CN112875638A - Automatic machining method of ultra-sliding sheet - Google Patents
Automatic machining method of ultra-sliding sheet Download PDFInfo
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- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
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- B—PERFORMING OPERATIONS; TRANSPORTING
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Abstract
The invention provides an automatic processing method of a super-slip sheet, which comprises the steps of pre-pushing, separating and separating, and can realize the automatic processing, super-slip judgment and automatic transfer of the super-slip sheet.
Description
Technical Field
The invention relates to the technical field of structure ultra-smoothness, in particular to an automatic processing method of an ultra-smooth sheet.
Background
For a long time, friction and wear problems have been closely related not only to manufacturing, but also directly to energy, environment and health. Statistically, about one third of the world's energy is consumed during friction, and about 80% of machine component failures are caused by wear. The ultra-smooth structure is one of ideal schemes for solving the problem of frictional wear, and the ultra-smooth structure refers to the phenomenon that the friction and the wear between two atomic-level smooth and non-metric contact Van der Waals solid surfaces (such as two-dimensional material surfaces of graphene, molybdenum disulfide and the like) are almost zero.
The existing method for preparing the micron-scale ultra-sliding sheet is to coat and pattern photoresist, etch the photoresist and part of graphite which is not protected by the photoresist, and form a plurality of micron-scale graphite islands on the surface of the HOPG material. Then, the graphite islands are pushed away manually in sequence to form a super-slip surface, the sliding block with the super-slip surface is the super-slip sheet, however, the efficiency of manually pushing out the super-slip sheet is low, and the method is difficult to be directly applied to batch preparation.
Disclosure of Invention
The invention aims to provide an automatic machining method of a super-slip sheet, and aims to solve the technical problem that the efficiency of manually producing and machining the super-slip sheet is low in the prior art.
In order to achieve the purpose, the invention adopts the technical scheme that: the automatic processing method of the ultra-smooth sheet comprises the following steps:
pre-pushing, namely sending a pre-pushing instruction to push the ultra-sliding island to enable the ultra-sliding island to slide and be partially separated into a first part and a second part, and judging whether the first part or the second part automatically returns;
separating, if the first part or the second part returns automatically, sending a separating instruction, pushing the first part or the second part to completely separate the first part and the second part, and judging whether the first part and the second part are completely separated;
and transferring, if the first part and the second part are completely separated, issuing a transfer instruction to move the first part or the second part to a target substrate.
Further, in the pre-pushing step, the pushing force applied to the ultra-sliding island is F1(ii) a In the step of separating, the pushing force applied to the first or second part is F2And F is1Less than F2。
Further, in the pre-pushing step, the ultra-smooth island is pushed towards a specific direction, and the first part and the second part are staggered and not completely separated.
Further, the positive pressure applied to the super-islands, the first portions, or the second portions in the pre-pushing step and in the separating step is less than 500 μ N.
Further, in the separating step, the first portion or the second portion is pushed from a side and a top of the superslip sheet, respectively.
Further, in the pre-pushing step and the separating step, the method for judging whether the first part or the second part automatically returns and is completely separated comprises the following steps:
the camera shooting element faces the ultra-slide to shoot, and the shooting time is the first time T1A second time T2And a third time T3The first time T1Before the super sliding sheet is pushed out, the second time T2And the third time T3All are after the super sliding sheet is pushed out, and the third time T3At the second time T2And then.
Further, if the first time T is1And the third time T3Is superposed, and the first time T1And said second time T2If the patterns do not coincide, the first part or the second part automatically returns.
Further, if the first time T is1The second time T2And the third time T3If none of the patterns of (a) overlap, the first portion and the second portion are completely separated.
Further, the time of the self-return of the first part or the second part is TeAnd T iseIs proportional to the push-out length, the dissociation surface energy coefficient and the area of the ultra-slide, and T2＜Te＜ T3。
Further, in the step of transferring the super-slip sheet, a contact degree of the super-slip sheet with the target substrate needs to be acquired.
The automatic processing method of the ultra-slip sheet provided by the invention has the beneficial effects that: compared with the prior art, the automatic processing method of the ultra-slip sheet can realize automatic processing, ultra-slip judgment and automatic transfer of the ultra-slip sheet, pre-push is carried out before the ultra-slip sheet is separated, the ultra-slip performance of the ultra-slip island can be automatically verified, the first part and the second part can be pre-separated, the ultra-slip performance of the ultra-slip sheet is judged in advance, and separation and transfer are carried out after ultra-slip is verified, so that the yield of the processed ultra-slip sheet can be effectively improved, the production and processing efficiency is improved, and waste of more time on waste products is avoided.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic perspective view of an automatic ultra-slide processing apparatus according to an embodiment of the present invention;
FIG. 2 is a flow chart of an automatic machining method for a super-slip sheet according to an embodiment of the present invention.
