CN112833661A - Vertical high-temperature oxidation annealing furnace - Google Patents

Vertical high-temperature oxidation annealing furnace Download PDF

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Publication number
CN112833661A
CN112833661A CN202110191565.2A CN202110191565A CN112833661A CN 112833661 A CN112833661 A CN 112833661A CN 202110191565 A CN202110191565 A CN 202110191565A CN 112833661 A CN112833661 A CN 112833661A
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China
Prior art keywords
furnace
tube
vacuum
chamber
door
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Pending
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CN202110191565.2A
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Chinese (zh)
Inventor
宋立禄
张海林
吴季浩
滕玉朋
刘国霞
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Sairuida intelligent electronic equipment (Wuxi) Co.,Ltd.
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Qingdao Sunred Electronic Equipment Co ltd
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Priority to CN202110191565.2A priority Critical patent/CN112833661A/en
Publication of CN112833661A publication Critical patent/CN112833661A/en
Pending legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B1/00—Shaft or like vertical or substantially vertical furnaces
    • F27B1/08—Shaft or like vertical or substantially vertical furnaces heated otherwise than by solid fuel mixed with charge
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B1/00—Shaft or like vertical or substantially vertical furnaces
    • F27B1/005—Shaft or like vertical or substantially vertical furnaces wherein no smelting of the charge occurs, e.g. calcining or sintering furnaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B1/00—Shaft or like vertical or substantially vertical furnaces
    • F27B1/10—Details, accessories, or equipment peculiar to furnaces of these types
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B1/00—Shaft or like vertical or substantially vertical furnaces
    • F27B1/10—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B1/12—Shells or casings; Supports therefor
    • F27B1/14—Arrangements of linings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B1/00—Shaft or like vertical or substantially vertical furnaces
    • F27B1/10—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B1/28—Arrangements of monitoring devices, of indicators, of alarm devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D1/00—Casings; Linings; Walls; Roofs
    • F27D1/18—Door frames; Doors, lids, removable covers
    • F27D1/1858—Doors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D11/00—Arrangement of elements for electric heating in or on furnaces
    • F27D11/08—Heating by electric discharge, e.g. arc discharge
    • F27D11/10—Disposition of electrodes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
    • F27D2007/063—Special atmospheres, e.g. high pressure atmospheres
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
    • F27D2007/066—Vacuum

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)

Abstract

The invention relates to a vertical high-temperature oxidation annealing furnace, which comprises: the furnace comprises a vacuum sealing hearth and a furnace door chamber connected with the vacuum sealing hearth through a furnace bottom flange, wherein an opening at the bottom of the furnace door chamber is sealed through a furnace door, a heat insulation layer is arranged in the vacuum sealing hearth, a heating cavity is formed between the heat insulation layer and a process furnace tube, and a heater is arranged in the heating cavity; the process furnace tube, the furnace bottom flange, the furnace door chamber and the furnace door are sealed to form a process cavity; a furnace shell vacuum tube and a furnace shell air inlet tube are respectively arranged through the heat preservation layer and the furnace shell; a process cavity vacuum tube is arranged on one side of the furnace door chamber, and a process cavity air inlet tube is arranged on the other side of the furnace door chamber. According to the invention, the furnace bottom heat-insulating layer, the furnace shell heat-insulating layer and the furnace cover heat-insulating layer are arranged in the vacuum sealed hearth, the furnace cover heat-insulating layer and the furnace cover are internally consolidated into a whole, and three groups of heat-insulating layers in the furnace shell form a closed heat-insulating cavity, so that the temperature of the vertical high-temperature oxidation furnace heated to the temperature can be stably maintained, and the energy consumption is reduced.

