CN112903681A - Automatic optical detection system and detection process for semiconductor product - Google Patents
Automatic optical detection system and detection process for semiconductor product Download PDFInfo
- Publication number
- CN112903681A CN112903681A CN202110134871.2A CN202110134871A CN112903681A CN 112903681 A CN112903681 A CN 112903681A CN 202110134871 A CN202110134871 A CN 202110134871A CN 112903681 A CN112903681 A CN 112903681A
- Authority
- CN
- China
- Prior art keywords
- detector
- fixedly connected
- rotating
- worm
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
Abstract
The invention belongs to the technical field of semiconductor device detection, in particular to an automatic optical detection system and a detection process for a semiconductor product, wherein the automatic optical detection system for the semiconductor product comprises a conveying belt, a detector is arranged at the top of the conveying belt, a fixing assembly for fixing the detector is arranged in the conveying belt, and the inner walls of two sides of the detector are connected with the same rotating box in a sliding manner. Need not artifical the removal, both improved detection efficiency and reduced staff's working strength.
Description
Technical Field
The invention relates to the technical field of semiconductor device detection, in particular to an automatic optical detection system and a detection process for a semiconductor product.
Background
In the detection technology of semiconductor devices, macroscopic detection needs to be performed on the devices, and optical detection is usually adopted for macroscopic detection, and the basic principle of the optical detection is as follows: light generated by the light source is irradiated on a semiconductor device to be inspected, and then the semiconductor device is inspected using an optical microscope.
However, different light sources are needed to be adopted for detecting different positions on a semiconductor device, in the prior art, a detection instrument needs to be replaced when different positions of a semiconductor are detected, so that detection can be performed, and when different positions of the semiconductor are detected, an optical microscope needs to be manually moved manually, so that the detection efficiency is influenced, the working strength of detection personnel is increased, and in addition, because the detection instrument is mostly placed on a conveying belt, the detection instrument is easy to shake when detection is performed, and the detection precision of the detection instrument is influenced.
Disclosure of Invention
The invention aims to solve the defects in the prior art, and provides an automatic optical detection system and a detection process for a semiconductor product, which have compact structure, can replace different detection light sources in the same detection instrument, do not need to manually move an optical microscope, and can keep the detection instrument from shaking during detection.
In order to achieve the purpose, the invention adopts the following technical scheme:
an automatic optical detection system for semiconductor products comprises a conveying belt, wherein a detector is placed at the top of the conveying belt, a fixed assembly for fixing the detector is arranged in the conveying belt, two inner walls of two sides of the detector are slidably connected with a same rotating box, a driving assembly for enabling the rotating box to slide is arranged at the top of the detector, two inner walls of two sides of the rotating box are rotatably connected with a same rotating shaft, two symmetrical turnplates are fixedly sleeved on the outer wall of the rotating shaft, a plurality of light sources are arranged on one side, close to each other, of the turnplates in an annular mode by taking the rotating shaft as a circle center, a sliding groove is formed in one side of the detector, a sliding plate penetrates through the sliding groove and is rotatably connected with one end of the rotating shaft, one side, close to the rotating box, of the sliding, one side of rotating the case is equipped with the rectangular channel, the top inner wall and the bottom inner wall sliding connection of rectangular channel have same slider, the one end of slider extends to and rotates incasement and fixedly connected with optical microscope, one side of rotating the case is equipped with and is used for making optical microscope make a round trip gliding slip subassembly.
The fixing component comprises fixing grooves arranged on two sides of the top of the conveying belt, two fixing blocks are fixedly connected to two sides of the bottom of the detector and extend into the fixing grooves, two symmetrical bolts are slidably connected to two sides of the conveying belt, one ends of the two bolts far away from the conveying belt are fixedly connected with the same connecting plate, tension springs are sleeved on the outer walls of the two bolts, one ends of the tension springs close to the connecting plate are fixedly connected with the connecting plate, one ends of the tension springs far away from the connecting plate are fixedly connected with the conveying belt, one ends of the two bolts far away from the connecting plate penetrate through the conveying belt and the fixing blocks, one ends of the two bolts far away from the connecting plate are provided with annular grooves, round rods are rotatably connected to two sides of the conveying belt, one ends of the two round rods are fixedly connected with brake rods, and, both of the brake levers extend into the annular groove.
The drive assembly is including fixing the rotation motor at the detector top, the output shaft fixedly connected with second synchronizing wheel that rotates the motor, the both sides inner wall that rotates the case rotates and is connected with same lead screw, the outer wall threaded connection of lead screw has screw nut, screw nut's bottom and the top fixed connection who rotates the case, the outer wall fixed cover of lead screw is equipped with first synchronizing wheel, the top of detector is equipped with the through-hole, the outside transmission of first synchronizing wheel and second synchronizing wheel is connected with same hold-in range, the hold-in range runs through the through-hole.
The change subassembly includes the driving motor of fixed connection in detector one side, the first helical gear of driving motor's output shaft fixedly connected with, the one end fixedly connected with trough of belt carousel of detector is kept away from to the axis of rotation, one side that the detector was kept away from to the slide is rotated and is connected with the pivot, the fixed cover of outer wall of pivot is equipped with worm wheel and rolling disc, one side fixedly connected with nose bar of slide is kept away from to the rolling disc, use the axis of rotation as centre of a circle annular equidistance a plurality of recesses of having arranged in the trough of belt carousel, the nose bar extends to in the.
