CN112864786B - Device for triggering excimer laser - Google Patents
Device for triggering excimer laser Download PDFInfo
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- CN112864786B CN112864786B CN202011611089.7A CN202011611089A CN112864786B CN 112864786 B CN112864786 B CN 112864786B CN 202011611089 A CN202011611089 A CN 202011611089A CN 112864786 B CN112864786 B CN 112864786B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
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- H01S3/0903—Free-electron laser
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
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- H01S3/03—Constructional details of gas laser discharge tubes
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Abstract
The invention relates to the field of excimer lasers, in particular to a device for triggering an excimer laser. The device comprises the following components: the signal acquisition module is used for acquiring a trigger signal of a beam laser which transmits seed light to the gas laser; the electric signal processing module is used for receiving and processing the trigger signal of the beam laser acquired by the signal acquisition module and inputting the processed trigger signal to the enabling end of the gas laser so as to synchronize the time of the seed light reaching the gas laser with the discharge time of the gas laser; the discharge time of the gas laser is controlled by the enable end of the gas laser. Therefore, the invention can ensure that the time of the seed light reaching the excimer laser and the discharge of the excimer laser are synchronous, so that the excimer laser can be used as a laser amplifier.
Description
Technical Field
The invention relates to the field of excimer lasers, in particular to a device for triggering an excimer laser.
Background
The excimer laser is the laser device with the maximum output power of the ultraviolet wave band at present, and is widely applied to the fields of industry, medical treatment, scientific research and the like. After decades of research and development, excimer laser technology has been rapidly developed, and particularly rare gas halide excimer lasers have been rapidly developed and widely applied due to the characteristics of high peak power of output laser, large pulse energy and wavelength in an ultraviolet region, and are mainly used excimer lasers at present. Excimer laser amplifiers used in excimer lasers are required to meet the requirements of some special applications, such as semiconductor lithography, high power processing, ultrafast laser output, etc. An excimer is an unstable association which recombines into a molecule in the excited state and dissociates into atoms in the ground state. Excimer laser transitions occur from a bound excited state to a repulsive ground state, which is a bound-free transition with typical lifetimes of only tens of nanoseconds. The discharge of the excimer laser as an amplifier needs to be accurately synchronized with the arrival time of the seed light, and the synchronization precision of the excimer laser and the seed light is generally required to be better than plus or minus 5 nanoseconds in order to ensure the parameters and the stability of laser amplification. The seed light is light emitted by the femtosecond laser, and when the seed light reaches the excimer laser, the excimer laser needs to discharge synchronously, so that the seed light emitted by the femtosecond laser is amplified. The seed light is only a light beam emitted by a femtosecond laser, and the light pulse is very short and only fs level, so the seed light is called the femtosecond laser. But the light energy emitted is low, so that it needs to be amplified by an excimer laser to perform other functions.
The existing excimer laser cannot achieve the time synchronization of discharging and seed light reaching the excimer laser, so that the existing excimer laser cannot be used as a laser amplifier.
Disclosure of Invention
In order to solve the above technical problems, the present invention provides an apparatus for triggering an excimer laser, which can synchronize the discharge time of the excimer laser and the time when seed light reaches the excimer laser, so as to ensure that the excimer laser can be used as a laser amplifier.
In order to achieve the purpose, the invention adopts the following technical scheme:
an apparatus for triggering an excimer laser, the apparatus comprising the following components:
the signal acquisition module is used for acquiring a trigger signal of a beam laser which transmits seed light to the gas laser;
the electric signal processing module is used for receiving and processing the trigger signal of the beam laser acquired by the signal acquisition module and inputting the processed trigger signal to the enabling end of the gas laser so as to synchronize the time of the seed light reaching the gas laser with the discharge time of the gas laser; the discharge time of the gas laser is controlled by the enable end of the gas laser.
Further, the signal acquisition module comprises an optical fiber receiver and a first conversion unit; the trigger signal of the beam laser is input to a photoresistor of the optical fiber receiver in the form of an optical signal; the output end of the optical fiber receiver is electrically connected with the input end of the first conversion unit, the electric potential of the output end of the first conversion unit is different from the electric potential of the output end of the optical fiber receiver, and the output end of the first conversion unit is connected with the input end of the electric signal processing module.
Further, the first conversion unit comprises a first field effect transistor, the output end of the optical fiber receiver is connected with the grid electrode of the first field effect transistor, the drain electrode of the first field effect transistor is connected with the power supply, and the drain electrode of the first field effect transistor is also used as the output end to be connected with the input end of the electric signal processing module.
Further preferably, the model of the optical fiber receiver is R2526; the first conversion unit further comprises a first resistor, a second resistor and a third resistor;
a pin 1 of the optical fiber receiver as an output end is connected with a grid electrode of a first field effect transistor through a first resistor, the pin 1 of the optical fiber receiver is also connected with a pin 4, and a first capacitor is connected between the pin 1 and the pin 2 of the optical fiber receiver;
the drain electrode of the first field effect transistor is connected with a power supply through a second resistor, and is also used as an output end and connected with the input end of the electric signal processing module through a third resistor; and the source electrode of the first field effect transistor is grounded.
Further preferably, the electric signal processing module comprises a 555 timer and a third field effect transistor;
the output end of the signal acquisition module is connected with the input end of a 555 timer, the output end of the 555 timer is connected with the grid electrode of a third field effect tube, the drain electrode of the third field effect tube is used as the output end and is connected with the enabling end of the gas laser, and the drain electrode of the third field effect tube is also connected with a power supply through an eighth resistor; and the source electrode of the third field effect transistor is grounded.
