CN112864786B - A device for triggering an excimer laser - Google Patents

Abstract

The invention relates to the field of excimer lasers, in particular to a device for triggering an excimer laser. The device comprises the following components: the signal acquisition module is used for acquiring a trigger signal of a beam laser which transmits seed light to the gas laser; the electric signal processing module is used for receiving and processing the trigger signal of the beam laser acquired by the signal acquisition module and inputting the processed trigger signal to the enabling end of the gas laser so as to synchronize the time of the seed light reaching the gas laser with the discharge time of the gas laser; the discharge time of the gas laser is controlled by the enable end of the gas laser. Therefore, the invention can ensure that the time of the seed light reaching the excimer laser and the discharge of the excimer laser are synchronous, so that the excimer laser can be used as a laser amplifier.

Description

A device for triggering an excimer laser

technical field

The invention relates to the field of excimer lasers, in particular to a device for triggering an excimer laser.

Background technique

Excimer lasers are currently the laser devices with the highest output power in the ultraviolet band, and are widely used in industry, medical, scientific research and other fields. After decades of research and development, excimer laser technology has developed rapidly, especially the rare gas halide excimer laser, due to its high output laser peak power, high pulse energy, and wavelength in the ultraviolet region, it has developed rapidly and has been widely used. The application of excimer laser is mainly used at present. In order to meet some special application requirements, such as semiconductor lithography, high-power processing, ultrafast laser output, etc., excimer laser amplifiers in excimer lasers are required. Excimers are unstable associates that recombine into molecules in the excited state and dissociate into atoms in the ground state. The excimer laser transition occurs from the bound excited state to the repulsive ground state, which belongs to the bound-free transition, and the typical lifetime of the excited state is only tens of nanoseconds. The discharge of the excimer laser as an amplifier needs to be precisely synchronized with the arrival of the seed light. In order to ensure the parameters and stability of the laser amplification, the synchronization accuracy of the two is generally required to be better than plus or minus 5 nanoseconds. The seed light is the light emitted by the femtosecond laser. When the seed light reaches the excimer laser, the excimer laser needs to be discharged synchronously, so as to realize the amplification of the seed light emitted by the femtosecond laser. The seed light here is just a beam emitted by a femtosecond laser, which is called femtosecond laser because its light pulse is extremely short, only at the fs level. However, the light energy it emits is low, so its energy needs to be amplified by an excimer laser to achieve other functions.

Existing excimer lasers cannot achieve time synchronization between discharge and seed light reaching the excimer laser, resulting in the inability of existing excimer lasers to be used as laser amplifiers.

SUMMARY OF THE INVENTION

In order to solve the above technical problems, the present invention provides a device for triggering an excimer laser, which can synchronize the discharge time of the excimer laser with the time when the seed light reaches the excimer laser, so as to ensure that the excimer laser can be used as a laser amplifier. .

To achieve the above object, the present invention has adopted the following technical solutions:

A device for triggering an excimer laser, the device comprising the following components:

The signal acquisition module is used to acquire the trigger signal of the beam laser that sends the seed light to the gas laser;

The electrical signal processing module is used to receive and process the trigger signal of the beam laser collected by the signal acquisition module, and input the processed trigger signal to the enabling end of the gas laser, so that the time when the seed light reaches the gas laser is related to the discharge of the gas laser. Time synchronization; the discharge time of the gas laser is controlled by the enabling end of the gas laser.

Further, the signal acquisition module includes an optical fiber receiver and a first conversion unit; the trigger signal of the beam laser is input to the photoresistor of the optical fiber receiver in the form of an optical signal; the output end of the optical fiber receiver is connected to the first conversion unit. The input end is electrically connected, the potential of the output end of the first conversion unit is different from that of the output end of the optical fiber receiver, and the output end of the first conversion unit is connected to the input end of the electrical signal processing module.

Further, the first conversion unit includes a first field effect transistor, the output end of the optical fiber receiver is connected to the grid of the first field effect transistor, and the drain of the first field effect transistor is connected to the power supply, The drain of the first field effect transistor is also used as an output terminal to be connected to the input terminal of the electrical signal processing module.

Further preferably, the model of the optical fiber receiver is R2526; the first conversion unit further includes a first resistor, a second resistor, and a third resistor;

The pin 1 of the optical fiber receiver as the output end is connected with the grid of the first field effect tube through the first resistor, the pin 1 of the optical fiber receiver is also connected with the pin 4, and the pin 1 of the optical fiber receiver is connected with the pin 4. A first capacitor is connected between pin 2;

The drain of the first field effect transistor is connected to the power supply through a second resistor, and the drain of the first field effect transistor is also used as an output terminal to be connected to the input terminal of the electrical signal processing module through a third resistor; the The source of the first FET is grounded.

Further preferably, the electrical signal processing module includes a 555 timer and a third field effect transistor;

The output end of the signal acquisition module is connected to the input end of the 555 timer, the output end of the 555 timer is connected to the gate of the third field effect transistor, and the drain of the third field effect transistor is used as the output The terminal is connected to the enabling terminal of the gas laser, the drain of the third field effect transistor is also connected to the power supply through the eighth resistor; the source of the third field effect transistor is grounded.

