlet end of the air outlet gap.
The air flow entering the air outlet gap is divided by the blocking pad, so that the flow velocity of the air flow is accelerated, the Bernoulli effect is enhanced, and the larger lifting force is generated.
In some embodiments, the communication hole is a threaded hole, and the upper part of the sucker core is provided with an external thread section matched with the threaded hole.
The sucker core is assembled in the sucker shell through a threaded structure, and the sucker core mounting mode is simple in structure and convenient to operate.
In some embodiments, the bottom of the vacuum breaking hole is provided with a polygonal hole for facilitating the installation of the sucker core.
The bottom of the vacuum breaking hole is set to be the polygonal hole, so that the sucker core can be quickly and conveniently installed on the sucker shell.
In some embodiments, a suction cup core is mounted to the suction cup shell by bolts. The sucker core is arranged on the sucker shell through the bolt, and the sucker core mounting mode with a simple structure is provided.
In some embodiments, the suction cup core is provided with a circle of groove, the groove and the suction cup shell form an air cavity, the circumferential direction of the groove is provided with a plurality of air blowing holes at intervals, and the air blowing holes are communicated with the air outlet gap.
Through processing the recess on the sucking disc core, recess and sucking disc shell form the air cavity, and a plurality of gas hole is seted up in the recess, provides a simple structure, the air cavity structure of easily processing, and the setting of recess can be guaranteed to get into the velocity of flow and the uniformity of pressure in each air current in the space of giving vent to anger simultaneously, is favorable to the adsorption stability of sucking disc.
In some embodiments, a pit is arranged in the groove, the blowing holes are arranged in the pit, the pit is vertically arranged, and the direction of the blowing holes is perpendicular to the direction of the pit.
Through the combination of the concave pits and the air blowing holes, the air flow in the air cavity can be smoothly guided into the corresponding air outlet gaps, and the smooth flowing of the air is facilitated.
In some embodiments, a sealing structure for sealing the air cavity is arranged between the sucker core and the sucker shell.
The air cavity and the vacuum breaking hole are separated through the sealing structure, so that air leakage is avoided.
In some embodiments, the suction cup shell is provided with a plurality of through holes. The through-hole not only can alleviate the weight of sucking disc, detects whether the sucking disc adsorbs the battery piece through the sensor at through-hole department installation sensor moreover.
Drawings
Fig. 1 is a schematic structural diagram of a bernoulli chuck at a first viewing angle according to an embodiment of the present invention;
fig. 2 is a schematic structural view of a bernoulli chuck at a second viewing angle according to an embodiment of the present invention;
FIG. 3 is a schematic structural view of a chuck shell of a Bernoulli chuck according to an embodiment of the present invention;
FIG. 4 is a schematic structural view of a chuck core of a Bernoulli chuck according to an embodiment of the present invention;
fig. 5 is a schematic structural diagram of a bernoulli chuck at a first viewing angle according to a second embodiment of the present invention;
fig. 6 is a schematic structural view of a bernoulli chuck at a second viewing angle according to the second embodiment of the present invention;
fig. 7 is a schematic structural diagram of a suction cup shell of a bernoulli suction cup according to a second embodiment of the present invention;
fig. 8 is a schematic structural diagram of a chuck core of a bernoulli chuck according to an embodiment of the present invention.
The following reference numerals are included in fig. 1 to 8:
the sucker shell 10: the air conditioner comprises an accommodating cavity 100, an air inlet hole 101, a boss 102, a through hole 103, a communication hole 104 and a connection hole 105;
the sucker core 11: vacuum breaking hole 110, polygonal hole 111, threaded blind hole 112, groove 113, gas blowing hole 114, pit 115 and sealing groove 116;
a flexible pad 12;
an air outlet gap 13;
a barrier pad 14.
Detailed Description
In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention is described in detail with reference to the accompanying drawings and the detailed description.
A bernoulli chuck is a chuck suitable for handling thin, extremely delicate and fragile workpieces, typically used in conjunction with a robot, such as for handling solar cells in the photovoltaic industry. According to the traditional Bernoulli sucker, the channel below the sucker shell is a linear rectangular channel, and the adsorption on a battery piece is unstable.