Description of reference numerals:
1. a stage; 2. a first monitoring component; 3. a transfer assembly; 4. a second monitoring component; 5. a superclipper sheet; 6. a target substrate; 21. a longitudinal microscope; 22. an image pickup element.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Because the ultra-slip of a large scale cannot be realized for a long time, the phenomenon that the friction coefficient is in the order of thousandth or lower is often called as ultra-slip in documents for over ten years; the phenomenon that the initial friction and wear caused by the non-degree-of-concentricity contact are almost zero is called 'structural lubrication', and the 'ultra-lubricity' referred to in the invention refers to the phenomenon that the friction and wear caused by the non-degree-of-concentricity contact are almost zero.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Referring to fig. 1 and fig. 2, the automatic processing method of the ultra-smooth sheet according to the present invention will now be described. The automatic machining method of the ultra-sliding sheet is generally applied to the automatic machining equipment of the ultra-sliding sheet, the automatic machining equipment comprises a carrying platform 1, a first monitoring assembly 2 and a transfer assembly 3, wherein the first monitoring assembly 2 is used for monitoring the positions of the ultra-sliding sheet 5 and the target substrate 6, the transfer assembly 3 is used for transferring the ultra-sliding sheet 5, and a first area used for machining the ultra-sliding sheet 5 and a second area used for placing the target substrate 6 are arranged on the carrying platform 1; the first monitoring assembly 2 is arranged above the carrier 1, and the view field of the first monitoring assembly 2 faces the carrier 1; when the transfer assembly 3 works, at least a part of the transfer assembly 3 is located between the first monitoring assembly 2 and the carrier 1, and the transfer assembly 3 is located in the visual field range of the first monitoring assembly 2.
The transfer component 3 generally refers to a micro-needle, a probe or an elastic stamp, and the like, and transfers the super-slip sheet 5, and the transfer component 3 does not shield the target substrate 6 when transferring the super-slip sheet 5, so that the brightness change on the target substrate 6 and the super-slip sheet 5 is prevented from being observed. The driving component is used for driving the transfer component 3 to move, and the driving component can directly select a three-axis motion platform or a nanometer manipulator and the like which are conventionally adopted in the prior art, and is not limited here.
The first monitoring assembly 2 can observe the stage 1, the transfer assembly 3, the target substrate 6 and the ultra-slide 5 in the longitudinal direction, and the first monitoring assembly 2 generally comprises a longitudinal microscope 21 and an image pickup element 22, wherein the image pickup element 22 is arranged inside the longitudinal microscope 21 or above an ocular lens of the longitudinal microscope 21. Because the dimensions of the ultra-sliding sheet 5 and the target substrate 6 are relatively small, generally, the dimensions are micron-scale or nanometer-scale, when photographing, the image pickup element 22 needs to be matched with the longitudinal microscope 21 to perform photographing so as to ensure the photographing definition, and certainly, in other embodiments, the image pickup element 22 may also select an ultra-high-definition camera capable of enlarging the dimensions.
The whole device can further comprise a controller, or the first monitoring assembly 2 comprises a processing unit, the processing unit or the controller can process information obtained by the camera element 22 and send out a corresponding instruction, the automatic processing method of the ultra-sliding sheet is integrated in the controller, the processing unit or the controller generally adopts a processor to process and compare, the processing unit or the controller can obtain pictures shot by the shooting unit, and the positions of the ultra-sliding sheet 5 shot by the camera element 22 are compared, so that the state of the ultra-sliding sheet 5 is identified and judged, and whether the state of the ultra-sliding sheet 5 meets ultra-sliding is judged.
For further enhancing the monitoring and control effects, a second monitoring assembly 4 can be arranged on the side edge of the carrier 1, the second monitoring assembly 4 monitors the ultra-sliding piece 5 and the target substrate 6 from the side edge of the carrier 1, the transverse translation of the ultra-sliding piece 5 can be monitored, and the contact degree between the ultra-sliding piece 5 and the target substrate 6 can be monitored in the process that the ultra-sliding piece 5 is transferred to the target substrate 6.
Preferably, the second monitoring assembly 4 is the same in composition as the first monitoring assembly 2, the second monitoring assembly 4 includes a transverse microscope and an image pickup element 22, and the first monitoring assembly 2 and the second monitoring assembly 4 can be commonly connected to a controller, and the information collected by the first monitoring assembly 2 and the second monitoring assembly 4 is processed by the controller, or a separate processing unit may be disposed inside the second monitoring assembly 4, which is not limited herein.
