CN201430500Y - Precise heavy-load vacuum linear gatherer - Google Patents
Precise heavy-load vacuum linear gatherer Download PDFInfo
- Publication number
- CN201430500Y CN201430500Y CN2009200149858U CN200920014985U CN201430500Y CN 201430500 Y CN201430500 Y CN 201430500Y CN 2009200149858 U CN2009200149858 U CN 2009200149858U CN 200920014985 U CN200920014985 U CN 200920014985U CN 201430500 Y CN201430500 Y CN 201430500Y
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- China
- Prior art keywords
- screw
- flange
- connecting plate
- gatherer
- stepping motor
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- Expired - Fee Related
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Abstract
The utility model relates to a vacuum gatherer, in particular to a precise heavy-load vacuum linear gatherer, which comprises a linear stepping motor, a fixed plate, a knife-edge flange and a corrugated pipe, wherein the fixed plate is arranged on the knife-edge flange, the linear stepping motor is arranged on the fixed plate and provided with a screw rod as an output shaft, the screw rod is in threaded connection with a screw, and a connecting plate with a slide block is connected and linked with the screw; a hollow shaft is arranged the corrugated pipe, one end of the corrugated pipe is connected with the flange, one end of the hollow shaft passes through the flange, the other end of the corrugated pipe is connected with the connecting plate through a transitional plate and the screw rodis inserted into the other end of the hollow shaft; and the fixed plate is provided with a linear guide rail and the slide block reciprocates on the linear guide rail. The utility model adopts the linear steeping motor, integrates the screw rod in the motor, directly drives the screw rod to rotate, and reduces middle links and the assembly difficulty, and thereby the precision of the system is improved.
Description
Technical field
The utility model relates to the vacuum gatherer, specifically a kind ofly power is delivered to vacuum environment by atmospheric environment drives workpiece and realizes the heavily loaded vacuum straight line of the straight-line precision of high accuracy gatherer.
Background technology
At present, the structure of existing accurate vacuum introducing mechanism is made up of stepping motor, driver, coupling, ball reel (precision lead screw), ball screw (accurate screw), bearing, line slideway and welding bellows, through welding, being assembled.Workpiece is connected with bellows, and stepping motor links to each other with ball-screw by coupling, and behind the electrical power, driver provides pulse signal, the rotation of motor-driven leading screw, and the screw that promotes to be connected with welding bellows drives bellows and moves along line slideway.But, from the stepping motor to the leading screw, need shaft coupling connection, leading screw to need the bearings location, because link too much can cause the whole system precise decreasing, and also the excessive moment of flexure increase that also can cause load of installing space to line slideway, the precision of reduction system.
The utility model content
In order to solve the problems referred to above of existing vacuum introducing mechanism, the purpose of this utility model is to provide a kind of transmission accuracy height, accurate heavily loaded vacuum straight line gatherer that installing space is little, this device can make full use of the space and reduce moment of flexure, and has reduced intermediate link.
The purpose of this utility model is achieved through the following technical solutions:
The utility model comprises linear stepping motor, fixed head, edge of a knife flange and bellows, described fixed head is arranged on the edge of a knife flange, linear stepping motor is installed on the fixed head, linear stepping motor is provided with the leading screw as output shaft, the screw that has been threaded on the leading screw, the connecting plate that has slide block be connected with screw, with the screw interlock; Be provided with hollow shaft in the described bellows, an end of bellows links to each other with flange, an end of hollow shaft is passed by flange, and the other end of bellows is by rebound is connected with connecting plate, leading screw inserts hollow shaft the other end; Be provided with line slideway on fixed head, slide block moves back and forth on line slideway.
Wherein: described connecting plate is provided with the adjustment screw of regulating spacing between rebound and the connecting plate; Be connected with hold-down support on the described flange, an end of fixed head is threaded with hold-down support, and the other end is connected with motor cabinet, and linear stepping motor is installed on the motor cabinet; Described rebound is square, has a plurality of screwed holes on it, and the other end of bellows is connected with rebound by hexagon socket head cap screw, and connecting plate is connected with rebound by lock-screw.
