CN112875638B - Automatic processing method of super-slip sheet - Google Patents
Automatic processing method of super-slip sheet Download PDFInfo
- Publication number
- CN112875638B CN112875638B CN202011582412.2A CN202011582412A CN112875638B CN 112875638 B CN112875638 B CN 112875638B CN 202011582412 A CN202011582412 A CN 202011582412A CN 112875638 B CN112875638 B CN 112875638B
- Authority
- CN
- China
- Prior art keywords
- super
- time
- sliding
- sheet
- island
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00206—Processes for functionalising a surface, e.g. provide the surface with specific mechanical, chemical or biological properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C3/00—Assembling of devices or systems from individually processed components
- B81C3/008—Aspects related to assembling from individually processed components, not covered by groups B81C3/001 - B81C3/002
Abstract
The invention provides an automatic processing method of an ultra-sliding sheet, which comprises the steps of pre-pushing, separating and separating, and can realize automatic processing, ultra-sliding judgment and automatic transfer of the ultra-sliding sheet, and before the ultra-sliding sheet is separated, the ultra-sliding sheet is pre-pushed and then separated, the ultra-sliding performance of an ultra-sliding island can be automatically verified, the first part and the second part can be pre-separated, the ultra-sliding performance of the ultra-sliding sheet can be judged in advance, and the ultra-sliding sheet is separated and transferred after the ultra-sliding is verified, so that the yield of the processed ultra-sliding sheet can be effectively improved, and the production and processing efficiency can be improved.
Description
Technical Field
The invention relates to the technical field of structural super-slip, in particular to an automatic processing method of a super-slip sheet.
Background
Friction and wear problems have long been closely related to manufacturing, but also directly to energy, environment and health. It is counted that about one third of the world's energy is consumed during friction and about 80% of machine component failures are caused by wear. The structural ultra-slip is one of ideal schemes for solving the friction and abrasion problems, and the structural ultra-slip refers to the phenomenon that friction and abrasion between two van der Waals solid surfaces (such as two-dimensional material surfaces of graphene, molybdenum disulfide and the like) which are smooth at atomic level and are in non-metric contact are almost zero.
The existing method for preparing the micron-scale super-slip sheet is that firstly, photoresist is coated and patterned, then the photoresist and partial graphite which is not protected by the photoresist are etched, and a plurality of graphite islands with the size in the micron scale are formed on the surface of the HOPG material. Then manually pushing the graphite islands in turn to form an ultra-slip sliding surface, wherein the sliding blocks with the ultra-slip sliding surface are the ultra-slip sheets, but the efficiency of manually pushing out the ultra-slip sheets is low, and the method is difficult to be directly applied to batch preparation.
Disclosure of Invention
The invention aims to provide an automatic processing method of an ultra-sliding sheet, which aims to solve the technical problem of lower efficiency of manual production and processing of the ultra-sliding sheet in the prior art.
In order to achieve the above purpose, the invention adopts the following technical scheme: the automatic processing method of the super-slip sheet comprises the following steps:
pre-pushing, namely sending a pre-pushing instruction, pushing the super-sliding island to enable the super-sliding island to slide and to be partially separated into a first part and a second part, and judging whether the first part or the second part is automatically returned;
if the first part or the second part is automatically returned, a separation instruction is sent to push the first part or the second part so that the first part and the second part are completely separated, and whether the first part and the second part are completely separated is judged;
and if the first part and the second part are completely separated, a transfer instruction is sent out to move the first part or the second part to the target substrate.
Further, in the pre-pushing step, a pushing force applied to the super-slider island is F 1 The method comprises the steps of carrying out a first treatment on the surface of the In the separating step, the thrust applied to the first or second portion is F 2 And F 1 Less than F 2 。
Further, in the pre-pushing step, the super-slide island is pushed toward a specific direction, and the first portion and the second portion are staggered and incompletely separated.
Further, in both the pre-pushing step and the separating step, the positive pressure applied to the super-slide island, the first portion, or the second portion is less than 500 μN.
Further, in the separating step, the first portion or the second portion is pushed from the side and the top of the super slide sheet, respectively.
