CN112858343A - Multifunctional silicon-based liquid crystal chip online detection system and method - Google Patents
Multifunctional silicon-based liquid crystal chip online detection system and method Download PDFInfo
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- CN112858343A CN112858343A CN202110142195.3A CN202110142195A CN112858343A CN 112858343 A CN112858343 A CN 112858343A CN 202110142195 A CN202110142195 A CN 202110142195A CN 112858343 A CN112858343 A CN 112858343A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
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Abstract
The invention provides a multifunctional silicon-based liquid crystal chip online detection system, which belongs to the technical field of silicon-based liquid crystal chip production and comprises a control module, a detection module, a judgment module and an output module; the control module is respectively electrically connected with the detection module, the judgment module and the output module and is used for controlling the work of the detection module, the judgment module and the output module; the detection module is used for detecting incoming materials of the wafer and detecting the packaged cell; the judging module receives the detection result of the detecting module, compares the detection result with a qualified standard and judges the detection result; and the output module receives the detection result and the corresponding judgment result and feeds the information to the front end and the rear end of the production line in a classified manner. The detection system and the detection method have the advantages of high integration level and simple operation, are easy to integrate into each silicon-based liquid crystal chip production line, feed back the product quality information to the front end and the rear end of production in time, greatly improve the detection efficiency and the accuracy, reduce the generation of defective products, reduce the cost of manufacturers and improve the industry competitiveness.
Description
Technical Field
The invention relates to the technical field of silicon-based liquid crystal chip production, in particular to a multifunctional silicon-based liquid crystal chip online detection system and method.
Background
The current production place of the liquid crystal on silicon (LCoS) is mainly abroad, the packaging production line and some experimental sample lines of only a few wafers are domestic, the production yield is low, the detection means is short, when the LCoS meets the requirements of different customers, the detection efficiency is low, the detection is very deficient, and the increasing production requirements of the liquid crystal on silicon are difficult to meet. The current silicon-based liquid crystal chip production line detection process is mainly used for detecting supplied materials of wafers and detecting single sample after the wafers are packaged, and due to the diversity and complexity of customer requirements, a multifunctional, convenient and efficient online real-time detection system is not available on the production line, so that the yield and the yield of the packaging production line of only a few wafers are not small.
In view of this, there is an urgent need to research a multifunctional on-line detection system and method for liquid crystal on silicon chips, which has high integration level and simple operation, can be easily integrated into each production line of liquid crystal on silicon chips, and can feed back the product quality information to the front end and the back end of the production in time, thereby greatly improving the detection efficiency and accuracy, reducing the generation of defective products, reducing the cost of manufacturers, and improving the industry competitiveness.
Disclosure of Invention
The invention aims to provide a multifunctional silicon-based liquid crystal chip online detection system and method aiming at the defects in the prior art, so that the one-stop function and the preliminary yield rate online detection of the silicon-based liquid crystal chip can be realized, and different detection requirements of various customers are met.
The object of the invention can be achieved by the following technical measures:
the invention provides a multifunctional silicon-based liquid crystal chip online detection system, which comprises a control module, a detection module, a judgment module and an output module, wherein the control module is used for controlling the detection module to detect the on-line detection of a liquid crystal chip;
the control module is respectively electrically connected with the detection module, the judgment module and the output module and is used for controlling the work of the detection module, the judgment module and the output module;
the detection module is used for detecting incoming materials of the wafer and appearance, image quality and fixed point position of the packaged cell;
the judging module receives the detection result of the detection module, compares the detection result with a qualified standard, judges whether the product under inspection is qualified or not and records the judging result;
the output module receives the detection result of the product under inspection and the corresponding judgment result, and feeds the received information back to the front end and the rear end of the production line in a classified manner.
Further, the system also comprises a storage CST, a Robot, a detection workbench and a temperature control unit;
the storage CST is used as a storage transfer buffer of the product and is used for transferring and temporarily storing the product; the Robot is used for taking and transferring products; the detection workbench is used for adjusting and fixing the position and the angle of a product; the temperature control unit is arranged in the detection workbench and used for adjusting the detection temperature of the product under detection;
and the storage CST, the Robot, the detection workbench and the temperature control unit respectively control the work of the storage CST, the Robot, the detection workbench and the temperature control unit through the control module.
Further, the detection module comprises a light source system and a CCD camera;
the light source system is used for providing a detection light source for detecting crystal products, and the CCD camera has an online automatic zooming camera shooting function and is used for macroscopic and microscopic detection.
