CN201537921U - Auxiliary mechanical arm for sample handover of vacuum equipment - Google Patents
Auxiliary mechanical arm for sample handover of vacuum equipment Download PDFInfo
- Publication number
- CN201537921U CN201537921U CN2009202088346U CN200920208834U CN201537921U CN 201537921 U CN201537921 U CN 201537921U CN 2009202088346 U CN2009202088346 U CN 2009202088346U CN 200920208834 U CN200920208834 U CN 200920208834U CN 201537921 U CN201537921 U CN 201537921U
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- flange
- driving lever
- vacuum equipment
- longitudinal carrier
- handle
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- Sampling And Sample Adjustment (AREA)
Abstract
The utility model discloses an auxiliary mechanical arm for the sample handover of vacuum equipment. The mechanical arm comprises a flange, a corrugated pipe, a shifting lever, a handle and an adjusting mechanism for adjusting and locking the shifting lever. The adjusting mechanism is arranged between the corrugated pipe and the handle and is fixed with the flange. The adjusting mechanism can carry out adjustment in the Z-axis and Y-axis directions on the shifting lever, can be self-locked immediately by the screw thread, not only can accurately and effectively compensate the bias of an internal magnetic transfer rod in the Z-axis and Y-axis directions, but also can be convenient for the single person to operation and improves the working efficiency. Moreover, the rolling friction with the internal magnetic transfer rod is realized by additionally arranging the bearing so as to reduce the resistance of the shifting lever and the abrasion of the internal magnetic transfer rod.
Description
Technical field
The utility model relates to manipulator, more particularly, relates to a kind of vacuum equipment sample handing-over auxiliary manipulator.
Background technology
At present, the vacuum equipment of employing magnetic force transmission mechanism handing-over sample, long heavier for solving apart from bar self and sample in transmission or the magnetic force transmission, and the excessive problem that departs from level of transmitting that causes of the amount of deflection that causes, generally all be equipped with manipulator, play the effect of auxiliary sample transmission handing-over.See also shown in Figure 1, usually bar 1 in the magnetic force that this type of manipulator 10 generally comprises flange 11, the bellows 12, the end that are fixed in flange 11 1 sides is used to support the sample transmission mechanism transmits, the handle 14 that the other end passes the driving lever 13 of flange 11 and bellows 12 and is located at driving lever 13 traversing through end and fuses with bellows 12.There is following shortcoming in this manipulator 10 in actual use:
At first, because bar 1 was typical cantilever beam in magnetic force transmitted, when it moves the distance of transmission when big along the X axis direction, bar 1 overhanging long meeting causes the amount of deflection that departs from level excessive in the magnetic force transmission, like this, even supporting adjusting by bellows 12 also can show because of locking and not have relevant scale immediately, to such an extent as to the vertical deviation (Z-direction) that the front end clamping hand of bar 1 produces in can't transmitting magnetic force is accurately regulated and is locked, finally be unfavorable for the long distance handing-over quick and precisely of sample, and when transmitting heavier sample, bar 1 generation departs from the amount of deflection of level in the magnetic force transmission because example weight also makes easily, thereby also can't be implemented in the accurate location on the Z-direction; Secondly and since can't regulate magnetic force transmit in the front and back amplitude of oscillation (Y direction) of bar 1 in horizontal plane, cause easily the clamping hand be the sample center not on the straight line that each station forms, thereby increased the difficulty of sample handing-over; Once more, be sliding friction, not only increased the handing-over resistance, but also quickened the wearing and tearing of bar 1 in the magnetic force transmission because magnetic force transmits between interior bar 1 and the driving lever 13; In addition, also there is operation inconvenience in this manipulator, needs two people's close fit to operate, and has influenced shortcomings such as operating efficiency.
The utility model content
At the above-mentioned shortcoming that exists in the prior art, the purpose of this utility model provides a kind of vacuum equipment sample handing-over auxiliary manipulator, and this manipulator can improve accurately to be regulated and compensate the magnetic force transmission mechanism of vacuum equipment.
For achieving the above object, the utility model adopts following technical scheme:
This vacuum equipment sample handing-over auxiliary manipulator, bellows, an end that comprise flange, is fixed in flange one side be used to support magnetic force transmit in bar, the handle that the other end passes the driving lever of flange and bellows and is located at the driving lever traversing through end, this manipulator also comprises the governor motion that is used to regulate and lock driving lever, this governor motion is located between bellows and the handle, and fixes with flange.
Described governor motion comprises Z to regulating parts, and Z comprises longitudinal carrier and regulate bolt that to regulating parts vertically have guide groove on the longitudinal carrier, described driving lever passes guide groove and links to each other with the handle of being located at longitudinal carrier one side; Regulate bolt one end and insert in the guide groove, and offset with driving lever.
