CN112885974A - Display panel and preparation method thereof - Google Patents

Display panel and preparation method thereof Download PDF

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Publication number
CN112885974A
CN112885974A CN202110062606.8A CN202110062606A CN112885974A CN 112885974 A CN112885974 A CN 112885974A CN 202110062606 A CN202110062606 A CN 202110062606A CN 112885974 A CN112885974 A CN 112885974A
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CN
China
Prior art keywords
auxiliary electrode
metal electrode
electrode
base plate
substrate base
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Pending
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CN202110062606.8A
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Chinese (zh)
Inventor
李朝晖
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Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Application filed by Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd filed Critical Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority to CN202110062606.8A priority Critical patent/CN112885974A/en
Publication of CN112885974A publication Critical patent/CN112885974A/en
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • H10K50/82Cathodes
    • H10K50/824Cathodes combined with auxiliary electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/131Interconnections, e.g. wiring lines or terminals
    • H10K59/1315Interconnections, e.g. wiring lines or terminals comprising structures specially adapted for lowering the resistance
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass

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  • Engineering & Computer Science (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The invention discloses a display panel and a preparation method thereof, wherein the display panel comprises a substrate base plate; a metal electrode disposed on one side of the substrate base plate; the auxiliary electrode is arranged on one side, away from the substrate base plate, of the metal electrode and is electrically connected with the metal electrode; wherein, the orthographic projection of the auxiliary electrode on the substrate base plate is positioned in the orthographic projection of the metal electrode on the substrate base plate. According to the invention, the auxiliary electrode is added and electrically connected with the metal electrode, so that the quality problem of uneven brightness of the display panel caused by overlarge impedance of the metal electrode can be solved, and the thickness of the metal electrode can be maintained or reduced; meanwhile, due to the improvement of the preparation process, the production cost of the product is reduced and the quality and the reliability of the product are improved while the metal electrode pattern is maintained and the function of the metal electrode is not influenced.

Description

Display panel and preparation method thereof
Technical Field
The invention relates to the technical field of display, in particular to a display panel and a preparation method of the display panel.
Background
An Active-matrix organic light emitting diode (AMOLED) has a faster response speed, a higher contrast ratio and a wider viewing angle than a Thin film transistor-liquid crystal display (TFT-LCD); has the characteristic of self-luminescence, does not need to use a backlight plate, and therefore can be made thinner and more electricity-saving. In addition, the AMOLED can be made into a curved screen, and the display image is not deformed. These advantages determine that AMOLEDs will become the mainstream of the semiconductor display industry.
In the traditional AMOLED structure, the whole driving electrode covers the display area through an evaporation process. In the case of a display device of a current driving method, there is a difference in luminance of each display cell due to a difference in current. Therefore, Mura (uneven brightness) is easily formed on the whole display, resulting in degradation of the display device even to the customer specification. One of the main reasons for this is that the driving electrode has an excessive impedance. When the electrode receives an electric signal, the square resistance of the driving electrode is large, and the resistance difference between different positions in the display area is large, so that the current difference is large, and the current difference is large, so that the brightness of the organic electroluminescent devices in different areas is inconsistent, and the display picture is not uniform enough; meanwhile, the cathode film layer has a large square resistance, which is not beneficial to reducing the power consumption of the display screen.
In view of this problem, there are several methods to improve the display quality. The first is a compensation circuit, the second is that the thickness or width of the electrode is larger, and the third is that the material with smaller impedance value is adopted to replace the current electrode material (Al, Cu) and the like. However, these approaches undoubtedly increase the complexity or cost of the circuit.
In summary, the display panel in the prior art has the technical problems of uneven brightness, too high power consumption, too high complexity and cost of the circuit, insufficient product competitiveness, and the like.
Disclosure of Invention
The embodiment of the invention provides a display panel and a preparation method of the display panel, which are used for solving the technical problems of uneven brightness, overhigh power consumption, overhigh complexity and cost of a circuit, insufficient product competitiveness and the like of the display panel in the prior art.
In order to solve the above problem, a first aspect of the present invention provides a display panel, including:
a substrate base plate;
a metal electrode disposed on one side of the substrate base plate;
the auxiliary electrode is arranged on one side, away from the substrate base plate, of the metal electrode and is electrically connected with the metal electrode;
wherein, the orthographic projection of the auxiliary electrode on the substrate base plate is positioned in the orthographic projection of the metal electrode on the substrate base plate.
In some embodiments of the present invention, an orthographic area of the auxiliary electrode on the substrate base plate is smaller than an orthographic area of the metal electrode on the substrate base plate.