Further, the detection module further comprises a machine vision system, a vision detection system, a vision positioning system, a character recognition detection system, a sensor, vision software and an image processing system, and is used for realizing the functions of gray scale stretching, brightness homogenization, positioning, contour matching, geometric transformation, polar coordinate conversion, manipulator control, contour defect comparison, intelligent size measurement, feature extraction judgment and color measurement.
Further, the working modes of the judging module comprise a manual judging mode and an automatic judging mode;
when the working mode is an automatic judgment mode, editing and inputting a qualified standard in advance to realize automatic online judgment of the product under inspection;
the judging module is also used for binding the judging information with the ID information of the inspected product.
Further, the storage CST is of a multi-layer structure, and a Sensor is arranged between each layer and used for judging whether a product exists in the layer or not; a plurality of supporting pins are uniformly arranged on each layer, and soft silica gel materials are adopted to protect the product from being scratched; the storage CST contains an ion bar inside for static elimination.
Further, the Robot comprises 2 arms, and a plurality of vacuum adsorption pins are uniformly distributed on each arm to prevent the products from falling off in the taking and transferring processes.
Furthermore, a plurality of adsorption holes are uniformly distributed on the detection working table surface, supports Pin which can be freely controlled up and down are arranged in the adsorption holes, the supports Pin are used for receiving the products transmitted by the Robot after being lifted, the supports Pin descend after the receiving is finished, and the products slowly fall on the table surface;
the detection workbench is also provided with a positioning connecting rod for calibrating the position of a product; the product is fixed on the detection workbench under the combined action of the positioning connecting rod and the adsorption hole, and the detection workbench is also used for realizing the forward and backward movement or the up and down turning of the product and adjusting the detection angle of the product.
Furthermore, the size of the positioning connecting rod can be adjusted according to the size of a product, and the product is clamped by adopting a four-point clamping structure, so that the product is protected from falling off while the position of the product is calibrated.
The invention also provides a detection method adopting the multifunctional silicon-based liquid crystal chip online detection system, which comprises the following steps:
step S1: the control module controls the product to be placed on the detection workbench;
step S2: the detection module detects the product according to a detection standard;
step S3: the judging unit receives the detection result, compares the detection result with a qualified standard, judges whether the product is qualified or not and records the judgment result;
step S4: the output module receives the detection result of the product and the corresponding judgment result, and feeds the judgment information related to the manufacturing process back to the front-end production line for adjusting the production scheme; and feeding back the judgment information related to the product types to the rear-end production line for grading the products according to the quality.
The multifunctional silicon-based liquid crystal chip on-line detection system and the method can be integrated into the existing silicon-based liquid crystal chip production line to realize on-line real-time detection; the method is suitable for detecting the silicon-based liquid crystal chips with various sizes; the temperature control unit is included, the detected temperature can be adjusted to be the actual use temperature, and the detection result is more accurate; the detection module can meet various detection requirements or standards of clients through adjustment, and has strong detection function; the product quality information can be fed back to the front end and the rear end of production in time, the detection efficiency and the accuracy are greatly improved, the generation of defective products is reduced, the cost of manufacturers is reduced, and the industry competitiveness is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic diagram showing the structure relationship of the multifunctional LCOS chip on-line detection system of the present invention;
FIG. 2 is a schematic diagram illustrating a structural relationship of an on-line testing system for a multi-functional LCOS chip according to an embodiment;
FIG. 3 is a schematic diagram of the structure of the storage CST;
FIG. 4 is a schematic diagram of the structure of Robot;
FIG. 5 is a schematic top view of the inspection stage and a schematic positioning rod;
FIG. 6 is a schematic structural diagram of a detection module;
FIG. 7 is a pictorial representation of normal temperature, high temperature (65 ℃) detection events;
fig. 8 is a picture showing detection phenomena corresponding to different functions of the light source system.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and do not limit the invention.
In order to make the description of the present disclosure more complete and complete, the following description is given for illustrative purposes with respect to the embodiments and examples of the present invention; it is not intended to be the only form in which the embodiments of the invention may be practiced or utilized. The embodiments are intended to cover the features of the various embodiments as well as the method steps and sequences for constructing and operating the embodiments. However, other embodiments may be utilized to achieve the same or equivalent functions and step sequences.
