CN112933638A - 8N electronic grade high-purity ammonia rectification system and quality control method thereof - Google Patents

8N electronic grade high-purity ammonia rectification system and quality control method thereof Download PDF

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Publication number
CN112933638A
CN112933638A CN202110054718.9A CN202110054718A CN112933638A CN 112933638 A CN112933638 A CN 112933638A CN 202110054718 A CN202110054718 A CN 202110054718A CN 112933638 A CN112933638 A CN 112933638A
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China
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pipe
tower
outlet pipe
flowmeter
feeding
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CN202110054718.9A
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Inventor
赵晓兰
潘佳伟
丁高松
潘伟
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Haining Indusair Electronics Co ltd
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Haining Indusair Electronics Co ltd
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Priority to CN202110054718.9A priority Critical patent/CN112933638A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D3/00Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/14Fractional distillation or use of a fractionation or rectification column
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D3/00Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/14Fractional distillation or use of a fractionation or rectification column
    • B01D3/32Other features of fractionating columns ; Constructional details of fractionating columns not provided for in groups B01D3/16 - B01D3/30
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D3/00Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/14Fractional distillation or use of a fractionation or rectification column
    • B01D3/32Other features of fractionating columns ; Constructional details of fractionating columns not provided for in groups B01D3/16 - B01D3/30
    • B01D3/322Reboiler specifications
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D3/00Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/42Regulation; Control
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01CAMMONIA; CYANOGEN; COMPOUNDS THEREOF
    • C01C1/00Ammonia; Compounds thereof
    • C01C1/02Preparation, purification or separation of ammonia
    • C01C1/10Separation of ammonia from ammonia liquors, e.g. gas liquors

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)

Abstract

The invention provides an 8N electronic grade high-purity ammonia rectification system, wherein a reboiling inlet pipe and a reboiling outlet pipe are connected between a reboiler and a rectification tower, a hot water inlet pipe and a hot water outlet pipe are also connected on the reboiler, a condensation inlet pipe and a condensation outlet pipe are connected between a condenser and the rectification tower, a cold water inlet pipe and a cold water outlet pipe are connected on the condenser, a tower top waste discharge pipe is connected on an exhaust outlet of the condenser, a feed pipe, a product collection outlet pipe and a tower kettle discharge pipe are connected with the rectification tower, an analysis sampling pipe is arranged on the product collection outlet pipe, and a vaporizer is arranged at the inlet end of the feed pipe. The system controls and observes the processes of feeding, rectifying, reboiling, condensing, tower top waste discharging, tower kettle waste discharging and product extracting, can ensure the stability of operation and the yield of products, can also ensure the high purity of the products, and finally realizes the ordered, quantitative and high-quality production of the products.

