CN112885752B - Semiconductor package detection system and detection process - Google Patents

Semiconductor package detection system and detection process Download PDF

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Publication number
CN112885752B
CN112885752B CN202110221136.5A CN202110221136A CN112885752B CN 112885752 B CN112885752 B CN 112885752B CN 202110221136 A CN202110221136 A CN 202110221136A CN 112885752 B CN112885752 B CN 112885752B
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fixedly connected
frame
worm
sliding
wall
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CN112885752A (en
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丁珍
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Shenzhen Chenyue Storage Electronic Technology Co ltd
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Shenzhen Chenyue Storage Electronic Technology Co ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67288Monitoring of warpage, curvature, damage, defects or the like

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

The invention belongs to the technical field of semiconductor package detection, in particular to a semiconductor package detection system and a semiconductor package detection process, wherein the semiconductor package detection system comprises a workbench, one side of the workbench is fixedly connected with a support, one side of the support is fixedly connected with a detection head, the top of the workbench is provided with a conveying belt, one side of the workbench is provided with a placement table, and the top of the placement table is fixedly connected with a movable frame.

Description

Semiconductor package detection system and detection process
Technical Field
The invention relates to the technical field of semiconductor package detection, in particular to a semiconductor package detection system and a semiconductor package detection process.
Background
Semiconductor packaging refers to the process of processing a wafer that passes testing to obtain individual chips according to product model and functional requirements. After the packaging is finished, the finished product is tested, and the finished product is usually put in and delivered out through the procedures of checking in and out, such as checking Test, packaging and the like, and after the packaging is finished, a person is required to put the substrate into the carrier plate for checking the appearance, and the person observes that the appearance has false cracks, dirt and the like through a microscope.
However, the conventional semiconductor package detection equipment cannot flexibly adjust the distance between the package body and the detection head when in use, so that the detection head cannot accurately detect the package body, the package body is easy to relatively deviate in the detection process due to the fact that the package body cannot be limited and fixed in the detection process, the detection head cannot comprehensively detect the package during detection, in addition, the defective products cannot be marked timely after the defective products are detected, the defective products and the finished products are mixed, and the defective products cannot be easily selected out in the later period.
Disclosure of Invention
The invention aims to solve the defects in the prior art, and provides a semiconductor package detection system and a semiconductor package detection process, which have compact structures, can adjust the distance between a package body and a detection head, prevent the package body from being easily deviated in the detection process and can mark defective products in time.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
the utility model provides a semiconductor encapsulation detecting system, includes the workstation, one side fixedly connected with support of workstation, one side fixedly connected with of support detects the head, the top of workstation is equipped with the conveyer belt, one side of workstation is equipped with places the platform, place the top fixedly connected with of platform and remove the frame, the both sides inner wall sliding connection who removes the frame has the sliding frame, the encapsulation body has been placed at the top of sliding frame, the bottom of removing the frame is equipped with the through-hole, the both sides of removing the frame all are equipped with the spout, one side of placing the platform is equipped with the conveying subassembly that is used for carrying the frame, a plurality of fixed frames have been arranged to the top equidistance of conveyer belt, be equipped with the fixed subassembly that is used for fixed removal frame in the fixed frame, be equipped with the rectangular channel in the workstation, the both sides inner wall sliding connection of rectangular channel has same sliding plate, be equipped with the rectangle through-hole in the sliding plate, the top fixedly connected with kicking block of sliding plate, the bottom inner wall of rectangular channel is equipped with the lifting subassembly that is used for making the kicking block lift.
The conveying assembly comprises an L-shaped plate which is slidably connected to the top of the placement table, a lug is fixedly connected to one side, close to the moving frame, of the L-shaped plate, the lug is contacted with the moving frame, a rack is fixedly connected to one side, far away from the moving frame, of the L-shaped plate, a driving motor is fixedly connected to one side, close to the moving frame, of the L-shaped plate, a spur gear is fixedly connected to an output shaft of the driving motor, and the spur gear is meshed with the rack.
The fixed subassembly is including setting up the U type groove in fixed frame, the top inner wall and the bottom inner wall sliding connection of U type groove have same push pedal, one side inner wall of U type groove is equipped with the circular slot, one side inner wall fixedly connected with first spring of circular slot, the one end and the push pedal fixed connection of circular slot are kept away from to first spring, the top inner wall and the bottom inner wall sliding connection of U type groove have two symmetrical brake levers, two the brake lever all with push pedal fixed connection, be equipped with two symmetrical sliding grooves in the workstation, two the equal sliding connection of top inner wall and bottom inner wall of sliding groove has the fixture block, two the equal fixedly connected with second spring of one side that the sliding groove kept away from each other, two the one end that the second spring is close to each other all with fixture block fixed connection, two all be equipped with the draw-in groove in the fixture block, two the one end that the push pedal was kept away from to the brake lever all extends to in the draw-in the fixture block.
