CN217498695U - System for refining trichlorosilane - Google Patents
System for refining trichlorosilane Download PDFInfo
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- CN217498695U CN217498695U CN202221551016.8U CN202221551016U CN217498695U CN 217498695 U CN217498695 U CN 217498695U CN 202221551016 U CN202221551016 U CN 202221551016U CN 217498695 U CN217498695 U CN 217498695U
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Abstract
The utility model discloses a system for refined trichlorosilane belongs to polycrystalline silicon production technical field, including knockout tower and DCS system, the tower cauldron portion of knockout tower is equipped with thermometer and pressure gauge, be connected with the trichlorosilane pipeline on the knockout tower and retrieve the trichlorosilane pipeline, pipeline I connects the storage tank through the top of the tower of knockout tower, be connected with dichlorosilane on the storage tank and adopt the pipeline, dichlorosilane adopts and is equipped with valve I on the pipeline, the storage tank passes through backflow pipeline and is connected with knockout tower upper portion, the tower cauldron of knockout tower is connected with refined trichlorosilane pipeline, the DCS system respectively with the thermometer, the pressure gauge, valve I control connection, in having solved polycrystalline silicon production reduction workshop section among the prior art, the refined trichlorosilane in-process of input raw materials, there is great fluctuation in trichlorosilane and dichlorosilane's proportion, lead to the unstable problem of product quality.
Description
Technical Field
The utility model belongs to the technical field of polycrystalline silicon production facility, concretely relates to system for refining trichlorosilane.
Background
In the production of polycrystalline silicon, the content of dichlorosilane needs to be controlled in the refining of trichlorosilane used by the reduction furnace, and the content of dichlorosilane is usually controlled to be 2-5%. With the continuous improvement of the deposition rate and product quality requirements of various enterprises on the reduction process, the content of dichlorosilane in the refined trichlorosilane for reduction needs to be controlled in a very narrow range.
The method for controlling the content of dichlorosilane in refined trichlorosilane in the industry at present mainly controls the content of dichlorosilane in the recovered refined trichlorosilane by controlling the yield of dichlorosilane at the tower top of a separation tower for recovering and rectifying dichlorosilane, and then mixes the recovered refined trichlorosilane with the synthesized and rectified trichlorosilane in a refined trichlorosilane buffer tank to reach the required concentration. The method is an empirical method, and the extraction amount at the top of the dichlorosilane separation tower is estimated mainly according to the content of dichlorosilane in the recovered and rectified raw materials, so that the concentration of dichlorosilane in the refined trichlorosilane is controlled.
In the method, when the concentration fluctuation of dichlorosilane in the raw material is large, the problem of large concentration fluctuation of dichlorosilane in the refined trichlorosilane exists; in addition, the final product of refined trichlorosilane is the mixture of recovered refined trichlorosilane and synthetic rectified refined trichlorosilane, and the flow rates of two materials generally fluctuate to a certain extent, so that the concentration of dichlorosilane in the final refined trichlorosilane fluctuates, and the product quality is unstable.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the problem that the proportion of trichlorosilane and dichlorosilane is greatly fluctuated to cause unstable product quality in the process of inputting raw materials to refine trichlorosilane in the reduction working section for producing polycrystalline silicon in the prior art.
In order to achieve the above purpose, the technical solution of the present invention is as follows:
the utility model provides a system for refine trichlorosilane, including knockout tower and DCS system, the tower cauldron portion of knockout tower is equipped with thermometer and pressure gauge, be connected with the trichlorosilane pipeline on the knockout tower and retrieve the trichlorosilane pipeline, the top of the tower of knockout tower passes through pipeline I and connects the storage tank, be connected with dichlorosilane extraction pipeline on the storage tank, be equipped with valve I on the dichlorosilane extraction pipeline, the storage tank passes through backflow pipeline and is connected with knockout tower upper portion, the tower cauldron of knockout tower is connected with the refined trichlorosilane pipeline, the DCS system respectively with thermometer, pressure gauge, valve I control connection.
Further, a shell-and-tube heat exchanger is connected with a tower kettle of the separation tower.