Description

Vertical high-temperature oxidation annealing furnace
Technical Field
The invention relates to the technical field of oxidation and annealing furnaces, in particular to a vertical high-temperature oxidation and annealing furnace.
Background
SIC is a typical representative of third-generation semiconductor materials, and is an extremely ideal semiconductor material in high-temperature, high-frequency, radiation-resistant and high-power application occasions; because the silicon carbide power device can obviously reduce the energy consumption of electronic equipment, the silicon carbide device is also known as a green energy device which drives the 'new energy revolution'. The technological process of diffusion, oxidation, annealing and the like of the SIC material is mainly characterized in that high temperature or vacuum heating and process gas conditions are required, particularly the high temperature is generally 1400-2000 ℃, which cannot be realized by the components of the structure, the mode, the material and the like of a heater and a process chamber of the prior second-generation semiconductor equipment with the working temperature of 800-.
Therefore, it is necessary to provide a vertical high temperature oxidation annealing furnace to solve the above problems.
Disclosure of Invention
In order to solve the technical problems, the invention provides a vertical high-temperature oxidation annealing furnace which has multiple functions of high-temperature heating, strong heat preservation, automatic piece taking, closed vacuum process cavity building and the like.
The invention provides a vertical high-temperature oxidation annealing furnace, which comprises: the vacuum sealing furnace hearth is a space formed by sealing a furnace shell, a furnace cover, a furnace bottom flange and a process furnace tube, the process furnace tube is pressed on the bottom surface of the furnace bottom flange through a pressing flange, sealing rings are arranged between the furnace shell and the furnace cover, between the furnace shell and the furnace bottom flange and between the furnace door chamber and the furnace bottom flange, a heat insulation layer is arranged in the vacuum sealing furnace hearth, a heating cavity is formed between the heat insulation layer and the process furnace tube, and a heater is arranged in the heating cavity;
the process furnace tube, the furnace bottom flange, the furnace door chamber and the furnace door are sealed to form a process cavity for carrying out the process of the process sheet;
the furnace shell vacuum pipe penetrates through the heat-insulating layer and the furnace shell and is used for realizing the vacuum state of the vacuum sealed hearth, and the furnace shell air inlet pipe is used for filling inert gas into the vacuum sealed hearth;
a process cavity vacuum tube is arranged on one side of the furnace door chamber and penetrates through the furnace door chamber for realizing the vacuum state of the process cavity, a process cavity air inlet tube is arranged on the other side of the furnace door chamber and is used for filling process gas into the process cavity, and a process cavity air outlet tube is used for discharging gas generated in the process.
As an improvement, the vertical high-temperature oxidation and annealing furnace further comprises a lifting mechanism and a manipulator which are arranged at the lower end of the vacuum sealed furnace chamber, wherein a furnace door supporting and mounting seat is arranged on the lifting mechanism and used for mounting the furnace door and driving the furnace door to move up and down through the lifting mechanism, and the manipulator is used for taking and placing the process sheet when the furnace door moves to the lower working limit position through the lifting mechanism.
As an improvement, an elastic element is arranged between the oven door supporting and mounting seat and the oven door and is used for sealing the process cavity when the oven door moves to the upper working limit position through the lifting mechanism.
As an improvement, the heat preservation layer is formed by fixedly connecting a furnace cover heat preservation layer, a furnace shell heat preservation layer and a furnace bottom heat preservation layer in a stepped mode, and the heater is hung in the heating cavity through a heater electrode penetrating through the furnace cover and the furnace cover heat preservation layer.
As an improvement, an electrode water-cooling sealing sleeve is sleeved at the outer end of the heater electrode furnace, the heater electrode and the electrode water-cooling sealing sleeve are sealed through a sealing ring, the electrode water-cooling sealing sleeve is fixedly connected with the furnace cover through the sealing ring, and a wiring device is further arranged outside the upper end of the heater electrode and used for an external power supply.