The lifting assembly comprises two symmetrical bases arranged on the inner wall of the bottom of the rectangular groove, one sides of the bases close to each other are respectively and rotatably connected with a rotating shaft, the outer wall of each rotating shaft is fixedly sleeved with a first worm wheel and a first rotating rod, the inner wall of the bottom of the rectangular groove is rotatably connected with a first worm, the first worm is meshed with the first worm wheel, a rotating groove is formed in the workbench, and the bottom of the sliding plate is rotatably connected with two symmetrical second rotating rods.
The lifting assembly further comprises fixing blocks fixedly connected to the tops of the two bases, the top ends of the fixing blocks penetrate through the rectangular through holes and extend into the jacking blocks, the fixing shafts are fixedly connected to the top ends of the first rotating rods, the bottom ends of the second rotating rods are fixedly connected with the fixing shafts in a rotating mode, the outer walls of the fixing shafts are fixedly connected with sleeves in a rotating mode, the sleeve rods are fixedly connected to the two sides of the fixing blocks in a sliding mode, one ends, far away from each other, of the sleeve rods extend into the two sleeves respectively and are in sliding connection with the sleeves, the outer walls of the sleeves are sleeved with tension springs, one ends, far away from the fixing blocks, of the tension springs are fixedly connected with the outer walls of the sleeves, one ends, far away from the fixing shafts, of the tension springs are fixedly connected with rotating motors, output shafts of the rotating motors are fixedly connected with second gears, the inner walls of the bottoms of the rotating grooves are rotatably connected with rotating shafts, the outer wall fixing sleeves of the rotating shafts are provided with first gears, and the top ends of the rotating shafts extend into the rectangular grooves and are fixedly connected with the first worms.
The bottom inner wall equidistance of rectangular channel has arranged a plurality of telescopic links, and is a plurality of the top of telescopic link all with the bottom fixed connection of sliding plate, can make the lifting that the sliding plate can be steady through the telescopic link.
The top fixedly connected with deflector of placing the platform, the deflector touches with remove the frame, can prevent through the deflector that the frame of removing from taking place the skew at the in-process that removes, can't get into in the fixed frame.
The top fixedly connected with stopper of placing the platform can carry out spacingly to L template through the stopper, prevents that L template from breaking away from placing the bench.
One side of support rotates and is connected with the second worm wheel, second worm wheel internal thread connection has the screw rod, the one end of screw rod extends to in the support and fixedly connected with slide bar, one side fixedly connected with circle cover of support, the one end that the second worm wheel was kept away from to the slide bar runs through circle cover and with circle cover sliding connection, the one end fixedly connected with subsides mark head that the second worm wheel was kept away from to the slide bar, one side fixedly connected with step motor of support, step motor's output shaft fixedly connected with second worm, second worm and second worm wheel mesh mutually.
The detection process of the semiconductor package detection system comprises the following steps:
s1, starting a driving motor to drive a spur gear to rotate, wherein the spur gear is meshed with a rack, and the L-shaped plate and the convex block push a movable frame into a fixed frame along with the rotation of the spur gear, and the movable frame enters the fixed frame along with the sliding block due to the alignment of the sliding block and the sliding groove;
s2, the movable frame enters the fixed frame and extrudes the push plate inwards, so that the first springs start to compress, the push plate drives the brake rods to slide to two sides, the brake rods are separated from the clamping grooves, the brake of the clamping blocks is released, after the brake rods release the brake of the clamping blocks due to the fact that the second springs are always in a compressed state, the two second springs push the two clamping blocks to the middle, the two clamping blocks can clamp the movable frame and brake the movable frame, and the movable frame is prevented from being pushed outwards by the elastic force of the first springs;
s3, starting a conveying belt, conveying the fixed frame to the right side by the conveying belt until the fixed frame is conveyed to the position right below the detection head, enabling the through hole to face the rectangular groove at the moment, then starting a rotating motor to drive a second gear to brake, enabling the second gear to be meshed with the first gear, enabling the second gear to drive the first gear, a rotating shaft and a first worm to brake, and enabling the two first worm wheels and the first rotating rod to rotate in opposite directions along with the first worm to brake due to the fact that the first worm is meshed with the first worm;
s4, the two first rotating rods rotate in opposite directions, as the tension spring is always in a stretching state before, the tension spring pulls the fixed shaft and the sleeve to the middle along with the rotation of the first rotating rods, the sleeve rod starts to slide upwards along with the top end of the first rotating rods, when the tension spring pulls the fixed shaft and the sleeve to slide to the middle, the second rotating rods are simultaneously driven to rotate by taking the fixed shaft as a fulcrum, the first rotating rods and the second rotating rods can push out the sliding plate and the ejector block upwards, the ejector block penetrates into the through hole, the sliding frame and the packaging body are pushed out upwards, so that the distance between the detection head and the packaging body can be regulated, and the detection head can accurately detect the packaging body conveniently;
s5, when the detection head detects that the packaging body is unqualified, the stepping motor is started to drive the second worm to rotate, the second worm is meshed with the second worm wheel, the second worm wheel is in threaded connection with the screw rod, along with the rotation of the second worm wheel, the screw rod drives the sliding rod and the label pasting head to slide towards the direction of the packaging body until the label pasting head is located right above the packaging body, then the motor is started to drive the second gear to rotate, the sliding frame and the packaging body are pushed upwards, the packaging body is contacted with the label pasting head, and the label pasting head can paste unqualified labels to the packaging body.