Preferably, the type of the 555 timer is NE555, a pin 3 of the 555 timer is used as an output end and is connected with a gate of a third field effect transistor through a seventh resistor, a pin 4 and a pin 8 of the 555 timer are both connected with a power supply, a pin 1 of the 555 timer is grounded, a pin 5 of the 55 timer is grounded through a second capacitor, an output end of the signal acquisition module is connected with a pin 6 of the 555 timer, and an output end of the signal acquisition module is further connected with a pin 2 of the 555 timer.
Further, the device also comprises the following components:
a signal generator for outputting a signal coincident with a trigger signal of the beam laser;
the second conversion unit is used for outputting a potential different from the potential of the output end of the signal generator;
the optical fiber transmitter is used for converting the electric potential output by the second conversion unit into an optical signal, and the optical signal is used for triggering the beam laser to generate seed light;
the first output end of the signal generator is connected with the input end of the electric signal processing module, and the second output end of the signal generator is connected with the input end of the second conversion unit; and the output end of the second conversion unit is connected with the input end of the optical fiber transmitter.
Preferably, the model of the optical fiber transmitter is T1521, the second conversion unit includes a second field effect transistor, a drain of the second field effect transistor is connected to a pin 2 of the optical fiber transmitter, a first output end of the signal generator is connected to a gate of the second field effect transistor as an input end, and a source of the second field effect transistor is grounded;
and the pin 1 of the optical fiber transmitter is connected with a power supply.
Further preferably, the second conversion unit further comprises a fifth resistor and a sixth resistor connected in series; and the first output end of the signal generator is connected with the grid electrode of which the second field effect tube is used as the input end through a sixth resistor and a fifth resistor in sequence.
Still further preferably, the beam laser is a femtosecond laser.
The invention has the following beneficial effects:
(1) whether the beam laser sends seed light to the excimer laser is controlled by its trigger signal. The invention obtains the trigger signal of the light beam laser through the signal acquisition module, processes the obtained trigger signal through the electric signal processing module, and uses the processed trigger signal as the trigger signal of the excimer laser for discharging. Therefore, the invention can ensure that the time of the seed light reaching the excimer laser and the discharge of the excimer laser are synchronous, so that the excimer laser can be used as a laser amplifier.
(2) The electric potential of the output end of the optical fiber receiver is different from the electric potential of the input end of the optical fiber receiver, and the electric potential of the output end of the 555 timer is also different from the electric potential of the input end of the 555 timer, so that the electric potential output by the optical fiber receiver and the electric potential output by the 555 timer are subjected to electric potential conversion (high electric potential becomes low electric potential and low electric potential becomes high electric potential) by adopting the two field effect tubes. Therefore, the device of the invention is convenient for intuitively controlling the seed light of the beam laser to reach the excimer laser and the discharge synchronization of the excimer laser.
(3) The intensity of the trigger signal of the beam laser is very low, and the field effect transistor is adopted to amplify the acquired trigger signal so that the amplified signal reaches the intensity of triggering the excimer laser.
(4) The invention adopts two modes to control time synchronization, one mode is as follows: and collecting a trigger signal of the beam laser to control the time of the seed light reaching the excimer laser to be synchronous with the discharge time of the excimer laser. In another mode: the invention also provides a signal generator which can send signals required for triggering the excimer laser to the excimer laser and can also send signals required for triggering the beam laser to the beam laser. Therefore, the present invention can further control the synchronization between the time of the seed light reaching the excimer laser and the discharge time of the excimer laser.
From the above analysis, the present invention adopts two ways to control the above time synchronization, so that the device is no longer limited to the signal category and can work in more situations.
(5) The electric signal processing module uses the 555 timer to form the Schmitt trigger, so that the rising edge of the pulse can become steep, and simultaneously, the level trigger can effectively remove noise interference and reduce the jitter of the signal.
(6) The 555 timer and the field effect transistor are matched for use, so that the jitter of signals in the device on a time sequence can be reduced, and the synchronism of the time of seed light reaching the excimer laser and the discharge time of the excimer laser is further improved.
Drawings
FIG. 1 is an overall system diagram of the present invention;
FIG. 2 is a circuit diagram of a first conversion unit and a fiber optic receiver according to the present invention;
FIG. 3 is a circuit diagram of a second conversion unit and a fiber optic transmitter according to the present invention;
FIG. 4 is a circuit diagram of an electrical signal processing module of the present invention;
FIG. 5 is a system diagram of the power module, the isolation module, and the trigger pulse circuit of the present invention;
FIG. 6 is a circuit diagram of a power module of the present invention;
FIG. 7 is a circuit diagram of an isolation module of the present invention;
FIG. 8 is a circuit diagram of a trigger pulse circuit of the present invention;
FIG. 9 is a simulation of the present invention.
The notations in the figures have the following meanings:
1-first conversion unit 2-electric signal processing module 3-isolation module 4-gas laser
41-trigger pulse circuit 411-first power supply unit 412-second power supply unit
413-protective circuit 5-signal generator 6-second switching unit 7-first electrical signal connector
8-second electrical signal connector 9-beam laser 10-power supply module
F1-optical fiber receiver F2-optical fiber transmitter F3-555 timer
R1-R23-first to twenty-third resistors Q1-Q4-first to fourth field effect transistors
Q5-optocoupler Q6-transistor Q7-first rectifier bridge Q8-second rectifier bridge Q9-third rectifier bridge
TR 1-first transformer TR 2-second transformer
C1-C13-first to thirteenth capacitors D1-D7-first to seventh diodes
Detailed Description
The technical scheme of the invention is clearly and completely described below by combining the embodiment and the attached drawings of the specification. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
An apparatus for triggering an excimer laser, the apparatus comprising the following components:
the signal acquisition module is used for acquiring a trigger signal of a beam laser 9 which transmits seed light to the gas laser 4;
the electric signal processing module 2 is used for receiving and processing the trigger signal of the beam laser 9 acquired by the signal acquisition module, and inputting the processed trigger signal to the enabling end of the gas laser 4 so as to synchronize the time of the seed light reaching the gas laser 4 with the discharge time of the gas laser 4; the discharge time of the gas laser 4 is controlled by the enable terminal of the gas laser 4.