Description

8N electronic grade high-purity ammonia rectification system and quality control method thereof
Technical Field
The invention belongs to the technical field of industrial production of high-purity ammonia, and particularly relates to an 8N electronic grade high-purity ammonia rectification system and a quality control method thereof.
Background
The rectification technology is the most widely applied separation technology in the chemical production process and is also the most mature technology. The operation of the rectification system affects the material balance in the tower, the mass transfer, heat transfer and gas-liquid balance processes, and finally the product quality and the product yield. Crude ammonia is mostly adopted for producing electronic grade high-purity ammonia (purity: 99.99999%), and a rectifying tower is utilized to separate impurity components in the crude ammonia, so that a high-purity liquid ammonia product is obtained. The electronic grade high-purity ammonia has high purity, and the quality control of a rectification system is particularly important.
In the prior art, the existing quality control method cannot stably control the technological parameters of rectification, ensure the product yield while ensuring the product purity, and cannot stably produce.
Disclosure of Invention
The invention aims to provide an 8N electronic-grade high-purity ammonia rectification system and a quality control method thereof, wherein the system can ensure the stability of operation and the yield of products and the high purity of the products by controlling and observing the processes of feeding, rectification, reboiling, condensation, waste discharge at the top of a tower, waste discharge at a bottom of the tower and product extraction, and finally realize the ordered, quantitative and high-quality production of the products.
The technical scheme of the invention is as follows: the utility model provides an 8N electronic level high pure ammonia rectification system, it includes rectifying column, reboiler, condenser, vaporizer, inlet pipe, top of the tower row waste pipe, product acquisition outlet pipe and tower cauldron calandria, its characterized in that, reboiler and rectifying column between be connected with reboiling import pipe and reboiling outlet pipe, still be connected with hot water inlet tube and hot water outlet pipe on the reboiler, be connected with condensation import pipe and condensation outlet pipe between condenser and the rectifying column, be connected with cold water inlet tube and cold water outlet pipe on the condenser, top of the tower row waste pipe connect on the exhanst outlet of condenser, inlet pipe, product acquisition outlet pipe and tower cauldron calandria are connected with the rectifying column, are equipped with the analysis sampling tube on the product acquisition outlet pipe.
Further, the inlet pipe on be equipped with first flowmeter, first manometer and first governing valve and the three are interlock connection, be equipped with second manometer and level gauge on the rectifying column, be equipped with second flowmeter and second governing valve on the condensation outlet pipe and both are interlock connection, be equipped with third flowmeter and third governing valve and both are interlock connection on the top of the tower exhaust pipe, be equipped with fourth flowmeter and fourth governing valve and both are interlock connection on the product collection outlet pipe, be equipped with fifth flowmeter and fifth governing valve and both are interlock connection on the cold water outlet pipe, be equipped with sixth flowmeter and sixth governing valve and level gauge on the tower cauldron calandria, sixth flowmeter and sixth governing valve three interlock connection, be equipped with seventh flowmeter and seventh governing valve and second manometer on the hot water outlet pipe, seventh flowmeter and seventh governing valve three interlock connection.
Furthermore, the condenser is positioned at the top of the rectifying tower, and the reboiler is positioned at the lower side of the rectifying tower.