As an improvement, a heat insulation layer, a heat insulation screen, a bearing material tray and a sheet boat are sequentially arranged in the process cavity from bottom to top under the load of the furnace door, and the process sheet is inserted on the sheet boat.
As an improvement, the heat insulation layer is a quartz heat insulation bag, and the heat insulation screen is a layered heat insulation sheet assembly.
As an improvement, an inner thermal control couple is hermetically installed on the inner wall of a cylinder of the furnace door chamber, the inner thermal control couple vertically extends to a working area of the process furnace tube along one side of the inner surface of the process furnace tube, an outer thermal control couple penetrates through the furnace cover and the heat insulation layer, a thermal couple water-cooling sealing seat is sleeved at the outer end of the outer thermal control couple, the water-cooling sealing seat and the outer thermal control couple are sealed through a sealing ring, and the water-cooling sealing seat is fixedly connected with the furnace cover through the sealing ring.
As an improvement, the process chamber gas inlet pipe vertically extends to the top of the working area of the process furnace pipe along one side of the inner surface of the process furnace pipe.
As a refinement, the inert gas comprises one of Ar2 or N2.
Compared with the prior art, the vertical high-temperature oxidation furnace provided by the invention has the following beneficial effects:
(1) according to the vertical high-temperature oxidation and annealing furnace provided by the invention, the furnace bottom heat-insulating layer, the furnace shell heat-insulating layer and the furnace cover heat-insulating layer are arranged in the vacuum sealed hearth, the furnace cover heat-insulating layer and the furnace cover are internally and fixedly integrated, the three groups of heat-insulating layers in the furnace shell form a closed heat-insulating cavity, and the three groups of heat-insulating joint surfaces are arranged into a step-shaped joint surface, so that the internal temperature is prevented from being diffused from the joint surface, the temperature reached by heating of the vertical high-temperature oxidation furnace can be stably maintained, and the energy.
(2) According to the vertical high-temperature oxidation annealing furnace, the vacuum sealed hearth and the process chamber are in an oxygen-free state through the design of the vacuum pipeline, and inert gas and process gas are respectively filled in the vacuum sealed hearth and the process chamber, so that a heater is effectively protected, and the purity of a process sheet in a process is ensured.
(3) According to the vertical high-temperature oxidation annealing furnace, the temperature of the chamber is measured by arranging the inner thermocouple and the outer thermocouple, so that the temperature in the furnace is effectively monitored, and the safety of the technological process and the product percent of pass are ensured.
The above and other objects, advantages and features of the present invention will become more apparent to those skilled in the art from the following detailed description of specific embodiments thereof, taken in conjunction with the accompanying drawings.
Drawings
FIG. 1 is a schematic structural view of an embodiment of a vertical high-temperature oxidation furnace according to the present invention;
FIG. 2 is a schematic view of the structure shown at A in FIG. 1;
FIG. 3 is a schematic view of the structure shown at B in FIG. 1;
the device comprises a furnace bottom flange 1, a furnace door chamber 2, a furnace door 3, a furnace door 4, a furnace shell 5, a furnace cover 6, a process furnace tube 7, a pressing flange 8, a heat preservation layer 9, a heating cavity 10, a heater 11, a process cavity 12, a furnace shell vacuum tube 13, a furnace shell air inlet tube 14, a process cavity vacuum tube 15, a process cavity air inlet tube 16, a process cavity air outlet tube 17, a lifting mechanism 18, a manipulator 19, a furnace door supporting and mounting seat 20, an elastic element 21, a heater electrode 22, an electrode water cooling seal sleeve 23, a wiring device 24, a heat preservation layer 25, a heat insulation screen 26, a bearing tray 27, a sheet boat 28, an inner heat control couple 29, an outer heat control couple 30, a water cooling seal seat 81, a furnace cover heat preservation layer 82, a furnace shell heat preservation layer 83 and a furnace bottom heat preservation layer.