Preferably, a general controller is further provided outside the first monitoring module 2 and the second monitoring module 4, and the general controller can summarize information acquired by each sensor and the imaging element 22, perform unified processing, and issue corresponding control instructions, so that the execution units such as the transfer module 3 can implement corresponding operations.
The automatic processing equipment for the ultra-slip sheet and the method for realizing automatic processing comprise the following steps:
and S1, correcting the equipment by adopting a manual adjustment mode or an automatic equipment adjustment mode, so that the carrier 1 can be positioned in the visual field range of the image pickup elements 22 of the first monitoring assembly 2 and the second monitoring assembly 4, the transfer assembly 3 can move on the carrier 1, and the carrier can be positioned in the visual field range of the first monitoring assembly 2 and the second monitoring assembly 4 all the time or most of the time.
S2, the ultra-sliding island is placed in the first area for machining the ultra-sliding sheet 5, and the ultra-sliding island is initially positioned by combining the first monitoring assembly 2 and the second monitoring assembly 4, so that a subsequent controller can conveniently send an instruction or position determination when the transfer assembly 3 moves.
The ultra-smooth island generally refers to a graphite sheet, a hope graphite block and other layered structures, ultra-smooth contact is formed between layers of the ultra-smooth island, and the ultra-smooth island can be pushed out and formed into the ultra-smooth sheet 5 under the action of external force.
S3, the controller sends a pre-push instruction, the transfer component 3 pushes the ultra-sliding island from the top of the ultra-sliding island, so that the ultra-sliding island is partially separated in the height direction, and is formed into a first part and a second part, and the first part and the second part are not completely separated, namely, the first part and the second part are staggered with each other and are not separated, and at the moment, the ultra-sliding performance of the ultra-sliding island can be judged through the fact that whether the first part and the second part have an automatic return phenomenon.
The method for judging the self-return phenomenon between the first part and the second part comprises the following steps: the image pickup element 22 faces the superslide sheet 5 for shooting, the shot pictures are compared, whether the pictures return automatically or not is judged through the contact ratio of the pictures, and the shooting time is the first time T1A second time T2And a third time T3The first time T1Before the super sliding sheet 5 is pushed out, the second time T2And the third time T3After the superclipper 5 is pushed out, the third time T is3At the second time T2And then. If the first time T before the super sliding sheet 5 is pushed out1And a third time T after the push-out3The first time T before the super sliding sheet 5 is pushed out is1And a second time T after the push-out2If the patterns do not coincide, it can be determined that the first portion or the second portion can be automatically returned. The judgment of the ultra-smooth is realized by adopting the mode of taking pictures by the camera element 22, the intelligent ultra-smooth judgment can be realized, the ultra-smooth island with poor ultra-smooth performance is eliminated, and the subsequent separation and transfer yield is improved.
If the first part or the second part can not realize automatic return, the ultra-smooth island can not be processed into the ultra-smooth sheet 5, at the moment, exception handling can be carried out, and the controller can control the transfer assembly 3 to move the ultra-smooth island to a storage area for placing the ultra-smooth island without ultra-smoothness. With the improvement of the pixels of the image pickup element 22, the judgment of automatic return is carried out by adopting the mode of shooting by the image pickup element 22 and carrying out data processing, the accuracy is higher, the judgment of automatic return can be achieved only by comparing and judging the graphs at a plurality of time points, the data processing is simpler and more intuitive, and the accuracy is higher.
If the first part and the second part can realize automatic return, the ultra-smooth island can be processed and formed into the ultra-smooth sheet 5, and the subsequent steps can be continued.
S4, the controller issues a separating command, and the transferring unit 3 pushes the ultra-smooth island again, so that the ultra-smooth island is completely separated in the height direction, and is formed into a separated first part and a separated second part. Wherein, in the pre-pushing step, the pushing force applied to the ultra-sliding island by the transfer component 3 is F1(ii) a In this step, the thrust applied to the first part is F2And F is1Less than F2The larger thrust can ensure the complete separation of the first part and the second part, and is convenient to grab and transfer, but the thrust F1And F2Can not be larger than 500 mu N, and damage to the ultra-smooth island can be avoided. Wherein, in order to improve the yields when the machine is promoted automatically, avoid the damage of the needle point of transfer module 3 in the ultra-sliding island transfer process to the ultra-sliding island and how to restrain the locking inefficacy phenomenon that the rotation of the ultra-sliding island caused in the transfer process, when separating first portion and second portion, can promote the ultra-sliding island from different directions and make first portion and second portion separate, its concrete method of separation is:
first of all, by the transfer module 3, from the side of the island, so that the first and second parts are laterally separated, thus achieving the dissociation of the first and second parts, and the pushing is stopped when the parts 1/3 to 2/3 are pushed out, at which time no rotation of the first or second part occurs; then the transfer component 3 is controlled from the top end of the ultra-sliding island, so that the ultra-sliding island continues to move, the complete dissociation of the first part and the second part is realized, the ultra-sliding island is pushed to move by adopting a mode of combining two directions, the yield can be effectively improved, and the condition of rotation failure is avoided.