In some embodiments of the present invention, the auxiliary electrode is disposed on a side surface of the metal electrode away from the substrate base plate, and the auxiliary electrode is in direct contact with the metal electrode.
In some embodiments of the present invention, the thin film transistor further includes a thin film transistor array layer, the thin film transistor array layer includes a source, a drain, a gate, and an insulating layer, the auxiliary electrode is disposed on the same layer as the source and the drain or on the same layer as the gate, the insulating layer is disposed between the metal electrode and the auxiliary electrode and is provided with a via hole, and the auxiliary electrode is electrically connected to the metal electrode through the via hole.
In some embodiments of the present invention, the cross-sectional shape of the auxiliary electrode is one of rectangular, trapezoidal, semicircular, and triangular.
In some embodiments of the present invention, when the cross-sectional shape of the auxiliary electrode is a trapezoid, an area of an upper surface of the auxiliary electrode away from the metal electrode is smaller than an area of a lower surface of the auxiliary electrode close to the metal electrode.
In some embodiments of the present invention, the material of the auxiliary electrode is a transparent conductive material, and includes one or more of indium tin oxide, indium gallium zinc oxide, and indium gallium tin oxide.
In some embodiments of the present invention, the display device further includes a black matrix, the material of the auxiliary electrode is an opaque metal material, including silver, nickel, tungsten, or lead, and an orthogonal projection of the auxiliary electrode on the substrate base plate is located within an orthogonal projection of the black matrix on the substrate base plate.
In a second aspect, the present invention provides a method for manufacturing a display panel, the method being used for manufacturing the display panel according to any one of the first aspect, including the steps of:
providing a substrate, and preparing a metal electrode on one side of the substrate;
preparing an auxiliary electrode on one side of the metal electrode, which is far away from the substrate base plate, wherein the auxiliary electrode is electrically connected with the metal electrode;
wherein, the orthographic projection of the auxiliary electrode on the substrate base plate is positioned in the orthographic projection of the metal electrode on the substrate base plate.
In some embodiments of the present invention, the auxiliary electrode is formed by ink-jet printing or screen printing.
Compared with the existing display panel and the preparation method of the display panel, the display panel and the preparation method of the display panel have the advantages that the auxiliary electrode is additionally arranged and is electrically connected with the metal electrode, so that the quality problem of uneven brightness of the display panel caused by overlarge impedance of the metal electrode can be solved, and the thickness of the metal electrode can be maintained or reduced; meanwhile, due to the improvement of the preparation process, the production cost of the product is reduced and the quality and the reliability of the product are improved while the metal electrode pattern is maintained and the function of the metal electrode is not influenced.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic top view of a prior art display panel;
FIG. 2 is a schematic cross-sectional view of a prior art display panel;
FIG. 3 is a schematic top view of a display panel according to an embodiment of the present invention;
FIG. 4 is a schematic cross-sectional view of a display panel according to an embodiment of the present invention;
FIG. 5 is a schematic flow chart of a manufacturing process according to an embodiment of the present invention.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In this application, the word "exemplary" is used to mean "serving as an example, instance, or illustration. Any embodiment described herein as "exemplary" is not necessarily to be construed as preferred or advantageous over other embodiments. The following description is presented to enable any person skilled in the art to make and use the invention. In the following description, details are set forth for the purpose of explanation. It will be apparent to one of ordinary skill in the art that the present invention may be practiced without these specific details. In other instances, well-known structures and processes are not shown in detail to avoid obscuring the description of the invention with unnecessary detail. Thus, the present invention is not intended to be limited to the embodiments shown, but is to be accorded the widest scope consistent with the principles and features disclosed herein.
As shown in fig. 1 and 2, fig. 1 is a schematic top view of a display panel in the prior art, and fig. 2 is a schematic cross-sectional view of the display panel in the prior art. The display panel includes a substrate base plate 11; and a metal electrode 12 disposed on a surface of the substrate base plate 11. Since the display panel is being developed to have a larger size, the thickness of the metal electrode 12 is smaller, the resistance (Rs) of the metal electrode 12 is larger, and a significant voltage Drop (IR Drop) occurs due to the current in order to keep the display panel light and thin. When the metal electrode 12 receives an electrical signal, the resistance difference between different positions in the display area is large, the current difference is also large, and the large current difference causes inconsistent light emitting brightness in different areas and uneven display picture; meanwhile, the square resistance of the metal electrode 12 is large, which is not beneficial to reducing the power consumption of the display screen. The current methods for improving the display quality problem include: the first is a compensation circuit, the second is that the thickness or width of the electrode is larger, and the third is that the material with smaller impedance value is adopted to replace the current electrode material (Al, Cu) and the like. However, these approaches undoubtedly increase the complexity or cost of the circuit.