The change subassembly still includes the support of fixed connection in slide one side, the support internal rotation is connected with the worm, worm and worm wheel mesh mutually, the support is run through to the one end that the axis of rotation was kept away from to the worm, the outer wall sliding connection of worm has the second sleeve, one side of detector is rotated and is connected with first sleeve, the one end that the worm was kept away from to the second sleeve extends to in the first sleeve and with first sleeve sliding connection, first telescopic one end fixedly connected with second helical gear, second helical gear and first helical gear mesh mutually.
The sliding assembly comprises a small motor fixedly connected to one side of the rotating box, an output shaft fixedly connected with first chain wheel of the small motor, two symmetrical second chain wheels are connected to one side of the rotating box in a rotating mode, the second chain wheels and the first chain wheels are connected with the same chain in a transmission mode, the chain is close to a connecting block fixedly connected to one side of the rotating box, and the connecting block is fixedly connected with the sliding block.
The light beam plates correspond to the light source, and light emitted by the light source can be constrained through the light beam plates so as to irradiate the light on the semiconductor.
And two symmetrical linear bearings are fixedly embedded on one side of the conveying belt, one end of the bolt penetrates through the linear bearings and is in sliding connection with the linear bearings, and the friction force of the conveying belt to the bolt can be reduced through the linear bearings.
The both sides inner wall that rotates the case all uses the axis of rotation to arrange a plurality of spacing grooves, two as centre of a circle annular equidistance a plurality of ball grooves of having arranged as centre of a circle annular equidistance with the axis of rotation in one side that the carousel kept away from each other, spacing groove and ball groove are corresponding, and are a plurality of the equal fixedly connected with spring of one side inner wall that the spacing groove was kept away from in the ball groove is a plurality of the equal roll connection of ball inslot has the ball, ball and spring touch mutually, when the axis of rotation drives the carousel and rotates, the ball can follow a spacing groove and roll into another spacing groove, plays certain braking to rotating shaft and carousel.
The detection process of the automatic optical detection system for the semiconductor products comprises the following steps:
s1, placing the detector on the conveyor belt, upwards rotating the round rod and the brake rod to enable the fixture block to be separated from the annular groove, releasing the brake of the fixture block on the bolt, pulling the connecting plate and the bolt outwards, starting to stretch the tension spring, separating the bolt from the fixed groove, enabling the fixed block to extend into the fixed groove, releasing the tension on the connecting plate and the bolt, enabling the bolt to penetrate through the conveyor belt and the fixed block to brake the fixed block under the action of the tension spring, then rotating the round rod and the brake rod to enable the fixture block to brake the bolt again, and preventing the detector from shaking during detection;
s2, starting a conveyer belt, moving the semiconductor into the detector to the right side by the conveyer belt, starting a rotating motor to drive a second synchronizing wheel to rotate, driving a first synchronizing wheel and a lead screw to rotate by the second synchronizing wheel through a synchronous belt, connecting the lead screw with a lead screw nut in a threaded manner, and moving a rotating box to a part to be detected by the lead screw nut along with the rotation of the lead screw;
s3, starting a driving motor to drive a first bevel gear to rotate, wherein the first bevel gear is meshed with the second bevel gear, the first bevel gear drives the second bevel gear, a first sleeve, a second sleeve and a worm to rotate, the worm is meshed with a worm wheel, the worm wheel drives a rotating shaft and a rotating disc to rotate along with the rotation of the worm, a convex rod rotates into a groove when the rotating disc rotates, and then a rotary disc with a groove and the rotating shaft can be driven to rotate, and the convex rod drives the rotary disc with the groove to rotate intermittently until a required light source rotates to the lowest part;
s4, when the grooved turntable and the rotating shaft rotate intermittently, the rotating shaft drives the turntable and the balls to rotate intermittently at the same time, and the balls roll from one limiting groove to enter the next limiting groove, so that the rotating shaft and the turntable can be prevented from shaking to influence detection;
s5, start the first sprocket of small motor drive and rotate, first sprocket passes through the chain and drives the second sprocket rotation, and then can drive connecting block and slider and make a round trip to slide in the rectangular channel along with the rotation of chain to can control the optical microscope and remove the position that needs the detection.
The invention has the following advantages:
1. insert the fixed block in the fixed slot, run through the fixed block through the bolt after that and fix the fixed block, then rotate round bar and brake lever downwards and make the fixture block to the braking of bolt again, prevent that the detector from rocking when detecting.
2. The worm extends to the second sleeve and slides and rotates with the second sleeve, the worm extends to the first sleeve and slides and is connected with the first sleeve, and then when the lead screw nut drives the rotating box, the rotating shaft and the sliding plate to slide, the worm can continue to be meshed with the worm wheel.
3. Be equipped with six recesses on the trough of belt carousel, when the rolling disc drove the nose bar and rotates, the nose bar extend to in the recess with recess sliding connection to drive trough of belt carousel rotation degree, make the trough of belt carousel do intermittent type and rotate, thereby can make the light source can rotate the true position.
4. Six light beam plates are fixedly connected between the two turntables, correspond to the light source, and can restrain light generated by the light source and irradiate the light on the semiconductor device.
5. The small-sized motor is started to drive the first chain wheel to rotate, the first chain wheel and the second chain wheel are in transmission connection with the same chain, the chain can be driven to rotate, and the chain drives the optical microscope to slide back and forth, so that different parts of the semiconductor can be detected as required.