Wherein, the method for judging whether the first part and the second part are completely separated comprises the following steps: the image pickup element 22 shoots towards the superslide sheet 5, compares the shot pictures, judges whether the pictures are completely separated according to the contact ratio of the pictures, and the shooting time is the first time T1A second time T2And a third time T3The first time T1Before the super sliding sheet 5 is pushed out, the second time T2And the third time T3After the superclipper 5 is pushed out, the third time T is3At the second time T2And then. If, the first time T before the super sliding sheet 5 is pushed out1Second time T after push-out2And a third time T after the push-out3If the patterns do not coincide, it can be determined that the first portion and the second portion are completely separated.
Wherein for a first time T1A second time T2And a third time T3Is selected, a first time T1The time can be any time before the super sliding sheet 5 is pushed out, and the optimal time is within 1 to 5ms before the super sliding sheet 5 is pushed out or when the super sliding sheet 5 is pushed out; second time and third time T3The time of the time selection and the automatic return is TeRelated, wherein TeI.e. the time of self-righting of the first part or said second part. T iseThe time duration of (A) is generally proportional to the push-out length, dissociation surface energy coefficient and area of the ultra-slip sheet, wherein the time duration is generally 1 to 10ms, and the second time T2Less than self-return time TeAnd a third time T3Greater than the self-return time Te Te。
For TeThe force F of the first and second parts returning is L α, where L is the side length of the ultra-smooth island and α is the dissociation surface energy coefficient, and the value of F is typically 0.5 to 1 μ N/μm, and then the maximum value is obtained by estimating the value of F, L is the edge length of the ultra-smooth island, and the value of F is typically 0.5 to 1 μ N/μmThe distance can be estimated to estimate the time T for the self-return of the first part or the second parte。
When mechanical automatic processing is carried out, a large number of ultra-sliding pieces with the same specification and size are generally processed at the same time by processing the ultra-sliding piece 5, and the automatic return time T is calculated in advance according to actual needseThe monitoring accuracy can be ensured.
If the first part or the second part can not be completely separated, exception handling can be performed at this time, and the controller can control the transfer assembly 3 to dissociate the ultra-smooth island again, so that the first part and the second part are completely separated, or the ultra-smooth island which cannot be dissociated is directly moved to a storage area for placing the ultra-smooth island without ultra-smoothness.
If the first and second portions have been completely separated, and the first or second portion is now the superclip 5, the subsequent transfer step may be continued to transfer the first or second portion to the substrate.
S5, the controller sends a transfer instruction, the transfer module 3 can move the first part or the second part to the target substrate 6, and at this time, a contact degree between the super-slip sheet 5 and the target substrate 6 needs to be obtained, where the contact degree is a contact degree between the super-slip sheet 5 and the target substrate 6, and by determining whether the super-slip sheet 5 is completely in contact with the target substrate 6, it is determined whether the transfer module 3 needs to continue to control the super-slip sheet 5 to move downward. Through the judgment of the contact degree, the damage to the ultra-smooth sheet 5 or the target substrate 6 in the transfer process can be avoided.
In the transfer process of the super-slip sheet 5, the contact degree between the super-slip sheet 5 and the target substrate 6 can be judged by shooting through a camera of the second monitoring component 4, shooting is carried out by adopting a camera element 22 from the side surface to the super-slip sheet 5, pictures are shot at intervals of preset time, the preset time is generally 0.1-2 ms, at least two pictures which are shot adjacently are compared, if the two adjacent pictures are not completely overlapped, it is proved that the super-slip sheet 5 can still move downwards at the moment, the super-slip sheet 5 is not completely contacted with the target substrate 6, if the two pictures are overlapped, the super-slip sheet 5 cannot move downwards continuously, the super-slip sheet 5 is attached to the target substrate 6 at the moment, and the super-slip sheet 5 is completely contacted with the target substrate 6.