Further preferably, the model of the 555 timer is NE555, the pin 3 of the 555 timer is connected to the gate of the third field effect transistor through the seventh resistor as an output terminal, and the pin 4 of the 555 timer is connected. and pin 8 are all connected to the power supply, the pin 1 of the 555 timer is grounded, the pin 5 of the 555 timer is grounded through the second capacitor, and the output end of the signal acquisition module is connected to the pin 6 of the 555 timer. connection, the output end of the signal acquisition module is also connected with the pin 2 of the 555 timer.

Further, the device also includes the following components:

A signal generator for outputting a signal consistent with the trigger signal of the beam laser;

a second conversion unit, configured to output a potential different from the potential of the output terminal of the signal generator;

an optical fiber transmitter for converting the potential output by the second conversion unit into an optical signal, the optical signal being used to trigger the beam laser to generate seed light;

The first output end of the signal generator is connected with the input end of the electrical signal processing module, the second output end of the signal generator is connected with the input end of the second conversion unit; the output of the second conversion unit The end is connected to the input end of the fiber optic transmitter.

Further preferably, the model of the optical fiber transmitter is T1521, the second conversion unit includes a second field effect tube, the drain of the second field effect tube is connected to the pin 2 of the optical fiber transmitter, and the signal The first output end of the generator is connected with the gate of the second field effect transistor as the input end, and the source of the second field effect transistor is grounded;

Pin 1 of the fiber optic transmitter is connected to the power supply.

Further preferably, the second conversion unit also includes a fifth resistor and a sixth resistor connected in series; the first output end of the signal generator sequentially passes through the sixth resistor, the fifth resistor and the second field effect transistor as the input end. connected to the gate.

More preferably, the beam laser is a femtosecond laser.

The beneficial effects of the present invention are as follows:

(1) Whether the beam laser sends seed light to the excimer laser is controlled by its trigger signal. The invention obtains the trigger signal of the beam laser through the signal acquisition module, and processes the obtained trigger signal through the electrical signal processing module, and the processed trigger signal is used as the trigger signal for the discharge of the excimer laser. Therefore, the present invention can ensure that the time when the seed light reaches the excimer laser is synchronized with the discharge of the excimer laser, so that the excimer laser can be used as a laser amplifier.

(2) The potential of the output terminal of the optical fiber receiver is different from the potential of its input terminal, and the potential of the output terminal of the 555 timer is also different from the potential of its input terminal. Therefore, the present invention adopts two FETs to output the potential of the optical fiber receiver and the 555 timing. The potential output from the receiver undergoes potential conversion (high potential becomes low potential, low potential becomes high potential). Therefore, the device of the present invention facilitates intuitively controlling the synchronization of the arrival of the seed light of the beam laser to the excimer laser and the discharge of the excimer laser.

(3) The intensity of the trigger signal of the beam laser is very low, and the present invention uses a field effect tube to amplify the collected trigger signal, so that the amplified signal reaches the intensity of triggering the excimer laser.

(4) The present invention adopts two ways to control time synchronization. One way is to collect the trigger signal of the beam laser to control the synchronization between the time when the seed light reaches the excimer laser and the discharge time of the excimer laser. Another way: the present invention also provides a signal generator, which can not only send the signal needed to trigger the excimer laser, but also send the signal needed to trigger the beam laser. Therefore, the present invention can further control the synchronization between the time when the seed light reaches the excimer laser and the discharge time of the excimer laser.

It can be seen from the above analysis that the present invention adopts two ways to control the above-mentioned time synchronization, so that the device is no longer limited to the type of signal, and can work in more situations.

(5) The electrical signal processing module of the present invention uses a 555 timer to form a Schmitt trigger, which can make the rising edge of the pulse steeper, and at the same time, the level trigger can effectively remove noise interference and reduce signal jitter.

(6) The 555 timer of the present invention is used in conjunction with the field effect transistor, which can reduce the jitter of the signal in the device in the timing sequence, thereby further improving the synchronization between the time when the seed light reaches the excimer laser and the discharge time of the excimer laser. .

Description of drawings

Fig. 1 is the overall system diagram of the present invention;

Fig. 2 is the circuit diagram of the first conversion unit and the optical fiber receiver of the present invention;

3 is a circuit diagram of a second conversion unit and an optical fiber transmitter of the present invention;

4 is a circuit diagram of an electrical signal processing module of the present invention;

5 is a system diagram between a power supply module, an isolation module, and a trigger pulse circuit of the present invention;

6 is a circuit diagram of a power module of the present invention;

Fig. 7 is the circuit diagram of the isolation module of the present invention;

8 is a circuit diagram of a trigger pulse circuit of the present invention;

FIG. 9 is a simulation diagram of the present invention.

The meanings of the symbols in the figure are as follows:

1-First conversion unit 2-Electrical signal processing module 3-Isolation module 4-Gas laser

41-trigger pulse circuit 411-first power supply unit 412-second power supply unit

413-protection circuit 5-signal generator 6-second conversion unit 7-first electrical signal connector

8-Second electrical signal connector 9-Beam laser 10-Power module

F1-Fiber Receiver F2-Fiber Transmitter F3-555 Timer

R1～R23-first resistor～twenty-third resistor Q1～Q4-first field effect transistor～fourth field effect transistor

Q5-Optocoupler Q6-Transistor Q7-First rectifier bridge Q8-Second rectifier bridge Q9-Third rectifier bridge

TR1-first transformer TR2-second transformer

C1～C13-first capacitor～thirteenth capacitor D1～D7-first diode～seventh diode

Detailed ways

The technical solutions in the present invention will be clearly and completely described below with reference to the embodiments and the accompanying drawings. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

Example 1

A device for triggering an excimer laser, the device comprising the following components:

a signal acquisition module, used to collect the trigger signal of the beam laser 9 that sends the seed light to the gas laser 4;

The electrical signal processing module 2 is used to receive and process the trigger signal of the beam laser 9 collected by the signal acquisition module, and input the processed trigger signal to the enabling end of the gas laser 4, so that the time when the seed light reaches the gas laser 4 It is synchronized with the discharge time of the gas laser 4 ; the discharge time of the gas laser 4 is controlled by the enabling end of the gas laser 4 .