As shown in fig. 1, the structural relationship diagram of the multifunctional on-line detection system for liquid crystal on silicon chips of the present invention includes a control module, a detection module, a determination module, and an output module;
the control module is respectively electrically connected with the detection module, the judgment module and the output module and is used for controlling the work of the detection module, the judgment module and the output module;
the detection module is used for detecting incoming materials of the wafer and appearance, image quality and fixed point position of the packaged cell;
the judging module receives the detection result of the detection module, compares the detection result with a qualified standard, judges whether the product under inspection is qualified or not and records the judging result;
the output module receives the detection result of the product under inspection and the corresponding judgment result, and feeds the received information back to the front end and the rear end of the production line in a classified manner.
As shown in fig. 2, it is a schematic diagram of a structural relationship of the multifunctional on-line detection system for liquid crystal on silicon chip according to an embodiment, and further includes a storage CST, a Robot, a detection workbench, and a temperature control unit.
As shown in fig. 3, which is a schematic structural diagram of the storage CST, the storage CST serves as a storage relay Buffer of the product, and serves as a relay Buffer of the front-stage process and the rear-stage detection process, and is used for product relay and transient storage. The CST is stored in a multi-layer structure, and a Sensor is arranged between each layer and used for judging whether a product exists in the layer or not; a plurality of supporting pins are uniformly arranged on each layer, and soft silica gel materials are adopted to protect the product from being scratched; the interior of the storage CST contains ionic bar for static elimination.
As shown in FIG. 4, for Robot's structural diagram, Robot is used for taking and shifting of product, and Robot includes 2 arms from top to bottom, thereby gets one and puts and promote transmission efficiency, all equipartition a plurality of vacuum adsorption pins on every arm, can adsorb automatically after getting the product to prevent that the product from dropping the damage in the in-process of taking and shifting. In some preferred embodiments, a single arm can be attached to the Robot, and the front end of the Robot is a vacuum chuck, which can be used for gripping and transferring a single Cell.
As shown in fig. 5, which is a schematic view of a top view structure of a detection workbench, the detection workbench is a detection workbench top, a plurality of adsorption holes are uniformly distributed on the detection workbench top, support pins which can be freely controlled up and down are arranged in the adsorption holes, the support pins are raised to receive products conveyed by the Robot, and after receiving is completed, the support pins descend and the products slowly fall onto the workbench top. Still be equipped with the location connecting rod on the testing workbench for the position of calibration product, location connecting rod and absorption hole combined action fix the product on the testing workbench, and the testing workbench can carry out the back-and-forth movement or overturn from top to bottom according to the detection demand, cooperates the multi-angle detection demand of detection module. Wherein, the size of positioning connecting rod can be adjusted according to the size of product, adopts four point centre gripping structures to clip the product, has compatible all sizes of current wafer, can match 8 cun wafers, 12 cun wafers and the supporting demand of single Cell processing lines on-line measuring. The product can be accurately clamped on the detection workbench by the positioning connecting rod, and the product can be clamped, so that the detection workbench can be protected when moving. The product is transported to the inspection station as follows: before the product enters the detection workbench, the support Pin rises, the Robot sends the product into the detection workbench, the support Pin descends, the positioning connecting rod acts, after the product reaches the designated position, the adsorption hole starts to be vacuumized, the product is fixed on the detection workbench, and the next detection is prepared.
In some preferred embodiments, the detection device further comprises a temperature control unit, the temperature control unit is arranged in the detection workbench and used for adjusting the detection temperature of the detected product, for example, the detection temperature can be set according to the detection requirement from low temperature 0 ℃ → high temperature 65 ℃, a temperature Sensor can be synchronously arranged above the detection workbench, and the temperature can be measured and controlled in real time. When the temperature control unit is not used, the temperature control function of the temperature control unit can be closed, and the temperature of the workbench is detected and referred to the room temperature in the working environment. For example: customers require that the product normally works at a high temperature of 65 ℃, and in order to meet the requirement, a small amount of liquid crystal needs to be filled when the liquid crystal of the silicon-based panel is filled, so that the liquid crystal expands at the high temperature to reach the required box thickness; two detection states of normal temperature and high temperature are required in the production process. As shown in fig. 7, at normal temperature, the liquid crystal is not filled enough, and the panel is acted by its own gravity and atmospheric pressure, so that a newton ring with an obvious middle stroke is seen; the surface of the visible liquid crystal on silicon panel is uniform at high temperature, so that the requirement of customers is met, the temperature control unit can realize the normal-temperature and high-temperature detection states, and production technicians can confirm the phenomenon and adjust the production scheme at the first time.