The invention has the following advantages:
1. the driving motor is started to drive the spur gear to rotate, and then the movable frame can be pushed to the direction of the fixed frame through the L-shaped plate and the convex blocks, and the movable frame is clamped in the fixed frame.
2. The movable frame moves into the fixed frame and extrudes the push plate, and the push plate and the brake rod slide, so that the brake rod releases the brake of the clamping block, and the clamping block brakes the movable frame under the action of the elastic force of the second spring.
3. The second gear, the rotating shaft, the first gear and the first worm are driven by the starting rotating motor to rotate simultaneously, the first rotating rod and the second rotating rod can be driven to rotate when the first worm rotates, the sleeve rod starts to drive the sleeve to shrink, and then the sliding plate slides upwards, so that the distance between the packaging body and the detection head can be controlled, the detection head can adjust the detection distance according to the condition, and the packaging body is accurately detected.
4. The top of placing the platform is provided with the deflector, prevents the movable frame from shifting in the moving process, and can not enter the fixed frame.
5. The inner wall of the bottom of the rectangular groove is provided with a plurality of telescopic rods, so that the sliding plate can be stably lifted.
6. The step motor is started to drive the second worm and the second worm wheel to rotate, and the second worm wheel rotates to enable the label pasting head to be located above the packaging body along with the outward movement of the rotating screw rod and the sliding rod of the second worm wheel, so that the packaging body can be marked.
The invention has simple structure, the movable frame can be moved into the fixed frame by starting the driving motor, and the movable frame is fixed by the two clamping blocks in the moving process, so that the detection head is prevented from shaking the sliding frame and the packaging body in the detection process, the detection precision of the detection head is influenced, and in addition, the distance between the detection head and the packaging body can be adjusted by starting the rotating motor according to the actual detection condition of the detection head, so that the detection of the packaging body is simple and convenient, and the detection of the packaging body is accurate.
Drawings
Fig. 1 is a front cross-sectional view of a semiconductor package inspection system according to the present invention;
FIG. 2 is a side view of a table and a support of a semiconductor package inspection system according to the present invention;
FIG. 3 is a top view of a semiconductor package inspection system according to the present invention;
fig. 4 is a front view of a placement stage of a semiconductor package inspection system according to the present invention;
FIG. 5 is a side view of a placement stage of a semiconductor package inspection system according to the present invention;
fig. 6 is a front cross-sectional view of a moving frame of a semiconductor package inspection system according to the present invention;
fig. 7 is a front view of a fixing frame of a semiconductor package inspection system according to the present invention;
FIG. 8 is a side cross-sectional view of a mounting frame of a semiconductor package inspection system according to the present invention;
fig. 9 is a top view of a fixing frame of a semiconductor package inspection system according to the present invention;
fig. 10 is a front cross-sectional view of a lifting assembly of a semiconductor package inspection system according to the present invention;
FIG. 11 is a side cross-sectional view of a lift assembly of a semiconductor package inspection system according to the present invention;
FIG. 12 is a top view of a rectangular slot of a semiconductor package inspection system according to the present invention;
fig. 13 is a side view of a semiconductor package inspection system according to a second embodiment;
fig. 14 is an enlarged view at a in the second embodiment;
fig. 15 is a meshing view of a second worm and a second worm wheel in the second embodiment.
In the figure: 1. a work table; 2. a bracket; 3. a detection head; 4. a conveyor belt; 5. a placement table; 6. a moving frame; 7. a sliding frame; 8. a package; 9. a through hole; 10. a chute; 11. an L-shaped plate; 12. a bump; 13. a rack; 14. spur gears; 15. a driving motor; 16. a fixed frame; 17. a U-shaped groove; 18. a circular groove; 19. a first spring; 20. a push plate; 21. a brake lever; 22. a sliding groove; 23. a clamping block; 24. a second spring; 25. a clamping groove; 26. a slide block; 27. rectangular grooves; 28. a sliding plate; 29. rectangular through holes; 30. a top block; 31. a first worm; 32. a base; 33. a rotating shaft; 34. a first worm wheel; 35. a first rotating lever; 36. a fixed shaft; 37. a second rotating lever; 38. a sleeve; 39. a loop bar; 40. a tension spring; 41. a fixed block; 42. a rotating groove; 43. a rotating shaft; 44. a first gear; 45. a rotating motor; 46. a second gear; 47. a second worm wheel; 48. a screw; 49. a slide bar; 50. a round sleeve; 51. labeling the label; 52. a stepping motor; 53. a second worm; 54. a telescopic rod; 55. a guide plate; 56. and a limiting block.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments.