The signal acquisition module includes a fiber receiver F1 and a first conversion unit 1; the trigger signal of the beam laser 9 is input to the photoresistor of the fiber receiver F1 in the form of an optical signal; the output end of the fiber receiver F1 is connected to the first conversion unit 1. The input terminal is electrically connected, the potential of the output terminal of the first conversion unit 1 is different from that of the output terminal of the optical fiber receiver F1 , and the output terminal of the first conversion unit 1 is connected to the input terminal of the electrical signal processing module 2 .

The first conversion unit 1 includes a first field effect transistor Q1, the output end of the optical fiber receiver F1 is connected to the gate of the first field effect transistor Q1, the drain of the first field effect transistor Q1 is connected to the power supply, and the first field effect transistor Q1 is connected to the power supply. The drain of the effect transistor Q1 is also connected to the input end of the electrical signal processing module 2 as an output end.

The model of the optical fiber receiver F1 is R2526; the first conversion unit 1 further includes a first resistor R1, a second resistor R2, and a third resistor R3;

The pin 1 of the fiber receiver F1 as the output end is connected to the gate of the first FET Q1 through the first resistor R1, the pin 1 of the fiber receiver F1 is also connected to the pin 4, and the pin 1 of the fiber receiver F1 A first capacitor C1 is connected between pin 2;

The drain of the first field effect transistor Q1 is connected to the power supply through the second resistor R2, and the drain of the first field effect transistor Q1 is also used as an output terminal to be connected to the input terminal of the electrical signal processing module 2 through a third resistor R3; The source of the field effect transistor Q1 is grounded.

The electrical signal processing module 2 includes a 555 timer F3 and a third field effect transistor Q3;

The output end of the signal acquisition module is connected with the input end of the 555 timer F3, the output end of the 555 timer F3 is connected with the gate of the third field effect transistor Q3, and the drain of the third field effect transistor Q3 is used as the output end and The enabling end of the gas laser 4 is connected, the drain of the third field effect transistor Q3 is also connected to the power supply through the eighth resistor R8; the source of the third field effect transistor Q3 is grounded.

The model of the 555 timer F3 is NE555, the pin 3 of the 555 timer F3 is used as the output terminal to connect with the gate of the third field effect transistor Q3 through the seventh resistor R7, and the pins 4 and 8 of the 555 timer F3 are both Connect the power supply, the pin 1 of the 555 timer F3 is grounded, the pin 5 of the 55 timer F2 is grounded through the second capacitor C2, the output end of the signal acquisition module is connected to the pin 6 of the 555 timer F3, and the output of the signal acquisition module The terminal is also connected to pin 2 of 555 timer F3.

The device also includes the following components:

The signal generator 5 is used for outputting a signal consistent with the trigger signal of the beam laser 9;

The second conversion unit 6 is used to output a potential different from the potential of the output terminal of the signal generator 5;

The optical fiber transmitter F2 is used to convert the potential output by the second conversion unit 6 into an optical signal, and the optical signal is used to trigger the beam laser 9 to generate seed light;

The first output end of the signal generator 5 is connected with the input end of the electrical signal processing module 2, and the second output end of the signal generator 5 is connected with the input end of the second conversion unit 6; the output end of the second conversion unit 6 Connect to the input end of the fiber optic transmitter F2.

The model of the fiber transmitter F2 is T1521, the second conversion unit 6 includes a second field effect transistor Q2, the drain of the second field effect transistor Q2 is connected to the pin 2 of the fiber transmitter F2, and the first output of the signal generator 5 The terminal is connected with the gate of the second field effect transistor Q2 as the input terminal, and the source of the second field effect transistor Q2 is grounded;

Pin 1 of the fiber optic transmitter F2 is connected to the power supply.

The second conversion unit 6 also includes a fifth resistor R5 and a sixth resistor R6 connected in series; the first output end of the signal generator 5 sequentially passes through the sixth resistor R6, the fifth resistor R5 and the second field effect transistor Q2 as the gate of the input end poles connected.

The gas laser 4 is an excimer laser, and the beam laser 9 is a femtosecond laser.

Example 2

In the basic row of embodiment 1, it is introduced separately below:

As shown in FIG. 1 and FIG. 2 , the signal acquisition module includes an optical fiber receiver F1 whose model is R2526 and a first conversion unit 1 . The first conversion unit 1 includes a first field effect transistor Q1, a first resistor R1, a second resistor R2, and a third resistor R3. The output end of the optical fiber receiver F1 is connected to the gate of the first field effect transistor Q1, the drain of the first field effect transistor Q1 is connected to the 5V DC voltage through the second resistor R2, and the source of the first field effect transistor Q1 ground. The drain of the first field effect transistor Q1 is also used as an output terminal to be connected to the input terminal of the electrical signal processing module 2 through the third resistor R3, and the pin 1 of the optical fiber receiver F1 as the output terminal is connected to the first field effect terminal through the first resistor R1 The gate of the tube Q1, the pin 1 of the optical fiber receiver F1 is also connected to the pin 4, and the first capacitor C1 is connected between the pin 1 and the pin 2 of the optical fiber receiver F1.