The signal acquisition module comprises an optical fiber receiver F1 and a first conversion unit 1; the trigger signal of the beam laser 9 is input to the photoresistor of the fiber optic receiver F1 in the form of an optical signal; the output end of the optical fiber receiver F1 is electrically connected with the input end of the first conversion unit 1, the electric potential of the output end of the first conversion unit 1 is different from the electric potential of the output end of the optical fiber receiver F1, and the output end of the first conversion unit 1 is connected with the input end of the electric signal processing module 2.
The first conversion unit 1 comprises a first field effect transistor Q1, the output end of the optical fiber receiver F1 is connected with the grid electrode of the first field effect transistor Q1, the drain electrode of the first field effect transistor Q1 is connected with a power supply, and the drain electrode of the first field effect transistor Q1 is also connected with the input end of the electric signal processing module 2 as the output end.
The model of the fiber receiver F1 is R2526; the first conversion unit 1 further comprises a first resistor R1, a second resistor R2 and a third resistor R3;
a pin 1 of the optical fiber receiver F1 serving as an output end is connected with a grid electrode of a first field effect transistor Q1 through a first resistor R1, a pin 1 of the optical fiber receiver F1 is also connected with a pin 4, and a first capacitor C1 is connected between the pin 1 and a pin 2 of the optical fiber receiver F1;
the drain electrode of the first field effect transistor Q1 is connected with the power supply through a second resistor R2, and the drain electrode of the first field effect transistor Q1 is also used as an output end and is connected with the input end of the electric signal processing module 2 through a third resistor R3; the source of the first fet Q1 is grounded.
The electric signal processing module 2 comprises a 555 timer F3 and a third field effect transistor Q3;
the output end of the signal acquisition module is connected with the input end of a 555 timer F3, the output end of the 555 timer F3 is connected with the grid electrode of a third field-effect tube Q3, the drain electrode of the third field-effect tube Q3 is used as the output end and is connected with the enabling end of the gas laser 4, and the drain electrode of the third field-effect tube Q3 is also connected with a power supply through an eighth resistor R8; the source of the third fet Q3 is grounded.
The model of the 555 timer F3 is NE555, pin 3 of the 555 timer F3 is used as an output end and is connected with the grid of a third field effect transistor Q3 through a seventh resistor R7, pin 4 and pin 8 of the 555 timer F3 are both connected with a power supply, pin 1 of the 555 timer F3 is grounded, pin 5 of the 55 timer F2 is grounded through a second capacitor C2, the output end of the signal acquisition module is connected with pin 6 of the 555 timer F3, and the output end of the signal acquisition module is further connected with pin 2 of the 555 timer F3.
The device also comprises the following components:
a signal generator 5 for outputting a signal matching the trigger signal of the beam laser 9;
a second conversion unit 6 for outputting a potential different from the potential of the output terminal of the signal generator 5;
a fiber optic transmitter F2 for converting the potential output by the second conversion unit 6 into an optical signal for triggering the beam laser 9 to generate seed light;
a first output end of the signal generator 5 is connected with an input end of the electric signal processing module 2, and a second output end of the signal generator 5 is connected with an input end of the second conversion unit 6; the output of the second switching unit 6 is connected to the input of a fiber optic transmitter F2.
The model of the optical fiber transmitter F2 is T1521, the second conversion unit 6 includes a second field-effect transistor Q2, the drain of the second field-effect transistor Q2 is connected with the pin 2 of the optical fiber transmitter F2, the first output end of the signal generator 5 is connected with the gate of the second field-effect transistor Q2 as the input end, and the source of the second field-effect transistor Q2 is grounded;
The second conversion unit 6 further comprises a fifth resistor R5 and a sixth resistor R6 connected in series; the first output end of the signal generator 5 is connected with the gate of the second field effect transistor Q2 as the input end through the sixth resistor R6 and the fifth resistor R5 in sequence.
The gas laser 4 is an excimer laser, and the beam laser 9 is a femtosecond laser.
Example 2
In the basic line of example 1, they are described below:
as shown in fig. 1 and 2, the signal acquisition module includes a fiber optic receiver F1 of model R2526 and a first conversion unit 1. The first conversion unit 1 includes a first field effect transistor Q1, a first resistor R1, a second resistor R2, and a third resistor R3. The output end of the optical fiber receiver F1 is connected with the grid of the first field effect transistor Q1, the drain of the first field effect transistor Q1 is connected with 5V direct current voltage through the second resistor R2, and the source of the first field effect transistor Q1 is grounded. The drain of the first field effect transistor Q1 is also used as the output end and is connected with the input end of the electric signal processing module 2 through a third resistor R3, the pin 1 of the optical fiber receiver F1 which is used as the output end is connected with the gate of the first field effect transistor Q1 through a first resistor R1, the pin 1 of the optical fiber receiver F1 is also connected with the pin 4, and a first capacitor C1 is connected between the pin 1 and the pin 2 of the optical fiber receiver F1.
As shown in fig. 4, the electric signal processing module 2 comprises a 555 timer F3 of type NE555 and a third fet Q3. The drain electrode of a first field effect tube Q1 in the signal acquisition module is connected with an input end pin 6 and a pin 2 of a 555 timer F3 through a third resistor R3, a pin 3 of the 555 timer F3 is used as an output end and is connected with the grid electrode of a third field effect tube Q3 through a seventh resistor R7, and a signal output by the drain electrode of the third field effect tube Q3 is used for driving a gas laser 4 (excimer laser) to discharge. The drain of the third field effect transistor Q3 is also connected with 5V dc voltage through an eighth resistor R8, the source of the third field effect transistor Q3 is grounded, pin 4 and pin 8 of the 555 timer F3 are both connected with 5V dc voltage, pin 1 of the 555 timer F3 is grounded, and pin 5 of the 555 timer F3 is grounded through a second capacitor C2.