Example 1
Referring to fig. 1-12, a semiconductor package inspection system comprises a workbench 1, one side fixedly connected with support 2 of workbench 1, one side fixedly connected with inspection head 3 of support 2, the top of workbench 1 is equipped with conveyer belt 4, one side of workbench 1 is equipped with places platform 5, the top fixedly connected with of placing platform 5 removes frame 6, the both sides inner wall sliding connection of removing frame 6 has sliding frame 7, the encapsulation body 8 has been placed at the top of sliding frame 7, the bottom of removing frame 6 is equipped with through-hole 9, both sides of removing frame 6 all are equipped with spout 10, one side of placing platform 5 is equipped with the conveying subassembly that is used for carrying removing frame 6, a plurality of fixed frames 16 have been arranged to the top equidistance of conveyer belt 4, be equipped with the fixed subassembly that is used for fixing removing frame 6 in the fixed frame 16, be equipped with rectangular channel 27 in the workbench 1, the both sides inner wall sliding connection of rectangular channel 27 has same sliding plate 28, be equipped with rectangular through-hole 29 in the sliding plate 28, the top fixedly connected with kicking block 30 in the top of sliding plate 28, the bottom inner wall of rectangular channel 27 is equipped with the lifting assembly that is used for making kicking block 30 go up and down.
In the invention, the conveying assembly comprises an L-shaped plate 11 which is connected to the top of the placing table 5 in a sliding way, one side of the L-shaped plate 11, which is close to the moving frame 6, is fixedly connected with a convex block 12, the convex block 12 is contacted with the moving frame 6, one side of the L-shaped plate 11, which is far away from the moving frame 6, is fixedly connected with a rack 13, one side of the moving frame 6 is fixedly connected with a driving motor 15, an output shaft of the driving motor 15 is fixedly connected with a spur gear 14, and the spur gear 14 is meshed with the rack 13.
In the invention, the fixing component comprises a U-shaped groove 17 arranged in a fixing frame 16, the top inner wall and the bottom inner wall of the U-shaped groove 17 are slidably connected with the same push plate 20, one side inner wall of the U-shaped groove 17 is provided with a round groove 18, one side inner wall of the round groove 18 is fixedly connected with a first spring 19, one end of the first spring 19 far away from the round groove 18 is fixedly connected with the push plate 20, the top inner wall and the bottom inner wall of the U-shaped groove 17 are slidably connected with two symmetrical brake rods 21, the two brake rods 21 are fixedly connected with the push plate 20, two symmetrical sliding grooves 22 are arranged in the workbench 1, the top inner wall and the bottom inner wall of the two sliding grooves 22 are slidably connected with clamping blocks 23, one side, far away from each other, of the two sliding grooves 22 is fixedly connected with a second spring 24, one end, close to each other, of the two second springs 24 is fixedly connected with the clamping blocks 23, two clamping grooves 25 are arranged in the clamping blocks 23, and one end, far away from the push plate 20, of the two brake rods 21 are extended into the clamping grooves 25.
In the invention, the lifting assembly comprises two symmetrical bases 32 arranged on the inner wall of the bottom of a rectangular groove 27, one sides of the two bases 32, which are close to each other, are respectively connected with a rotating shaft 33 in a rotating way, the outer walls of the two rotating shafts 33 are fixedly sleeved with a first worm wheel 34 and a first rotating rod 35, the inner wall of the bottom of the rectangular groove 27 is rotatably connected with a first worm 31, the first worm 31 is meshed with the first worm wheel 34, a rotating groove 42 is arranged in the workbench 1, and the bottom of the sliding plate 28 is rotatably connected with two symmetrical second rotating rods 37.
In the invention, the lifting assembly further comprises a fixed block 41 fixedly connected to the tops of the two bases 32, the top ends of the fixed block 41 penetrate through the rectangular through holes 29 and extend into the jacking block 30, the top ends of the two first rotating rods 35 are fixedly connected with fixed shafts 36, the bottom ends of the two second rotating rods 37 are rotatably connected with the fixed shafts 36, the outer walls of the two fixed shafts 36 are rotatably connected with sleeves 38, sleeve rods 39 are slidably connected to both sides of the fixed block 41, one ends of the two sleeve rods 39, which are far away from each other, extend into the two sleeves 38 and are slidably connected with the sleeves 38, a tension spring 40 is sleeved on the outer wall of the sleeve 38, one end of the tension spring 40, which is far away from the fixed block 41, is fixedly connected with the outer wall of the sleeve 38, one end of the tension spring 40, which is far away from the fixed shaft 36, is fixedly connected with the outer wall of the sleeve 38, a rotating motor 45 is fixedly connected with the bottom inner wall of the rotating groove 42, a second gear 46 is fixedly connected with the output shaft of the rotating motor 45, the bottom inner wall of the rotating groove 42 is rotatably connected with a rotating shaft 43, the outer wall of the rotating shaft 43 is fixedly sleeved with a first gear 44, and the top end of the rotating shaft 43 extends into the rectangular groove 27 and is fixedly connected with the first worm 31.