Further, in the pre-pushing step and the separating step, the method for judging whether the first portion or the second portion is automatically returned and completely separated is as follows:
the imaging element shoots towards the super-slip sheet, and the shooting time is respectively the first time T 1 Second time T 2 And a third time T 3 The first time T 1 Before the super-slide sheet is pushed out, the second time T 2 And the third time T 3 After the super-sliding sheet is pushed out, and the third time T 3 At the second time T 2 After that, the process is performed.
Further, if the first time T 1 And the third time T 3 Is coincident with the first time T 1 And the second time T 2 Is not overlapped, the first portion or the second portion is automatically returned.
Further, if the first time T 1 Said second time T 2 The third time T 3 Is not coincident, the first portion and the second portion are completely separated.
Further, the time for the self-return of the first part or the second part is T e And T is e Is proportional to the push-out length, the dissociation surface energy coefficient and the area of the super-slide sheet, and the T 2 ＜T e ＜ T 3 。
Further, in the step of transferring the super-slip sheet, it is also necessary to obtain the contact degree of the super-slip sheet with the target substrate.
The automatic processing method of the super-slip sheet has the beneficial effects that: compared with the prior art, the automatic processing method of the super-slip sheets can realize automatic processing, super-slip judgment and automatic transfer of the super-slip sheets, pre-pushing is performed before super-slip sheets are separated, super-slip properties of super-slip islands can be automatically verified, the first part and the second part can be pre-separated, super-slip properties of the super-slip sheets can be judged in advance, separation and transfer are performed after super-slip verification, the yield of processed super-slip sheets can be effectively improved, the production and processing efficiency is improved, and more time waste is avoided.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic perspective view of an automatic processing device for ultra-sliding sheets according to an embodiment of the present invention;
fig. 2 is a flowchart of an automatic processing method of a super-slip sheet according to an embodiment of the present invention.
Reference numerals illustrate:
1. a carrier; 2. a first monitoring component; 3. a transfer assembly; 4. a second monitoring component; 5. super-slip sheets; 6. a target substrate; 21. a longitudinal microscope; 22. an image pickup device.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
The phenomenon of friction coefficient of the order of thousandths or less has been known in literature for more than ten years as "ultra-slip" due to long-term failure to achieve large-scale ultra-slip; the first phenomenon that the frictional wear caused by the non-metric contact is almost zero is changed into 'structural lubrication', and the 'super-slip' refers to the phenomenon that the frictional wear caused by the non-metric contact is almost zero.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
Referring to fig. 1 and 2 together, an automatic processing method of a super-slip sheet provided by the present invention will now be described. The automatic processing method of the super-slip sheets is generally applied to the automatic processing equipment of the super-slip sheets, the equipment comprises a carrier 1, a first monitoring component 2 for monitoring the positions of the super-slip sheets 5 and the target substrate 6, and a transferring component 3 for transferring the super-slip sheets 5, wherein a first area for processing the super-slip sheets 5 and a second area for placing the target substrate 6 are arranged on the carrier 1; the first monitoring component 2 is arranged above the carrying platform 1, and the view field of the first monitoring component 2 faces to the carrying platform 1; when the transfer assembly 3 works, at least one part of the transfer assembly 3 is positioned between the first monitoring assembly 2 and the carrying platform 1, and the transfer assembly 3 is positioned in the visual field of the first monitoring assembly 2.
The transfer assembly 3 generally refers to a transfer head such as a microneedle, a probe or an elastic seal, etc. transferring the super-slip sheet 5, and the transfer assembly 3 will not block the target substrate 6 when transferring the super-slip sheet 5, so as to avoid observing brightness changes on the target substrate 6 and the super-slip sheet 5. The driving component is used for driving the transfer assembly 3 to move, and the driving component can directly select a triaxial moving platform or a nano manipulator which are conventionally adopted in the prior art, and the driving component is not limited only.
The first monitoring assembly 2 can observe the stage 1, the transfer assembly 3, the target substrate 6 and the super slide 5 in the longitudinal direction, and the first monitoring assembly 2 generally includes a longitudinal microscope 21 and an image pickup element 22, and the image pickup element 22 is disposed inside the longitudinal microscope 21 or above an eyepiece of the longitudinal microscope 21. Since the size of the super-slide sheet 5 and the target substrate 6 is relatively small, generally in the micro-scale or nano-scale, the image pickup device 22 needs to be matched with the longitudinal microscope 21 to ensure the definition of the image pickup when the image is picked up, and of course, in other embodiments, the image pickup device 22 may be an ultra-high definition camera capable of enlarging the size.
