CN112853298A - Angle adjusting device of vacuum equipment - Google Patents
Angle adjusting device of vacuum equipment Download PDFInfo
- Publication number
- CN112853298A CN112853298A CN201911100410.2A CN201911100410A CN112853298A CN 112853298 A CN112853298 A CN 112853298A CN 201911100410 A CN201911100410 A CN 201911100410A CN 112853298 A CN112853298 A CN 112853298A
- Authority
- CN
- China
- Prior art keywords
- flange
- screw rod
- rod
- screw
- bellows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Manipulator (AREA)
Abstract
The invention discloses an angle adjusting device of vacuum equipment, which comprises: a base plate flange; fixing the rod; the coupler is connected with the other end of the fixed rod and is connected with the sample wafer table; a support frame; a support flange; a screw flange; the sliding block is arranged on the screw rod flange and is connected with the screw rod; the hand wheel is arranged on the support flange and penetrates through the bearing to be connected with one end of the screw rod; the corrugated pipe is arranged on the lower surface of the bottom plate flange and is coaxially connected with the lead screw flange; the connecting rod, the one end of connecting rod with bellows is connected, just the other end of connecting rod with the sample platform is connected, has realized carrying out angle modulation under the vacuum condition in not destroying the chamber, reduces the pollution that the chamber brought, and the angle modulation rate of accuracy is high's technological effect.
Description
Technical Field
The invention relates to the technical field of microelectronics, in particular to an angle adjusting device of vacuum equipment.
Background
Vacuum devices are devices that create, improve, and/or maintain a vacuum, including vacuum application devices and vacuum obtaining devices. At present, vacuum equipment is rapidly developed, is widely used in the field of microelectronics, and puts higher requirements on the design of a vacuum structure.
Because the angle in the manual regulation vacuum apparatus of cavity opening among the prior art causes and destroys the indoor vacuum environment of cavity, brings the pollution in the cavity, increases operating time, reduces production efficiency's technical problem.
Disclosure of Invention
The embodiment of the invention provides an angle adjusting device of vacuum equipment, which is used for solving the technical problems that in the prior art, the vacuum environment in a cavity is damaged due to the fact that the angle in the vacuum equipment is manually adjusted by opening the cavity, the pollution in the cavity is brought, the working time is increased, and the production efficiency is reduced, and the technical effects that the angle adjustment is carried out under the condition that the vacuum in the cavity is not damaged, the pollution caused by opening the cavity is reduced, and the angle adjusting accuracy is high are achieved.
In order to solve the above problem, an embodiment of the present invention provides an angle adjustment apparatus for a vacuum apparatus, the apparatus including: a base plate flange; one end of the fixed rod is vertically connected with the lower surface of the bottom plate flange; the coupler is connected with the other end of the fixed rod and is connected with the sample wafer table; the supporting frame is arranged on the upper surface of the bottom plate flange; the supporting flange is arranged at the top end of the supporting frame, and a bearing is connected in the supporting flange; the screw rod flange is connected with the support flange, and the screw rod is arranged in the screw rod flange; the sliding block is arranged on the screw rod flange and is connected with the screw rod; the hand wheel is arranged on the supporting flange and penetrates through the bearing to be connected with one end of the screw rod, wherein the hand wheel rotates to drive the screw rod to rotate, and the screw rod rotates to drive the sliding block to move up and down; the corrugated pipe is arranged on the lower surface of the bottom plate flange and is coaxially connected with the lead screw flange; and one end of the connecting rod is connected with the corrugated pipe, and the other end of the connecting rod is connected with the sample stage.
Preferably, the slider moves up and down to drive the screw rod flange to move, and the screw rod flange moves to drive the corrugated pipe to stretch.
Preferably, the bellows stretches and retracts to drive the sample stage connected with the connecting rod to rotate by taking the rotating shaft of the coupler as a center.
Preferably, the movement length of the lead screw is greater than the telescopic length of the bellows.
Preferably, the lead screw and the corrugated pipe have the same central axis, and the lead screw and the fixed rod are arranged in parallel.
Preferably, the lower surface of the base plate flange is smooth.
Preferably, the corrugated pipe is a welded corrugated pipe.