In the invention, a plurality of telescopic rods 54 are equidistantly arranged on the inner wall of the bottom of the rectangular groove 27, the top ends of the telescopic rods 54 are fixedly connected with the bottom of the sliding plate 28, and the sliding plate 28 can be stably lifted through the telescopic rods 54.
In the invention, the top of the placement table 5 is fixedly connected with the guide plate 55, the guide plate 55 is contacted with the movable frame 6, and the movable frame 6 can be prevented from shifting in the moving process by the guide plate 55, so that the movable frame cannot enter the fixed frame 16.
In the invention, the top of the placement table 5 is fixedly connected with the limiting block 56, and the limiting block 56 can limit the L-shaped plate 11 to prevent the L-shaped plate 11 from being separated from the placement table 5.
A process for inspecting a semiconductor package inspection system, comprising the steps of:
s1, starting a driving motor 15 to drive a spur gear 14 to rotate, wherein the spur gear 14 is meshed with a rack 13, and along with the rotation of the spur gear 14, an L-shaped plate 11 and a convex block 12 push a movable frame 6 into a fixed frame 16, and the movable frame 6 enters the fixed frame 16 along a sliding block 26 due to the alignment of the sliding block 26 and the sliding chute 10;
s2, the movable frame 6 enters the fixed frame 16 and presses the push plate 20 inwards, so that the first spring 19 starts to compress, the push plate 20 drives the brake rod 21 to slide to two sides, the brake rod 21 is separated from the clamping groove 25, the brake of the clamping block 23 is released, because the second spring 24 is always in a compressed state before the brake rod 21 releases the brake of the clamping block 23, the two second springs 24 push the two clamping blocks 23 to the middle, the two clamping blocks 23 can clamp the movable frame 6, the movable frame 6 is braked, and the elastic force of the first spring 19 is prevented from pushing the movable frame 6 outwards;
s3, starting the conveyer belt 4, conveying the fixed frame 16 to the right by the conveyer belt 4 until the fixed frame 16 is conveyed to the right below the detection head 3, enabling the through hole 9 to face the rectangular groove 27 at the moment, then starting the rotating motor 45 to drive the second gear 46 to brake, enabling the second gear 46 to be meshed with the first gear 44, the rotating shaft 43 and the first worm 31 to brake, and enabling the first worm 31 to be meshed with the first worm wheel 34, and enabling the two first worm wheels 34 and the first rotating rod 35 to rotate oppositely along with the braking of the first worm 31;
s4, the two first rotating rods 35 rotate oppositely, as the tension spring 40 is always in a stretched state before, the tension spring 40 pulls the fixed shaft 36 and the sleeve 38 to the middle along with the rotation of the first rotating rods 35, the sleeve rod 39 starts to slide upwards along with the top end of the first rotating rods 35, when the tension spring 40 pulls the fixed shaft 36 and the sleeve 38 to slide to the middle, the second rotating rods 37 are driven to rotate by taking the fixed shaft 36 as a fulcrum at the same time, the first rotating rods 35 and the second rotating rods 37 can push the sliding plate 28 and the jacking block 30 upwards, the jacking block 30 penetrates into the through hole 9, and the sliding frame 7 and the packaging body 8 are pushed upwards, so that the distance between the detection head 3 and the packaging body 8 can be regulated, and the detection head 3 can accurately detect the packaging body 8 conveniently;
s5, when the detecting head 3 detects that the packaging body 8 is unqualified, the stepping motor 52 is started to drive the second worm 53 to rotate, the second worm 53 is meshed with the second worm gear 47, the second worm gear 47 is in threaded connection with the screw rod 48, along with the rotation of the second worm gear 47, the screw rod 48 drives the sliding rod 49 and the labeling head 51 to slide towards the direction of the packaging body 8 until the labeling head 51 is positioned right above the packaging body 8, then the rotating motor 45 is started to drive the second gear 46 to rotate, the sliding frame 7 and the packaging body 8 are pushed upwards, the packaging body 8 is contacted with the labeling head 51, and the labeling head 51 can paste unqualified labels on the packaging body 8.