Described governor motion also comprises Y to regulating parts, and Y comprises guiding polished rod, horizontal support and screw mandrel to regulating parts, and guiding polished rod one end is fixed on the flange, and the other end is horizontally through longitudinal carrier; Horizontal support one end also is fixed on the flange; Screw mandrel one end is horizontally through horizontal support and longitudinal carrier successively, and the other end is connected with rotary driving part.
Also be respectively equipped with the vertical and horizontal scale on described longitudinal carrier and the horizontal support.
The support end of described driving lever also is provided with and can transmits the bearing that interior bar rolls and contacts with magnetic force.
In technique scheme, vacuum equipment sample handing-over auxiliary manipulator of the present utility model comprises flange, bellows, driving lever and handle, and this manipulator also comprises the governor motion that is used to regulate and lock driving lever, this governor motion is located between bellows and the handle, and fixes with flange.Can carry out adjusting on Z axle and the Y direction to driving lever by governor motion, and by the instant self-locking of screw thread, not only can accurately, effectively compensate magnetic force and transmit the interior deviation of bar on Z axle and Y direction, but also can make things convenient for the one man operation, improve operating efficiency.In addition, realize transmitting the rolling friction of interior bar, reduced the wearing and tearing of bar in the transmission of driving lever resistance and magnetic force with magnetic force by setting up bearing.
Description of drawings
Fig. 1 is the structural representation of conventional robot;
Fig. 2 is the structural representation of vacuum equipment sample handing-over auxiliary manipulator of the present utility model;
Fig. 3 is that the B of longitudinal carrier among Fig. 2 is to schematic diagram;
Fig. 4 is the A portion enlarged diagram among Fig. 2.
The specific embodiment
Further specify the technical solution of the utility model below in conjunction with drawings and Examples.
See also Fig. 2～shown in Figure 4, vacuum equipment sample handing-over auxiliary manipulator 20 of the present utility model is basic identical with prior art, bar 1 in the magnetic force that bellows 22, an end that comprise flange 21 equally, is fixed in flange 21 1 sides is used to support the sample transmission mechanism transmits, the handle 24 that the other end passes the driving lever 23 of flange 21 and bellows 22 and is located at driving lever 23 traversing through end.Different is, this manipulator 20 also comprises the governor motion that is used to regulate and lock driving lever 23, and this governor motion is located between bellows 22 and the handle 24, and fixes with flange 21.This governor motion comprises a Z to regulating parts, and this Z comprises longitudinal carrier 25 and regulate bolt 26 that to regulating parts vertically have guide groove 251 on the longitudinal carrier 25, described driving lever 23 passes guide groove 251 and links to each other with the handle 24 of being located at longitudinal carrier 25 1 sides; Regulate bolt 26 1 ends and insert in the guide groove 251, and offset with driving lever 23.This governor motion also comprises a Y to regulating parts, and this Y comprises guiding polished rod 27, horizontal support 28 and screw mandrel 29 to regulating parts, and guiding polished rod 27 1 ends are fixed on the flange 21, and the other end is horizontally through longitudinal carrier 25; Horizontal support 28 1 ends also are fixed on the flange 21; Screw mandrel 29 1 ends are horizontally through horizontal support 28 and longitudinal carrier 25 successively, and the other end is connected with rotary driving part, and this rotary driving part can or be connected with the motor 293 of switch board 292 for mechanical handwheel 291.On longitudinal carrier 25 and horizontal support 28, also be respectively equipped with vertical and horizontal scale 252,281, be used for the precise quantification of the amplitude of accommodation.In addition, the support end of described driving lever 23 also is provided with and can transmits the bearing 231 that interior bar 1 rolls and contacts with magnetic force, thereby changes traditional sliding friction into rolling friction, thereby helps reducing the resistance of driving lever 23 and the wearing and tearing that magnetic force transmits interior bar 1.
This manipulator 20 plays the booster action of magnetic force transmission mechanism when the handing-over sample of vacuum equipment, its operation principle is as follows: during work, the sample clamping that at first sample is placed on magnetic force transmission mechanism front end (need to prove on hand, sample clamping hand promptly is fixed on the front end that magnetic force transmits interior bar 1), when sample is delivered to the vacuum chamber far-end, because bar 1 is influenced by itself and example weight in the magnetic force transmission, can cause the downward deviation of sample clamping hand on Z-direction, when bar 1 arrives manipulator 20 stations and needs support in magnetic force transmits, press down driving lever 23 by Z to the adjusting bolt 26 of regulating parts, making driving lever 23 support ends obtain to support by bellows 22 and flange 21 upwarps, thereby support magnetic force and transmit interior bar 1, thereby the deviation on the Z-direction is effectively compensated.In like manner, for bar 1 in the magnetic force transmission on Y direction swing and cause and the deviation of sample handing-over can effectively compensate to regulating parts to the swing deviation on the Y direction by Y.Because the threaded engagement form has all been adopted in the adjusting on two directions, therefore in adjustment process, can carry out instant self-locking, thereby greatly facilitate operation, the whole operation process only needs a people just can finish.