The present embodiment can also directly input the voltage trigger signal of the beam laser 9 to the pin 6 of the 555 timer F3 through the second electrical signal connector 8.
In this embodiment, the beam laser 9 is a femtosecond laser, the gas laser 4 is an excimer laser, and the beam laser 9 generates seed light to be transmitted to the gas laser 4 by applying a trigger signal of voltage to an enable terminal of the beam laser 9.
The working process of the embodiment is as follows: the trigger signal of the voltage applied to the enable end of the beam laser 9 is converted into an optical signal, the optical signal is transmitted to a photoresistor of an optical fiber receiver F1, the optical fiber receiver F1 outputs a low potential, the low potential is input to a first field effect tube Q1, then a first field effect tube Q1 outputs a high potential, the high potential is input to a 555 timer F3, the 555 timer F3 can control the time of the low potential output by the controller, the low potential is input to a third field effect tube Q3, the third field effect tube Q3 outputs a high potential capable of driving the gas laser 4 to discharge at the moment, and the control of the time that the seed light sent by the beam laser 9 reaches the gas laser 4 and the discharge time of the gas laser 4 are synchronous is completed.
Example 3
On the basis of the embodiments 1 and 2, the first conversion unit 1, the optical fiber receiver F1 and the second electrical signal connector 8 in the embodiment 2 are removed, and the following components are added:
a signal generator 5 for outputting a signal matching the trigger signal of the beam laser 9;
a second conversion unit 6 for outputting a potential different from the potential of the output terminal of the signal generator 5;
and the optical fiber transmitter F2 is used for converting the electric potential output by the second conversion unit 6 into an optical signal, and the optical signal is transmitted to the beam laser 9 for triggering the beam laser 9 to generate the seed light.
A first output end of the signal generator 5 is connected with a pin 6 and a pin 2 which serve as input ends of a 555 timer F3 in the electric signal processing module 2, and a second output end of the signal generator 5 is connected with an input end of the second conversion unit 6; the output end of the second conversion unit 6 is connected to the input end of the optical fiber transmitter F2, the optical fiber transmitter F2 converts the received electrical signal into an optical signal, and the optical signal is transmitted to the beam laser 9 and then converted into an electrical signal as a trigger signal to prompt the beam laser 9 to send seed light to the gas laser 4.
These are described below:
as shown in fig. 3, the second conversion unit 6 includes a fiber optic transmitter F2 model T1521 and a second fet Q2. The second conversion unit 6 comprises a second field effect transistor Q2, a fifth resistor R5 and a sixth resistor R6 which are connected in series, the drain of the second field effect transistor Q2 is connected with a pin 2 of the optical fiber transmitter F2, the first output end of the signal generator 5 is connected with the gate of the second field effect transistor Q2 as the input end, the source of the second field effect transistor Q2 is grounded, and a pin 1 of the optical fiber transmitter F2 is connected with a 5V power supply through the fourth resistor R4. The first output end of the signal generator 5 is connected with the gate of the second field effect transistor Q2 as the input end through the sixth resistor R6 and the fifth resistor R5 in sequence.
Example 4
On the basis of embodiment 1, embodiment 2 and embodiment 3, the device for triggering the excimer laser comprises the following two operation modes:
the first mode is as follows: the trigger signal of the beam laser 9 is collected and transmitted to the photoresistor of the optical fiber receiver F1 in the form of an optical signal, and the photoresistor of the optical fiber receiver F1 receives the optical signal and converts the optical signal into an electrical signal through the first conversion unit 1, or receives the trigger signal of the beam laser 9 in the form of voltage directly through the second electrical signal connector 8, and performs electrical signal processing. Both of the two access modes can transmit the trigger signal of the beam laser 9 to the enable end of the gas laser 4 in the form of an electrical signal, so that the time when the seed light sent by the beam laser 9 reaches the gas laser 4 is synchronized with the discharge time of the gas laser 4.
And a second mode: the electrical signal generated by the signal generator 5 is directly fed via the first electrical signal connection 7 to the enabling terminal of the external beam laser 9 in the form of an electrical signal, or the electrical signal generated by the signal generator 5 is converted via the second conversion unit 6 and the fiber optic transmitter F2 into a triggering signal in the form of an optical signal for triggering the beam laser 9. Meanwhile, the electrical signal generated by the signal generator 5 is processed by the electrical signal processing module 2, and the processed electrical signal is transmitted to the enabling end of the gas laser 4, so that the enabling end of the gas laser 4 outputs a low-jitter trigger signal, the low jitter is low jitter in sequence, the time of the trigger signal is matched with the actual requirement, and the condition of delay or advance cannot occur.
Fig. 9 is a simulation diagram of the present embodiment, where X1 is a trigger signal of the collected beam laser 9, and X2 waveform is a signal output by the electrical signal processing module 2 after processing and used for transmitting to the gas laser 4.
Example 5
A pulse circuit for driving an excimer laser, the pulse circuit comprising a trigger pulse circuit 41, the trigger pulse circuit 41 comprising a first power supply unit 411 for supplying power to a trigger terminal of a gas laser 4; the first power supply unit 411 includes a tenth capacitor C10, a charging power source for charging the tenth capacitor C10, and a driving component for driving the discharging of the tenth capacitor C10 after charging; the tenth capacitor C10 discharges for powering the trigger terminal of the gas laser 4.