Furthermore, a condenser is arranged on a pipeline connecting the separation tower and the storage tank.
Furthermore, a booster pump I is arranged on a dichlorosilane extraction pipeline connected with the storage tank; a booster pump II is arranged on the refined trichlorosilane pipeline.
Furthermore, the booster pump I and the booster pump II both use a shield pump.
Furthermore, a valve II is arranged on the return pipeline, and a valve III is arranged on the refined trichlorosilane pipeline.
The utility model has the advantages that:
one, the utility model discloses in, adopt this system for refining trichlorosilane, dichlorosilane's in the refined trichlorosilane of control that can be accurate content of dichlorosilane among the trichlorosilane is adjusted in real time to promote the stability of reducing furnace control, can promote the quality of polycrystalline silicon product, the fine and close rate of polycrystalline silicon promotes 8~12%, reduces the power consumption simultaneously and reduces 10%, and single ton polycrystalline silicon practices thrift the cost more than 1000 yuan.
Secondly, the utility model discloses in, the tower cauldron of knockout tower is connected with shell and tube type heat exchanger, also can adopt the heating of saturated vapor, also can adopt the chlorosilane steam heating on other rectifying column tops of the tower.
Thirdly, in the utility model, a condenser is arranged on the pipeline connecting the separation tower and the storage tank and is used for cooling the gas-phase dichlorosilane to a liquid phase.
Fourthly, in the utility model, a booster pump I is arranged on the dichlorosilane extraction pipeline connected with the storage tank, and the booster pump is used for pumping the liquid-phase dichlorosilane to the next working procedure; the booster pump II is arranged on the refined trichlorosilane pipeline to ensure that the refined trichlorosilane is output as expected, and the booster pump I and the booster pump II both adopt shielding pumps to ensure that materials cannot be leaked.
Fifthly, the utility model discloses in, be equipped with valve II on the back flow line, be equipped with valve III on the refined trichlorosilane pipeline, through control flap II, valve III's aperture, guarantee that refined trichlorosilane composition content is in a stable range, guarantee off-the-shelf quality.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic structural diagram of another embodiment.
Fig. 3 is a schematic structural diagram of an embodiment.
Wherein, 1, a separation tower; 2. a DCS system; 3. a thermometer; 4. a pressure gauge; 5. a trichlorosilane pipeline; 6. a pipeline for recovering trichlorosilane; 7. a pipeline I; 8. a storage tank; 9. a dichlorosilane production pipeline; 10. a valve I; 11. a return line; 12. a pipeline for refining trichlorosilane; 13. a shell-and-tube heat exchanger; 14. a condenser; 15. a booster pump I; 16. a booster pump II; 17. a valve II; 18. a valve III; 1.1, tower top; 1.2, tower bottom.
Detailed Description
The present invention will be described in further detail with reference to examples, but the embodiments of the present invention are not limited thereto.
Example 1
The utility model provides a system for refined trichlorosilane, belong to polycrystalline silicon production technical field, including knockout tower 1 and DCS system 2, 1.2 portions of the tower cauldron of knockout tower 1 are equipped with thermometer 3 and pressure gauge 4, refer to figure 1, be connected with trichlorosilane pipeline 5 and retrieve trichlorosilane pipeline 6 on the knockout tower 1, 1.1 at the top of the tower of knockout tower 1 passes through pipeline I7 and connects storage tank 8, be connected with dichlorosilane extraction pipeline 9 on the storage tank 8, dichlorosilane extraction pipeline 9 is last to be equipped with valve I10, storage tank 8 passes through backflow pipeline 11 and is connected with 1 upper portion of knockout tower, 1.2 of the tower cauldron of knockout tower 1 is connected with refined trichlorosilane pipeline 12, DCS system 2 respectively with thermometer 3, 4, valve I10 control connection.