Accordingly, the embodiment of the invention provides a display panel and a preparation method of the display panel. The following are detailed below.
First, an embodiment of the invention provides a display panel. As shown in fig. 3 and 4, fig. 3 is a schematic top view of a display panel according to an embodiment of the present invention, and fig. 4 is a schematic cross-sectional view of the display panel according to an embodiment of the present invention. The display panel includes: a base substrate 21; a metal electrode 22 provided on one side of the substrate base plate 21; an auxiliary electrode 23 disposed on a side of the metal electrode 22 away from the substrate 21, wherein the auxiliary electrode 23 is electrically connected to the metal electrode 22; wherein, the orthographic projection of the auxiliary electrode 23 on the substrate base plate 21 is positioned in the orthographic projection of the metal electrode 22 on the substrate base plate 21.
Compared with the existing display panel and the preparation method of the display panel, the auxiliary electrode 23 is added, and the auxiliary electrode 23 is electrically connected with the metal electrode 22, so that the quality problem of uneven brightness of the display panel caused by overlarge impedance of the metal electrode 22 can be solved, and the thickness of the metal electrode 22 can be maintained or reduced; meanwhile, due to the improvement of the preparation process, the production cost of the product is reduced and the quality and the reliability of the product are improved while the patterns of the metal electrode 22 are maintained and the functions of the metal electrode 22 are not influenced.
In one embodiment of the present invention, the orthographic projection area of the auxiliary electrode 23 on the substrate base plate 21 is smaller than the orthographic projection area of the metal electrode 22 on the substrate base plate 21. In the present embodiment, in order to prevent the slope angle between the metal electrode 22 and the substrate 21 from being too large, the orthographic projection area of the auxiliary electrode 23 is smaller than that of the metal electrode 22 and the orthographic projection of the auxiliary electrode 23 is covered by the orthographic projection of the metal electrode 22. The cross-sectional views of the substrate base plate 21, the metal electrode 22 and the auxiliary electrode 23 are shown in fig. 4, and a three-step structure is presented, so that the thickness of each step is not too large, and the phenomenon that the metal electrode 22 is corroded by etching liquid at a slope angle to damage or break the metal electrode 22 due to too large slope angle is avoided. In other embodiments, the projection area of the metal electrode 22 is greater than or equal to the projection area of the auxiliary electrode 23, and the projection of the auxiliary electrode 23 covers the projection of the metal electrode 22, and the thicknesses of the metal electrode 22 and the auxiliary electrode 23 are controlled to prevent the metal electrode 22 and the auxiliary electrode 23 from forming a step with a larger thickness in a cross-sectional view, which results in an excessively large slope angle between the metal electrode 22 and the substrate 21.
In the above embodiment, the auxiliary electrode 23 is disposed on the surface of the metal electrode 22 on the side away from the substrate base plate 21, and the auxiliary electrode 23 is in direct contact with the metal electrode 22. The metal electrode 22 and the auxiliary electrode 23 substantially form a common electrode, and the resistance of the common electrode is smaller than that of the metal electrode 22 alone, so that the voltage drop of the display panel can be improved. In another embodiment of the present invention, the auxiliary electrode 23 is not disposed in a film layer adjacent to the metal electrode 22, an insulating layer such as a planarization layer or a passivation layer is disposed between the auxiliary electrode 23 and the metal electrode 22, and a via hole is formed in the insulating layer, and the via hole is filled with the same material as the metal electrode 22 or the same material as the auxiliary electrode 23, so that the auxiliary electrode 23 is electrically connected to the metal electrode 22 through the via hole. In this embodiment, the auxiliary electrode 23 is flexibly disposed, and does not need to consider too much space layout.
In a preferred embodiment, the display panel further includes a thin film transistor array layer, the thin film transistor array layer includes a source, a drain, a gate and an insulating layer, the auxiliary electrode 23 and the source and the drain are disposed in the same layer or the auxiliary electrode 23 and the gate are disposed in the same layer, the insulating layer is located between the metal electrode 22 and the auxiliary electrode 23 and is provided with a via hole, and the auxiliary electrode 23 is electrically connected to the metal electrode 22 through the via hole. Since the source electrode, the drain electrode, and the gate electrode may use a photomask in the manufacturing process, the auxiliary electrode 23, the source electrode, and the drain electrode may be manufactured using the same photomask process or the auxiliary electrode 23 and the gate electrode may be manufactured using the same photomask process by disposing the auxiliary electrode 23 and the source electrode and the drain electrode at the same layer or disposing the auxiliary electrode 23 and the gate electrode at the same layer. In this embodiment, no additional mask process is added, and the process is saved.