The driving component is a transistor Q6, and the first power supply unit 411 further includes a second transformer TR 2; the second transformer TR2 includes a primary coil on the first power supply unit 411 side and a secondary coil on the gas laser 4 side; a gate of the transistor Q6 is connected to a conduction power supply for turning on the transistor Q6; a primary coil of the second transformer TR2, the transistor Q6, and the tenth capacitor C10 form a series circuit, and the charging power supply supplies power to the series circuit; the trigger terminal of the gas laser 4 is supplied with power through the primary coil and the secondary coil of the second transformer TR2 when the tenth capacitor C10 is discharged.
The first power supply unit 411 further includes an eighteenth resistor R18 and a fourth diode D4 connected in series; the charging power supply is connected with one end of an eighteenth resistor R18, the other end of the eighteenth resistor R18 is connected with the anode of a fourth diode D4, the cathode of the fourth diode D4 is connected with the collector of a transistor Q6, the cathode of a fourth diode D4 is further connected with one end of the primary coil of a second transformer TR2, the emitter of the transistor Q6 is connected with one end of a tenth capacitor C10, and the other end of the tenth capacitor C10 is connected with the other end of the primary coil of the second transformer TR 2.
The trigger pulse circuit 41 further includes a protection circuit 413 between the emitter and the collector of the transistor Q6, the protection circuit 413 being configured to prevent the discharge voltage of the gas laser 4 from destroying the transistor Q6.
The trigger pulse circuit 41 further includes a second power supply unit 412 for supplying power to the trigger terminal of the gas laser 4 when the tenth capacitor C10 is charged, the second power supply unit 412 including an auxiliary power supply connected to one terminal of the secondary coil of the second transformer TR 2; one end of the secondary coil of the second transformer TR2 is also connected to the negative electrode of the gas laser 4, and the other end of the secondary coil of the second transformer TR2 is connected to the positive electrode of the gas laser 4.
The pulse circuit further comprises a power supply module 10, wherein the power supply module 10 is a charging power supply and an auxiliary power supply for triggering the pulse circuit 41;
the power supply module 10 includes a first transformer TR1, a first rectifier bridge Q7, and a second rectifier bridge Q8; the first transformer TR1 includes a primary coil, a first secondary coil, and a second secondary coil; two ends of a primary coil of the first transformer TR1 are used for being connected with mains supply;
one end of the first secondary coil is connected with a first voltage input end of a first rectifier bridge Q7, the other end of the first secondary coil is connected with a second voltage input end of a first rectifier bridge Q7, and the anode of the first rectifier bridge Q7 is used as an auxiliary power supply of the trigger pulse circuit 41 to supply power to the trigger pulse circuit 41;
one end of the second secondary coil is connected to a first voltage input end of a second rectifier bridge Q8, the other end of the second secondary coil is connected to a second voltage input end of a second rectifier bridge Q8, and an anode of the second rectifier bridge Q8 is used as a charging power supply of the trigger pulse circuit 41 to supply power to the trigger pulse circuit 41.
The power module 10 further includes a ninth resistor R9 connected to two ends of the primary coil of the first transformer TR1, and the ninth resistor R9 is a voltage dependent resistor.
The pulse circuit also comprises an isolation module 3, wherein the isolation module 3 is used for preventing the gas laser 4 from reversely destroying a circuit where the pulse circuit is located;
the isolation module 3 comprises an optical coupler Q5 and a fourth field effect transistor Q4; the positive pole of opto-coupler Q5 is used for inserting the circuit that this pulse circuit belongs to, the output of opto-coupler Q5 is connected with the grid of fourth field effect transistor Q4, the source of fourth field effect transistor Q4 is connected with the grid of transistor Q6 in the first power supply unit 411, the source of fourth field effect transistor Q4 is used for making transistor Q6 switch on as switching on the power, the power end of opto-coupler Q5, the voltage incoming end of opto-coupler Q5 and the drain electrode of fourth field effect transistor Q4 all connect voltage.
The first transformer TR1 further includes a third secondary coil and a third rectifier bridge Q9, one end of the third secondary coil is connected to a first voltage input end of the third rectifier bridge Q9, the other end of the third secondary coil is connected to a second voltage input end of the third rectifier bridge Q9, and an anode of the third rectifier bridge Q9 is connected to a power supply end of the optocoupler Q5, a voltage input end of the optocoupler Q5, and a drain of the fourth fet Q4.
The gas laser 4 is an excimer laser.
Example 6
On the basis of embodiment 5, a pulse circuit for driving an excimer laser, as shown in fig. 5, includes a trigger pulse circuit 41, a power supply module 10, and an isolation module 3, which are described below:
as shown in fig. 6, the power module 10 includes a first transformer TR1, a first rectifier bridge Q7, and a second rectifier bridge Q8, and the first transformer TR1 includes a primary coil, a first secondary coil, a second secondary coil, and a third secondary coil. The two ends of the primary coil of the first transformer TR1 are connected to the mains (alternating current 22v), the two ends of the primary coil of the first transformer TR1 are further connected to a ninth resistor R9, the ninth resistor R9 is a voltage dependent resistor, and the voltage dependent resistor is used for primary overvoltage protection of the first transformer TR 1. One end of the first secondary coil is connected with a first voltage input end of a first rectifier bridge Q7, the other end of the first secondary coil is connected with a second voltage input end of a first rectifier bridge Q7, the negative electrode of the first rectifier bridge Q7 is grounded, the positive electrode of the first rectifier bridge Q7 is used for outputting 170V voltage, the positive electrode of the first rectifier bridge Q7 is grounded through a third capacitor C3, and the third capacitor C3 is an electrolytic capacitor. One end of the second secondary coil is connected with a first voltage input end of a second rectifier bridge Q8, the other end of the second secondary coil is connected with a second voltage input end of a second rectifier bridge Q8, the negative electrode of the second rectifier bridge Q8 is grounded, the positive electrode of the second rectifier bridge Q8 is used for outputting 350V voltage, the positive electrode of the second rectifier bridge Q8 is grounded through a fourth capacitor C4, and the fourth capacitor C4 is an electrolytic capacitor. One end of the third secondary coil is connected with a first voltage input end of a third rectifier bridge Q9, the other end of the third secondary coil is connected with a second voltage input end of a third rectifier bridge Q9, the negative electrode of the third rectifier bridge Q9 is grounded, the positive electrode of the third rectifier bridge Q9 is used for outputting a voltage of 17V, a fifth capacitor C5 and a sixth capacitor C6 are connected between the positive electrode of the third rectifier bridge Q9 and the ground in parallel, and the fifth capacitor C5 is an electrolytic capacitor.