One or more technical solutions in the embodiments of the present invention at least have one or more of the following technical effects:
the embodiment of the invention provides an angle adjusting device of vacuum equipment, which comprises: a base plate flange; one end of the fixed rod is vertically connected with the lower surface of the bottom plate flange; the coupler is connected with the other end of the fixed rod and is connected with the sample wafer table; the supporting frame is arranged on the upper surface of the bottom plate flange; the supporting flange is arranged at the top end of the supporting frame, and a bearing is connected in the supporting flange; the screw rod flange is connected with the support flange, and the screw rod is arranged in the screw rod flange; the sliding block is arranged on the screw rod flange and is connected with the screw rod; the hand wheel is arranged on the supporting flange and penetrates through the bearing to be connected with one end of the screw rod, wherein the hand wheel rotates to drive the screw rod to rotate, and the screw rod rotates to drive the sliding block to move up and down; the corrugated pipe is arranged on the lower surface of the bottom plate flange and is coaxially connected with the lead screw flange; and one end of the connecting rod is connected with the corrugated pipe, and the other end of the connecting rod is connected with the sample stage. It is rotatory to drive the lead screw through rotating the hand wheel, slider up-and-down motion on the lead screw, lead screw flange motion through the slider connection drives the bellows and stretches out and draws back, when the bellows is flexible, it makes the sample platform use the shaft coupling pivot to be rotatory as the center to drive the connecting rod motion, realize sample platform angle modulation, the angle in the manual regulation vacuum apparatus of division chamber among the solution prior art, cause and destroy the indoor vacuum environment of chamber, bring pollution in the chamber, increase operating time, reduce production efficiency's technical problem, the realization is carried out angle modulation under the indoor vacuum condition of not destroying the chamber, reduce the pollution that the chamber brought, the technological effect that the angle modulation rate of accuracy is high.
The foregoing description is only an overview of the technical solutions of the present invention, and the embodiments of the present invention are described below in order to make the technical means of the present invention more clearly understood and to make the above and other objects, features, and advantages of the present invention more clearly understandable.
Drawings
FIG. 1 is a schematic structural diagram of an angle adjustment device of a vacuum apparatus in an embodiment of the present disclosure;
FIG. 2 is a schematic view illustrating angle calculation of an angle adjusting device of a vacuum apparatus according to an embodiment of the present disclosure;
description of reference numerals: the device comprises a bottom plate flange 1, a fixing rod 2, a coupler 3, a sample wafer table 4, a support frame 5, a support flange 6, a bearing 7, a hand wheel 8, a lead screw 9, a sliding block 10, a lead screw flange 11, a corrugated pipe 12 and a connecting rod 13.
Detailed Description
The embodiment of the invention provides an angle adjusting device of vacuum equipment, which is used for solving the technical problems that in the prior art, the vacuum environment in a cavity is damaged due to the fact that the angle in the vacuum equipment is manually adjusted by opening the cavity, the pollution in the cavity is brought, the working time is increased, and the production efficiency is reduced, and the technical effects that the angle adjustment is carried out under the condition that the vacuum in the cavity is not damaged, the pollution caused by opening the cavity is reduced, and the angle adjusting accuracy is high are achieved.
According to the technical scheme in the embodiment of the invention, the device adopts a bottom plate flange; one end of the fixed rod is vertically connected with the lower surface of the bottom plate flange; the coupler is connected with the other end of the fixed rod and is connected with the sample wafer table; the supporting frame is arranged on the upper surface of the bottom plate flange; the supporting flange is arranged at the top end of the supporting frame, and a bearing is connected in the supporting flange; the screw rod flange is connected with the support flange, and the screw rod is arranged in the screw rod flange; the sliding block is arranged on the screw rod flange and is connected with the screw rod; the hand wheel is arranged on the supporting flange and penetrates through the bearing to be connected with one end of the screw rod, wherein the hand wheel rotates to drive the screw rod to rotate, and the screw rod rotates to drive the sliding block to move up and down; the corrugated pipe is arranged on the lower surface of the bottom plate flange and is coaxially connected with the lead screw flange; the connecting rod, the one end of connecting rod with the bellows is connected, just the other end of connecting rod with the sample platform is connected, solves among the prior art angle in the manual regulation vacuum apparatus of division chamber, causes to destroy the interior vacuum environment of chamber, brings the intracavity and pollutes, increases operating time, reduces production efficiency's technical problem, has realized carrying out the angle modulation under the interior vacuum condition of not destroying the chamber, reduces the pollution that the division chamber brought, the technological effect that the angle modulation rate of accuracy is high.
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example one
An embodiment of the present invention provides an angle adjusting apparatus for a vacuum device, referring to fig. 1 and fig. 2, the apparatus includes:
a base plate flange 1; one end of the fixed rod 2 is vertically connected with the lower surface of the bottom plate flange 1; the coupler 3 is connected with the other end of the fixed rod 1, and the coupler 3 is connected with the sample wafer table 4;
further, the lower surface of the base plate flange 1 adopts a smooth surface.