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-3, a vertical high-temperature oxidation annealing furnace according to a first embodiment of the present invention includes a vacuum-sealed furnace chamber, a furnace door chamber 2 connected to the vacuum-sealed furnace chamber through a furnace door flange 1, an opening at the bottom of the furnace door chamber 2 is sealed by a furnace door 3, the vacuum-sealed furnace chamber is a space formed by sealing a furnace shell 4, a furnace cover 5, the furnace bottom flange 1, and a process furnace tube 6, the process furnace tube 6 is press-fitted with a gasket on the bottom surface of the furnace bottom flange 1 through a hold-down flange 7, seal rings are disposed between the furnace shell 4 and the furnace cover 5, between the furnace shell 4 and the furnace bottom flange 1, and between the furnace door chamber 2 and the furnace bottom flange 1, a heat insulation layer 8 is further disposed in the vacuum-sealed furnace chamber, a heating cavity 9; the process furnace tube 6, the furnace bottom flange 1, the furnace door chamber 2 and the furnace door 3 are sealed to form a process cavity 11 for carrying out the process of the process sheet;
it should be noted that the bottom opening of the furnace door 2 is sealed by the furnace door 3 in the process stage, and at this time, the process chamber 11 needs to be sealed to create a vacuum environment so as to ensure the purity of the product when the process gas is filled in the process. The heater 10 is usually made of high temperature heaters such as tungsten, molybdenum and graphite materials, so that the heating temperature can reach 1400-2000 ℃.
A furnace shell vacuum pipe 12 and a furnace shell air inlet pipe 13 are respectively arranged through the insulating layer 8 and the furnace shell 4 and are used for realizing the formation of a vacuum state of the vacuum sealed furnace chamber, for the reason of the material of the heater 10, for example, tungsten is very easy to oxidize when working at high temperature in an oxidizing gas space, and the working performance of the tungsten is affected, so that the vacuum environment of the vacuum sealed furnace chamber needs to be created, the furnace shell air inlet pipe 13 is used for filling inert gas, such as Ar2 or N2, into the vacuum sealed furnace chamber, and the working environment of the heater 10 is further ensured to have no oxidizing gas;
a process cavity vacuum tube 14 is arranged through one side of the furnace door chamber 2 and used for realizing the vacuum state of the process cavity, a process cavity air inlet tube 15 is arranged at the other side and used for filling process gas into the process cavity 11, and a process cavity air outlet tube 16 is used for discharging gas generated in the process.
It should be noted that, the whole vertical high-temperature oxidation annealing furnace is supported by a frame (not marked in the figure), and a pressing flange 7 at the end of a process furnace tube 6 is connected with a furnace bottom flange 1 in a water-cooling sealing manner; the furnace door chamber 2 is respectively connected with the furnace bottom flange 1 and the furnace door 3 in a water-cooling sealing way, so that the sealing device is effectively prevented from being influenced by high temperature; the process chamber gas inlet pipe 15 vertically extends to the top of the working area of the process furnace pipe along one side of the inner surface of the process furnace pipe 6, extends into the working area at the inner side of the process furnace pipe 6 and is used for the gas inlet of the process gas, and the process chamber gas inlet pipe 15 and the process chamber gas outlet pipe 16 are arranged at the same side, so that the process gas is ensured to effectively circulate for a circle in the process chamber 11, and the processing uniformity of the process wafer is ensured.
In a second embodiment, the vertical high-temperature oxidation and annealing furnace further comprises a lifting mechanism 17 and a manipulator 18 which are arranged at the lower end of the vacuum sealed furnace chamber, wherein a furnace door supporting and mounting seat 19 is arranged on the lifting mechanism 17 and used for mounting the furnace door 3 and driving the furnace door 3 to move up and down through the lifting mechanism 17, and the manipulator 18 is used for taking and placing the process piece when the furnace door 3 moves to a working lower limit position through the lifting mechanism 17.