The position of the transfer component 3 is judged by combining a plurality of camera elements 22, and the controller is used for integral control, so that the automatic processing and transfer of the ultra-smooth slide block are realized, the labor cost can be greatly saved, and the production and processing efficiency is improved.
The ultra-smooth island is pre-pushed between the separation steps, so that the ultra-smooth island can be separated into a first part and a second part, intelligent ultra-smooth judgment can be realized at the moment, the ultra-smooth island with poor ultra-smooth performance is removed, and the subsequent separation and transfer yield is improved. And after the ultra-sliding island is pre-pushed, the connecting force between the ultra-sliding island layers is weakened, so that the chemical bond between the contact surfaces of the first part and the second part is broken, and the first part and the second part can be completely separated without applying a large pushing force in the subsequent separation step.
At present, dissociation to super-slip island is generally through manual operation, operating personnel can adjust the thrust size of applying for first portion and second portion as required, manual operation's flexibility ratio is stronger, consequently, need not to separate in advance also can the manual work avoid the too big damage that causes super-slip island of thrust, but to the automatic dissociation that realizes super-slip piece of machine, its reaction sensitivity and flexibility ratio are lower, the size of the thrust of applying can't be adjusted according to actual conditions, position and direction etc. through the operation of carrying out the predissociation in advance, the size that need exert the force when can effectively reducing the complete separation and the degree of difficulty of promotion, be applicable to in automated production and the processing more.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.
Claims (10)
1. An automatic processing method of a super-smooth sheet is characterized by comprising the following steps:
pre-pushing, namely sending a pre-pushing instruction to push the ultra-sliding island to enable the ultra-sliding island to slide and be partially separated into a first part and a second part, and judging whether the first part or the second part automatically returns;
separating, if the first part or the second part returns automatically, sending a separating instruction, pushing the first part or the second part to completely separate the first part and the second part, and judging whether the first part and the second part are completely separated;
and transferring, if the first part and the second part are completely separated, issuing a transfer instruction to move the first part or the second part to a target substrate.
2. The method for automatically machining a superclipper as claimed in claim 1, wherein: in the pre-pushing step, the pushing force applied to the ultra-sliding island is F1(ii) a In the step of separating, the pushing force applied to the first or second part is F2And F is1Less than F2。
3. The automatic processing method of the ultra-smooth sheet as claimed in claim 2, wherein: in the pre-pushing step, the ultra-smooth island is pushed towards a specific direction, and the first part and the second part are staggered and not completely separated.
4. The method for automatically machining a superclipper as claimed in claim 1, wherein: the positive pressure applied to the super-islands, the first portions, or the second portions in the pre-pushing step and in the separating step is less than 500 μ N.
5. The method for automatic machining of a superclip as claimed in any of claims 1 to 4, wherein: in the separating step, the first portion or the second portion is pushed from a side and a top of the superclip, respectively.
6. The method for automatic machining of a superclip as claimed in any of claims 1 to 4, wherein: in the pre-pushing step and the separating step, the method for judging whether the first part or the second part returns automatically and whether the first part or the second part is completely separated comprises the following steps:
the camera shooting element faces the ultra-slide to shoot, and the shooting time is the first time T1A second time T2And a third time T3The first time T1Before the super sliding sheet is pushed out, the second time T2And the third time T3All are after the super sliding sheet is pushed out, and the third time T3At the second time T2And then.
7. The automatic processing method of the ultra-smooth sheet as claimed in claim 6, wherein: if the first time T1And the third time T3Is superposed, and the first time T1And said second time T2If the patterns do not coincide, the first part or the second part automatically returns.
8. The automatic processing method of the ultra-smooth sheet as claimed in claim 6, wherein: if the first time T1The second time T2And the third time T3If none of the patterns of (a) overlap, the first portion and the second portion are completely separated.
9. The method for automatically processing the ultra-slip sheet as claimed in claim 6 or 7, wherein: the time of the automatic return of the first part or the second part is TeAnd T iseIs proportional to the push-out length, the dissociation surface energy coefficient and the area of the ultra-slide, and T2＜Te＜T3。
10. The method for automatic machining of a superclip as claimed in any of claims 1 to 4, wherein: in the step of transferring the super-slip sheet, the contact degree of the super-slip sheet and the target substrate is required to be acquired.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113683053A (en) * | 2021-09-14 | 2021-11-23 | 深圳清华大学研究院 | Micro block array moving assembly and manufacturing method thereof |
| CN113788453A (en) * | 2021-09-14 | 2021-12-14 | 深圳清华大学研究院 | Ultra-smooth island pushing device and ultra-smooth island processing method |
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