The system is characterized in that a first flowmeter, a first pressure gauge and a first regulating valve are arranged on a feeding pipe, a second pressure gauge and a liquid level gauge are arranged on a rectifying tower, a second flowmeter and a second regulating valve are arranged on a condensation outlet pipe, a third flowmeter and a third regulating valve are arranged on a waste discharge pipe at the top of a tower, a fourth flowmeter and a fourth regulating valve are arranged on a product collection outlet pipe, a fifth flowmeter and a fifth regulating valve are arranged on a cold water outlet pipe, a sixth flowmeter and a sixth regulating valve are arranged on a drain pipe at the bottom of the tower, a seventh flowmeter and a seventh regulating valve are arranged on a hot water outlet pipe, a reboiler can control the tower pressure in the rectifying tower, and a condenser controls the cold quantity, the system has effective control and observation on the processes of feeding, rectifying, reboiling, condensing, tower top waste discharging, tower bottom waste discharging and product extracting, and can ensure the stability of operation, the yield of the product and finally the high purity of the product.
A quality control method of an 8N electronic grade high-purity ammonia rectification system is characterized by comprising the following steps:
firstly, raw material feeding control: feeding the raw ammonia through a feeding pipe after the raw ammonia is vaporized by a vaporizer, controlling feeding pressure through a first regulating valve, controlling feeding flow by a first flow meter, and detecting feeding pressure by a first pressure meter;
secondly, rectification control: the tower pressure of the rectifying tower is controlled by the hot water flow of a reboiler, the cooling water flow of a condenser at the tower top is used for controlling the cooling capacity in the rectifying process, the reflux flow of the cooling water is controlled by a second flowmeter, the liquid level of the rectifying tower is detected by a liquid level meter, the discharge capacity of a tower kettle discharge pipe is controlled by a sixth flowmeter and a sixth regulating valve, and the discharge capacity of a tower top waste discharge pipe is controlled by a third flowmeter and a third regulating valve;
thirdly, controlling the extracted product: the product collection outlet pipe is provided with an analysis sampling pipe and is connected with an analysis instrument for detection in 24H time, and a fourth flowmeter and a fourth regulating valve of the product collection outlet pipe control and set extraction flow so as to ensure stable and stable extraction.
In the raw material feeding control process, the feeding pipe controls the feeding state, the feeding pressure and the feeding flow, and the feeding is stabilized by setting a flow value and a pressure value.
In the rectification control process, the set pressure of the rectification tower is controlled through the hot water flow of the reboiler, the pressure and the temperature of liquid ammonia are in a corresponding relation, the constant pressure is equal to the constant temperature, the reflux quantity is set, the reflux quantity is stabilized through flow control, the liquid level of the tower kettle is set, the materials of the pipe arrangement of the tower kettle are controlled, the product recovery rate is ensured, and the third regulating valve and the third flow meter of the waste discharge pipe at the top of the tower control the waste discharge at the top of the tower.
In the process of controlling the extracted product, the extracted amount of the product is automatically adjusted according to the specification of the rectifying tower, the feeding amount of the raw material and the extraction of the tower kettle, so that the product yield is ensured.
And in the rectification control process, a fifth flowmeter and a fifth regulating valve on the cold water outlet pipe control the cold water flow of the condenser.
In the rectification control process, the hot water outlet pipe detects the pressure at the top of the rectification tower according to the second pressure gauge and then adjusts the hot water flow of the reboiler through the seventh adjusting valve and the seventh flowmeter.
The 8N electronic-grade high-purity ammonia rectification system and the quality control method thereof have the advantages that the system can control and observe the processes of feeding, rectification, reboiling, condensation, waste discharge at the top of the tower, waste discharge at the bottom of the tower and product extraction, thereby not only ensuring the stability of operation and the yield of products, but also ensuring the high purity of the products and finally realizing the ordered, quantitative and high-quality production of the products.