Specifically, the angle adjusting device of the vacuum apparatus in the embodiment of the present application includes: the device comprises a bottom plate flange 1, a fixed rod 2, a coupler 3, a support frame 5, a support flange 6, a screw rod flange 11, a sliding block 10, a hand wheel 8, a corrugated pipe 12 and the like. Firstly, one end of the fixing rod 2 is vertically installed on the lower surface of the base plate flange 1, and the lower surface of the base plate flange 1 adopts a smooth surface for vacuum sealing of vacuum equipment. The fixing rod 2 is connected with the sample stage 4 through the coupler 3, and the coupler 3 can rotate.
The supporting frame 5 is arranged on the upper surface of the bottom plate flange 1; the supporting flange 6 is arranged at the top end of the supporting frame 5, and a bearing 7 is connected in the supporting flange 6; the screw rod flange 11 is connected with the support flange 6, and the screw rod 9 is arranged in the screw rod flange 11; the sliding block 10 is arranged on the screw rod flange 11, and the sliding block 10 is connected with the screw rod 9; the hand wheel 8 is arranged on the support flange 6, the hand wheel 8 penetrates through the bearing 7 and is connected with one end of the screw rod 9, the hand wheel 8 rotates to drive the screw rod 9 to rotate, and the screw rod 9 rotates to drive the sliding block 10 to move up and down;
specifically, the support frame 5 is provided on the upper surface of the floor flange 1, the support flange 6 is provided on the top end of the support frame 5, and the bearing 7 is mounted in the support flange 6. The hand wheel 8 is arranged on the supporting flange 6, the hand wheel 8 penetrates through the bearing 7 and is connected with one end of the screw rod 9, the sliding block 10 is arranged on the screw rod flange 11, the sliding block 10 is connected with the screw rod 9, and the sliding block 10 moves flexibly on the screw rod 9 and cannot be blocked. The screw rod flange 11 is connected with the support flange 6, and the screw rod 9 is arranged in the screw rod flange 11. When the hand wheel 8 is rotated, the hand wheel 8 rotates to drive the screw rod 9 to rotate, and the screw rod 9 rotates to drive the sliding block 10 to move up and down.
The corrugated pipe 12 is arranged on the lower surface of the bottom plate flange 1, and the corrugated pipe 12 is coaxially connected with the screw rod flange 11; and one end of the connecting rod 13 is connected with the corrugated pipe 12, and the other end of the connecting rod 13 is connected with the sample table 4.
Further, the slide block 10 moves up and down to drive the screw rod flange 11 to move, and the screw rod flange 11 moves to drive the corrugated pipe 12 to stretch. Furthermore, the bellows 12 stretches and retracts to drive the sample stage 4 connected with the connecting rod 13 to rotate around the rotating shaft of the coupler 3. Further, the movement length of the lead screw 9 is longer than the expansion length of the bellows 12. Further, the lead screw 9 and the corrugated pipe 12 have the same central axis, and the lead screw 9 and the fixing rod 2 are arranged in parallel. Further, the corrugated pipe 12 is a welded corrugated pipe.
Specifically, the corrugated tube 12 is disposed on the lower surface of the bottom plate flange 1, and the corrugated tube 12 is coaxially connected to the lead screw flange 11, that is, the lead screw 9 and the corrugated tube 12 have the same central axis, wherein the lead screw 9 is disposed in parallel with the fixed rod 2. One end of the connecting rod 13 is connected with the corrugated pipe 12, and the other end of the connecting rod 13 is connected with the sample stage 4. The corrugated pipe 12 is a welded corrugated pipe, is telescopic in length and is used for vacuum sealing. When the slide block 10 is under the rotation of the hand wheel 8, when the slide block 10 moves up and down, the slide block 10 drives the screw rod flange 11 to move, and the screw rod flange 11 moves to drive the corrugated pipe 12 to stretch, wherein the movement length of the screw rod 9 is greater than the stretching length of the corrugated pipe 12, and then the corrugated pipe 12 stretches and retracts to drive the sample stage 4 connected by the connecting rod 13 to rotate by taking the rotating shaft of the coupler 3 as the center, so that the angle adjustment of the sample stage 4 is realized.