The whole device may further include a controller, or the first monitoring component 2 includes a processing unit, where the processing unit or the controller can process information obtained by the image capturing element 22 and send a corresponding instruction, and the automatic processing method of the super-slip sheet is integrated in the controller, where the processing unit or the controller generally uses a processor to process and compare, and the processing unit or the controller can obtain a picture captured by the photographing unit and compare the position of the super-slip sheet 5 captured by the image capturing element 22, so as to identify and judge the state of the super-slip sheet 5, and judge the state of the super-slip sheet 5 and whether the super-slip is satisfied.
In order to further enhance the monitoring and control effect, the second monitoring component 4 may be further disposed on the side of the carrier 1, where the second monitoring component 4 monitors the super-slip sheet 5 and the target substrate 6 from the side of the carrier 1, and may monitor the lateral translation of the super-slip sheet 5, and may monitor the contact degree between the super-slip sheet 5 and the target substrate 6 during the process of transferring the super-slip sheet 5 to the target substrate 6.
Preferably, the second monitoring assembly 4 has the same composition as the first monitoring assembly 2, the second monitoring assembly 4 includes a transverse microscope and a camera element 22, and the first monitoring assembly 2 and the second monitoring assembly 4 may be connected together to a controller, and the information collected by the first monitoring assembly 2 and the second monitoring assembly 4 may be uniformly processed by the controller, or a separate processing unit may be disposed inside the second monitoring assembly 4, which is not limited herein.
Preferably, a master controller is further disposed outside the first monitoring assembly 2 and the second monitoring assembly 4, and the master controller can collect information obtained by each sensor and the image pickup element 22, and send corresponding control instructions after unified processing, so that the execution units such as the transfer assembly 3 can realize corresponding operations.
The automatic processing method for the super-slip sheet comprises the following steps:
s1, correcting equipment, correcting the equipment by adopting a manual adjustment or automatic equipment adjustment mode, so that the carrier 1 can be positioned in the visual field range of the image pickup element 22 of the first monitoring component 2 and the second monitoring component 4, the transferring component 3 can move on the carrier 1, and the carrier can be positioned in the visual field range of the first monitoring component 2 and the second monitoring component 4 all the time or most of the time.
S2, the super-sliding island is arranged in a first area for processing the super-sliding sheet 5, and the first monitoring assembly 2 and the second monitoring assembly 4 are combined to initially position the super-sliding island, so that the subsequent controller can conveniently send out instructions or the position of the transferring assembly 3 can be conveniently determined when moving.
The super-slip island is generally a layered structure such as a graphite sheet, a hope graphite block, etc., and the layers are in super-slip contact, and can be pushed out and molded into a super-slip sheet 5 under the action of external force.
S3, the controller sends out a pre-pushing instruction, and the transfer assembly 3 pushes the super-sliding island from the top of the super-sliding island, so that the super-sliding island is partially separated in the height direction, and is formed into a first part and a second part, the first part and the second part are not completely separated, namely the first part and the second part are staggered from each other and are not separated, and at the moment, the super-sliding performance of the super-sliding island can be judged through whether the first part and the second part have an automatic return phenomenon or not.
The judging method for the self-return phenomenon between the first part and the second part comprises the following steps: the image pickup device 22 shoots towards the super-slide sheet 5, compares the shot pictures, judges whether the pictures return automatically according to the overlapping degree of the pictures, and shoots at the first time T respectively 1 Second time T 2 And a third time T 3 The first time T 1 The second time T is before the super-slide sheet 5 is pushed out 2 And the third time T 3 After the super-sliding sheet 5 is pushed out, and the third time T 3 At the second time T 2 After that, the process is performed. If the first time T before pushing out the super-sliding sheet 5 1 And a third time T after pushing out 3 Is overlapped with the figure of the super-slide sheet 5 and the first time T before pushing out 1 And a second time T after pushing out 2 If the patterns of the first part or the second part are not overlapped, the first part or the second part can be judged to realize automatic return. By adopting the photographing mode of the photographing element 22 to realize the judgment of the ultra-slip, the intelligent ultra-slip judgment can be realized, the ultra-slip island with poor ultra-slip performance is eliminated, and the yield of subsequent separation and transfer is improved.