Drawings
FIG. 1 is a schematic structural diagram of an 8N electronic-grade high-purity ammonia rectification system and a quality control method thereof.
In the figure: 1. a second pressure gauge; 2. a first pressure gauge; 3. a condensation inlet pipe; 4. a cold water outlet pipe; 5. a fifth regulating valve; 6. a fifth flow meter; 7. a third flow meter; 8. a waste discharge pipe at the top of the tower; 9. a third regulating valve; 10. a cold water inlet pipe; 11. a condenser; 12. a condensation outlet pipe; 13. a second flow meter; 14. a second regulating valve; 15. analyzing the sampling tube; 16. a fourth flow meter; 17. a product collection outlet pipe; 18. a liquid level meter; 19. tower still calandria; 20. a sixth regulating valve; 21. a sixth flow meter; 22. reboiling the inlet pipe; 23. a reboiled outlet pipe; 24. a hot water inlet pipe; 25. a hot water outlet pipe; 26. a seventh flow meter; 27. a seventh regulating valve; 28. a reboiled outlet pipe; 29. a rectifying tower; 30. a first regulating valve; 31. a first flow meter; 32. a feed pipe; 33. and a fourth regulating valve.
Detailed Description
As shown in figure 1, the technical scheme of the invention is an 8N electronic-grade high-purity ammonia rectification system, which comprises a rectification tower 29, a reboiler, a condenser 11, a vaporizer, a feed pipe 32, a tower top waste discharge pipe 8, a product collection outlet pipe 17 and a tower kettle discharge pipe 19, it is characterized in that a reboiling inlet pipe 22 and a reboiling outlet pipe 2823 are connected between the reboiler and the rectifying tower 29, a hot water inlet pipe 24 and a hot water outlet pipe 25 are connected on the reboiler, a condensation inlet pipe 3 and a condensation outlet pipe 12 are connected between the condenser 11 and the rectifying tower 29, a cold water inlet pipe 10 and a cold water outlet pipe 4 are connected on the condenser 11, the waste discharge pipe 8 at the top of the tower is connected to the exhaust outlet of the condenser 11, the feed pipe 32, the product collection outlet pipe 17 and the tower kettle exhaust pipe 19 are connected with the rectifying tower 29, the product collection outlet pipe 17 is provided with an analysis sampling pipe 15, and the vaporizer is arranged at the inlet end of the feed pipe 32.
Further, the feeding pipe 32 is provided with a first flowmeter 31, a first pressure gauge 2 and a first regulating valve 30 which are in interlocking connection, the rectifying tower 29 is provided with a second pressure gauge 1 and a liquid level gauge 18, the condensation outlet pipe 12 is provided with a second flowmeter 13 and a second regulating valve 14 which are in interlocking connection, the tower top waste discharge pipe 8 is provided with a third flowmeter 7 and a third regulating valve 9 which are in interlocking connection, the product collection outlet pipe 17 is provided with a fourth flowmeter 16 and a fourth regulating valve 33 which are in interlocking connection, the cold water outlet pipe 4 is provided with a fifth flowmeter 6 and a fifth regulating valve 5 which are in interlocking connection, the tower kettle discharge pipe 19 is provided with a sixth flowmeter 21 and a sixth regulating valve 20 which are in interlocking connection, the liquid level gauge 18, the sixth flowmeter 21 and the sixth regulating valve 20 are in interlocking connection, the hot water outlet pipe 25 is provided with a seventh flowmeter 26 and a seventh regulating valve 27, and the second pressure gauge 1, The seventh flow meter 26 and the seventh regulating valve 27 are connected in an interlocking manner.
Further, the condenser 11 is located at the top of the rectifying tower 29, and the reboiler is located at the lower side of the rectifying tower 29.
A quality control method of an 8N electronic grade high-purity ammonia rectification system is characterized by comprising the following steps:
firstly, raw material feeding control: after the crude ammonia is vaporized by a vaporizer, feeding is carried out by a feeding pipe 32, the feeding pressure is controlled by a first regulating valve 30, the feeding flow is controlled by a first flowmeter 31, and the feeding pressure is detected by a first pressure gauge 2;