The angle adjustment range of the sample stage 4 can be calculated by the moving distance H of the slide block 10. The required parameters are shown in fig. 2, the moving distance H of the slide block 10 is the distance between the connecting rod 13 and the bottom plate flange 1, and the distance L between the axis of the corrugated pipe 12 and the axis of the fixed rod 2 is calculated1Distance L between the bottom plate flange 1 and the rotating shaft of the coupler 32The sample stage 4 andthe distance L between the connecting point of the connecting rod 13 and the rotating shaft of the coupler 33The length L of the connecting rod 134An included angle alpha between the sample table 4 and the fixed rod 2 and an included angle beta between the connecting rod 13 and the corrugated pipe 12 are calculated according to sine theorem and cosine theorem, such as initial angle alpha1Starting distance H of said slider1End angle α2The end distance H of the slider movement2Obtaining the moving distance H of the slide block as H2-H1The adjusting angle alpha with the sample stage 4 is alpha2-α1The relationship (2) of (c).
The technical scheme provided in the embodiment of the application at least has the following technical effects or advantages:
the embodiment of the invention provides an angle adjusting device of vacuum equipment, which comprises: a base plate flange; one end of the fixed rod is vertically connected with the lower surface of the bottom plate flange; the coupler is connected with the other end of the fixed rod and is connected with the sample wafer table; the supporting frame is arranged on the upper surface of the bottom plate flange; the supporting flange is arranged at the top end of the supporting frame, and a bearing is connected in the supporting flange; the screw rod flange is connected with the support flange, and the screw rod is arranged in the screw rod flange; the sliding block is arranged on the screw rod flange and is connected with the screw rod; the hand wheel is arranged on the supporting flange and penetrates through the bearing to be connected with one end of the screw rod, wherein the hand wheel rotates to drive the screw rod to rotate, and the screw rod rotates to drive the sliding block to move up and down; the corrugated pipe is arranged on the lower surface of the bottom plate flange and is coaxially connected with the lead screw flange; the connecting rod, the one end of connecting rod with bellows connection, just the other end of connecting rod with the sample platform is connected, it is rotatory to drive the lead screw through rotating the hand wheel, slider up-and-down motion on the lead screw, it is flexible to drive the bellows through the lead screw flange motion that the slider is connected, when the bellows is flexible, it makes the sample platform use the shaft coupling pivot as the center rotation to drive the connecting rod motion, realize sample platform angle modulation, solve the angle in the manual regulation vacuum apparatus of division chamber among the prior art, cause and destroy the indoor vacuum environment of chamber, bring the pollution in the chamber, increase operating time, the technical problem of reduction production efficiency, the angle modulation is carried out under the indoor vacuum condition of not destroying the chamber, reduce the pollution that the division chamber brought, the technical effect that the angle modulation rate of accuracy.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including preferred embodiments and all such alterations and modifications as fall within the scope of the invention.
It will be apparent to those skilled in the art that various modifications and variations can be made in the embodiments of the present invention without departing from the spirit or scope of the embodiments of the invention. Thus, if such modifications and variations of the embodiments of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to encompass such modifications and variations.
Claims (7)
1. An angle adjusting apparatus of a vacuum apparatus, comprising:
a base plate flange;
one end of the fixed rod is vertically connected with the lower surface of the bottom plate flange;
the coupler is connected with the other end of the fixed rod and is connected with the sample wafer table;
the supporting frame is arranged on the upper surface of the bottom plate flange;
the supporting flange is arranged at the top end of the supporting frame, and a bearing is connected in the supporting flange;
the screw rod flange is connected with the support flange, and the screw rod is arranged in the screw rod flange;
the sliding block is arranged on the screw rod flange and is connected with the screw rod;
the hand wheel is arranged on the supporting flange and penetrates through the bearing to be connected with one end of the screw rod, wherein the hand wheel rotates to drive the screw rod to rotate, and the screw rod rotates to drive the sliding block to move up and down;
the corrugated pipe is arranged on the lower surface of the bottom plate flange and is coaxially connected with the lead screw flange;
and one end of the connecting rod is connected with the corrugated pipe, and the other end of the connecting rod is connected with the sample stage.
2. The apparatus of claim 1, wherein the up and down movement of the slider moves the lead screw flange and the movement of the lead screw flange moves the bellows.
3. The apparatus of claim 2, wherein the bellows extends and retracts to drive the sample stage connected to the connecting rod to rotate around a rotating shaft of the coupling.
4. The apparatus of claim 2, wherein the length of movement of the lead screw is greater than the bellows length.
5. The apparatus of claim 1, wherein the lead screw and the bellows have the same central axis, and the lead screw is disposed in parallel with the fixing rod.