Preferably, the cross-sectional shape of the auxiliary electrode 23 is one of a rectangle, a trapezoid, a semicircle and a triangle. The top view of the auxiliary electrode 23 may be a complete layer, or may include a pattern region and a hollow-out region, and preferably, the pattern region of the auxiliary electrode 23 is a mesh structure vertically staggered in the horizontal direction and the vertical direction.
Preferably, when the cross-sectional shape of the auxiliary electrode 23 is a trapezoid, the area of the upper surface of the auxiliary electrode 23 away from the metal electrode 22 is smaller than the area of the lower surface of the auxiliary electrode 23 close to the metal electrode 22. In this embodiment, the cross section of the auxiliary electrode 23 is set to be a regular trapezoid, so as to avoid a large slope angle formed between the auxiliary electrode 23 and the metal electrode 22 when the cross section of the auxiliary electrode 23 is an inverted trapezoid, and the etching liquid corrodes the auxiliary electrode 23 at the slope angle, so that the auxiliary electrode 23 is damaged or broken. Similarly, when the cross-sectional shape of the auxiliary electrode 23 is the above-mentioned semicircular shape and the triangular shape, the area of the lower surface of the auxiliary electrode 23 close to the metal electrode 22 needs to be larger than the area of the upper surface of the auxiliary electrode 23 far from the metal electrode 22.
In an embodiment of the present invention, the material of the auxiliary electrode 23 is a transparent conductive material, and includes one or more of Indium Tin Oxide (ITO), Indium Gallium Zinc Oxide (IGZO), and Indium Gallium Tin Oxide (IGTO). By selecting the transparent conductive material, the auxiliary electrode 23 does not affect the transmittance of light, and the brightness of the display panel is prevented from being reduced due to the preparation of the auxiliary electrode 23.
In another embodiment of the present invention, the display panel further includes a black matrix, the material of the auxiliary electrode 23 is an opaque metal material, and includes silver, nickel, tungsten or lead, and an orthogonal projection of the auxiliary electrode 23 on the substrate base 21 is located within an orthogonal projection of the black matrix on the substrate base 21. Since the cost of the transparent conductive material is high, in this embodiment, the auxiliary electrode 23 is made of an opaque metal material, and although the cost of the metal material is relatively low, the light transmittance is also poor, and the light transmittance of the display panel is seriously affected, so that the auxiliary electrode 23 must be patterned, and the auxiliary electrode 23 that is not transparent is disposed in the coverage area of the black matrix that is also not transparent, that is, the orthographic projection of the auxiliary electrode 23 on the substrate 21 is located within the orthographic projection of the black matrix on the substrate 21. The auxiliary electrode 23 is disposed to reduce the aperture ratio of the display panel, thereby preventing the transmittance and brightness of the display panel from being affected.
In order to better manufacture the display panel in the embodiment of the present invention, on the basis of the display panel, the embodiment of the present invention further provides a manufacturing method of the display panel, which is used for manufacturing the display panel as described in the above embodiment.
As shown in fig. 5, fig. 5 is a schematic flow chart of a preparation method according to an embodiment of the invention. The preparation method of the display panel comprises the following steps:
s1, providing a substrate 21, and preparing a metal electrode 22 on one side of the substrate 21;
s2, preparing an auxiliary electrode 23 on a side of the metal electrode 22 away from the substrate base plate 21, wherein the auxiliary electrode 23 is electrically connected to the metal electrode 22;
wherein, the orthographic projection of the auxiliary electrode 23 on the substrate base plate 21 is positioned in the orthographic projection of the metal electrode 22 on the substrate base plate 21.
Specifically, the auxiliary electrode 23 is prepared by ink-jet printing or screen printing. By adopting the ink-jet printing or silk-screen printing process with lower cost, the higher cost caused by the vacuum evaporation process is avoided.
The embodiment effectively reduces the impedance of the metal electrode 22, and improves the display quality of the display panel; the thickness of the metal electrode 22 is prevented from being increased, so that the investment is saved and the cost is reduced; the metal electrode 22 is prevented from generating a larger slope angle and the occurrence rate of wire breakage, and the reliability and the yield of products are improved.
In the above embodiments, the descriptions of the respective embodiments have respective emphasis, and parts that are not described in detail in a certain embodiment may refer to the above detailed descriptions of other embodiments, and are not described herein again. In a specific implementation, each unit or structure may be implemented as an independent entity, or may be combined arbitrarily to be implemented as one or several entities, and specific implementations of each unit, structure, or operation may refer to the foregoing method embodiments, which are not described herein again.