As shown in fig. 7, the isolation module 3 includes an optocoupler Q5 and a fourth fet Q4. The model of the fourth field effect transistor Q4 is 2N7002, the opto-coupler Q5 is a quick opto-coupler, the model is 6N173, the drain of the third field effect transistor Q3 is connected with pin 2 of the opto-coupler Q5 through tenth resistance R10, pin 8 of the opto-coupler Q5 is grounded through first diode D1, the positive pole of the first diode D1 is grounded, the negative pole of the first diode D1 is connected with pin 8 of the opto-coupler Q5, the positive pole of the second rectifier bridge Q8 is connected with pin 8 of the opto-coupler Q5 through eleventh resistance R11, the negative pole of the first diode D1 is also connected with pin 7 of the opto-coupler Q5 through twelfth resistance R12, pin 5 and pin 3 of the opto-coupler Q5 are both grounded, and pin 1 and pin 4 of the opto-coupler Q5 are suspended. A pin 6 of the optocoupler Q5 is connected with a gate of a fourth field-effect transistor Q4, a gate of the fourth field-effect transistor Q4 is grounded through a thirteenth resistor R13, a drain of the fourth field-effect transistor Q4 is connected with a negative electrode of a first diode D1, a source of the fourth field-effect transistor Q4 is grounded through a fourteenth resistor R14, a source of the fourth field-effect transistor Q4 is sequentially connected with a seventh capacitor C7, a fifteenth resistor R15 and a second diode D2, one end of the fifteenth resistor R15, which is far away from the seventh capacitor C7, is connected with one end of a sixteenth resistor R16, one end of the sixteenth resistor R16 is further connected with one end of an eighth capacitor C8, an anode of the second diode D2 is connected with a fifteenth resistor R15, and a negative electrode of the second diode D2 is connected with a negative electrode of a third diode D3. The other end of the sixteenth resistor R16, the other end of the eighth capacitor C8 and the anode of the third diode D3 are all grounded.
As shown in fig. 8, the trigger pulse circuit 41 includes a first power supply unit 411 and a second power supply unit 412, the first power supply unit 411 further includes a transistor Q6, a second transformer TR2, and a protection circuit 413, and the transistor Q6 is an IGBT transistor. Wherein, the protection circuit 413 comprises a ninth capacitor C9 and a sixth diode D6 connected in parallel, after being connected in parallel with the sixth diode D6, the ninth capacitor C9 and the sixth diode D6 are connected in parallel with one end of a nineteenth resistor R19, the other end of the nineteenth resistor R19 is connected with the emitter of the transistor Q6, the cathode of the second diode D2 is connected with the gate of the transistor Q6, the cathode of the fifth diode D5 is connected with the collector of the transistor Q6, the anode of the fifth diode D5 is connected with the emitter of the transistor Q6, the ninth capacitor C9 and the end of the sixth diode D6 far from the nineteenth resistor R19 are connected with the collector of the transistor Q6, the collector of the transistor Q6 is connected with the anode of the second rectifier bridge Q17 through a seventeenth resistor R17, a fourth diode D17 and an eighteenth resistor R17, the anode of the fourth diode D17 is connected with the anode of the second rectifier bridge Q17, the cathode of the fourth diode D17 is connected with one end of the eighteenth resistor R17 far from the cathode of the second rectifier bridge 17, one end of the seventeenth resistor R17, which is far away from the emitter of the transistor Q6, is connected to the cathode of the seventh diode D7, and the anode of the seventh diode D7 is connected to the emitter of the transistor Q6. The second transformer TR2 includes a primary coil and a secondary coil, the primary coil is connected to the emitter of the transistor Q6 via a tenth capacitor C10, and one end of the primary coil is connected to the cathode of the seventh diode D7. The second power supply unit 412 includes an eleventh capacitor C11, a twelfth capacitor C12, a thirteenth capacitor C13 and a twenty-third resistor R23 which are connected in parallel, one end of the eleventh capacitor C11, one end of the twelfth capacitor C12, one end of the thirteenth capacitor C13 and one end of the twenty-third resistor R23 are all grounded, the other end of the twelfth capacitor C12 and the other end of the eleventh capacitor C11 are both connected with one end of the secondary coil, a twenty-first resistor R21 is connected between the other end of the thirteenth capacitor C13 and the other end of the twelfth capacitor C12, the anode of the first rectifier bridge Q7 is connected with the other end of the thirteenth capacitor C13 through the twenty-second resistor R22, the other end of the thirteenth capacitor C13 is further connected with the twenty-third resistor R23, and one end of the twenty-third resistor R23 far from the twenty-second resistor R22 is grounded. The other end of the secondary winding of the second transformer TR2 is connected to the positive terminal of the thyristor 42 via a twentieth resistor R20, and the negative terminal of the thyristor 42 is connected to one end of an eleventh capacitor C11, one end of a twelfth capacitor C12, and one end of a thirteenth capacitor C13.