6. The axis of rotation drives the carousel pivoted while the ball rolls out from the spacing groove, and the ball begins compression spring, and along with the rotation of axis of rotation and carousel, the ball rolls into next spacing groove, and the spring begins the extension, and the spring plays the braking rotation of removal with the ball top in the spacing groove, prevents that the carousel from driving the light source and rocking.
The detection device is simple in structure, the two bolts penetrate through the conveying belt and the fixed block and rotate the brake rod to enable the brake block to brake the bolts, so that the effect of fixing the detector is achieved, the detector is prevented from shaking, the driving motor is started to drive the rotary table with the belt groove and the rotary shaft to rotate, so that the corresponding light source can be selected according to needs, in addition, the light source and the optical microscope are controlled to move to the part needing to be detected through the rotation of the lead screw and the first chain wheel, manual movement is not needed, the detection efficiency is improved, and the working intensity of workers is also reduced.
Drawings
FIG. 1 is a side view of an automated optical inspection system for semiconductor products in accordance with the present invention;
FIG. 2 is a side cross-sectional view of an automatic optical inspection system for semiconductor products according to the present invention;
FIG. 3 is a top cross-sectional view of a detector of an automatic optical inspection system for semiconductor products according to the present invention;
FIG. 4 is a side sectional view of a fixing groove of an automatic optical inspection system for semiconductor products according to the present invention;
FIG. 5 is a top cross-sectional view of a mounting block of an automatic optical inspection system for semiconductor products according to the present invention;
FIG. 6 is a side view of the brake lever and latch of an automatic optical inspection system for semiconductor products in accordance with the present invention;
FIG. 7 is an enlarged view of the portion A of the automatic optical inspection system for semiconductor products according to the present invention;
FIG. 8 is a top cross-sectional view of a rotary box and a detector of an automated optical inspection system for semiconductor products according to the present invention;
FIG. 9 is a side view of a slotted turntable and rotating disk of an automated optical inspection system for semiconductor products in accordance with the present invention;
FIG. 10 is a side cross-sectional view of a rotary box of an automated optical inspection system for semiconductor products in accordance with the present invention;
FIG. 11 is a front view of a rotary box of an automatic optical inspection system for semiconductor products according to the present invention;
FIG. 12 is a top sectional view of the rotary box and the inspection apparatus according to the second embodiment;
FIG. 13 is a side sectional view of the rotary case of the second embodiment;
FIG. 14 is a side view of the turntable in the second embodiment;
fig. 15 is a top sectional view of the turntable in the second embodiment.
In the figure: 1. a conveyor belt; 2. a detector; 3. fixing grooves; 4. a fixed block; 5. a bolt; 6. an annular groove; 7. a tension spring; 8. a connecting plate; 9. a round bar; 10. a brake lever; 11. a clamping block; 12. a rotating box; 13. a lead screw nut; 14. a lead screw; 15. a first synchronizing wheel; 16. rotating the motor; 17. a second synchronizing wheel; 18. a synchronous belt; 19. a rotating shaft; 20. a turntable; 21. a light source; 22. a chute; 23. a slide plate; 24. a turntable with a groove; 25. a rotating shaft; 26. a worm gear; 27. rotating the disc; 28. a nose bar; 29. a groove; 30. a drive motor; 31. a first helical gear; 32. a first sleeve; 33. a second helical gear; 34. a second sleeve; 35. a worm; 36. a rectangular groove; 37. a slider; 38. an optical microscope; 39. a small-sized motor; 40. a first sprocket; 41. a second sprocket; 42. a chain; 43. connecting blocks; 44. a limiting groove; 45. a ball groove; 46. a spring; 47. a ball bearing; 48. a support; 49. a beam light plate; 50. a linear bearing; 51. and a through hole.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Example one
Referring to fig. 1-11, an automatic optical inspection system for semiconductor products comprises a conveyor belt 1, a detector 2 is disposed on the top of the conveyor belt 1, a fixing component for fixing the detector 2 is disposed in the conveyor belt 1, the inner walls of the two sides of the detector 2 are slidably connected with a rotating box 12, a driving component for enabling the rotating box 12 to slide is disposed on the top of the detector 2, the inner walls of the two sides of the rotating box 12 are rotatably connected with a rotating shaft 19, two symmetrical turntables 20 are fixedly sleeved on the outer wall of the rotating shaft 19, a plurality of light sources 21 are annularly and equidistantly arranged on the side, close to each other, of the two turntables 20 by taking the rotating shaft 19 as the center of a circle, a chute 22 is disposed on one side of the detector 2, one end of the rotating shaft 19 penetrates through the chute 22 and is rotatably connected with a sliding plate 23, one side, close, one side of the rotating box 12 is provided with a rectangular groove 36, the top inner wall and the bottom inner wall of the rectangular groove 36 are connected with the same sliding block 37 in a sliding manner, one end of the sliding block 37 extends into the rotating box 12 and is fixedly connected with an optical microscope 38, and one side of the rotating box 12 is provided with a sliding assembly used for enabling the optical microscope 38 to slide back and forth.