Example one
In view of traditional bernoulli's sucking disc is unstable to the absorption of battery piece, the utility model provides a bernoulli's sucking disc for the realization is to the stable absorption of battery piece. Please refer to fig. 1 to 3, the embodiment of the present invention provides a bernoulli chuck including a chuck shell 10 and a chuck core 11, the middle of the chuck shell 10 is formed with a containing cavity 100, the chuck core 11 can be installed in the containing cavity 100 in a detachable manner, an air cavity is formed between the chuck core 11 and the containing cavity 100, an air inlet 101 communicating the air cavity is provided on the chuck shell 10, a plurality of flexible pads 12 are provided at the bottom circumferential interval of the chuck shell 10, an air outlet gap 13 communicating with the air cavity is formed between two adjacent flexible pads 12, and the width of the air outlet gap 13 is outwardly reduced by the center of the chuck core 11.
It can be seen that, according to the bernoulli principle, after the air cavity of the bernoulli chuck of this embodiment is connected to the air source, the air flow in the air cavity is discharged through the air outlet gap 13 with high speed, and a uniform and thin strong air flow can be generated on the working surface, and at this time, the air flow rate on the upper surface of the battery piece is greater than the air flow rate on the lower part of the battery piece, and by using the principle that the fluid speed is faster and the pressure is smaller, pressure difference can be generated on the upper and lower sides of the battery piece, so that an upward lifting force can be formed at the bottom of the battery piece, and the battery piece is adsorbed at the bottom of the chuck shell 10.
It can be seen that by arranging the air outlet gap 13 in a structure in which the width decreases from the center of the suction cup core 11 to the outside, that is, the air flow area of the inner portion of the air outlet gap 13 is larger than that of the outer portion, a larger bernoulli region is formed in the inner portion of the air outlet gap 13, increasing the adsorption area; meanwhile, the flow velocity of the airflow discharged from the air outlet gap 13 can be improved, and a larger lifting force is generated on the outer part of the air outlet gap 13, so that the adsorption stability of the sucker is improved.
Optionally, a boss 102 is disposed in the middle of the suction cup housing 10, the accommodating cavity 100 is formed in the boss 102, the air inlet 101 may be disposed on an end surface or a side surface of the boss 102 as required, and the air inlet 101 is disposed on the side surface of the boss 102, so that the occupied space of the top of the bernoulli suction cup can be reduced.
Optionally, the suction cup shell 10 is provided with a plurality of through holes 103 on the periphery of the boss 102.
It can be seen that not only can the weight of the suction cup be reduced through the through hole 103, but also a sensor is installed at the through hole 103, and whether the suction cup is sucked to the battery piece is detected through the sensor.
Referring to fig. 2 to 4, optionally, a vacuum breaking hole 110 is formed in the middle of the sucker core 11, a communication hole 104 is formed in the center of the boss 102, and a vacuum breaking tube communicated with the vacuum breaking hole 110 is installed at the communication hole 104.
Therefore, when the Bernoulli chuck discharges the battery piece after adsorbing the battery piece, the vacuum breaking pipe blows air to the battery piece adsorbed by the chuck through the vacuum breaking hole 110, so that the adsorbed battery piece can fall better.
Optionally, the communication hole 104 is a threaded hole, an external thread section matched with the threaded hole is arranged on the upper portion of the suction cup core 11, and after the suction cup core 11 is assembled, a gap for communicating the air cavity with the air outlet gap 13 is formed between the suction cup core 11 and the suction cup shell 10.
It can be seen that the sucker core 11 is assembled in the sucker shell 10 through a threaded structure, the assembly structure is simple, the operation is convenient, meanwhile, a gap is formed between the sucker core 11 and the sucker shell 10, the air cavity and the air outlet gap 13 are communicated through the gap, the structure is simple, and the processing is convenient.
Optionally, the bottom of the vacuum breaking hole 110 is provided with a polygonal hole 111 for facilitating the installation of the sucker core 11, and the polygonal hole 111 is used as an operation hole for installing the sucker core 11.
Therefore, the sucker core 11 can be conveniently screwed and installed in the sucker shell 10 through the special wrench, and the installation is convenient; and the bottom of the vacuum breaking hole 110 is integrated with an operation hole which is convenient for assembly, thereby simplifying the structure of the suction cup core 11.