secondly, rectification control: the hot water flow of a reboiler is used for controlling the tower pressure of a rectifying tower 29, the cooling water flow of a condenser 11 at the top of the tower is used for controlling the cold quantity in the rectifying process, the reflux flow of the cooling water is controlled by a second flowmeter 13, the liquid level of the rectifying tower 29 is detected by a liquid level meter 18, a sixth flowmeter 21 and a sixth regulating valve 20 are used for controlling the discharge capacity of a tower kettle discharge pipe 19, and the waste discharge quantity of a tower top waste discharge pipe 8 is controlled by a third flowmeter 7 and a third regulating valve 9;
thirdly, controlling the extracted product: the product collection outlet pipe 17 is provided with an analysis sampling pipe 15, the analysis sampling pipe is connected with an analysis instrument for detection at 24H time, and the fourth flowmeter 16 and the fourth regulating valve 33 of the product collection outlet pipe 17 control and set the flow rate of the collected product, so that stable and stable collection is ensured.
In the raw material feeding control process, the feeding pipe 32 controls the feeding state, the feeding pressure and the feeding flow rate, and the feeding is stabilized by setting a flow rate value and a pressure value.
In the rectification control process, the set pressure of the rectifying tower 29 is controlled through the hot water flow of the reboiler, the pressure and the temperature of liquid ammonia are in a corresponding relation, the constant pressure is equal to the constant temperature, the reflux quantity is set, the liquid level of the tower kettle is set through flow control and stable reflux quantity, the material of the tower kettle discharge pipe 19 is controlled, the product recovery rate is ensured, and the third regulating valve 9 and the third flow meter 7 of the tower top waste discharge pipe 8 control the tower top waste discharge.
In the process of controlling the extracted product, the extracted amount of the product is automatically adjusted according to the specification of the rectifying tower 29, the feeding amount of raw materials and the extraction of a tower kettle, so that the product yield is ensured.
In the rectification control process, the fifth flowmeter 6 and the fifth regulating valve 5 on the cold water outlet pipe 4 control the cold water flow of the condenser 11.
In the rectification control process, the hot water outlet pipe 25 detects the pressure at the top of the rectification tower 29 according to the second pressure gauge 1, and then adjusts the hot water flow of the reboiler through the seventh adjusting valve 27 and the seventh flowmeter 26.
The 8N electronic-grade high-purity ammonia rectification system and the quality control method thereof have the advantages that the system can control and observe the processes of feeding, rectification, reboiling, condensation, waste discharge at the top of the tower, waste discharge at the bottom of the tower and product extraction, thereby not only ensuring the stability of operation and the yield of products, but also ensuring the high purity of the products and finally realizing the ordered, quantitative and high-quality production of the products.
A first flowmeter 31, a first pressure gauge 2 and a first regulating valve 30 are arranged on a feeding pipe 32 of the system, a second pressure gauge 1 and a liquid level gauge 18 are arranged on a rectifying tower 29, a second flowmeter 13 and a second regulating valve 14 are arranged on a condensation outlet pipe 12, a third flowmeter 7 and a third regulating valve 9 are arranged on a tower top waste discharge pipe 8, a fourth flowmeter 16 and a fourth regulating valve 33 are arranged on a product collection outlet pipe 17, a fifth flowmeter 6 and a fifth regulating valve 5 are arranged on a cold water outlet pipe 4, a sixth flowmeter 21 and a sixth regulating valve 20 are arranged on a tower bottom discharge pipe 19, a seventh flowmeter 26 and a seventh regulating valve 27 are arranged on a hot water outlet pipe 25, a reboiler can control the tower pressure in the rectifying tower 29, a condenser 11 controls the cold quantity in the rectifying process, and the system has effective control and observation on the processes of feeding, rectifying, reboiling, condensation, tower top waste discharge, tower bottom waste discharge and product extraction, can ensure the stability of operation, the yield of the product and finally the high purity of the product.