Specifically, the lifting mechanism 17 can be composed of a common up-down linear moving unit, a guide rail, a lead screw, a slider and a driving motor, and can drive the furnace door supporting mounting seat 19 to move up and down in a controllable manner, so as to drive the furnace door 3 to open and close the furnace.
Furthermore, an elastic element 20, such as a spring, is arranged between the oven door support mounting seat 19 and the oven door 3, and is used for sealing the process cavity when the oven door 3 moves to the upper limit position through the lifting mechanism on one hand, because a gap may be formed on the contact surface of the oven door 3 and the oven door chamber 2, the oven door 3 is a rigid element, and the elastic elements such as the spring and the like can be used for leveling the joint surface to avoid the gap, on the other hand, the elastic element 19 prevents the oven door 3 from moving upwards along with the lifting mechanism 17 to be in sealing fit with the lower plane of the oven door chamber 2, although the position is provided with a sensor for identifying the limit to stop the motor (not shown), the elastic action of the elastic element can be used for avoiding the motor from being burnt due to the untimely stop of the driving motor of the lifting mechanism 17.
The third embodiment is based on the first embodiment, the heat preservation layer 8 is composed of a furnace cover heat preservation layer 81, a furnace shell heat preservation layer 82 and a furnace bottom heat preservation layer 83, the structure of three groups of heat preservation layers is adopted, the difficulty of the heat preservation layer manufacturing process is greatly reduced, the combination surfaces of the three groups of heat preservation layers are arranged into step-shaped combination surfaces, the internal temperature is prevented from being dispersed from the combination surfaces, the furnace cover heat preservation layer 81 and the furnace cover 5 are fixedly combined into a whole, the heater 10 is hung in a heating cavity through the furnace cover 5, the furnace cover heat preservation layer 81 and the heater electrode 21 of the insulating long sleeve sleeved with the same hole, and the heater 10 is arranged in a hanging.
Further, an electrode water-cooling sealing sleeve 22 is sleeved at the outer end of the heater electrode 21, the heater electrode 21 and the electrode water-cooling sealing sleeve 22 are sealed through a sealing ring, the electrode water-cooling sealing sleeve 22 is fixedly connected with the furnace cover 5 through the sealing ring, and a wiring device 23 is further arranged outside the upper end of the heater electrode 21 and used for being externally connected with a power supply.
In the fourth embodiment, based on the first embodiment, a thermal insulation layer 24, such as a quartz thermal insulation bag, is installed on the furnace door 3 in a planar positioning manner and is used for low-temperature thermal insulation/heat insulation, a thermal insulation screen 25 is installed on the thermal insulation layer 24 in a planar positioning manner and is a layered thermal insulation sheet assembly and is used for high-temperature thermal insulation/heat insulation, the thermal insulation screen 25 is installed on the upper planar positioning manner and is provided with a bearing tray 26, a sheet boat 27 is installed on the bearing tray 26 in a positioning manner, a process sheet is inserted into a slot in the sheet boat 27, and the area where the process sheet is located is the most core process diffusion/oxidation/annealing area, so that a diffusion, oxidation/annealing process or annealing process for the process sheet is realized.
In the fifth embodiment, based on the first embodiment, an inner thermal control couple 28 is hermetically installed on the cylindrical inner wall of the furnace door chamber 2, the inner thermal control couple vertically extends to the working area of the process furnace tube along one side of the inner surface of the process furnace tube 6, an outer thermal control couple 29 is arranged through the furnace cover 5 and the furnace cover insulating layer 81, a thermal couple water-cooling sealing seat 30 is sleeved at the outer end of the outer thermal control couple 29, the water-cooling sealing seat 30 and the outer thermal control couple 29 are sealed through a sealing ring, and the water-cooling sealing seat 30 and the furnace cover 5 are fixedly connected through the sealing ring. The inner control thermocouple 28 and the outer control thermocouple 29 are used for detecting the temperature in the furnace and performing accurate control.
The scope of the invention is indicated by the appended claims rather than by the foregoing description, and all changes that come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims (10)