Embodiment two: as shown in fig. 13-15, a semiconductor package inspection system according to the present embodiment is different from the first embodiment in that: one side of the support 2 is rotationally connected with a second worm wheel 47, the screw 48 is connected with the internal thread of the second worm wheel 47, one end of the screw 48 extends into the support 2 and is fixedly connected with a sliding rod 49, one side of the support 2 is fixedly connected with a round sleeve 50, one end of the sliding rod 49 away from the second worm wheel 47 penetrates through the round sleeve 50 and is in sliding connection with the round sleeve 50, one end of the sliding rod 49 away from the second worm wheel 47 is fixedly connected with a label head 51, one side of the support 2 is fixedly connected with a stepping motor 52, an output shaft of the stepping motor 52 is fixedly connected with a second worm 53, and the second worm 53 is meshed with the second worm wheel 47.
However, as well known to those skilled in the art, the working principles and wiring methods of the driving motor 15, the rotating motor 45, the stepping motor 52 and the detecting head 3 are well known, which are all conventional means or common knowledge, and are not described herein in detail, and any choice can be made by those skilled in the art according to their needs or convenience.
Working principle: the first step, the driving motor 15 is started to drive the spur gear 14 to rotate, the spur gear 14 is meshed with the rack 13, the L-shaped plate 11 and the convex block 12 push the movable frame 6 into the fixed frame 16 along with the rotation of the spur gear 14, the movable frame 6 enters the fixed frame 16 along with the sliding block 26 due to the alignment of the sliding block 26 and the sliding chute 10, the second step, the movable frame 6 enters the fixed frame 16 and presses the push plate 20 inwards, the first spring 19 starts to compress, the push plate 20 drives the brake rod 21 to slide towards two sides, the brake rod 21 is disengaged from the clamping groove 25 to release the brake of the clamping block 23, the two second springs 24 push the two clamping blocks 23 towards the middle after the brake rod 21 releases the brake of the clamping block 23 due to the fact that the second springs 24 are in the compressed state, the two clamping blocks 23 can clamp the movable frame 6 and brake the movable frame 6, the elastic force of the first spring 19 is prevented from pushing the movable frame 6 to the outside, the conveyer belt 4 is started, the conveyer belt 4 conveys the fixed frame 16 to the right until the fixed frame 16 is conveyed to the right below the detecting head 3, the through hole 9 faces the rectangular groove 27 at this time, then the rotary motor 45 is started to drive the second gear 46 to brake, the second gear 46 is meshed with the first gear 44, the rotary shaft 43 and the first worm gear 31 are driven by the second gear 46 to brake, the first worm gear 31 is meshed with the first worm gear 34, the two first worm gears 34 and the first rotary rods 35 can be driven to rotate oppositely along with the braking of the first worm gear 31, the fourth step is carried out to rotate oppositely on the two first rotary rods 35, because the tension spring 40 is always in a stretched state before, along with the rotation of the first rotary rods 35, the tension spring 40 pulls the fixed shaft 36 and the sleeve 38 to the middle and the loop 39 starts to slide upwards along with the top end of the first rotating rod 35, when the tension spring 40 pulls the fixed shaft 36 and the sleeve 38 to slide to the middle, the second rotating rod 37 is driven to rotate by taking the fixed shaft 36 as a pivot, then the first rotating rod 35 and the second rotating rod 37 can push the sliding plate 28 and the jacking block 30 upwards, the jacking block 30 penetrates into the through hole 9 to push the sliding frame 7 and the packaging body 8 upwards, so that the distance between the detection head 3 and the packaging body 8 can be regulated, the detection head 3 can accurately detect the packaging body 8 conveniently, and in the fifth step, when the detection head 3 detects that the packaging body 8 is unqualified, the stepping motor 52 is started to drive the second worm 53 to rotate, the second worm 53 is meshed with the second worm 47, the second worm 47 is in threaded connection with the screw 48, and the screw 48 drives the sliding plate 49 and the labeling head 51 to slide to the direction of the packaging body 8 along with the rotation of the second worm 47 until the labeling head 51 is positioned right above the packaging body 8, and then the rotating the second worm 45 drives the second worm gear 46 to rotate the sliding frame 7 and the labeling head 51 to push the sliding frame 8 upwards, so that the labeling head 51 can be attached to the packaging body 8 and the label 8 is unqualified.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art, who is within the scope of the present invention, should make equivalent substitutions or modifications according to the technical scheme of the present invention and the inventive concept thereof, and should be covered by the scope of the present invention.