If the first part or the second part can not realize automatic return, the super-slide island can not be processed and formed into the super-slide sheet 5 at the moment, the super-slide island can be processed abnormally at the moment, and the controller can control the transfer assembly 3 to move the super-slide island to a super-slide island storage area without super-slide. With the improvement of the pixels of the image pickup element 22, the image pickup element 22 is adopted to carry out shooting and data processing to carry out automatic return judgment, so that the accuracy is higher, the automatic return judgment can be achieved only by comparing and judging the patterns of a plurality of time points, the data processing is simpler and more visual, and the accuracy is higher.
If the first part and the second part can realize automatic return, the super-sliding island can be processed and molded into a super-sliding sheet 5, and the subsequent steps can be continued.
S4, the controller sends a separation command, and the transfer assembly 3 pushes the super-slide island again, so that the super-slide island is completely separated in the height direction, and the super-slide island is formed into a separated first part and a separated second part. Wherein, in the pre-pushing step, the pushing force applied by the transfer assembly 3 to the super-slide island is F 1 The method comprises the steps of carrying out a first treatment on the surface of the In this step, the thrust applied to the first portion is F 2 And F 1 Less than F 2 The larger thrust can ensure the complete separation of the first part and the second part, and is convenient for grabbing and transferring, but the thrust F 1 And F 2 The force of (2) cannot be greater than 500 mu N, and damage to the super-sliding island can be avoided. In order to improve the yield of the machine during automatic pushing, avoid damage to the super-slide island by the needle point of the transfer assembly 3 in the super-slide island transfer process and the locking failure phenomenon caused by the rotation of the super-slide island in the transfer process, when the first part and the second part are separated, the super-slide island can be pushed from different directions to separate the first part from the second part, and the specific method for separating the first part and the second part is as follows:
firstly pushing out from the side of the super-slide island by the transfer component 3, so that the first part and the second part are laterally separated, thereby realizing the separation of the first part and the second part, and stopping pushing when pushing out 1/3 to 2/3 of the parts, wherein the first part or the second part cannot rotate; and then controlling the transfer assembly 3 to move from the top end of the super-smooth island, so that the super-smooth island continuously moves, complete dissociation of the first part and the second part is realized, the super-smooth island is pushed to move in a mode of combining two directions, the yield can be effectively improved, and the condition of rotation failure is avoided.
The judging method for whether the first part and the second part are completely separated or not is as follows: the image pickup device 22 picks up the image toward the super slide 5, compares the picked-up images, and passes through the image on the imagesWhether the coincidence degree of the two images is completely separated or not is judged, and the shooting time is respectively the first time T 1 Second time T 2 And a third time T 3 The first time T 1 The second time T is before the super-slide sheet 5 is pushed out 2 And the third time T 3 After the super-sliding sheet 5 is pushed out, and the third time T 3 At the second time T 2 After that, the process is performed. If the first time T before pushing out the super-slide sheet 5 1 Second time T after pushing out 2 Third time T after pushing out 3 If none of the patterns of (c) is coincident, it can be determined that the first portion and the second portion are completely separated.
Wherein for the first time T 1 Second time T 2 And a third time T 3 Time of (1), a first time T 1 Any time before the super-slip sheet 5 is pushed out can be used, and the time is most preferably 1 to 5ms before the super-slip sheet 5 is pushed out or when the super-slip sheet 5 is pushed out; second time and third time T 3 Time of time selection and automatic return of (2) is T e Correlation, wherein T e I.e. the time of self-return of the first part or said second part. T (T) e The length of time is generally proportional to the push-out length, the dissociation surface energy coefficient and the area of the super-slide sheet, and is generally 1-10 ms, and the second time T 2 Less than the self-return time T e And a third time T 3 Is longer than the automatic return time T e T e 。
For T e The maximum value is generally obtained by means of an estimated value, the force of return of the first and second portions f=l x a, where L is the side length of the island and a is the dissociation surface energy coefficient, and the value is generally 0.5-1 μn/μm, and then the time T of automatic return of the first or second portion can be estimated from the distance of the first or second portion e 。
During mechanical automatic processing, the super-slip sheets 5 are generally processed into a large number of super-slip sheets with the same specification and size at the same time, and the automatic return time T is calculated in advance according to actual needs e Not only can ensureAnd (5) monitoring accuracy.