As shown in FIG. 4 , the electrical signal processing module 2 includes a 555 timer F3 whose model is NE555 and a third field effect transistor Q3. The drain of the first FET Q1 in the signal acquisition module is connected to the input pin 6 and pin 2 of the 555 timer F3 through the third resistor R3, and the pin 3 of the 555 timer F3 is used as the output through the The seven resistors R7 are connected to the gate of the third field effect transistor Q3, and the signal output from the drain of the third field effect transistor Q3 is used to drive the gas laser 4 (excimer laser) to discharge. Among them, the drain of the third field effect transistor Q3 is also connected to the 5V DC voltage through the eighth resistor R8, the source of the third field effect transistor Q3 is grounded, and the pins 4 and 8 of the 555 timer F3 are both connected to the 5V DC voltage Voltage, pin 1 of 555 timer F3 is grounded, and pin 5 of 555 timer F3 is grounded through the second capacitor C2.

In this embodiment, the voltage trigger signal of the beam laser 9 can also be directly input to the pin 6 of the 555 timer F3 through the second electrical signal connector 8 .

The beam laser 9 in this embodiment is a femtosecond laser, and the gas laser 4 is an excimer laser. A trigger signal of a voltage is applied to the enabling end of the beam laser 9, and the beam laser 9 generates seed light that is sent to the gas laser 4.

The working process of this embodiment is as follows: the trigger signal of the voltage applied to the enabling end of the beam laser 9 is converted into an optical signal, the optical signal is transmitted to the photoresistor of the optical fiber receiver F1, the optical fiber receiver F1 outputs a low potential, the low voltage The potential is input to the first field effect transistor Q1, and then the first field effect transistor Q1 outputs a high potential, and the high potential is input to the 555 timer F3. The 555 timer F3 can control the time when the low potential is output, and the low potential is input to the 555 timer F3. The three field effect transistors Q3 and the third field effect transistor Q3 output a high potential that can drive the gas laser 4 to discharge at this time, completing the control of the time when the seed light sent by the beam laser 9 reaches the gas laser 4 and the discharge time of the gas laser 4 synchronously.

Example 3

On the basis of Embodiments 1 and 2, the first conversion unit 1, the optical fiber receiver F1, and the second electrical signal connector 8 in Embodiment 2 are removed, and the following components are added:

The signal generator 5 is used for outputting a signal consistent with the trigger signal of the beam laser 9;

The second conversion unit 6 is used to output a potential different from the potential of the output terminal of the signal generator 5;

The fiber transmitter F2 is used to convert the potential output by the second conversion unit 6 into an optical signal, and the optical signal is transmitted to the beam laser 9 for triggering the beam laser 9 to generate seed light.

The first output end of the signal generator 5 is connected with the 555 timer F3 in the electrical signal processing module 2 as the input end pin 6 and pin 2, and the second output end of the signal generator 5 is connected with the second output end of the second conversion unit 6. The input end is connected; the output end of the second conversion unit 6 is connected with the input end of the optical fiber transmitter F2, and the optical fiber transmitter F2 converts the received electrical signal into an optical signal, and the optical signal is transmitted to the beam laser 9 and then converted The electrical signal as a trigger signal causes the beam laser 9 to send seed light to the gas laser 4 .

They are introduced as follows:

As shown in FIG. 3 , the second conversion unit 6 includes an optical fiber transmitter F2 with a model of T1521 and a second field effect transistor Q2. The second conversion unit 6 includes a second field effect transistor Q2, a fifth resistor R5 and a sixth resistor R6 connected in series, the drain of the second field effect transistor Q2 is connected to the pin 2 of the optical fiber transmitter F2, and the signal generator 5 The first output terminal is connected to the gate of the second field effect transistor Q2 as the input terminal, the source of the second field effect transistor Q2 is grounded, and the pin 1 of the fiber transmitter F2 is connected to the 5V power supply through the fourth resistor R4. The first output end of the signal generator 5 is connected to the gate of the second field effect transistor Q2 as the input end through the sixth resistor R6 and the fifth resistor R5 in sequence.

Example 4

On the basis of Embodiment 1, Embodiment 2 and Embodiment 3, a device for triggering an excimer laser of the present invention includes the following two working modes:

Mode 1: Collect the trigger signal of the beam laser 9 and transmit the trigger signal in the form of an optical signal to the photoresistor of the optical fiber receiver F1, and the photoresistor of the optical fiber receiver F1 receives the optical signal and converts it through the first conversion unit 1 into an electrical signal, or directly receive the trigger signal transmitted in the form of voltage from the beam laser 9 through the second electrical signal connector 8 to perform electrical signal processing. Both of these two access methods can transmit the trigger signal of the beam laser 9 to the enabling end of the gas laser 4 in the form of an electrical signal, so that the time when the seed light sent by the beam laser 9 reaches the gas laser 4 is the same as the discharge time of the gas laser 4 Synchronize.