The above embodiments of the present invention are described in detail, and the principle and the implementation of the present invention are explained by applying specific embodiments, and the above description of the embodiments is only used to help understanding the method of the present invention and the core idea thereof; meanwhile, for those skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.

Claims (10)

1. A display panel, comprising:
a substrate base plate;
a metal electrode disposed on one side of the substrate base plate;
the auxiliary electrode is arranged on one side, away from the substrate base plate, of the metal electrode and is electrically connected with the metal electrode;
wherein, the orthographic projection of the auxiliary electrode on the substrate base plate is positioned in the orthographic projection of the metal electrode on the substrate base plate.
2. The display panel according to claim 1, wherein an area of an orthographic projection of the auxiliary electrode on the substrate base plate is smaller than an area of an orthographic projection of the metal electrode on the substrate base plate.
3. The display panel according to claim 1, wherein the auxiliary electrode is provided on a surface of the metal electrode on a side away from the base substrate, the auxiliary electrode being in direct contact with the metal electrode.
4. The display panel of claim 1, further comprising a thin film transistor array layer, wherein the thin film transistor array layer comprises a source, a drain, a gate and an insulating layer, the auxiliary electrode is disposed on the same layer as the source and the drain or on the same layer as the gate, the insulating layer is disposed between the metal electrode and the auxiliary electrode and has a via hole, and the auxiliary electrode is electrically connected to the metal electrode through the via hole.
5. The display panel according to claim 1, wherein a cross-sectional shape of the auxiliary electrode is one of a rectangular shape, a trapezoidal shape, a semicircular shape, and a triangular shape.
6. The display panel according to claim 5, wherein when the cross-sectional shape of the auxiliary electrode is a trapezoid, an area of an upper surface of the auxiliary electrode away from the metal electrode is smaller than an area of a lower surface of the auxiliary electrode close to the metal electrode.
7. The preparation method according to claim 1, wherein the auxiliary electrode is made of a transparent conductive material, and comprises one or more of indium tin oxide, indium gallium zinc oxide and indium gallium tin oxide.
8. The preparation method of claim 1, further comprising a black matrix, wherein the material of the auxiliary electrode is an opaque metal material comprising silver, nickel, tungsten or lead, and an orthographic projection of the auxiliary electrode on the substrate base plate is located within an orthographic projection of the black matrix on the substrate base plate.
9. A method for manufacturing a display panel, comprising:
providing a substrate, and preparing a metal electrode on one side of the substrate;
preparing an auxiliary electrode on one side of the metal electrode, which is far away from the substrate base plate, wherein the auxiliary electrode is electrically connected with the metal electrode;
wherein, the orthographic projection of the auxiliary electrode on the substrate base plate is positioned in the orthographic projection of the metal electrode on the substrate base plate.
10. The production method according to claim 9, wherein the auxiliary electrode is produced by ink-jet printing or screen printing.
CN202110062606.8A 2021-01-18 2021-01-18 Display panel and preparation method thereof Pending CN112885974A (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107342304A (en) * 2016-04-29 2017-11-10 乐金显示有限公司 Organic light-emitting display device and its manufacture method
CN110071225A (en) * 2019-04-08 2019-07-30 深圳市华星光电半导体显示技术有限公司 Display panel and production method
CN110556406A (en) * 2019-08-26 2019-12-10 深圳市华星光电半导体显示技术有限公司 OLED display panel and preparation method thereof
CN111211243A (en) * 2020-01-09 2020-05-29 京东方科技集团股份有限公司 Display substrate, manufacturing method thereof and display device
CN112103326A (en) * 2020-09-23 2020-12-18 京东方科技集团股份有限公司 Display panel, manufacturing method thereof and display device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107342304A (en) * 2016-04-29 2017-11-10 乐金显示有限公司 Organic light-emitting display device and its manufacture method
CN110071225A (en) * 2019-04-08 2019-07-30 深圳市华星光电半导体显示技术有限公司 Display panel and production method
CN110556406A (en) * 2019-08-26 2019-12-10 深圳市华星光电半导体显示技术有限公司 OLED display panel and preparation method thereof
CN111211243A (en) * 2020-01-09 2020-05-29 京东方科技集团股份有限公司 Display substrate, manufacturing method thereof and display device
CN112103326A (en) * 2020-09-23 2020-12-18 京东方科技集团股份有限公司 Display panel, manufacturing method thereof and display device

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Application publication date: 20210601