As shown in fig. 6, the inspection module includes a light source system for providing an inspection light source for inspecting the crystal product, and a CCD camera having an on-line auto-zoom camera function for macro and micro inspection. The light source system can provide detection light sources ranging from ultraviolet light, visible light, to near infrared. The spot size can be from point light source, line light source, area light source, can also be equipped with and expand the beam, collimation system, can realize the amplification and the collimation function of point/line light source. Polarizers are provided to convert light output from a light source from a non-polarized state to linearly polarized light. As shown in fig. 8, the light source system can provide both composite lights of different wave bands and lights of single wavelength, and the point light source to the line light source and the line light source to the surface light source support, in addition, the beam expansion, collimation and polarization state conversion of the point light source, the line light source and the surface light source are supported, so as to achieve the purpose of detecting whether the surface of the liquid crystal on silicon product has defects or is intact under specific conditions. The CCD cameras can be divided into 2 working modes, manual detection of a single camera and automatic detection of a plurality of cameras, and each CCD camera can realize online automatic zooming shooting, so that the purpose of macroscopic and microscopic detection is achieved. Each part of light source system and CCD camera all is equipped with mechanical transmission structure, can realize the free transform of position and angle, and machine vision system, visual detection system, visual positioning system are cooperated again, and character recognition detecting system, sensor, vision software, image processing system can realize following function: gray level stretching, brightness homogenization, positioning, contour matching, geometric transformation, polar coordinate conversion, manipulator control, contour defect comparison, intelligent size measurement, feature extraction judgment, color measurement and the like. The functions of the light source system and the detection workbench are combined, and the online multifunctional detection requirement of the product can be met.
The working modes of the judging module comprise a manual judging mode and an automatic judging mode. When the working mode is the automatic judgment mode, the input qualified standard is edited in advance, and the automatic online judgment of the in-process product is realized. The judging module is also used for binding the judging information with the ID information of the inspected product. The output module receives the detection result of the product under inspection and the corresponding judgment result, and feeds the received information back to the front end and the rear end of the production line in a classified manner, and feeds the information related to the manufacturing process back to the front end at the first time, so that technicians can conveniently make corresponding judgment and adjustment of production schemes, and the problem of bad products is avoided from being developed in large batch; the information that will belong to product category feeds back the shipment information of rear end, and the purpose tells the rear end, classifies the packing according to product quality grade, realizes the categorised packing of non-defective products and substandard product, accurate shipment, prevents that bad flow from causing the injury to production and company reputation, reduces quality damage and yield loss that secondary operation caused.
The invention also provides a detection method adopting the multifunctional silicon-based liquid crystal chip online detection system, which comprises the following steps:
step S1: the control module controls the product to be placed on the detection workbench;
step S2: the detection module detects the product according to a detection standard;
step S3: the judging unit receives the detection result, compares the detection result with a qualified standard, judges whether the product is qualified or not and records the judgment result;
step S4: the output module receives the detection result of the product and the corresponding judgment result, and feeds the judgment information related to the manufacturing process back to the front-end production line for adjusting the production scheme; and feeding back the judgment information related to the product types to the rear-end production line for grading the products according to the quality.
The multifunctional silicon-based liquid crystal chip on-line detection system and the method can be integrated into the existing silicon-based liquid crystal chip production line to realize on-line real-time detection; the method is suitable for detecting the silicon-based liquid crystal chips with various sizes; the temperature control unit is included, the detected temperature can be adjusted to be the actual use temperature, and the detection result is more accurate; the detection module can meet various detection requirements or standards of clients through adjustment, and has strong detection function; the product quality information can be fed back to the front end and the rear end of production in time, the detection efficiency and the accuracy are greatly improved, the generation of defective products is reduced, the cost of manufacturers is reduced, and the industry competitiveness is improved.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (10)
1. The multifunctional silicon-based liquid crystal chip online detection system is characterized by comprising a control module, a detection module, a judgment module and an output module;
the control module is respectively electrically connected with the detection module, the judgment module and the output module and is used for controlling the work of the detection module, the judgment module and the output module;
the detection module is used for detecting incoming materials of the wafer and appearance, image quality and fixed point position of the packaged cell;
the judging module receives the detection result of the detection module, compares the detection result with a qualified standard, judges whether the product under inspection is qualified or not and records the judging result;
the output module receives the detection result of the product under inspection and the corresponding judgment result, and feeds the received information back to the front end and the rear end of the production line in a classified manner.