Claims (5)

1. The semiconductor package detection system comprises a workbench (1), and is characterized in that one side of the workbench (1) is fixedly connected with a support (2), one side of the support (2) is fixedly connected with a detection head (3), the top of the workbench (1) is provided with a conveying belt (4), one side of the workbench (1) is provided with a placement table (5), the top of the placement table (5) is fixedly connected with a movable frame (6), two side inner walls of the movable frame (6) are slidably connected with a sliding frame (7), a packaging body (8) is placed at the top of the sliding frame (7), the bottom of the movable frame (6) is provided with a through hole (9), two sides of the movable frame (6) are provided with sliding grooves (10), one side of the placement table (5) is provided with a conveying assembly for conveying the movable frame (6), the top of the conveying belt (4) is equidistantly provided with a plurality of fixed frames (16), the fixed assembly for fixing the movable frame (6) is arranged in the fixed frame (16), the workbench (1) is internally provided with a rectangular groove (27), two side inner walls (28) are connected with rectangular grooves (28) and two side plates (28) are connected with a rectangular groove (28), the inner wall of the bottom of the rectangular groove (27) is provided with a lifting assembly for lifting the top block (3);
the conveying assembly comprises an L-shaped plate (11) which is slidably connected to the top of the placing table (5), a lug (12) is fixedly connected to one side, close to the moving frame (6), of the L-shaped plate (11), the lug (12) is contacted with the moving frame (6), a rack (13) is fixedly connected to one side, far away from the moving frame (6), of the L-shaped plate (11), a driving motor (15) is fixedly connected to one side, close to the moving frame (6), of the L-shaped plate, a spur gear (14) is fixedly connected to an output shaft of the driving motor (15), and the spur gear (14) is meshed with the rack (13);
the fixing assembly comprises a U-shaped groove (17) arranged in a fixing frame (16), the top inner wall and the bottom inner wall of the U-shaped groove (17) are connected with the same push plate (20) in a sliding mode, a round groove (18) is formed in one side inner wall of the U-shaped groove (17), a first spring (19) is fixedly connected to one side inner wall of the round groove (18), one end, far away from the round groove (18), of the first spring (19) is fixedly connected with the push plate (20), two symmetrical braking rods (21) are connected with the top inner wall and the bottom inner wall of the U-shaped groove (17) in a sliding mode, two symmetrical sliding grooves (22) are formed in the workbench (1), clamping blocks (23) are connected to the top inner wall and the bottom inner wall of the two sliding grooves (22) in a sliding mode, a second spring (24) is fixedly connected to one side, far away from each other, one end, close to each other, of the two second springs (24) is fixedly connected with the clamping blocks (23), and one end, far away from the two clamping blocks (25), of each braking rod (25) is fixedly connected with the two clamping blocks (25);
the lifting assembly comprises two symmetrical bases (32) arranged on the inner wall of the bottom of the rectangular groove (27), one sides, close to each other, of the two bases (32) are respectively and rotatably connected with a rotating shaft (33), a first worm wheel (34) and a first rotating rod (35) are fixedly sleeved on the outer wall of each rotating shaft (33), a first worm (31) is rotatably connected with the inner wall of the bottom of the rectangular groove (27), the first worm (31) is meshed with the first worm wheel (34), a rotating groove (42) is formed in the workbench (1), and two symmetrical second rotating rods (37) are rotatably connected to the bottom of the sliding plate (28).
The lifting assembly further comprises a fixed block (41) fixedly connected to the tops of the two bases (32), the top ends of the fixed block (41) penetrate through the rectangular through holes (29) and extend into the jacking block (30), the top ends of the two first rotating rods (35) are fixedly connected with a fixed shaft (36), the bottom ends of the two second rotating rods (37) are rotatably connected with the fixed shaft (36), the outer walls of the fixed shaft (36) are rotatably connected with sleeves (38), sleeve rods (39) are slidably connected to two sides of the fixed block (41), one ends, far away from each other, of the sleeve rods (39) are respectively extended into the two sleeves (38) and are slidably connected with the sleeves (38), the outer wall of the sleeves (38) is sleeved with a tension spring (40), one end, far away from the fixed block (41), of the tension spring (40) is fixedly connected with the outer wall of the sleeve (38), one end, far away from the fixed shaft (36), of the sleeve rod (39) is rotatably connected with the outer wall of the fixed shaft, the motor (42), the bottom of the motor (42) is rotatably connected with a motor (45), the outer wall (43) of the second rotating shaft (43) is rotatably connected with a rotating shaft (43), the top end of the rotating shaft (43) extends into the rectangular groove (27) and is fixedly connected with the first worm (31);
one side of support (2) is rotated and is connected with second worm wheel (47), second worm wheel (47) internal thread connection has screw rod (48), in one end of screw rod (48) extends to support (2) and fixedly connected with slide bar (49), one side fixedly connected with circle cover (50) of support (2), one end that second worm wheel (47) was kept away from to slide bar (49) runs through circle cover (50) and with circle cover (50) sliding connection, one end fixedly connected with label head (51) that second worm wheel (47) was kept away from to slide bar (49), one side fixedly connected with step motor (52) of support (2), output shaft fixedly connected with second worm (53) of step motor (52), second worm (53) and second worm wheel (47) mesh mutually.