In the system for refining trichlorosilane, the thermometer 3 arranged on the separation tower 1 is used for detecting the temperature of a liquid phase in the tower kettle 1.2, the pressure gauge 4 is used for detecting the pressure in the separation tower 1, and the DCS system 2 is respectively connected with the thermometer 3, the pressure gauge 4 and the valve I10 in a control manner, that is, the DCS system 2 can receive data detected by instruments such as the thermometer 3 and the pressure gauge 4, and the DCS system 2 calculates and analyzes the concentration of dichlorosilane in trichlorosilane in the separation tower 1 according to the collected temperature and pressure data, so as to adjust the opening degree of the valve on the upper gas pipe of the separation tower 1, and realize real-time adjustment of the concentration of dichlorosilane in trichlorosilane within an expected range, thereby ensuring the quality of final products.
Example 2
This example is a further optimization over example 1, with the difference that the column bottom 1.2 of the separation column 1 is connected to a shell-and-tube heat exchanger 13, see fig. 2. In this embodiment, it is preferable that the reboiler heats the bottom 1.2 of the separation column 1 to vaporize the liquid in the bottom 1.2.
Example 3
Compared with the embodiment 1-2, the difference of this embodiment is that a condenser 14 is arranged on a pipeline connecting the separation tower 1 and the storage tank 8, referring to fig. 2, the condenser 14 is used for condensing the 1.1 dichlorosilane steam on the tower top into liquid dichlorosilane, a part of the liquid phase dichlorosilane in the storage tank 8 is extracted from the dichlorosilane extraction pipeline 9, and the other part returns to the separation tower 1 to be used as raw material gas, so as to control the content of dichlorosilane in the separation tower 1.
Example 4
Compared with the embodiments 1 to 3, the difference of this embodiment is that, referring to 2 or 3, a booster pump I15 is arranged on the dichlorosilane production pipeline 9 connected with the storage tank 8; a booster pump II16 is arranged on the refined trichlorosilane pipeline 12.
In this embodiment, the booster pump I15 and the booster pump II16 are preferably canned pumps.
Example 5
Compared with the embodiments 1-4, the difference of this embodiment is that a valve II17 is provided on the return line 11, and a valve III18 is provided on the refined trichlorosilane line 12, refer to FIG. 3.
Example 6
This embodiment further illustrates the technical solution by taking a production line implemented by this company as an example.
The system for refining trichlorosilane in the production line comprises a separation tower 1 and a DCS system 2, and is characterized in that a thermometer 3 and a pressure gauge 4 are arranged at a tower kettle 1.2 part of the separation tower 1, a trichlorosilane pipeline 5 and a trichlorosilane recovery pipeline 6 are connected to the separation tower 1, a tower top 1.1 of the separation tower 1 is connected with a storage tank 8 through a pipeline I7, a dichlorosilane extraction pipeline 9 is connected to the storage tank 8, a valve I10 is arranged on the dichlorosilane extraction pipeline 9, the storage tank 8 is connected with the upper part of the separation tower 1 through a backflow pipeline 11, a refined trichlorosilane pipeline 12 is connected to the tower kettle 1.2 of the separation tower 1, and the DCS system 2 is respectively in control connection with the thermometer 3, the pressure gauge 4 and the valve I10.
In this embodiment, a shell-and-tube heat exchanger 13 is connected to a column bottom 1.2 of the separation column 1, and a condenser 14 is provided on a pipeline connecting the separation column 1 and the storage tank 8.
In this embodiment, a booster pump I15 is arranged on the dichlorosilane production pipeline 9 connected with the storage tank 8; the refined trichlorosilane pipeline 12 is provided with a booster pump II16, and the booster pump I15 and the booster pump II16 both adopt shielding pumps.
In this embodiment, a valve II17 is disposed on the return line 11, and a valve III18 is disposed on the refined trichlorosilane line 12.
In the production of polycrystalline silicon, the concentration of dichlorosilane in trichlorosilane in the separation tower 1 cannot be directly measured in actual production, so that the quality of polycrystalline products is unstable. According to the scheme, temperature and pressure measurement signals of a tower kettle 1.2 of a separation tower 1 are introduced into a DCS (distributed control system) 2, Aspen software is adopted for fitting and obtaining the content of dichlorosilane in trichlorosilane, the pressure of the tower kettle 1.2 and the temperature of the tower kettle 1.2, after the DCS 2 receives real-time measured temperature and pressure data, the concentration of dichlorosilane in the trichlorosilane of the tower kettle 1.2 of the separation tower 1 is obtained through calculation according to a set formula, and therefore the opening degree of a valve I10 on a corresponding dichlorosilane extraction pipeline 9 and the opening degrees of corresponding valves on a trichlorosilane pipeline 5 and a trichlorosilane recovery pipeline 6 are adjusted, the content of dichlorosilane in trichlorosilane is guaranteed to be stable, and stable operation of production is guaranteed.