In this embodiment, the gas laser 4 is an excimer laser, and the high-voltage pulse generation process in this embodiment is as follows: the voltage of 350V passes through the eighteenth resistor R38 for current limiting and the fourth diode D4 for isolation, and then through the primary winding of the second transformer TR2 to charge the tenth capacitor C10. When the trigger signal of the beam laser 9 collected by the optical fiber receiver F1 is transmitted to the gate of the transistor Q6 through the first conversion unit 1, the electrical signal processing module 2, and the isolation module 3, the transistor Q6 is turned on, and at this time, the tenth capacitor C10 discharges through the primary coil of the second transformer TR2, the seventeenth resistor R17, and the transistor Q6, and generates a high voltage pulse on the secondary coil of the second transformer TR2, so that the voltage on the thyristor 42 instantaneously reaches-1 KV voltage, that is, a fast-leading-edge high voltage pulse, and the gas laser 4 is in a discharge state for generating plasma. When the fiber optic receiver F1 does not collect the trigger signal of the beam laser 9, the voltage of the thyristor 42 is 170V, and the gas laser 4 does not discharge. The gas laser 4 in this embodiment is an excimer laser, which is ArF 193.
Example 7
On the basis of embodiments 1 and 5, a device for triggering an excimer laser and a pulse circuit for driving the excimer laser can be used in combination to form a circuit for triggering the excimer laser to generate plasma.
The model of the optical fiber receiver F1 is R2526, the English name of the manufacturer is AVAGO, and the Chinese name is height in China; the model of the optical fiber transmitter F2 is T1527, the English name of the manufacturer is AVAGO, and the Chinese name is height in peace; the model of the 555 timer F3 is NE555, the English name of the manufacturer is TI, and the Chinese name is Texas instrument; the models of the first field-effect tube Q1, the second field-effect tube Q2, the third field-effect tube Q3 and the fourth field-effect tube Q4 are all 2N7002, the English names of manufacturers are all ON, and the Chinese names are all ON; the model of the optical coupler Q5 is 6N173, the English name of a manufacturer is AVAGO, and the Chinese name is Anhuagao; transistor Q6 is model IRG4PH40U, known by the english name International Rectifier.
Claims (8)
1. An apparatus for triggering an excimer laser, comprising the following components:
the signal acquisition module is used for acquiring a trigger signal of a beam laser (9) for transmitting seed light to the gas laser (4);
the electric signal processing module (2) is used for receiving and processing the trigger signal of the light beam laser (9) acquired by the signal acquisition module, and inputting the processed trigger signal to the enabling end of the gas laser (4) so as to synchronize the time of seed light reaching the gas laser (4) with the discharge time of the gas laser (4); the discharge time of the gas laser (4) is controlled by the enabling end of the gas laser (4);
the signal generator (5) is used for outputting an electric signal;
a second conversion unit (6) for outputting a potential different from the potential of the output terminal of the signal generator (5);
a fiber optic transmitter (F2) for converting the potential output by the second conversion unit (6) into an optical signal for triggering the beam laser (9) to generate seed light;
a first output end of the signal generator (5) is connected with an input end of the electric signal processing module (2), and a second output end of the signal generator (5) is connected with an input end of the second conversion unit (6); the output end of the second conversion unit (6) is connected with the input end of a fiber-optic transmitter (F2);
the signal acquisition module comprises a fiber receiver (F1) and a first conversion unit (1); the trigger signal of the beam laser (9) is transmitted to a light-sensitive resistor of a fiber receiver (F1) in the form of an optical signal; the output end of the optical fiber receiver (F1) is electrically connected with the input end of a first conversion unit (1), the electric potential of the output end of the first conversion unit (1) is different from the electric potential of the output end of the optical fiber receiver (F1), and the output end of the first conversion unit (1) is connected with the input end of an electric signal processing module (2);
the device selects one working mode from the following two working modes to work:
the first mode is as follows: the method comprises the steps of collecting a trigger signal of a beam laser (9), transmitting the trigger signal to a photoresistor of an optical fiber receiver (F1) in the form of an optical signal, receiving the optical signal by the photoresistor of the optical fiber receiver (F1), converting the optical signal into an electric signal through a first conversion unit (1), transmitting the trigger signal processed by an electric signal processing module (2) to an enabling end of a gas laser (4) in the form of an electric signal, and enabling the time of seed light transmitted by the beam laser (9) reaching the gas laser (4) to be synchronous with the discharge time of the gas laser (4);
and a second mode: the signal generator (5) generates an electric signal, the electric signal generated by the signal generator (5) is converted into a trigger signal in an optical signal form through the second conversion unit (6) and the optical fiber emitter (F2) to trigger the beam laser (9), meanwhile, the electric signal generated by the signal generator (5) is subjected to electric signal processing through the electric signal processing module (2), and the processed electric signal is transmitted to the enabling end of the gas laser (4) so that the enabling end of the gas laser (4) outputs a low-jitter trigger signal.
2. The apparatus for triggering an excimer laser of claim 1, wherein: the first conversion unit (1) comprises a first field effect transistor (Q1), the output end of the optical fiber receiver (F1) is connected with the grid electrode of the first field effect transistor (Q1), the drain electrode of the first field effect transistor (Q1) is connected with a power supply, and the drain electrode of the first field effect transistor (Q1) is also connected with the input end of the electric signal processing module (2) as the output end.
3. The apparatus for triggering an excimer laser of claim 2, wherein: the model of the fiber receiver (F1) is R2526; the first conversion unit (1) further comprises a first resistor (R1), a second resistor (R2), and a third resistor (R3);
a pin 1 of the optical fiber receiver (F1) serving as an output end is connected with a grid of a first field effect transistor (Q1) through a first resistor (R1), a pin 1 of the optical fiber receiver (F1) is also connected with a pin 4, and a first capacitor (C1) is connected between the pin 1 and the pin 2 of the optical fiber receiver (F1);
the drain electrode of the first field effect transistor (Q1) is connected with a power supply through a second resistor (R2), and the drain electrode of the first field effect transistor (Q1) is also used as an output end and connected with the input end of the electric signal processing module (2) through a third resistor (R3); the source of the first field effect transistor (Q1) is grounded.