Mode 2: Generate an electrical signal through the signal generator 5, directly transmit a trigger signal in the form of an electrical signal to the enabling end of the external beam laser 9 through the first electrical signal connector 7, or pass the electrical signal generated by the signal generator 5 through the first electrical signal. The two conversion unit 6 and the optical fiber transmitter F2 convert a trigger signal in the form of an optical signal for triggering the beam laser 9 . At the same time, the electrical signal generated by the signal generator 5 is processed by the electrical signal processing module 2, and the processed electrical signal is sent to the enabling end of the gas laser 4, so that the enabling end of the gas laser 4 outputs a low-jitter trigger signal, Low jitter means low jitter in timing, and the time when the trigger signal appears is consistent with the actual requirements, and there will be no delay or advance.

9 is a simulation diagram of this embodiment, X1 is the collected trigger signal of the beam laser 9 , and the X2 waveform is the processed signal output by the electrical signal processing module 2 for transmission to the gas laser 4 .

Example 5

A pulse circuit for driving an excimer laser, the pulse circuit includes a trigger pulse circuit 41, and the trigger pulse circuit 41 includes a first power supply unit 411 for supplying power to the trigger end of the gas laser 4; the first power supply unit 411 includes a first power supply unit 411. The tenth capacitor C10 is a charging power source for charging the tenth capacitor C10 , and is used to drive the driving component for discharging the tenth capacitor C10 after charging; the tenth capacitor C10 is discharged to supply power to the trigger terminal of the gas laser 4 .

The driving component is a transistor Q6, and the first power supply unit 411 further includes a second transformer TR2; the second transformer TR2 includes a primary coil on the side of the first power supply unit 411 and a secondary coil on the side of the gas laser 4; the gate of the transistor Q6 is connected There is a conduction power supply for turning on the transistor Q6; the primary coil of the second transformer TR2, the transistor Q6 and the tenth capacitor C10 form a series circuit, and the charging power supply supplies power to the series circuit; when the tenth capacitor C10 is discharged, the second transformer TR2 The primary coil and secondary coil of the gas laser 4 supply power to the trigger end.

The first power supply unit 411 also includes an eighteenth resistor R18 and a fourth diode D4 connected in series; the charging power supply is connected to one end of the eighteenth resistor R18, and the other end of the eighteenth resistor R18 is connected to the fourth diode D4. The anode is connected, the cathode of the fourth diode D4 is connected to the collector of the transistor Q6, the cathode of the fourth diode D4 is also connected to one end of the primary coil of the second transformer TR2, and the emitter of the transistor Q6 is connected to the tenth capacitor. One end of C10 is connected, and the other end of the tenth capacitor C10 is connected to the other end of the primary coil of the second transformer TR2.

The trigger pulse circuit 41 also includes a protection circuit 413 located between the emitter and the collector of the transistor Q6, and the protection circuit 413 is used to prevent the discharge voltage of the gas laser 4 from destroying the transistor Q6.

The trigger pulse circuit 41 also includes a second power supply unit 412 for supplying power to the trigger end of the gas laser 4 when the tenth capacitor C10 is charged. The second power supply unit 412 includes an auxiliary power supply connected to one end of the secondary coil of the second transformer TR2. Power supply; one end of the secondary coil of the second transformer TR2 is also connected to the negative electrode of the gas laser 4 , and the other end of the secondary coil of the second transformer TR2 is connected to the positive electrode of the gas laser 4 .

The pulse circuit further includes a power supply module 10, and the power supply module 10 is a charging power supply and an auxiliary power supply for triggering the pulse circuit 41;

The power module 10 includes a first transformer TR1, a first rectifier bridge Q7 and a second rectifier bridge Q8; the first transformer TR1 includes a primary coil, a first secondary coil and a second secondary coil; both ends of the primary coil of the first transformer TR1 For connecting to the mains;

One end of the first secondary coil is connected to the first voltage input end of the first rectifier bridge Q7, the other end of the first secondary coil is connected to the second voltage input end of the first rectifier bridge Q7, and the positive electrode of the first rectifier bridge Q7 As the auxiliary power supply of the trigger pulse circuit 41, supply power to the trigger pulse circuit 41;

One end of the second secondary coil is connected to the first voltage input end of the second rectifier bridge Q8, the other end of the second secondary coil is connected to the second voltage input end of the second rectifier bridge Q8, and the positive electrode of the second rectifier bridge Q8 Power is supplied to the trigger pulse circuit 41 as a charging power source for the trigger pulse circuit 41 .

The power supply module 10 further includes a ninth resistor R9 connected to both ends of the primary coil of the first transformer TR1, and the ninth resistor R9 is a varistor.

The pulse circuit also includes an isolation module 3, and the isolation module 3 is used to prevent the gas laser 4 from destroying the circuit where the pulse circuit is located;

The isolation module 3 includes an optocoupler Q5 and a fourth field effect transistor Q4; the positive electrode of the optocoupler Q5 is used to connect to the circuit where the pulse circuit is located, and the output end of the optocoupler Q5 is connected to the gate of the fourth field effect transistor Q4. The source of the four field-effect transistors Q4 is connected to the gate of the transistor Q6 in the first power supply unit 411, the source of the fourth field-effect transistor Q4 is used as a power supply to turn on the transistor Q6, and the power supply terminal of the optocoupler Q5 , the voltage access terminal of the optocoupler Q5 and the drain of the fourth field effect transistor Q4 are connected to the voltage.