Referring to fig. 3 again, optionally, a blocking pad 14 for adjusting the airflow is disposed on the bottom surface of the chuck shell 11 corresponding to each air outlet gap 13, the blocking pad 14 is located at the air inlet end of the air outlet gap 13, the blocking pad 14 is a circular structure, and a line a shown in the drawing is a schematic view of the flow direction of the airflow entering the air outlet gap 13 after being adjusted by the blocking pad 14.
It can be seen that the blocking pad 14 divides the air flow entering the air outlet gap 13, so as to accelerate the flow velocity of the air flow, enhance the bernoulli effect and generate larger lifting force.
Optionally, the flexible pad 12 and the blocking pad 14 are both made of a silicone material or a sponge material, the flexible pad 12 and the blocking pad 14 made of the silicone material have the advantages of convenience in manufacturing, good elasticity and environmental protection, and the flexible pad 12 and the blocking pad 14 made of the sponge material have the advantages of good wear resistance and heat resistance and difficulty in deformation.
It can be seen that the flexible pad 12 and the blocking pad 14 made of silicone material or sponge material can be selected according to different application scenarios.
The embodiment of the utility model provides a pair of bernoulli's sucking disc has following advantage at least:
1) The structure of the air outlet gap is optimized, and the adsorption stability of the sucking disc is improved;
2) The sucker core and the sucker shell are assembled through a threaded structure, so that the sucker is convenient to process and assemble, and later maintenance and repair of the sucker are facilitated;
3) The vacuum breaking holes are arranged, so that air is blown to the battery pieces adsorbed by the suckers during material discharging, and the adsorbed battery pieces can fall down better;
4) The bottom of the vacuum breaking hole is provided with a polygonal hole as an operation hole, so that the sucking disc core is convenient to install;
example two
In view of traditional bernoulli's sucking disc is unstable to the absorption of battery piece, the utility model provides a bernoulli's sucking disc for the realization is to the stable absorption of battery piece. Please refer to fig. 5 to 7, the embodiment of the present invention provides a bernoulli chuck including a chuck shell 10 and a chuck core 11, the middle of the chuck shell 10 is formed with a containing cavity 100, the chuck core 11 can be installed in the containing cavity 100 with dismounting, an air cavity is formed between the chuck core 11 and the containing cavity 100, an air inlet 101 communicating the air cavity is provided on the chuck shell 10, a plurality of flexible pads 12 are provided at the bottom circumferential interval of the chuck shell 10, an air outlet gap 13 communicating with the air cavity is formed between two adjacent flexible pads 12, and the width of the air outlet gap 13 is outwardly reduced by the chuck core center 11.
It can be seen that according to the bernoulli principle, after the air cavity of the bernoulli chuck of this embodiment is connected to the air source, the air flow in the air cavity is discharged in an accelerating manner through the air outlet gap 13, and an even and thin strong air flow can be generated on the working surface, at this moment, the air flow rate on the upper surface of the battery piece is greater than the air flow rate on the lower part of the battery piece, and by utilizing the principle that the fluid speed is faster and the pressure intensity is smaller, the pressure difference can be generated on the upper and lower sides of the battery piece, so that an upward lifting force can be formed at the bottom of the battery piece, and the battery piece is adsorbed at the bottom of the chuck shell 10.
It can be seen that by arranging the air outlet gap 13 in a structure in which the width decreases from the center of the suction cup core 11 to the outside, that is, the air flow area of the inner portion of the air outlet gap 13 is larger than that of the outer portion, a larger bernoulli region is formed in the inner portion of the air outlet gap 13, increasing the adsorption area; meanwhile, the flow velocity of the airflow discharged from the air outlet gap 13 can be improved, and a larger lifting force is generated on the outer part of the air outlet gap 13, so that the adsorption stability of the sucker is improved.
Optionally, a boss 102 is disposed in the middle of the suction cup housing 10, the accommodating cavity 100 is formed in the boss 102, the air inlet 101 may be disposed on an end surface or a side surface of the boss 102 as required, and the air inlet 101 is disposed on the side surface of the boss 102, so that the occupied space of the top of the bernoulli suction cup can be reduced.