4. The apparatus for triggering an excimer laser of claim 1, wherein: the electric signal processing module (2) comprises a 555 timer (F3) and a third field effect transistor (Q3);
the output end of the signal acquisition module is connected with the input end of a 555 timer (F3), the output end of the 555 timer (F3) is connected with the grid electrode of a third field-effect tube (Q3), the drain electrode of the third field-effect tube (Q3) is used as the output end and is connected with the enabling end of the gas laser (4), and the drain electrode of the third field-effect tube (Q3) is also connected with a power supply through an eighth resistor (R8); the source of the third field effect transistor (Q3) is grounded.
5. The apparatus for triggering an excimer laser of claim 4, wherein: the model of 555 timer (F3) is NE555, pin 3 of 555 timer (F3) is connected with the grid of third field effect transistor (Q3) through seventh resistance (R7) as the output, pin 4 and pin 8 of 555 timer (F3) all connect the power, pin 1 ground connection of 555 timer (F3), pin 5 of 555 timer (F3) passes through second electric capacity (C2) ground connection, the output of signal acquisition module is connected with pin 6 of 555 timer (F3), the output of signal acquisition module still is connected with pin 2 of 555 timer (F3).
6. The apparatus for triggering an excimer laser of claim 1, wherein: the model of the optical fiber transmitter (F2) is T1521, the second conversion unit (6) comprises a second field effect transistor (Q2), the drain electrode of the second field effect transistor (Q2) is connected with the pin 2 of the optical fiber transmitter (F2), the second output end of the signal generator (5) is connected with the gate of the second field effect transistor (Q2) serving as an input end, and the source electrode of the second field effect transistor (Q2) is grounded;
pin 1 of the fiber optic transmitter (F2) is connected to a power source.
7. The apparatus for triggering an excimer laser of claim 6, wherein: the second switching unit (6) further comprises a fifth resistor (R5) and a sixth resistor (R6) connected in series; the second output end of the signal generator (5) is connected with the grid of the input end of the second field-effect tube (Q2) sequentially through a sixth resistor (R6) and a fifth resistor (R5).
8. The apparatus for triggering an excimer laser as set forth in any one of claims 1 to 7, wherein: the gas laser (4) is an excimer laser, and the beam laser (9) is a femtosecond laser.
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000156535A (en) * | 1998-11-20 | 2000-06-06 | Komatsu Ltd | Injection locked narrow-band pulse laser system |
| CN102447214A (en) * | 2011-12-21 | 2012-05-09 | 中国科学院安徽光学精密机械研究所 | Synchronous system for all-solid-state power supply of excimer laser based on FPGA (Field Programmable Gate Array) |
| CN102593704A (en) * | 2012-01-18 | 2012-07-18 | 中国科学院安徽光学精密机械研究所 | Synchronous control system of double-cavity excimer laser |
| CN103078246A (en) * | 2012-12-27 | 2013-05-01 | 中国科学院安徽光学精密机械研究所 | Signal acquisition method in synchronous control of MOPA (Master Oscillator Power-Amplifier) system excimer laser |
| CN111416272A (en) * | 2020-04-26 | 2020-07-14 | 中国科学院合肥物质科学研究院 | Trigger and protection circuit of excimer laser high-voltage switch |
| CN111952822A (en) * | 2020-07-29 | 2020-11-17 | 中国科学院合肥物质科学研究院 | Light source synchronous control system of double-cavity excimer laser based on MOPA structure |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4877692B2 (en) * | 2001-03-21 | 2012-02-15 | 株式会社小松製作所 | Injection-locked or MOPA laser device |
| US7308013B2 (en) * | 2002-11-05 | 2007-12-11 | Lambda Physik Ag | Excimer or molecular fluorine laser system with precision timing |
| US6987790B2 (en) * | 2003-02-14 | 2006-01-17 | Lambda Physik Ag | Excimer or molecular fluorine laser with several discharge chambers |
| CN105954055A (en) * | 2016-04-27 | 2016-09-21 | 中国科学院合肥物质科学研究院 | Femtosecond excimer laser ablation sampling system |
| CN109891688B (en) * | 2016-12-08 | 2021-02-12 | 极光先进雷射株式会社 | Laser device and laser processing system |
-
2020
- 2020-12-30 CN CN202011611089.7A patent/CN112864786B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000156535A (en) * | 1998-11-20 | 2000-06-06 | Komatsu Ltd | Injection locked narrow-band pulse laser system |
| CN102447214A (en) * | 2011-12-21 | 2012-05-09 | 中国科学院安徽光学精密机械研究所 | Synchronous system for all-solid-state power supply of excimer laser based on FPGA (Field Programmable Gate Array) |
| CN102593704A (en) * | 2012-01-18 | 2012-07-18 | 中国科学院安徽光学精密机械研究所 | Synchronous control system of double-cavity excimer laser |
| CN103078246A (en) * | 2012-12-27 | 2013-05-01 | 中国科学院安徽光学精密机械研究所 | Signal acquisition method in synchronous control of MOPA (Master Oscillator Power-Amplifier) system excimer laser |
| CN111416272A (en) * | 2020-04-26 | 2020-07-14 | 中国科学院合肥物质科学研究院 | Trigger and protection circuit of excimer laser high-voltage switch |
| CN111952822A (en) * | 2020-07-29 | 2020-11-17 | 中国科学院合肥物质科学研究院 | Light source synchronous control system of double-cavity excimer laser based on MOPA structure |
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