In the invention, a fixing component comprises fixing grooves 3 arranged at two sides of the top of a conveyer belt 1, two sides of the bottom of a detector 2 are fixedly connected with fixing blocks 4, the two fixing blocks 4 extend into the fixing grooves 3, two symmetrical bolts 5 are slidably connected with two sides of the conveyer belt 1, one end of each bolt 5 far away from the conveyer belt 1 is fixedly connected with a connecting plate 8, the outer walls of the two bolts 5 are sleeved with a tension spring 7, one end of each tension spring 7 close to the connecting plate 8 is fixedly connected with the connecting plate 8, one end of each tension spring 7 far away from the connecting plate 8 is fixedly connected with the conveyer belt 1, one end of each bolt 5 far away from the connecting plate 8 penetrates through the conveyer belt 1 and the fixing blocks 4, one ends of the two bolts 5 far away from the connecting plate 8 are respectively provided with an annular groove 6, two sides of, two symmetrical clamping blocks 11 are fixedly connected to the bottom of the brake lever 10, and both brake levers 10 extend into the annular groove 6.
In the invention, the driving assembly comprises a rotating motor 16 fixed at the top of the detector 2, an output shaft of the rotating motor 16 is fixedly connected with a second synchronous wheel 17, the inner walls of two sides of the rotating box 12 are rotatably connected with a same screw 14, the outer wall of the screw 14 is in threaded connection with a screw nut 13, the bottom of the screw nut 13 is fixedly connected with the top of the rotating box 12, the outer wall of the screw 14 is fixedly sleeved with a first synchronous wheel 15, the top of the detector 2 is provided with a through hole 51, the outer sides of the first synchronous wheel 15 and the second synchronous wheel 17 are in transmission connection with a same synchronous belt 18, and the synchronous belt 18 penetrates through.
In the invention, the replacing component comprises a driving motor 30 fixedly connected to one side of the detector 2, an output shaft of the driving motor 30 is fixedly connected with a first bevel gear 31, one end of a rotating shaft 19 far away from the detector 2 is fixedly connected with a grooved rotary table 24, one side of a sliding plate 23 far away from the detector 2 is rotatably connected with a rotating shaft 25, the outer wall of the rotating shaft 25 is fixedly sleeved with a worm wheel 26 and a rotating disc 27, one side of the rotating disc 27 far away from the sliding plate 23 is fixedly connected with a convex rod 28, a plurality of grooves 29 are annularly and equidistantly arranged in the grooved rotary table 24 by taking the rotating shaft 19 as a circle center.
In the invention, the replacing assembly further comprises a support 48 fixedly connected to one side of the sliding plate 23, a worm 35 is rotatably connected to the support 48, the worm 35 is meshed with the worm wheel 26, one end of the worm 35, far away from the rotating shaft 19, penetrates through the support 48, the outer wall of the worm 35 is slidably connected with a second sleeve 34, one side of the detector 2 is rotatably connected with a first sleeve 32, one end of the second sleeve 34, far away from the worm 35, extends into the first sleeve 32 and is slidably connected with the first sleeve 32, one end of the first sleeve 32 is fixedly connected with a second bevel gear 33, and the second bevel gear 33 is meshed with the first bevel gear 31.
In the invention, the sliding component comprises a small motor 39 fixedly connected to one side of the rotating box 12, an output shaft of the small motor 39 is fixedly connected with a first chain wheel 40, one side of the rotating box 12 is rotatably connected with two symmetrical second chain wheels 41, the second chain wheels 41 and the outer side of the first chain wheel 40 are in transmission connection with a same chain 42, one side of the chain 42 close to the rotating box 12 is fixedly connected with a connecting block 43, and the connecting block 43 is fixedly connected with the sliding block 37.
In the invention, a plurality of light beam plates 49 are annularly and equidistantly arranged on one side of the two turntables 20 close to each other by taking the rotating shaft 19 as the center of a circle, the light beam plates 49 correspond to the light source 21, and the light emitted by the light source 21 can be restrained by the light beam plates 49 so as to irradiate the light on a semiconductor.
In the invention, two symmetrical linear bearings 50 are fixedly embedded on one side of the conveyer belt 1, one end of the bolt 5 penetrates through the linear bearings 50 and is in sliding connection with the linear bearings 50, and the friction force of the conveyer belt 1 to the bolt 5 can be reduced through the linear bearings 50.