Advantage of the present utility model and good effect are:
1. the utility model adopts linear stepping motor, leading screw is incorporated into motor internal, directly drive the leading screw rotation, so just can replace common stepping motor, coupling, ball-screw (precision lead screw), bearing, reduce intermediate link, reduced assembly difficulty, thereby improved the precision of system.
2. behind the employing linear stepping motor, no longer need parts such as coupling, bearing are installed, can reduce installing space effectively, and then reduce the moment of flexure that load produces.
3. the utility model can be adjusted driver part by adjustment screw, has guaranteed that the straight line of accurate heavy duty imports.
Description of drawings
Fig. 1 is a front view of the present utility model,
Fig. 2 is the A-A cutaway view of Fig. 1;
Wherein: 1 is flange, and 2 is hold-down support, and 3 is bellows, 4 is hollow shaft, and 5 is fixed head, and 6 is motor cabinet, 7 is linear stepping motor, and 8 is screw, and 9 is lock-screw, 10 is adjustment screw, and 11 is rebound, and 12 is hexagon socket head cap screw, 13 is connecting plate, 14 is slide block, and 15 is line slideway, and 16 is leading screw.
Embodiment
The utility model is described in further detail below in conjunction with accompanying drawing.
As shown in Figure 1 and Figure 2, the utility model comprises flange 1, hold-down support 2, bellows 3, hollow shaft 4, fixed head 5, motor cabinet 6, linear stepping motor 7, screw 8, rebound 11, connecting plate 13, slide block 14, line slideway 15 and leading screw 16, flange 1 is tightly connected with vacuum chamber, hold-down support 2 is fixedly mounted on the flange 1, one end of fixed head 5 is threaded, is convenient to dismounting with hold-down support 2, the other end is connected with motor cabinet 6, and linear stepping motor 7 is installed on the motor cabinet 6.The output shaft of linear stepping motor 7 is a leading screw 16, the screw 8 that has been threaded on the leading screw 16, and this screw 8 is affixed by screw and connecting plate 13, and the rotation output of linear stepping motor 7 becomes moving up and down of connecting plate 13 by screw 8 with being threaded of leading screw 16.Be connected with line slideway 15 on the fixed head 5, be connected with slide block 14 by screw on the connecting plate 13, slide block 14 is set on the line slideway 15, can move back and forth on line slideway 15.Be welded with hollow shaft 4 through argon arc welding in the bellows 3, an end of bellows is welded on the flange 1 by argon arc welding, and an end of hollow shaft 4 is passed, is connected with driver part by flange 1; The other end of bellows is connected with rebound 11 by hexagon socket head cap screw 12, and leading screw 16 inserts the other end of hollow shaft 4, and the hollow cavity of hollow shaft 4 is that leading screw 16 has been reserved motion and regulated the space.Rebound 11 is square, has a plurality of screwed holes on it; Rebound 11 be positioned at connecting plate 13 the below, be connected by lock-screw 9 with connecting plate 13.Also be provided with the adjustment screw 10 that to regulate spacing between itself and the rebound 11 on the connecting plate 13.
Operation principle of the present utility model is:
Linear stepping motor 7 work, driving leading screw 16 rotates, leading screw 16 is by making screw 8 rectilinear motions with being threaded of screw 8, and drive connecting plate 13 passes through slide block 14 along line slideway 15 easy motions, bellows 3 opens or shrinks, and realizes that by the driver part that is connected with hollow shaft 4 the vacuum straight line of accurate heavy duty imports.When the driver part position needs trace that is connected with hollow shaft 4 is adjusted, can turn on lock-screw 9, the spacing of using adjustment screw 10 to regulate rebound 11 and connecting plate 13 guarantees that the straight line of accurate heavy duty imports, fastening lock-screw 9 gets final product after adjusting.