By adopting the system, the fluctuation of the concentration of dichlorosilane in the refined trichlorosilane can be controlled within the range of +/-0.1 percent, and the fluctuation range can only be controlled within 0.5 percent by adopting a conventional mode. The stable control of the concentration of dichlorosilane in the refined trichlorosilane plays a great role in the stable operation of the reduction furnace, the densification rate of the polycrystalline silicon product can be improved by 8-12%, and the reduction power consumption is reduced by more than 10%. By taking a 5 ten thousand tons of polysilicon annual production device as an example, after the scheme of the invention is adopted, the densification rate of a polysilicon product is improved to 65 percent from the original 55 percent, the reduction power consumption is reduced to 40 KW.h/kg from the original 44 KW.h/kg, the price of the polysilicon densified material is 1 ten thousand yuan higher than that of silicon materials with other qualities per ton, and the electricity price is 0.35 yuan per degree, so that the benefit created all the year around is about: 50000 ton × 10% × 1 ten thousand yuan/ton +50000 ton × 4 kw.h/kg × 0.35 × 1000 ÷ 10000=12000 ten thousand yuan.
Claims (6)
1. A system for refining trichlorosilane is characterized in that: the device comprises a separation tower (1) and a DCS (distributed control system) (2), a thermometer (3) and a pressure gauge (4) are arranged at a tower kettle (1.2) of the separation tower (1), a trichlorosilane pipeline (5) and a trichlorosilane recovery pipeline (6) are connected to the separation tower (1), a storage tank (8) is connected to the tower top (1.1) of the separation tower (1) through a pipeline I (7), a dichlorosilane extraction pipeline (9) is connected to the storage tank (8), a valve I (10) is arranged on the dichlorosilane extraction pipeline (9), the storage tank (8) is connected with the upper portion of the separation tower (1) through a backflow pipeline (11), a refined trichlorosilane pipeline (12) is connected to the tower kettle (1.2) of the separation tower (1), and the DCS (2) is respectively connected with the thermometer (3), the pressure gauge (4) and the valve I (10) in a control mode.
2. The system for refining trichlorosilane according to claim 1, wherein the system comprises: the tower kettle (1.2) of the separation tower (1) is connected with a shell-and-tube heat exchanger (13).
3. The system for refining trichlorosilane according to claim 1, wherein the system comprises: a condenser (14) is arranged on a pipeline connecting the separation tower (1) and the storage tank (8).
4. The system for refining trichlorosilane according to claim 1, wherein the system comprises: a booster pump I (15) is arranged on a dichlorosilane extraction pipeline (9) connected with the storage tank (8); a booster pump II (16) is arranged on the refined trichlorosilane pipeline (12).
5. The system for refining trichlorosilane according to claim 4, wherein the system comprises: and the booster pump I (15) and the booster pump II (16) both adopt shielding pumps.
6. The system for refining trichlorosilane according to claim 1, wherein the system comprises: a valve II (17) is arranged on the reflux pipeline (11), and a valve III (18) is arranged on the refined trichlorosilane pipeline (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221551016.8U CN217498695U (en) | 2022-06-21 | 2022-06-21 | System for refining trichlorosilane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221551016.8U CN217498695U (en) | 2022-06-21 | 2022-06-21 | System for refining trichlorosilane |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217498695U true CN217498695U (en) | 2022-09-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221551016.8U Active CN217498695U (en) | 2022-06-21 | 2022-06-21 | System for refining trichlorosilane |
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| Country | Link |
|---|---|
| CN (1) | CN217498695U (en) |
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2022
- 2022-06-21 CN CN202221551016.8U patent/CN217498695U/en active Active
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