If the first part or the second part cannot be completely separated, exception handling can be performed at this time, and the controller can control the transfer assembly 3 to re-dissociate the super-slide island, so that the first part and the second part are completely separated, or the super-slide island which cannot be dissociated is directly moved to a super-slide island storage area for placing the super-slide island without super-slide.
If the first portion and the second portion are completely separated, the first portion or the second portion is the super slide sheet 5, and the subsequent transfer step may be continued to transfer the first portion or the second portion onto the substrate.
S5, the controller sends out a transfer instruction, the transfer assembly 3 can move the first part or the second part to the target substrate 6, at the moment, the contact degree of the super-slip sheet 5 and the target substrate 6 is required to be obtained, namely, the contact degree of the super-slip sheet 5 and the target substrate 6 is judged by judging whether the super-slip sheet 5 is completely contacted with the target substrate 6, and judging whether the transfer assembly 3 needs to continuously control the super-slip sheet 5 to move downwards. By judging the contact degree, damage to the super slide sheet 5 or the target substrate 6 in the transfer process can be avoided.
In the transferring process of the super-slip sheet 5, the contact degree between the super-slip sheet 5 and the target substrate 6 is judged, the super-slip sheet 5 and the target substrate 6 can be shot through a camera of the second monitoring assembly 4, the image is shot from the side face towards the super-slip sheet 5 by adopting the image pickup element 22, the preset time is generally between 0.1 and 2ms, at least two adjacent shot images are compared, if the two adjacent images are not completely overlapped, the super-slip sheet 5 still can continue to move downwards, the super-slip sheet 5 is not completely contacted with the target substrate 6, if the two at least two images are overlapped, the super-slip sheet 5 cannot continue to move downwards, the super-slip sheet 5 is attached to the target substrate 6, and the super-slip sheet 5 is completely contacted with the target substrate 6.
The position of the transfer assembly 3 is judged by adopting a mode of combining a plurality of image pickup elements 22, and the controller is used for overall control, so that the automatic processing and transfer of the ultra-smooth sliding block are realized, the labor cost can be greatly saved, and the production and processing efficiency is improved.
Wherein, between carrying out the separation step, push away in advance to super smooth island for super smooth island can separate into first part and second part, can realize intelligent super smooth judgement this moment, get rid of super smooth island that super smooth performance is relatively poor, improve the yields of follow-up separation and transfer. After the super-sliding island is pre-pushed, the connecting force between the super-sliding island layers is weakened, so that chemical bonds between contact surfaces of the first part and the second part are broken, and the first part and the second part can be completely separated without applying larger pushing force when a separation step is carried out later.
At present, the dissociation of the super-sliding island is generally performed manually, an operator can adjust the magnitude of the thrust applied to the first part and the second part according to needs, the flexibility of manual operation is stronger, and therefore the damage to the super-sliding island caused by overlarge thrust can be avoided manually without pre-separation, but the dissociation of the super-sliding piece is automatically realized by a machine, the reaction sensitivity and the flexibility are lower, the magnitude, the position, the direction and the like of the applied thrust cannot be adjusted according to actual conditions, and the difficulty of the force and the pushing required to be applied during complete separation can be effectively reduced by performing pre-dissociation operation in advance, so that the super-sliding island is more suitable for automatic production and processing.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the invention.