A detection process of an automatic optical detection system of a semiconductor product comprises the following steps:
s1, placing the detector 2 on the conveyor belt 1, upwards rotating the round rod 9 and the brake rod 10 to enable the clamping block 11 to be separated from the annular groove 6, relieving the brake of the clamping block 11 on the bolt 5, outwards pulling the connecting plate 8 and the bolt 5, enabling the tension spring 7 to start to stretch, enabling the bolt 5 to be separated from the fixing groove 3, enabling the fixing block 4 to extend into the fixing groove 3, loosening the tension on the connecting plate 8 and the bolt 5, enabling the bolt 5 to penetrate through the conveyor belt 1 and the fixing block 4 to brake the fixing block 4 under the action of the tension spring 7, then rotating the round rod 9 and the brake rod 10 to enable the clamping block 11 to brake the bolt 5 again, and preventing the detector 2 from shaking during detection;
s2, starting the conveyer belt 1, moving the semiconductor into the detector 2 to the right side by the conveyer belt 1, starting the rotating motor 16 to drive the second synchronous wheel 17 to rotate, driving the first synchronous wheel 15 and the lead screw 14 to rotate by the second synchronous wheel 17 through the synchronous belt 18, connecting the lead screw 14 and the lead screw nut 13 in a threaded manner, and moving the rotating box 12 to a part needing to be detected by the lead screw nut 13 along with the rotation of the lead screw 14;
s3, then, the driving motor 30 is started to drive the first bevel gear 31 to rotate, the first bevel gear 31 is meshed with the second bevel gear 33, the first bevel gear 31 drives the second bevel gear 33, the first sleeve 32, the second sleeve 34 and the worm 35 to rotate, the worm 35 is meshed with the worm wheel 26, the worm wheel 26 drives the rotating shaft 25 and the rotating disc 27 to rotate along with the rotation of the worm 35, the convex rod 28 rotates into the groove 29 when the rotating disc 27 rotates, and then the grooved rotating disc 24 and the rotating shaft 19 can be driven to rotate, and the convex rod 28 drives the grooved rotating disc 24 to intermittently rotate until the required light source 21 rotates to the lowest part due to the fact that the six grooves 29 are distributed on the grooved rotating disc 24;
s4, when the turntable 24 with the groove and the rotating shaft 19 rotate intermittently, the rotating shaft 19 drives the turntable 20 and the ball 47 to rotate intermittently at the same time, and the ball 47 rolls from one limiting groove 44 to enter the next limiting groove 44, so that the rotating shaft 19 and the turntable 20 can be prevented from shaking to influence detection;
s5, starting the small motor 39 to drive the first chain wheel 40 to rotate, the first chain wheel 40 drives the second chain wheel 41 to rotate through the chain 42, and the connecting block 43 and the sliding block 37 can be driven to slide back and forth in the rectangular groove 36 along with the rotation of the chain 42, so that the optical microscope 38 can be controlled to move to a position to be detected.
Example two: as shown in fig. 12 to 15, the present embodiment is different from the first embodiment in that: the inner walls of two sides of the rotating box 12 are all provided with a plurality of limiting grooves 44 at equal intervals in an annular mode by taking the rotating shaft 19 as a circle center, one side, away from each other, of each of the two rotating discs 20 is provided with a plurality of ball grooves 45 at equal intervals in an annular mode by taking the rotating shaft 19 as a circle center, the limiting grooves 44 correspond to the ball grooves 45, one inner wall, away from the limiting grooves 44, of each of the ball grooves 45 is fixedly connected with a spring 46, balls 47 are connected in the ball grooves 45 in a rolling mode, the balls 47 are in contact with the spring 46, when the rotating shaft 19 drives the rotating discs 20 to rotate, the balls 47 can roll into the other limiting groove 44 from one limiting groove 44, and certain braking is achieved on the rotating shaft 19 and the.
However, as is well known to those skilled in the art, the working principles and wiring methods of the rotating motor 16, the light source 21, the driving motor 30, the small motor 39 and the optical microscope 38 are common and are conventional means or common knowledge, and thus, they will not be described in detail herein, and those skilled in the art can make any choice according to their needs or convenience.
The working principle is as follows: firstly, placing the detector 2 on the conveyer belt 1, upwards rotating the round rod 9 and the brake rod 10 to separate the clamping block 11 from the annular groove 6, releasing the brake of the clamping block 11 on the bolt 5, pulling the connecting plate 8 and the bolt 5 outwards, stretching the tension spring 7, separating the bolt 5 from the fixed groove 3, extending the fixed block 4 into the fixed groove 3, releasing the tension on the connecting plate 8 and the bolt 5, braking the fixed block 4 by the bolt 5 penetrating through the conveyer belt 1 and the fixed block 4 under the action of the tension spring 7, then rotating the round rod 9 and the brake rod 10 to brake the bolt 5 again by the clamping block 11, preventing the detector 2 from shaking during detection, secondly, starting the conveyer belt 1, moving the semiconductor into the detector 2 towards the right side by the conveyer belt 1, starting the rotating motor 16 to drive the second synchronizing wheel 17 to rotate, driving the first synchronizing wheel 15 and the screw 14 to rotate by the second synchronizing wheel 17 through the synchronizing belt 18, and the lead screw 14 is connected with the lead screw nut 13 by screw thread, the lead screw nut 13 can move the rotating box 12 to the position needing to be detected along with the rotation of the lead screw 14, the third step is that the driving motor 30 is started to drive the first bevel gear 31 to rotate, the first bevel gear 31 is meshed with the second bevel gear 33, the first bevel gear 31 drives the second bevel gear 33, the first sleeve 32, the second sleeve 34 and the worm 35 to rotate, the worm 35 is meshed with the worm wheel 26, the worm wheel 26 drives the rotating shaft 25 and the rotating disc 27 to rotate along with the rotation of the worm 35, the convex rod 28 rotates into the groove 29 when the rotating disc 27 rotates, and then the grooved rotating disc 24 and the rotating shaft 19 can be driven to rotate, because the six grooves 29 are distributed on the grooved rotating disc 24, the convex rod 28 drives the grooved rotating disc 24 to rotate intermittently until the needed light source 21 rotates to the lowest part, the fourth step is that the grooved rotating disc 24 and the rotating shaft 19 rotate intermittently, the rotating shaft 19 drives the rotating disc 20 and the balls 47 to rotate intermittently at the same time, the balls 47 roll from one limiting groove 44 to enter the next limiting groove 44, and further the rotating shaft 19 and the rotating disc 20 can be prevented from shaking, the influence is detected, in the fifth step, the small-sized motor 39 is started to drive the first chain wheel 40 to rotate, the first chain wheel 40 drives the second chain wheel 41 to rotate through the chain 42, and the connecting block 43 and the sliding block 37 can be driven to slide back and forth in the rectangular groove 36 along with the rotation of the chain 42, so that the optical microscope 38 can be controlled to move to a position needing to be detected.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (10)
1. The utility model provides an automatic optical detection system of semiconductor product, includes conveyer belt (1), its characterized in that, detector (2) have been placed at the top of conveyer belt (1), be equipped with the fixed subassembly that is used for fixed detector (2) in conveyer belt (1), the both sides inner wall sliding connection of detector (2) has same rotation case (12), the top of detector (2) is equipped with and is used for making rotation case (12) carry out gliding drive assembly, the both sides inner wall of rotation case (12) rotates and is connected with same axis of rotation (19), the outer wall fixed cover of axis of rotation (19) is equipped with two symmetrical carousel (20), two one side that carousel (20) are close to each other uses axis of rotation (19) to arrange a plurality of light sources (21) as centre of a circle annular equidistance, one side of detector (2) is equipped with spout (22), the one end of axis of rotation (19) runs through spout (22) and swivelling joint has slide (23), slide (23) are close to one side and detector (2) sliding connection who rotates case (12), one side of detector (2) is equipped with the change subassembly that is used for changing light source (21), one side of rotating case (12) is equipped with rectangular channel (36), the top inner wall and the bottom inner wall sliding connection of rectangular channel (36) have same slider (37), the one end of slider (37) extends to and rotates case (12) in and fixedly connected with optical microscope (38), one side of rotating case (12) is equipped with and is used for making optical microscope (3) make a round trip gliding sliding component.