The first transformer TR1 also includes a third secondary coil and a third rectifier bridge Q9, one end of the third secondary coil is connected to the first voltage input end of the third rectifier bridge Q9, and the other end of the third secondary coil is connected to the third rectifier bridge Q9. The second voltage input terminal of the rectifier bridge Q9 is connected, and the positive pole of the third rectifier bridge Q9 is connected to the power supply terminal of the optocoupler Q5, the voltage access terminal of the optocoupler Q5 and the drain of the fourth field effect transistor Q4.

The gas laser 4 is an excimer laser.

Example 6

On the basis of Embodiment 5, a pulse circuit for driving an excimer laser, as shown in FIG. 5 , the pulse circuit includes a trigger pulse circuit 41, a power supply module 10, and an isolation module 3, which are respectively introduced below:

As shown in FIG. 6 , the power module 10 includes a first transformer TR1, a first rectifier bridge Q7 and a second rectifier bridge Q8, and the first transformer TR1 further includes a primary coil, a first secondary coil, a second secondary coil, a third secondary coil. Both ends of the primary coil of the first transformer TR1 are connected to the commercial power (AC 22v), and both ends of the primary coil of the first transformer TR1 are also connected to a ninth resistor R9, which is a varistor, and the varistor is used for the first transformer TR1. A transformer TR1 primary overvoltage protection. One end of the first secondary coil is connected to the first voltage input end of the first rectifier bridge Q7, the other end of the first secondary coil is connected to the second voltage input end of the first rectifier bridge Q7, and the negative electrode of the first rectifier bridge Q7 Grounding, the positive pole of the first rectifier bridge Q7 is used to output a voltage of 170V, and the positive pole of the first rectifier bridge Q7 is also grounded through a third capacitor C3, which is an electrolytic capacitor. One end of the second secondary coil is connected to the first voltage input end of the second rectifier bridge Q8, the other end of the second secondary coil is connected to the second voltage input end of the second rectifier bridge Q8, and the negative electrode of the second rectifier bridge Q8 Grounding, the positive pole of the second rectifier bridge Q8 is used to output a voltage of 350V, and the positive pole of the second rectifier bridge Q8 is also grounded through a fourth capacitor C4, which is an electrolytic capacitor. One end of the third secondary coil is connected to the first voltage input end of the third rectifier bridge Q9, the other end of the third secondary coil is connected to the second voltage input end of the third rectifier bridge Q9, and the negative electrode of the third rectifier bridge Q9 Grounded, the positive pole of the third rectifier bridge Q9 is used to output a voltage of 17V, the fifth capacitor C5 and the sixth capacitor C6 are connected in parallel between the positive pole of the third rectifier bridge Q9 and the ground, wherein the fifth capacitor C5 is an electrolytic capacitor.

As shown in FIG. 7 , the isolation module 3 includes an optocoupler Q5 and a fourth field effect transistor Q4. The model of the fourth FET Q4 is 2N7002, the optocoupler Q5 is a fast optocoupler, the model is 6N173, the drain of the third FET Q3 is connected to the pin 2 of the optocoupler Q5 through the tenth resistor R10, and the optocoupler Q5 The pin 8 of the first diode D1 is grounded, the anode of the first diode D1 is grounded, the cathode of the first diode D1 is connected to the pin 8 of the optocoupler Q5, and the anode of the second rectifier bridge Q8 is connected to the tenth A resistor R11 is connected to the pin 8 of the optocoupler Q5, the negative electrode of the first diode D1 is also connected to the pin 7 of the optocoupler Q5 through the twelfth resistor R12, and the pins 5 and 3 of the optocoupler Q5 are both Ground, pin 1 and pin 4 of optocoupler Q5 are suspended. The pin 6 of the optocoupler Q5 is connected to the gate of the fourth field effect transistor Q4, the gate of the fourth field effect transistor Q4 is grounded through the thirteenth resistor R13, and the drain of the fourth field effect transistor Q4 is connected to the first diode The cathode of the tube D1 is connected, the source of the fourth FET Q4 is grounded through the fourteenth resistor R14, and the source of the fourth FET Q4 is connected to the seventh capacitor C7, the fifteenth resistor R15, and the second diode in turn. D2, one end of the fifteenth resistor R15 away from the seventh capacitor C7 is connected to one end of the sixteenth resistor R16, one end of the sixteenth resistor R16 is also connected to one end of the eighth capacitor C8, and the anode of the second diode D2 is connected to the first end of the sixteenth resistor R16. The fifteenth resistor R15 is connected, and the cathode of the second diode D2 is connected to the cathode of the third diode D3. The other end of the sixteenth resistor R16, the other end of the eighth capacitor C8, and the anode of the third diode D3 are all grounded.