Claims (6)
1. An automatic processing method of a super-slip sheet is characterized by comprising the following steps:
pre-pushing, namely sending a pre-pushing instruction, pushing the super-sliding island to enable the super-sliding island to slide and to be partially separated into a first part and a second part, wherein the first part and the second part are staggered and incompletely separated, and judging whether the first part or the second part returns automatically;
if the first part or the second part is automatically returned, a separation instruction is sent to push the first part or the second part so that the first part and the second part are completely separated, and whether the first part and the second part are completely separated is judged;
transferring, if the first part and the second part are completely separated, sending a transferring instruction, and moving the first part or the second part to a target substrate;
the method for judging whether the first part or the second part is automatically returned and completely separated is as follows: the imaging element shoots towards the super-slip sheet, and the shooting time is respectively the first time T 1 Second time T 2 And a third time T 3 The first time T 1 Before the super-slide sheet is pushed out, the second time T 2 And the third time T 3 After the super-sliding sheet is pushed out, and the third time T 3 At the second time T 2 Afterwards;
if the first time T 1 And the third time T 3 Is coincident with the first time T 1 And the second time T 2 If the patterns of the first part or the second part are not overlapped, the first part or the second part is automatically returned;
if the first time T 1 Said second time T 2 The third time T 3 Is not coincident, the first portion and the second portion are completely separated.
2. The method for automatically processing the super-sliding sheet according to claim 1, wherein: in the pre-pushing step, the pushing force applied to the super-slider island is F 1 The method comprises the steps of carrying out a first treatment on the surface of the In the separating step, the thrust applied to the first or second portion is F 2 And F 1 Less than F 2 。
3. The method for automatically processing the super-sliding sheet according to claim 1, wherein: in both the pre-pushing step and the separating step, the positive pressure applied to the super-slide island, the first portion, or the second portion is less than 500 μN.
4. The method for automatically processing the super-sliding sheet according to claim 1, wherein: in the separating step, the first portion or the second portion is pushed from the side and the top of the super slide sheet, respectively.
5. The method for automatically processing the super-sliding sheet according to claim 1, wherein: the time for self-returning of the first part or the second part is T e And T is e Is proportional to the push-out length, the dissociation surface energy coefficient and the area of the super-slide sheet, and the T 2 ＜T e ＜T 3 。
6. The automatic processing method of the super-slip sheet according to any one of claims 1 to 4, wherein: in the step of transferring the super-slip sheet, it is also necessary to obtain the contact degree of the super-slip sheet with the target substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011582412.2A CN112875638B (en) | 2020-12-28 | 2020-12-28 | Automatic processing method of super-slip sheet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011582412.2A CN112875638B (en) | 2020-12-28 | 2020-12-28 | Automatic processing method of super-slip sheet |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112875638A CN112875638A (en) | 2021-06-01 |
| CN112875638B true CN112875638B (en) | 2023-05-16 |
Family
ID=76043983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011582412.2A Active CN112875638B (en) | 2020-12-28 | 2020-12-28 | Automatic processing method of super-slip sheet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112875638B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113788453B (en) * | 2021-09-14 | 2023-06-30 | 深圳清华大学研究院 | Super-slide island pushing device and super-slide island processing method |
| CN113683053A (en) * | 2021-09-14 | 2021-11-23 | 深圳清华大学研究院 | Micro block array moving assembly and manufacturing method thereof |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE829102C (en) * | 1947-03-25 | 1952-01-21 | United Shoe Machinery Corp | Method and machine for preparing shoe shafts for point tweaking |
| GB2116123A (en) * | 1981-11-24 | 1983-09-21 | William George Watson | Slipway for loads |
| WO2012146333A2 (en) * | 2011-02-25 | 2012-11-01 | Nvb Composites International Uk Ltd | Piston - chamber combination - vanderblom motor |