Optionally, the suction cup shell 10 is provided with a plurality of through holes 103 on the periphery of the boss 102.
It can be seen that not only can the weight of the suction cup be reduced through the through hole 103, but also a sensor is installed at the through hole 103, and whether the suction cup is sucked to the battery piece is detected through the sensor.
Referring to fig. 7 and 8, optionally, a vacuum breaking hole 110 is formed in the middle of the suction cup core 11, a communication hole 104 is formed in the center of the boss 102, and a vacuum breaking tube communicated with the vacuum breaking hole 110 is installed at the communication hole 104.
Therefore, when the Bernoulli chuck discharges the battery piece after adsorbing the battery piece, the vacuum breaking pipe blows air to the battery piece adsorbed by the chuck through the vacuum breaking hole 110, so that the adsorbed battery piece can fall better.
Optionally, the end surface of the boss 102 is provided with a plurality of connecting holes 105, a plurality of threaded blind holes 112 are formed on the suction cup core 11 corresponding to the connecting holes 105, and the suction cup core 11 is mounted on the suction cup shell 10 through bolts.
It can be seen that when the sucker core 11 is installed, the bolt passes through the connecting hole 105 on the boss 102 and is locked in the threaded blind hole 112 on the sucker core 11 to install the sucker core 11 on the sucker shell 10, and the assembly structure is simple and easy to implement by means of bolt connection.
Optionally, a circle of grooves 113 is formed in the suction cup core 11, after the suction cup core 11 is assembled in the accommodating cavity 100, the grooves 113 and the suction cup shell 10 form an air cavity, a plurality of air blowing holes 114 are circumferentially spaced in the grooves 113, and the air blowing holes 114 are communicated with the air outlet gap 13.
It can be seen that, through processing the groove 113 on the suction cup core 11, the groove 113 and the suction cup shell 10 form an air cavity, and the plurality of air blowing holes 114 are opened in the groove 113, so that a simple structure and an air cavity structure convenient to process are provided, and meanwhile, the arrangement of the groove 113 can ensure the flow rate and the pressure consistency of the air flow entering each air outlet gap 13, which is beneficial to the adsorption stability of the suction cup.
Optionally, a concave pit 115 is arranged in the groove 113, the blowing hole 114 is arranged in the concave pit 115, the concave pit 115 is vertically arranged, and the direction of the blowing hole 114 is perpendicular to the direction of the concave pit 115, so that the blowing hole 114 blows air to the air outlet gap 13 in the same horizontal direction.
It can be seen that, through the combination of the concave pits 115 and the air blowing holes 114, the air flow in the air cavity can be smoothly guided into the corresponding air outlet gap 13, which is beneficial to smooth flow of air.
Optionally, a sealing structure for sealing the air cavity is disposed between the suction cup core 11 and the suction cup shell 10, the sealing structure includes a ring of sealing groove 116 disposed on the suction cup core 11 and located in the groove 113, and a sealing ring is mounted in the sealing groove 116.
It can be seen that the air cavity and the vacuum breaking hole 110 can be separated by arranging the sealing ring between the suction cup core 11 and the suction cup shell 10, so as to avoid air leakage.
Referring to fig. 6 again, optionally, a blocking pad 14 for adjusting the airflow is disposed on the bottom surface of the suction cup shell 11 corresponding to each air outlet gap 13, the blocking pad 14 is located at the air inlet end of the air outlet gap 13, the blocking pad 14 is a circular structure, and a line a shown in the drawing is a schematic view of the flow direction of the airflow entering the air outlet gap 13 after being adjusted by the blocking pad 14.
It can be seen that the blocking pad 14 divides the airflow entering the air outlet gap 13, so as to accelerate the flow rate of the airflow, enhance the bernoulli effect and generate a larger lifting force.
Optionally, the flexible pad 12 and the blocking pad 14 are both made of a silica gel material or a sponge material, the flexible pad 12 and the blocking pad 14 made of the silica gel material have the advantages of convenience in manufacturing, good elasticity and environmental protection, and the flexible pad 12 and the blocking pad 14 made of the sponge material have the advantages of good wear resistance and heat resistance and difficulty in deformation.
It can be seen that the flexible pad 12 and the blocking pad 14 made of silicone material or sponge material can be selected according to different application scenarios.