Linear stepping motor of the present utility model is commercial product, purchases in the linear stepping motor of the hybrid 57000#external of Haidun Linear Motor's production; Flange 1 is a CF150 edge of a knife flange.
Claims (4)
1. the heavily loaded vacuum straight line of precision gatherer, it is characterized in that: comprise linear stepping motor (7), fixed head (5), edge of a knife flange (1) and bellows (3), described fixed head (5) is arranged on the edge of a knife flange (1), linear stepping motor (7) is installed on the fixed head (5), linear stepping motor (7) is provided with the leading screw (16) as output shaft, the screw (8) that has been threaded on the leading screw (16), the connecting plate (13) that has slide block (14) be connected with screw (8), with screw (8) interlock; Be provided with hollow shaft (4) in the described bellows (3), one end of bellows (3) links to each other with flange (1), an end of hollow shaft (4) is passed by flange (1), and the other end of bellows (3) is by rebound (11) is connected with connecting plate (13), leading screw (16) inserts hollow shaft (4) the other end; Be provided with line slideway (15) on fixed head (5), slide block (14) moves back and forth on line slideway (15).
2. by the heavily loaded vacuum straight line of the described precision of claim 1 gatherer, it is characterized in that: described connecting plate (13) is provided with the adjustment screw (10) of regulating spacing between rebound (11) and the connecting plate (13).
3. by the heavily loaded vacuum straight line of the described precision of claim 1 gatherer, it is characterized in that: be connected with hold-down support (2) on the described flange (1), one end of fixed head (5) is threaded with hold-down support (2), the other end is connected with motor cabinet (6), and linear stepping motor (7) is installed on the motor cabinet (6).
4. by the heavily loaded vacuum straight line of the described precision of claim 1 gatherer, it is characterized in that: described rebound (11) is for square, have a plurality of screwed holes on it, the other end of bellows (3) is connected with rebound (11) by hexagon socket head cap screw (12), and connecting plate (13) is connected with rebound (11) by lock-screw (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200149858U CN201430500Y (en) | 2009-06-30 | 2009-06-30 | Precise heavy-load vacuum linear gatherer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200149858U CN201430500Y (en) | 2009-06-30 | 2009-06-30 | Precise heavy-load vacuum linear gatherer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201430500Y true CN201430500Y (en) | 2010-03-24 |
Family
ID=42034239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009200149858U Expired - Fee Related CN201430500Y (en) | 2009-06-30 | 2009-06-30 | Precise heavy-load vacuum linear gatherer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201430500Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112853298A (en) * | 2019-11-12 | 2021-05-28 | 中国科学院微电子研究所 | Angle adjusting device of vacuum equipment |
| CN112853299A (en) * | 2019-11-12 | 2021-05-28 | 中国科学院微电子研究所 | Device for adjusting angle of sample table of vacuum equipment |
-
2009
- 2009-06-30 CN CN2009200149858U patent/CN201430500Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112853298A (en) * | 2019-11-12 | 2021-05-28 | 中国科学院微电子研究所 | Angle adjusting device of vacuum equipment |
| CN112853299A (en) * | 2019-11-12 | 2021-05-28 | 中国科学院微电子研究所 | Device for adjusting angle of sample table of vacuum equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: CAS SHENYANG SCIENTIFIC INSTRUMENTS CO., LTD. Free format text: FORMER NAME: SHENYANG SCIENTIFIC INSTRUMENT RESEARCH + MFG. CENTER CO., LTD., C.A.S |
|
| CP03 | Change of name, title or address |
Address after: Hunnan Shenyang 110197 Liaoning province Xinyuan street, No. 1 Patentee after: Shenyang Scientific Apparatus Co., Ltd. of Chinese Academy of Sciences Address before: Xinyuan street Shenyang Hunnan New District of 110168 cities in Liaoning province. Patentee before: Shenyang Scientific Instrument Research & Mfg. Center Co., Ltd., C.A.S |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100324 Termination date: 20150630 |
|
| EXPY | Termination of patent right or utility model |