2. The automatic optical detection system for semiconductor products according to claim 1, wherein the fixing assembly comprises fixing grooves (3) arranged at two sides of the top of the conveyer belt (1), two sides of the bottom of the detector (2) are fixedly connected with fixing blocks (4), two fixing blocks (4) extend into the fixing grooves (3), two symmetrical bolts (5) are slidably connected with two sides of the conveyer belt (1), one end of each bolt (5) far away from the conveyer belt (1) is fixedly connected with a same connecting plate (8), the outer walls of the two bolts (5) are sleeved with tension springs (7), one end of each tension spring (7) close to the connecting plate (8) is fixedly connected with the connecting plate (8), one end of each tension spring (7) far away from the connecting plate (8) is fixedly connected with the conveyer belt (1), two the one end that connecting plate (8) were kept away from in bolt (5) all runs through conveyer belt (1) and fixed block (4), two the one end that connecting plate (8) were kept away from in bolt (5) all is equipped with ring channel (6), the both sides of conveyer belt (1) are all rotated and are connected with round bar (9), two the equal fixedly connected with brake lever (10) of one end of round bar (9), two symmetrical fixture block (11) of bottom fixedly connected with of brake lever (10), two brake lever (10) all extend to in ring channel (6).
3. An automated optical inspection system for semiconductor products according to claim 1, the driving component comprises a rotating motor (16) fixed at the top of the detector (2), the output shaft of the rotating motor (16) is fixedly connected with a second synchronizing wheel (17), the inner walls of the two sides of the rotating box (12) are rotationally connected with the same screw rod (14), the outer wall of the screw rod (14) is in threaded connection with a screw rod nut (13), the bottom of the screw rod nut (13) is fixedly connected with the top of the rotating box (12), the outer wall of the screw rod (14) is fixedly sleeved with a first synchronizing wheel (15), the top of the detector (2) is provided with a through hole (51), the outer sides of the first synchronizing wheel (15) and the second synchronizing wheel (17) are in transmission connection with the same synchronizing belt (18), and the synchronizing belt (18) penetrates through the through hole (51).
4. An automated optical inspection system for semiconductor products according to claim 1, the replacement component comprises a driving motor (30) fixedly connected with one side of the detector (2), the output shaft of the driving motor (30) is fixedly connected with a first helical gear (31), one end of the rotating shaft (19) far away from the detector (2) is fixedly connected with a turntable (24) with a groove, one side of the sliding plate (23) far away from the detector (2) is rotatably connected with a rotating shaft (25), a worm wheel (26) and a rotating disc (27) are fixedly sleeved on the outer wall of the rotating shaft (25), a convex rod (28) is fixedly connected on one side of the rotating disc (27) far away from the sliding plate (23), use axis of rotation (19) as centre of a circle annular equidistance in grooved rotary table (24) and arrange a plurality of recesses (29), nose bar (28) extend to in recess (29).
5. An automated optical inspection system for semiconductor products according to claim 4, the replacement assembly also comprises a support (48) fixedly connected to one side of the sliding plate (23), a worm (35) is rotationally connected in the support (48), the worm (35) is meshed with the worm wheel (26), one end of the worm (35) far away from the rotating shaft (19) penetrates through the support (48), the outer wall of the worm (35) is connected with a second sleeve (34) in a sliding way, one side of the detector (2) is connected with a first sleeve (32) in a rotating way, one end of the second sleeve (34) far away from the worm (35) extends into the first sleeve (32) and is connected with the first sleeve (32) in a sliding way, one end of the first sleeve (32) is fixedly connected with a second bevel gear (33), and the second bevel gear (33) is meshed with the first bevel gear (31).