1. A vertical high-temperature oxidation annealing furnace comprises a vacuum sealing hearth, a furnace door chamber (2) connected with the vacuum sealing hearth through a furnace bottom flange (1), an opening at the bottom of the furnace door chamber (2) is sealed through a furnace door (3),
the vacuum sealed hearth is characterized in that the vacuum sealed hearth is a space formed by sealing a furnace shell (4), a furnace cover (5), a furnace bottom flange (1) and a process furnace tube (6), the process furnace tube (6) is pressed on the bottom surface of the furnace bottom flange (1) through a pressing flange (7), sealing rings are arranged between the furnace shell (4) and the furnace cover (5), between the furnace shell (4) and the furnace bottom flange (1), and between the furnace door chamber (2) and the furnace bottom flange (1), a heat preservation layer (8) is arranged in the vacuum sealed hearth, a heating cavity (9) is formed between the heat preservation layer and the process furnace tube, and a heater (10) is arranged in the heating cavity (9);
the process furnace tube (6), the furnace bottom flange (1), the furnace door chamber (2) and the furnace door (3) are sealed to form a process cavity (11) for carrying out the process of the process sheet;
a furnace shell vacuum tube (12) is arranged through the heat-insulating layer (8) and the furnace shell (4) and used for realizing the vacuum state of the vacuum sealed hearth, and a furnace shell air inlet tube (13) is used for filling inert gas into the vacuum sealed hearth;
a process cavity vacuum tube (14) is arranged through one side of the furnace door chamber and used for realizing the vacuum state of the process cavity, a process cavity air inlet tube (15) is arranged at the other side of the furnace door chamber and used for filling process gas into the process cavity, and a process cavity air outlet tube (16) is used for discharging gas generated in the process.
2. The vertical high-temperature oxidation and annealing furnace according to claim 1, further comprising a lifting mechanism (17) and a manipulator (18) arranged at the lower end of the vacuum-tight furnace chamber, wherein the lifting mechanism is provided with a furnace door support mounting seat (19) for mounting the furnace door and driving the furnace door to move up and down through the lifting mechanism, and the manipulator is used for picking and placing the process sheets when the furnace door moves to a working lower limit position through the lifting mechanism.
3. A vertical high temperature oxidation, annealing furnace according to claim 2, characterized in that between the furnace door support mounting (19) and the furnace door (3) there is provided an elastic element (20) for sealing the process chamber when the furnace door is moved to the upper working limit by the lifting mechanism.
4. The vertical high-temperature oxidation and annealing furnace according to claim 1, wherein the insulating layer is formed by a furnace cover insulating layer (81), a furnace cover insulating layer (82) and a furnace bottom insulating layer (83) integrally through a stepped joint surface, the furnace cover insulating layer (81) is fixedly connected with the furnace cover (5), and the heater (10) is suspended in the heating chamber through a heater electrode (21) penetrating through the furnace cover and the furnace cover insulating layer.
5. The vertical high-temperature oxidation and annealing furnace according to claim 4, wherein an electrode water-cooling sealing sleeve (22) is sleeved at the outer end of the heater electrode (21), the heater electrode (21) and the electrode water-cooling sealing sleeve are sealed through a sealing ring, the electrode water-cooling sealing sleeve (22) is fixedly connected with the furnace cover (5) through the sealing ring, and a wiring device (23) is further arranged outside the upper end of the heater electrode and used for being externally connected with a power supply.
6. The vertical high-temperature oxidation annealing furnace according to claim 1, characterized in that a heat insulation layer (24), a heat shield (25), a bearing tray (26) and a sheet boat (27) are sequentially arranged in the process chamber from bottom to top and carried by the furnace door, and the process sheet is inserted on the sheet boat (27).
7. The vertical high temperature oxidation annealing furnace according to claim 6, wherein the thermal insulation layer is a quartz thermal insulation pack, and the heat shield is a layered thermal insulation sheet assembly.
8. The vertical high-temperature oxidation and annealing furnace according to claim 1, wherein an inner thermocouple (28) is hermetically mounted on the inner wall of the cylinder of the furnace door chamber, the inner thermocouple vertically extends to the working area of the process furnace tube along one side of the inner surface of the process furnace tube, an outer thermocouple (29) is arranged through the furnace cover and the heat-insulating layer, a thermocouple water-cooling seal seat (30) is sleeved on the outer end of the outer thermocouple furnace, the water-cooling seal seat and the outer thermocouple are sealed through a seal ring, and the water-cooling seal seat (30) is fixedly connected with the furnace cover (5) through a seal ring.
9. The vertical high temperature oxidation annealing furnace according to claim 1, wherein the process chamber inlet pipe extends vertically along one side of the inner surface of the process furnace tube to the top of the working area of the process furnace tube.
10. The vertical high temperature oxidation annealing furnace according to claim 1, wherein the inert gas comprises one of Ar2 or N2.
CN202110191565.2A 2021-02-19 2021-02-19 Vertical high-temperature oxidation annealing furnace Pending CN112833661A (en)

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Application Number Priority Date Filing Date Title
CN202110191565.2A CN112833661A (en) 2021-02-19 2021-02-19 Vertical high-temperature oxidation annealing furnace

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Application Number Priority Date Filing Date Title
CN202110191565.2A CN112833661A (en) 2021-02-19 2021-02-19 Vertical high-temperature oxidation annealing furnace

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CN112833661A true CN112833661A (en) 2021-05-25

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CN202110191565.2A Pending CN112833661A (en) 2021-02-19 2021-02-19 Vertical high-temperature oxidation annealing furnace

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