As shown in FIG. 8 , the trigger pulse circuit 41 includes a first power supply unit 411 and a second power supply unit 412 . The first power supply unit 411 further includes a transistor Q6 , a second transformer TR2 and a protection circuit 413 . The transistor Q6 is an IGBT transistor. The protection circuit 413 includes a ninth capacitor C9 and a sixth diode D6 connected in parallel. After the ninth capacitor C9 and the sixth diode D6 are connected in parallel, one end of the nineteenth resistor R19 is connected, and the other end of the nineteenth resistor R19 The emitter of the transistor Q6 is connected, the cathode of the second diode D2 is connected to the gate of the transistor Q6, the cathode of the fifth diode D5 is connected to the collector of the transistor Q6, and the anode of the fifth diode D5 is connected to the emitter of the transistor Q6 The end of the ninth capacitor C9 and the sixth diode D6 far away from the nineteenth resistor R19 is connected to the collector of the transistor Q6, and the collector of the transistor Q6 is connected through the seventeenth resistor R17, the fourth diode D4, the tenth The eighth resistor R18 is connected to the anode of the second rectifier bridge Q8, wherein the cathode of the fourth diode D4 is connected to the seventeenth resistor R17, and the anode of the fourth diode D4 and the eighteenth resistor R18 are far away from the second rectifier bridge Q8 One end of the anode is connected, one end of the seventeenth resistor R17 away from the emitter of the transistor Q6 is connected to the cathode of the seventh diode D7, and the anode of the seventh diode D7 is connected to the emitter of the transistor Q6. The second transformer TR2 includes a primary coil and a secondary coil, the primary coil is connected to the emitter of the transistor Q6 via the tenth capacitor C10, and one end of the primary coil is connected to the negative electrode of the seventh diode D7. The second power supply unit 412 includes an eleventh capacitor C11, a twelfth capacitor C12, a thirteenth capacitor C13, and a twenty-third resistor R23 connected in parallel, one end of the eleventh capacitor C11, one end of the twelfth capacitor C12, One end of the thirteenth capacitor C13 and one end of the twenty-third resistor R23 are grounded, the other end of the twelfth capacitor C12 and the other end of the eleventh capacitor C11 are connected to one end of the secondary coil, and the thirteenth capacitor C13 A twenty-first resistor R21 is connected between the other end and the other end of the twelfth capacitor C12. The positive electrode of the first rectifier bridge Q7 is connected to the other end of the thirteenth capacitor C13 through the twenty-second resistor R22. The thirteenth capacitor The other end of C13 is also connected with a twenty-third resistor R23, and one end of the twenty-third resistor R23 away from the twenty-second resistor R22 is grounded. The other end of the secondary coil of the second transformer TR2 is connected to the positive electrode of the thyristor 42 through the twentieth resistor R20, and the negative electrode of the thyristor 42 is connected to one end of the eleventh capacitor C11, one end of the twelfth capacitor C12, and one end of the thirteenth capacitor C12. One end of the capacitor C13 is connected.

In this example, the gas laser 4 is an excimer laser, and the high-voltage pulse generation process in this example is as follows: the 350V voltage passes through the eighteenth resistor R38 for current limiting and the fourth diode D4 for isolation, and then passes through the second transformer The primary coil of TR2 charges the tenth capacitor C10. When the trigger signal of the beam laser 9 collected by the optical fiber receiver F1 is transmitted to the gate of the transistor Q6 through the first conversion unit 1, the electrical signal processing module 2 and the isolation module 3, the transistor Q6 is turned on, at this time, the tenth capacitor C10 The primary coil of the second transformer TR2, the seventeenth resistor R17, and the transistor Q6 are discharged, and a high-voltage pulse is generated on the secondary coil of the second transformer TR2, so that the voltage on the thyristor 42 instantly reaches -1KV voltage, that is, A fast leading edge high voltage pulse, so that the gas laser 4 is in a discharge state for plasma generation. When the optical fiber receiver F1 does not collect the trigger signal of the beam laser 9, the voltage of the thyristor 42 is 170V at this time, and the gas laser 4 does not discharge. In this embodiment, the gas laser 4 is an excimer laser, and its model is ArF193.

Example 7

On the basis of Embodiment 1 and Embodiment 5, a device for triggering an excimer laser and a pulse circuit for driving an excimer laser can be used in combination to form a device for triggering an excimer laser A circuit that generates plasma.

The model of the fiber optic receiver F1 is R2526, the English name of the manufacturer is AVAGO, and the Chinese name is Anhua Gao; the model of the fiber optic transmitter F2 is T1527, the English name of the manufacturer is AVAGO, and the Chinese name is An Hua Gao; 555 timing The model of device F3 is NE555, the English name of the manufacturer is TI, and the Chinese name is Texas Instruments; the models of the first FET Q1, the second FET Q2, the third FET Q3, and the fourth FET Q4 All are 2N7002, the English name of the manufacturer is ON, and the Chinese name is ON Semiconductor; the model of the optocoupler Q5 is 6N173, the English name of the manufacturer is AVAGO, and the Chinese name is Anhua Gao; the model of the transistor Q6 is IRG4PH40U, The English name is International Rectifier.

Claims (8)

1. An apparatus for triggering an excimer laser, comprising the following components:

the signal acquisition module is used for acquiring a trigger signal of a beam laser (9) for transmitting seed light to the gas laser (4);

the electric signal processing module (2) is used for receiving and processing the trigger signal of the light beam laser (9) acquired by the signal acquisition module, and inputting the processed trigger signal to the enabling end of the gas laser (4) so as to synchronize the time of seed light reaching the gas laser (4) with the discharge time of the gas laser (4); the discharge time of the gas laser (4) is controlled by the enabling end of the gas laser (4);

the signal generator (5) is used for outputting an electric signal;

a second conversion unit (6) for outputting a potential different from the potential of the output terminal of the signal generator (5);

a fiber optic transmitter (F2) for converting the potential output by the second conversion unit (6) into an optical signal for triggering the beam laser (9) to generate seed light;