6. The apparatus of claim 1 wherein the lower surface of the floor flange is smooth.
7. The apparatus of claim 1, wherein the bellows is a welded bellows.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911100410.2A CN112853298A (en) | 2019-11-12 | 2019-11-12 | Angle adjusting device of vacuum equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911100410.2A CN112853298A (en) | 2019-11-12 | 2019-11-12 | Angle adjusting device of vacuum equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112853298A true CN112853298A (en) | 2021-05-28 |
Family
ID=75984694
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911100410.2A Pending CN112853298A (en) | 2019-11-12 | 2019-11-12 | Angle adjusting device of vacuum equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112853298A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201410663Y (en) * | 2009-06-04 | 2010-02-24 | 大连齐维科技发展有限公司 | Ultra-high vacuum mechanism hand |
| CN201430500Y (en) * | 2009-06-30 | 2010-03-24 | 中国科学院沈阳科学仪器研制中心有限公司 | Precise heavy-load vacuum linear gatherer |
| CN201537921U (en) * | 2009-09-17 | 2010-08-04 | 宝山钢铁股份有限公司 | Auxiliary mechanical arm for sample handover of vacuum equipment |
| CN107742657A (en) * | 2017-11-16 | 2018-02-27 | 孝感正茂新能源科技有限公司 | A kind of novel solar battery plate |
| CN108762314A (en) * | 2018-03-23 | 2018-11-06 | 北京航空航天大学 | A kind of vacuum sealing displacement mechanism for the small force measuring device of super-conductive magnetic suspension |
| CN209368350U (en) * | 2018-12-12 | 2019-09-10 | 天津邦纳科技有限公司 | A kind of coating of optical lens protective device |
-
2019
- 2019-11-12 CN CN201911100410.2A patent/CN112853298A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201410663Y (en) * | 2009-06-04 | 2010-02-24 | 大连齐维科技发展有限公司 | Ultra-high vacuum mechanism hand |
| CN201430500Y (en) * | 2009-06-30 | 2010-03-24 | 中国科学院沈阳科学仪器研制中心有限公司 | Precise heavy-load vacuum linear gatherer |
| CN201537921U (en) * | 2009-09-17 | 2010-08-04 | 宝山钢铁股份有限公司 | Auxiliary mechanical arm for sample handover of vacuum equipment |
| CN107742657A (en) * | 2017-11-16 | 2018-02-27 | 孝感正茂新能源科技有限公司 | A kind of novel solar battery plate |
| CN108762314A (en) * | 2018-03-23 | 2018-11-06 | 北京航空航天大学 | A kind of vacuum sealing displacement mechanism for the small force measuring device of super-conductive magnetic suspension |
| CN209368350U (en) * | 2018-12-12 | 2019-09-10 | 天津邦纳科技有限公司 | A kind of coating of optical lens protective device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111036436B (en) | Spraying device is used in building tubular product processing | |
| CN112853298A (en) | Angle adjusting device of vacuum equipment | |
| CN112853299A (en) | Device for adjusting angle of sample table of vacuum equipment | |
| CN107289364A (en) | A kind of industrial Heavy Light for facilitating adjusting position | |
| CN105196029A (en) | Auxiliary disassembly-assembly device for deep-sea airtight cabin | |
| CN211057278U (en) | Lifting device for be used for single crystal growth | |
| CN104983191B (en) | A kind of Liftable type workbench | |
| CN207093934U (en) | A kind of interior decoration pipeline locating device | |
| CN214745136U (en) | Basement lighting device is used in construction in room | |
| CN210662097U (en) | Computer display support of height and angular adjustment | |
| CN214406312U (en) | Building operation sprays heat sink | |
| CN105675627B (en) | A kind of mobile unwheeling of the program-controlled X-ray production apparatus of large size | |
| CN209943876U (en) | Telescopic and stable projector hanging bracket | |
| CN207861318U (en) | A kind of electronic equipment rotating device | |
| CN215831469U (en) | Installation device for graphic image processing equipment | |
| CN213299020U (en) | Adjustable mounting bracket of pump valve | |
| CN107363777B (en) | For steam generator Manhole Sealing Joints gasket and the dismantling device of gasket pressing plate | |
| CN110369981A (en) | A kind of bearing automatic installation apparatus | |
| CN216555688U (en) | Pipeline support for municipal construction | |
| CN221041064U (en) | Semiconductor wafer transmission equipment suitable for multiple specifications | |
| CN218266265U (en) | Electric diaphragm pump with lubricating device | |
| CN214579289U (en) | Pressure pipeline overhauling equipment | |
| CN220513739U (en) | Energy-concerving and environment-protective dust device for municipal works | |
| CN210594635U (en) | Rotating arm for cable moving sliding frame | |
| CN104192314B (en) | A kind of with the multi-angle any aerial photography device of figure from process |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20210528 |