6. The automatic optical inspection system for semiconductor products according to claim 1, wherein the sliding assembly comprises a small motor (39) fixedly connected to one side of the rotating box (12), an output shaft of the small motor (39) is fixedly connected with a first chain wheel (40), one side of the rotating box (12) is rotatably connected with two symmetrical second chain wheels (41), the second chain wheels (41) and the first chain wheels (40) are in transmission connection with a same chain (42), one side of the chain (42) close to the rotating box (12) is fixedly connected with a connecting block (43), and the connecting block (43) is fixedly connected with the sliding block (37).
7. An automatic optical inspection system for semiconductor products according to claim 1, characterized in that a plurality of light beam plates (49) are arranged on the side of the two turntables (20) close to each other in a ring shape with the rotation axis (19) as the center, and the light beam plates (49) correspond to the light source (21).
8. An automatic optical inspection system for semiconductor products according to claim 2, characterized in that two symmetrical linear bearings (50) are fixedly embedded on one side of the conveyor belt (1), and one end of the plug pin (5) penetrates through the linear bearings (50) and is slidably connected with the linear bearings (50).
9. The automatic optical inspection system of semiconductor product according to claim 1, wherein the inner walls of both sides of the rotary box (12) all use the rotary shaft (19) to have a plurality of spacing grooves (44) arranged in the same distance in the same circle as the center of a circle, two the one side of the rotary plate (20) kept away from each other uses the rotary shaft (19) to have a plurality of ball grooves (45) arranged in the same distance in the same circle as the center of a circle in the same circle as the rotary shaft (19), the spacing grooves (44) and the ball grooves (45) are corresponding, a plurality of the ball grooves (45) are kept away from the equal fixedly connected with springs (46) of the inner wall of one side of the spacing grooves (44), and a plurality of the balls (47) and the springs (46).
10. Inspection process of an automatic optical inspection system for semiconductor products according to any one of claims 1 to 9, characterized in that it comprises the following steps:
s1, placing the detector (2) on the conveyor belt (1), upwards rotating the round rod (9) and the brake rod (10) to separate the clamping block (11) from the annular groove (6), releasing the brake of the clamping block (11) on the bolt (5), outwards pulling the connecting plate (8) and the bolt (5), stretching the tension spring (7), separating the bolt (5) from the fixed groove (3), extending the fixed block (4) into the fixed groove (3), releasing the tension on the connecting plate (8) and the bolt (5), under the action of the tension spring (7), enabling the bolt (5) to penetrate through the conveyor belt (1) and the fixed block (4) to brake the fixed block (4), then rotating the round rod (9) and the brake rod (10), and enabling the clamping block (11) to brake the bolt (5) again, so that the detector (2) is prevented from shaking during detection;
s2, starting the conveyer belt (1), moving the semiconductor into the detector (2) by the conveyer belt (1) towards the right side, starting the rotating motor (16) to drive the second synchronizing wheel (17) to rotate, driving the first synchronizing wheel (15) and the lead screw (14) to rotate by the second synchronizing wheel (17) through the synchronous belt (18), connecting the lead screw (14) with the lead screw nut (13) in a threaded manner, and moving the rotating box (12) to a part needing to be detected by the lead screw nut (13) along with the rotation of the lead screw (14);
s3, then, a driving motor (30) is started to drive a first bevel gear (31) to rotate, the first bevel gear (31) is meshed with a second bevel gear (33), the first bevel gear (31) drives the second bevel gear (33), a first sleeve (32), a second sleeve (34) and a worm (35) to rotate, the worm (35) is meshed with a worm wheel (26), the worm wheel (26) drives a rotating shaft (25) and a rotating disc (27) to rotate along with the rotation of the worm (35), a convex rod (28) rotates into a groove (29) when the rotating disc (27) rotates, and then the groove rotary disc (24) and the rotating shaft (19) can be driven to rotate, and the convex rod (28) drives the groove rotary disc (24) to rotate intermittently until a needed light source (21) rotates to the lowest position due to the fact that six grooves (29) are distributed on the groove rotary disc (24);
s4, when the turntable (24) with the groove and the rotating shaft (19) rotate intermittently, the rotating shaft (19) drives the turntable (20) and the balls (47) to rotate intermittently at the same time, and the balls (47) roll from one limiting groove (44) to enter the next limiting groove (44), so that the rotating shaft (19) and the turntable (20) can be prevented from shaking to influence detection;
s5, starting a small motor (39) to drive a first chain wheel (40) to rotate, driving a second chain wheel (41) to rotate by the first chain wheel (40) through a chain (42), and driving a connecting block (43) and a sliding block (37) to slide back and forth in a rectangular groove (36) along with the rotation of the chain (42), so that the optical microscope (38) can be controlled to move to a position needing to be detected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110134871.2A CN112903681A (en) | 2021-02-01 | 2021-02-01 | Automatic optical detection system and detection process for semiconductor product |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110134871.2A CN112903681A (en) | 2021-02-01 | 2021-02-01 | Automatic optical detection system and detection process for semiconductor product |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112903681A true CN112903681A (en) | 2021-06-04 |