a first output end of the signal generator (5) is connected with an input end of the electric signal processing module (2), and a second output end of the signal generator (5) is connected with an input end of the second conversion unit (6); the output end of the second conversion unit (6) is connected with the input end of a fiber-optic transmitter (F2);

the signal acquisition module comprises a fiber receiver (F1) and a first conversion unit (1); the trigger signal of the beam laser (9) is transmitted to a light-sensitive resistor of a fiber receiver (F1) in the form of an optical signal; the output end of the optical fiber receiver (F1) is electrically connected with the input end of a first conversion unit (1), the electric potential of the output end of the first conversion unit (1) is different from the electric potential of the output end of the optical fiber receiver (F1), and the output end of the first conversion unit (1) is connected with the input end of an electric signal processing module (2);

the device selects one working mode from the following two working modes to work:

the first mode is as follows: the method comprises the steps of collecting a trigger signal of a beam laser (9), transmitting the trigger signal to a photoresistor of an optical fiber receiver (F1) in the form of an optical signal, receiving the optical signal by the photoresistor of the optical fiber receiver (F1), converting the optical signal into an electric signal through a first conversion unit (1), transmitting the trigger signal processed by an electric signal processing module (2) to an enabling end of a gas laser (4) in the form of an electric signal, and enabling the time of seed light transmitted by the beam laser (9) reaching the gas laser (4) to be synchronous with the discharge time of the gas laser (4);

and a second mode: the signal generator (5) generates an electric signal, the electric signal generated by the signal generator (5) is converted into a trigger signal in an optical signal form through the second conversion unit (6) and the optical fiber emitter (F2) to trigger the beam laser (9), meanwhile, the electric signal generated by the signal generator (5) is subjected to electric signal processing through the electric signal processing module (2), and the processed electric signal is transmitted to the enabling end of the gas laser (4) so that the enabling end of the gas laser (4) outputs a low-jitter trigger signal.

2. The apparatus for triggering an excimer laser of claim 1, wherein: the first conversion unit (1) comprises a first field effect transistor (Q1), the output end of the optical fiber receiver (F1) is connected with the grid electrode of the first field effect transistor (Q1), the drain electrode of the first field effect transistor (Q1) is connected with a power supply, and the drain electrode of the first field effect transistor (Q1) is also connected with the input end of the electric signal processing module (2) as the output end.

3. The apparatus for triggering an excimer laser of claim 2, wherein: the model of the fiber receiver (F1) is R2526; the first conversion unit (1) further comprises a first resistor (R1), a second resistor (R2), and a third resistor (R3);

a pin 1 of the optical fiber receiver (F1) serving as an output end is connected with a grid of a first field effect transistor (Q1) through a first resistor (R1), a pin 1 of the optical fiber receiver (F1) is also connected with a pin 4, and a first capacitor (C1) is connected between the pin 1 and the pin 2 of the optical fiber receiver (F1);

the drain electrode of the first field effect transistor (Q1) is connected with a power supply through a second resistor (R2), and the drain electrode of the first field effect transistor (Q1) is also used as an output end and connected with the input end of the electric signal processing module (2) through a third resistor (R3); the source of the first field effect transistor (Q1) is grounded.

4. The apparatus for triggering an excimer laser of claim 1, wherein: the electric signal processing module (2) comprises a 555 timer (F3) and a third field effect transistor (Q3);

the output end of the signal acquisition module is connected with the input end of a 555 timer (F3), the output end of the 555 timer (F3) is connected with the grid electrode of a third field-effect tube (Q3), the drain electrode of the third field-effect tube (Q3) is used as the output end and is connected with the enabling end of the gas laser (4), and the drain electrode of the third field-effect tube (Q3) is also connected with a power supply through an eighth resistor (R8); the source of the third field effect transistor (Q3) is grounded.

5. The apparatus for triggering an excimer laser of claim 4, wherein: the model of 555 timer (F3) is NE555, pin 3 of 555 timer (F3) is connected with the grid of third field effect transistor (Q3) through seventh resistance (R7) as the output, pin 4 and pin 8 of 555 timer (F3) all connect the power, pin 1 ground connection of 555 timer (F3), pin 5 of 555 timer (F3) passes through second electric capacity (C2) ground connection, the output of signal acquisition module is connected with pin 6 of 555 timer (F3), the output of signal acquisition module still is connected with pin 2 of 555 timer (F3).

6. The apparatus for triggering an excimer laser of claim 1, wherein: the model of the optical fiber transmitter (F2) is T1521, the second conversion unit (6) comprises a second field effect transistor (Q2), the drain electrode of the second field effect transistor (Q2) is connected with the pin 2 of the optical fiber transmitter (F2), the second output end of the signal generator (5) is connected with the gate of the second field effect transistor (Q2) serving as an input end, and the source electrode of the second field effect transistor (Q2) is grounded;

pin 1 of the fiber optic transmitter (F2) is connected to a power source.

7. The apparatus for triggering an excimer laser of claim 6, wherein: the second switching unit (6) further comprises a fifth resistor (R5) and a sixth resistor (R6) connected in series; the second output end of the signal generator (5) is connected with the grid of the input end of the second field-effect tube (Q2) sequentially through a sixth resistor (R6) and a fifth resistor (R5).

8. The apparatus for triggering an excimer laser as set forth in any one of claims 1 to 7, wherein: the gas laser (4) is an excimer laser, and the beam laser (9) is a femtosecond laser.

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