Claims (8)

1. The utility model provides an 8N electronic level high pure ammonia rectification system, it includes rectifying column, reboiler, condenser, vaporizer, inlet pipe, top of the tower row waste pipe, product acquisition outlet pipe and tower cauldron calandria, its characterized in that, reboiler and rectifying column between be connected with reboiling import pipe and reboiling outlet pipe, still be connected with hot water inlet tube and hot water outlet pipe on the reboiler, be connected with condensation import pipe and condensation outlet pipe between condenser and the rectifying column, be connected with cold water inlet tube and cold water outlet pipe on the condenser, top of the tower row waste pipe connect on the exhanst outlet of condenser, inlet pipe, product acquisition outlet pipe and tower cauldron calandria are connected with the rectifying column, are equipped with the analysis sampling tube on the product acquisition outlet pipe. Further, the inlet pipe on be equipped with first flowmeter, first manometer and first governing valve and the three are interlock connection, be equipped with second manometer and level gauge on the rectifying column, be equipped with second flowmeter and second governing valve on the condensation outlet pipe and both are interlock connection, be equipped with third flowmeter and third governing valve and both are interlock connection on the top of the tower exhaust pipe, be equipped with fourth flowmeter and fourth governing valve and both are interlock connection on the product collection outlet pipe, be equipped with fifth flowmeter and fifth governing valve and both are interlock connection on the cold water outlet pipe, be equipped with sixth flowmeter and sixth governing valve and level gauge on the tower cauldron calandria, sixth flowmeter and sixth governing valve three interlock connection, be equipped with seventh flowmeter and seventh governing valve and second manometer on the hot water outlet pipe, seventh flowmeter and seventh governing valve three interlock connection.
2. An 8N electronic grade high purity ammonia rectification system as claimed in claim 1 wherein the condenser is located at the top of the rectification column and the reboiler is located at the lower side of the rectification column.
3. A quality control method of an 8N electronic grade high-purity ammonia rectification system is characterized by comprising the following steps:
firstly, raw material feeding control: feeding the raw ammonia through a feeding pipe after the raw ammonia is vaporized by a vaporizer, controlling feeding pressure through a first regulating valve, controlling feeding flow by a first flow meter, and detecting feeding pressure by a first pressure meter;
secondly, rectification control: the tower pressure of the rectifying tower is controlled by the hot water flow of a reboiler, the cooling water flow of a condenser at the tower top is used for controlling the cooling capacity in the rectifying process, the reflux flow of the cooling water is controlled by a second flowmeter, the liquid level of the rectifying tower is detected by a liquid level meter, the discharge capacity of a tower kettle discharge pipe is controlled by a sixth flowmeter and a sixth regulating valve, and the discharge capacity of a tower top waste discharge pipe is controlled by a third flowmeter and a third regulating valve;
thirdly, controlling the extracted product: the product collection outlet pipe is provided with an analysis sampling pipe and is connected with an analysis instrument for detection in 24H time, and a fourth flowmeter and a fourth regulating valve of the product collection outlet pipe control and set extraction flow so as to ensure stable and stable extraction.
4. The method for controlling the quality of an 8N electronic grade high-purity ammonia rectification system according to claim 3, wherein in the first step, the feeding pipe controls the feeding state, the feeding pressure and the feeding flow rate, and the feeding is stabilized by setting the flow rate value and the pressure value.
5. The method according to claim 3, wherein in the second step, the reboiler controls the set distillation column pressure of the distillation column through the hot water flow, the liquid ammonia pressure and the temperature are in a corresponding relationship, the constant pressure is equal to the constant temperature, the set reflux amount is controlled, the product recovery rate is ensured by controlling the flow rate, stabilizing the reflux amount, setting the liquid level of the column bottom, controlling the material of the tube bank of the column bottom, and the third regulating valve and the third flow meter of the waste discharge tube at the top of the column control the waste discharge at the top of the column.
6. The method for controlling the quality of an 8N electronic-grade high-purity ammonia rectification system according to claim 3, wherein in the third step, the product output is automatically adjusted according to the specification of the rectification tower, the feeding amount of raw materials and the output of a tower kettle, so that the product yield is ensured.
7. The method as claimed in claim 3, wherein in step two, the fifth flow meter and the fifth regulating valve on the cold water outlet pipe control the cold water flow of the condenser.
8. The method for controlling the quality of an 8N electronic grade high purity ammonia rectification system according to claim 3, wherein in the second step, the hot water outlet pipe detects the pressure at the top of the rectification tower according to a second pressure gauge and then adjusts the hot water flow of the reboiler through a seventh adjusting valve and a seventh flowmeter.
CN202110054718.9A 2021-01-15 2021-01-15 8N electronic grade high-purity ammonia rectification system and quality control method thereof Pending CN112933638A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116147286A (en) * 2022-12-05 2023-05-23 广钢气体(广州)有限公司 High-purity oxygen rectification control method and device thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE311628B (en) * 1962-12-19 1969-06-23 Shell Int Research
CN101590331A (en) * 2009-04-15 2009-12-02 华东理工大学 Ethylene rectification tower sensitive plate temperature control system and control method thereof
CN208770881U (en) * 2018-07-24 2019-04-23 河南莱帕克化工设备制造有限公司 Sieve plate rectification experimental apparatus
CN111282305A (en) * 2020-03-16 2020-06-16 上海化工研究院有限公司 Device for rectifying and purifying fluorine-containing solvent by continuous lateral line discharging

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE311628B (en) * 1962-12-19 1969-06-23 Shell Int Research
CN101590331A (en) * 2009-04-15 2009-12-02 华东理工大学 Ethylene rectification tower sensitive plate temperature control system and control method thereof
CN208770881U (en) * 2018-07-24 2019-04-23 河南莱帕克化工设备制造有限公司 Sieve plate rectification experimental apparatus
CN111282305A (en) * 2020-03-16 2020-06-16 上海化工研究院有限公司 Device for rectifying and purifying fluorine-containing solvent by continuous lateral line discharging

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116147286A (en) * 2022-12-05 2023-05-23 广钢气体(广州)有限公司 High-purity oxygen rectification control method and device thereof
CN116147286B (en) * 2022-12-05 2024-01-12 广钢气体(广州)有限公司 High-purity oxygen rectification control method and device thereof

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Address after: 314400 No.38 Anjiang Road, Jianshan New District, Haining City, Jiaxing City, Zhejiang Province

Applicant after: Zhejiang yingdesai semiconductor materials Co.,Ltd.

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Application publication date: 20210611