Those of ordinary skill in the art will be appreciated that, above embodiment is used for illustrating the utility model, and be not to be used as qualification of the present utility model, as long as in connotation scope of the present utility model, all will drop in claims scope of the present utility model variation, the modification of the above embodiment.
Claims (5)
1. vacuum equipment sample handing-over auxiliary manipulator, bellows, an end that comprise flange, is fixed in flange one side be used to support magnetic force transmit in bar, the handle that the other end passes the driving lever of flange and bellows and is located at the driving lever traversing through end is characterized in that:
This manipulator also comprises the governor motion that is used to regulate and lock driving lever, and this governor motion is located between bellows and the handle, and fixes with flange.
2. vacuum equipment sample handing-over auxiliary manipulator as claimed in claim 1 is characterized in that:
Described governor motion comprises Z to regulating parts, and Z comprises longitudinal carrier and regulate bolt that to regulating parts vertically have guide groove on the longitudinal carrier, described driving lever passes guide groove and links to each other with the handle of being located at longitudinal carrier one side; Regulate bolt one end and insert in the guide groove, and offset with driving lever.
3. vacuum equipment sample handing-over auxiliary manipulator as claimed in claim 2 is characterized in that:
Described governor motion also comprises Y to regulating parts, and Y comprises guiding polished rod, horizontal support and screw mandrel to regulating parts, and guiding polished rod one end is fixed on the flange, and the other end is horizontally through longitudinal carrier; Horizontal support one end also is fixed on the flange; Screw mandrel one end is horizontally through horizontal support and longitudinal carrier successively, and the other end is connected with rotary driving part.
4. vacuum equipment sample handing-over auxiliary manipulator as claimed in claim 3 is characterized in that:
Also be respectively equipped with the vertical and horizontal scale on described longitudinal carrier and the horizontal support.
5. vacuum equipment sample handing-over auxiliary manipulator as claimed in claim 1 is characterized in that:
The support end of described driving lever also is provided with and can transmits the bearing that interior bar rolls and contacts with magnetic force.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202088346U CN201537921U (en) | 2009-09-17 | 2009-09-17 | Auxiliary mechanical arm for sample handover of vacuum equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202088346U CN201537921U (en) | 2009-09-17 | 2009-09-17 | Auxiliary mechanical arm for sample handover of vacuum equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201537921U true CN201537921U (en) | 2010-08-04 |
Family
ID=42589375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009202088346U Expired - Fee Related CN201537921U (en) | 2009-09-17 | 2009-09-17 | Auxiliary mechanical arm for sample handover of vacuum equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201537921U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102152318A (en) * | 2011-05-04 | 2011-08-17 | 中国科学院等离子体物理研究所 | Robot drive mechanism used in high temperature vacuum environment |
| CN104914264A (en) * | 2015-06-30 | 2015-09-16 | 北京中科科仪股份有限公司 | Vacuum sample transfer device |
| CN112853298A (en) * | 2019-11-12 | 2021-05-28 | 中国科学院微电子研究所 | Angle adjusting device of vacuum equipment |
| CN116443568A (en) * | 2023-06-16 | 2023-07-18 | 中国科学院沈阳科学仪器股份有限公司 | Large-scale vacuum mechanical arm |
-
2009
- 2009-09-17 CN CN2009202088346U patent/CN201537921U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102152318A (en) * | 2011-05-04 | 2011-08-17 | 中国科学院等离子体物理研究所 | Robot drive mechanism used in high temperature vacuum environment |
| CN102152318B (en) * | 2011-05-04 | 2012-07-11 | 中国科学院等离子体物理研究所 | Robot drive mechanism used in high temperature vacuum environment |
| CN104914264A (en) * | 2015-06-30 | 2015-09-16 | 北京中科科仪股份有限公司 | Vacuum sample transfer device |
| CN112853298A (en) * | 2019-11-12 | 2021-05-28 | 中国科学院微电子研究所 | Angle adjusting device of vacuum equipment |
| CN116443568A (en) * | 2023-06-16 | 2023-07-18 | 中国科学院沈阳科学仪器股份有限公司 | Large-scale vacuum mechanical arm |
| CN116443568B (en) * | 2023-06-16 | 2023-08-22 | 中国科学院沈阳科学仪器股份有限公司 | Large-scale vacuum mechanical arm |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100804 Termination date: 20160917 |