2. The on-line detection system of the multifunctional liquid crystal on silicon chip of claim 1, further comprising a storage CST, a Robot, a detection workbench, a temperature control unit;
the storage CST is used as a storage transfer buffer of the product and is used for transferring and temporarily storing the product; the Robot is used for taking and transferring products; the detection workbench is used for adjusting and fixing the position and the angle of a product; the temperature control unit is arranged in the detection workbench and used for adjusting the detection temperature of the product under detection;
and the storage CST, the Robot, the detection workbench and the temperature control unit respectively control the work of the storage CST, the Robot, the detection workbench and the temperature control unit through the control module.
3. The on-line detection system of the multifunctional liquid crystal on silicon chip of claim 1, wherein the detection module comprises a light source system and a CCD camera;
the light source system is used for providing a detection light source for detecting crystal products, and the CCD camera has an online automatic zooming camera shooting function and is used for macroscopic and microscopic detection.
4. The on-line detection system of the multifunctional liquid crystal on silicon chip of claim 3, wherein the detection module further comprises a machine vision system, a vision detection system, a vision positioning system, a character recognition detection system, a sensor, a vision software, and an image processing system, and is configured to implement functions of gray scale stretching, brightness homogenization, positioning, contour matching, geometric transformation, polar coordinate transformation, manipulator control, contour defect comparison, intelligent size measurement, feature extraction judgment, and color measurement.
5. The multifunctional liquid crystal on silicon chip on-line detection system of claim 1, wherein the operation mode of the determination module comprises a manual determination mode and an automatic determination mode;
when the working mode is an automatic judgment mode, editing and inputting a qualified standard in advance to realize automatic online judgment of the product under inspection;
the judging module is also used for binding the judging information with the ID information of the inspected product.
6. The on-line detection system of a multifunctional liquid crystal on silicon chip of claim 2, wherein the storage CST is a multi-layer structure, and a Sensor is arranged between each layer for determining whether a product is on the layer; a plurality of supporting pins are uniformly arranged on each layer, and soft silica gel materials are adopted to protect the product from being scratched; the storage CST contains an ion bar inside for static elimination.
7. The on-line detection system of the multifunctional liquid crystal on silicon chip of claim 2, wherein the Robot comprises 2 arms, and each arm is uniformly distributed with a plurality of vacuum adsorption pins to prevent the product from falling off during the taking and transferring process.
8. The on-line detection system of the multifunctional liquid crystal on silicon chip of claim 2, wherein a plurality of adsorption holes are uniformly distributed on the detection workbench, supports Pin which can be freely controlled up and down are arranged in the adsorption holes, the supports Pin are used for receiving the products transmitted by the Robot after being lifted up, and the supports Pin are descended after the receiving is finished, so that the products slowly fall onto the workbench;
the detection workbench is also provided with a positioning connecting rod for calibrating the position of a product; the product is fixed on the detection workbench under the combined action of the positioning connecting rod and the adsorption hole, and the detection workbench is also used for realizing the forward and backward movement or the up and down turning of the product and adjusting the detection angle of the product.
9. The on-line multifunctional liquid crystal on silicon chip detection system of claim 8, wherein the size of the positioning connecting rod can be adjusted according to the size of the product, and a four-point clamping structure is adopted to clamp the product, so that the product is protected from falling off while the position of the product is calibrated.
10. A testing method using the multifunctional liquid crystal on silicon chip on-line testing system according to any one of claims 1 to 9, comprising the following steps:
step S1: the control module controls the product to be placed on the detection workbench;
step S2: the detection module detects the product according to a detection standard;
step S3: the judging unit receives the detection result, compares the detection result with a qualified standard, judges whether the product is qualified or not and records the judgment result;
step S4: the output module receives the detection result of the product and the corresponding judgment result, and feeds the judgment information related to the manufacturing process back to the front-end production line for adjusting the production scheme; and feeding back the judgment information related to the product types to the rear-end production line for grading the products according to the quality.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113625155A (en) * | 2021-08-11 | 2021-11-09 | 湖南省计量检测研究院 | Multifunctional communication chip detection system based on big data |
| CN113625155B (en) * | 2021-08-11 | 2024-06-11 | 湖南省计量检测研究院 | Multifunctional communication chip detection system based on big data |
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