| EP3343206A1 (en) * | 2016-12-27 | 2018-07-04 | Koninklijke Philips N.V. | System and method for detection of a gaseous aldehyde |
| CN110230641A (en) * | 2019-06-03 | 2019-09-13 | 深圳清华大学研究院 | A kind of device of superslide sliding block long range zero abrasion sliding |
| CN111717881A (en) * | 2020-05-29 | 2020-09-29 | 深圳清华大学研究院 | Preparation method of ultra-smooth sliding block |
| CN111817601A (en) * | 2020-06-28 | 2020-10-23 | 深圳清华大学研究院 | Low-friction shaftless electrostatic induction motor |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8163066B2 (en) * | 2007-05-21 | 2012-04-24 | Peter Eisenberger | Carbon dioxide capture/regeneration structures and techniques |
| US20150368436A1 (en) * | 2014-06-18 | 2015-12-24 | Gordon Chiu | High Carbon Grade Graphite Block And A Method To Make It |
| WO2016118898A1 (en) * | 2015-01-23 | 2016-07-28 | University Of Southern California | Redox sorting of carbon nanotubes |
| GB201517737D0 (en) * | 2015-10-07 | 2015-11-18 | Cambridge Entpr Ltd | Layered materials and methods for their processing |
| US10039959B2 (en) * | 2016-09-28 | 2018-08-07 | Callaway Golf Company | Graphene core for a golf ball |
| US11232241B2 (en) * | 2018-07-16 | 2022-01-25 | Uchicago Argonne, Llc | Systems and methods for designing new materials for superlubricity |
-
2020
- 2020-12-28 CN CN202011582412.2A patent/CN112875638B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE829102C (en) * | 1947-03-25 | 1952-01-21 | United Shoe Machinery Corp | Method and machine for preparing shoe shafts for point tweaking |
| GB2116123A (en) * | 1981-11-24 | 1983-09-21 | William George Watson | Slipway for loads |
| WO2012146333A2 (en) * | 2011-02-25 | 2012-11-01 | Nvb Composites International Uk Ltd | Piston - chamber combination - vanderblom motor |
| EP3343206A1 (en) * | 2016-12-27 | 2018-07-04 | Koninklijke Philips N.V. | System and method for detection of a gaseous aldehyde |
| CN110230641A (en) * | 2019-06-03 | 2019-09-13 | 深圳清华大学研究院 | A kind of device of superslide sliding block long range zero abrasion sliding |
| CN111717881A (en) * | 2020-05-29 | 2020-09-29 | 深圳清华大学研究院 | Preparation method of ultra-smooth sliding block |
| CN111817601A (en) * | 2020-06-28 | 2020-10-23 | 深圳清华大学研究院 | Low-friction shaftless electrostatic induction motor |
Non-Patent Citations (2)
| Title |
|---|
| Rotational instability in superlubric joints;Qu CY等;《Physcial Review Letters》;第122卷(第24期);全文 * |
| 石墨烯超滑研究取得重要进展;清华大学机械系摩擦学国家重点实验室;《表面工程与再制造》;第17卷(第02期);第63-64页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112875638A (en) | 2021-06-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112875638B (en) | Automatic processing method of super-slip sheet | |
| DE102012216980B4 (en) | Vehicle charging station operated by a robot | |
| Ye et al. | Automated pick-place of silicon nanowires | |
| JP6823008B2 (en) | Robot system for taking out workpieces stacked separately and control method for robot system | |
| DE102011017218B4 (en) | Apparatus and method for transferring electronic components from a first carrier to a second carrier | |
| JP6718352B2 (en) | Board transfer hand diagnostic system | |
| CN104718053B (en) | For carrying the system of workpiece in stamping line | |
| US11338452B2 (en) | Robot hand including a plurality of grippers and a method of handling a wire harness using a robot hand | |
| US20170287759A1 (en) | Hand unit and transfer method | |
| KR20090091268A (en) | Needle trace transfer member and probe apparatus | |
| KR101810112B1 (en) | Robot and robot control method | |
| US9001422B2 (en) | Slide handling system and techniques | |
| DE102008042260B4 (en) | Method for the flexible handling of objects with a handling device and an arrangement for a handling device | |
| AT517795B1 (en) | Method and device for aligning and centering wafers | |
| TW201912422A (en) | Screen printing device and screen printing method | |
| CN104284574B (en) | Component mounting system | |
| TWI652216B (en) | Wireless movement module, and device handler having the same | |
| JP2009190111A (en) | Gripping device and method | |
| Chu et al. | Dual-arm micromanipulation and handling of objects through visual images | |
| CN213814415U (en) | Equipment for machining and transferring super-slip sheet | |
| KR102148565B1 (en) | Unlock mechanism for substrate storage container | |
| Ren et al. | 3-D automatic microassembly by vision-based control | |
| Fatikow et al. | Microrobot system for automatic nanohandling inside a scanning electron microscope | |
| CN110562741A (en) | Machine vision fused separating type station robot and production platform | |
| EP2346073A1 (en) | Prealigner |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |