CN221041064U - Semiconductor wafer transmission equipment suitable for multiple specifications - Google Patents

Abstract

The utility model discloses semiconductor wafer transmission equipment suitable for multiple specifications, and relates to the technical field of semiconductor wafer transmission. The utility model comprises a control box and a bearing tray, wherein a mechanical arm is arranged on the upper surface of the control box. According to the utility model, through installing the threaded rod, the control motor can adjust the threaded rod to rotate forward or backward through the rotating shaft, the threaded rod is in threaded connection with the bearing tray, the bearing tray can be adjusted to slide left and right when the threaded rod rotates, the limit grooves, the connecting rods and other structures with the same structure are installed on two sides of the threaded rod, the connecting grooves are in sliding fit with the connecting rods, and meanwhile, the limit block is in sliding fit with the limit grooves, so that the bearing tray can be limited to move left and right, the telescopic distance of the bearing tray can be limited, the control motor drives the threaded rod to rotate when the bearing tray is used, the bearing tray is adjusted to stretch out or retract to reach a required position by arranging the structure, and the extension or retraction of the bearing tray can be adjusted according to the size specification of a wafer.

Description

Semiconductor wafer transmission equipment suitable for multiple specifications

Technical Field

The utility model belongs to the technical field of semiconductor wafer transmission, and particularly relates to semiconductor wafer transmission equipment suitable for multiple specifications.

Background

In the process of the production process, the wafer is required to pass through the processing processes of various machines, and the mechanical mechanism-the mechanical arm is used for bearing the wafer through the bearing device so as to convey the wafer to move among different processing machines, so that the wafer can not be damaged in the moving process, and the bearing structure on the conventional semiconductor wafer conveying equipment is fixed, so that the wafer conveying equipment is generally only suitable for wafers with one size specification, has insufficient applicability and has certain limitation.

Disclosure of utility model

The utility model aims to provide a semiconductor wafer transmission device suitable for multiple specifications, and solves the existing problems.

In order to solve the technical problems, the utility model is realized by the following technical scheme:

The utility model relates to semiconductor wafer transmission equipment suitable for multiple specifications, which comprises a control box and a bearing tray, wherein a mechanical arm is arranged on the upper surface of the control box, a mounting groove is formed in one side surface of the mechanical arm, a motor is welded on one side surface in the mounting groove, a rotating shaft is arranged on one side surface of the motor, a threaded rod is welded on one side surface of the rotating shaft, the bearing tray is in threaded connection with the peripheral side surface of the threaded rod, the bearing tray is in rotary fit with the threaded rod, a connecting groove is formed in one side surface of the bearing tray, a limiting groove is formed in one side surface of the connecting groove, and the connecting groove and the limiting groove are in a convex shape.

Preferably, the stopper is installed to a side in the spacing inslot, stopper and spacing groove sliding fit, stopper side welding has the connecting rod, connecting rod and spread groove sliding fit, stopper and connecting rod are "T" shape, through the installation threaded rod, the adjustable threaded rod forward of control motor through the axis of rotation or reverse rotation, utilize threaded rod and bear tray threaded connection, adjustable bear tray side-to-side slip when the threaded rod rotates, wherein the spacing groove of the same structure of threaded rod both sides installation, connecting rod and other structures, utilize spread groove and connecting rod sliding fit, utilize stopper and spacing groove sliding fit simultaneously, make it only left and right sides removal to bear tray removal restriction to can be to bear tray expansion distance restriction, control motor drive threaded rod rotates when using, it is flexible to adjust to bear the tray, it stretches out or withdraws to reach required position to bear the tray according to wafer size specification through setting up this structure.

Preferably, universal wheels and hydraulic devices are arranged on the lower surface of the control box, anti-skid blocks are welded on the lower surface of the hydraulic device, the hydraulic devices are arranged at the four corners of the lower surface of the control box, the control box is controlled to move when the hydraulic devices move, and the control box is supported by the anti-skid blocks under the control of the hydraulic devices when the hydraulic devices are fixed, so that the universal wheels can be fixed after leaving the ground, the control box can be stably placed through the structure, and the movement of the control box is not influenced.

The utility model has the following beneficial effects:

According to the utility model, through installing the threaded rod, the control motor can adjust the threaded rod to rotate forward or backward through the rotating shaft, the threaded rod is in threaded connection with the bearing tray, the bearing tray can be adjusted to slide left and right when the threaded rod rotates, the limit grooves, the connecting rods and other structures with the same structure are installed on two sides of the threaded rod, the connecting grooves are in sliding fit with the connecting rods, and meanwhile, the limit block is in sliding fit with the limit grooves, so that the bearing tray can be limited to move left and right, the telescopic distance of the bearing tray can be limited, the control motor drives the threaded rod to rotate when the bearing tray is used, the bearing tray is adjusted to stretch out or retract to reach a required position by arranging the structure, and the extension or retraction of the bearing tray can be adjusted according to the size specification of a wafer.

Of course, it is not necessary for any one product to practice the utility model to achieve all of the advantages set forth above at the same time.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed for the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of the overall structure of the present utility model;

FIG. 2 is a schematic diagram of a front view structure of the present utility model;

FIG. 3 is a right side view of the present utility model;

FIG. 4 is a schematic view of the cross-sectional structure A-A of FIG. 2;

Fig. 5 is a partial enlarged view of a portion a in fig. 4.

In the drawings, the list of components represented by the various numbers is as follows:

1. A control box; 2. a mechanical arm; 3. a mounting groove; 4. a motor; 5. a rotating shaft; 6. a threaded rod; 7. a carrying tray; 8. a connecting groove; 9. a limit groove; 10. a limiting block; 11. a connecting rod; 12. a universal wheel; 13. a hydraulic device; 14. an anti-skid block.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the description of the present utility model, it should be understood that the terms "upper," "middle," "outer," "inner," and the like indicate an orientation or a positional relationship, and are merely for convenience of describing the present utility model and simplifying the description, but do not indicate or imply that the components or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

As shown in fig. 1-5, the utility model relates to a semiconductor wafer transmission device suitable for multiple specifications, which comprises a control box 1 and a bearing tray 7, wherein a mechanical arm 2 is arranged on the upper surface of the control box 1, a mounting groove 3 is formed in one side of the mechanical arm 2, a motor 4 is welded on one side of the mounting groove 3, a rotating shaft 5 is arranged on one side of the motor 4, a threaded rod 6 is welded on one side of the rotating shaft 5, the bearing tray 7 is in threaded connection with the peripheral side of the threaded rod 6, the bearing tray 7 is in running fit with the threaded rod 6, a connecting groove 8 is formed in one side of the bearing tray 7, a limit groove 9 is formed in one side of the connecting groove 8, and the connecting groove 8 and the limit groove 9 are in a convex shape.

Wherein, stopper 10 is installed to a side in spacing groove 9, stopper 10 and spacing groove 9 sliding fit, stopper 10 side welding has connecting rod 11, connecting rod 11 and spread groove 8 sliding fit, stopper 10 and connecting rod 11 are "T" shape, through installing threaded rod 6, the adjustable threaded rod 6 forward of control motor 4 through axis of rotation 5 or reverse rotation, utilize threaded rod 6 and bear tray 7 threaded connection, adjustable bear tray 7 side-to-side slip when threaded rod 6 rotates, wherein spacing groove 9 of the same structure is installed to threaded rod 6 both sides, connecting rod 11 and other structures, utilize spread groove 8 and connecting rod 11 sliding fit, utilize stopper 10 and spacing groove 9 sliding fit simultaneously, make it only about to bear tray 7 removal restriction, and can be to bear tray 7 flexible distance restriction, control motor 4 drives threaded rod 6 rotation during the use, adjust and bear tray 7 flexible, can adjust and bear tray 7 to stretch out or retract to reach the required position according to wafer size specification through setting up this structure.

Wherein, control box 1 lower surface mounting has universal wheel 12 and hydraulic press 13, and hydraulic press 13 lower surface welding has non slipping spur 14, through installing hydraulic press 13, and its hydraulic press 13 is installed on the position of four angles of control box 1 lower surface, and control universal wheel 12 adjustable control box 1 removes when removing, control hydraulic press 13 promotes non slipping spur 14 when fixing device and props up control box 1, makes universal wheel 12 leave ground, can be fixed to it, can stably put control box 1 through setting up this structure, does not influence control box 1 and removes moreover.

As shown in fig. 1-5, the utility model is a semiconductor wafer transmission device suitable for multiple specifications, wherein the motor is preferably SZ-63S, when in use, the motor 4 is controlled to drive the threaded rod 6 to rotate, the carrying tray 7 is adjusted to stretch, and the carrying tray 7 is adjusted to stretch or retract to reach a required position according to the wafer size specification; through installation threaded rod 6, the control motor 4 is through the positive or reverse rotation of the adjustable threaded rod 6 of axis of rotation 5, utilize threaded rod 6 and bear tray 7 threaded connection, adjustable bear tray 7 left and right sides slip when threaded rod 6 rotates, wherein the spacing groove 9 of the same structure of threaded rod 6 both sides installation, connecting rod 11 and other structures, utilize spread groove 8 and connecting rod 11 sliding fit, utilize stopper 10 and spacing groove 9 sliding fit simultaneously, make it only left and right movement to bear tray 7 removal restriction, and can be to bearing tray 7 flexible distance restriction, control motor 4 drives threaded rod 6 rotation during the use, it is flexible to adjust to bear tray 7, can be according to wafer size specification regulation bear tray 7 and stretch out or retract to reach required position through setting up this structure.

In the description of the present specification, the descriptions of the terms "one embodiment," "example," "specific example," and the like, mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The preferred embodiments of the utility model disclosed above are intended only to assist in the explanation of the utility model. The preferred embodiments are not exhaustive or to limit the utility model to the precise form disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the utility model and the practical application, to thereby enable others skilled in the art to best understand and utilize the utility model. The utility model is limited only by the claims and the full scope and equivalents thereof.

Claims (7)

1. The utility model provides a semiconductor wafer transmission equipment suitable for many specifications, includes control box (1) and bears tray (7), its characterized in that: the utility model discloses a control box, including control box (1), control box (1) upper surface mounting has arm (2), arm (2) side is provided with mounting groove (3), a side welding has motor (4) in mounting groove (3), axis of rotation (5) are installed to motor (4) side, axis of rotation (5) side welding has threaded rod (6), threaded rod (6) week side threaded connection has and bears tray (7), bear tray (7) and threaded rod (6) normal running fit, it is provided with spread groove (8) to bear tray (7) side, a side is provided with spacing groove (9) in spread groove (8), spread groove (8) are "protruding" shape with spacing groove (9).

2. The semiconductor wafer transmission device suitable for multiple specifications according to claim 1, wherein a limiting block (10) is installed on one side surface in the limiting groove (9), and the limiting block (10) is in sliding fit with the limiting groove (9).

3. A semiconductor wafer transfer apparatus according to claim 2, wherein a connecting rod (11) is welded to one side of the stopper (10).

4. A semiconductor wafer transfer apparatus adapted for multiple sizes according to claim 3, characterized in that the connecting bars (11) are slidably fitted with the connecting grooves (8).

5. A semiconductor wafer transfer apparatus adapted for multiple specifications according to claim 4, wherein the stopper (10) and the connecting rod (11) are "T" shaped.

6. A semiconductor wafer transfer apparatus adapted for use in a plurality of specifications as claimed in claim 1, wherein the lower surface of the control box (1) is provided with a gimbal (12) and a hydraulic unit (13).

7. A semiconductor wafer transfer apparatus adapted for use in multiple specifications as claimed in claim 6, wherein the lower surface of the hydraulic means (13) is soldered with a non-slip block (14).