The embodiment of the utility model provides a pair of bernoulli's sucking disc has following advantage at least:
1) The structure of the air outlet gap is optimized, and the adsorption stability of the sucking disc is improved;
2) The sucker core and the sucker shell are assembled through bolts, so that the structure is simple, the realization is easy, and the later maintenance and repair of the sucker are facilitated;
3) The vacuum breaking holes are arranged, so that air is blown to the battery pieces adsorbed by the suckers during material discharging, and the adsorbed battery pieces can fall down better;
4) The sucking disc core is provided with the groove, the groove is internally provided with the air blowing hole, and the air blowing hole is matched with the sucking disc shell to form an air cavity communicated with the air outlet gap.
The above embodiments have been merely illustrative of the basic principles and features of the present invention, and the present invention is not limited by the above embodiments, and does not depart from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. The Bernoulli sucker is characterized by comprising a sucker shell and a sucker core, wherein a containing cavity is formed in the middle of the sucker shell, the sucker core is installed in the containing cavity, an air cavity is formed between the sucker core and the containing cavity, an air inlet hole communicated with the air cavity is formed in the sucker shell, a plurality of flexible pads are arranged on the bottom surface of the sucker shell at intervals in the circumferential direction, an air outlet gap communicated with the air cavity is formed between every two adjacent flexible pads, and the width of the air outlet gap is outwards reduced by the center of the sucker core.
2. The Bernoulli chuck of claim 1, wherein a vacuum breaking hole is formed in the middle of the chuck core, a communication hole is formed in the chuck shell, and a vacuum breaking tube communicated with the vacuum breaking hole is installed at the communication hole.
3. The Bernoulli chuck of claim 1, wherein a blocking pad for regulating air flow is provided on the bottom surface of the chuck housing corresponding to each air outlet gap, the blocking pad being located at the air inlet end of the air outlet gap.
4. The Bernoulli chuck according to claim 2, wherein the communication hole is a threaded hole, and an upper portion of the chuck core is provided with an external threaded section that mates with the threaded hole.
5. A Bernoulli chuck according to claim 4, wherein the bottom of the vacuum breaking hole is provided as a polygonal hole for facilitating mounting of the chuck core.
6. The Bernoulli chuck according to claim 1, wherein the chuck core is mounted to the chuck shell by bolts.
7. The Bernoulli chuck of claim 1, wherein the chuck core is provided with a circle of grooves, the grooves and the chuck shell form the air cavity, a plurality of air blowing holes are arranged at intervals in the circumferential direction of the grooves, and the air blowing holes are communicated with the air outlet gap.
8. The Bernoulli chuck of claim 7, wherein a dimple is disposed in the recess, the gas blowing hole is disposed in the dimple, the dimple is vertically disposed, and the direction of the gas blowing hole is perpendicular to the direction of the dimple.
9. The Bernoulli chuck according to claim 7, wherein a sealing structure is provided between the chuck core and the chuck shell for sealing the air cavity.
10. The Bernoulli chuck of claim 1, wherein the chuck shell is provided with a plurality of through holes for reducing weight and facilitating detection of the battery pieces.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222920547.6U CN218769463U (en) | 2022-11-02 | 2022-11-02 | Bernoulli sucker |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222920547.6U CN218769463U (en) | 2022-11-02 | 2022-11-02 | Bernoulli sucker |
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| Publication Number | Publication Date |
|---|---|
| CN218769463U true CN218769463U (en) | 2023-03-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202222920547.6U Active CN218769463U (en) | 2022-11-02 | 2022-11-02 | Bernoulli sucker |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116779523A (en) * | 2023-08-17 | 2023-09-19 | 苏州智程半导体科技股份有限公司 | Bernoulli chuck for cleaning thin semiconductor substrate |
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2022
- 2022-11-02 CN CN202222920547.6U patent/CN218769463U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116779523A (en) * | 2023-08-17 | 2023-09-19 | 苏州智程半导体科技股份有限公司 | Bernoulli chuck for cleaning thin semiconductor substrate |
| CN116779523B (en) * | 2023-08-17 | 2023-10-17 | 苏州智程半导体科技股份有限公司 | Bernoulli chuck for cleaning thin semiconductor substrate |
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