2. The semiconductor package inspection system according to claim 1, wherein a plurality of telescopic rods (54) are equidistantly arranged on the inner wall of the bottom of the rectangular groove (27), and the top ends of the telescopic rods (54) are fixedly connected with the bottom of the sliding plate (28).
3. A semiconductor package inspection system according to claim 1, wherein a guide plate (55) is fixedly connected to the top of the placement table (5), and the guide plate (55) and the moving frame (6) are in contact.
4. A semiconductor package inspection system according to claim 1, wherein a stopper (56) is fixedly connected to the top of the placement stage (5).
5. A testing process of a semiconductor package testing system, to which the semiconductor package testing system according to claim 1 is applied, comprising the steps of,
s1, starting a driving motor (15) to drive a spur gear (14) to rotate, wherein the spur gear (14) is meshed with a rack (13), and along with the rotation of the spur gear (14), an L-shaped plate (11) and a convex block (12) push a movable frame (6) into a fixed frame (16), and the movable frame (6) enters the fixed frame (16) along a sliding block (26) due to the alignment of the sliding block (26) and a sliding groove (10);
s2, the movable frame (6) enters the fixed frame (16) and presses the push plate (20) inwards, so that the first spring (19) starts to compress, the push plate (20) drives the brake rod (21) to slide to two sides, the brake rod (21) is separated from the clamping groove (25) to release the braking of the clamping block (23), and after the brake rod (21) releases the braking of the clamping block (23) due to the fact that the second spring (24) is always in a compressed state, the two second springs (24) push the two clamping blocks (23) to the middle, and then the two clamping blocks (23) can clamp the movable frame (6) and brake the movable frame (6), so that the elastic force of the first spring (19) is prevented from pushing the movable frame (6) to the outer side;
s3, starting a conveying belt (4), conveying a fixed frame (16) to the right by the conveying belt (4) until the fixed frame (16) is conveyed to the right under a detection head (3), enabling a through hole (9) to face a rectangular groove (27) at the moment, then starting a rotating motor (45) to drive a second gear (46) to brake, enabling the second gear (46) to be meshed with a first gear (44), enabling the second gear (46) to drive the first gear (44), a rotating shaft (43) and a first worm (31) to brake, and enabling two first worm gears (34) and a first rotating rod (35) to rotate in the opposite direction along with the braking of the first worm (31) due to the fact that the first worm (31) is meshed with the first worm gears (34);
s4, rotating the two first rotating rods (35) in opposite directions, as the tension springs (40) are always in a stretching state before, the tension springs (40) pull the fixed shaft (36) and the sleeve (38) to the middle along with the rotation of the first rotating rods (35), the sleeve rod (39) starts to slide upwards along with the top ends of the first rotating rods (35), and when the tension springs (40) pull the fixed shaft (36) and the sleeve (38) to slide to the middle, the second rotating rods (37) are driven to rotate by taking the fixed shaft (36) as a fulcrum, so that the first rotating rods (35) and the second rotating rods (37) can push the sliding plate (28) and the jacking block (30) upwards, the jacking block (30) penetrates into the through hole (9), the sliding frame (7) and the packaging body (8) are pushed upwards, and therefore the distance between the detection head (3) and the packaging body (8) can be regulated, and the detection head (3) can be conveniently detected and the packaging body (8) can be accurately detected;
s5, when the detection head (3) detects that the packaging body (8) is unqualified, the stepping motor (52) is started to drive the second worm (53) to rotate, the second worm (53) is meshed with the second worm wheel (47), the second worm wheel (47) is in threaded connection with the screw rod (48), along with the rotation of the second worm wheel (47), the screw rod (48) drives the sliding rod (49) and the labeling head (51) to slide towards the direction of the packaging body (8) until the labeling head (51) is positioned right above the packaging body (8), then the rotating motor (45) is started to drive the second gear (46) to rotate, the sliding frame (7) and the packaging body (8) are pushed upwards, the packaging body (8) is contacted with the labeling head (51), and then the labeling head (51) can paste unqualified labels on the packaging body (8).
CN202110221136.5A 2021-02-26 2021-02-26 Semiconductor package detection system and detection process Active CN112885752B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113504451B (en) * 2021-09-10 2021-11-30 江苏煜晶光电科技有限公司 Semiconductor packaging detection equipment
CN115267512B (en) * 2022-08-22 2023-06-27 深圳市睿智科精密科技有限公司 Detection device and detection method for chip package

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CN209822596U (en) * 2019-05-14 2019-12-20 苏州富达仪精密科技有限公司 Detection jig for package qualification rate analysis
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CN102820232A (en) * 2012-08-16 2012-12-12 爱普科斯科技(无锡)有限公司 Ceramic package and product encapsulation integrated machine
JP2017152538A (en) * 2016-02-24 2017-08-31 株式会社ディスコ Alignment method for packaged wafer
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