Family
ID=76122454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110134871.2A Withdrawn CN112903681A (en) | 2021-02-01 | 2021-02-01 | Automatic optical detection system and detection process for semiconductor product |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112903681A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113640639A (en) * | 2021-08-26 | 2021-11-12 | 苏州晶睿半导体科技有限公司 | Testing device and testing method for semiconductor device |
| CN114563729A (en) * | 2022-04-27 | 2022-05-31 | 浙江浙能能源服务有限公司 | Quick positioning and replacing device for power failure of PCR detector |
| CN117191806A (en) * | 2023-09-21 | 2023-12-08 | 科芃智能科技（苏州）有限公司 | Board defect detection device based on visual detection |
| CN114324157B (en) * | 2021-11-29 | 2024-04-09 | 南京至泰生物医药科技有限公司 | Blood tumor detection device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2086820U (en) * | 1991-03-15 | 1991-10-16 | 曹德才 | Securing hook |
| CN109752333A (en) * | 2019-02-28 | 2019-05-14 | 广州市鹭江远科技有限公司 | A kind of atomic spetrophtometry instrument convenient for switching for food heavy metal analysis |
| CN209911378U (en) * | 2019-04-22 | 2020-01-07 | 广西埃韦迪生物科技有限公司 | Medical carousel formula multinomial mesh colloidal gold immunoassay appearance |
| CN209927749U (en) * | 2019-05-05 | 2020-01-10 | 深圳易科讯科技有限公司 | Online double-track full-automatic optical detector |
| CN112083007A (en) * | 2020-09-30 | 2020-12-15 | 襄阳和顺发彩色印刷有限公司 | Color box printing quality detection system with high production efficiency |
| CN212170066U (en) * | 2020-05-06 | 2020-12-18 | 扬州国光新材料有限公司 | Automobile parts production anchor clamps frock |
-
2021
- 2021-02-01 CN CN202110134871.2A patent/CN112903681A/en not_active Withdrawn
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2086820U (en) * | 1991-03-15 | 1991-10-16 | 曹德才 | Securing hook |
| CN109752333A (en) * | 2019-02-28 | 2019-05-14 | 广州市鹭江远科技有限公司 | A kind of atomic spetrophtometry instrument convenient for switching for food heavy metal analysis |
| CN209911378U (en) * | 2019-04-22 | 2020-01-07 | 广西埃韦迪生物科技有限公司 | Medical carousel formula multinomial mesh colloidal gold immunoassay appearance |
| CN209927749U (en) * | 2019-05-05 | 2020-01-10 | 深圳易科讯科技有限公司 | Online double-track full-automatic optical detector |
| CN212170066U (en) * | 2020-05-06 | 2020-12-18 | 扬州国光新材料有限公司 | Automobile parts production anchor clamps frock |
| CN112083007A (en) * | 2020-09-30 | 2020-12-15 | 襄阳和顺发彩色印刷有限公司 | Color box printing quality detection system with high production efficiency |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113640639A (en) * | 2021-08-26 | 2021-11-12 | 苏州晶睿半导体科技有限公司 | Testing device and testing method for semiconductor device |
| CN113640639B (en) * | 2021-08-26 | 2024-03-12 | 苏州晶睿半导体科技有限公司 | Testing device and testing method for semiconductor device |
| CN114324157B (en) * | 2021-11-29 | 2024-04-09 | 南京至泰生物医药科技有限公司 | Blood tumor detection device |
| CN114563729A (en) * | 2022-04-27 | 2022-05-31 | 浙江浙能能源服务有限公司 | Quick positioning and replacing device for power failure of PCR detector |
| CN114563729B (en) * | 2022-04-27 | 2022-07-12 | 浙江浙能能源服务有限公司 | Quick positioning and replacing device for power failure of PCR detector |
| CN117191806A (en) * | 2023-09-21 | 2023-12-08 | 科芃智能科技（苏州）有限公司 | Board defect detection device based on visual detection |
| CN117191806B (en) * | 2023-09-21 | 2024-04-05 | 科芃智能科技（苏州）有限公司 | Board defect detection device based on visual detection |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112903681A (en) | Automatic optical detection system and detection process for semiconductor product | |
| US4033450A (en) | Conveyor with removable receptacles | |
| CN104944214A (en) | Steel wire rod take-up device | |
| CN109013375A (en) | A kind of electric power tower angle steels detection device and detection method | |
| CN106670112A (en) | Planet wheel push-out type intelligent express sorting mechanism | |
| CN114136825B (en) | Automobile tire abrasion resistance testing device | |
| CN108000169A (en) | A kind of processing platform regulating device | |
| CN107350645A (en) | A kind of bearing inner race fully automatic feeding device | |
| CN108180872B (en) | Universal wheel hub detecting machine | |
| CN115752221A (en) | Brake disc roundness detection device | |
| CN108405377B (en) | Multi-functional vegetables fruit letter sorting equipment | |
| CN109292426A (en) | Full electricity drive formula tiltedly takes turns sorter | |
| CN111974918B (en) | Screw thread forming equipment | |
| CN201046434Y (en) | Roller type screener with convenient regulatory interstices | |
| CN107555092A (en) | A kind of PCB automatically enters plate optical image detector | |
| CN109047957A (en) | A kind of bead cutter for screw production | |
| CN212600284U (en) | High accuracy bearing turning is with clamping fixing device | |
| CN1915540B (en) | Roller type sieving machine with adjustable gap conveniently | |
| CN211637397U (en) | High-precision visual detection equipment | |
| CN211516925U (en) | Bearing ring grinding device for bearing production | |
| CN110577063A (en) | Conveying belt with adjustable width for bearing production | |
| CN106964800A (en) | Wheel hub processes special purpose lathe supporting table | |
| CN201653930U (en) | Fully automatic lamp inspector for liquid medicine bottle | |
| CN114345738B (en) | Lamp inspection machine | |
| CN219224600U (en) | Light source polishing detection device for imaging defects on surface of mirror surface object |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20210604 |